TW518588B - Recording medium and recording method - Google Patents

Abstract

A recording medium comprises a substrate and a recording layer on the substrate, wherein the recording layer is partially transformable between crystalline condition and amorphous condition by being partially heated and cooled so that a signal is recorded in the recording layer by the partial transformation of the recording layer, and the recording layer includes oxygen.

Description

A7 —----- B7__ V. Description of the invention ^ ^ I ~ —- The present invention relates to a kind of information recording media, the recording layer of which can be heated in a crystalline state by heating and b. The amorphous state is abnormal, and the signal is recorded in the recording phase by using a partial abnormality of the recording layer. The present invention also relates to a method for recording information on the information recording medium. JA-A-61-2594 shows that a hoof and hoof oxide mixture is adhered to a recording medium substrate by the electron beam evaporation method or spray subtraction method as a contained recording layer. " JP-A-2.252577, it is disclosed that a compound containing arsenic will be attached to a substrate of a recording medium by a subtraction method in a mixed gas of argon and oxygen to serve as a recording layer containing oxygen. JA A 63-58636 teaches that compounds containing germanium oxides and steles are attached to a recording medium substrate by electron beam evaporation of H to serve as oxygen-containing compounds. A layer was recorded, and the hoof-containing compound was attached to a recording medium substrate by a sputtering method in a mixed gas of nitrogen and oxygen to serve as a recording layer containing oxygen. The problem to be solved by the present invention, the means for solving the problem, and its function The purpose of the present invention is to provide an information recording medium and an information recording party's printing method for employees' cooperatives in the Intellectual Property Bureau of the Ministry of Economy, which can suppress the recorded information Changes over time, and / or the recorded information can be clearly read out. In particular, the present invention provides an information β recording medium and an information recording method, which can prevent a recording layer surrounding an amorphous state. Injuriously, the 圮 Ba state recording layer portion is k A due to crystal epitaxial growth, and / or, the recording layer portion of the amorphous state and the crystalline state surrounding the recording layer portion of the amorphous state The borders between the sections of the record layer are clear and smooth. This paper size is applicable to Chinese national standard T ^ s) A4 specification (21〇, χ297: ^ 1 ~--4-518588 A7

I -------- Ref ------ ίτ ------ ^ (Please read the notes on the back and fill in this page first) 5 518588 Α7 ------: __87 —___ V. Description of the invention (3) In terms of recording layers, such as Ge_Sb-Te series, 丨 n-Sb-Te series,

Ag-ln-Sb-Te series 歹 ij, MA-Ge-Sb-Te series (MA is Au, Cu, Pd, Ta, W, lr, Sc, Y, Ti, Zr, V, Nb, Cr, Mo, Mn, Fe, Ru, Co, Rh, Ni, Ag, Tl, S, Se, and Pt also have at least one element), Sn-Sb-Te series, | n-Se-T 丨 series, 丨 n- Se-ΊΠ-ΜΒ series (MB is Au, Cu, Pd, Ta, W, | ", Sc, y, Ti, Zr, V, Nb'Cr, Mo,

Materials such as Mn, Fe, Ru, Co, Rh, Ni, Ag, ΊΠ, S, Te, and Pt also have at least one element), Sn-Sb-Se series, etc. can be used. For the total atomic content in the recording layer, if the oxygen content ratio of the recording layer is less than 2 atomic%, it is difficult to make the formed recording mark stable due to the partial deformation of the recording layer. effect. Again, than 20 atoms. /. When it is high, it is difficult to achieve the transformation of the crystalline state and the amorphous state. In order to further improve the stabilizing effect of the recording mark, 3 to 15 atoms are used. /. It is advisable to use 8 to 14 atoms. /. Better. The recording layer contains oxygen as an oxide, which stabilizes the oxygen and keeps it in the recording layer, and suppresses component diffusion from the amorphous state and / or crystalline portion originating in the recording layer, or / Or the diffusion component is made into the amorphous part and / or the crystalline part inside the recording layer, and / or the crystalline part grows into the amorphous part. When the recording layer contains Ge, Sb, and Te, the recording layer preferably contains at least a part of Ge as an oxide. The content a of at least a part of the recording layer as an oxide is related to the content b of the other part of the recording layer as an oxide other than the oxide. ， + _〇5 range is 0. This paper size is applicable to the Chinese National Standard (CNS) A4 specification 297 mm.) ------- (Please read the notes on the back first and fill in this page) Printed by the Ministry of Intellectual Property Bureau's Consumer Cooperative

6-fl8588 4 as in V. Description of the invention Where the recording layer contains Ge, Sb and Te, it is appropriate that the recording layer also contains at least a part of sb as an oxide. The relationship between the content c of at least one of the wounds in the recording layer as an oxide and the content of d in other parts of Sb which are not used as an oxide in the recording layer is d. A range of $ c / (c + d) g0 2 is preferred. When the recording layer contains Ge, Sb, and Te, the content of each element is 10 to 30 atomic% for Ge and 10 to 30 atom for Sb. /. When Te is in the range of 40 to 80 atomic%, or Ge is in the range of 35 to 65 atomic%, Sb is in the range of 10 to 30 atomic%, and Fe is in the range of 35 to 65 atomic%, the amorphous phase and crystallization can be easily performed. Phase-to-phase changes and the possibility of rewriting information. In addition, for other elements, for example, Aii, Cu, Pd, Ta, W, |, Sc, Y, Ti, Zr, V, Nb, Cr, Mo, Mn, Fe, RU, Co, Rh, Ni, The addition of at least one element among Ag, Dingbu, shang, and hafnium in the range of 1 to 10 atomic% can increase the crystallization temperature of the amorphous phase, or increase the activation energy. When the recording layer contains Ag, 丨 n, Sb & Te, the recording layer should also contain at least a part of In as an oxide. In the recording layer, at least part of the oxide as n The relationship between the content e and the content of other parts of In that are not included in the recording layer as the oxide is preferably within a range of 0+ "S 0.5. When the recording layer contains Ag, ln, Si, and Ding, the recording layer should also contain at least-part of Sb as an oxide. The relationship between the content of at least part of the oxide in the recording layer, g, and the content of the other part of Sb that is not in the recording layer as an oxide, is Bu. + Shi's Zhang scale is applicable to Zhongguanjia standard money I -------- ^ ------ 1Τ ------- 0 (Please read the precautions on the back before filling this page) 18588 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of invention (5) h) S0.2 is better. When the recording layer contains Ag, In, Sb, and Te, the content of each element is such that Ag is 15 to 15 atomic%, and O is 15 to 15 atom. / 〇, 沘 is 仂 to rib atoms / 〇 Te is in the range of 20 to 40 atomic%, the phase change between the amorphous phase and the crystalline phase can be easily performed, and the rewriting of information becomes feasible. In addition, other elements such as Au, Cu ′ Pd, Ta, W, 丨, Sc, γ, Ti, z, V, Nb, Cr, Mo, Mn, Fe, RU, Co, Rh, Ni Adding at least one other element among Ag, Ag, osmium, sSe, Pt, and N in the range of ˜10 atomic% can increase the crystallization temperature of the amorphous phase or increase the activation energy. Effect. The recording layer is partially heated by irradiation with a light beam or an electron beam. As described above, since the recording layer contains oxygen, oxygen or an oxide can hinder at least a part of the amorphous phase and the crystalline phase. Therefore, it is believed that it can prevent epitaxial growth of crystalline growth and improve the stability of amorphous marking. The recording layer will be contained in the recording layer as oxygen of the oxide, and a part of the recording layer is heated and melted. At this time, because the oxide contained in a part of the recording layer keeps the viscosity of a part of the recording layer at a high level, the surface tension of a part of the recording layer is maintained at a high level. Accordingly, a part of the recording layer that is cooled after being melted for subsequent curing The boundary between the recording layer and other parts of the recording layer that surrounds one part of the recording layer is "0" when at least a part of the border is round and smooth to the right. One of the state and the state of "1" is defined as a part of the border, and the one of the "0" state and the "1" state of the signal recorded is also at least by the state When one of them is recognized, that is, one of the "0" state and Γ1 "state of the signal,

{Please read the first note on the back? • Install-ic write this page j

, 1T line 518588 and invention description (smoothing the boundary between the-part of the recording layer and the other parts of the recording layer should be at least as much as-the part 'can be used to record signals on the recording medium, Obtaining a clear and definitive definition of 'and' when reading signals from a recording medium, a clear and discerning identification can be obtained. It can be a part of the recording layer that is intended to be solidified and cooled It is an amorphous state, and the components of the recording layer are crystalline. One portion of the recording layer after being cooled for subsequent mization is crystalline, and the other portions of the recording layer are crystalline. It is amorphous. The above-mentioned method is particularly effective when the recording density is high. Since the substrate has spiral grooves or a large number of concentric circles, it has a circumference of approximately. A plurality of grooves juxtaposed in a radial direction extending in a direction, and a plurality of land ridges juxtaposed in a radial direction extending approximately in a circumferential direction between the grooves and the grooves, and the plurality of grooves With the majority of the lands (land) One is that when the recording track for recording signals is used, the smaller the radial interval of the recording track, the higher the recording density. If the radial interval of the recording track is the following, that is, the method described above. The effect becomes higher, and the effect is particularly high when the temperature is below 0.7 / ζ m. In addition, a part of the recording layer is heated and melted and then cooled and solidified, that is, the circumferential direction of the recording mark. The smaller the minimum length, the souther the recording density. If the minimum length in the circumferential direction marked by § is less than 0.7 m, the crystal grows by epitaxial growth at the mark boundary for the size of the mark. The distortion of the shape of the mark will increase the size, and the greater the influence of the change in the shape of the mark on the signal quality. Therefore, the above method becomes effective. When the minimum length of the record mark in the circumferential direction is 0.5 · 5 / / m, it is more effective. If there is a protective layer in contact with the recording layer, and the protective layer contains oxygen and nitrogen, the paper size applies the Chinese National Standard (CNS) A4 specification (210X 297 mm) I Binding Line (Please read the precautions on the back before filling this page) Employees of the Second Bureau of the Intellectual Property Department of the Ministry of Economic Affairs-Consumer Cooperative 518588

[Explanation of the Invention] (At least one of the printed gases produced by the cooperative of employees of the Intellectual Property Bureau of the Ministry of Economic Affairs, the diffusion of oxygen from the dragon recording layer will be suppressed and the oxygen recording layer will remain stable. Where the protective layer contains oxygen, the recording layer a. With oxygen, it can suppress the diffusion of oxygen from the protective layer into the recording layer. If it contains nitrogen, it can suppress the change from the amorphous state of the recording layer to a shape like w gp can inhibit the recording of crystalline state. The crystalline growth of the layer portion toward the recording layer portion of the amorphous state is relative to the total atom content in the side layer, and the nitrogen content ratio in the protective layer is 1 atomic% or more and 50 atomic% or less. Preferably, the protective layer contains ns and SiO2. If the protective layer contains at least one of chromium oxide, titanium oxide, aluminum oxide, and germanium nitride, component diffusion between the protective layer and the recording state can be suppressed. The composition of the Z recording layer is stable. If the protective layer contains nitrogen, its content is preferably 1 source% or more and 50 atomic% or less. In areas where the recording layer and the protective layer are in contact, Film thickness square The inclination of the nitrogen content is preferably more than 彳 atomic% / nm and more than 50 atomic% / 11 | 71. If this is the case, the recording film is heated to the melting point by irradiation with a small amount of laser beam 4 In the following high temperature cases, in the area where the protective layer and the recording layer are in contact, crystalline nuclei are easily generated, and the phase change from an amorphous phase to a crystalline phase, that is, erasure of the recording mark becomes easy. That is, By controlling the oxygen content of the recording layer and the nitrogen content of the protective layer, the storage stability of the amorphous at high temperature and the excellent elimination performance at high temperature can be obtained. Therefore, an excellent rewritable medium can be obtained. As for the protective film material, the mixture of ZnS and SiO2 has the advantages of low thermal conductivity and good recording sensitivity. However, after the material is rewritten more than 100,000 times, S will diffuse to the recording. In the layer, the optical constant of the recording layer changes, which may reduce the reflectance. In addition, in terms of the material of the protective layer, this paper size can also be adapted to the Chinese National Standard (CNS) A4 specification (210 × 29). 7mm) (Please read the note on the back first: write this page)

Ministry of Economic Affairs, Intellectual Property A, employees, 4 Cooperatives Printed with chromium oxide, titanium oxide, aluminum oxide, germanium nitride. Among them, chromium oxide has a large optical constant, and although it has the advantage of obtaining a large reflectance difference between the amorphous phase and the crystalline layer due to the multiple interference effect, it has a stress of Big disadvantage. Titanium oxide has a large thermal capacity, although it can obtain a larger cooling effect after heating and melting. However, because it is prone to oxygen deficiency, it has the ability to absorb light and reduce the reflectance. Missing. Although aluminum oxide is an extremely stable oxide, its adhesion to the recording film is weak. Although germanium nitride has the advantage of good adhesion to the recording film, it has the disadvantage that it is difficult to form a film by the sputtering method because the base material is a fragile material. Each of these protective layer materials has its own advantages and disadvantages. Mixing them can remove their respective disadvantages, and only a combination of their advantages exists. For example, chromium oxide and alumina, chromium oxide and germanium nitride, titanium oxide and alumina, alumina and germanium nitride, and the like. In addition, materials other than those described above may be further added to the aforementioned protective layer materials. Materials other than the above materials can be used, for example, Ce02, La〇3, Si〇, ln203, Ge〇, Ge02, PbO, SnO, Sn02, Bi203, Te02, SC2 03, Y2. 3, Ding02, Zr02, V205, Nb05, W02, W03, CdS, CdSe, ZnSe, 丨 n2S3, 丨 n2Se3, ln2Se3, Sb2S3, Sb2Se3, Ga2S3, Ga2Se3, GeS, GeSe, GeSe2, SnS, SnS2, Sn2, Sn2 , PbS, pnSe, Bi2Se3, Bi2S3, MgF2, CeF3, CaF2, TaN, Si3N4, AIN, CrN, BN, Si, TiB2, B4C, SiC, B, C, and those having a composition similar to these. The oxygen concentration is the ratio of the number of oxygen atoms to the number of all atoms in a unit volume. 'In the thickness direction of the recording layer, if the oxygen concentration in the recording layer changes, the layer in contact with the recording layer can be ^ Between the paper and the surface of the recording layer ^ The paper size applies the Chinese National Standard (CNS) A4 specification (21〇 > < 297 Public Holiday) I batch order I line (please read the precautions on the back before filling this page) -11 -518588 5. The composition diffusion characteristics described in the invention are set as desired, and the change in the dryness and the reflectance of the recording layer on the surface of the recording layer can be set as the desired. The adjustment of the oxygen concentration in the recording layer can also be used to oxidize the recording layer in a gas containing oxygen after making _, or use the oxygen of the ambient gas between the 5 layers of the recording layer. Control of the concentration is performed. In the direction of the thickness of the recording layer, at least one of the surfaces from the center of the recording layer to both sides of the recording layer, if the oxygen concentration increases, the layer and the recording layer that can contact the recording layer can be suppressed. The components diffuse between the surfaces' and maintain a high reflectance in the amorphous state at the location of the large fiscal center of the recording layer. In the direction of the thickness of the recording layer, from the approximately central position of the recording layer to the surfaces on both sides of the recording layer, 'If the oxide gas concentration will increase, the layers and records that contact both sides of the recording layer will be suppressed. The components between the surface of the layer diffuse and retain a high reflectance in a state where the center of the recording layer is approximately in the amorphous f state. It is noted that in the thickness direction of the recording layer, at least one of the surfaces on both sides of the recording layer is from the center of the recording layer to the recording layer. It is more appropriate to increase the oxygen concentration to the recording layer. It is about 2 times the oxygen concentration in the central location. It is printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs and provided with a reflective layer for reflecting light. A 5-layer recording layer is arranged between the reflective layer and the substrate. In the thickness direction of the recording layer, there is a first surface that is relatively adjacent to the substrate and a second surface that is relatively adjacent to the reflective layer. 'If the oxygen concentration of the first surface (or from the first surface to the third surface) The oxygen concentration in the depth) is lower than the oxygen concentration in the second surface (or the oxygen concentration in the second depth from the second surface to be approximately equal to the first depth). Standards are applicable to Chinese national standards (CNS yA4 specifications (210 × 297 mm) -12-518588 A7 B7. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (1 surface oxygen) oxygen The concentration is increased according to the oxygen concentration on the surface. The oxygen concentration on the two surfaces on both sides of the thickness layer is homogenized. The reflective layer is generally metallic, and its oxygen permeability is higher than that of resin. The substrate is small. As for the material used for the reflective layer, those with Au,, &, A | ^ as the main component have at least one of the elements, and its reflectance is extremely high. It is better to use it alone In the case of other elements, although the reflectance will be extremely high, the recording sensitivity will be lowered due to the great thermal conductivity. On the other hand, Ding, i, c ,, c, N, Sb, B, In, Te , Se, Si, Ge, Pb, Ga, As, Zn, Cd 'SC, V, Mn, Fe, Y, Zr, Nb, Mo, Tc, Ru, Rn, Pd, Hf' m 〇s, | "' At least one of Pt, steel, and milk is the main component. 'The reflectivity is low and the thermal conductivity is extremely low, so the recording sensitivity is good. Combine the former group of elements such as Au with Ding, etc. The elements of the latter group are mixed to obtain a reflective layer with high reflectance and low thermal conductivity. Specifically, the tongues are Au-Co, Au-Cr, and A u Chicken Ti, Au_Ni, Ag-Cr, Ag-Ti, Ag-Ru, Ag-Pd, Ag-Cu-Pd, AhTi, AUCr, A, Co, AhNi, AhNb, etc., and 'Au-Ag, Au-Cu A reflective layer with high reflectivity and low thermal conductivity can also be obtained. If the oxygen concentration on the first surface (or the oxygen concentration at the first depth from the first surface) is greater than the oxygen concentration on the second surface (or from the second surface) When the oxygen concentration in the second depth, which is approximately equal to the first depth, is high, the recording layer of one pair is included in the information recording time, and in the information recording medium, the reflective layer is disposed relatively to the substrate. When the temperature of the place where the relative side is inside is higher than the place where the relative side is outside in the information recording medium due to recording and / or reproduction, the clothes order U line (please read the precautions on the back side first) (Fill in this page)

518588 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 --------- _______ ____ B7 V. Invention Description 1 ---- 'The second surface will be oxidized due to the oxygen diffusion effect of the protective layer. The oxygen concentration on the 2 surface increases toward the first surface, causing it. The oxygen concentration on the surfaces on both sides of the recorded layer is uniform. As soon as the oxygen and fluorine concentration of the recording layer increases toward the first surface from the location where the recording layer is approximately central, the oxygen passing through the substrate is suppressed to reach approximately the center of the recording layer. location. In the direction of the thickness of the recording layer, when the oxygen concentration is increased toward the second surface from the approximately central position of the recording layer, a pair of recording layers are included in the information record, the strip medium, and the recording medium. In the inside, the reflective layer is disposed inside the relativity compared to the substrate, and the temperature of the location inside the relative recording medium in the information recording medium is higher than that of the location outside by the relativity by using recording and / or reproduction. When the temperature is high, oxidation of the recording layer at approximately the center is suppressed. If the recording layer includes the second field where the information can be recorded and the second field where only the prerecorded information is reproduced, the amount of oxygen in the recording layer in the second field and the recording layer in the second field The difference in the oxygen content is preferably 18 atomic% or less. The erasing and recording of the signals recorded in the first field are performed a plurality of times, and at least a part of the recording layer in the first field is repeatedly transformed between the crystalline state and the amorphous state. Then, the difference between the oxygen content of the recording layer in the second field and the oxygen content of the recording layer in the second field is preferably 18 atomic% or less. For example, if the oxygen content of the recording layer in the first field of the recordable information described above is different from the oxygen content in the second field where only the previously recorded predetermined information is reproduced, if it exceeds 18%, then The difference in reflectance between the two becomes larger, and it is difficult to reproduce the information in the first and second fields in the same way. Normally (please read the upi on the back first; write this page)

In 11 — ......... · The size of the paper used for ar and ar paper is subject to the Chinese National Standard (CNS) A4 specification (210 × 297 male shame) 14 518588 Printed by the shoulder of the Intellectual Property Bureau of the Ministry of Economic Affairs, Consumer Cooperative A7 B7 V. Description of the invention (12) For the information recording medium having the first and second fields as described above, if a recording layer is formed by a method such as the sputtering method, the second and third fields are formed after the formation. The oxygen content is approximately equal, and the reflectances of the two sides are also approximately equal. Therefore, there is no obstacle to regeneration. However, if the information in the second field is recorded by the method of molding the groove, because Physically different from the groove or the first area of the groove between the grooves for recording purposes, it causes the way of oxygen diffusion in the recording layer over time or the invasion of oxygen from the outside. Ways are different. In addition, the% combination of multiple or multiple recordings in the second field only changes the atomic arrangement of the recording layer in the first field, so that it is more likely to cause oxidation promotion than the recording layer in the second field. , Or vice versa to exclude oxides. If the recording layer is made to contain oxygen in advance, the above-mentioned problems will not be easily caused, and the difference between the oxygen content in the first field and the second field can be suppressed to 18% or less after the change over time or after several times of recording. . For the information recording method, it has a step of heating and melting a part of the recording layer, and cooling and solidifying a part of the heated and melted recording layer to form a recording layer surrounding a part of the recording layer. Signals in other parts are not marked, and it changes the recording layer between a crystalline state and an amorphous state, and uses part of the abnormality of the recording layer to record signals in the recording layer. The recorded signals There is a state of "0" and a state of "]", and either of the "0" state and the "1" state recorded is composed of one part of the recording layer and the other part of the recording layer The boundary between them is also defined by at least a part of it, and any one of the "0" state and the "状态" state recorded is at least identified by a part of the boundary. Information recording method, the S recording layer contains oxygen as an oxide therein, part of the recording layer I gutter (please read the precautions on the back before filling this page) Ding rr 15 518588 Α7 Β7 V. Description of the invention (13 Intellectual Property of the Ministry of Economic Affairs When the printing of the bureau's consumer cooperative is heated and melted, the viscosity of the-part of the recording layer is higher due to the oxides contained in a part of the recording layer, and the A part of the surface tension is at a relatively high level, whereby at least one of the boundary between a part of the recording layer and other parts of the recording layer is solidified by cooling after melting. If the part is round and smooth, one of the "0" and "1" states of the signal to be recorded is defined by at least a part of the realm, and the signal recorded When one of the “0” state and the “状态” state is also recognized by at least a part of the boundary, the signal ’s “0” bear and the “彳” state use at least a circle and smooth A part of the boundary between one part of the recording layer and the other part of the recording layer, and a clear definition can be made when recording a signal on a recording medium, and the signal is read from the recording medium Time, it must be clearly identified. It can be cooled and One part of the recording layer after it has been amorphous is in an amorphous state, and the other part is in a junction state. One part of the recording layer after being cooled can be solidified to be crystalline, and the recording is The other parts of the layer are in an amorphous state. It is more suitable that a part of the recording layer is heated and melted by the irradiation of a light beam. The recording layer has a first recording layer 4b and a second recording layer 4a, and the recording layer has a thickness direction. Between the first recording layer and the second recording layer, the oxygen concentration changes sharply (compared to the change in the oxygen concentration in the first recording layer and the second recording layer), and is averaged along the thickness direction of the recording layer. The average oxygen concentration of the first recording layer is 1/3 or less of the average oxygen concentration of the second recording layer averaged along the thickness direction of the recording layer, and the thickness of the first recording layer is smaller than that of the second recording layer. The thickness may be larger. The recording layer has a plurality of second recording layers, and the first recording layer may be arranged between the second recording layers. Gujing Jun (Please read the note on the back-install-write this page) The size of the paper is applicable to the national county of China 16 518588 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economy A 7 ______B7_ V. Description of the invention (14) Aspects of the invention: Hereinafter, the present invention will be described in detail based on examples. < First Embodiment > Prepared in advance from a transparent material (e.g., polycarbonate resin, glass, etc.) having a diameter of 120 mm and a thickness of 0.6 mm, as shown in Fig. 2 in the circumferential direction (that is, approximately , Concentric circles (or spirals) extending in the radial direction juxtaposed groove 1 ′, and the land (surface) section 1 ”juxtaposed in the radial direction juxtaposed in the circumferential direction, formed the substrate la. In the first embodiment, the radial distance between the center of the trench 彳 and the center of the adjacent land surface portion 1 ″ is q.74 // m. The first spraying chamber 9 in the spraying apparatus having a large number of spraying chambers and having a uniform layer thickness and good reproducibility is disposed on the substrate la using a mixture of acetylation and SiO2, and According to a sputtering method in an argon gas, a first excess ray layer 2 having a thickness of 90 nm (znS) 80 (Si0 2) 2 0 (80 and 20 gram molecular weight / 0) was formed on the substrate 1a. . Next, after the substrate was moved to the second spray chamber, the first protective layer 3 of 20 nm in thickness Cr203 was deposited by a sputtering method in argon using c 2 0 3 as a target. Then, After moving the substrate to the third sputtering chamber, a sintered body of Ag2.5Ge20Sb22.5Te55 (2-5, 20, 22.5, 55 as atomic%) was used as a standard dry body, and the thickness of the layer was 16 nm according to the extinguishing method in argon gas. The recording layer 4. Then, in the third spray chamber, an argon gas with a partial pressure of 10% of oxygen was mixed with the argon gas at a flow rate of 200 SCCM for a certain period of time to oxidize the surface of the recording layer 4. Then, The substrate was moved to the fourth spraying chamber, and the same method as that for forming the first excessive ray was used, and the thickness of (ZnS) 80 (Si〇2) (80 and 20 is gram molecular weight%) was laminated by a spray method to a thickness of 18 nm. ) 'S second protective layer 5. Then, in the fifth spraying room, AIC "alloys were used as targets, and they were laminated according to the spraying method. The paper size applies the Chinese National Standard (CNS) M specifications (210X 297 mm) ) Install ------ Order 丨 ------ Line (Please read the precautions on the back before filling this page) 17 518588 Intellectual Property of the Ministry of Economic Affairs Printed by employees' consumer cooperatives A7 B7 V. Description of the invention (15) A194Cr6 (94 and 6 are atomic%) first reflective layer 6 with a thickness of 35nm. Finally, in the 6th spray room, use AITi composite as the marking Then, a second reflective layer 7 with a thickness of 35 nm and A199Th (99 and 1 is wt%) is laminated by sputtering. The substrate with the protective layer and the reflective layer overlying the radiation layer is removed from the sputtering device and placed on the uppermost layer. The top surface is coated with an outer hardening resin protective layer 8 by a spin coating method. Similarly, on the same substrate lb, (ZnS) 80 (SiO2) 20 (80 and 20 are the molecular weight in order). 〇) the first cover layer 2 ', the protective layer 3' of Cr203, the recording layer 4 of Ag2.5Ge20Sb22.5Te55, (ZnS) 80 (SiO2) 20 (80 and 20 are the gram molecular weight./〇) of 2nd protective layer 5, AI94C "6 (94 and 6 are atomic%) first reflective layer 6 ', and 1 is 1% by weight) second reflective layer 7', ultraviolet curing resin protective layer 8 ', and The two substrates 1a, 1b 'are bonded (adhered) with the UV curable resin protective layers 8, 8' as the inner side, and are opposed to each other with the adhesive agent layer 9 at this time. When the diameter of the adhesive layer is 1 18 mm or more, the peeling of the adhesive layer caused by the impact of dropping or the like is unlikely to occur. The recording layer 4 'is subjected to the same oxidation treatment as the recording layer 4. Recording layer 4 After the formation of the 4 'layer, the time when the mixed gas of argon and oxygen is added to the recording layer is changed to change the oxygen content in the recording layer or the number of samples of the optical disc made by the degree of oxygen. First, Initialization is performed by irradiating with laser light having an elliptical beam having a wavelength of 810 nm, a beam length of 75 mm, and a short diameter of 1 mm. Next, the linear speed of the disc was rotated at about 6 m / s, and the objective lens of the wavelength 0.66 nm of semiconductor laser light NA 0.6 was focused, and then irradiated onto the recording layer through the substrate for recording and reproduction. When recording, a waveform of laser power modulated between 彳 彳 ⑴ ... and 5mW is used, and a random signal modulated by 8 to 16 is recorded. A record mark is formed with a power of 11 mW, and a power of 5 mw is used. The paper size is applied to the household standard (CNS) A4 specification (21Gx 297 public holidays) ~-—--

(Please read the precautions on the back first. H --- y write this page) Threading 18 518588 A7 V. Description of the invention (16) Except for direct excessive radiation. However, multiple multi-pulse wave recording waveforms are also recorded by dividing the recorded pulse waves into the majority except for the shortest mark, and the recording is performed on both the groove and the ridge. After the vibration of the signal recorded as described above was measured, the optical disc was placed in an environment of 9 (TC, 8G%) for one hour to perform an acceleration test, and the vibration was measured again after the acceleration test. When the oxygen in the recording layer was changed When the content or concentration is as follows, the vibration before and after the accelerated test is as follows. The oxygen content in the recording layer is measured by Auger electron spectroscopy. Sample 8 whose oxidation treatment of the recording layer is not carried out is more accurate than sample 彳 ~ 7. After the accelerated test, the tremor increased significantly. In addition, the sample 1 in which the mixed gas flowed in for the longest time had no tremor changes before and after the accelerated test, but the initial tremor was significantly worse than that of samples 2 to 8. Also, In the above samples 彳 ~ 7, after the formation of the recording layer, a mixed gas containing oxygen was flowed in to perform the oxidation treatment of the recording layer, but it was formed in a mixed gas environment of argon and oxygen by the spray method. The recording layer can also oxidize the recording layer. I -------- install ------ II ------ line (Please read the precautions on the back before filling this page} Ministry of Economy Wisdom Property Bureau employee consumption Printed by Sakusha Co., Ltd. This paper is in accordance with Chinese National Standard (CNS) A4 (210X297 mm). 19 Mixed gas flow (SCCM) Gas inflow time (seconds) Flutter (%)

The amount of oxygen (atomic%) is as described above. When the content of Ge is 10 to 30 atomic%, the content of Sb is 10 to 30 atomic%, and the content of Te is changed to 40 to 80 atomic%. In the case of β-recorded layer 'Or, the Ge content is from% to 65 atoms. . Do not include 10 ~ 30 atoms. In the case of a recording layer whose Te content is changed in the range of 35 to 65 atomic%, the same results as described above are obtained. The same results were obtained when a recording film containing no Ag was used, or when a recording film whose Ag content was changed in a range of 1 to 10 atomic% was used. In addition, Au, Cu, Pd, Ta, W, Bu SC, Ya, Tl, Zr, v, Nb, Cr, Mo, Mn, Fe, Ru, Co,

When Rh 'Ni, Ag, Ti, s, Se, Pt, and N, at least some of them] elements are substituted for Ag or even all of them, the same results are obtained. When the recording layer 4 is to be formed, a mixed gas of argon and oxygen is used as a sputtering gas to form a second recording layer 4a with a thickness of 2 nm, and then the sputtering gas is changed to an argon gas to form a first 16 nm thickness. 1 Recording layer 4b, the spray gas is changed to a mixed gas of argon and oxygen again, and the thickness is increased to 518588 18 V. Description of the invention (The second recording layer 4a, without the chlorine gas after the recording layer is formed In the case of the oxidation treatment of the oxygen mixed gas ^, that is, the effect of increasing the reflectivity of the optical disc is obtained. The person who changes at the time of forming the second recording layer ^ σ σ the milk gas partial pressure of the body, and the first Lu Ji The average of the second recording layer of the recording layer is the same as that of the table. When the content is adjusted from 2 atomic% to 20 atomic%, the neck movement due to the accelerated test is the same as that of the table. The oxygen content of the first recording layer is 5% of the oxygen content of the second recording layer or less, and the reflectance index of the disc is increased by 2/0. The second recording layer 4a is formed only on In the first recording layer 4b, the main daughter # M k 1 party, also obtained and formed The characteristics on both sides are very similar. When the range of the film thickness of the second recording layer 4a is changed, a very similar characteristic is obtained. However, when the film thickness is 5 nm or more, the recording is recorded. Sensitivity is degraded, and the power necessary for recording is increased by 1 mW. ≪ Second Embodiment > The Intellectual Property Bureau, Ministry of Economic Affairs, Employee Consumer Cooperative Co., Ltd. will print the same substrate la as in the first embodiment, and arrange it in The sputtering chamber is the first sputtering chamber in the sputtering device with good uniformity and reproducibility of layer thickness. The target is a mixture of ZnS and SiO2 and the sputtering method in argon gas to form a thickness of (ZnS) 80CSi02) 2O (80 and 20 gram molecular weight%) of the 90th cover layer 2 on the substrate | a. Next, after moving the substrate to the second spraying chamber, the first protection of the layer of 20 ° C and 20 ° C was applied by using the method of “c03 as a target and the sputtering method in argon gas”. Layer 3. After moving the substrate to the third spraying chamber, a sintered body of Ag2.5Ge20Sb22.5Te55 (2.5, 20, 22-5, 55 as atomic%) was used as a target, and sprayed in argon gas. The recording layer was laminated to a thickness of 16 nm by a sputtering method. After that, the substrate was moved to an oxide formation chamber, and the recording layer 4 was oxidized by being placed in an oxygen environment for a certain time. Then, the substrate was moved to a fourth paper. Standards are applicable to Chinese National Standard (CNS) A4 specifications (210X 297 mm) 21 518588 A7 Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs, and a description of the invention (u The spray chamber is laminated with the spray method and the first excessive ray layer A second protective layer 5 of (ZnS) 80 (SiO 2) 2 0 (80 and 20 is a gram molecular weight./〇) having the same thickness of 18 nm was formed. Next, AlCr was used in a 5th spray chamber and AlCr was used. The alloy is used as a target, and the first reflection layer 6 of 9408 (94 and 6 are atomic%) is laminated according to the spray method. The thickness is 5nm. Finally, in the sixth spray chamber, AITi alloy is used as a target, and the second reflective layer with a thickness of 35nm AI " Th (99 and 1 is weight.) Is laminated according to the sputtering method. 7. Take the substrate with the laminated cover layer, protective layer, recording layer, and reflective layer out of the sputtering device and place it on the second reflective layer 7 to form a UV curable resin protective layer 8 by the spin coating method. Similarly, in On the same substrate lb, a first cover layer 2, a protective layer 3, a recording layer 4, a Cr2O3 layer, a recording layer 4, and a (ZnS) 80 (Si〇2) 20 (80 and 20 are gram molecular weights) are sequentially laminated. / 〇) of the second protective layer 5, AI94C "6 (94 and 6 are atomic%) of the first reflective layer 6 ', 丨 and 99 (99 and 1 are weight. /) Second reflective layer 7, and the UV-curable resin protective layer 8 ', and the UV-curable resin protective layers 8, 8 are used as the inner side and the opposite surface', and the two substrates and the adhesive layer 9 are bonded (adhered). At this time, the When the diameter of the adhesive layer is 118 mm or more, that is, peeling of the adhesive layer caused by the impact of a drop or the like is unlikely to occur. The recording layer 4 ′ is also the same as the recording layer 4 Oxidation treatment. After forming the recording layers 4, 4 ', the oxygen partial pressure and the storage time are changed, and for most kinds of samples of optical discs that change the content of Ge oxide and Sb oxide in the recording layer, A plurality of sample optical spies are prepared, and after initializing the respective sample optical discs in the same manner as in the first embodiment, they are driven and a random signal modulated by 8 to 16 is recorded. ， These optical discs are placed in an environment of 70 ° C and 90% for 40 days for accelerated testing, and the paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) (please read the notes on the back first) (This page)-Installation, 1T cable _ 22 518588 A7 B7 V. Description of the invention (20) The regeneration test after the acceleration test is performed, and the number of discs whose error rate reaches 2 times or more before the test is investigated. . At the same time, for each sample after initializing, drive it to record the random signal with 8 ~ 16 modulation, repeat it in the same place on the disc, and investigate the number of times that reproduction or recording errors (errors) will occur. . When the contents of Ge oxide and Sb oxide in the recording layer are changed, the number of optical discs whose errors are more than double is shown in Table 2. When the contents of Ge oxide and Sb oxide in the recording layer are changed, the number of repeated recordings is shown in Table 2. The measurement of the combined amount of Ge oxide and Sb oxide in the recording layer was obtained by using an XPS device and separating the XPS spectra of Ge and Sb as parameters. In Table 2, a is the content of Ge in the oxide state, b is the content of Ge in the non-oxide state of the metal or alloy, c is the content of Sb in the oxide state, and d is the non-metal of the metal or alloy. The content of Sb in an oxide state. Table 2 Partial pressure of oxygen (10 * 3Pa), storage time (minutes), a (a + b), c (c + d), the number of optical discs (10) with an error rate of more than 2 times in the accelerated test 1 sample 10.0 60 0.6 0.26 0/10 30,000 times 2nd sample 5.0 10 0.5 0.2 0/10 100,000 times 3rd sample 3.0 10 0.4 0.14 0/10 110,000 times 4th sample 1.0 10 0.2 0.07 1/10 130,000 times 5th sample 1.0 2 0.04 0.02 2/10 150,000 times 6th sample 1.0 1 0.02 0.01 3/10 200,000 times 7th sample anaerobic treatment 0.01 0.005 8/10 200,000 times not surely oxidizing the recording layer 7 After the accelerated test, the error (error) rate is significantly larger than that of samples 1 to 6. Not only has 8 out of 10 pieces, but the error rate has increased more than twice, and 4 of them have their regeneration. Significant difficulties. In the above, the content of Ge is 10 ~ 30 atomic%, and the content of Sb is the standard of the paper. The Chinese National Standard (CNS) A4 specification (210X 297 mm) is applied. (Please read the precautions on the back before filling this page) -Loaded '

Line 1T Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 23 518588

10 ~ 30 atoms. In the case of a recording layer whose Te content is changed in the range of 40 to 80 atomic%, the Ge content is 35 to 65 atomic% and the Sb content is 10 to 30 atoms. In the case of a recording layer having a Te content ranging from 35 to 65 atomic%, the same results as described above were obtained. The same results were obtained when a recording film containing no Ag was used, or when a recording film whose content was changed in the range of 1 to 10 atomic% was used. In addition, part or all of Ag is replaced with Au, cu, pd, buta, W, l ", Sc, Y, Ti, Z", v, Nb, c ", M0, Mn , Fe,

Ru, Co, Rh, Ni, Ag, osmium, S, Se, Pt, and N have at least one element added in the range of 1 to 10 atomic%, and the same result is obtained. <Third Embodiment> The radial distance between the center of the trench 1 and the center of the adjacent trench is set to a technical limit other than 0.75 / zm, which is the same as that in the first embodiment. The i-th spraying chamber in most spraying chambers, and the spraying device in which the thickness is uniform and reproducible is good. The target uses a mixture of 203 and 〇2, and forms a protective layer 2 on the substrate with a thickness of 90 nm (ZnSWpiOAc ^ O and 20 is the molecular weight percent) by a sputtering method in argon gas. a on. Next, after moving the substrate to the second sputtering chamber, the target was a sintered body of Ag4ln7Sb62Te27 (4, 7, 62, and 27 atomic%), and a recording layer 4 with a thickness of 20 nm was laminated by a sputtering method in argon gas. . After that, the substrate is moved to the oxide formation chamber and placed in an oxygen environment for a certain period of time for the oxidation treatment of the recording layer 4. Then, the substrate was moved to the third spray chamber, and the first protection was applied to the Chinese paper standard (CNS) M standard (21〇 &gt; &lt; 297 public shame &quot; ----)

---....... Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 24 518588 A7 B7 22 V. Description of the invention (The layers are formed in the same way and the layer thickness is 20nm (ZnS) 8Q (Si〇2) 2 (} (80 and 20 are gram molecular weight%) of the second protective layer 5. Then, using AITi alloy as a target and layering AI &quot; Th (99 and 1) with a thickness of 100 nm in the fourth sputtering chamber. The weight is a reflective layer 7. The substrate with the laminated protective layer, the recording layer, and the reflective layer is taken out of the sputtering device, and an ultraviolet curing resin protective layer 8 is coated on the uppermost layer according to the spin coating method. In the same manner, a layer (ZnS &amp; iSiOAc ^ O and 20 is a gram molecular weight) is sequentially laminated on another piece of the same substrate lb in order. The first] protective layer 2, the recording layer 4, and (ZnS) 80 (Si. 2) The second protective layer 5 of 20 (80 and 20 are molecular weight percent), the reflective layer 6 'of AI &quot; Th (99 and 1 by weight%), and the protective layer 8' of ultraviolet curing resin The substrate is provided with the outer and outer hardening resin protective layers 8, 8 'as the inner side and opposite sides, and is bonded with the adhesive layer 9. At this time, the diameter of the adhesive layer is 11 When it is 8 mm or more, it is difficult to cause peeling of the adhesive layer caused by impact such as dropping. The recording layer 4 'is also subjected to the same oxidation treatment as the recording layer 4. The technical limitation other than performing recording only on the groove is It is the same as the first embodiment, and after measuring the facial motion of the recorded signal as described above, the optical disc is placed in an environment of 80 ° C and 90% for 200 hours to perform an acceleration test, and the vibration is performed after the acceleration test. Measurement. When the oxygen partial pressure and storage time are changed and the content of In oxide and Sb oxide in the recording layer is changed, the flutter before and after the accelerated test is as follows. In oxide and 31) oxide in the recording layer The determination of the content is obtained by using an XPS device to separate the XPS spectra of in and Sb by peak separation. In Table 3, e is the content of in in the oxide state, and f is the content of all or alloys. The content of In in the non-oxide state, g is the content of 31 :) in the oxide state, and h is the content of sb in the non-oxide state of the genus or alloy. This paper size applies to China National Standard (CNS) A4 specification (210 X 297 mm) ---------- 1 clothing ------ 1T ------ # (Please read first Note on the back, please fill in this page again.) Printed by the Consumer Goods Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 25-518588 A7 B7 V. Invention Description 23 Table 3 Sample 1 Sample 3 Sample 4 Sample 5 ^ Sample 6 7 Sample oxygen partial pressure (1CT5Pa) 10.0 5 3 1 Placement time (min) 60 e / (e + f) 0.6 g / (g + h) 0.26 Vibration (10.0 before acceleration test after force σ speed test 10.0 0 0 0 0 0 10 10 1.0 2 1 Non-oxidizing treatment 0.5 0.4 0.2 0.04 0.01 0.005 0.2 0.15 0.07 0.02 0.01 0.005 8.0 7.7 7.5 7.3 7.0 6.7 8.0 7.9 7.9 7.9 8.0 15.0 • I The sample 7 whose oxidation treatment of the printing layer of the consumer cooperative of the property bureau did not actually undergo the oxidation, the acceleration after the accelerated test was significantly larger than that of samples 1 to 6. In addition, the sample 1 ', which has been placed for the longest time, was not used. There was no change in the tremor before and after the accelerated test, and the initial tremor was significantly worse than that of samples 2 to 7. In the above samples 1 to 6, The recording layer is oxidized by placing the recording layer in an oxygen environment, but the recording layer can also be oxidized by forming the recording layer in a mixed gas environment of argon and oxygen. In the above, the use of Ag contains It is also possible to obtain a recording layer in which the amount is 1 to 15 atomic%, the content of η is 115 to 15 atom /%, the content of sb is 45 to 80 atomic%, and the content of Te is 20 to 40 atomic%. The result is the same as the above. Moreover, other elements such as Au, Cu, Pd, Ta, W, Bu, Sc, Y, Ti, Zr, V, Nb, Cr, Mo, Mn, Fe, Ru, Co , Rh, Ni, TΊ, S, Se, Pt, and N, at least there are] when the element is added in the range of atomic%, the same result is obtained; &lt; Fourth embodiment &gt; The first embodiment is that the same substrate la is arranged with a large number of splashes ^, and the scale is applicable to Chinese National Standard (CNS) A4 specifications (210X297 male thin) (install-write this page) Order 26 518588 A7 B7 24 V. Invention Explanation (and the first sputtering chamber in the sputtering device with excellent film thickness uniformity and reproducibility, Furthermore, a mixture of ZnS and SiO2 was used as a target, and (ZnS) 80 (SiO2) 20 (80 and 20 had a molecular weight of 90 nm) was formed in an argon gas. / 〇) of the first excessive radiation layer 2. Next, after the substrate was moved to the second spray chamber, Cr203 was used as a target, and a first protective layer 3 of Cr203 with a thickness of 20 nm was formed in an argon gas. After moving the substrate to the third sputtering chamber, Ag2.5Ge2Osb22.5Te55 (2.5, 20, 22.5, 55 as an atom) sintered body was used as a standard stem, and the thickness was formed in argon gas to 16 of the recording layer 4. Thereafter, in a third spraying chamber, a mixed gas of argon gas and oxygen gas having an oxygen partial pressure of 100/0 was flowed at a flow rate of 200 sccm into a certain interval, and the oxidation treatment of the recording film 4 was performed. . Next, the substrate was moved to a fourth spray chamber, and a second protective layer 5 of ZnS-Si02-N with a thickness of 18 nm was formed in a mixed gas of argon and nitrogen. Next, in the fifth sputtering chamber, A | Cr alloy was used as a target, and the first reflection layer 6 of A | 94 (: "6 (94 and 6 are atoms. / 0) was formed to a thickness of 35 nm. Finally, In the sixth spraying room, a second reflection layer 7 of 35 nmiAI99Ti 丨 (99 and 1 is wt%) was formed using ΑΠΊ alloy as a target. The laminated substrate was taken out of the sputtering device and placed on the uppermost layer. A UV-curable resin protective layer 8 was formed on the top by a spin coating method. In the same manner, on the other same substrate ^^^, (ZnS) 80 (Si〇2) 20 (80 and 20 grams) (Molecular weight%) 1st cover layer 2, c2, 203 protective film 3 ', recording film 4, ZnS-SiCVN 2nd protective layer 5, AI94Cr6 (94 and 6 are atomic%) 1st reflective layer 6 , AI &quot; Tii (99 and 1 are weight%) second reflective layer 7, and UV-curable resin protective layer 8, and two substrates are used to make UV-curable tree-retaining layers 8 and 8 inside and The opposite side is bonded by the adhesive layer 9. At this time, the diameter of the adhesive layer is 118mm or more, that is, it is not easy to cause the gutter to fall off (please read the precautions on the back first) (Fill in this page) Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs's Consumer Cooperatives 27 518588 A7 B7 V. Description of the invention (25) Stripping of the adhesive layer caused by the impact of falling etc. Prepare the number of disc types as mentioned above and make them drive After recording the random signal with 8 ~ 16 modulation and measuring the error rate, the disc is placed in an environment of 90 ° C and 80% for 100 hours, and the acceleration test is performed. After the acceleration test, the error rate at the same place is measured ( After regenerating the error rate), in this place, the random signal was over-irradiated to measure the error rate (excessive ray error rate). The oxygen content in the recording film was set to 8 atomic%, and ZnS-Si〇2- When the nitrogen concentration of the second protective layer of N in the mixed gas of argon and nitrogen at the time of film formation changes the nitrogen content in the second protective layer of ZnS-Si〇2-N, after the accelerated test, The number of discs whose error rate has increased by a factor of 2 or more is as follows. The oxygen content in the recording film and the nitrogen content in the second protective layer were measured using Auger electron spectroscopy. Table 4 Nitrogen content Number of discs with over 2 times of excessive ray error rate after speed test (out of 10 pieces) Number of discs with over 2 times of reproduction error rate after accelerated test (out of 10 pieces) 0% 10/10 0/10 1% 1 / 10 0/10 2% 0/10 0/10 15% 0/10 0/10 25% 0/10 1/10 50% 0/10 2/10 60% 0/10 9/10 If the second protection is When the nitrogen content in the layer is 60%, that is, the reproduction error rate of 9 out of 10 discs is not only more than doubled, of which 8 paper standards are applicable to the Chinese National Standard (CNS) A4 specification (210X 297 mm) (Please read the notes on the back to write this page first). Binding Printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 28 518588 A7 B7 26 V. Description of the invention (It is extremely difficult to reproduce the film. The nitrogen content was 50 atomic% and was μ atom. /. In this case, a disc with a reproduction error of twice or more was also generated. However, no difficulty occurred in the reproduction of such discs. &lt; Fifth Embodiment &gt; After the optical disc produced in the same manner as the first embodiment was changed to record the shortest mark length, the temperature was 90 ° C. . Relative temperature. Leave the environment for 100 hours to perform the accelerated test, and measure the facial movement after adding 4 tests. The distance in the radial direction between the center of the groove 1 'and the ridge portion r adjacent to the groove 1' is recorded on both the groove and the surface. The modulation method is to review the two aspects of the following two methods. The marked position has information 1 and the non-positional part has information 0. The positioning method of the marking and the marking end have Information], and Yu Fei is the labeling side of the labeling part with information 0. When the change in the oxygen content in the recording film is changed, the change in flutter after the accelerated test is shown in FIG. 5. &lt; Sixth embodiment &gt; is made of a transparent material (e.g., polycarbonate resin, glass, etc.) with a diameter of 120 mm and a thickness of 0-6 mm, as shown in FIG. 2 (that is, concentric circles, or The shape of the spiral surface) is formed by the trenches juxtaposed approximately in the radial direction extending in the circumferential direction, and the ridges 1 ”juxtaposed in the radial direction approximately extending in the circumferential direction, The distance between the center of the groove 彳 and the center of the surface portion 1 ″ adjacent to the groove 彳 is different from the number of types of the substrates Ia. On these substrates, after recording with the shortest label length of 0_7 / zrn on the optical disc produced in the same manner as in the first embodiment, it was left for 100 hours at a temperature of 9 (rc, relative humidity of 80%). Environment for accelerated test, and pre-measured flutter after accelerated test. The paper size is applicable to China National Standard (CNS) A4 specification (210X297 mm). I -------- Doing clothing ------ 1T-- ---- ^ (Please read the precautions on the back before filling out this page) Printed by the Employee Consumption Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 29 M8588

2. Description of invention 27 Printed by the Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs. Regarding the modulation method, it is aimed at the marked position with the information "1", and j _ is the position where the position is not marked with the information "0". The parties that have information of "0" on the part other than the end of the label shall carry out a review. When the oxygen content in the recording film is changed, the vibration after the acceleration test is changed as shown in FIG. 6. &lt; Seventh embodiment &gt; The driver is made of a transparent material (e.g., polycarbonate resin, broken glass, etc.) having a diameter of 120 mm and a thickness of 0.6 mm, as shown in FIG. 2 (that is, concentric circles). (Or on the surface shape of the spiral shape) are formed in the grooves 1 juxtaposed in a radial direction extending approximately in the circumferential direction, and the surface portions juxtaposed in the direction of a half melon extending approximately in the circumferential direction r, and divide such grooves i, or surface portion 1, into a plurality of groove portions or a plurality of ridges on the circumferential side, and prepare areas between the groove portions or surface portions, The groove, or groove # 1 ”, is a substrate la formed with a molded groove approximately along the circumferential direction extending thereon to indicate address information and the like. On this substrate, the first embodiment is The same method is used to make the optical disc, and the above grooves] and the ridge factory are used as recording channels, and after most recording operations are performed] After 10,000 recordings, place them in an environment with a temperature and a relative humidity of 80%- Accelerated test at a fixed time. Change the time placed in an accelerated environment for 1 Million: under-recorded grooves], or ridges ", that is, the recording of information is the oxygen content in the recording layer of the first possible field, and the area where the molded groove representing the address information is formed, that is, The relationship between the oxygen content in the recording layer in the second field where only the predetermined information is reproduced, and the reflectance between the second field and the member field are changed as follows.

(Please read the precautions on the back f-equipment-Zunma page)

1T line 30 518588 A7 B7 V. Description of invention (%) 28 Table 5 Storage time Oxygen content Oxygen content in the second area Oxygen content in the first area and the difference between the second area and the second area reflectance # 0 hours 4% 2% 2% 0% 50 hours 8% 2% 6% 0 to 1% 100 Koriji 1 10% 2% 8% 1% 200 hours 15% 2% 13% 2% 300 hours 20% 3 % 17% 4% 500 hours 22% 4% 18% 5% 1000 hours 25% 5% 20% 8% Brief description of the drawing Figure 1 shows a phase change (perverted) type information recording medium according to an embodiment of the present invention A schematic cross-sectional view of the structure. Fig. 2 (a) is a cross-sectional view of the recording layer according to the present invention, with the substrate being disposed thereon and the ridges raised by the grooves of the substrate, and the substrate is cut in the radial direction. FIG. 2 (b) shows two embodiments of the substrate disposed on the recording layer pair according to the present invention (a plurality of grooves formed side by side in the radial direction and approximately concentric circles extending in the circumferential direction are formed). , And the concentric circular surface shape of the majority of the ridges, juxtaposed in the radial direction, is a spiral surface shape formed by the majority of the grooves extending in the circumferential direction and the majority of the ridges), which is a front view. Fig. 3 is a schematic diagram showing the relationship between the "标示" state and the "0" state of the signal read from the record mark or the signal to be recorded from the record mark. When the level of the recording signal changes, one of the "彳" state and the "0" state of the signal is read and recorded. Fig. 4 is a schematic partial cross-sectional view of layers, which shows that the oxygen concentration recorded in the thickness direction is different, and it can be composed of a plurality of layers. This paper towel Guanjia County (CNS) M size public director) (Please read the precautions on the back before filling this page)-Printed · Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs, Employees' Cooperatives 31 518588 A7 B7 V. Description of the invention (29) Figure 5 shows the relationship between the oxygen concentration, the shortest record mark length, and the flutter after the accelerated test. Fig. 6 is a graph showing the relationship between the oxygen, the degree of farming, the pitch of holding the road, and the flutter after the acceleration test. (Please read the note on the back first to write this page) The paper size printed by the Employees' Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs applies to the Chinese National Standard (CNS) A4 specification (210X 297 mm) 518588 A7 B7 30 Reference numerals la, lb ... substrate 1 '... groove 1' '... ridge 2, 2' ... first cover layer 3, 3 '... first protective layer 4, 4' ... recording layer 4a Recorded layer 4 b · · · 11th recorded layer 5, 5 ^ •• 2nd protective layer 6, 6 '... 1st reflective layer 7, 7' ... 2nd reflective layer 8, 8 '... UV curing resin protection Layer 9… Adhesive (adhesive) layer (please read the precautions on the back before filling this page) Member of the Intellectual Property Bureau of the Ministry of Economic Affairs X _ Consumer • Cooperative Co., Ltd. This paper is printed in accordance with China National Standard (CNS) A4 specifications ( 210X297 mm)

Claims (1)

518588 : Supplement, $ 88113122 ^^^^^ Τ? ΠΓά Revised November 7, 91 1 · An information recording medium used for improper margin recording, which includes a substrate and a recording layer on the substrate. The recording layer may be partially deformed between a crystalline state and an amorphous state by using a heating and cooling method, and a signal is recorded on the recording layer by using a partial deformation of the recording layer. The layer has 3 oxygen, and relative to the total atomic content in the recording layer, the proportion of oxygen content in the recording layer is 2-20 atomic%, and the substrate forms a side-by-side recording useful for recording signals thereon. Track, the interval between the recording tracks is below 0.7 μm. 2. The f-recording medium according to item i of the patent, wherein the recording layer contains Ge. 3. If the information recording medium in the scope of patent application No. 1 contains Te〇4. If the information recording medium in the scope of patent application No. 1 contains Sb05. · If the information recording medium in the scope of patent application No. 2 contains at least part of Ge. As an oxide. 6. The content of at least a part of Ge as an oxide in the information recording medium as claimed in item 5 of the patent application &amp; and the content of Ge that is not at least a part of Ge as an oxide and other parts in the recording layer b The relationship between the two is in the range of 002ga / (a + b) s05. 7. The information recording medium according to item 4 of the patent application scope, wherein the recording layer contains at least a part of Sb as an oxide. Where the recording layer where the recording layer where the recording layer where the recording layer (Please read the precautions on the back before filling this page) -34 · Information recording media with a patent scope of 8 ', such as the scope of patent application No. 7, in which at least part of the Sb content in the recording layer is an oxide The relationship between c and non-at least part of Sb which is an oxide and the other part of Sb in the recording layer contains 2 d. The relationship between the two is $ c / (c + (j) $ 〇 · 2. The minimum length of a part of the information recording medium of the patent scope item 7 is a part of the recording layer to be cooled and solidified after melting is less than 0.7 μτη. 10. If the information recording medium of the patent scope item 1 is applied, wherein The recording layer has a first field that can be recorded and a second field that only reproduces pre-recorded predetermined information. The difference between the oxygen content of the recording layer in the first field and the oxygen content of the recording layer in the second field is 18 Atomic% is' jp 〇U · As the information recording medium in the first patent application scope, wherein the first field is to delete the recorded signals and recorded signals multiple times, and at least a part of the recording layer in the first field After the system has repeatedly deformed between the crystalline state and the amorphous state for many times, the difference between the oxygen content of the recording layer in the first field and the oxygen content of the recording layer in the second field is 18 atomic% or less. 12 · If the information recording medium in item 1 of the scope of patent application has a state where the recording signal is "0" and a state of "1", any one of the state of "0" and the state of "1" for recording is related to It is defined as at least a part of the boundary between a part of the recording layer cooled and solidified after the melting and the other part surrounding the part of the recording layer, and the paper size recorded is applicable to the Chinese national standard (CNS> M specification) (210 X 297 mm) (Please read the precautions on the back before filling in this page}. Equipment—, τ .: Line 丨 • 35- 518588 A8 B8 C8 D8 2. The status of the patent application scope "0" and the status of "1" are also identified on the at least part of the boundary. 13. The information recording medium of the scope of application for patent, wherein the substrate has a plurality of grooves extending in the circumferential direction and juxtaposed in the radial direction, and the grooves extend between the grooves in the circumferential direction and juxtaposed in the radius. A plurality of lands in the direction, one of the plurality of grooves juxtaposed in the radial direction, and one of the plurality of lands juxtaposed in the radial direction form a recording track. 14. The information recording medium according to item 丨 in the scope of patent application, wherein the signal is recorded on the recording layer by partially changing from a crystalline state to an amorphous state. 15. · In the case of the information recording medium under the scope of the patent application, the ratio of the oxygen content in the recording layer to the total atomic content in the recording layer is 2-20 atomic%, which can be suppressed at high temperatures and Under the strict conditions of high humidity, long-term storage of the recording medium with recorded information, such as jitter and other signal deterioration, may occur. This paper size is in accordance with Chinese National Standard (CNS) A4 specification (21〇χ297 mm) ............. (Please read the precautions on the back before filling in this page) ............ •• line,