TW527241B - Method for forming metal oxide powder by means of spray of pressurized water containing oxygen dissolved therein - Google Patents
Method for forming metal oxide powder by means of spray of pressurized water containing oxygen dissolved therein Download PDFInfo
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- TW527241B TW527241B TW91107393A TW91107393A TW527241B TW 527241 B TW527241 B TW 527241B TW 91107393 A TW91107393 A TW 91107393A TW 91107393 A TW91107393 A TW 91107393A TW 527241 B TW527241 B TW 527241B
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Description
527241 五、發明說明(1) 【發明的應用範圍】 本發明疋關於一種利用溶有氧古 屬氧化物粉末的方法,特別θ p =轧之间€水贺霧製造金 壓水喷霧製造透明導電全屬氧 :=用/合有虱氣之问 【發明的背景】 物粉末的方法。 鐘膜(。ptlcal coatlng)產品以及現今倍 又重視的液日日顯示器(LCD)等產業中, 所謂的透明導電破璁,B产々丄 巾吊乂而大里使用 ^ ^ ^ 电跋禹即疋在各種不同產品所倭用之特辣 玻嘴表面鍍上一層透明導雷_ 、 Μ、#日日道H 電 物材料。目前最常被使用 =明::乳化物材料為氧化銦錫(indlum—Tin—_ 再透過濺鍍或是蒸鍍的方法鍍在特殊玻璃表面,而 二以J種方式Μ膜都必、需先製造透明I電氧化物粉末, 再加以直接蒸鍍或是高壓燒結形成濺鍍靶。 在白4技術方面,製造透明導電氧化物粉末都是使用 相關的鹽類以化學方式來製造,包含化學還原及化學熱分 解寺方式,都具有製作過程繁瑣且生產成本很高的問題。 以日本Nikko Matenal公司所擁有之美國第54 1 78 1 6號專 利為例,其製造氧化銦粉末的步驟為:先將銦金屬原料加 以熔煉形成銦鑄錠,再將銦鑄錠加以電解產生氫氧化銦 (Indlum Hydronde);然後對氫氧化銦(Ιη(Ηι^527241 V. Description of the invention (1) [Scope of application of the invention] The present invention relates to a method using dissolved aerobic paleo-oxide powder, especially θ p = between rolling € water condensate manufacturing gold pressure water spray manufacturing transparent Conduction is all oxygen: = method of using / combining lice [Background of the invention] method of powder. In the industry of bell film (.ptlcal coatlng) products and the liquid crystal display (LCD), which is more important today, the so-called transparent conductive chip is used to hang the towel from B and it is used in Dali ^ ^ ^ The surface of the special spicy glass nozzle used by various products is plated with a layer of transparent lightning guide _, Μ, # 日 日 道 H electrical materials. Currently most commonly used = Ming :: The emulsion material is indium tin oxide (indlum—Tin—_ and then is sputtered or evaporated on the special glass surface, and the two types of J film M are required and required. The transparent I oxide powder is first manufactured, and then directly evaporated or high pressure sintered to form the sputtering target. In terms of White 4 technology, the transparent conductive oxide powder is manufactured chemically using related salts, including chemical Both reduction and chemical thermal decomposition methods have the problems of tedious production process and high production cost. Taking the US patent No. 54 1 78 1 6 owned by Nikko Matenal of Japan as an example, the steps for manufacturing indium oxide powder are: First, the indium metal raw material is smelted to form an indium ingot, and then the indium ingot is electrolytically produced to produce indium hydroxide (Indlum Hydronde); then, indium hydroxide (Ιη (Ηι ^
Hydroxide)進行固液分離(piiter);將分離出之固體的氫 氧化銦使用大量純水加以洗滌,並將其製成氫氧化銦泥 桌,乾燥氫氧化銦泥漿後再加以粉碎;最後對粉碎後之氫 氧化钢粉末進行熱處理。Hydroxide) for solid-liquid separation (piiter); the separated solid indium hydroxide is washed with a large amount of pure water and made into an indium hydroxide mud table, and the indium hydroxide mud is dried and then pulverized; The subsequent hydroxide steel powder is heat-treated.
IIII
I rpf m ΓΛΐ'ΡI rpf m ΓΛΐ'Ρ
I 527241I 527241
五、發明說明(2) 使用習知之化學製程來製造透明導電氧化物粉末,其 生產的步驟繁瑣而製程漫長,並需要多重的製程設備加^ 配合,製造的成本相對提高;此外,化學製程所產生的大 量工業廢水,如不妥善處理更有造成環境污染之 現今要求環保的潮流不符。 、 t 〃 【發明之目的與概述】 為改 造成本較 造原理為 本發 種利用溶 法,並配 化程度。 經過一導 束衝擊之 規則形狀 需之金屬 免使用化 在高壓純 炫融金屬 金屬氧化 氧化之透 達到所需 屬氧化物 善以上所述習 低的透明導電 物理方式,因 明融合習知的 有氧氣之高壓 合在南壓純水 一般的水喷法 管流下形成一 ,使該金屬液 之粉末。水噴 粉末。本發明 學方法製造氧 水中溶入氧氣 液在霧化過程 物粉末。以上 明導電金屬氡 的各種氡化狀 粉末達到不同 知技術的問題,本發明提供一種製 氧化物粉末製程;並且,由於其製 而不會對環境造成污染。 粉末冶金製程中的水噴法,提供一 水噴霧製造金屬氧化物粉末的方 =溶入氧氣的方法來增加粉末的氧 疋將金屬或非金屬經加熱熔融後, f連~流液,在某距離間以高壓水 "丨L刀政霧化成微粒,並冷卻形成不 > ~般通常用來製作粉末冶金所 弓|用发、 "以物理方法製粉的原理來避 化物粉Φ 末所π來的高污染,並配合 以及诵X h _, 入氧氣氣氛等加氧方法,使 進行時BE $ 、+、+ 暴路在氧化環境中,以產生 斤製成之粉末為一種不完全 化物粉古 & 1 ’再經由適當之熱處理來V. Description of the invention (2) The conventional chemical process is used to manufacture transparent conductive oxide powder. The production steps are tedious and the process is long, and it requires multiple process equipment and cooperation to increase the manufacturing cost. In addition, the chemical process institute The large amount of industrial waste water produced, if not properly treated, will even cause environmental pollution. The current trend of environmental protection is inconsistent. , T 〃 [Objective and summary of the invention] In order to change the principle of the present invention, the present invention uses a dissolving method and the degree of formulation. After a guided beam impacts the required shape of the metal, it is exempted from the use of high-pressure pure molten metal. The metal is oxidized and oxidized to achieve the required oxide. The above-mentioned transparent conductive physical method is well-known. The high pressure is combined with a water spray method pipe formed by pure water under the pressure of South to form a metal powder. Water spray powder. The method of the present invention manufactures oxygen in water, oxygen in liquid, and powder in the atomization process. The above-mentioned various tritium-based powders of conductive metal rhenium have different problems in the prior art, and the present invention provides a process for making oxide powder; and, because of the manufacturing process, it does not cause pollution to the environment. The water spray method in the powder metallurgy process provides a method for manufacturing a metal oxide powder by a water spray = a method of dissolving oxygen to increase the oxygen of the powder. After the metal or non-metal is heated and melted, the f-fluid is flowed. The high-pressure water is used to atomize the particles into high-pressure water, and it is cooled to form particles. Generally, it is used to make bows of powder metallurgy. Use the principle of "physical method to pulverize powder" to avoid chemical powder. High pollution from π, combined with oxygen addition methods such as chanting X h _, oxygen atmosphere, etc., make BE $, +, + rupture in an oxidizing environment during the process, and produce powder made of catty as an incomplete compound. Fangu & 1 '
怨,如K ,,^ 此更可精確控制透明導電金 的乳化p b 紅度。另外,如杲以不完全 五 、發明說明(3) 氣化之读BB、* ^ " 材,相^ ^ ^電金屬氧化物粉古十 制ρ ά #父於使用完全氣介+ 末來製作透明導電濺鍍靶 4車^容易。 L之透明導電金屬氧化物粉末,其 於古發明之利用溶有,h 二來,f法,其步驟包;2 t ^壓水喷霧製造金屬氧化物 連接/谷融金屬溶液;將八Η將金屬原料加熱至溶融狀態 連接於嘖。皆 羽1金屬滋:、、右φ >,.. 凝固點)以V 桶需加執至、J 其盛料桶 ”《)、以維持該金屬溶I至適*溫度(超過金屬原料的 ,亚以溶有氧氣之之之洛融狀態;使金屬溶液流入 使金屬溶液形成霧化,純水衝擊之,利用高壓水的衝 i ♦部形成金屬氧化粉氧化金屬液滴;霧化氧化金屬液 砘水之衝擊壓力來決定。复其粒徑由噴嘴的口徑以及高壓 為銦、錫、鋅其中之—,用、中,本發明使用之金屬原料係 鋅,另外,其金屬原料可=形成氧化銦、氧化錫和氧化 生氧化銦錫。 時使用適當比例的銦與錫以產 此外,本發明還包含〜 的步驟,以增加金屬氣=^,末成形階段,通入氧氣氣氛 後,更包含後續的熱處理^,之氧化程度。在粉末成形之 經過咼溫氧化以調整該金、=將製成之金屬氧化粉末再 化粉末之氧化程度可緩由不氣化粉末之氧化程度。金屬氧 制。 同的熱處理溫度與時間來控 【較佳實施例說明】 本發明之利用溶有氣5 粉末的方法,與習知的二21,壓水喷霧製造金屬氧化物 子去比較,除了成本較低之Resentments, such as K ,, ^, can more precisely control the emulsified p b redness of transparent conductive gold. In addition, such as the incomplete five, the description of the invention (3) gasification of reading BB, * ^ " material, phase ^ ^ ^ electric metal oxide powder ancient ten systems ρ # father Yu use completely air + future Making a transparent conductive sputtering target 4 cars is easy. The transparent conductive metal oxide powder of L is used in the ancient invention to dissolve, h two, f method, its steps include; 2 t ^ pressurized water spray to produce metal oxide connection / Gu Rong metal solution; The metal raw material is heated to a molten state and connected to the osmium. Jiu Yu 1 Metal Nozzle: ,, right φ >, .. Freezing point) V barrels need to be added to J, its container ""), in order to maintain the metal solution to the appropriate * temperature (over the metal raw materials, The melting state of oxygen and oxygen; the metal solution flows into the metal solution to form atomization, and pure water impacts it, and the high pressure water is used to form the metal oxide powder to oxidize the metal droplets; the atomized oxidized metal liquid The impact pressure of the water is determined. The particle size is determined by the diameter of the nozzle and the high pressure is one of indium, tin, and zinc. The metal raw material used in the present invention is zinc. In addition, the metal raw material can form oxidation. Indium, tin oxide and oxidized indium tin oxide are produced using an appropriate ratio of indium and tin. In addition, the present invention also includes a step of ~ to increase the metal gas = ^, at the final forming stage, after the oxygen atmosphere is passed, it further contains Subsequent heat treatment ^, the degree of oxidation. After the powder is formed, the temperature is oxidized to adjust the gold. The degree of oxidation of the powder obtained by reoxidizing the metal oxide powder can be slowly reduced by the degree of oxidation of the non-gasified powder. The same heat treatment To control the degree and time [] using the described preferred embodiments of the present invention, the gas dissolved powder method 5, 21 and two conventional pressurized water spray producing metal oxide promoter to compare, in addition to the low cost
527241527241
ί本ί:會ίίί工業ί水的問題。•了再進-步詳細揭 ^ 、本^明的貫施例配合圖示說明如下: 含右:Γ考第1圖’其為溶氧水喷霧製粉設備示意圖,包 , 1料桶10 ’用以盛裝溶融之金屬溶液11。並呈右 成料福in、* k符疏枓桶内金屬溶液11的溶融狀態。 妾一流嘴30,金屬溶液11經流嘴30流入噴霧座 古^ 1溶氧高壓純水40以衝擊並氧化金屬溶液11,溶氧 呵壓純水40是於純水的傳送途中提供—氧氣源7〇,复 :壓:為每平方公分1公斤(lKg/Cm2)以增加純水的溶氧虱 二苦t ΐ之氧化金屬液滴12落人具有氧氣氣氛的腔體5〇内 二γ品加以冷卻,腔體5〇内之氧氣氣氛係由腔體氧氣源 所控制’腔體氧氣源9〇的壓力為每平方公分〇.1公斤 水:尾:22::化之氧1匕金屬液滴12形成金屬氧化物粉末加 此口妝後,金屬氧化物粉末將逐漸沉澱至底部集粉哭 Γπκ然Ϊ待粉末收集完畢之後,將集粉器60裝上加壓蓋; j Bar工虱,將水壓出形成金屬氧化物泥塊。並將此金屬 氧化物泥塊置入加熱爐中乾燥,經由溫度、時間與氣氛之 控制’可形成不同氧化程度之金屬氧化物。 本發明之具體實施方法,可配合第丨圖之水喷霧製粉 設備示意圖加以說明,其步驟詳述如下:先將純度皆為 9 9.9 9%的純銦金屬與純錫金屬以1比1莫耳化〇1幻比例加以 秤重將金屬原料準備完成。接著,將金屬原料置入熔煉燐 中加熱至攝氏6 0 0度至8 0 0度之間形成溶融的金屬溶液u二 再來,將金屬溶液U置入一盛料桶1〇,盛料桶需預熱至約ί 本 ί: Will ίίί The problem of water. • Re-advanced-detailed steps ^, the implementation examples of this ^ Ming are illustrated as follows: Contains the right: Γ test Figure 1 'It is a schematic diagram of dissolved oxygen water spray milling equipment, bag, 1 bucket 10' Used to hold the molten metal solution 11. And it shows the melting state of the metal solution 11 in the right-handed material blessing, * k symbol sparse barrel.妾 First-rate mouth 30, metal solution 11 flows into spray seat through flow nozzle 30. 1 Dissolved oxygen high-pressure pure water 40 to impact and oxidize metal solution 11, dissolved oxygen pressure pure water 40 is provided during the transmission of pure water—oxygen source 70, complex: pressure: 1 kg per square centimeter (lKg / Cm2) to increase the water droplets of dissolved oxygen lice diku t t t After cooling, the oxygen atmosphere in the cavity 50 is controlled by the cavity oxygen source. The pressure of the cavity oxygen source 90 is 0.1 kg per square centimeter of water: tail: 22 :: chemical oxygen 1 metal liquid After dropping 12 to form a metal oxide powder and adding this mouth makeup, the metal oxide powder will gradually settle to the bottom of the powder collector. After the powder is collected, the powder collector 60 is fitted with a pressure cap; j Bar worker lice, Water is pressed out to form metal oxide sludge. The metal oxide mud block is put into a heating furnace and dried, and metal oxides with different degrees of oxidation can be formed through the control of temperature, time and atmosphere. The specific implementation method of the present invention can be described in conjunction with the schematic diagram of the water spray powder making equipment shown in FIG. 丨, and the steps are detailed as follows: firstly, pure indium metal and pure tin metal with a purity of 9 9.9 9% are prepared in a ratio of 1 to 1. The earrings are scaled and weighed to prepare the metal materials. Next, the metal raw materials are placed in a smelting reel and heated to between 600 and 800 degrees Celsius to form a molten metal solution u, and then the metal solution U is placed in a hopper 10 and the hopper Need to warm up to about
第7頁 527241Page 7 527241
第8頁 527241 五、發明說明(6) 氧化銼為容器置入大氣爐中,通入空氣並設定熱處理溫度 為攝氏8 5 0度、熱處理時間為兩小時。再經過熱處理後之 氧化銦錫粉末含氧量經化學分析為17.8wt%。 雖然本發明之較佳實施例揭露如上所述,然其並非用 以限定本發明,任何熟習相關技藝者,在不脫離本發明之 精神和範圍内,當可作些許之更動與潤飾,因此本發明之 專利保護範圍須視本說明書所附之申請專利範圍所界定者 為準。Page 8 527241 V. Description of the invention (6) The oxidized file is a container placed in an atmospheric furnace, air is passed in and the heat treatment temperature is set to 850 ° C, and the heat treatment time is two hours. The oxygen content of the indium tin oxide powder after further heat treatment was 17.8 wt% after chemical analysis. Although the preferred embodiment of the present invention is disclosed as described above, it is not intended to limit the present invention. Any person skilled in the art can make some changes and retouching without departing from the spirit and scope of the present invention. The scope of patent protection of an invention shall be determined by the scope of patent application attached to this specification.
第9頁 527241 圖式簡單說明 第1圖之溶氧水喷霧製粉設備示意圖;及 第2圖為本發明實施例之喷霧座部分放大示意圖。Page 9 527241 Brief description of the drawings Figure 1 is a schematic diagram of the dissolved oxygen water spray powder making equipment; and Figure 2 is an enlarged schematic view of a spray holder in the embodiment of the present invention.
第10頁 【圖 式符號說 明 ] 10 盛 料 桶 11 金 屬 溶 液 12 氧 化 金 屬 液 滴 20 感 應 電 爐 30 流 嘴 40 溶 氧 高 壓 純 水 50 腔 體 60 集 粉 器 70 氧 氣 源 80 喷 霧 座 90 腔 體 氧 氣 源Page 10 [Illustration of Symbols] 10 Container 11 Metal solution 12 Oxidized metal droplets 20 Induction furnace 30 Flow nozzle 40 Dissolved oxygen high-pressure pure water 50 Cavity 60 Powder collector 70 Oxygen source 80 Spray base 90 Cavity Oxygen source
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CN114560493A (en) * | 2022-03-11 | 2022-05-31 | 广东长信精密设备有限公司 | Metal oxide powder production system |
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CN114560493A (en) * | 2022-03-11 | 2022-05-31 | 广东长信精密设备有限公司 | Metal oxide powder production system |
CN114560493B (en) * | 2022-03-11 | 2024-02-02 | 广东长信精密设备有限公司 | Metal oxide powder production system |
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