TW530137B - Rotary vane type throttle valve - Google Patents

Abstract

Disclosed is a rotary vane type throttle valve, including: a valve body, a stationary valve gate, two rotary valve gates and a rotary device. The valve body includes a fluid conduit penetrating the valve body and substantially configured to a hollow cylindrical shape. The stationary gate is positioned in the fluid conduit and constructed of a stationary cylindrical column and a plurality of stationary vane blades. The two rotary valve gates are positioned on the same side of the stationary cylindrical column and each constructed of a rotary cylindrical column and a plurality of rotary vane blades. The rotary device is coupled to the two rotary valve gates for rotating the rotary vane blades of the two rotary gates about the same axis in opposite directions whereby the relative translation between the two corresponding rotary vane blades of the two rotary valve gates can be employed to reduce and increase the cross-sectional area of the opening constructed of the two adjacent stationary vane blades and the inner annular wall of the fluid conduit, to regulate the flow rate.

Description

530137

The present invention relates to a throttle valve (T h r 〇 111 e V a 1 v e), and in particular to a rotary vane type throttle valve. Valve (Valve) is one of the most used parts in semiconductor process equipment. The purpose of using the valve is to control the flow of fluid in the pipe. So almost the entire semiconductor process equipment starts from the gas source (Gas Source) and goes through a lot of There are valves in the pipeline to the reactor and all the way to the exhaust end of the vacuum system. According to the purpose of the valve, the valve can be roughly divided into a valve of an on-off type (〇n / 〇f f) and a valve of an adjustable Ud jus table. Among them, the switch valve is mainly used to cut off or continue the flow of fluid between a certain point, while the adjustable valve is used to adjust the flow of fluid in the pipe. Throttle valve (T hr 〇111 e V a 1 ve) is an adjustable valve commonly used in vacuum systems now. In order to more accurately control the flow rate of the fluid, the valve of the choke valve can be connected to a step Motor (g ^ epper μ 〇t 〇r) 'As long as the appropriate current is input, the stepper motor will automatically adjust the position of the valve', thus changing the conductance (C 0 nductance) of the throttle valve to control the overall vacuum system Effective pumping speed (pumping speed), and the more common throttle valve is a butterfly valve (B u 11 erf 1 y V a 1 ve, refer to Figures 1A and 1 B for reference), which are the longitudinal directions of conventional butterfly valves Sectional schematic diagram and transverse sectional schematic diagram. Butterfly valve 100 is mainly composed of valve body 110, rotary valve 120 and rotating shaft 130, and valve body 110 has a fluid conduit 112 that runs through valve body 110, so that the fluid can follow The arrow direction of the figure flows within the fluid conduit 1 12. The rotating shaft 1 30 is arranged in the fluid conduit.

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8144twt.ptd Page 4 530137 V. Description of the invention (2) 112, and the rotary valve 120 rotates around the rotating shaft 130. Therefore, when a torque is provided to rotate the rotating shaft 130, the rotary valve 120 will rotate corresponding to the rotation of the rotating shaft 130, so the position of the rotary valve 120 can be changed, and the flow velocity of the fluid can be controlled. Because the conventional butterfly valve has a long stroke (stroke), in order to greatly change the flow rate of the fluid, it will take a relatively long time to rotate the above-mentioned rotary valve to a set angle. In addition, because the butterfly valve's rotary valve moves in the direction of the fluid flow field, this will cause the square thrust valve Gu Yiwen to exert a positive thrust on the fluid, which will cause the butterfly valve's response speed to adjust the fluid flow rate. Yu slowly. The purpose of the present invention is to provide a rotary vane type throttle valve, which can greatly shorten the valve's moving stroke, thereby increasing the response speed of the throttle valve to the fluid flow rate. In addition, when a stepping motor is used to provide the valve torque, the Can reduce the load of the stepper motor, thereby extending the life of the stepper motor. Based on the purpose of the present invention, the present invention proposes a rotary leaf type throttle valve, which is composed of-,,-fixed valve, a first rotary valve, a second rotary valve body, and a roughly cylindrical hollow J fluid guide. The fixed blade is composed of a through blade, wherein the solid system is composed of a fixed cylinder and a plurality of fixed blades, and these fixed blades are located on the axis of the fluid conduit; p, ^ ^ Π is a fixed blade out of the outer circle of the fixed cylinder and the fluid conduit Inner Ϊ: the inner ring wall of the tube 'where adjacent side holes. The first rotary valve and the second rotary valve respectively constitute a plurality of guides, and the net gates are located on the same blade of the fixed valve. Two of them rotate, and the eighth 丨 目 女 # Μ η ▼ M 丨 儿 W Concave 疋 called Γ "< combined / knife has a rotating circle 旋转 and capacity

Page 5 530137, and the rotary, and the spokes are coupled to the rotary and the second discharge corresponding to the flow valve system, the formation of the valve's reversing blade force area is shortened, so the rotary valve into the motor purpose, and matching The rotation of the rotating blade is extended ~ rotation ~ ^ The guide hole of the rotary rotary valve uses two guide holes for contraction. The speed of the two rotations is much smaller than that of the less-removable load. The catheter drives the first piece to be coaxial on the fixed part, and the two corresponding rotating fixed leaves, so as to control the size of the pilot hole. Fifth, the description of the invention (3) The cylinder is the inner ring wall of the outer circular surface of the rotating cylinder coaxial with the fixed cylinder. The rotating device is the axial direction of the cylinder, and the rotating blades of a rotary valve are rotated in the opposite direction to shrink the relative rotating blades between the rotary blade type rotary blades of the present invention and the inner ring wall of the μ body catheter. The flow velocity of the fluid has the same stroke, thus increasing the throttling. In addition, the rotation direction of the present invention is affected by the force of the rotary valve of the valve). In addition, the present invention therefore greatly reduces its weight. In addition to speed, the steps can also be reduced to allow the above of the present invention: Vente cites a preferred embodiment: then radially symmetrically extends and approaches the cylinder, and fits the cylinder, The cross-sectional area of the rotating leaf of the split gate is the cross-sectional area of the rotating valve. The scaling direction of the valve is perpendicular to the flow field. The conventional throttle valve (the butterfly is easy to be subjected to the flow field direction is a thin blade, In order to increase the response of the throttle valve and extend its service life. The advantages can be clearly understood, the figure is not explained in detail, such as I 0 0: butterfly valve 110: valve body II 2: fluid conduit

Page 6 530137

V. Description of the invention (4) 120 rotary valve 130 rotary shaft 200 rotary leaf type throttle valve 210 valve body 212 fluid conduit 214 inner ring wall 216 guide hole 220 fixed valve 222 fixed cylinder 224 fixed blade 226 plane 228 bearing 230 first rotary valve 232 rotating cylinder 234 rotating blade 236 plane 240 second rotary valve 242 rotating cylinder 244 rotating blade 246 plane 250 rotating device 252 transmission mechanism 254 spindle 256 tube shaft 8I44twf.ptd page 7 530137

2 5 8: Gear set 2 6 0: Stepping motor 262: Shell preferred embodiment Please refer to Figure 2 and 3m at the same time. ^ ^ ^ Securing 'Among them, Figure 2 is the rotation of the best embodiment of the present invention. The longitudinal & & step of the leaf-type throttle valve is a schematic diagram of the cross section of the fiber, and Fig. 3 is a three-dimensional view of the fixed valve and two rotary valves. As shown in FIG. 2, the rotary reed martial throttle valve 200 is mainly composed of a valve body 210, a temple ... ea tea-type fixed valve 2 2 0, a first thorn switch 230, a second rotary valve 240, and a thorny privy. Zhuanmen Gate Seven μ ^ Rotating Pei Zhi 25o. Valve body 210

^ Body conduit 2] 2 'It penetrates through the valve body 21 and has a roughly hollow cylindrical shape with an inner ring wall 214. The fluid flows through the fluid conduit in the same or opposite direction according to the direction of the hollow arrow in the figure. Within 212. As shown in FIGS. 2 and 3, the fixed valve 22 is composed of a fixed cylindrical milk and a fixed blade 224, where the fixed cylinder 222 is located on the axis of the fluid guide 212, and the fixed blade 224 is The fixed cylinder 222 radially protrudes symmetrically from the outer ring surface of the fixed cylinder 222, and extends and connects radially. The inner ring wall 214 of the fluid conduit 212. It is worth noting that a guide hole 21 6 ′ is formed between two adjacent fixed blades 224 and the inner ring wall 214 of the fluid conduit 212, as shown by the element reference 21 6 in FIG. The cross-sectional area of the guide hole 216 is approximately equal to the cross-sectional area of the fixed blade 224.罾 Also as shown in FIG. 2 and FIG. 3, the first rotary valve 230 is located on one side of the fixed valve 2 2 0 and may at least partially overlap the fixed valve 2 2 0, and the first rotary valve 230 is mainly By a rotating cylinder 232 and multiple rotating leaves

530137

The rotating cylinder 232 is coaxial with the fixed cylinder 222, and the rotating blade 234 protrudes symmetrically in the radial direction of the rotating cylinder 232 beyond the annular surface of the rotating cylinder 232, and extends radially and approaches the fluid conduit 212. The inner ring wall 214 ′ also makes the rotating blades 234 approximately fan-shaped and thin, where the number of rotating blades 234 is equal to the number of fixed blades 224, which is equal to the number of guide holes 216 ′ and the area of the rotating blades 234 is slightly larger than or equal to the guide holes. The half of the area of gig, and the plane 236 of the rotating blade 234 near the fixed blade 224 are approximately coplanar with the plane 226 of the fixed blade · 224 near the rotating blade 234, that is, these rotating blades 234 are close to the fixed blade 224. Also as shown in FIG. 2 and FIG. 3, the second rotary valve 240 is located on the same side of the fixed valve 2 20 as the first rotary valve 230, and may at least partially overlap the fixed valve 220, and the second rotary valve 24 The structure of 〇 is approximately the same as that of the first rotary valve 230, and is also composed of a rotating cylinder 242 and a plurality of rotating blades 244. The rotating cylinder 242 is coaxial with the fixed cylinder 222. Radially symmetrically protrudes from the outer ring surface of the rotating cylinder 2 4 2 and extends radially and approaches the inner ring wall 214 of the fluid conduit 2 1 2, so that the rotating blades 244 are approximately fan-shaped sheets, where the number of the rotating blades 244 is equal to fixed The number of blades 2 and 24 is equal to the number of guide holes 216, and the area of the rotating blades 244 is also approximately half of the area of the guide holes 216, that is, approximately equal to the area of the rotating blades 234 of the first rotary valve 23 and the rotating blades. The plane 246 of the fixed blade 224 near the fixed blade 224 is approximately coplanar with the plane 226 of the fixed blade 224 near the rotating blade 244, that is, the rotating blades 244 are close to the fixed blade 224, and these Rotating blades 2 34 and these rotating blades 244 are sequentially staggered and spaced on the fixed blades.

8144twf.ptd Page 9 530137

Below 224.

Also as shown in Figures 2 and 3, the rotating device 250 is coupled to the rotating cylinder 232 and the rotating cylinder 242 'for use in the axial direction of the fixed cylinder 222' to drive the rotating blade 234 and the rotating blade 244 for coaxial inversion, respectively. By rotating, the cross-sectional area of the corresponding guide hole 216 is scaled. The rotating device 25 may include a transmission mechanism 252 having a mandrel 254 and a tube shaft 256, which are respectively radially connected to the rotating cylinder 232 and the rotating cylinder 242, and are coaxially sleeved with each other, and are respectively connected to the gear, Moreover, the gear set 2 58 is driven by a stepping motor 260, and one end of the central shaft 254 is tied into the bearing 228 of the fixed cylinder 222, and the bearing 228 is, for example, a ball bearing. When the stepping motor 260 rotates in the forward direction, through the transmission of the gear set 258, it will provide reverse torque to the spindle 254 and the tube shaft 256, respectively, and then drive the first rotary valve 230 and the second rotary valve 240, respectively. For coaxial reverse rotation. The transmission mechanism 252 of the rotating device 250 includes a belt transmission mechanism in addition to the above-mentioned gear transmission mechanism. The rotating device further includes a housing 262 for covering other components of the rotating device 250. In addition, the rotating device 25 is not limited to the rotating cylinder 232 and the rotating cylinder 242 to provide torque to the first rotary valve 2 = 0 and the first revolving valve 24o. Around the outer ring of the cardia 240, for example, a gear or a leather shaft rotates in the opposite direction. Please refer to Figures 4A to 4C for schematic diagrams of relative motion. As the 4a rotating blades 2 4 4 a are respectively located on the fixed blade side, so that the cross section of the guide hole 21 6a is shown between the fixed blade and the rotating blade, as shown in the figure between the rotating blade 234a and the rotating blade 224a and the fixed blade 224b. The lower area is the largest, at which time the fluid has

530137, description of the invention In addition, as shown in FIG. 4B, in order to increase the flow velocity of the fluid or increase the pressure of the fluid, the rotating blades 234a and 244a can be rotated toward the center of the guide hole 2 1 6a, respectively, so that the guide hole 2 can be reduced. The cross-sectional area of 16 a increases the fluid flow rate or fluid pressure. As shown in Fig. 4C ', when the rotating blades 2 3 4 a and 2 4 4 a are close together, the cross-sectional area of the guide hole 2 16a is minimized, and the fluid has the highest pressure at this time. The close or separation of the rotating blade 234a and the rotating blade 244a allows the cross-sectional area of the pilot hole 2 1 6a to be scaled, thereby controlling the pressure of the regulating fluid. In order to prevent corrosive fluid from passing through the rotary vane type throttle valve of the present invention, it is easy to corrode the various components of the throttle valve. Therefore, the material of the rotary leaf type instant throttle valve of the present invention may include aluminum alloy. And stainless steel, or other materials that are resistant to corrosion, or a layer of Teflon is formed on the surface of the component, so that the corrosion resistance of the throttle can be improved, and the service life of the throttle can be extended. In addition to the relative movement between the two rotary valves, the rotary leaf type throttle valve of the present invention can scale the cross-sectional area of the pilot hole, and can also scale the cross-sectional area of the pilot hole by a single rotary valve, thereby controlling the regulating fluid. The flow rate. In addition, the rotary vane type throttle valve of the present invention is not only applied to semiconductor process equipment, but also can be applied to other pipes for conveying fluid to control the flow rate of fluid. "The above-mentioned rotary leaf type throttle valve of the present invention has the following advantages: (1) The present invention uses the relative rotation translation between two corresponding rotary blades of two rotary valves to scale and fix the fixed ^ ^ ^ m The cross-sectional area of the guide hole formed by the spreading soil to control the regulating flow

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530137 V. Description of the invention (9) The flow velocity or pressure of the body, and at the same time shorten the stroke of the scaling pilot hole size of the two rotary valves, thereby increasing the response speed of the throttle valve. (2) The moving direction of the rotating blade of the present invention is perpendicular to the flow field direction, so its bearing area is smaller than that of the conventional rotary valve (butterfly valve), so it is less susceptible to the influence of the flow field direction. (3) The rotary blade of the rotary valve of the present invention is a thin sheet, so the weight is greatly reduced. In addition to increasing the response speed of the throttle valve, it can also reduce the load of the stepping motor and prolong its service life. Although the invention has been

To limit the present invention ,: 孰 孰; above, but it is not within the scope of God, when the artist, without departing from the scope of the present invention, see the attached application and retouching. Therefore, the Jiaming patent of the present invention The areas defined shall prevail.

530137 Brief description of the drawings. Figures 1A and 1B are the longitudinal and schematic cross-sectional views of the conventional butterfly valve, respectively; Figure 2 is the longitudinal section of the rotary vane throttle of the preferred embodiment of the present invention. Figure 3 is a perspective view of a fixed valve and two rotary valves; and Figures 4A to 4C are schematic diagrams of relative movement between a fixed blade and a rotary blade, respectively.

cS144twf.ptd Page 13

Claims (1)

530137 Sixth, the scope of the application for a patent is a cylinder, a cylinder and a plurality of body pipes symmetrically protrude one of the fluid conductor pipes. One of the two valves has a substantially cylindrical diameter and is adjacent to the $ 疋 leaf type joint. The flow valve includes at least: the pipe system is hollow and has a first circle located on a radial extension of the flow cylinder and adjacent to the blade and the flow is located on the first, wherein the second and the second cylinders are on the second and radial The body 'has a fluid conduit, wherein the fluid is conducted through the valve body and has an inner ring wall; a valve is disposed inside the fluid conduit and has a first blade, wherein the first cylinder is on a substantial axis And the first blades are on the first, outside the first cylindrical ring surface, and the inner ring wall of the radial tube, and the adjacent first inner ring walls form a guide hole, respectively. ; Two valves are disposed inside the fluid conduit, and a side can be at least partially overlapped with the first valve by a second cylinder and a plurality of second blades, coaxial with the first cylinder, and the second blades are upward Symmetrically protrudes from the outer annular surface of the second cylinder near the inner annular wall of the fluid conduit; A third valve is disposed in the fluid conduit and is located on the same side of the first valve as the second valve and may at least partially overlap with the first valve. Wherein the third valve has a third cylinder and A plurality of third blades, wherein the second cylinder system is approximately coaxial with the first cylinder, and the second blade system protrudes symmetrically from the outer surface of the second cylinder in the upward direction of the second cylinder, and &Amp; " a rotating device ' is coupled to the second valve and the third valve, and is adapted to drive the respective cylinders in the axial direction of the first cylinder, respectively; Second blade and the first 530137 VI. Scope of patent application The three blades rotate coaxially in the opposite direction to scale the cross-sectional areas of the guide holes. 2. The rotary leaf type throttle valve according to item 1 of the scope of patent application, wherein the cross-sectional area of the guide holes is approximately equal to the cross-sectional area of the first blades. 3. The rotary vane type throttle valve described in item 2 of the scope of patent application, wherein the number of the second blades is equal to the number of the first blades, and the area of the second blades is approximately equal to the guides. Half the area of the hole. 4. The rotary vane type throttle valve as described in item 3 of the scope of the patent application, wherein the planes of the second vanes close to the first vanes are approximately coplanar with the first vanes close to the second vanes. The plane of the blade. 5. As described in item 3 of the scope of the patent application, the spiral blade type throttling is broad, wherein the number of the third blades is equal to the number of the first blades, and the area of the third blades is approximately equal to the number of the first blades. Half the area of the pilot hole. 6. The rotary vane throttle according to item 5 of the scope of patent application, wherein the planes of the third blades close to the first blades are approximately coplanar with the first blades close to the third blades. The plane of the blade. 7. The rotary vane type throttle valve according to item 1 of the patent application scope, wherein the rotating device includes a transmission mechanism and a stepping motor. 8. The rotary vane type throttle valve according to item 7 of the patent application scope, wherein the transmission mechanism includes a gear transmission mechanism. 9. The rotary vane type throttle valve according to item 7 of the patent application scope, wherein the transmission mechanism includes a belt transmission mechanism. 10. A rotary-lobe throttle valve, comprising at least: a valve body having a fluid conduit, wherein the fluid conduit is hollow cylindrical, penetrates the valve body, and has an inner ring wall; 8144twf.ptd Page 15 530137 Within the body duct and has a first circle. The first cylindrical system is located approximately to the fluid blade system on the radial torus of the first cylinder, and extends radially and adjoins the two adjacent first blades and The flow is a pilot hole; a first valve is configured with the flow column and a plurality of first blades, wherein the axis of the conduit is on the axis of the conduit and the first symmetrically protrudes from the inner annular wall of the fluid conduit outside the first cylinder, And the inner ring wall of the body conduit constitutes at least one second valve, which is arranged in the fluid conduit and is located on one side of the first valve, and the first valve can be at least partially overlapped, wherein the second valve There is a second cylinder and a plurality of second blades, and the second cylinder system is approximately coaxial with the first cylinder, and the second blade systems project symmetrically beyond the second cylinder in the radial direction of the second cylinder. A torus, extending radially adjacent to the inner ring wall of the fluid conduit; and a rotating device 'coupled to the second rotary valve, adapted to drive the second blades in the axial direction of the first cylinder to act as Rotate to shrink Put the cross-sectional area of these guide holes. 11. The rotary vane type throttle valve as described in item i 0 of the scope of patent application, wherein the cross-sectional area of the pilot holes is approximately equal to the cross-sectional area of the first blade of the 呰 0. 12 · The rotary leaf type throttle valve described in the above item, wherein the number of the second blades is equal to the number of the first blades, and the area of the second blades is approximately equal to the area of the guide holes. The rotary vane type throttle valve according to item 12 of the patent, wherein the planes of the second vanes close to the first forbidden pieces = planes are approximately coplanar with the planes of the first vanes close to the second vanes. < S144twf.ptd page 16 530137 6. Scope of patent application 14. The rotary leaf type throttle valve described in item 10 of the patent application scope, wherein the rotating device includes a transmission mechanism and a stepping motor. 15. The rotary leaf type throttle valve according to item 14 of the scope of patent application, wherein the transmission mechanism includes a gear transmission mechanism. 16. The rotary leaf type throttle valve according to item 14 of the scope of patent application, wherein the transmission mechanism includes a belt transmission mechanism. (S144iwf.ptd p. 17