TW516340B - AC type plasma apparatus for flat lamp and the manufacturing method thereof - Google Patents

AC type plasma apparatus for flat lamp and the manufacturing method thereof Download PDF

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Publication number
TW516340B
TW516340B TW090131601A TW90131601A TW516340B TW 516340 B TW516340 B TW 516340B TW 090131601 A TW090131601 A TW 090131601A TW 90131601 A TW90131601 A TW 90131601A TW 516340 B TW516340 B TW 516340B
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Taiwan
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glass substrate
discharge
lower plate
light source
upper plate
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TW090131601A
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Chinese (zh)
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Jun-Sei Lee
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Science Adventure Technology C
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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/20Constructional details
    • H01J11/22Electrodes, e.g. special shape, material or configuration
    • H01J11/32Disposition of the electrodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J11/00Gas-filled discharge tubes with alternating current induction of the discharge, e.g. alternating current plasma display panels [AC-PDP]; Gas-filled discharge tubes without any main electrode inside the vessel; Gas-filled discharge tubes with at least one main electrode outside the vessel
    • H01J11/20Constructional details
    • H01J11/34Vessels, containers or parts thereof, e.g. substrates
    • H01J11/36Spacers, barriers, ribs, partitions or the like
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J9/00Apparatus or processes specially adapted for the manufacture, installation, removal, maintenance of electric discharge tubes, discharge lamps, or parts thereof; Recovery of material from discharge tubes or lamps
    • H01J9/02Manufacture of electrodes or electrode systems

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  • Engineering & Computer Science (AREA)
  • Physics & Mathematics (AREA)
  • Plasma & Fusion (AREA)
  • Chemical & Material Sciences (AREA)
  • Materials Engineering (AREA)
  • Manufacturing & Machinery (AREA)
  • Gas-Filled Discharge Tubes (AREA)

Abstract

The present invention provides an AC type plasma apparatus for flat lamp and the manufacturing method thereof. The purpose of the invention is to simplify the manufacture and reduce the manufacture expense, and additionally, to increase image brightness and decrease the drive voltage of discharging. In the invention, the improved separate manufacture method and the structure of the dielectric layer and the fluorescent layer are used in LCD back light, the illumination flat panel light source and so on. The invented AC drive type plasma apparatus is composed of an upper plate and an lower plate, and is characterized in that the upper plate is formed by covering the transparent electrode having a thickness of several thousand angstroms and the protection layer on the glass substrate; the lower plate is the backside glass substrate manufactured by laser processing or the shaped mold, in which a discharging electrolyzing trough formed by several glass separation walls with a certain height is disposed on the backside glass substrate; the side planes and the bottom plane of the discharging electrolyzing trough are coated with white color fluorescent material; a metal electrode structure is deposited on the lower portion plane of the backside glass substrate; and the deposition plane of the transparent electrode and the protection film is opposite to the formation portion of the lower plate discharging electrolyzing trough. After melting the molding material to tightly seal the upper plate and the lower plate, air in the discharging electrolyzing trough is expelled immediately. Furthermore, the discharging gas is injected at the same time such that a sealing state is formed for the discharging electrolyzing trough.

Description

^340 [發:明說明⑴一― ---—_______ 之詳細說明] :明的目的] L發明所屬# ^ 本發明/打領域及該領域之習知技術] 置及其 更加容 並減低 及電介 式電漿 量混合 陰極施 隨著時 樣強烈 製作方i ::關應:於平板光源之交流式電漿裝 易’並减少製作=:&亦是為使電漿裝置在操作丄 在放電時的’同時為提高其畫面解析度, 體層與dm而經改良其分隔製作方法 裝置及其巧=應用於平板光源之交流 後所呈現:;性j㊁m子與”子以相同的 間電壓,使其中之放電瓦斯呈活性化: 又美麗的:;更加安定的狀態,並且發出像極光- 應用於平板光源之電漿裝置即是利用該電漿發光現 象,進而使用在液晶顯示器(LCD; Uquid crystal^ 340 [post: detailed description of the first one---- — _______]: clear purpose] L invention belongs to # ^ the present invention / the field and the conventional technology in the field] and it is more tolerant and reduced and Dielectric-plasma-mixed-cathode cathodes are strongly produced with time. I :: Guan Ying: Easy to install AC plasma on flat light source and reduce production =: & It is also to make the plasma device in operation. At the same time, in order to improve its screen resolution, the body layer and dm have been improved and their separation has been improved. The manufacturing method device and its appearance are shown after the application of flat-panel light sources: the sex j㊁m and the “same” with the same voltage To make its discharge gas active: beautiful again: more stable state and emit like aurora-the plasma device applied to the flat panel light source is to use the plasma to emit light, and then used in liquid crystal displays (LCD; Uquid crystal

Display)的背照燈、照明用的平板光源等。 另一方面,第1圖為習知應用於平板光源電漿裝置之 剖面圖。 如第1圖所示,平板光源用電漿裝置,一般來說是將 上板(10)及下板(15)利用密封封質材(7)溶融、密封後, 於其内部設置放電電解槽(8 )所構成。 上述上板(10)如面玻璃基板(1)的前面部分塗佈有平 面狀之透明電極(2 ),其背面則具塗佈有當氣體放電時可 516340 I五、發明說明(2) :發出白色光之3波長白色螢光層構造。此時,由於上述前 丨面玻璃基板(1 )位於透明電極(2 )下,因此在與PDp裝置相 同之容量裝置中,也兼備了電介體的功能。 再者’前述下板(1 5 )係指將:於背面玻璃基板(4 )上 利用銀焊錫膏等形成的金屬電極(5 )、及可儲存交流驅動 時電荷用以限制流入裝置之電流,並且使白色光反射至前 面玻璃基板(1)方向的白色電介體層(6)、及於氣體放電日^ 可發出白色光之三波長的白色發光層(3),以連續塗佈方、 式所形成之構造。Display) backlight, flat light source for lighting, etc. On the other hand, Fig. 1 is a cross-sectional view of a conventional plasma light source device applied to a flat panel light source. As shown in FIG. 1, generally, a plasma device for a flat-plate light source includes an upper plate (10) and a lower plate (15) that are fused and sealed with a sealing material (7), and a discharge electrolytic cell is provided in the inside. (8). The front part of the above-mentioned upper plate (10) is coated with a flat transparent electrode (2) such as a front glass substrate (1), and its back is coated with a 516340 I when a gas is discharged. V. Description of the invention (2): Three-wavelength white fluorescent layer structure that emits white light. At this time, since the front glass substrate (1) is located under the transparent electrode (2), the same capacity device as the PDp device also has the function of a dielectric. Furthermore, the aforementioned lower plate (1 5) means: a metal electrode (5) formed on the back glass substrate (4) by using silver solder paste and the like, and can store the electric charge during AC driving to limit the current flowing into the device, And the white light is reflected to the white dielectric layer (6) in the direction of the front glass substrate (1), and the white light emitting layer (3) which can emit three wavelengths of white light on the day of gas discharge. The resulting structure.

具有上述各項構造的上板(丨〇 )及下板(丨5 ),藉由以透 明釉玻璃為主成分之密封封質材(7),經過溶融、接觸碰 合引起氣體放電,形成放電電解槽(8),再將放電電解槽 内的空氣抽空後,注入氬(Ar)、汞(Hg)、氖(Ne)、氙 )水銀(Hg )等混合氣體後,即完成平板光源用電漿骏 、 此時,對上述透明電極(2)與金屬電極(5)施加交流電 源時,b透過放電現象在放電電解槽(8)内的放電氣體則會The upper plate (丨 0) and the lower plate (丨 5) having the above-mentioned structures are caused by gas discharge by melting, contacting and contacting through a sealing sealing material (7) mainly composed of transparent glaze glass, thereby forming a discharge. The electrolytic cell (8), after evacuating the air in the discharge electrolytic cell, injecting a mixed gas such as argon (Ar), mercury (Hg), neon (Ne), and xenon) mercury (Hg), the electricity for the flat-plate light source is completed. Jie Jun, at this time, when AC power is applied to the transparent electrode (2) and the metal electrode (5), the discharge gas in the discharge electrolytic cell (8) transmitted through b through the discharge phenomenon will be

^ I外線,藉此激發白色營光體(3 ),使白色可見光發 散至前面玻璃基板(丨)之外側。 X^ I outside line, which excites the white camping light body (3), so that the white visible light is diffused to the outside of the front glass substrate (丨). X

用k t剐戶f述,習知平板光源用電漿裝置為了具備一定商 $ I L的壳度,而在前面玻璃基板(1 )與背面玻璃基板(4) A白形成了白色螢光體(3),因此產生不必要之赞作過 程及需較高的製作經費等等問題存在。 、 此外,作為電介體使用之前面玻璃基板(丨),係由數As described by kt 剐 f, the conventional plasma light source device for flat light sources has a white phosphor (3) on the front glass substrate (1) and the back glass substrate (4) in order to have a certain shell degree of IL. ), So there are problems such as unnecessary praise and high production costs. In addition, the front glass substrate (丨) is used as a dielectric.

516340 五、發明說明(3) 一一 " 之厚⑨所形A ’由於放電電解槽t高度在1·以 |了,因此,為了使氣體放電,必須在兩個電極之間加入 1 kV左右的高電壓,此為其缺點之一。 而且,因白色電介體(6)與金屬電極 内’放電時產生的雜質通常以氣體的型 減夕裝置的可使用壽命,此亦為其缺點之一。 涼置方面在具有層構造容量裝置的平板光源用電漿 ίΐ;:體ΐΐΠ;所施加之驅動電壓,會使…解 璃基板的:;;;電:里,而必須減少電介體功能之玻 [本發:解二題並,Λ放]電電解槽的高度。 明之解;=種種問題而設計產生,本發 其製…,係利用改式驅動電紫裝置及 減低產品的製=費進=;產品製作上的容易性,以及 驅動電壓。 、问夺提咼畫面的亮度,減低放電時 [發明構成] 為了達成上述的種稽 驅動型電漿裝置,豆特料&的,本赉明之平板光源用交流 密封後,形成一放電=將;二及密封封質材 電漿放電現象射出光之六:、糟由施加父》,L電源,在透過 前面玻璃基板下面部分式驅動電水裝置中,上板係由 <數千A厚度的透明電極與保護膜 516340 I I五、發明說明 丨所形成; 4璃基板 成;於放 玻璃基板 上板的透 部,兩者 材緊密閉 斯空氣使 前述 明電極層 保護膜以 上述 隔玻璃壁 約是// 此外 置的製作 玻璃基板 電極層上 極的周圍 藏上述匯 在透明電 之製作過 中一面, 背面破螭 (4) 而下板 上形成 電電解 的下面 明電極 的方向 合後, 其呈密 上板僅 ;其他 塗佈於 背面玻 則大約 '數mm左 ,本發 方法, 真空蒸 覆蓋一 部份形 流電極 極上形 程則分 以鉻或 基板之516340 V. Description of the invention (3) The thickness of the "A" is "A" because the height of the discharge electrolytic cell t is 1 · |, so in order to discharge the gas, about 1 kV must be added between the two electrodes. This is one of its disadvantages. In addition, since the impurities generated during the discharge between the white dielectric (6) and the metal electrode are generally gas-type, the useful life of the device is reduced, which is also one of its disadvantages. In terms of cooling, the plasma light source for flat light sources with a layered structure capacity device: ΐΐΐΐ; the driving voltage applied will make the substrates of the glass unsolvable: ;; electricity: and must reduce the function of the dielectric The height of the [electrode: solve the second problem, Λ release] electrolyzer. The clear solution; = various problems are designed and produced, and the system of this invention ... is to use the modified drive electric purple device and reduce the product system = fee input =; ease of product production, and driving voltage. In order to improve the brightness of the screen and reduce the discharge [invention structure] In order to achieve the above-mentioned seed-driven plasma device, the special material & the flat panel light source of the present invention is sealed with AC, forming a discharge = will Second, the phenomenon of plasma discharge of hermetically sealed materials, the sixth part of the emitted light: the power is applied by the parent ", L power, in the partially driven electric water device through the front glass substrate, the upper plate is made of < thousands of A thickness The transparent electrode and the protective film 516340 II. Formation of the invention; 4 The glass substrate is formed; the transparent part of the glass substrate is placed on the transparent part of the glass substrate, and the two materials are tightly closed; the above-mentioned bright electrode layer protective film is separated from the glass wall by the above It is about // the outer electrode is made around the upper electrode of the glass substrate electrode layer, the above-mentioned sink is hidden on the transparent medium, the back surface is broken (4), and the direction of the lower bright electrode forming the electrolysis on the lower plate is closed. It is densely packed on the board only; other coatings on the back glass are about 'several millimeters left. With this method, the vacuum steam covers a part of the shape of the flow electrode. The shape of the electrode is divided into chromium or the substrate.

則是由經過切削加工或定型模具,在I 以多個玻璃隔層分離之放電電&槽所形 槽的側面及底面塗佈白色螢光體,而背 部分是由金屬電極蒸鍍而成之構造,其斗 與保護膜蒸鍍面與下板的放電電解槽形4 是互相面對的’當上板與下板以密^1 將放電電解槽内之空氣排出,注入 封狀態。 / 於前面玻璃基板的底面透光部份,蒸鍍 玻璃基板底面則蒸鍍匯流電極,而上述 透明電極上為理想。 璃基板大約有5mm^右的高度,上述的4 Ο 〇____ . ^ J 背面 面 封封 放電^ 有2〜3mm左右的高度,分隔玻璃壁之 右的間隔為最理想的狀態。 明中形成上板及下板的平板光源用電衆 特徵為其中上板之製作過程,分為在前 鍍銦錫,形成透明電極層之階段;於透 層金屬掩膜、或真空蒸鍍上鋁,於透明 成具一定厚度之匯流電極之階段;及為 :覆上金屬掩膜,以鎂氧化物真空蒸鍍 、具固定厚度的保護膜層之階段。而下 為於具4隨以上厚度的背面玻璃基板的; ,真空蒸鍍,形成金屬電極層之階段; “他面,切削加工成具有2〜3mm左右的f 間少 516340 !五、發明說明(5) 度及數微米〜數mm寬度之數個放電電解槽,及形成可分隔 I這些槽之玻璃分隔壁之階段;及於玻璃分隔壁側面與放電 電解槽底面將白色螢光體以後膜印刷法或喷塗法進行塗 佈、燒成之階段。上板的保護膜及下板的白色螢光體兩者 是呈現相對的狀態,由上述方法製成的上板與下板以密封 |封質材溶融、密合後,使放電電解槽内呈真空狀態,並且 注入固定的壓力氣體,形成一個完全密封的狀態。 I 將本發明的理想貫施例參照添付之圖面,作一詳細說 I明,其說明如下。 圖二係為本發明中平板光源用電漿表示裝置之剖面 圖。 I如圖二所示,本發明上板(20)及下板(25)係為利用密封封 1質材(2 7 )加以密封,並於其内部以玻璃分隔壁(3 1 )分隔, |形成數個放電電解槽(30),在放電電解槽(30)内以既定之 丨壓力氣體注入氬(Ar)、氦(He)、氖(Ne)、氙(Xe)、水銀 i (Hg)等混合氣體,藉由外加電源引起放電現象之構造。 上板(20)係由大約2〜3mm厚度的前面玻璃基板(21), |於其下面蒸鍍上數千個A厚度之氧化銦錫(in2〇3: Sn)材質 |的透明電極(22)、與鉻(Cr)或鋁(Ai)材質匯流電極(23> I而在上述透明電極(2 2 )下形成數千A厚度之氧化鎂(M g 〇 )保 :護膜(24)。 、 I 上述(Mg〇)保護膜(24)是當氣體放電時放射出二次電 子,同時降低放電電壓,並藉由氣體放電時產生之離子, I防止前面玻璃基板(2 0 )發生磨損。 516340 丨五、發明說明(6) 此外’上述的透明電極(2 2 )的面積如果變大的話,隨 :著抵抗力的變大’上述前面玻璃基板(21)的下面因塗佈有 |透明電極(2 2 ),如圖二所示,僅於可見光透過部分形成透 |明電極層(22),而由於周圍部份形成上述匯流電極,可減 少電極之間的抵抗因而可形成良好的放電特性。A white phosphor is coated on the side and bottom of a groove formed by discharge & grooves separated by multiple glass barriers after cutting or shaping the mold, and the back portion is formed by metal electrode evaporation. The structure, the bucket and the protective film evaporation surface and the lower plate of the discharge electrolytic cell shape 4 are facing each other. When the upper plate and the lower plate are densely ^ 1, the air in the discharge electrolytic cell is exhausted and injected into the sealed state. / On the transparent part of the bottom surface of the front glass substrate, the bus electrode is vapor-deposited on the bottom surface of the vapor-deposited glass substrate, and the above transparent electrode is ideal. The glass substrate has a height of about 5mm ^ right, and the above-mentioned 4 〇 〇 ____. ^ J back surface sealing discharge ^ has a height of about 2 ~ 3mm, and the interval to the right of the partition glass wall is optimal. The features of the flat panel light source used to form the upper and lower plates in the Ming Dynasty are the production process of the upper plate, which is divided into the stage of indium tin plating in front to form a transparent electrode layer; on the transparent metal mask or vacuum evaporation Aluminum is at a stage of being transparently formed into a bus electrode with a certain thickness; and is a stage of being covered with a metal mask, being vacuum-deposited with magnesium oxide, and having a protective film layer with a fixed thickness. The next step is a back glass substrate with a thickness of 4 or more; vacuum evaporation to form a metal electrode layer; "other surfaces, cut and processed to have a f-space of about 2 ~ 3mm, less 516340! 5. Description of the invention ( 5) Several discharge electrolytic cells with a width of several micrometers to several mm, and the stage of forming glass partition walls that can separate these grooves; and the white phosphor film is printed on the side of the glass partition wall and the bottom surface of the discharge electrolytic cell. Coating or firing by spraying or spraying. The protective film of the upper plate and the white phosphor of the lower plate are in a relative state. The upper plate and the lower plate made by the above method are sealed and sealed. After the materials are melted and tightly sealed, the discharge electrolytic cell is in a vacuum state, and a fixed pressure gas is injected to form a completely sealed state. I The ideal embodiment of the present invention will be described in detail with reference to the drawings added. I. The description is as follows. Fig. 2 is a cross-sectional view of a plasma display device for a flat light source in the present invention. I. As shown in Fig. 2, the upper plate (20) and the lower plate (25) of the present invention are sealed with a seal. 1 material (2 7) to seal And inside it is separated by a glass partition wall (3 1) to form several discharge electrolytic cells (30), and argon (Ar), helium (He), Structures such as neon (Ne), xenon (Xe), mercury i (Hg), and discharge caused by external power supply. The upper plate (20) is a front glass substrate (21) with a thickness of about 2 to 3 mm, | Thousands of transparent electrodes (22) made of indium tin oxide (in2O3: Sn) of thickness A and a bus electrode (23 > I) made of chromium (Cr) or aluminum (Ai) were vapor-deposited thereunder. A protective film (24) of magnesium oxide (Mg 0) with a thickness of several thousand A is formed under the transparent electrode (2 2). I The protective film (24) of (Mg〇) is radiated twice when the gas is discharged. Electrons, while reducing the discharge voltage, and by the ions generated during gas discharge, I prevent the front glass substrate (20) from abrasion. 516340 丨 V. Description of the invention (6) In addition, the area of the above-mentioned transparent electrode (2 2) If it becomes larger, as the resistance increases, the lower surface of the aforementioned front glass substrate (21) is coated with a transparent electrode (2 2) As shown in FIG. 2, a transparent electrode layer (22) is formed only in the visible light transmitting portion, and the above-mentioned bus electrode is formed in the surrounding portion, which can reduce the resistance between the electrodes and thus form good discharge characteristics.

另一方面’下板(25)係由在背面玻璃基板(26)的上方 i部分’透過切削加工或是塑型法(m〇lding)而形成之玻璃 I分隔壁(31),分隔出數個放電電解槽(3〇),背面玻璃基板 |(26)的下面部分,則蒸鍍有數千縛度之具良好光反射率 ,鉻(Cr)或铭(A1)材質的金屬電極層,且上述玻璃基板 ! (3 1 )的側面與各個槽(放電電解槽)的底面部分則塗佈有白 色螢光體(2 9 )之構造所組成。On the other hand, the 'lower plate (25)' is a glass I partition wall (31) formed by cutting or molding (molding) on the upper part i of the rear glass substrate (26). A discharge electrolytic cell (30), the lower part of the back glass substrate | (26), a metal electrode layer with good light reflectivity, chromium (Cr) or inscription (A1) material, is deposited on the surface with thousands of constraints, And the above-mentioned glass substrate! (3 1) is composed of a structure in which the side surface and the bottom surface of each tank (discharge electrolytic cell) are coated with a white phosphor (2 9).

上述背面玻璃基板(26)大約為5ram左右的高度,破璃 丨分隔壁(31)與放電電解槽(30 )的高度大約為3〜4匪,相較 於電介體層,放電電解槽(30)的高度較高一些,而稍低的 電壓對放電電解槽(30)而言即具有充分的電壓使其驅動。' 此外,沿著該形成高度之玻璃分隔壁(31)側面與槽之底 面,由於廣為塗佈白色螢光體,因而可增加裝置畫面的AThe back glass substrate (26) has a height of about 5 ram, and the height of the broken glass 丨 partition wall (31) and the discharge electrolytic cell (30) is about 3 to 4 bands. Compared with the dielectric layer, the discharge electrolytic cell (30) ) Has a higher height, and a slightly lower voltage has sufficient voltage for the discharge electrolytic cell (30) to drive it. '' In addition, the side of the glass partition wall (31) along the height and the bottom surface of the groove are widely coated with white phosphor, which can increase the A of the device screen.

.姓上述的玻璃分隔壁(31)具有支持上板(20)的功 月b,δ對放電電解槽(3 〇 )進行排氣工程時, (20)變形彎曲的情況產生。 可防止上板 ’就本發明之平板光源用電聚裝置的製作方法及 作用效果’做一說明如下。The above-mentioned glass partition wall (31) has the function of supporting the upper plate (20) b, δ. When the discharge electrolytic cell (30) is vented, the (20) deformation occurs. "Can prevent the upper plate" The following is a description of the manufacturing method and effect of the electropolymerization device for a flat panel light source according to the present invention.

516340 1五、發明說明(7) 丨首先,上板(20)的製作過程係在厚度約3m‘右之前面玻 璃基板(21)上’真空蒸鍍上數千緣度之氧化銦錫(In2〇3: | Sn) ’形成透明電極層(22)。 此外,於透明電極層(22)上覆蓋一層金屬掩膜,再由 I鉻、(Cr)或鋁(A1 )之真空蒸鍍,在上述前面玻璃基板(21 )上 之,明電極層(2 2 )周邊,形成具固定厚度匯流電極(2 3 )。 $著上述透明電極層(22)面積的增大,電阻亦增加,因此 i藉由匯流電極(23)降低透明電極層(22)所產生之電阻,使 :其具有能維持良好放電特性的功能。 I、再f,為隱藏上述匯流電極(23)而覆蓋上金屬掩膜, 並真工療鍍上一層氧化鎂(Mg〇),在透明電極層(22 )上形 丨成數千A#度之保護膜(24)。 另一方面,下板的製作過 璃基板(2 6 )邊緣上,覆蓋金屬射率良好之鉻(C r )及鋁(A 1 ), (28)。 权’係在厚度5mm之背面玻 掩膜’並以真空蒸鍍上光反 形成數千A厚度的金屬電極 的听ΐί ό沒有形成金屬電極(28)的另—邊玻璃基板(26) 的^度、力^3mm程度,將槽與槽之間的間隔約為數百微米 Μ此夕數個槽,以噴砂法切削,形成數個放電電解槽 =0)丄:個放電電解槽之間形成寬約數百微米〜數顏左 = i為2〜3mm之玻璃分隔壁(31)。這樣的玻璃分隔壁 I7使不以切削加工之方法,亦可利用塑型法 ^wdlng)做出分隔狀,再將玻璃溶融注入模内而使其成 516340 五、發明說明(8) I 又’將白色螢光體(29)利用厚膜印刷法或喷塗法,涂 :佈於玻璃为隔壁(3 1 )的側面及槽的底面後,進行燒成 I下板(25)。 取 I 將上述方法製成之上板(20)與下板(25),利用以透明 I釉玻璃為主成分之密封封質材,使其溶融、緊密接合後, I排出放電電解槽内的空氣,注入數十〜數百T0H之氬 |(Ar)、氦(He)、氖(Ne)、氙(Xe)、水銀(Hg)等混合氣體 |後,即完成本發明之平板光源用電漿裝置。 丨 若於該平板光源用電漿裝置之透明電極(22)與金屬電 |極(28)間,導入30 0V之30kHz的高壓電流,由放電現象在 混合氣體中產生之紫外線激發白色螢光體(2 9 ),即得到白 鲁 ;色可見光。 如上所述本發明之平板光源用電漿裝置,其金屬電極 1(28)形成於背面玻璃基板(26)下,背面玻璃基板(26)具備 電介體的功能,透過去除放電電解槽内之白色電介體層 (6 )及金屬電極(5 ),可防止不純氣體的產生,因此在製作 上可以省去製作白色電介體製材的成本,因而減少製作上 :經費的支出,同時相較於由基板及保護膜所形成電介體層 :之厚度,可藉由增加放電電解槽的高度,即使在較低的驅 動電壓下,依然能充分的放電電壓。 _ 此外,白色螢光體(2 9 )全面性均勻的塗佈在玻璃分隔 壁(31)的側面及槽的底面部分,因而形成廣大之螢光面 積,可將裝置之亮度提高至兩倍以上,而於内部形成之玻 璃分隔壁(3 1 )因具有支撐上板(2 0 )的功能,在對放電電解 ,516340 1 V. Description of the invention (7) 丨 First, the manufacturing process of the upper plate (20) is about 3m 'on the right front glass substrate (21)' by vacuum evaporation with thousands of edges of indium tin oxide (In2) 〇3: | Sn) 'The transparent electrode layer (22) is formed. In addition, the transparent electrode layer (22) is covered with a metal mask, and then vacuum-deposited with chromium, (Cr), or aluminum (A1), and the bright electrode layer (2) on the front glass substrate (21). 2) forming a bus electrode (2 3) with a fixed thickness on the periphery. With the increase of the area of the transparent electrode layer (22), the resistance also increases, so i reduces the resistance generated by the transparent electrode layer (22) by the bus electrode (23), so that it has the function of maintaining good discharge characteristics . I, f, cover the metal mask to hide the above-mentioned bus electrode (23), and apply a layer of magnesium oxide (Mg0) to the true medical therapy, and form thousands of A # degrees on the transparent electrode layer (22). Protective film (24). On the other hand, the edge of the glass substrate (2 6) on which the lower plate is made is covered with chromium (C r) and aluminum (A 1) with good metal emissivity, (28). The weight is "a glass mask on the backside of 5mm thick" and vacuum-evaporated to form a metal electrode with a thickness of several thousand A. The other side of the glass substrate (26) without the metal electrode (28) is formed ^ Degree, force ^ 3mm, the interval between the grooves is about several hundred microns, and several grooves are cut by sandblasting to form several discharge electrolytic cells = 0) 丄: formed between the discharge electrolytic cells The width is about several hundred microns to several colors left = i is a glass partition wall (31) of 2 to 3 mm. Such a glass partition wall I7 makes it possible not to use a cutting method, but also to use a molding method (^ wdlng) to make a partition shape, and then inject the glass into the mold to make it into 516340. 5. Description of the invention (8) I and ' The white phosphor (29) is coated with a thick film printing method or a spray coating method on a side surface of a glass partition wall (3 1) and a bottom surface of a groove, and then fired into a lower plate (25). Take I to make the upper plate (20) and the lower plate (25) by the above method, and use a sealing sealing material with transparent I glaze glass as the main component to make it melt and tightly bond. I is discharged from the discharge electrolytic cell. Air, after injecting tens to hundreds of T0H argon | (Ar), helium (He), neon (Ne), xenon (Xe), mercury (Hg) and other mixed gas |, the electricity for flat panel light sources of the present invention is completed Pulp device.丨 If a high-voltage current of 30 kHz and 30 kHz is introduced between the transparent electrode (22) and the metal electrode (28) of the plasma device for a flat-plate light source, the white phosphor is excited by ultraviolet rays generated in the mixed gas by the discharge phenomenon (2 9), to obtain Bai Lu; color visible light. As described above, in the plasma device for a flat panel light source of the present invention, the metal electrode 1 (28) is formed under the back glass substrate (26), and the back glass substrate (26) has a function of a dielectric, and removes the The white dielectric layer (6) and the metal electrode (5) can prevent the generation of impure gas, so the cost of making the white dielectric material can be saved in production, thus reducing the production cost: compared with The thickness of the dielectric layer formed by the substrate and the protective film can be increased by the height of the discharge electrolytic cell, and the discharge voltage can be fully discharged even at a lower driving voltage. _ In addition, the white phosphor (2 9) is uniformly and uniformly coated on the side of the glass partition wall (31) and the bottom of the groove, thus forming a large fluorescent area, which can increase the brightness of the device to more than twice As the glass partition wall (3 1) formed inside has the function of supporting the upper plate (2 0), it is electrolyzing the discharge,

第12頁Page 12

516340 五、發明說明(9) i槽進行排氣工程,可藉由大氣壓達到防止上板之磨損。 本發明並不限於上述之實施例,在本發明技術思想上 i允許的範圍内,皆可以更加廣泛、更多樣性的靈活運用。 [圖面的簡易說明] 第1圖為習知應用於平板光源之交流式電漿裝置剖面圖; 第2圖為本發明中應用於平板光源之交流式電漿裝置剖面 丨圖。 [圖面主要部分之符號說明] 1,2 1.前面玻璃基板 2,2 2 .透明電極 3, 29.白色螢光體 4,2 6 .背面玻璃基板 5,2 8 .金屬電極 6. 白色電介體層 7, 27.密封封質材 23. 匯流電極 31. 玻璃分隔壁 [發明效果] 如前所述之本發明創作,藉由去除放電電解槽内之白 色電介體與金屬電極,於背面玻璃基板下形成金屬電極, 不僅可防止放電電解槽内不純物質氣體的產生,延長裝置 的使用壽命,同時可增加產品製作的容易性以及減少產品516340 V. Description of the invention (9) The i-slot is used for exhausting the air, which can prevent the abrasion of the upper plate by atmospheric pressure. The present invention is not limited to the above-mentioned embodiments, and within the range allowed by the technical idea of the present invention, all of them can be used more widely and more flexibly. [Simplified description of the drawing] FIG. 1 is a cross-sectional view of a conventional AC plasma device applied to a flat light source; FIG. 2 is a cross-sectional view of an AC plasma device applied to a flat light source in the present invention. [Description of the symbols on the main part of the drawing] 1,2 1. Front glass substrates 2, 2 2. Transparent electrodes 3, 29. White phosphors 4, 2 6. Back glass substrates 5, 2 8. Metal electrodes 6. White Dielectric layer 7, 27. Sealing material 23. Bus electrode 31. Glass partition wall [Inventive effect] As described in the present invention, by removing the white dielectric and metal electrode in the discharge electrolytic cell, The formation of metal electrodes under the back glass substrate can not only prevent the generation of impurities in the discharge electrolytic cell, prolong the life of the device, but also increase the ease of production and reduce the product.

第13頁 516340 1五、發明說明(ίο) |製作的經費。 再者,背面玻璃基板經切削加工或塑型(Molding) 丨後,形成具相當高度之多數個玻璃分隔壁與放電電解槽, 1再將白色螢光體塗佈於玻璃分隔壁的側面以及槽的底部, 使其形成面積增大,即使在較低電壓下依然能得到充分的 丨放電效果,同時也可提高晝面的亮度。Page 13 516340 1 V. Description of Invention (ίο) | Funding for production. Furthermore, after the back glass substrate is cut or molded, a plurality of glass partition walls and discharge electrolytic cells having a considerable height are formed, and then a white phosphor is coated on the side surfaces and the grooves of the glass partition wall. The bottom of the electrode increases the formation area, and can still obtain a sufficient discharge effect even at a lower voltage, and also improve the brightness of the daytime surface.

第14頁Page 14

Claims (1)

516340 六、申請專利範圍 | ίΐ. 一種應用於平板光源之交流式驅動型電漿裝置,特徵 | ί , ; I在於上板與下板透過密封材質密封之後形成放電電解槽, 丨 i隨著交流電源的輸入,可依照電漿放電的情形,照射出不 卜 i同光線之交流式驅動型電漿裝置;其中, i 丨上述之上板,係於玻璃基板下,由數千A厚度之透明電極 | ; ! I與保護膜積層而成之構造; 1 :上述之下板,係經切削加工或塑型,於背面玻璃基板上形 ; ! I 成由數個玻璃分隔壁加以分隔之放電電解槽,該放電電解 i 槽的側面以及底面皆塗佈有白色螢光體,且背面玻璃基板 | i下則是由金屬電極蒸鍍而成之構造; ^上述上板保護膜之蒸鍍面與放電電解槽的形成部分,兩者 ® 呈現相對之狀態,上板與下板透過密封材質緊密密封之 I 後,將放電電解槽内之空氣排出,注入放電氣體並加以密 封。 2.如申請專利範圍第1項發明之應用於平板光源之交流式 驅動型電漿裝置,特徵在於其上板僅在前面玻璃基板之底 面内,可透光的部分蒸鍍上透明電極層,而在其他的前面 玻璃基板底面蒸鍍上匯流電極,且上述之保護膜僅塗佈於 透明電極層上。 3 .如申請專利範圍第1項或第2項發明之應用於平板光源 φ 之交流式驅動型電漿裝置,特徵在於上述的透明電極是由 氧化銦錫(In203 : Sn)之材質所製成的。 4.如申請專利範圍第1項發明之應用於平板光源之交流式 驅動型電漿裝置,其特徵在於背面玻璃基板具備大約5mm516340 6. Scope of patent application | ίΐ. An AC-driven plasma device applied to a flat-plate light source, features | ί,; I lies in the formation of a discharge electrolytic cell after the upper plate and the lower plate are sealed through a sealing material. The input of the power supply can be irradiated with an AC-driven plasma device according to the condition of the plasma discharge. Among them, the above-mentioned upper plate is under the glass substrate and is transparent by thousands of A thickness. Electrode |;! I laminated structure with protective film; 1: the lower plate above is cut or shaped on the back glass substrate;! I is a discharge electrolysis separated by several glass partition walls The side and bottom of the discharge electrolytic i-tank are coated with white phosphors, and the back glass substrate | i is a structure formed by vapor deposition of a metal electrode; The formation part of the discharge electrolytic cell, the two are in a relative state. After the upper plate and the lower plate are tightly sealed through the sealing material I, the air in the discharge electrolytic cell is exhausted, the discharge gas is injected and added. Seal. 2. If the first invention of the patent application applies to an AC-driven plasma device for a flat-plate light source, the upper plate is only in the bottom surface of the front glass substrate, and the transparent part is vapor-deposited with a transparent electrode layer. A bus electrode is vapor-deposited on the bottom surface of the other front glass substrate, and the above-mentioned protective film is only coated on the transparent electrode layer. 3. If the first or second invention of the scope of the patent application is applied to an AC-driven plasma device for a flat-plate light source φ, the above-mentioned transparent electrode is made of indium tin oxide (In203: Sn). of. 4. The AC-driven plasma device applied to a flat light source, such as the first invention in the scope of patent application, is characterized in that the back glass substrate is provided with about 5 mm 516340 :六、申請專利範圍 f右的高度,而玻璃分隔壁則約為2〜3mm左右的高度, =隔壁間則大約是數百〜數瓜岐右之距離。 丨·*如申清專利範圍第丨項或第2項發明之應用於平板光源 ^式驅動型電漿裝置,其特徵在於匯流電極與金 丨極係以鉻(Cr)或鋁(A1)為材質。 ^乂一種應用於平板光源之交流式電漿裝置之製造方法, 匕徵為在由上板與下板所組成,平板光源用交流驅動型電 漿裝置之製造方法中, I上板之製作過程分為:於玻璃基板真空蒸鍍上氧化銦錫 (1^2 03 : Sn) ’形成透明電極層之階段;在透明電極層上 覆蓋金,掩膜,真空蒸鍍上鉻或鋁,在透明電極週邊部分 开f成固定厚度之匯流電極之階段;為使匯流電極隱藏而覆 盡上金屬掩膜’經真空蒸鍍鎂氧化物後,在透明電極層上 形成固7厚度保護膜層之階段; 下板& t作過程分為:在具4mm以上厚度之背面玻璃基板 其中一面’以真空蒸鍍方式電鍍上鉻或鋁,形成金屬電極 曰 &,將背面玻璃基板的另一面,以切削加工,形成 I # 2~3πΐιη深度與數百微米〜數mm寬度之多數個放電電解 槽L &用以區隔這些槽之玻璃分隔壁之階段過程;及於玻 璃刀隔壁的側面及放電電解槽底面,以厚膜印刷法或喷塗 法塗佈白色電介體,再進行燒成之階段; Ji ^ #護膜與下板之白色電介體係呈相對位置,將上述 方法t成之上板及下板,藉由密封封質材溶融、接合後, 非出雷 包電解槽内之空氣,將放電氣體以既定壓力氣體注516340: 6. The height of the right of the patent application range f, and the height of the glass partition wall is about 2 ~ 3mm, and the distance between the partition walls is about several hundred to several meters to the right.丨 · * If the application of the 丨 or 2 invention in the scope of the patent application is applied to a flat-plate light source ^ type driving plasma device, it is characterized in that the bus electrode and the gold electrode are made of chromium (Cr) or aluminum (A1) as Material. ^ 乂 A manufacturing method of an AC plasma device applied to a flat light source, which is composed of an upper plate and a lower plate, and an AC-driven plasma device for a flat light source. Divided into: the stage of vacuum deposition of indium tin oxide (1 ^ 2 03: Sn) on a glass substrate to form a transparent electrode layer; covering the transparent electrode layer with gold, a mask, vacuum evaporation of chromium or aluminum, and The stage where the electrode peripheral part is opened to form a fixed thickness bus electrode; the stage where the metal electrode is covered with a metal mask to hide the bus electrode. After vacuum evaporation of magnesium oxide, a solid protective film layer is formed on the transparent electrode layer. The lower plate process is divided into: one side of a back glass substrate having a thickness of 4 mm or more is electroplated with chromium or aluminum by vacuum evaporation to form a metal electrode, and the other side of the back glass substrate is Cutting process to form a large number of discharge electrolytic cells L & with a depth of I # 2 ~ 3π 与 ιη and a width of several hundred micrometers to several millimeters L & used to separate the glass partition walls of these slots; and on the side of the glass knife partition and The bottom surface of the discharge electrolytic cell is coated with a white dielectric by a thick film printing method or a spray coating method, and then is fired. Ji ^ # The protective film is in a relative position with the white dielectric system of the lower plate. The upper plate and the lower plate are melted and joined by the sealing sealing material, and the discharge gas is injected into the electrolytic cell at a predetermined pressure instead of the air in the lightning cell. 516340 I六、申請專利範圍 入,並完成密封的動作。 第17頁516340 I VI. Apply for patent scope and complete the sealing action. Page 17
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KR100404444B1 (en) * 2000-11-22 2003-11-05 비오이 하이디스 테크놀로지 주식회사 Ac type plasma display panel for back light of lcd
KR100437592B1 (en) * 2000-11-22 2004-06-26 비오이 하이디스 테크놀로지 주식회사 Dc type plasma display panel for back light of lcd
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