TW535692U - Improved polishing and positioning ring for wafer - Google Patents

Improved polishing and positioning ring for wafer

Info

Publication number
TW535692U
TW535692U TW90222328U TW90222328U TW535692U TW 535692 U TW535692 U TW 535692U TW 90222328 U TW90222328 U TW 90222328U TW 90222328 U TW90222328 U TW 90222328U TW 535692 U TW535692 U TW 535692U
Authority
TW
Taiwan
Prior art keywords
wafer
positioning ring
improved polishing
polishing
improved
Prior art date
Application number
TW90222328U
Other languages
English (en)
Inventor
Shui-Sheng Chen
Chih-I Peng
Original Assignee
Shui-Sheng Chen
Chih-I Peng
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shui-Sheng Chen, Chih-I Peng filed Critical Shui-Sheng Chen
Priority to TW90222328U priority Critical patent/TW535692U/zh
Publication of TW535692U publication Critical patent/TW535692U/zh

Links

TW90222328U 2001-12-19 2001-12-19 Improved polishing and positioning ring for wafer TW535692U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW90222328U TW535692U (en) 2001-12-19 2001-12-19 Improved polishing and positioning ring for wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW90222328U TW535692U (en) 2001-12-19 2001-12-19 Improved polishing and positioning ring for wafer

Publications (1)

Publication Number Publication Date
TW535692U true TW535692U (en) 2003-06-01

Family

ID=29213153

Family Applications (1)

Application Number Title Priority Date Filing Date
TW90222328U TW535692U (en) 2001-12-19 2001-12-19 Improved polishing and positioning ring for wafer

Country Status (1)

Country Link
TW (1) TW535692U (zh)

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