TW470215U - Fixing structure of planetary-rotation type wafer carrier - Google Patents

Fixing structure of planetary-rotation type wafer carrier

Info

Publication number
TW470215U
TW470215U TW90200093U TW90200093U TW470215U TW 470215 U TW470215 U TW 470215U TW 90200093 U TW90200093 U TW 90200093U TW 90200093 U TW90200093 U TW 90200093U TW 470215 U TW470215 U TW 470215U
Authority
TW
Taiwan
Prior art keywords
planetary
fixing structure
wafer carrier
rotation type
type wafer
Prior art date
Application number
TW90200093U
Other languages
Chinese (zh)
Inventor
Jiun-Jie Li
Hua-Ren Tzeng
Sheng-Feng Hung
Yu-Hua Ye
Original Assignee
Mosel Vitelic Inc
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Mosel Vitelic Inc filed Critical Mosel Vitelic Inc
Priority to TW90200093U priority Critical patent/TW470215U/en
Publication of TW470215U publication Critical patent/TW470215U/en

Links

TW90200093U 2001-01-03 2001-01-03 Fixing structure of planetary-rotation type wafer carrier TW470215U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW90200093U TW470215U (en) 2001-01-03 2001-01-03 Fixing structure of planetary-rotation type wafer carrier

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW90200093U TW470215U (en) 2001-01-03 2001-01-03 Fixing structure of planetary-rotation type wafer carrier

Publications (1)

Publication Number Publication Date
TW470215U true TW470215U (en) 2001-12-21

Family

ID=21680211

Family Applications (1)

Application Number Title Priority Date Filing Date
TW90200093U TW470215U (en) 2001-01-03 2001-01-03 Fixing structure of planetary-rotation type wafer carrier

Country Status (1)

Country Link
TW (1) TW470215U (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI664305B (en) * 2018-11-13 2019-07-01 聚昌科技股份有限公司 Three dimension revolution and rotation deposition turntable structure

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI664305B (en) * 2018-11-13 2019-07-01 聚昌科技股份有限公司 Three dimension revolution and rotation deposition turntable structure

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004
MM4K Annulment or lapse of a utility model due to non-payment of fees