级阐賴π r牛導體製程中輸 經濟部智慧財產局員工消費合作社印製 4S4227 Α7 ______Β7 五、發明說明（）The explanation is based on the π r cattle conductor in the process of printing. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 4S4227 Α7 ______ Β7 5. Description of the invention ()
I 發明领Μ : 本發明與一種在晶圓倉儲系統（st〇cker)與製程機台 間傳送晶圓卡匣（cassette)之出入貨平台（I/O port paddle)，特別是一種具有固定裝置（gripper)以防止晶圓卡 匣掉落之承載平台。 堯明背景： 隨著半導體製程發展至超大型積體電路（VLSI)，整 個積體電路的製造過程變得更為複雜與困難。對於一個高 積集度的積體電路而言’往往需要數百個製程步驟才可製 造出來，而如此繁複的製程，也增加了進行派工分配時之 複雜性與變通性。 之相關流程。如同上述’由於整個半導體製程之步驟相當 的繁複，是以在開始投料以載入秒，至冑構完所需各 式元件於晶圓上，往往需要使用為數極多的機台，來對晶 圓進行相關製程。*中，因為派工排程的差異，已完成某 製程之晶圓，會先被傳送至晶圓倉儲系統（stQekef)2〇中， 以暫時儲存。直到下-個製程要進行時，再將晶圓由倉儲 系統中取出。例如，在第一圖中，當某批次晶圓在完成製 之相關程序後，會先傳送至“倉㈣、統2G中進行 存放’同時將此批次晶圓之訊息，輸入自動材料處理系統 本紙張尺度適用中國國家標準（CNS)A4 ϋΐΟ X 297公釐)------ --------——^裝--------訂---------線 -. /IV /1 (請先閱讀背面之注意事項再填寫本頁) ❹4 22 7 at ~~- B7 五、發明說明（） a .m a t e f i'ar» (請先閲讀背面之注意事項再填寫本頁) 中’以便確認此批次晶圓之型號與進度。然後，當後續製 程要開始時，資^羞4 q的資科，由晶圓倉儲 系統20中，取出此批次晶圓，再將其載入（1〇ading)製程二 .2 3之機.台。同樣的，.在完成製程二.2 3之相關程序後，可再 將其輸送至晶圓倉儲系統20存放，同時登記至AMHS資料 庫10。如此反覆進行，直到製程三25、製程四27與製程五 29冗成為止。 接著，請參照第二a-d圖，該圖顯示了在晶圓倉儲系 統與製程機台間，傳晶亂—之出.▲赢于D〇rt paddl^^ 40 }真相』'，氣'踢。首先，參照第二a圖，當晶圓卡匣3 0中 之晶圓已完成某項製程後，可藉著操作機器手臂（r〇b〇t arm)由此晶圓卡g 30側面的$握:把1¾，抓起整個晶圓卡匿 30 ’並將其移動至平台4〇上方適當的位置。其中，在此晶 圓卡E30表面上，·並具有一擇，:兹，用以黯金其 • ·. . , ‘ _____ 由》贿*爾&»泛0滅。至於用_以承載此晶圓卡g 3 〇之平 台40 ’其上表面則具有真空吸附裝置50，用以在晶圓卡s 30接觸此平台40時，吸附住該晶圓卡g 30，避免脫落。 經濟部智慧財產局員工消費合作社印製 接著，如弟一 b圖所示，_^制:;.在使遽，. 該晶^阊.卡:Ε 30。在平台4〇承接住此晶圓卡匣3 〇，且 機《益臂—移,_、亂後’一.標誌牌讀、电^奠^.置丄xeader)(未顯示 於圖中）’可偵測此晶圓卡限》34^一面二標.語^,而讀取 此晶圓卡匣30之批次資料，並將此資料輪入AMHS資料庫 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 45422 7 五、發明說明（） A7 B7I Invention Leadership M: The present invention relates to an I / O port paddle for transferring wafer cassettes between a wafer storage system (stocker) and a process machine, especially a fixing device (Gripper) a carrier platform to prevent the wafer cassette from falling. Yao Ming's background: With the development of semiconductor processes to very large integrated circuits (VLSI), the manufacturing process of the entire integrated circuit has become more complicated and difficult. For a high-integration integrated circuit, it often requires hundreds of process steps to produce it. Such a complicated process also increases the complexity and flexibility of dispatching work. Related processes. As mentioned above, because the steps of the entire semiconductor manufacturing process are quite complicated, it is necessary to use a large number of machines to align the wafers at the beginning of loading to load the second, and to complete the various components required on the wafer. Circle to carry out related processes. *, Due to the difference in dispatching schedules, wafers that have completed a certain process will be first transferred to the wafer storage system (stQekef) 20 for temporary storage. The wafer is removed from the storage system until the next process is to be performed. For example, in the first picture, when a batch of wafers has completed the relevant manufacturing process, it will be sent to "Cangjie, Tong 2G for storage" and the information of this batch of wafers will be input into automatic material processing. The paper size of this system is applicable to Chinese National Standard (CNS) A4 ϋΐΟ X 297mm) -------------------- ^ Installation -------- Order ----- ---- Line-. / IV / 1 (Please read the notes on the back before filling this page) ❹4 22 7 at ~~-B7 V. Description of the invention () a. Matef i'ar »(Please read the back first Note on this page, then fill in this page) to confirm the model and progress of this batch of wafers. Then, when the subsequent process is to be started, the 4Q assets will be taken out from the wafer storage system 20 Batch of wafers, and then load them into the machine of process 2.2.3. Similarly, after completing the relevant procedures of process 2.2.3, they can be transported to the wafer warehouse. The system 20 is stored and registered in the AMHS database 10. At the same time, the process is repeated until process 3 25, process 4 27 and process 5 29 are redundant. Next, please refer to the second ad figure, which shows the wafer warehouse. Between the storage system and the process machine, there is a crystal mess—the winner. ▲ Win the Dοrt paddl ^^ 40} The truth ”, kicking. First, referring to the second a, when the wafer cassette 30 After the wafer has completed a certain process, you can operate the robot arm (r0b0t arm) to hold the $ 30 on the side of the wafer card g30: hold 1¾, grab the entire wafer card 30 'and It moves to an appropriate position above the platform 40. Among them, there is a choice on the surface of this wafer card E30: hereby, it is used to dim gold • •.., '_____ 由》 »Pan 0 off. As for the platform 40 ′ which is used to carry the wafer card g 3 〇, the upper surface is provided with a vacuum adsorption device 50 for adsorbing the wafer when the wafer card s 30 contacts the platform 40 Card g 30, to avoid falling off. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs. Then, as shown in the figure of the first one, _ ^ system:;. In the 遽,. The crystal ^ 阊. Card: Ε 30. On the platform 4〇 Receiving this wafer cassette 3 〇, and the machine "yi arm-move, _, after the chaos 'a. Sign reading, electricity ^ ^ ^ xeader) (not shown in the picture)' can detect Measure this wafer card limit '' 34 ^ one side and two standards. ^, And read the batch data of this wafer cassette 30, and turn this data into the AMHS database. The paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 45422 7 V. Description of the invention () A7 B7
1 〇中。然後，如第二c圖所示，在標誌牌讀取裝置讀取了 此晶圓卡E 30之資料後，在度，再移動 晶圓倉儲系統20中，。如此一 A ，"wp 藉著輸入標A牌34上之資丄〇,冰，而得到所有儲 存統《3*Qs斗aw:-晶®?圓赞囊^。 同里®欲對某氣政辱痛‘^ Α Μ ίί m-良瓜戽處暴矣虞為皇姐才，將特.定的晶圓卡 E，出，亡將其傳送至所選定的製程設備中，心息專 製私。如-益一圖，可使用平.台4〇將晶圓卡匣3〇移出 晶圓倉儲系統20，並操作機器手臂，由晶圓卡匣3〇之握把 32將其爽住’並移動至設发的製程皇備10%. Then, as shown in the second c figure, after the data of the wafer card E 30 is read by the sign reading device, the wafer storage system 20 is moved at a degree. In this way, "wp", by inputting the 丄 〇, ice on the A sign 34, all the storage systems "3 * Qs bucket aw: -crystal ®? Round praise capsule ^. Tongli® wants to humiliate a certain government '^ Α Μ ίί m-Lianggua is an emperor, and sends the special wafer card E to the selected process. In the device, the heart is dictatorial and private. As shown in Yiyi, the wafer cassette 30 can be moved out of the wafer storage system 20 using a flat table 40, and the robot arm can be operated, and it can be held by the grip 32 of the wafer cassette 30 and moved. Process Equipment to Sheffield
又;J 值得注意的是，如同上述，在標誌讀取裝置讀取# 圓卡£ 30之批次資斜後，用以戴晶圓卡么阳It is also worth noting that, as described above, after the mark reading device reads the batch of # round card £ 30, it is used to wear a wafer card.
.......+--〜二F?—你拉感..Q 一顧底一晶礙尤良战矣加:晶竭体杀爲遍時。广 且止表面，.1有I急^ 而’在平台40進行旋轉動作時，儘.秀— :W，—舰‘复卿。. 矛〜威…¥.·..圓，艮.3 0电平一会….. ' 另外，由於真空吸附裝置之友限，是以在生產 ，上的操作人員往往會在兔孤屋....... +-~ 二 F? — 你 拉 感 ..Q When you look at the bottom, one crystal hinders you, and the other is good. As far as the surface is concerned, .1 has I rush ^ and ‘when the platform 40 is performing a rotation action, do the best. Show —: W, —ship‘ Fu Qing. . Spear ~ Wei ... ¥. · .. Round, Gen. 3 0 level for a while… .. In addition, due to the limitation of the vacuum adsorption device, the operators in production, often in the rabbit solitary house
Bl批太J1誤時’任I由半^ 將晶^凰龙晨3«^。然 而’由於標誌讀取裝置已讀取此晶圓卡匣3〇之批次資料， 本纸張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ---------LI II〔凌.！ - C (請先閱讀背面之注音？事項再填寫本頁) 訂 级濟部智慧財產局員工消費合作社印製 45422 7 Α7 Β7 五、發明說明（） 且將其存入AMHS資料庫10中，是以製程管理者將會誤* ㈤构晶。.凰a之.^^..，.置^⑳#!德@成^巍^翁 (請先閱讀背面之注意事項再填寫本頁) 因此，虽需一種.新的固定裝置，可以有效的固定住 :¾圓卡匣30,而避免在平台移動時，晶圓卡匣30由其上滑 落。此外，亦可氣的_-,防,„土„,,虫_及_丕,_1的,„.更」鱼.革身^^ 0 卡硬wHL·二座·.. 1 〇 系.,ϋ、.....*吳之一.° 發明目的及概述： 本發明之目的在提供一種可防止晶圓卡匣滑落之 出入貨平台（I/O port paddle)。 本發明之又一目的在提供一種#磁槭方:'*%防止晶 圓卡匣滑落，且可在晶圓.免,,儲..系遂丄il〇ck..e..U|製^,„,氣1：^^ 經濟部智慧財產局員工消費合作社印製 在本發明之第一實施例中，所提供的出入貨平台， 其每一邊緣之上表面，皆具有疼％之桂一狀身，用以亂义…夏 放於平台上之晶_ JLrtJi。其中，當晶圓卡匣放置於平台上 表面時，f狂狀_镄並可沿著位於平台上表1面之熟，由平台 .邊，緣》朝>1»虫>·*心.__移-動，而接觸此晶圓卡E·，Jt太-式一固》定 晶圓卡—E ’而達到避免晶。此外’在本 發明之第二實施例中，所提供之平台，其每一邊緣上表 面，則具有魏。當晶圓卡匣放置於平台上表 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） 45422 A7 B7 五、發明說明（） 面時，此垂直板塊可以機„^成》»喊 晶0 匯购由滅畢祿gf|麥*.。 s*l% U方κ·-止 經濟部智慧財產局員工消費合作社印製 圖式簡單說明： 藉由以下詳細之描述結合所附圖示，將可輕易的了 解上述内容及此項發明之諸多優點，其中： 第一圖為半導體製程中之流程圖，顯示目前半導體 廠之製程中，AMHS資料庫、晶圓倉儲系統與各式製程間 之相互關係； 第二a-d圖為半導體晶圓卡匣之側面圖，顯示目前製 程中，放置晶圓卡匣於平台上以存入晶圓倉儲系統之流 程； 第三a-c圖為平台之正視圖，顯示根據本發明所形成 具有固定裝置之平台； 第四a-f圖為 '半導體晶圓卡匣之側面圖，顯示使用本 發明所設計之平台，來存入/取出晶圓卡匣至晶圓倉儲系 統中之步驟； 第五a-c圖為平台之正視圖，顯示根據本發明所形成 具有固定裝置之平台；及 第六a - d圖為半導體晶圓卡匣之側面圖，顯示使用本 發明所設計之平台，來存入/取出晶圓卡匣至晶圓倉儲系 統中之步驟。 發明詳細說明： 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ---------i---^--------訂---------線 — j - 'c .. i /IK /c (請先閱讀背面之注意事項再填寫本頁) 五、 經濟部智慧財產局員工消費合作社印製 4δ4227 Α7 ' — __Β7 發明說明（ 本發明提供了 一·種在晶_倉彳諸恭丄程· 機^支屬》^.，送崎晶搿晶德㈣黑〆c^s-jeJ^teJ...之新.,.,("Ο P〇rt paddle)。其中，在此平台邊緣的上表面，具有凸起 的固定裝置。當，晶圓兔匣会一上_時」:拉 -上之-&...起ϋΕϋ-.羃，可有效的固定住晶圓卡匣’並避免其 自平台上滑落。有關本發明之詳細説明如下所述。 請參照.第三a-c圖，該圖..顯示了根據本發明實施例， 所形成具有.固定裝置之平台140。其中，如第三&圖所示’ 此平台14〇每一邊緣乏上表面，皆具有母起之柱狀物I、42， 用以取置.教於.平.台n〇上I晶圓..素―民。值知注意 的是，此平台140上表面的每一邊緣處，並具有凹揚—闡口 144，物”丄42 .，_...具...表挂著 •曝愈〆如:―箭頭..方....向—所.示J,。其中，此凹槽開口 14 4 是也為H 4 0 的.邊巍 .弧’ 〜瓜.朝iJB：....ΛΛΑ0 中。值得注意的是在此實施例中，雖然是以形成於 平台140上表面之凹槽開口 144，做為柱狀物142之移動空 間’但在實際的運用上，其它任H提供_相一同作胤之,滑 _ - ......—...... 軌-’ 1孤.屬,..,藏;.朋_.。.請參照第三b圖，該圖顯示了具 有凸起柱狀物142、凹槽開口 144之平台140其正面俯視 圖。v此外：’—ji^在圖，則顯示了此東会;姐之抵s®^® 4。 接著，請參照第四a_f圖，該圖顯示了使用上述具有 本紙張尺度適用中國國家標準（CNS)A4規格（210、297公釐） 請 先 閱 讀 背 S 之 注 項 再 填 寫 本 頁 454227 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明說明（） 圓倉鍺系統中之步驟。其冬，血箪_哎4暴丄息』+序1砂 中之晶圓批次’欲存入晶圓倉儲系統中時，可藉著操作機 器手臂（robot arm)(未顯示），自晶圓卡g 13〇侧面上的握 把132 ’抓起整個晶圓卡匣13〇，並將其移動至平台14〇上 方’《Lit岸·^美4iWL4〇。其中，在此晶圓卡匣13 〇 表面上’如同上述’具有一 顯示晶.圓批次資料之標裙牌 (tag)134。至於用來承載晶圓卡匣3〇之平台4〇上表面，亦 具，用以在晶圓卡gl30接觸平台140 時，吸附住晶圓卡匣130 » 接著，如第四b圖所示，控制平台140使其朝上方移 動’以接觸並承載晶圓卡匣130。在平台140承接住晶圓卡 匣130後’如第四c圖所示，上述位於平台14〇邊緣之凸起 柱狀物142 ’可沿著凹槽開口 144 ’ E 13 氣瓜將有效 • '：·.,. 才义上，. EI —標、兹..魄讀—取·.恭^置（tag reader)(未顯示 方；圖中）將偵，』丨《...祖-凰食愿》*丄'δ 5¾.^. 筆*晶jam資料’ m翁入才、 然後，如第四d圖，在讀取此晶圓卡匣130之資料 後’此平台140會旋轉90度，再移動至晶圓倉儲系統中， 以存放晶圓卡匣130。其中，上述柱狀物142，將可防止晶 圓卡匣130於平台140旋轉時，由平台140上滑落。如此_ 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） ---------^---该 -------訂------------線 (請先閱讀背面之注意事項再填寫本頁) 45422 7 A7 B7 五、發明說明（ ^中& ^庫中’將顯示此批次晶圓於晶圓倉儲系 中义相關位置，以便後續製程操作。 AMHS=當欲對此晶圓批次進行後續製程時，可藉著 =料庫’自晶圓倉儲系統中，‘嶋祕職 二第四e圖所示，藉著移動平台14〇，可將所需之晶圓 、、取出，接著使固定晶圓卡匣130之凸起柱狀物 2 ’沿IK、農鳳鉍之方氪二氣 動-0上表方之晶哩± EU 3 〇。然後，如 第四f圖、,’以機器手臂夾住此晶圓卡匣13〇之握把，且 將其由平。140上央起，而傳送羞|選息的屬程機台，以 進行相關製程。 、、，再請參了例 义平台140。其中’如第五3圖所示’此平台14〇每一邊緣 之上表面，鬼.，氛1A6，用以固定放£殄 平口1!〇上之_見通一堂匣。（氣凰第^ …............/之+..... 垂直板塊146之平台140其正面俯視圖。並且，第五c圖， 顯示了此平台140之側面圖。 (請先閱讀背面之注意事項再填寫本頁) —II --I--〆！ l·^.---I I---t --- 線. 經濟部智慧財產局員工消費合作社印製 接著，請參照第六a-d圖，該圖顯贪了使思ι盡兔起 垂直板塊146之平台140，來存入/取毋晶„風,;,泰4匣14P至晶圓 倉儲系統中之步屬。其中，如第心亂士瓦操雄機暴^ (robot arm)(未顯示）’；由晶圓=卡13〇倒面上之握把132， 抓起晶圓卡匣130，並將其移動革平会过以方。接著，如 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱） 4 54227 A7Bl approved too much time J1 missed ‘any I by half ^ will Jing ^ Huanglong Chen 3« ^. However, 'Because the mark reading device has read the batch data of this wafer cassette 30, this paper size applies to the Chinese National Standard (CNS) A4 specification (210 X 297 mm) -------- -LI II [Ling.! -C (Please read the phonetic on the back? Matters before filling out this page) Printed by the Consumers Cooperative of the Ministry of Economic Affairs Bureau of Intellectual Property 45422 7 Α7 Β7 V. Description of the invention () and save it in AMHS database 10, yes Process managers will make mistakes * . ^^ .. ，. ^^ ⑳ #! 德 @ 成 ^ 巍 ^ 翁 (Please read the notes on the back before filling out this page) Therefore, although a new fixture is needed, it can be effective Hold it: ¾ round cassette 30, to avoid the wafer cassette 30 from sliding down when the platform moves. In addition, _-, anti-, ‘soil’, worm, and _ 丕, _1, „. More” fish. Leather body ^^ 0 card hard wHL · Secondary · .. 1 〇 series. ,, ϋ, ..... * 吴 一. ° Purpose of the Invention and Summary: The purpose of the present invention is to provide an I / O port paddle that can prevent the wafer cassette from slipping. Another object of the present invention is to provide a #magnetic maple square: '*% prevents the wafer cassette from slipping, and can be stored on the wafer. ^, „, Qi1: ^^ Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs in the first embodiment of the present invention, the loading and unloading platform provided on each edge of the upper surface has a painful pain. A body for the meaning ... Summer crystal placed on the platform _ JLrtJi. Among them, when the wafer cassette is placed on the upper surface of the platform, f crazy shape _ 镄 and can be cooked along the surface on the surface of the platform , From the platform. Edge, edge "towards> 1» worm "· * heart. __Move-move, and contact this wafer card E ·, Jt Tai-style one solid" fixed wafer card-E 'and To avoid crystals. In addition, in the second embodiment of the present invention, the provided platform has Wei on each edge of the upper surface. When the wafer cassette is placed on the platform, the paper size of the table applies Chinese national standards ( CNS) A4 specification (210 X 297 mm) 45422 A7 B7 V. Description of the invention () When the surface is vertical, this vertical plate can be machined "^ 成" »晶晶 0 The purchase is made by billu gf | mai *. s * l% U side κ ·-Zhi Zhizhi, Intellectual Property Bureau, Ministry of Economic Affairs, Employee Consumer Cooperatives, Printed Simple Description: With the following detailed description combined with the attached diagrams, the above content and many of this invention can be easily understood Advantages, of which: The first diagram is a flowchart of the semiconductor process, showing the relationship between the AMHS database, the wafer storage system and various processes in the current semiconductor factory process; the second ad is the semiconductor wafer cassette The side view shows the current process of placing a wafer cassette on a platform for storage in a wafer storage system; the third ac diagram is a front view of the platform, showing a platform with a fixed device formed according to the present invention; The fourth af is a side view of the semiconductor wafer cassette, showing the steps of using the platform designed by the present invention to deposit / remove a wafer cassette into a wafer storage system; the fifth ac is a front view of the platform , Showing a platform with a fixing device formed according to the present invention; and sixth a to d are side views of a semiconductor wafer cassette, showing the use of the platform designed by the present invention to deposit / remove a wafer Steps from cassette to wafer storage system. Detailed description of the invention: This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) --------- i --- ^ -------- Order ---- ----- line — j-'c .. i / IK / c (Please read the notes on the back before filling this page) 5. Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 4δ4227 Α7' — __Β7 Description of the Invention (The present invention provides a new kind of in the crystal _ Cangjie Zhugong process · machine ^ branch genus "^., Send Qi Jing Jing 搿 Jing De ㈣ black 〆 c ^ s-jeJ ^ teJ ... new .... , (" 〇 P〇rt paddle). Among them, on the upper surface of the edge of the platform, there is a raised fixing device. When the wafer rabbit box will be on _ "":-上 之-& .. .From ϋΕϋ-. 羃, it can effectively fix the wafer cassette 'and prevent it from slipping off the platform. The detailed description of the present invention is as follows. Please refer to the third ac diagram, which shows the basis In the embodiment of the present invention, a platform 140 having a fixing device is formed. Among them, as shown in the third & In order to obtain. Teach on. Flat. Taiwan n. I wafer. It is worth noting that each edge of the upper surface of this platform 140 has a concave-explaining opening 144, an object "丄 42., _... tools ... The table is hanging. The exposure is more like: ―Arrow..Fang .... Direction—So. Show J. Among them, the groove opening 14 4 is also H 4 0. Bian Wei. Arc '~ Guar. To iJB: ... ΛΛΑ0 It is worth noting that in this embodiment, although the groove opening 144 formed on the upper surface of the platform 140 is used as the movement space of the pillar 142, but in actual use, other As a matter of fact, slip _-...... -...... rail-'1 solitary. Genus, .., Tibetan ;. Peng _ .. Please refer to the third figure b, which shows The front plan view of the platform 140 with raised columns 142 and groove openings 144. In addition: '—ji ^ in the figure, this Donghui; sister's arrival s® ^ ® 4. Next, please refer to Four a_f diagrams showing the use of the above paper with the applicable Chinese National Standard (CNS) A4 specifications (210, 297 mm). Please read the note on the back before filling out this page. 454227 A7 B7 Intellectual Property Bureau, Ministry of Economic Affairs Printed by employee consumer cooperatives Explain clearly () The steps in the germanium system of the silo. Its winter, blood 箪 _ 4 4 暴 丄 息 + + order 1 wafer batch 'in the wafer storage system, you can operate the machine by A robot arm (not shown), from the grip 132 on the side of the wafer card g 13 ′, 'grab the entire wafer cassette 13 ′ and move it above the platform 14 ′. 4iWL4〇. Among them, on the surface of the wafer cassette 13 ′, as described above, there is a tag 134 showing crystal and round batch data. As for the upper surface of the platform 40 for carrying the wafer cassette 30, it is also used to adsorb the wafer cassette 130 when the wafer card gl30 contacts the platform 140 »Next, as shown in the fourth figure b, The control platform 140 is moved upward 'to contact and carry the wafer cassette 130. After the platform 140 receives the wafer cassette 130 ', as shown in the fourth figure c, the above-mentioned raised pillar 142 located on the edge of the platform 14o can be opened along the groove opening 144' E13. ： ·.,. Talents, EI — standard, and .. poo reading — take ·..… (Tag reader) (not shown; in the figure) will detect, "丨 ...... 祖-凤凰"Wish" * 丄 'δ 5¾. ^. Pen * crystal jam data' m Weng Ruicai, and then, as shown in Figure 4d, after reading the data of this wafer cassette 130 'the platform 140 will rotate 90 degrees , And then moved to the wafer storage system to store the wafer cassette 130. The pillar 142 can prevent the wafer cassette 130 from sliding off the platform 140 when the platform 140 rotates. So _ This paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) --------- ^ --- This ------- Order ------- ----- Line (Please read the precautions on the back before filling this page) 45422 7 A7 B7 V. Description of the invention (^ In & ^ In the library 'will show this batch of wafers in the wafer storage department Zhongyi Relevant locations for subsequent process operations. AMHS = When you want to perform subsequent processes on this wafer batch, you can use the = material library 'from the wafer storage system, as shown in Figure 4 and e of Figure 2. Holding the moving platform 14, the required wafer can be taken out, and then the raised column 2 of the fixed wafer cassette 130 can be moved along the IK and Nongfeng bismuth sides. Crystal Mile ± EU 3 〇. Then, as shown in Figure 4f, '' Clamp the grip of this wafer cassette 13 with a robot arm, and move it from flat. 140 to the center, and transfer shame | select interest , For the relevant processes. Please refer to the example platform 140. Among them, 'as shown in Figure 5', the upper surface of each edge of this platform 14〇, ghost., Atmosphere 1A6, It is used for fixed placement. A box. (Qi Huang No. ^ .................. / + ..... The front plan view of the platform 140 of the vertical plate 146. And, the fifth c figure shows this platform Side view of 140. (Please read the precautions on the back before filling out this page) —II --I--〆! L · ^ .--- I I --- t --- Line. Intellectual Property Bureau, Ministry of Economic Affairs Printed by the employee consumer cooperative. Next, please refer to the sixth ad diagram, which shows the greed to lift the platform 140 of the vertical plate 146 to deposit / retrieve no crystals. Wind ,; 4 boxes of 14P to crystal The steps in the round storage system. Among them, the robot arm ^ (robot arm) (not shown) '; the wafer 132 is grasped by the grip 132 on the reverse side of the wafer 13 Cassette 130, and move it to a flat surface. Then, if this paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 public love) 4 54227 A7
五、發明說明（） 第六b圖所示’控制平台140使其朝上方移動，以接觸並承 載晶圓卡匣130。在平台140承接住晶圓卡匣13〇後，— 諸牌讀取裝置（tag reader)(未顯示於圖中），將偵測晶圓卡 匣130表面之標誌牌134 ’而讀取此筆晶圓批次之資料，並 將其輸入AMHS資料庫中。然後，如第四c圖，在讀取# 圓卡E 130之資料後，平台140會旋轉90度，再移動至晶圓 倉储系統中’以存放晶圓卡匡13 0。其中，去堪隹·車板塊 146 ’將可防止晶圓m麗兹tA…台140.旋轉陵，由平台140 上滑落。 ' 口 ..... 同樣地’當欲對此晶圓批次進行後續製程時，可由 晶圓倉儲系統中，將此晶圓卡取出。如第六d圖所 示’以機器手臂夾住此晶圓卡匣U0之握把！32，將其由平 台140上舉起’而進杆後續製程。 夹發Λ…乏是興丨卜例如，在傳統之出入平么 上’僅依靠位於平台上表面之真空吸附裝置’來吸住晶圓 卡E，避免其在操作過程中由平台上滑落。俾當此吸附裝 置發生故吸.小、甚至完全喪失時， B曰圓卡匿便很谷易在平台的移動或.轉動過程—由〜，由二朵.台上 掉落。然而，在使_甩11明氣巍獻之風多 後，由於位於平台秦義—上起^ 魏4 效泰應濤灰i空意附4過▲'甚i喪在^ 凸起餘，旅息,械效果’而I到防土晶圓来孤滑恭美效课。特 別是，在本4疏第實售..中.麵_起柱狀挑▲电承1沿碁 本紙張尺度適財賴^^i^iT210 x 297公楚） (請先閱讀背面之注意事項再填寫本頁) —ίΛ'^--------訂---------線 經濟部智慧財產局員工消費合作社印製 45422 75. Description of the invention () The control platform 140 shown in FIG. 6b is moved upward to contact and carry the wafer cassette 130. After the platform 140 has received the wafer cassette 13, — tag readers (not shown) will detect the tag 134 'on the surface of the wafer cassette 130 and read the pen. Wafer batch data and enter it into the AMHS database. Then, as shown in Figure 4c, after reading the data of # 圆 卡 E 130, the platform 140 will rotate 90 degrees, and then move to the wafer storage system 'to store the wafer card Marina 130. Among them, going to the Kanji · Car plate 146 ′ will prevent the wafer m Liz tA… the stage 140 from rotating and falling from the platform 140. '口 ..... Similarly', when subsequent processing of this wafer batch is desired, the wafer card can be taken out from the wafer storage system. As shown in the sixth figure d ', grip the grip of this wafer cassette U0 with a robot arm! 32. It is lifted from the platform 140 'into the subsequent process. It is not uncommon to pinch the hairpin. For example, in the traditional way of loading and unloading, ‘relying only on the vacuum suction device located on the upper surface of the platform’ to hold the wafer card E, to prevent it from slipping off the platform during operation.俾 When the suction device is sucked, small, or even completely lost, B said that the round card is easy to move or rotate on the platform—from ~, from the two drops on the platform. However, after making _11 the wind and the wind of the Ming Dynasty, due to the fact that it is located on the platform Qin Yi—Shang Qi ^ Wei 4 Xiaotai Yingtao Grey I ’m vacantly attached with 4 passes ▲ 'Very I lost in ^ raised Yu, Lu Interest, mechanical effects' while I went to the soil-proof wafer to come to glorious beauty class. In particular, in the actual sale of this 4th edition .. The surface _ from the column-shaped pick ▲ Dian Cheng 1 along the transcript paper size suitable for financial ^^ i ^ iT210 x 297 Gongchu) (Please read the precautions on the back first (Fill in this page again) — ίΛ '^ -------- Order --------- Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 45422 7
五、發明說明（） 1 *政a内移動，而更有效的固定與抓住晶圓 滑軌，由平台邊緣向内 上 / _Τ诚夺晶圓卡匣滑落’更可防止操作人員 卡匣，是以不但可避冗 ._ __ κ孩中，於標..嚴，蔗j麁義-满取測晶圓卡'! 在晶圓卡匣移動迴移 - 後，低獻意更換1孤東I，所導致AMHS資料廉中資料錯 .誤之狀一沉。 本發明雖以一較佳實例闡明如上’然其並非用以限 定本發明精神與發明實體，僅止於此一實施例爾。對熟悉 此領域技藝者’在不脫離本發明之精神與範圍内所作之修 改，均應包含在下述，杈請專利範圍内。 ----.-----.---—— (請先閲讀背面之注意事項再填寫本頁) 訂---------線 1:> ./ίκ〕 經濟部智慧財產局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS〉A4規格（210 X 297公釐）V. Description of the invention (1) * It moves within the government, and more effectively fixes and grasps the wafer slide rail, and the wafer edge slides inward from the edge of the platform. Not only can avoid redundancy. _ __ κChildren, Yu Biao .. Yan, cane j meaning-full take wafer card test! 'After the wafer cassette moves back and forth-low intention replacement 1 Gudong I , The resulting AMHS data is cheap. The data sinks. Although the present invention is explained as above with a preferred example, it is not intended to limit the spirit and the inventive substance of the present invention, but only to this embodiment. Modifications made by those skilled in the art without departing from the spirit and scope of the present invention should be included in the following, which is within the scope of patents. ----.-----.------- (Please read the notes on the back before filling this page) Order --------- line 1: > ./ίκ] Ministry of Economy The paper size printed by the Intellectual Property Bureau employee consumer cooperative is applicable to Chinese national standards (CNS> A4 specification (210 X 297 mm)