CN1293330C - Spiralism type throttle - Google Patents
Spiralism type throttle Download PDFInfo
- Publication number
- CN1293330C CN1293330C CNB021318662A CN02131866A CN1293330C CN 1293330 C CN1293330 C CN 1293330C CN B021318662 A CNB021318662 A CN B021318662A CN 02131866 A CN02131866 A CN 02131866A CN 1293330 C CN1293330 C CN 1293330C
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- valve
- cylinder
- fluid conduit
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Abstract
The present invention relates to a spiral type throttle valve which is provided with a valve body, a fixing valve, two rotary valves and a rotary device, wherein the valve body is provided with a fluid conduit, and the fluid conduit penetrates through the valve body and forms a hollow cylinder shape; the fixing valve is positioned in the fluid conduit and is composed of a fixing cylinder and a plurality of fixing vanes; the two rotary valves are positioned at the same side of the fixing cylinder and are respectively composed of a rotary cylinder and a plurality of rotary vanes; the rotary device is respectively coupled with the two rotary valves to make the rotary vanes of the two rotary valves do coaxial reverse rotation. The present invention uses the relative translation between two corresponding rotary vanes of the two rotary valve to decrease and increase the cross-sectional area of a guide hole composed of two adjacent fixing vanes of the fixing valve and the inner annular wall of the fluid conduit, so that the flow speed of the fluid is changed.
Description
Technical field
The present invention is relevant for a kind of throttle valve (Throttle Valve), and particularly relevant for a kind of Spiralism type throttle.
Background technique
Valve (Valve) is a kind of accessory (Parts) of consumption maximum in the semiconductor manufacturing equipment, using the purpose of valve is in order to control the flow of pipe fitting inner fluid, so almost whole semiconductor manufacturing equipment begins from gas source (Gas Source), to reactor, the existence of valve is arranged all up to the exhaust end (Exhaust) of vacuum system through heavy pipeline.According to the purposes of valve, can be with the rough valve of switch type (On/Off) and the valve of adjusting type (Adjustable) of being distinguished into of valve.Wherein, the valve of switch type mainly is to be used for breaking off or to continue the circulation of fluid between a certain fixed point, and the valve of adjusting type then is to be used for adjusting the flow of fluid in pipe fitting.
Throttle valve (Throttle Valve) is a kind of adjusting type valve that now generally uses in vacuum system, in order more precisely to control flow rate of fluid, so the valve of throttle valve can be connected to a stepper motor (Stepper Motor), as long as the electric current that input is suitable, stepper motor just can the automatic regulating valve door the position, thereby the conductivity (Conductance) of change throttle valve, so as to the whole effectively speed of exhaust (Pumping Speed) of control vacuum system, and comparatively common throttle valve is butterfly valve (Butterfly Valve) at present.
Please refer to Figure 1A, Figure 1B, it is respectively the longitudinal profile schematic representation and the horizontal section schematic representation of known butterfly valve.Butterfly valve 100 mainly is made of valve body 110, changeover valve 120 and rotating shaft 130, and valve body 110 has a fluid conduit systems 112, and it runs through valve body 110, makes fluid to flow within fluid conduit systems 112 according to the graphic direction of arrow.Rotating shaft 130 is disposed within the fluid conduit systems 112, and changeover valve 120 is that the axle center rotates with rotating shaft 130 then.Therefore, when providing torque that rotating shaft 130 is rotated, changeover valve 120 rotates the rotation of corresponding rotating shaft 130, thus can change the position of changeover valve 120, and then control flow rate of fluid.
Because the rotational travel (stroke) of known butterfly valve is longer, in order significantly to change flow rate of fluid, and must rotation above-mentioned changeover valve is during to the angle set, relatively long time of cost.In addition,, so will make changeover valve be subjected to the influence of the forward thrust of fluid easily, and cause butterfly valve will be tending towards slow for the reaction velocity of regulated fluid flow velocity because the moving direction of the changeover valve of butterfly valve is parallel to the flow field direction of fluid.
Summary of the invention
The objective of the invention is to propose a kind of Spiralism type throttle, can significantly shorten the shift motion of valve, so as to improving the reaction velocity of throttle valve for rate of flow of fluid, in addition, when utilizing stepper motor that the torque of valve is provided, can reduce the load of stepper motor, and then prolong the working life of stepper motor.
Based on purpose of the present invention, the present invention proposes a kind of Spiralism type throttle, is to be made of a valve body, a fixed valve, one first changeover valve, one second changeover valve and a slewing gear.Valve body has a fluid conduit systems, and it runs through valve body and rough journey hollow cylindrical.Fixed valve is made up of a fixed cylinder and multi-disc stator blade, wherein fixed cylinder is positioned on the axis of fluid conduit systems, and being radial symmetric, these stator blades protrude in the outer ring surface of fixed cylinder, and radial extension also connects the internal ring wall of this fluid conduit systems, constitutes a plurality of guide holes respectively between the wherein adjacent stator blade and the internal ring wall of this fluid conduit systems.First changeover valve and second changeover valve all are positioned at the same side of fixed valve, and have a rotating cylindrical and multi-disc rotation blade respectively, wherein two rotating cylindricals are all coaxial with fixed cylinder, rotation blade then radial symmetric protrudes in the outer ring surface of corresponding rotating cylindrical, and radial extension and near the internal ring wall of this fluid conduit systems.Slewing gear is coupled to two rotating cylindricals, and be suitable for fixed cylinder axially on, counterrotating two rotating cylindricals respectively, and drive the rotation blade of first changeover valve respectively and the rotation blade of second changeover valve is done coaxial counterrotating are in order to the cross-section area of the guide hole of convergent-divergent correspondence respectively.
Spiralism type throttle of the present invention is the translation that relatively rotates that utilizes between the two corresponding rotation blades of two changeover valves, cross-section area in order to the guide hole that internal ring wall constituted of the stator blade of convergent-divergent fixed valve and fluid conduit systems, and then regulating and controlling flow rate of fluid, shorten the stroke of the convergent-divergent guide hole size of two changeover valves simultaneously, thereby improve the reaction velocity of throttle valve.
In addition, the movement direction of rotation blade of the present invention is perpendicular to flow field direction, so the lifting surface area of its movement direction is much smaller than the lifting surface area of the changeover valve of known throttle valve (butterfly valve), so be not easy to be subjected to the influence of flow field direction.In addition, the rotation blade of changeover valve of the present invention is laminar, thereby significantly alleviates its weight, therefore, except the reaction velocity that can increase throttle valve, also can reduce the load of stepper motor, prolongs its working life.
Description of drawings
Figure 1A, Figure 1B are respectively the longitudinal profile schematic representation and the horizontal section schematic representation of known butterfly valve;
Fig. 2 is the longitudinal profile schematic representation of the Spiralism type throttle of preferred embodiment of the present invention;
Fig. 3 is the stereogram of fixed valve and two changeover valves; And
Fig. 4 A～Fig. 4 C is respectively the schematic representation of stator blade and rotation blade intercropping relative movement.
100: butterfly valve 110: valve body
112: fluid conduit systems 120: changeover valve
130: rotating shaft 200: Spiralism type throttle
210: valve body 212: fluid conduit systems
214: internal ring wall 216: guide hole
220: fixed valve 222: fixed cylinder
224: stator blade 226: plane
228: 230: the first changeover valves of bearing
232: rotating cylindrical 234: rotation blade
236: 240: the second changeover valves in plane
242: rotating cylindrical 244: rotation blade
246: plane 250: slewing gear
252: driving mechanism 254: axle
256: tubular axis 258: gear train
260: stepper motor 262: shell
Embodiment
Please also refer to Fig. 2 and Fig. 3, wherein Fig. 2 is the longitudinal profile schematic representation of the Spiralism type throttle of preferred embodiment of the present invention, and Fig. 3 is the stereogram of fixed valve and two changeover valves.As shown in Figure 2, Spiralism type throttle 200 mainly is made of valve body 210, fixed valve 220, first changeover valve 230, second changeover valve 240 and slewing gear 250.Valve body 210 has a fluid conduit systems 212, and it runs through valve body 210, and the rough hollow cylindrical that is, and has an internal ring wall 214, and fluid then according to graphic hollow arrow direction, flows within the fluid conduit systems 212 in the same way or oppositely.
As shown in Figures 2 and 3, fixed valve 220 is made of a fixed cylinder 222 and multi-disc stator blade 224, wherein fixed cylinder 222 is positioned on the axis of fluid conduit systems 212, stator blade 224 then in the footpath of fixed cylinder 222 upwards symmetry protrude in the outer ring surface of fixed cylinder 222, and radial extension and connect the internal ring wall 214 of fluid conduit systems 212.It should be noted that, constitute guide hole 216 respectively between the internal ring wall 214 of two adjacent stator blades 224 and fluid conduit systems 212, shown in the assembly label 216 of Fig. 3, in order to allow fluid pass through, it should be noted that the rough cross-section area that equals stator blade 224 of cross-section area of guide hole 216.
Equally as shown in Figures 2 and 3, first changeover valve 230 is positioned at a side of fixed valve 220, and can overlap at least with fixed valve 220, and first changeover valve 230 mainly is made of a rotating cylindrical 232 and multi-disc rotation blade 234, wherein rotating cylindrical 232 is coaxial with fixed cylinder 222, rotation blade 234 is then at the upwards symmetrical outer ring surface that protrudes in rotating cylindrical 232 in the footpath of rotating cylindrical 232, and radial extension and near the internal ring wall 214 of fluid conduit systems 212, and make the rotation blade 234 rough fan-shaped flake shapes that are, wherein the number of rotation blade 234 equals the number of stator blade 224, promptly equal the number of guide hole 216, and half of the rough area more than or equal to guide hole 216 of the area of rotation blade 234, and rotation blade 234 near the plane 236 rough coplanes of stator blade 224 in the plane 226 near rotation blade 234 of stator blade 224, promptly these rotation blades 234 are pressed close to stator blade 224.
Equally as shown in Figures 2 and 3, second changeover valve 240 and first changeover valve 230 are positioned at the same side of fixed valve 220 equally, and can overlap at least with fixed valve 220, and the structure of second changeover valve 240 is rough identical with first changeover valve 230, also constituted by a rotating cylindrical 242 and multi-disc rotation blade 244, wherein rotating cylindrical 242 is coaxial with fixed cylinder 222, rotation blade 244 is then at the upwards symmetrical outer ring surface that protrudes in rotating cylindrical 242 in the footpath of rotating cylindrical 242, and radial extension and near the internal ring wall 214 of fluid conduit systems 212, make the rotation blade 244 rough fan-shaped flake shapes that are, wherein the number of rotation blade 244 equals the number of stator blade 224, promptly equal the number of guide hole 216, and half of the same approximately slightly area of guide hole 216 of the area of rotation blade 244, it is the rough area that equals the rotation blade 234 of first changeover valve 230, and rotation blade 244 near the plane 246 rough coplanes of stator blade 224 in the plane 226 near rotation blade 244 of stator blade 224, be that these rotation blades 244 are all pressed close to stator blade 224, and these rotation blades 234 are spaced under stator blade 224 with these rotation blades 244 are staggered in regular turn.
Equally as shown in Figures 2 and 3, slewing gear 250 is coupled to rotating cylindrical 232 and rotating cylindrical 242, in order to fixed cylinder 222 axially on, driven rotary blade 234 and rotation blade 244 are done coaxial counterrotating respectively, so as to the cross-section area of the guide hole 216 of convergent-divergent correspondence.Slewing gear 250 can comprise a driving mechanism 252, it has an axle 254 and a tubular axis 256, it radially connects rotating cylindrical 232 and rotating cylindrical 242 respectively, and socket coaxially to each other, and be coupled to gear train 258 respectively, gear train 258 is then driven by a stepper motor 260, and an end of its central shaft 254 is gone among the bearing 228 of fixed cylinder 222, and bearing 228 for example is a ball bearing.When stepper motor 260 is rotated in the forward, by the transmission of gear train 258, will provides reverse torque respectively, and then drive first changeover valve 230 respectively and second changeover valve 240 is done coaxial counterrotating to axle 254 and tubular axis 256.Wherein the driving mechanism 252 of slewing gear 250 more comprises belt gear except above-mentioned gear drive.And slewing gear more comprises a shell 262, in order to coat other member of slewing gear 250.In addition, slewing gear 250 is not only limited on rotating cylindrical 232 and rotating cylindrical 242, torque to the first changeover valve 230 and second changeover valve 240 are provided, also can around the outer shroud of first changeover valve 230 and second changeover valve 240, for example make it do coaxial counterrotating with gear or belt.
Please refer to Fig. 4 A～Fig. 4 C, it is respectively the schematic representation of stator blade and rotation blade intercropping relative movement.Shown in Fig. 4 A, rotation blade 234a and rotation blade 244a lay respectively at the downside of stator blade 224a and stator blade 224b, so make the cross-section area of guide hole 216a be maximum, and this moment, fluid had minimum flow velocity.In addition, shown in Fig. 4 B, in order to improve flow rate of fluid or to improve the pressure of fluid, can be respectively rotation blade 234a and rotation blade 244a be rotated towards the central direction of guide hole 216a, so can dwindle the cross-section area of guide hole 216a, and then improve the pressure of flow rate of fluid or fluid.Shown in Fig. 4 C, when rotation blade 234a and rotation blade 244a draw close mutually, will make the cross-section area of guide hole 216a for minimum, this moment, fluid had maximum pressure.Therefore, by drawing close or separate between rotation blade 234a and the rotation blade 244a, cross-section area that can corresponding convergent-divergent guide hole 216a, and then the pressure of regulating and controlling fluid.
During for fear of acrid fluid process Spiralism type throttle of the present invention, and corrode each member of throttle valve easily, so member of Spiralism type throttle of the present invention, its material can comprise aluminum alloy and stainless steel, or other corrosion resistant material, or, so can promote the corrosion resistance of throttle valve, to prolong the working life of throttle valve at the surface of member formation one deck Furtulon (Teflon).
Spiralism type throttle of the present invention removes by the cross-section area that relatively moves the convergent-divergent guide hole between two changeover valves, also can come the cross-section area of convergent-divergent guide hole by single changeover valve, and then the regulating and controlling flow rate of fluid.In addition, Spiralism type throttle of the present invention not only is applied in semiconductor manufacturing equipment, also can be applicable to the pipe fitting of other conveyance fluid, in order to the control flow rate of fluid.
In sum, Spiralism type throttle of the present invention has following advantage:
(1) the present invention utilizes the translation that relatively rotates between the two corresponding rotation blades of two changeover valves, cross-section area in order to the guide hole that internal ring wall constituted of the stator blade of convergent-divergent fixed valve and fluid conduit systems, so as to regulating and controlling flow rate of fluid or pressure, shorten the stroke of the convergent-divergent guide hole size of two changeover valves simultaneously, thereby improve the reaction velocity of throttle valve.
(2) movement direction of rotation blade of the present invention so its lifting surface area is smaller than the changeover valve of known throttle valve (butterfly valve), thereby more is not vulnerable to the influence of flow field direction perpendicular to flow field direction.
(3) rotation blade of changeover valve of the present invention is laminar, thereby significantly weight reduction, except that the reaction velocity that can increase throttle valve, also can reduce the load of stepper motor, prolongs its working life.
Claims (16)
1. a Spiralism type throttle comprises a valve body, and this valve body has a fluid conduit systems, and this fluid conduit systems is hollow cylindrical, and runs through this valve body, and has an internal ring wall; It is characterized in that this Spiralism type throttle at least also comprises:
One first valve, dispose within this fluid conduit systems, and have one first cylinder and several first blades, wherein this first cylinder is positioned in fact on the axis of this fluid conduit systems, and those first blades are at the upwards symmetrical outer ring surface that protrudes in this first cylinder in the footpath of this first cylinder, and radial extension and in abutting connection with this internal ring wall of this fluid conduit systems, and this internal ring wall of those adjacent first blades and this fluid conduit systems constitutes a guide hole respectively;
One second valve, be disposed within this fluid conduit systems, and be positioned at a side of this first valve, and can overlap at least with this first valve, wherein this second valve has one second cylinder and several second blades, and this second cylinder is coaxial in fact in this first cylinder, and those second blades in the footpath of this second cylinder upwards symmetry protrude in the outer ring surface of this second cylinder, and this internal ring wall of radial extension and contiguous this fluid conduit systems;
One the 3rd valve, be disposed within this fluid conduit systems, and be positioned at the same side of this first valve with this second valve, and can overlap at least with this first valve, wherein the 3rd valve has a three cylindrical and several the 3rd blades, wherein this three cylindrical is rough coaxial in this first cylinder, and those the 3rd blades in the footpath of this three cylindrical upwards symmetry protrude in the outer ring surface of this second cylinder, and this internal ring wall of radial extension and contiguous this fluid conduit systems; And
One slewing gear is coupled to this second valve and the 3rd valve, be suitable for this first cylinder axially on, drive those second blades respectively and those the 3rd blades are done coaxial counterrotating, in order to the cross-section area of those guide holes of convergent-divergent.
2. Spiralism type throttle as claimed in claim 1 is characterized in that, the rough cross-section area that equals those first blades of the cross-section area of those guide holes.
3. Spiralism type throttle as claimed in claim 2 is characterized in that the number of those second blades equals the number of those first blades, and half of the rough area that equals those guide holes of the area of those second blades.
4. Spiralism type throttle as claimed in claim 3 is characterized in that, the rough coplane in the plane near those first blades of those second blades is in the plane near those second blades of those first blades.
5. Spiralism type throttle as claimed in claim 3 is characterized in that those three-vaned numbers equal the number of those first blades, and half of the rough area that equals those guide holes of those three-vaned areas.
6. Spiralism type throttle as claimed in claim 5 is characterized in that, those the 3rd blades near the rough coplane in the plane of those first blades in those first blades near those three-vaned planes.
7. Spiralism type throttle as claimed in claim 1 is characterized in that, this slewing gear comprises a driving mechanism and a stepper motor.
8. Spiralism type throttle as claimed in claim 7 is characterized in that this driving mechanism comprises gear drive.
9. Spiralism type throttle as claimed in claim 7 is characterized in that this driving mechanism comprises belt gear.
10. a Spiralism type throttle comprises a valve body, and this valve body has a fluid conduit systems, and this fluid conduit systems is hollow cylindrical, and runs through this valve body, and has an internal ring wall; It is characterized in that this Spiralism type throttle at least also comprises:
One first valve, dispose within this fluid conduit systems, and have one first cylinder and several first blades, wherein on the rough axis that is positioned at this fluid conduit systems of this first cylinder, and those first blades are at the upwards symmetrical outer ring surface that protrudes in this first cylinder in the footpath of this first cylinder, and radial extension and in abutting connection with this internal ring wall of this fluid conduit systems, and two adjacent those first blades and this internal ring wall of this fluid conduit systems constitute a guide hole respectively;
At least one second valve, be disposed within this fluid conduit systems, and be positioned at a side of this first valve, and can overlap at least with this first valve, wherein this second valve has one second cylinder and several second blades, and this second cylinder is rough coaxial in this first cylinder, and those second blades in the footpath of this second cylinder upwards symmetry protrude in the outer ring surface of this second cylinder, and this internal ring wall of radial extension and contiguous this fluid conduit systems; And
One slewing gear is coupled to this second changeover valve, be suitable for this first cylinder axially on, drive those second blades and rotate, in order to the cross-section area of those guide holes of convergent-divergent.
11. Spiralism type throttle as claimed in claim 10 is characterized in that, the rough cross-section area that equals those first blades of the cross-section area of those guide holes.
12. Spiralism type throttle as claimed in claim 11 is characterized in that, the number of those second blades equals the number of those first blades, and the rough area that equals those guide holes of the area of those second blades.
13. Spiralism type throttle as claimed in claim 12 is characterized in that, those second blades are near the plane near those second blades of the rough coplane in the plane of those first blades in those first blades.
14. Spiralism type throttle as claimed in claim 10 is characterized in that, this slewing gear comprises a driving mechanism and a stepper motor.
15. Spiralism type throttle as claimed in claim 14 is characterized in that, this driving mechanism comprises gear drive.
16. Spiralism type throttle as claimed in claim 14 is characterized in that, this driving mechanism comprises belt gear.
Priority Applications (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021318662A CN1293330C (en) | 2002-09-04 | 2002-09-04 | Spiralism type throttle |
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| CNB021318662A CN1293330C (en) | 2002-09-04 | 2002-09-04 | Spiralism type throttle |
Publications (2)
| Publication Number | Publication Date |
|---|---|
| CN1480672A CN1480672A (en) | 2004-03-10 |
| CN1293330C true CN1293330C (en) | 2007-01-03 |
Family
ID=34145055
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| CNB021318662A Expired - Lifetime CN1293330C (en) | 2002-09-04 | 2002-09-04 | Spiralism type throttle |
Country Status (1)
| Country | Link |
|---|---|
| CN (1) | CN1293330C (en) |
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| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| CN103763793A (en) * | 2013-12-25 | 2014-04-30 | 镇江东方电热科技股份有限公司 | PTC electric heater preventing oxidized dust and manufacturing method thereof |
| KR20180000928A (en) * | 2016-06-24 | 2018-01-04 | 세메스 주식회사 | unit for treating substrate and bake apparatus a having the unit and method processing substrate by using thereof |
| CN107064202B (en) * | 2017-06-19 | 2023-07-18 | 重庆中国三峡博物馆 | Real-time comprehensive detection fumigation effect equipment |
| CN108195874A (en) * | 2017-12-27 | 2018-06-22 | 中国航天空气动力技术研究院 | A kind of constant temperature water cooled mo(u)ld molding box |
| CN110159589B (en) * | 2019-07-05 | 2024-03-22 | 张银量 | Inclined three-dimensional synchronous fluid machine |
| CN113280483B (en) * | 2021-03-24 | 2021-12-24 | 中建三局第三建设工程有限责任公司 | Flow control valve and air conditioner |
| CN114646429A (en) * | 2022-03-17 | 2022-06-21 | 天津市金凤来仪科技有限公司 | Indoor combustible gas real-time detection early warning device of thing networking |
Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4565305A (en) * | 1983-05-31 | 1986-01-21 | Koppers Company, Inc. | Rotary vane valve |
| CN2308776Y (en) * | 1997-08-25 | 1999-02-24 | 李长运 | Vane enclosing valve |
| CN2332848Y (en) * | 1997-09-03 | 1999-08-11 | 中国石油化工总公司 | Rotary valve |
| US6206021B1 (en) * | 2000-03-01 | 2001-03-27 | Thomas A. Hartman | Sleeve valve with clean out section |
-
2002
- 2002-09-04 CN CNB021318662A patent/CN1293330C/en not_active Expired - Lifetime
Patent Citations (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US4565305A (en) * | 1983-05-31 | 1986-01-21 | Koppers Company, Inc. | Rotary vane valve |
| CN2308776Y (en) * | 1997-08-25 | 1999-02-24 | 李长运 | Vane enclosing valve |
| CN2332848Y (en) * | 1997-09-03 | 1999-08-11 | 中国石油化工总公司 | Rotary valve |
| US6206021B1 (en) * | 2000-03-01 | 2001-03-27 | Thomas A. Hartman | Sleeve valve with clean out section |
Also Published As
| Publication number | Publication date |
|---|---|
| CN1480672A (en) | 2004-03-10 |
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Granted publication date: 20070103 |