TW533318B - Automatic die testing apparatus - Google Patents

Automatic die testing apparatus Download PDF

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Publication number
TW533318B
TW533318B TW90111377A TW90111377A TW533318B TW 533318 B TW533318 B TW 533318B TW 90111377 A TW90111377 A TW 90111377A TW 90111377 A TW90111377 A TW 90111377A TW 533318 B TW533318 B TW 533318B
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Taiwan
Prior art keywords
platform
test
die
ascending
machine
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TW90111377A
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Chinese (zh)
Inventor
Liang-Hung Du
Original Assignee
Ding Tse Technology Co Ltd
Liang-Hung Du
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Priority to TW90111377A priority Critical patent/TW533318B/en
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Publication of TW533318B publication Critical patent/TW533318B/en

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Abstract

An automatic die testing apparatus capable of performing a testing operation onto plural units of dies at the same time is provided in the present invention. The main structure of the invention is described as follows. Plural parallel testing machines are disposed in the platen. The sliding-platform moving forward and backward includes the Y-axis moving platform, which is driven by a Y-axis step motor. The sliding-platform moving left and right, which includes an X-axis moving platform driven by an X-axis step motor, is disposed on the Y-axis moving platform. In addition, a rotation carrying-platform driven by a step motor is disposed on the X-axis moving platform; and the rising mechanism is driven by air pressure cylinder. For the rotation carrying-platform, the ascending path is set by incorporating the ascending stop lump and the ascending limit lump included in the ascending mechanism and the ascending fine-tune mechanism. For the descending, the descending path is set by incorporating the descending stop lump and the descending limit lump, and is provided for the user to adjust a path in accordance with the work. Additionally, a testing machine is disposed at the rear side of the rotation carrying-platform such that the chip can be sent to the testing needle board through the structure stated above after the chip is placed in the rotation carrying-platform. The adjustment and confirmation during the period are calibrated by the computer positioning-module. Furthermore, the invention is assembled in parallel such that the occupied area is decreased by more than a quarter and it is beneficial for placement of the testing machine. Moreover, plural kinds of structures can be very easily assembled from the simplification of the basic structure. Therefore, the application circuit with wider range can be constructed quickly so as to effectively reduce the production cost and raise the production efficiency for reaching the purpose of increasing the production competition-force.

Description

533318533318

《發明背景》 位以2 _試方式慣以人工方式使用,其係將該待測試晶 Ϊ = ΐ方式放置於該測試機之正確測試點上,然該人工 、^妨古產生祆差,其誤差之產生在於置放時位置不正確 直双方向錯誤等等。 因而=用測試機測試時,因測試手續過於繁複不便, 轰& 2沾5午多的生產工時,進而降低生產效率、增加生 非常不JL開銷,故生產時所耗費的成本較高、時間較長, 非吊不具經濟效益; 因此如何提供一 疋為激發本案發明 種可解決上述問題之多 人之發明動機。 晶粒模組器件 《發明 有 經驗、 之目的 來技術 其 該機台 包括有 Υ軸移 其係由 轉載台 由氣壓 機構所 曰的》 鑑於此, 及不斷的 乃在提供 的缺點; 係可同時 中設置有 υ軸移動 動平台上 一 X軸步 ,該旋轉 缸驅動, 包括之上 從事相關行業多年 得以誕生,其首要 ’也同時解決了原 測試動作,其係於 中該前後移動滑台 進馬達驅動,而$亥 有X抽移動平台’ 移動平台上設有旋 動、而上升機構則 升機構及上升微調 配合設定其上升路 本案發明人乃以其本身 思慮研究,終使本發明 一種自動晶粒測試裝置"Background of the Invention" The bit is used in the manual mode in the 2_test mode, which is to place the crystal to be tested on the correct test point of the test machine. The error is caused by incorrect position and two-way errors during placement. Therefore = when testing with a test machine, because the test procedures are too complicated and inconvenient, the production time is more than 5 pm, which further reduces production efficiency and increases JL overhead, so the cost of production is higher, It takes a long time, and non-hanging is not economically beneficial; therefore, how to provide a motive for the invention of many people who can solve the above problems by stimulating the invention of this case. Die module device "Invented with experience, the purpose to technology. The machine includes a yaw axis, which is referred to by the transfer platform by the pneumatic mechanism." In view of this, and the constant shortcomings of the provision; There is an X-axis step on the υ-axis moving platform. The rotary cylinder drive, including those engaged in related industries, has been born for many years. Its primary 'also solves the original test action, which is connected to the forward and backward moving slide table. It is driven by a motor, and the rotating platform is equipped with a rotation mechanism, and the lifting mechanism is equipped with a lifting mechanism and a fine-tuning adjustment to set its rising path. The inventor of this case studied it with his own considerations, and finally made the invention an automatic Die testing device

第5頁 對多個單元之晶粒做一 數台平行之測試機,其 平台,其係由一 Υ轴步 設有左右移動滑台包括 進馬達驅動,又該X車由 載台係由一步進馬達驅 且其旋轉載台可藉由上 升止檔塊與上升極限塊 533318 瓦丫1修正」 案號 90111377 年月曰 五、發明說明(2) 徑,而下降時有一下降止檔塊與一下降極限塊配合設定其 下降路徑,供使用者所需配合工作調整路徑,又該旋轉载 台後方另設有一測試機,俾當該晶粒置入該旋轉載台後, 該旋轉載台便可藉由上述結構將該晶粒送至測試針板,期 間之調整與確認便藉由該電腦定位模組校正。 另外,本發明係平行裝配,其佔用之面積減少到四分 之〆以下’非常有利於遠測试機置放;又,如上所述,從 基本結構的簡化,很容易配合組裝出多種的結構,並可簡 單快速的構造出範圍較廣之應用線路,進而有效降低生產 成本,並提升生產效率,增加產生上之競爭力為其目的者 《技術内容、特點及功效》 為使貴審查委員方便了解本發明之内容,及所能達 成之功效、茲配合圖式列舉-具體實施例,詳細介紹說明 如下· _號説明 1 ° °測試針板及測試機 2 ° °上升機構及上升微調機構 3 ° °電腦定位模組 4 ° °前後移動滑台 5 。°左右移動滑台 6。 °旋轉載台 7。 。A組原位On page 5, a number of parallel test machines are made for the grains of multiple units. The platform is driven by a Z axis step with left and right moving slides including motors, and the X car is driven by the carrier system. Into the motor drive and its rotating stage can be corrected by the ascending stop block and ascending limit block 533318 watt 1 "case number 90111377 5th, invention description (2) diameter, and when descending there is a descending stop and a The descending limit block cooperates to set its descending path for the user to adjust the path in accordance with the work. There is also a test machine behind the rotary carrier. When the die is placed in the rotary carrier, the rotary carrier can The die is sent to the test pin plate by the above structure, and the adjustment and confirmation during the period are corrected by the computer positioning module. In addition, the present invention is assembled in parallel, and the area occupied by the invention is reduced to less than one-fourth of a quarter ', which is very conducive to the placement of a remote test machine; as mentioned above, from the simplification of the basic structure, it is easy to cooperate to assemble a variety of structures. , And can quickly and easily construct a wide range of application lines, which can effectively reduce production costs, improve production efficiency, and increase competitiveness in production. "Technical content, characteristics and effects" as its purpose Understand the content of the present invention, and the effects that can be achieved, and are listed with drawings-specific examples, detailed descriptions are as follows: _ number description 1 ° ° test needle plate and test machine 2 ° ° rising mechanism and rising fine adjustment mechanism 3 ° ° Computer positioning module 4 ° ° Slide table 5 back and forth. ° Move the slide table left and right 6. ° Rotating stage 7. . Group A in situ

第6頁 533318 案號 90111377 A_ 年 五、發明說明(3) 8 9 10 11 12 13 14 7 8 9 0 已有測試晶粒 放料 影像定位 補正 移至測試針板 上升 測試機開機 測試結果輸出 測試結果讀取 測試機關機 下降、顯示分類燈號 回歸原位 依燈號分類 圖不說明 第一圖係為晶粒測試裝置組織架構圖 第二圖係為本發明單元位置示意圖。 第三圖係為晶粒測試裝置動作流程圖 如圖一、二所示,一種自動晶粒測試裝置,其係可同 時對多個單元之晶粒做一測試動作,其係於該機台中設置 有數台平行之測試機,其中該前後移動滑台4包括有Y軸 移動平台,其係由一 Y軸步進馬達驅動,而該Y轴移動平 台上設有左右移動滑台5包括有X轴移動平台,其係由一 X轴步進馬達驅動,又該X軸移動平台上設有旋轉載台Page 6 533318 Case No. 90111377 A_ Year V. Description of the invention (3) 8 9 10 11 12 13 14 7 8 9 0 Existing test grain unloading image positioning correction moved to the test pin plate ascending tester startup test result output test Results The reading test machine is down and the display classification lights return to their original positions. The classification diagram according to the lights does not explain. The first diagram is a diagram of the organization structure of the die testing device. The second diagram is a schematic diagram of the unit location of the present invention. The third figure is the operation flow chart of the die test device. As shown in Figures 1 and 2, an automatic die test device can perform a test operation on the die of multiple units at the same time. It is set in the machine. There are several parallel testing machines, in which the forward-backward moving slide 4 includes a Y-axis moving platform, which is driven by a Y-axis stepping motor, and the Y-axis moving platform is provided with a left-right moving slide 5 including an X-axis. The mobile platform is driven by an X-axis stepping motor, and a rotary stage is provided on the X-axis mobile platform

第7頁 533318 曰 ___ 案號 Q0111377 五、發明說明(4) 6 ,該旋轉載台6 氣壓虹驅動,且豆 機構2所包括^__t. 路徑,而下降時有 其下降路徑,供使 載台2後方另設有 6後,該旋轉載台 針板1 ,期間之調 正0 係由一步進馬達驅動 旋轉載台6可藉由上 升止槽塊與上升極限 一下降止檔塊與一不 用者所需配合工作調 一測試機,俾當該晶 6便可藉由上述結構 整與確認便藉由該電 、而上升機構則由 升機構及上升微調 塊配合設定其上升 降極限塊配合設定 整路徑,又該旋轉 粒置入該旋轉載台 將該晶粒送至測試 腦定位模組3校 如 有測試 放料9 試位置 著該旋 待測位 試結果 該測試 該旋轉 之 另 以 基本結 單快速 成本, 圖二所示 晶粒8直 ,藉由機 在藉由電 轉平台將 置,此時 輸出1 5 機關機1 載台回原 外,本發 下,非常 構的簡化 的構造出 並提升生 接依燈號 台之影像 腦補正1 该晶粒移 測試機開 ,由機台 7,旋轉 位1 9, 明係平行 有利於該 ’很容易 範圍較廣 產效率, 分類2 定位1 1,使 動至測 機1 4 之電腦 平台下 依燈號 裝配, 測試機 配合組 之應用 立曾力口產 〇,如未有 0使該晶粒 其每次位置 武針板1 2 5亥晶粒經 將該測試結 降、顯示分 分類2 〇完 其佔用之面 置放;又, 裝出多種的 線路,進而 生上之競爭 組原位 晶粒’ 可正確 皆能正 ,上升 測試後 果讀取 類燈號 成測試 積減少 如上所 結構, 有效降 力為其 7,如 便執行 至該測 確,接 1 3之 ,其測 16, 18, 程序。 到四分 述,從 並可簡 低生產 目的者Page 7 533318 ___ Case No. Q0111377 V. Description of the invention (4) 6, the rotary stage 6 is driven by the air pressure iris, and the bean mechanism 2 includes the ^ __ t. Path, and there is a descending path for the carrier when descending. After the second stage is provided with another 6, the rotary stage needle plate 1 is adjusted by a stepper motor. The rotary stage 6 can be driven by a rising stop groove block and a rising limit, a falling stop block and an unused one. The tester needs to cooperate to adjust a test machine. When the crystal 6 can be adjusted and confirmed by the above structure, the electric power can be used, and the lifting mechanism can be set by the lifting mechanism and the lifting fine-tuning block. Complete the path, and the rotating particles are placed in the rotating stage to send the die to the test brain positioning module 3 if there is a test discharge 9 test position with the rotation to be tested results of the test the rotation and other basic The cost of the statement is fast. The die shown in Figure 2 is straight, and the machine will be set by the electric conversion platform. At this time, the output will be 15 and the machine 1 will be returned to the original platform. The structure is very simplified and simplified. And improve the image brain Correction 1 The grain shift tester is turned on, and the machine 7 and the rotation position 19 are parallel. It is beneficial to the 'easy range and wide production efficiency. Classification 2 Position 1 1 and move to the computer of the test machine 1 4 The platform is assembled according to the light signal, and the test machine cooperates with the application of the group to produce it. If there is no 0, the chip will be placed at each position. Classification 2 〇 Finish the placement of the occupied area; In addition, install a variety of circuits, and then generate the in-situ grains of the competition group. It can be positive and correct. The results of the rising test can be read as the test product. Structure, the effective force reduction is 7, if it is performed until the test is confirmed, then connect to 1 of 3, and its test is 16, 18, program. To quarters, from and can reduce production goals

533 318 友、 i 號 90I1M77 發明說明(5) 年533 318 Friends, i 90I1M77 Description of invention (5) years

為使本發明更加顯現出其進步性與實用性, 點列舉如下·· 竹/、丨炎 1 、平行裝配,其佔用之面積減少,非常有利於嗜測 試機置放。 ' σ 2 基本結構的簡化,很容易配合組裝出多種的結構 並可簡單快速的構造出範圍較廣之應用線路。 有效降低生產成本。 4 有效提升測試效率。 增加生產上之競爭力。 由於無需過多人工,故使本發明易於大量測試、 測試周期縮短。 具產業利用價值。 具實用性。 以上所述’僅係本發明之較佳實施例而已,舉凡利用 本發明上述之技術及方法所做之變化,均應包含於發明之 權利範圍。 綜上所述’本發明減已符合發明專利之申請要件,爰 依法提出申請’祈凊鈞局審查委員明鑑,並賜予本發明 專利權,實感德便。In order to make the present invention more show its progress and practicability, the points are listed as follows: Bamboo /, Yan 1, parallel assembly, the area occupied by it is reduced, which is very conducive to the placement of the test-testing machine. The simplification of the basic structure of σ 2 makes it easy to assemble a variety of structures and construct a wide range of application lines simply and quickly. Effectively reduce production costs. 4 Effectively improve test efficiency. Increase competitiveness in production. Because there is no need for excessive labor, the present invention is easy to test in large numbers and the test period is shortened. With industrial use value. Practical. The above-mentioned 'are only the preferred embodiments of the present invention. For example, any changes made by using the above-mentioned techniques and methods of the present invention should be included in the scope of rights of the invention. To sum up, ‘the present invention has already met the application requirements for invention patents, 提出 apply in accordance with the law’ and pray to the examiners of the Bureau to give the patent right of the invention.

第9頁Page 9

Claims (1)

533318 H 90111377 六、申請專利範圍533318 H 90111377 6.Scope of patent application 之曰^故自動晶粒測試裝置,其係可同時對多個單元 測試機,其中該前後移動滑台包台平行之 由-γ轴步進馬達驅動,而該=動平台,其係 動滑台包括有X軸移動平台,其係::::上設有左右移 ,又該X軸移動平台上設有旋 ^步進馬達驅動 步進馬達驅動、而上井機槿則ά i D,该紅轉載台係由一 台可藉由上升機構及上 定;上升路徑,…ίϊ=1: 合工作調整路徑,又該载η::使用者所需配 當該晶粒置入詨旌μIΑ=戰口後方另扠有一測試機,俾 構將該晶粒送至\ “式針可藉由上述結 腦定位模組校正。’ β〗之凋正與確認便藉由該電 ’其中該所述:自動晶粒測試裝置 號分類,如未有晶粒,、、原位,如有測試晶粒直接依燈 使該晶粒可正確至執订放料’藉由機台之影像定位 位置皆能正確,接著該旋置在糟由電腦補正,使其每次 ,上升之待測位置,此日^轉平台將該晶粒移動至測試針板 其測試結果輪出,由機台剩試機開機,該晶粒經測試後, 試機關機,旋轉平台下卩久之電腦將該測試結果讀取,該測 原位,依燈號分類‘成‘ $分類燈號‘該旋轉載台回Therefore, the automatic grain testing device can be used to test multiple units at the same time, in which the back and forth moving slide table is parallel-driven by a -γ step motor, and the moving platform is a sliding platform. The stage includes an X-axis moving platform, which is provided with :::: left and right movements, and the X-axis moving platform is provided with a rotary stepping motor drive and a stepping motor drive, and an upper shaft machine is provided. The red retransmission platform is set by an ascending mechanism and the upper setting; the ascending path, ... ίϊ = 1: the working adjustment path, and the load η :: the user needs to configure when the die is inserted into the frame μIΑ = There is another test machine behind the battlefront, and the structure sends the crystal to the \ "type needle can be corrected by the above-mentioned brain positioning module. 'Β〗' s ascension and confirmation will be through the electricity 'which is described in the : Classification of automatic die test device number, if there is no die, ,, in situ, if there is a test die directly according to the lamp, the die can be correctly placed to the order. 'The position can be determined by the image of the machine. Correct, then the rotation is corrected by the computer, so that each time, it rises to the test position, this day ^ turns flat Move the die to the test pin plate, and the test result will be taken out, and the machine will be turned on by the remaining test machine. After the die is tested, the machine will be tested, and the computer under the rotating platform will read the test result. Position, classified by the light number 'into'
TW90111377A 2001-05-11 2001-05-11 Automatic die testing apparatus TW533318B (en)

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Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI411791B (en) * 2005-09-19 2013-10-11 Formfactor Inc Apparatus and method of testing singulated dies
TWI465742B (en) * 2012-12-14 2014-12-21

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI411791B (en) * 2005-09-19 2013-10-11 Formfactor Inc Apparatus and method of testing singulated dies
TWI465742B (en) * 2012-12-14 2014-12-21

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