TW518772B - Light-emitting device with drying film and manufacture method thereof - Google Patents
Light-emitting device with drying film and manufacture method thereof Download PDFInfo
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518772 修正518772 Fix
案號 901317fi3 五、發明說明(1) 本發明係有關於一種具有吸濕薄膜之發光元件及苴制 作方法,主要係將鋇、錢或鈣等物質於欲蒸鍍 極: 面時再與氧氣起化合作用’以產生氧化鋇、氧化錯或f 甸等吸濕薄膜,且自然形成於對向電極表面,藉此 抑制黑點之產生及確保發光元件之工作 ^ 有機電激發光元件(owanic electr()1⑽ device,後稱有機EL元件)由於具有視野角度大、低 時間、顯不器厚度薄、低電力消耗、製程簡單、耐撞;: 不需背光源及可發射出全彩光源之優點,因此在新一 不面板中受到各方之注目及使用。 請參閱帛1 ® ’係為一習用有機電激發光 截面圖^主要=一基板u上形成一下部電極(tran= 鍍形成有一可包括有一電洞注入層(hole injection1w 、電飼傳=層(ho:e transp〇rt layer)、有機發 (orgamc emitting layer)或電子傳遞層 sport layer)之有機層13、對向電極(〇pp〇sed )14及隔離密封蓋15。由於有機以發光元件主 電極11、1 4個別所產生之電子戋雷:同&人要係利用兩 ^ ^ ^ ^ ^ ^ ^电于或電洞結合於有機層1 3内以 激叙有棧叙射層叙射出光源,無可避免在此過程 熱源,而此熱源一旦與已存在於隔離密封蓋15内水八、、晶 氣(moisture)結合,將在有機層13表面形成氧 生黑點(dark spot ),而此里點夕在a腺奋❼ 分杜夕膝㈣声及私“ 存會影響到有機讥 70件之發先強度及4先均勻性等發光品質, 大幅縮短有機EL元件之使用|八。 里有爸主时 518772 --案號9013ΠΜ_年月日 倏正__ 五、發明說明(2) 為解決黑點所產生之顯像缺憾,業界莫不挖空心思研 發各種有機EL元件之構造改良,例如在日本專利第jp —a-3 6 3890號或第jp-A — 5_1 1 4486號中揭露有在隔離密封蓋15内 存放有液態碳化氟(liquid fluorinated carbon),藉此 以有效移除發光時所產生之熱源。日本專利第Jp_A_5 — 4l2 81號中則揭露有在隔離密封蓋15内存在有合成沸石(synth etic zeolite)等液態脫水劑(dehydrating “⑶”混合入 液態碳化就中,並藉此以中和移除所存在於元件週邊之水 分濕氣。 上述所揭露之各項專利雖然對黑點之產生皆有其有效 之降低功效。惟,其所使用之碳化氟等脫水劑皆是以液態 存在,在製程上有其一定之困難,不利於1(:之整合及成本 之降低。 示, j , 於隔 4存 存在 氣及 ,惟 為 係 其 離 在 之 達 雖 9 吸 若 其 此, 為美 中揭 密封 有一 吸濕 成黑 然該 在此 濕薄 當元 掉落 於是有 國專利 露有利 蓋(sea 内部間 薄膜17 點產生 項專利 種發光 膜固設 件受到 作用力 第二種有機EL元件之構造 第 5, 882, 76 1 號「〇rgani 用一吸濕薄膜(drying fi 1 ing case) 1 5内表面,且 隙(internal space ) 1 9, 以吸收存在於隔離密封蓋 之抑制效果。 可解決之前習用所揭露技 元件技術中,還是存在有 於有機層及對向電極之垂 外力撞擊而可能致使吸濕 將會直接碰撞對向電極或 ,如第2圖所 c EL element 1 m ) 1 7固設 與對向電極1 藉由固態形式 1 5内之水分濕 術之部分缺點 下列缺憾: 直延伸方向, 薄膜掉落時, 有機層,不僅Case No. 901317fi3 V. Description of the invention (1) The present invention relates to a light-emitting element with a hygroscopic film and a method for manufacturing osmium, which mainly involves barium, money or calcium and other materials to be deposited on the electrode: 'Chemical action' to produce barium oxide, oxidized oxide, or fluorene, and other hygroscopic films, which are naturally formed on the surface of the counter electrode, thereby suppressing the generation of black spots and ensuring the operation of light-emitting elements ^ owanic electr () 1⑽ device (hereinafter referred to as organic EL element) due to its large viewing angle, low time, thin display thickness, low power consumption, simple process, and crashworthiness: no need for backlight and full color light source Therefore, it has attracted the attention and use of all parties in the new panel. Please refer to 帛 1 ® 'for a conventional organic electroluminescence cross section ^ mainly = a lower electrode is formed on a substrate u (tran = plating is formed and may include a hole injection layer (hole injection1w, electrofeeding = layer ( ho: e transp〇rt layer), organic layer (orgamc emitting layer or electron transport layer), organic layer 13, counter electrode (〇pp〇sed) 14 and isolation sealing cover 15. Since organic light Electron mines produced by electrodes 11 and 14 individually: the same & person should use two ^ ^ ^ ^ ^ ^ ^ to combine the electric or electric holes in the organic layer 1 3 to excite the stack narrative layer to shoot out The light source is inevitably a heat source in this process, and once this heat source is combined with the moisture and moisture existing in the isolating and sealing cover 15, oxygen dark spots will be formed on the surface of the organic layer 13. And here in the evening, I ’m struggling to divide the sounds of Du Xi ’s knees and privately, and it will affect the luminous quality such as the first strength and the first uniformity of 70 organic lumens, which will greatly reduce the use of organic EL elements. There is daddy master 518772-case number 9013ΠΜ_year month day 倏 正 __ 5. Description of the invention 2) In order to solve the defects caused by black dots, the industry must research and develop various structural improvements of organic EL elements, such as disclosed in Japanese Patent No. jp —a-3 6 3890 or jp-A — 5_1 1 4486 Liquid fluorinated carbon is stored in the isolation sealing cover 15 to effectively remove the heat source generated during light emission. Japanese Patent No. Jp_A_5 — 4l2 No. 81 discloses the existence of the presence in the isolation sealing cover 15 There are liquid dehydrating agents (synth etic zeolite) and other liquid dehydrating agents ("hydraulic") mixed into the liquid carbonization, and thereby neutralize and remove the moisture and moisture existing around the components. The above-disclosed patents although It has an effective reducing effect on the generation of black spots. However, the dehydrating agents such as fluorine carbide are used in liquid state, which has certain difficulties in the manufacturing process, which is not conducive to the integration of 1 (: and cost reduction). It is shown that j exists in the presence of qi, but it is because it is away from it. Although it absorbs it, it is sealed for the United States and China to have a moisture absorption into black. It should be wet and thin when it falls. It is a national patent with a good cover (the interior of the thin film at 17 points in the sea produces a patented type of light-emitting film fixture that receives force. The structure of the second organic EL element is No. 5, 882, 76 1 "〇rgani uses a hygroscopic film (Drying fi 1 ing case) 1 5 internal surface, and internal space 1 9 to absorb the inhibitory effect existing in the isolation sealing cover. It can solve the previously disclosed conventional element technology. There is still a vertical external force impact on the organic layer and the counter electrode, which may cause moisture absorption to directly collide with the counter electrode or, as shown in Figure 2 c EL element 1 m) 1 7 Fixing and counter electrode 1 Part of the disadvantages of the wet-wet technique in solid form 1 5 The following defects: Straight extension direction, when the film falls, the organic layer, not only
第6頁 五、發明說明(3) 損傷元件,亦會因此降低其使用壽命: 2·吸濕薄膜無法設於對向電極表面:^』 薄膜欲形成於對向電極表面時,其工个 測試其工作溫度皆高於2 0 0 〇 °c以上,女 重影響有機層之工作可靠性及生產良碎 3·利用隔離密封蓋之蓋體先行設有吸濕薄 發光元件週緣之方法,不僅製程繁項, 之體積無法有效縮小之遺憾。 、 ^ 因此,如何針對上述各種習用發光元件 提出一種新穎之解決方法,可將吸濕薄膜直 極表面,不僅不會影響或損害有機層之工 有效抑制黑點之產生而得以延長使 發明之創作重點。爰是 1 ?力 ,毛明之主要目的在於提供一種吸渴薄 ’ 2、鎂或鈣等欲形成物質在欲形成於對 ,再與氧氣起化合作用,並自 = 十 此大幅降低制於卩士 曰…、办成於對向 作可f性,亦可有效提升產品良=了確保 元件,目的在於提供-種具有吸 臈自然形成大幅降低製程溫度之情 力撞擊掉落而j1電極表面,不僅可解決吸 之乾燥環境,f發光元件之疑慮,亦可確 命功效。 以抑制黑點之產生及延長發光 本發明之X , 一目的在於提供一種具有 L要係因為吸濕 :溫度太高,據 r此雨溫將會嚴 ,·及 膜’再固設於 且將造成元件 所發生之問題 接設於對向電 可靠性,又可 效,即成為本 膜之製作方法 向電極表面時 電極表面,藉 發光元件之工 濕薄膜之發光 況下將吸濕薄 濕薄膜遭到外 保發光元件内 元件之使用壽 濕薄膜之發光 518772Page 6 V. Description of the invention (3) Damaged components will also reduce their service life: 2 · Hygroscopic film cannot be placed on the surface of the counter electrode: ^ ”When the film is to be formed on the surface of the counter electrode, a test is performed. Its working temperature is higher than 2000 ° C, female weight affects the working reliability of the organic layer and the production is good. 3. The method of using the cover of the isolation sealing cover to set the peripheral edge of the thin light-emitting element, not only the process It is a pity that the volume cannot be effectively reduced. Therefore, how to propose a novel solution to the above-mentioned various conventional light-emitting elements, which can straighten the surface of the hygroscopic film, not only will not affect or damage the work of the organic layer, effectively suppress the generation of black spots, and extend the creation of the invention. Focus.爰 is 1 力 force, the main purpose of Mao Ming is to provide a thirst-thirsty thinner '2, 2. Magnesium or calcium and other to-be-formed substances are to be formed in pairs, and then cooperate with oxygen, and since == this greatly reduces the control of 卩Shi Yue ..., it can be done in the opposite direction, and it can also effectively improve the product quality. It guarantees the components, the purpose is to provide a kind of energy that absorbs the natural formation and greatly reduces the process temperature. Not only can it solve the concerns of the dry environment, but also the f light emitting element, it can also confirm the efficacy. In order to suppress the generation of black spots and prolong the luminescence of X, one purpose of the present invention is to provide a product with L due to moisture absorption: the temperature is too high, according to which the rain temperature will be severe, and the film will be fixed to the The problem caused by the component is connected to the opposite electrical reliability, and it is also effective, that is, when the method of making the film is directed to the electrode surface, the thin film is hygroscopic under the condition of the light-emitting element's working wet film. The luminescence of the inner element of the outer light-emitting element using the wet film 518772
五、發明說明(4) 元件,利用吸濕薄膜自然形成於對向電極表面,可有 ,丈簡化製程以降低成本支出,又可大幅縮小產品體積者 兹為使f « i委貝對本發明之結構特徵及所達成之 功效有更進二步之瞭解與認識,謹佐以較佳之實施例圖及 配合詳細之說明,說明如後: 煩請參閱第3圖及第4圖’係分別為本發明一較佳實 施例之於形成吸濕薄膜時之製程示意圖及發光元件之構造 截面圖圖所示’首先係在一基板之部分或全部表面 $成至少一由透光材質(如IT0、IZ〇、或其它可透光薄金 層)所製成之下部電極43 ’再藉由一般之蒸鑛或喷滅等製 膜方式於下部電極43之部分表面依序形成至少包括有一有 機發射層(organic emitting layer)之有機層45及對向電 極47。之後再將上述構件放置於一工作室31内,工作室“ 内存放有-待形成物質37 ’如鹼金屬、或鋇、Μ、鈣等鹼 土金屬,並藉由放置相對地點及角度可自然形成之一進料 通道375而面向對向電極47。 古當:電源供應器38開始供電,並致使一加熱元件39升 ::作室31内之工作溫度而將待形成物質37開始以濺鍍 j、又方式向進料通道375開始喷灑物料時,工作室之一惫 =供應器35將藉由工作室由氣體3 5 5所自然形成 通 2向進料通道375提供適量之氣體355,如氧氣。乳通 ,,3 55在鋇、鎂或鈣37在形成於對向電極47之前將 :乳氣35匕起化合作用,以成為具有吸收水份濕氣功致丁 =上鋇、氧化鎂或氧化鈣等吸濕薄膜49,並自然形 向電極〇表面,如第4圖所示。 战於對 518772V. Description of the invention (4) The element is formed naturally on the surface of the counter electrode by using a hygroscopic film. The process can be simplified to reduce the cost, and the volume of the product can be greatly reduced. The structural features and the effect achieved have a further two-step understanding and understanding. I would like to refer to the preferred embodiment diagrams and detailed descriptions, as described below: Please refer to Figure 3 and Figure 4 for the invention. In a preferred embodiment, a schematic diagram of a process for forming a moisture-absorbing film and a cross-sectional view of a structure of a light-emitting element are shown. 'First, a part or all of a surface of a substrate is made of at least one transparent material (such as IT0, IZ. , Or other light-transmissive thin gold layer) made of the lower electrode 43 ′, and then formed at least one organic emission layer (organic emitting layer) of the organic layer 45 and the counter electrode 47. After that, the above-mentioned components are placed in a working room 31, and the to-be-formed substance 37 'such as an alkali metal, or an alkaline earth metal such as barium, M, and calcium is stored in the working room 31, and can be formed naturally by placing the relative location and angle. One of the feeding channels 375 faces the counter electrode 47. Gudang: The power supply 38 starts to supply electricity and causes a heating element 39 liters :: The working temperature in the chamber 31 to start the substance 37 to be sputtered j When the material is sprayed to the feed channel 375, one of the working rooms is exhausted = the supplier 35 will naturally form the 2 through the working room through the gas 3 5 5 to provide the appropriate amount of gas 355 to the feed channel 375, such as Oxygen. Rutong, 3 55 in barium, magnesium or calcium 37 before being formed on the counter electrode 47 will be combined with milk gas 35 to make it have the function of absorbing water and moisture. D = barium, magnesium oxide. Or calcium oxide and other hygroscopic film 49, and naturally shape the surface of the electrode 0, as shown in Figure 4. Fight against 518772
這些吸濕薄膜4 9材質在與水份濕氣結合時係屬於化學 abS〇rb),故一里吸收後就不會再釋放 ^子出來,因此可確保有機層45週緣之乾燥 命= = 產生、確保發光元件可靠性及延長使Ϊ壽 之後,再於基板41、下部電極43、有機層45、對向 °及濕薄膜49之#露表面形&一隔離密封蓋或隔離密 、二8,即可完成吸濕薄膜49直接設於對向電極表面之 發光7G件,不僅可簡化封裝等製作流程,亦可有效縮小元 件之體積。 另外,由於有些吸濕薄膜49材質在與水份濕氣結合後 曰形成一強鹼化合物,例如氧化鈣遇水形成氫氧化 I保護其它元件之安全性,因此,本發明亦可在隔離密封 蓋或隔離密封層48内設有一惰性氣體,利用惰性氣體^ 離作用以確保其它元件不受強鹼化合物之傷害。 又,一般而言,待形成物質37所使用之鹼金屬,其 鈉鉀等化學物質非常活潑,並不容易在常態環境中長期 存在與控制,因此,當本發明欲使用如鈉或鉀等化性^潑 物質時’可直接利用市售之鹼金屬載片(AlkaU ^ S^Ser),例如義大利SAES Getters公司所提供者,將二 態環境中穩定的鹼金屬鉻酸鹽(Me2Cr04 ; Me為鹼金屬物^ )及一還原劑(St 101R)混合物以加熱還原方式處理,藉此 以取得所需要之鹼金屬物質及本發明所需要之二 37及吸濕薄膜49。 /成物貝The materials of these moisture-absorbing films 49 and 9 are chemical abSorb when combined with moisture and moisture, so they will not be released again after absorption, so the drying life of the 45 edges of the organic layer can be ensured = = generated After ensuring the reliability of the light-emitting element and extending the lifetime, the exposed surface shape of the substrate 41, the lower electrode 43, the organic layer 45, the opposite °, and the wet film 49 is an isolation seal cover or isolation seal. That is, the light-emitting 7G component with the moisture-absorbing film 49 directly disposed on the surface of the opposite electrode can be completed, which can not only simplify the manufacturing process such as packaging, but also effectively reduce the volume of the component. In addition, some materials of the moisture-absorbing film 49 form a strong base compound after being combined with moisture and moisture, for example, calcium oxide meets water to form hydroxide I to protect the safety of other components. Therefore, the present invention can also be used in the isolation sealing cover. Or, an inert gas is provided in the isolation sealing layer 48, and the inert gas is used to ensure that other components are not damaged by strong alkali compounds. In addition, in general, the alkali metals used in the substance to be formed 37, such as sodium and potassium, are very active and are not easy to exist and control in a normal environment for a long time. Therefore, when the present invention intends to use chemicals such as sodium or potassium, etc. In the case of a substance, a commercially available alkali metal slide (AlkaU ^ S ^ Ser) can be used directly, for example, provided by the Italian company SAES Getters, which will stabilize the alkali metal chromate (Me2Cr04; Me in a two-state environment). It is an alkali metal compound ^) and a reducing agent (St 101R) is treated by heating reduction to obtain the required alkali metal substance and the second 37 and the moisture-absorbing film 49 required by the present invention. / Adult Shellfish
518772518772
五、發明說明(6) 吸濕薄膜4 9成品直接蒸鑛或丨賤鍵於對向電極4 了表面, 曰 採用將鋇、鎂或鈣等欲形成物質37先行加熱處理,並$ $ 形成於對向電極4 7表面時再與氧氣3 5 5化合,其工作⑽产人 將可獲得大幅降低,其工作溫度據測試僅有4 〇 〇它左1右夂, 相對習用若以成品直接形成之工作溫度2 〇 〇 〇它,工㈤ 明顯降低不少,因此其當可確保不損及發光元件有機二; 之目的。 曰 當然,氧氣355之存在對於有機層45亦存在有不少 舁j,因此除了工作室31内之氧氣355供給適量必須 =思外,工作至3 1内亦可設有至少一隔離肋3 3鄰觸 對,電極47…在欲形成吸濕薄膜47製程 :: 氧氟355碰觸於有機層45之機率。 百政^離 雖然在上述實施例中皆以發光元件為敘述元件 形成吸濕薄膜之製作方法並不限於發 二ί是r份濕氣或高溫皆會起作用而損害二i 、置?可適用於本發明所揭露之技術方法中。一 發光ΐ ϊ ί製ΐ ί t發=有關於一種具有吸濕薄膜之 面,藉此以用來抑制里點2 形成於對向電極表 利用者,應符合我國性垂進步性及可供產業 爰依法提出發明專利申規疋之專利申請要件無疑, 為禱。 明祈鈞局早日賜准專利,至感V. Description of the invention (6) Moisture absorbing film 4 9 The finished product is directly vaporized or the bond is on the surface of the counter electrode 4, which means that barium, magnesium, or calcium, etc., which is to be formed, is first heat-treated, and is formed in $ When the surface of the counter electrode 4 7 is combined with oxygen 3 5 5, its working personnel will be greatly reduced. Its working temperature is only 4,000 to the left and right. According to the test, it will be formed directly from the finished product. It has a working temperature of 2000, and the working temperature is obviously reduced a lot, so it should be able to ensure that the light-emitting element is not damaged. Of course, the existence of oxygen 355 also exists a lot for the organic layer 45. Therefore, in addition to the appropriate amount of oxygen 355 supply in the working room 31, it is necessary to think that at least one isolation rib 3 can be provided within the working space 3 3 Adjacent contact pair, the electrode 47... In the process of forming a hygroscopic film 47: The probability that the oxygen fluoride 355 touches the organic layer 45. Bai Zheng ^ Li Although in the above embodiments, the light-emitting element is used as the narrative element, the manufacturing method of forming a hygroscopic film is not limited to the development of two parts of moisture or high temperature, which will damage the two parts. It can be applied to the technical method disclosed in the present invention.一 光 ΐ ϊ ΐ 制 ΐ ί t hair = there is a surface with a hygroscopic film, which is used to suppress the formation of the inside point 2 on the counter electrode user, which should be in line with China's progress and available industry It is undoubtedly necessary to submit the patent application requirements for invention patent application according to law. Ming Qijun Bureau granted quasi-patent as soon as possible
第10頁 518772 _案號90131763_年月曰 修正_ 五、發明說明(7) 惟以上所述者,僅為本發明之一較佳實施例而已,並 非用來限定本發明實施之範圍,舉凡依本發明申請專利範 圍所述之形狀、構造、特徵及精神所為之均等變化與修飾 ,均應包括於本發明之申請專利範圍内。 圖號對照說明:Page 10 518772 _Case No. 90131763_ Amendment _ V. Description of the Invention (7) The above description is only a preferred embodiment of the present invention, and is not intended to limit the scope of the present invention. Equal changes and modifications of the shape, structure, characteristics and spirit described in the scope of the patent application of the present invention shall all be included in the scope of the patent application of the present invention. Drawing number comparison description:
11 基 板 12 下 部 電 極 13 有 機 層 14 對 向 電 極 15 隔 離 密 封蓋 17 吸 濕 薄 膜 18 密 封 墊 19 内 部 間 隙 31 工 作 室 32 進 氣 通 道 33 隔 離 肋 35 氣 體 供 應 器 355 氣 體 37 待 形 成 金 屬 375 進 料 通 道 38 電 源 供 應 器 39 加 熱 元 件 41 基 板 43 下 部 電 極 45 有 機 層 47 對 向 電 極 48 隔 離 密 封 層 49 吸 濕 薄 膜11 Substrate 12 Lower electrode 13 Organic layer 14 Counter electrode 15 Isolation seal cover 17 Moisture absorbing film 18 Seal 19 Internal gap 31 Working room 32 Intake channel 33 Isolation rib 35 Gas supply 355 Gas 37 Metal to be formed 375 Feed channel 38 Power supply 39 Heating element 41 Substrate 43 Lower electrode 45 Organic layer 47 Counter electrode 48 Isolation and sealing layer 49 Hygroscopic film
第11頁 518772 _案號90131763_年月曰 修正_ 圖式簡單說明 第1圖:係習用有機電激發光元件之構造截面圖; 第2圖:係另一種習用有機電激發光元件之構造截面圖; 第3圖:係本發明一較佳實施例於形成吸濕薄膜時之製程 示意圖;及 第4圖:係本發明之一較佳實施例構造截面圖。Page 11 518772 _Case No. 90131763_ Years and Months Revision _ Brief Description of the Drawings Figure 1: A cross-sectional view of the structure of a conventional organic electroluminescent device; Figure 2: A cross-section of the structure of another conventional organic electroluminescent device FIG. 3 is a schematic diagram of a manufacturing process of a preferred embodiment of the present invention when forming a moisture-absorbing film; and FIG. 4 is a cross-sectional view of a structure of a preferred embodiment of the present invention.
第12頁Page 12
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WO2005095924A1 (en) * | 2004-03-31 | 2005-10-13 | Agency For Science, Technology And Research | A sensor for measuring gas permeability of a test material |
US8603825B2 (en) | 2004-03-31 | 2013-12-10 | Agency For Science, Technology And Research | Sensor for measuring gas permeability of a test material |
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