TW549184U - Grinding position ring for wafer - Google Patents

Grinding position ring for wafer

Info

Publication number
TW549184U
TW549184U TW91212575U TW91212575U TW549184U TW 549184 U TW549184 U TW 549184U TW 91212575 U TW91212575 U TW 91212575U TW 91212575 U TW91212575 U TW 91212575U TW 549184 U TW549184 U TW 549184U
Authority
TW
Taiwan
Prior art keywords
wafer
position ring
grinding position
grinding
ring
Prior art date
Application number
TW91212575U
Other languages
Chinese (zh)
Inventor
Jen-Huei Liou
Original Assignee
Shang Yuan Machinery Co Ltd
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shang Yuan Machinery Co Ltd filed Critical Shang Yuan Machinery Co Ltd
Priority to TW91212575U priority Critical patent/TW549184U/en
Publication of TW549184U publication Critical patent/TW549184U/en

Links

TW91212575U 2002-08-13 2002-08-13 Grinding position ring for wafer TW549184U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW91212575U TW549184U (en) 2002-08-13 2002-08-13 Grinding position ring for wafer

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW91212575U TW549184U (en) 2002-08-13 2002-08-13 Grinding position ring for wafer

Publications (1)

Publication Number Publication Date
TW549184U true TW549184U (en) 2003-08-21

Family

ID=29998325

Family Applications (1)

Application Number Title Priority Date Filing Date
TW91212575U TW549184U (en) 2002-08-13 2002-08-13 Grinding position ring for wafer

Country Status (1)

Country Link
TW (1) TW549184U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9937601B2 (en) 2003-11-13 2018-04-10 Applied Materials, Inc. Retaining ring with Shaped Surface
US11260500B2 (en) 2003-11-13 2022-03-01 Applied Materials, Inc. Retaining ring with shaped surface

Cited By (5)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US9937601B2 (en) 2003-11-13 2018-04-10 Applied Materials, Inc. Retaining ring with Shaped Surface
US10766117B2 (en) 2003-11-13 2020-09-08 Applied Materials, Inc. Retaining ring with shaped surface
US11260500B2 (en) 2003-11-13 2022-03-01 Applied Materials, Inc. Retaining ring with shaped surface
US11577361B2 (en) 2003-11-13 2023-02-14 Applied Materials, Inc. Retaining ring with shaped surface and method of forming
US11850703B2 (en) 2003-11-13 2023-12-26 Applied Materials, Inc. Method of forming retaining ring with shaped surface

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