516148 經濟部智慧財產局員工消費合作社印製 A7 R7 五、發明說明（） 發明領域· 本發明與一種於標準機械介面（SMIF)與製程機台間 之晶圓傳送裝置（pod)有關，特別是一種具有一放大晶圓 批號影像之晶圓傳送裝置。 發明背景： 隨著自動化科技的進步’積體電路的製造工作亦已普 遍利用自動化搬運操作、電腦整合製造（Computer Integrated Manufacturing)系統"，等，不但可有效掌握生產 流程中的各種狀況，並且可以處理大量的資料數據，以達 成縮短交貨期限、降低成本、提昇品質等優點。 由於半導體製程的多樣性與複雜性，如不運用系統 化、結構化的資訊流程管理，生產情報將難以即時實際掌 握，一稍有人為疏失將導致產品重大的損失，以及造成現 場生產管理失序。 承上所述，其中為減少人為操作與搬運時造成的疏 失，並更加精確地提高操作效能，可利用一標準機械介δ 100 (Standard Mechanical Interface ; SMIF)，如第 1 圖戶斤 示’與任一之半導體製程機台2 0 0配合，從事晶圓的自動 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公f ) -------------·--------II---------ί (請先閱讀背面之注意事項再填寫本頁) 516148 A7 _B7_ 五、發明說明（） 化生產流程的運送工作。更明確地說，標準機械介面1 0 0 中包含一機械手臂1 1 0與一晶圓傳送盒1 20(SMIF Pod)。 該機械手臂 Π 0係將晶圓傳送盒1 2 0内的晶圓傳入製程 機台2 0 0中進行製程加工。而且，此標準機械介面1 〇 〇可 更進一步與一暫存站（BufferStation)相互配合，利用暫存 站直接從晶圓傳送盒1 2 0中取出晶圓，並一片片地傳入生 產機台中，使得生產線的生產與運送系統能做更有效之結 合，增加晶圓產能。 一般而言，一個晶圓傳送盒120承載一批（Lot)晶圓， 而每批晶圓的數量可達數十片，譬如每一批晶圓數量為2 5 片。由於，半導體業界之激烈競爭與產品的不斷推陳出新， 生產現場操作流程的複雜程度日益增加，因此可能由於客 戶的不同需求而導致每一批晶圓間的生產流程各異。 (請先閱讀背面之注意事項再填寫本頁) *516148 Printed by A7 R7, Consumer Cooperative of Intellectual Property Bureau, Ministry of Economic Affairs 5. Description of the invention () Field of the invention The present invention relates to a wafer transfer device (pod) between a standard mechanical interface (SMIF) and a process machine, especially A wafer transfer device having an enlarged wafer lot number image. Background of the Invention: With the advancement of automation technology, the manufacturing work of integrated circuits has also generally used automated handling operations, Computer Integrated Manufacturing systems ", etc., not only can effectively grasp the various conditions in the production process, and It can process a large amount of data to achieve the advantages of shortening delivery time, reducing costs, and improving quality. Due to the diversity and complexity of the semiconductor manufacturing process, without systematic and structured information flow management, production information will be difficult to grasp in real time. A slight human error will lead to major product losses and cause on-site production management disorder. According to the above description, in order to reduce the errors caused by manual operation and handling, and to improve the operation efficiency more accurately, a standard mechanical interface δ 100 (Standard Mechanical Interface; SMIF) can be used, as shown in Figure 1 Cooperate with any semiconductor processing machine of 2000. The paper size of the wafers that are used for automatic wafers is applicable to China National Standard (CNS) A4 (210 X 297 male f) ------------- · -------- II --------- ί (Please read the precautions on the back before filling out this page) 516148 A7 _B7_ V. Description of the invention () Transportation of the production process. More specifically, the standard mechanical interface 100 includes a robot arm 110 and a wafer transfer box 120 (SMIF Pod). This robot arm Π 0 transfers the wafers in the wafer transfer box 120 to the processing machine 200 for processing. In addition, this standard mechanical interface 1000 can further cooperate with a temporary storage station (BufferStation), and use the temporary storage station to directly take out wafers from the wafer transfer box 120 and transfer them to the production machine piece by piece. To make the production line and the delivery system of the production line can be more effectively combined to increase wafer capacity. Generally, a wafer transfer box 120 carries a batch of (Lot) wafers, and the number of wafers in each batch can reach dozens of wafers, for example, the number of wafers in each batch is 2 5 wafers. Due to the fierce competition in the semiconductor industry and the continuous introduction of new products, the complexity of the production site operation process is increasing. Therefore, the production process between each batch may be different due to the different needs of customers. (Please read the notes on the back before filling this page) *
· I I I I I 經濟部智慧財產局員工消費合作社印製 而設批報盒的辨導 ， 統兩而送元確所 誤系少k)傳萬正 誤 失先至 ο 圓千且錯 的原致ew晶上速程 台非導 於達快製 機並接工由高種述 或圓直重述能一上 為晶則堪前可有少 人批誤不J^，需減 的一錯臨例失急以 當某的面為損前 ， 不之一能工 的目置 何載單可加致，裝 任承述果程導此與 生所上結製而因制 發20則其圓圓。機 中 1 ， ，晶日aa誤的 程盒圓工叶的延次 1送晶加 1 次的批 於傳批誤前批期工 如圓一錯目誤交加 假晶某的以錯與圓 得的圓。載失晶 使定晶廢承損認 線 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公餐） 經濟部智慧財產局員工消費合作社印製 516148 Λ7 B7 五、發明說明（） 致的損失。 發明目的及概述： 鑑於上述發明背景中所指出之缺點，本發明的目的係 為提供一種可以快速正確地辨認晶圓加工批號的裝置。 本發明的再一目的係為提供一種於標準機械介面與 製程機台間之晶圓傳送裝置，可使操作人員有效讀取該晶 圓表面之批號，確保每批次的晶圓皆進行正確的製程加 工，減少因流程錯誤所導致雙重的損失。 根據以上所述之目的，本發明揭露了一種於標準機械 介面與製程機台間之晶圓傳送裝置，該裝置包含晶圓卡匣 (Cassette)、外殼組與晶圓批號影像放大元件。其中晶圓 卡匣係用以置放複數個晶圓，而外殼組則用以承載該晶圓 卡匣，並提供該晶圓卡匣一乾淨、可靠的封閉儲存環境。 特別的是，本裝置包含放大晶圓批號影像的元件，此元件 位於外殼組頂部，用以放大該晶圓卡匣内該晶圓表面上之 晶圓批號，以利操作人員於晶圓傳送裝置外部即可快速且 正確地讀取晶圓批號。 圖式簡單說明： 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公t ) i m β*1_· i^i n H>1 n in n n n He ϋ n n nf m n Hi ^ ^ · I μμ· wa I (請先閱讀背面之注意事項再填寫本頁) 516148· IIIII The identification of the report box printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs, the two of which are the same, and that the delivery is indeed wrong. K) Chuan Wanzheng missed first. The speed table is not guided by a fast machine and the work is repeated by a high-level statement or a straight-line statement. It can be a crystal, but there are few people who can't approve it. J ^, a mistake that needs to be reduced is urgent. In the face of damage, not all of the working orders can be added, pretending to be the result of the process, and the 20 due to the production and distribution of its roundness. In the machine, 1, the date of Jinga aa's wrong process box, the round of Ye Gongye's extension 1 to send the crystal plus 1 batch of approval before the transfer error, such as the round one mistakenly misinterpreted the fake crystal some wrong and round. Round. Lost crystals make Dingjing waste bear the loss line. The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 meals). Printed by the Intellectual Property Bureau Staff Consumer Cooperative of the Ministry of Economic Affairs 516148 Λ7 B7 V. Description of the invention () To Loss. Objects and Summary of the Invention: In view of the disadvantages pointed out in the background of the above invention, the object of the present invention is to provide a device that can quickly and accurately identify the batch number of wafer processing. Another object of the present invention is to provide a wafer transfer device between a standard mechanical interface and a process machine, which enables an operator to effectively read the batch number on the surface of the wafer, and to ensure that each batch of wafers is correctly processed. Process processing, reducing double losses caused by process errors. According to the above-mentioned purpose, the present invention discloses a wafer transfer device between a standard mechanical interface and a processing machine. The device includes a wafer cassette, a case set, and a wafer lot image magnifying element. The wafer cassette is used to place a plurality of wafers, and the shell set is used to carry the wafer cassette and provide a clean and reliable closed storage environment for the wafer cassette. In particular, the device includes a component that magnifies the image of the wafer lot number. This component is located on the top of the housing group, and is used to enlarge the wafer lot number on the surface of the wafer in the wafer cassette to facilitate operators in the wafer transfer device. Externally, wafer lot numbers can be read quickly and correctly. Brief description of the drawing: This paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 male t) im β * 1_ · i ^ in H > 1 n in nnn He ϋ nn nf mn Hi ^ ^ · I μμ ·· wa I (Please read the notes on the back before filling out this page) 516148
AT _B7 五、發明說明（） 由以下本發明中較佳具體實施例之細節描述，可以對 本發明之目的、觀點及優點有更佳的了解。同時參考下列 本發明之圖式加以說明： 第ί爵 顯示標準機械介面結合半導體製程設備之 示意圖。 第2圖 顯示一種標準機械介面與半導體製程設備 結合之示意圖。 第3圖 顯示晶圓傳送裝置之示意圖。 第4圖-顯示晶圓傳送裝置之俯視圖。 圖號對照說明： (請先閱讀背面之注意事項再填寫本頁) .· --訂*--------線 經濟部智慧財產局員工消費合作社印製 次 批 圓 晶 生 發 能 可 中 程 製 圓 晶 體 導 半 • · 之 明 述 說 上 細 於 詳 鑑 明 發 100 標準機械介面 1 10 機械手臂 115 升降裝置 120 晶圓傳送盒 130 晶圓卡匣 140 影像放大元件 150 晶圓 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公t ) 516148 A7 五、發明說明（） 工錯誤之問題，本私Ba I %明提供一種可以快速正確地辨認晶圓 加工批號的裝置 之實際實施應用 以下將藉由一實施例，作為說明本發明 第1圖所顯示的標準機械介面1 00是標準機械介面手 # (SMIF Arm)與任意之半導體製程設備結合之示意 圖連準機械介面100尚具有另一種型式，如第2B 圖所顯不的’ ％為標準機械介面升降（smif indexer)。其 中相同的4刀在於此兩種標準機械介面具有一晶圓傳送 盒1 2〇 ’不同的是第1圖的標準機械介面係利用一機械手 臂1 10 ’冑晶圓傳送纟12〇中的晶圓傳送至欲進行加工的 半導體製程没備中；而帛2圖的標準機械介面則是利用一 機械升降# 1 1 1 5，將晶圓傳送盒1 2 0中的晶圓傳送至半 導體製程設備中，其中之差異僅在於將晶圓載入（Load)與 載出（Unload)的機構裝置不同。 (請先閱讀背面之注意事項再填寫本頁) # 經濟部智慧財產局員工消費合作社印制π 第3圖所不的是一傳統的晶圓傳送盒1 20，晶圓傳送 盒120乃用於裝載複數個晶圓，並利用一外殼組提供一個 乾淨、可靠的儲存環境。因其獨特的氣密設計可確保晶圓 盒内部的潔淨度達到等級1(CUss丨）的程度，不受外界環境 影響。晶圓傳送盒120中更利用一晶圓卡匣13〇(Cassette) 元件承載於外殼組内，用於裝載放置複數個晶圓片，以利 標準機械介面1 00的機械手臂i 1 〇或升降裝置工丨5將晶圓 本紙張尺度適用中國國家標準（CNS)A4規恪（210 X 297公餐） —訂---------線"ϋκ 經濟部智慧財產局員工消費合作社印製 516148 Λ7 — B7 五、發明說明（） 卡匣1 3 0整個傳入生產機台中進行加工。此設計可降低工 廠潔淨室的建造成本，而且更能確保晶圓不受外界環境中 的微粒（P a r t i c 1 e s)污染。 此外，標準機械介面1 Ο 0可將晶圓傳送盒1 2 0内整批 的晶圓資料利用一特殊的讀取/儲存裝置（Smart Tag)(未示 出）與整個生產自動化系統連結，可進行該批晶圓包含的所 有資料之翻新讀寫，以快速且正確地傳遞現場生產資料， 避免人為的疏失。另一方面，於實際的生產線上，通常於 晶圓傳送盒1 2 0之外部，尚可利用一標註牌直接標註該批 晶圓的批號，以方便現場工作人員辨識該晶圓傳送盒後進 行後續之各種作業操作。 然而，於上述實際的自動化生產流程中，仍然無法避 免4 77之人為疏失或疋生產機台的各種突發狀況，其所形 成的錯誤可能導致晶圓傳送盒1 20内晶圓卡匣丨3 〇所裝載 的某批晶圓片並非原先系統設定裝載的某一正確批號的晶 圓片。換言之，當晶圓傳送盒1 20内晶圓資料讀取/儲存裝 置所健存的晶圓資料與實際裝載的該批晶圓並不吻合時， 即使現場的操作人員檢視晶圓傳送盒丨2 〇外的標註牌通常 亦然法有效發現前述之裝載錯誤，因為晶圓傳送盒1 2 0外 標註牌的資料通常與晶圓資料讀取/儲存裝置中的資料相 同。最後的影響所及，將是同時間内有兩批錯誤批號的晶 本紙張尺度適用中國國家標準（CNS)A4規格（21〇 x 297公釐） --------------·------- 丨訂---------線 (請先閱讀背面之注意事項再填寫本頁) 516148 經濟部智慧財產局員工消費合作社印製 A： B7_ 五、發明說明（) 圓進行錯誤的加工程序，而導致至少此兩批的晶圓必須重 工，或甚至必須報廢。 解決上述問題的方法之一是由操作人員直接以肉眼觀 察晶圓傳送盒内晶圓片表面之批號，但是由於晶圓表面上 刻印的批號數字大小不大，而且晶圓傳送盒的外殼組表面 亦會造成部份的光線被折射而不易由操作人員直接以肉眼 辨識出晶圓批號。因此，為有效地辨識晶圓批號，唯一的 方式便是將晶圓傳送盒内的晶圓卡匣載出，以利直接觀看 晶圓批號。然而，此舉不但費時費力，而且亦將提高環境 微粒污染的可能性。 本發明所提供的晶圓傳送盒係利用一個位於外殼組 頂部之影像放大元件1 4 0，如第3圖所示，用以放大該晶 圓卡匣内晶圓表面1 5 0上之晶圓批號。由於晶圓傳送盒的 外殼组與影像放大元件皆為透明元件，因此肉眼可以從晶 圓傳送盒外部迅速且正確地讀取内部晶圓表面上的批 號。請參閱第4圖，其顯示晶圓傳送盒部分之俯視圖。更 明確地說，操作人員於搬運該晶圓傳送盒前，可以輕易地 藉由晶圓傳送盒頂部影像放大元件 1 4 0放大影像的功 能，辨識晶圓傳送盒内之晶圓卡匣1 3 0最上方晶圓片表面 刻印之晶圓批號，如第四圖之部分放大圖所示。接著，再 由操作人員將觀察得到的晶圓批號與晶圓傳送盒外的標註 8 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公t ) (請先閱讀背面之注意事項再填寫本頁) --------訂---------線 Ψ 經濟部智慧財產局員工消費合作社印製 516148 Λ7 B7 五、發明說明（） 牌或晶圓資料讀取/儲存裝置中的資料進行比較，於進行加 工程序前確認此時晶圓傳送盒内所裝載之晶圓是否為正確 批號的晶圓片。 承上所述，如果操作人員肉眼觀察到的晶圓批號與標 註牌或晶圓資料讀取/儲存裝置中資料所顯示的批號不 同，則立即停止後續之加工程序，並採取必要之因應處置。 反之，如果兩者資料一致，則繼續進行後續的相關製程加 工° 具體而言，本發明晶圓傳送盒之影像放大元件1 40係 為具有放大影像功能之凸透鏡，除可將其嵌入於晶圓傳送 盒頂部之外殼組中，亦可直接外加於該外殼組之頂部表 面。而該影像放大元件1 40之影像放大倍數則可以視實際 需求，予以適當地調整，以利現場操作人員可迅速且正確 地由肉眼直接辨識晶圓批號，不受批號數字過小或光線折 射的影響，更不需要再費時費力地載出晶圓卡匣，而維持 了晶圓傳送盒内部乾淨、可靠的封閉儲存環境。 綜合上述，本發明所提供界於標準機械介面與製程機 台間之晶圓傳送裝置，可使操作人員直接有效地讀取晶圓 傳送裝置内部晶圓表面之批號，確保每批次的晶圓皆進行 正確的製程加工，減少因錯誤流程所導致的成本與時間損 9 本紙張尺度適用中國國家標準（CNSM4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) 訂---------線. 516148 Λ7 _B7_ 五、發明說明（） 失，使半導體元件的自動化生產流程更加快速與正確。 人 之， 術已 技而 此例 悉施 熟實 如佳 較 之 員 的 解 瞭 所 上 以 以 用 br την 並 發 本 定 明範 發利 本專 為請 僅申 述之 所明 改 效 等 之 成。 完内 所圍 下範 ,申. 二个 泮 精專 之請 示申 揭之 所述 明下 發在 本含 離包 脫應 未均 它 ’ 其飾 凡 修 ,， 或 圍變 (請先閱讀背面之注意事項再填冩本頁) 訂---------線 經濟部智慧財產局員工消費合作社印製 ο 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐）AT _B7 V. Description of the Invention () The detailed description of the preferred embodiments of the present invention will give a better understanding of the object, viewpoint and advantages of the present invention. At the same time, the following drawings of the present invention will be used for explanation: No. 1 shows a schematic diagram of a standard mechanical interface combined with semiconductor process equipment. Figure 2 shows a schematic diagram of a standard mechanical interface combined with semiconductor process equipment. Figure 3 shows a schematic diagram of a wafer transfer device. Figure 4-shows a top view of the wafer transfer device. Drawing number comparison description: (Please read the precautions on the back before filling out this page) .. --- Order * -------- Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. Intermediate semi-circular crystal guide • The description is more detailed than that of Mingfa 100 Standard mechanical interface 1 10 Robotic arm 115 Lifting device 120 Wafer transfer box 130 Wafer cassette 140 Image magnifying element 150 Wafer This paper is suitable for China National Standard (CNS) A4 Specification (210 X 297 Gt) 516148 A7 V. Description of the Invention () The problem of manufacturing errors, this document provides a practical implementation of a device that can quickly and correctly identify the batch number of wafer processing The following will use an embodiment to illustrate the standard mechanical interface 100 shown in Figure 1 of the present invention. The schematic diagram of the standard mechanical interface 100 is a standard mechanical interface hand # (SMIF Arm) combined with any semiconductor process equipment. The standard mechanical interface 100 has another One type, as shown in Figure 2B, '% is a standard mechanical interface lift (smif indexer). The same 4 knives is that the two standard mechanical interface masks have a wafer transfer box 1220 '. The difference is that the standard mechanical interface shown in Figure 1 uses a robotic arm 1 10' to transfer wafers in 12 ° C. The circle is transferred to the semiconductor process to be processed, but the standard mechanical interface in Figure 2 uses a mechanical lift # 1 1 1 5 to transfer the wafers in the wafer transfer box 120 to the semiconductor processing equipment. The difference is only in the mechanism of loading and unloading wafers. (Please read the notes on the back before filling this page) # Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs π Figure 3 does not show a conventional wafer transfer box 1 20, which is used for Load multiple wafers and use a housing set to provide a clean and reliable storage environment. Because of its unique airtight design, it can ensure that the cleanliness of the inside of the wafer box reaches the level 1 (CUss 丨), and it is not affected by the external environment. In the wafer transfer box 120, a wafer cassette 13 (Cassette) component is further carried in the housing group, and is used for loading and placing a plurality of wafers, in order to facilitate the robot arm i 1 0 of the standard mechanical interface 100 or lifting Installation Worker 丨 5 Applies the paper size of the wafer to the Chinese National Standard (CNS) A4 (210 X 297 meals) — Order --------- line " ϋκ Intellectual Property Bureau, Ministry of Economic Affairs, Consumer Consumption Cooperative Printing 516148 Λ7 — B7 V. Description of the invention () The cassette 130 is transferred to the production machine for processing. This design can reduce the construction cost of the factory's clean room, and also ensure that the wafer is not contaminated with particles (P a t i c 1 e s) in the external environment. In addition, the standard mechanical interface 100 can connect the entire batch of wafer data in the wafer transfer box 120 with a special read / storage device (Smart Tag) (not shown) to the entire production automation system. Renovate and read all the data contained in the batch of wafers in order to quickly and correctly transfer on-site production data to avoid human error. On the other hand, on the actual production line, usually outside the wafer transfer box 120, a lottery label can be used to directly mark the batch number of the batch of wafers to facilitate field staff to identify the wafer transfer box. Various subsequent operations. However, in the above-mentioned actual automated production process, it is still unavoidable that human error of 4 77 or various unexpected conditions of the production machine may occur, and the errors formed may cause the wafer cassette in the wafer transfer box 1 20 丨 3 〇 A batch of wafers loaded is not a wafer of a correct batch number originally set by the system. In other words, when the wafer data stored in the wafer data reading / storing device in the wafer transfer box 120 does not match the batch of wafers actually loaded, even if the on-site operator inspects the wafer transfer box 丨 2 The external tag is usually effective to find the aforementioned loading error, because the data of the external tag of the wafer transfer box 120 is usually the same as the data in the wafer data reading / storage device. The final impact will be that the size of the crystalline paper with two batches of wrong batches at the same time applies to the Chinese National Standard (CNS) A4 specification (21 × x297 mm) ------------ -· ------- 丨 Order --------- Line (Please read the notes on the back before filling out this page) 516148 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A: B7_ Five 2. Description of the invention () The rounds were subjected to the wrong processing procedure, which caused at least these two batches of wafers to be reworked or even scrapped. One of the methods to solve the above problem is to directly observe the batch number of the wafer surface in the wafer transfer box with the naked eye of the operator. It will also cause part of the light to be refracted, making it difficult for the operator to directly identify the wafer lot number with the naked eye. Therefore, in order to effectively identify the wafer lot number, the only way is to load out the wafer cassette in the wafer transfer box so as to directly view the wafer lot number. However, this will not only be time-consuming and laborious, but it will also increase the possibility of environmental particulate pollution. The wafer transfer box provided by the present invention uses an image magnifying element 1 40 located on the top of the casing group, as shown in FIG. 3, to enlarge the wafer on the wafer surface 150 in the wafer cassette. lot number. Since the case set and the image magnifying element of the wafer transfer box are transparent elements, the batch number on the inner wafer surface can be read quickly and accurately from the outside of the wafer transfer box by the naked eye. Please refer to FIG. 4, which shows a top view of a wafer transfer box portion. More specifically, the operator can easily identify the wafer cassette 1 in the wafer transfer box by using the function of the image magnifying element 1 40 on the top of the wafer transfer box to magnify the image before the wafer transfer box is moved. The wafer lot number engraved on the top wafer surface is shown in the enlarged view of the fourth figure. Next, the operator will observe the wafer lot number and the marking on the outside of the wafer transfer box. 8 The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210 X 297 g). (Please read the precautions on the back first. (Fill in this page) -------- Order --------- Line 印 Printed by the Intellectual Property Bureau Employee Consumer Cooperative of the Ministry of Economic Affairs 516148 Λ7 B7 V. Description of the invention () Reading of brand or wafer data / Compare the data in the storage device, and confirm whether the wafer loaded in the wafer transfer box is a wafer with the correct batch number before performing the processing procedure. According to the above description, if the wafer batch number observed by the operator with the naked eye is different from the batch number shown on the data on the tag plate or the wafer data reading / storage device, the subsequent processing procedures will be immediately stopped and necessary actions taken. Conversely, if the two data are consistent, the subsequent related process processing will continue. Specifically, the image magnifying element 1 40 of the wafer transfer box of the present invention is a convex lens with a magnified image function, except that it can be embedded in the wafer. The shell set on the top of the transfer box can also be directly added to the top surface of the shell set. The image magnification of the image magnifying element 1 40 can be appropriately adjusted according to actual needs, so that the field operator can quickly and correctly identify the wafer lot number directly with the naked eye, without being affected by the lot number being too small or light refraction. Moreover, it is no longer necessary to carry out the wafer cassette with time and effort, and maintains a clean and reliable closed storage environment inside the wafer transfer box. To sum up, the wafer transfer device provided between the standard mechanical interface and the processing machine provided by the present invention enables the operator to directly and effectively read the batch number on the wafer surface inside the wafer transfer device, ensuring each batch of wafers. All are processed correctly to reduce the cost and time loss caused by the wrong process. 9 This paper size applies the Chinese national standard (CNSM4 specification (210 X 297 mm). (Please read the precautions on the back before filling this page).) Order --------- line. 516148 Λ7 _B7_ 5. The description of the invention () is missing, which makes the automatic production process of semiconductor components faster and more accurate. The solution of the staff is to use br την to publish the book. Fan Fa Li This book is designed to please only the stated changes to the effect, etc. After finishing the surrounding fan, apply. Two instructions for the Jing Jing The statement stated in the application should not be included in this document. It should be decorated or modified (please read the precautions on the back before filling out this page). Order ------- --Member of Intellectual Property Bureau, Ministry of Economics Printed by Industrial and Consumer Cooperatives ο This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)