TW505311U - Fixing ring structure for wafers - Google Patents

Fixing ring structure for wafers

Info

Publication number
TW505311U
TW505311U TW90215969U TW90215969U TW505311U TW 505311 U TW505311 U TW 505311U TW 90215969 U TW90215969 U TW 90215969U TW 90215969 U TW90215969 U TW 90215969U TW 505311 U TW505311 U TW 505311U
Authority
TW
Taiwan
Prior art keywords
wafers
ring structure
fixing ring
fixing
ring
Prior art date
Application number
TW90215969U
Other languages
Chinese (zh)
Inventor
Peng-Chang Li
Jian-Ming Tang
Huan-Lin Yang
Wen-Chiuan Liu
Jung-Chian Liu
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW90215969U priority Critical patent/TW505311U/en
Publication of TW505311U publication Critical patent/TW505311U/en

Links

TW90215969U 2001-09-19 2001-09-19 Fixing ring structure for wafers TW505311U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW90215969U TW505311U (en) 2001-09-19 2001-09-19 Fixing ring structure for wafers

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW90215969U TW505311U (en) 2001-09-19 2001-09-19 Fixing ring structure for wafers

Publications (1)

Publication Number Publication Date
TW505311U true TW505311U (en) 2002-10-01

Family

ID=27608391

Family Applications (1)

Application Number Title Priority Date Filing Date
TW90215969U TW505311U (en) 2001-09-19 2001-09-19 Fixing ring structure for wafers

Country Status (1)

Country Link
TW (1) TW505311U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD194249S (en) 2018-03-06 2018-11-21 大晟科技股份有限公司 Wafer clamp ring

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWD194249S (en) 2018-03-06 2018-11-21 大晟科技股份有限公司 Wafer clamp ring

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004
MM4K Annulment or lapse of a utility model due to non-payment of fees