TW470215U - Fixing structure of planetary-rotation type wafer carrier - Google Patents
Fixing structure of planetary-rotation type wafer carrierInfo
- Publication number
- TW470215U TW470215U TW90200093U TW90200093U TW470215U TW 470215 U TW470215 U TW 470215U TW 90200093 U TW90200093 U TW 90200093U TW 90200093 U TW90200093 U TW 90200093U TW 470215 U TW470215 U TW 470215U
- Authority
- TW
- Taiwan
- Prior art keywords
- planetary
- fixing structure
- wafer carrier
- rotation type
- type wafer
- Prior art date
Links
Priority Applications (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW90200093U TW470215U (en) | 2001-01-03 | 2001-01-03 | Fixing structure of planetary-rotation type wafer carrier |
Applications Claiming Priority (1)
Application Number | Priority Date | Filing Date | Title |
---|---|---|---|
TW90200093U TW470215U (en) | 2001-01-03 | 2001-01-03 | Fixing structure of planetary-rotation type wafer carrier |
Publications (1)
Publication Number | Publication Date |
---|---|
TW470215U true TW470215U (en) | 2001-12-21 |
Family
ID=21680211
Family Applications (1)
Application Number | Title | Priority Date | Filing Date |
---|---|---|---|
TW90200093U TW470215U (en) | 2001-01-03 | 2001-01-03 | Fixing structure of planetary-rotation type wafer carrier |
Country Status (1)
Country | Link |
---|---|
TW (1) | TW470215U (en) |
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI664305B (en) * | 2018-11-13 | 2019-07-01 | 聚昌科技股份有限公司 | Three dimension revolution and rotation deposition turntable structure |
-
2001
- 2001-01-03 TW TW90200093U patent/TW470215U/en not_active IP Right Cessation
Cited By (1)
Publication number | Priority date | Publication date | Assignee | Title |
---|---|---|---|---|
TWI664305B (en) * | 2018-11-13 | 2019-07-01 | 聚昌科技股份有限公司 | Three dimension revolution and rotation deposition turntable structure |
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Legal Events
Date | Code | Title | Description |
---|---|---|---|
GD4K | Issue of patent certificate for granted utility model filed before june 30, 2004 | ||
MM4K | Annulment or lapse of a utility model due to non-payment of fees |