TW506867B - Method for producing nano-grade powder by ultrasonically-reinforced submerged arc vacuum oscillation and device thereof - Google Patents

Method for producing nano-grade powder by ultrasonically-reinforced submerged arc vacuum oscillation and device thereof Download PDF

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TW506867B
TW506867B TW90126815A TW90126815A TW506867B TW 506867 B TW506867 B TW 506867B TW 90126815 A TW90126815 A TW 90126815A TW 90126815 A TW90126815 A TW 90126815A TW 506867 B TW506867 B TW 506867B
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Taiwan
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vacuum
arc
vacuum chamber
ultrasonic
oscillation
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TW90126815A
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Chinese (zh)
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Ho Chang
Tsing-Tshih Tsung
Hong-Ming Lin
Chung-Kwei Lin
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Ho Chang
Tsing-Tshih Tsung
Hong-Ming Lin
Chung-Kwei Lin
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Abstract

The present invention provides a method for producing a nano-grade ultra-fine powder material, a method for producing a nano-grade powder by ultrasonically-reinforced submerged arc vacuum oscillation, and a device thereof. The method is characterized in that: a metal electrode and an ultrasonic oscillator are installed in the vacuum chamber of an electric arc system, in which the vacuum chamber uses a deionized water or a discharge processing liquid as an insulative liquid, the metal material is instantly vaporized by an electric arc discharge, and an ultrasound oscillator oscillates the insulative liquid concurrent to the electric arc discharge; together with the low pressure environment in the vacuum chamber, the vaporized metal is liable to leave the substrate and depart from the high temperature region by the impact from the ultrasonic oscillatorand furthermore the insulative liquid at the low pressure environment in the vacuum chamber is liable to chill the vaporized metal so that the vaporized metal can be promptly solidified at a low temperature and inhibit the growth phenomenon of nucleation and thus a nano-grade powder can be obtained; and according to the present invention, the material's vaporization environment is within a cooling liquid such that the pressure and the temperature are easily controllable, and furthermore the variables of the ultrasonic oscillation are controlled so that the powder has a uniform and precise dimension.

Description

506,867, 五、發明說明α) 壹、創作背景 ^本幻作係提供一種潛弧真空振盪奈米粉末製造法及機 器構ie不米鳥末結構由晶粒大小在1到Ϊ 〇 〇 ηπι之粒子所 組成,由於奈米材料其晶粒大小已接近光的波長,而且具 有大表面積之特性,同時其原子結構與一般結晶或非晶質 ,亦不f同’、因而有特殊之光、€、磁等物理及化學性、 夤,目岫已成為新材料及新光電磁元件之建構基石; 於奈米材料顆粒極細小’其晶粒具有較大的表面能量 面效以及不連續的電子能階(體積效應),使得奈半曰 粒有著比傳統塊材更優異的機械及物理化 τ \曰曰 Ϊ性透硬度、低溶點及特殊光學性質(V延 f透先、反先)等,也因此引起國際間對夺来社播= 投入^之研究興趣,而成為材料界廣為應Y&H料 同,具有在結構、機械、光、電、磁等 歸納結果其主要特性為: 面之優點, 結構Γ具有與一般固體晶相或非晶質相結構不同的原子 1有ΐ二ίί相同成份之傳統晶粒或非晶質材料 具有不同的性質; 竹,但確 三、可使原本無法混合的金屬盥¥ 金。 4合物混合而成合 由於這些特性,奈米結構材料可 物理性質;其中 改變材料之機蜮及 506.867, 五、發明說明(2) 機械性質如:材料強度 腐餘行為; 物理性質如:強磁性, 因性能特殊,已發展成 應用,所以奈米材料之研發 隨著奈米級超微粉末應 長快速,奈米尺寸粉末工程 的極限推進,再加上尖端製 尤其在奈米尺寸粉末相關產 速’因此奈米級超微粉末需 奈米結構材料習知之主 電子束、雷射或電漿氣相沉 晶法、液態急冷凝固法、反 及電化學沉積法等。其中氣 代’目前之合成技術已近成 金屬超微粒之商業化產品上 料及厚膜導電或電阻粉體。 瓷超微粉體之重要技術。機 粒之製造技術為主。 至今未見將材料潛埋於 冷卻液瞬間將被汽化之材料 被粉末材料(Nanocrystall 此,本創作即發明一種真空 粉末材料以應需求。其中原 ,模數,延性’磨耗性質以及 高熱傳導性,高擴散性等。 為重要之新機能素材而I廣泛 已經普及世界並跨越領域。 用領域不斷的開發,需求量成 即不斷的往大量生產製造技術 造技術必需往快速大量發展’ 品雛型開發後,量產者成長快 求量越來越大。 要製造方法有:氣凝合成法、 積法、機械合金法、分子束遙 應濺射法、溶膠-凝膠法、以 凝合成技術可追溯至六十年 熟,而曰本真空冶金公司已有 市,主要應用於磁性記憶體材 溶膠-凝膠共沉法則為量產陶 械冶金法目前以微量合金超微 真空冷卻液中並引弧汽化,即 凝結之方法以製造出奈米級超 ine Materials, NCM )〇 為 潛弧振盪法來製造奈米級超微 理係使冷卻液瞬間將被汽化之506,867, V. Description of the invention α) I. Creative background ^ This fantasy series provides a submerged arc vacuum oscillation nano-powder manufacturing method and machine structure. The structure of the bird's powder is composed of particles with a grain size of 1 to Ϊ〇〇ηπι. The composition of the nano-materials is because the grain size of the nano-material is close to the wavelength of light and has a large surface area. At the same time, its atomic structure is not the same as that of ordinary crystalline or amorphous materials, so it has a special light. Physical and chemical properties, such as magnetism, have become the building blocks of new materials and new opto-electromagnetic components; ultrafine particles of nanomaterials have large surface energy surface effects and discontinuous electronic energy levels ( Volume effect), which makes the nano-scale particles have better mechanical and physical properties than traditional blocks. Τ \ Said hardness and hardness, low melting point, and special optical properties (V extension f first, reverse first), etc. It has aroused international research interest in capturing social media = input ^, and has become widely used in the materials industry. It has the results of induction in structure, machinery, light, electricity, and magnetism. Its main characteristics are: , Structure Γ There are atoms with a structure different from the general solid crystal phase or amorphous phase. Traditional grain or amorphous materials with the same composition have different properties. Bamboo, but it does make metal toilets that could not be mixed originally. ¥ Gold. Due to these characteristics, the four compounds are mixed, and the nano-structured materials can have physical properties; among them, the mechanism of changing materials and 506.867, V. Description of the invention (2) Mechanical properties such as material strength and residual behavior; Physical properties such as strong magnetism Due to its special properties, it has been developed into applications, so the research and development of nanometer materials with nanometer ultrafine powders should grow fast and the limits of nanometer size powder engineering are advancing, coupled with cutting-edge systems, especially in nanometer size powder related products. Therefore, nano-scale ultra-fine powder requires the main electron beam, laser or plasma vapor deposition method, liquid rapid condensation method, reverse and electrochemical deposition method that are known for nano structural materials. Among them, the current synthesis technology of gas generation 'has been nearly turned into commercial products of metal ultrafine particles and thick-film conductive or resistive powders. An important technology of porcelain ultrafine powder. The main manufacturing technology of granules. So far, no material that has been buried in the cooling liquid and will be vaporized in the instant will be powdered (Nanocrystall, this creation is to invent a vacuum powder material to meet demand. Among them, the modulus, ductility, abrasion properties and high thermal conductivity, High diffusivity, etc. For important new functional materials, I have been widely used in the world and across fields. Continuous development in the field, continuous demand, continuous production of large-scale production technology, manufacturing technology, and rapid and large-scale development are required. After that, the number of mass-producers grows faster and more and more. The manufacturing methods are: gas condensation synthesis method, product method, mechanical alloy method, molecular beam remote sputtering method, sol-gel method, and coagulation synthesis technology. It dates back to 60 years, but the vacuum vacuum metallurgy company already has a market. It is mainly used in the magnetic memory material sol-gel co-precipitation method. It is used for mass production. Arc vaporization, that is, the method of condensation, to produce nano-grade ultra-ine materials (NCM). 0 is a submerged arc oscillation method to produce nano-scale ultra-microphysics, so that the cooling liquid will be instantly Vaporization

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506867 1 « 五、發明說明(3) 材料凝結成核’再加上電極受到超音波振盈裔之振盈擾 動,使材料凝結成核後能得到更細小且均勻分佈之奈米級 微粒。將材料潛埋於真空冷卻液中引弧汽化,冷卻液瞬間 將被汽化之材料凝結之方法以製造奈米級超微粉末材料之 方法,其原理特徵示意圖,如圖一所示,進一步之技術原 理於創作概述中說明。506867 1 «V. Description of the invention (3) Material condensing and nucleation 'and the electrode is disturbed by the oscillating vibration of the ultrasonic vibration, so that the material can be condensed and nucleated to obtain finer and more uniform nanometer-sized particles. The material is buried in a vacuum cooling liquid to initiate arc vaporization. The cooling liquid will be condensed by the vaporized material in an instant to produce a nano-grade ultrafine powder material. The schematic diagram of its principles and features is shown in Figure 1. Further technology The principle is explained in the creative overview.

第7頁 506867, 五、發明說明(4) --- 貳、創作概述 本創作係發明一種奈米粉末真空潛弧振盪製造法及機 器構造;主要係以真空幫〔1〕、壓力平衡控制系統 〔2〕、控制閥一〔3〕、真空腔〔4〕、控制閥二〔5〕、 控制閥三〔6〕、低溫冷卻器〔7〕、冷卻液真空幫浦系統 〔8〕、冷卻液〔9〕、原材料〔1 〇〕、引弧器〔η〕、超 音波振盪器〔12〕及增幅器〔13〕組合而成;其中真空幫 〔1〕係將真空腔〔4〕抽成低壓之真空環境;壓力平衡控 制系統〔2〕維持真空腔〔4〕於引發電弧將材料汽化時之 壓力平穩;真空腔〔4〕中電弧將材料汽化,瞬間被冷卻 液冷卻凝結成核而成奈米級超微粉末材料;控制閥一 〔3〕係控制壓力平衡控制系統〔2〕與真空腔〔4〕之連 結;控制閥二〔5〕係控制低溫冷卻器〔7〕之出口流量與 壓力,使低溫冷卻器〔7〕中之壓力適當,且不沸騰;控 制閥三〔6〕係控制冷卻液真空幫浦系統〔8〕入口流量使 低溫冷卻器〔7〕中之壓力適當;低溫冷卻器〔7〕將潛弧 之熱排出,以維持真空腔〔4〕内之溫度恆定;冷卻液真 空幫浦系統〔8〕使冷卻液〔9〕循環與建立低溫冷卻器 〔7〕中之壓力;引弧器〔11〕引發電弧將材料汽化;超 音波振盪器〔1 2〕之作動致使電極產生振盪擾動;增幅器 〔1 3〕可增加超音波振盛器〔1 2〕之振幅;詳細之方法原 理及特徵如下:Page 7 506867, V. Description of the invention (4) --- 贰, creation overview This creation is the invention of a nano-powder vacuum submerged arc oscillation manufacturing method and machine structure; it is mainly based on the vacuum system [1], pressure balance control system [2], control valve one [3], vacuum chamber [4], control valve two [5], control valve three [6], low temperature cooler [7], coolant vacuum pump system [8], coolant [9], raw materials [10], arc starter [η], ultrasonic oscillator [12], and amplifier [13]; the vacuum helper [1] draws the vacuum chamber [4] into a low pressure The vacuum environment; the pressure balance control system [2] maintains the pressure in the vacuum chamber [4] when the arc is initiated to vaporize the material; the arc in the vacuum chamber [4] vaporizes the material, which is instantly cooled by the cooling liquid to condense to form a nucleus. Meter-level ultra-fine powder material; control valve one [3] controls the pressure balance control system [2] connected to the vacuum chamber [4]; control valve two [5] controls the outlet flow and pressure of the low temperature cooler [7] , Make the pressure in the low-temperature cooler [7] appropriate, and Does not boil; Control valve three [6] controls the coolant vacuum pump system [8] The inlet flow rate makes the pressure in the low temperature cooler [7] appropriate; the low temperature cooler [7] discharges the heat of the submerged arc to maintain the vacuum The temperature in the cavity [4] is constant; the coolant vacuum pumping system [8] circulates the coolant [9] and establishes the pressure in the low-temperature cooler [7]; the arc initiator [11] initiates an arc to vaporize the material; The operation of the sonic oscillator [1 2] causes the electrodes to oscillate; the amplifier [1 3] can increase the amplitude of the ultrasonic vibrator [1 2]; the detailed method principle and characteristics are as follows:

第8頁 /Page 8 /

經由=料〔10〕潛埋於真空腔〔4〕之冷卻液〔9〕中 、士各 11〕引發電弧將材料汽化,冷卻液瞬間將被Via the material [10] submerged in the cooling fluid [9] in the vacuum chamber [4], the arc 11 will cause the arc to vaporize the material, and the cooling fluid will be instantly

^=山料凝結成核。而超音波振蘯器〔12〕之作動致使 弧所 ^盈擾動’透過超音波振盪器之振動能量,使電 2斤產生高溫溶融區内之汽化金屬能獲得適度之擾動與衝 而偏移炫融區’使得周圍之冷卻液對汽化之金屬可獲得 乂佳之低溫冷卻效果,以抑制凝固時金屬顆粒之成長,使 2結成核之顆粒能更細小且均勻分佈,如此可得更細小之 不米結構材料粉末。此外超音波振盪器還可避免放電集 中’提南材料去除率及縮短整個製程時間。 、 奈米級超微粉末顆粒之大小係由真空腔〔4〕中冷卻 液〔9〕之壓力及溫度控制,由於本法之原材料〔丨〇〕汽 化環境係於液態之冷卻液〔9〕中,其壓力及溫度易控 制’所得粉末尺寸均勻且精確。 原材料〔1 0〕潛埋於真空腔〔4〕内之冷卻液〔9〕 中’其熱傳包含傳導對流及相變化,因此粉末成形迅速, 為大量生產之極佳方法。^ = Forest material condenses and nucleates. The operation of the ultrasonic vibrator [12] causes the arc to swell. The vibration energy of the ultrasonic oscillator enables the electricity to generate 2 kg of vaporized metal in the high-temperature melting zone to obtain moderate disturbances and shocks. The "melting zone" allows the surrounding cooling liquid to obtain a good low-temperature cooling effect on the vaporized metal to inhibit the growth of metal particles during solidification, so that the 2 nucleated particles can be more finely and uniformly distributed, so that more fine particles can be obtained. Structural material powder. In addition, the ultrasonic oscillator can also avoid the discharge-concentration's removal of material and shorten the entire process time. The size of nano-sized ultra-fine powder particles is controlled by the pressure and temperature of the cooling liquid [9] in the vacuum chamber [4]. Because the raw material [丨 〇] vaporization environment of this method is in the liquid cooling liquid [9] Its pressure and temperature are easy to control. The size of the powder obtained is uniform and accurate. The raw material [1 0] is buried in the cooling liquid [9] in the vacuum chamber [4]. Its heat transfer includes conductive convection and phase change, so the powder is quickly formed, which is an excellent method for mass production.

粉末於真空腔〔4〕内之冷卻液〔9〕中成形,即分散 於冷卻液〔9〕中,如此可節省粉末分散工程,亦簡化了 粉末輸送之複雜性。 冷卻液〔9〕之溫度受低溫冷卻器〔7〕之循環溫控, 對原材料〔1 0〕及對機器本身而言具有極佳之冷卻溫控效 果。因此原材料〔1 〇〕與機器本體皆溫控精密,即溫控設 備較傳統者不但簡單而且精密。The powder is formed in the cooling liquid [9] in the vacuum chamber [4], that is, dispersed in the cooling liquid [9]. This saves the powder dispersion process and simplifies the complexity of powder transportation. The temperature of the coolant [9] is controlled by the circulation temperature of the low-temperature cooler [7], which has an excellent cooling temperature control effect on the raw materials [10] and the machine itself. Therefore, both the raw material [10] and the machine body are temperature-controlled precisely, that is, the temperature-control equipment is not only simpler and more precise than traditional ones.

第9頁 506867 五、發明說明(6) 參、創作的詳細說明 本創作提供之新構造與製作原理,其特徵及各元件, 包括· 【圖式說明號】 圖一超音波強化潛弧真空振盪奈米粉末製造法及機器 不意圖 圖二超音波強化潛弧真空振盪奈米粉末製造所得之穿 透式電子顯微鏡(TEM)圖 【圖式說明號】 真空幫〔1〕 壓力平衡控制系統〔2〕 控制閥一〔3〕 真空腔〔4〕 控制閥二〔5〕 控制閥三〔6〕 低溫冷卻器〔7〕Page 9 506867 V. Description of the invention (6) Detailed description of reference and creation The new structure and production principle provided by this creation, its characteristics and components, including · [Illustration number] Figure 1 Ultrasonic enhanced submerged arc vacuum oscillation Nano powder manufacturing method and machine are not intended. Figure 2. Ultrasonic enhanced submerged arc vacuum oscillation. Nanometer powder produced through transmission electron microscope (TEM). [Schematic description number] Vacuum helper [1] Pressure balance control system [2] ] Control valve one [3] Vacuum chamber [4] Control valve two [5] Control valve three [6] Low temperature cooler [7]

第10頁 506867 « » 五、發明說明(7) 冷卻液真空幫浦系統〔8〕 冷卻液〔9〕 原材料〔1 0〕 引弧器〔11〕 超音波振盪器〔1 2〕 增幅器〔1 3〕 超音波強化真空潛弧法之製程及設備,其重要部份如 下·引弧器〔11〕為電弧加熱系統(E1 e c t r i c a 1Page 10 506867 «» V. Description of the invention (7) Coolant vacuum pump system [8] Coolant [9] Raw materials [1 0] Arc starter [11] Ultrasonic oscillator [1 2] Amplifier [1] 3] The process and equipment of the ultrasonic enhanced vacuum submerged arc method are as follows. The arc starter [11] is an arc heating system (E1 ectrica 1).

Discharge Arc Heating System),控制不同的電壓、電 流之加熱源,以達到控制熱源不同狀況。參數控制系統乃 利用壓力平衡控制系統〔2〕以控制壓力之精確與穩定; 利用低溫冷卻器〔7〕、冷卻液真空幫浦系統〔8〕及冷卻 液〔9〕以控制溫度精確及穩定,因壓力與溫度容易控 制,所得之粉末尺寸可均勻精確的掌控。 詳細工作原理如下:設備機器部分以真空幫〔1〕、 壓力平衡控制系統〔2〕、控制閥一〔3〕、真空腔 〔4〕、控制閥二〔5〕、控制閥三〔6〕、低溫冷卻器 〔7〕、冷卻液真空幫浦系统〔8〕、冷卻液〔9〕、原材 料/ 1〇〕二引弧器〔11〕、超音波振盪器〔12〕及增幅器 ^ 3〕fa而成’其中真空幫係將真空腔抽成低壓之直空 : = 控於引發電弧將材料汽 液冷卻凝結成核而料汽化,#間被冷卻 风不水級超微粉末材料;控制閥一係控Discharge Arc Heating System) to control heating sources of different voltages and currents to control different conditions of the heating source. The parameter control system uses the pressure balance control system [2] to control the accuracy and stability of the pressure; the low temperature cooler [7], the coolant vacuum pump system [8], and the coolant [9] to control the temperature accurately and stably, Because the pressure and temperature are easy to control, the size of the powder obtained can be controlled uniformly and accurately. The detailed working principle is as follows: vacuum and machine parts [1], pressure balance control system [2], control valve one [3], vacuum chamber [4], control valve two [5], control valve three [6], Low temperature cooler [7], coolant vacuum pumping system [8], coolant [9], raw materials / 10] two arc starters [11], ultrasonic oscillator [12] and amplifier ^ 3] fa "The vacuum system draws the vacuum chamber into a low-pressure vertical space: = Controlled by the initiation of an arc to cool and condense the material to form a nucleus and the material is vaporized. The cooling air is not super-fine powder material between the air; Department Control

506,867, 五、發明說明(8) 制壓力平衡控制系統與真空 溫冷卻器之出口流量與壓力 當,不沸騰;控制閥三係控 量使低溫冷卻器中之壓力適 出,以維持真空腔内之溫度 冷卻液循環與建立低溫冷卻 將材料汽化;超音波振盪器 振盪擾動使凝結成之核能更 米級結構材料粉末。 製造法部分主要係控制 系統為加熱源,以達到控制 以超音波振盪器之作動致使 核能更細小之製造法;超音 棒,其頻率係可調整,當頻 器、原材料棒以及夾治具等 弧之原材料棒間產生最大之 凝結成核時,因振盪擾動而 此外’再配置參數控制系統 以控制壓力之精確與穩定; 幫浦系統及冷卻液以控制溫 易控制,所得之粉末尺寸可 本製造法法,所得之初步穿 圖一所示,由圖中可顯示所 60nm 〇 腔之連結;控制閥二係控制低 ,使低溫冷卻器中之壓力適 制冷卻液真空幫浦系統入口流 當;低溫冷卻器將潛弧之熱排 悝定;冷卻液真空幫浦系統使 器中之壓力;引弧器引發電弧 及增幅器之作動致使電極產生 細小,而可得更均勻分佈之奈 不同的電壓、電流之電弧加熱 熱源溫度高低不同狀況,同時 電極產生振盪擾動使凝結成之 波振盪器之增幅器連結原材料 率調至超音波振盪器、增幅 整體之共振頻率,達到引發電 相對運動,使被汽化之原材料 得更細小之奈米粉末製造法; ’即利用壓力平衡控制系統, 利用低溫冷卻器、冷卻液真空 度精確及穩定,因壓力與溫度 均勻精確細小的製造法,目前 透式電子顯微鏡(TEM)圖,如 得之奈米微粒其顆粒大小約為 506.867, 五、發明說明(9) 粉體收集系統主要方法係將原材才斗⑴ 腔〔4〕内之冷卻液〔9〕中引電弧(Electricai Ar/、汽 化(Vaporization) ’此時冷卻液〔9〕瞬間將被汽化之 材料凝結(Condensation),即可得許多細小之金 粒,本法之優點係將金屬顆粒直接儲存在液 :微粒可直接由冷卻液〔9〕帶至收集區加以區分收因集 卒取濃縮’不會造成飛揚污染,且恩搬運儲 液〔9〕的溫度、壓力甚?盆法士日业、口加a 制才可得到細小晶•,而藉由二3 成長受到抑 叩稽田冋,皿,又化、超音波擾動能量 ί:;Π:ΓΓΐ?良好效果。電弧加熱系統之熱源 =主要疋功率大、電弧穩定性佳、控制部份穩定且技術 成熟。 本創作經已成功開發之真空潛弧奈米製程技術之基礎 下,對奈米製程技術做更進一步的後續研究成果; 屬電極與超音波振盪器組裝於電弧系統中之真办腔内,'真 ==離=為絕緣液,金屬材料因電:放電而瞬 間炼融蒸發,且在放^時透過超音波振盈器之擾動能量 使汽化之金屬受到衝擊力而容易偏離融熔高溫區,再由直 ίΠΐί卻!統而迅速的在低溫下凝固且仰制其成核後 而可得到具有奈米尺度之微小顆粒,且顆 粒大小此更均勻。本創作係於已開發出低成本之 製程技術中,把超音波振盪器及低溫循環系統父 第13頁 506867 五、發明說明(ίο) 中,如此可提升產出奈米微粒之技術能力,同時增進奈米 顆粒於溶液中之均勻分散性,已達產業之生產技術,提高 效率、降低成本之要求,應已具有進步性、經濟性及實用 性0506,867, V. Description of the invention (8) The outlet flow and pressure of the pressure balance control system and the vacuum temperature cooler are equal and do not boil; the three series of control valves control the pressure in the low temperature cooler to maintain the pressure in the vacuum chamber. The temperature of the cooling liquid circulation and the establishment of low temperature cooling will vaporize the material; the ultrasonic oscillator oscillates and perturbs the condensed nuclear energy into a powder of structural material with a meter level. The part of the manufacturing method is mainly a control system in which the heating system is used to control the operation of the ultrasonic oscillator to make the nuclear energy smaller. The ultrasonic rod has a frequency that can be adjusted, such as frequency devices, raw material rods, and fixtures. When the largest coagulation and nucleation occurs between the raw material rods of the arc, due to the oscillating disturbance, the parameter control system is further configured to control the accuracy and stability of the pressure; the pump system and the cooling liquid are controlled to control the temperature easily. The manufacturing method, the preliminary result obtained is shown in Figure 1, which can show the connection of the 60nm cavity; the second control valve is controlled low, so that the pressure in the low-temperature cooler can be adjusted to the inlet of the coolant vacuum pump system. Low temperature cooler fixes the heat of the submerged arc; the pressure in the vacuum pump system of the coolant; the arc trigger and the action of the booster cause the electrode to be small, and more uniform distribution can be obtained. Voltage and current arc heating heat source temperature is different. At the same time, the electrode generates oscillating disturbance to make the condensed wave oscillator amplifier connect the raw materials. Adjust to the ultrasonic oscillator and increase the overall resonance frequency to achieve the relative electrical movement to make the raw material being vaporized more fine. Nano-powder manufacturing method; that is, the use of a pressure balance control system, the use of a low-temperature cooler, and a coolant vacuum It is accurate and stable. Due to the uniform and precise and precise manufacturing method of pressure and temperature, the current transmission electron microscope (TEM) image shows the nanometer particles of Rude have a particle size of about 506.867. V. Description of the invention (9) Powder collection system The main method is to induce the arc (Electricai Ar /, Vaporization) in the coolant [9] in the cavity [4] of the raw material. At this time, the coolant [9] will condense the vaporized material in an instant (Condensation) Many small gold particles can be obtained. The advantage of this method is that the metal particles are stored directly in the liquid: the particles can be taken directly from the cooling liquid [9] to the collection area to distinguish them. And, what is the temperature and pressure of the storage solution [9]? The small crystals can be obtained only when the pot priest Japanese industry and the mouth plus a system, and the growth is inhibited by the second and third growth. Regeneration, ultrasonic disturbance energy ί:; Π: ΓΓΐ? Good effect. Heat source of the arc heating system = main high power, good arc stability, stable control part and mature technology. The vacuum potential of this creation has been successfully developed Based on the arc nanometer process technology, further follow-up research results are made on the nanometer process technology; the electrodes and the ultrasonic oscillator are assembled in the true cavity of the arc system, and 'true == off = is the insulating liquid, Metal materials are instantaneously melted and melted due to electricity: discharge, and when they are discharged, the vaporized metal is impacted by the perturbation energy of the ultrasonic vibrator, and it is easy to deviate from the melting high temperature area, and then it is straight and fast! After solidifying at low temperature and controlling its nucleation, tiny particles with nanometer scale can be obtained, and the particle size is more uniform. This creation is based on the development of low-cost process technology. The ultrasonic oscillator and low-temperature circulation system are described in page 13 of the 506867 V. Invention Description (ίο), so that the technical ability to produce nano particles can be improved. Promote the uniform dispersion of nano particles in the solution, have reached the industry production technology, improve the efficiency, reduce the cost requirements, and should already be progressive, economical and practical 0

第14頁 506867, 五、發明說明(π) 圖示簡單說明 本創作提供之新構造與製作原理,其特徵及各元件,包 括: 【圖式說明號】 圖一超音波強化潛弧真空振盪奈米粉末製造法及機器 不意圖 圖二超音波強化潛弧真空振盪奈米粉末製造所得之穿 透式電子顯微鏡圖 【圖式說明號】 真空幫〔1〕 壓力平衡控制系統〔2〕 控制閥一〔3〕 真空腔〔4〕 控制閥二〔5〕 控制閥三〔6〕 低溫冷卻器〔7〕Page 14 506867, V. Description of the invention (π) The diagram briefly explains the new structure and manufacturing principle provided by this creation, its characteristics and components, including: [Schematic description number] Figure 1 Ultrasonic enhanced submerged arc vacuum oscillation Rice powder manufacturing method and machine are not intended. Figure 2 Ultrasonic enhanced submerged arc vacuum oscillation nanometer powder made through the transmission electron microscope. [Schematic description number] Vacuum help [1] Pressure balance control system [2] Control valve one [3] Vacuum chamber [4] Control valve two [5] Control valve three [6] Low temperature cooler [7]

第15頁 506867 五、發明說明(12) 冷卻液真空幫浦系統〔8 冷卻液〔9〕 原材料〔1 0〕 引弧器〔11〕 超音波振盪器〔1 2〕 增幅器〔1 3〕Page 15 506867 V. Description of the invention (12) Coolant vacuum pumping system [8 Coolant [9] Raw materials [1 0] Arc starter [11] Ultrasonic oscillator [1 2] Amplifier [1 3]

第16頁Page 16

Claims (1)

50686715068671 六、申請專利範圍 ^ 種超音波強化潛弧真空振盪奈米粉末製造機器, 主要係以真空幫、壓力平衡控制系統、控制閥一、真空 腔、控制閥二、控制閥三、低溫冷卻器、冷卻液真空幫浦 系j冷卻液、原材料、引弧器、超音波振盪器及增幅器 =曰而成,其中真空幫係將真空腔抽成低壓之真空環境; 壓力平衡控制系統維持真空腔於引發電弧 =穩;真空腔中電弧將材料汽化,瞬間被冷1 2 3;丄 亚Ii亥而成奈米級超微粉末材料;控制閥一係控制壓力 i夕二〗系統與真空腔之連結;控制閥二係控制低溫冷卻 流量與壓力,使低溫冷卻器中之壓力適當,且不 閥i係控制冷卻液真空幫浦系統入口流量使低 维i直=肿之垄力適當;低溫冷卻器將潛弧之熱排出,以 溫冷卻器中之壓力;引弧器引發電弧將材料 成。作動致使電極產生《擾動使凝結 卜而可得更均勻分佈之奈米級結構材料粉 真空振盪奈米粉末製造法;主 電弧加熱糸統為加熱源,以 狀況,同時以超音波振盪器之 使凝結成之核能更細小之製造 連結原材料棒,其頻率係可調 ^、增幅器、原材料棒以及夾 達到引發電弧之原材料棒間產Sixth, the scope of patent application ^ A variety of ultrasonic enhanced submerged arc vacuum oscillation nanometer powder manufacturing machines, mainly based on vacuum help, pressure balance control system, control valve one, vacuum chamber, control valve two, control valve three, low temperature cooler, Coolant vacuum pumping system j cooling fluid, raw materials, arc starter, ultrasonic oscillator and amplifier = finished, in which the vacuum pumping system draws the vacuum chamber into a low-pressure vacuum environment; the pressure balance control system maintains the vacuum chamber at Initiated arc = stable; arc in the vacuum chamber vaporizes the material and is instantly cooled 1 2 3; 丄 Asia Ii is formed into nano-grade ultra-fine powder materials; the control valve is a series of control pressures; the system is connected to the vacuum chamber The second control valve controls the low-temperature cooling flow and pressure, so that the pressure in the low-temperature cooler is appropriate, and the non-valve i system controls the inlet flow of the coolant vacuum pumping system so that the low-dimensional i = straight swelling force is appropriate; the low-temperature cooler Dissipate the heat of the submerged arc to the pressure in the cooler; the arc initiator initiates the arc to form the material. The action causes the electrode to produce a "turbulent nano-level structural material powder that causes coagulation to obtain a more uniform distribution. Vacuum oscillation of the nanometer powder manufacturing method; the main arc heating system is the heating source. The condensed nuclear energy can be produced more finely by connecting raw material rods, the frequency of which can be adjusted. 1 · 一種超音波強化潛弧 要係控制不同的電壓、電流 達到控制熱源溫度高低不同 作動致使電極產生振盪擾動 法;超音波振盪器之增幅器 2 整’當頻率調至超音波振盪 3 治具等整體之共振頻率,而 六、申請專利範® 生最大之相對運動,使 盪擾動而得更細小之夺米二匕之原材料凝結成核時,因振 即利用屢力平衡控制系 制2置參數控制系 制溫度籍砬ai m冷部液真空幫浦系統及冷卻液以押 寸可均句精確細小的製造法:/皿度易控制’所得之粉末尺 太半U申請範圍第1項所述之超音波強化潛弧真空振盪 4末製造機器,其中超音波振盪器與引弧器相連接而 置於真空腔内或真空腔内之構造者。 4·如申請範圍第1項所述之超音波強化潛弧真空振盪 奈米粉末製造機器,其中將原材料潛埋於真空腔中,且冷 卻液可籍由低溫冷卻器之外循環或内循環之構造者。 5 ·如申請範園第1項所述之超音波強化潛弧真空振盪 奈米粉束製造機器,其中疋負電極以線狀製成而達小電流 低電壓弓丨弧之構造者。 6·如申請範園第2項所述之超音波強化潛弧真空振盪 奈米粉束製=法;其中超音波振盪器之增幅器振盪方向可 為垂直或水平之構造者。 第18頁1 · An ultrasonic enhanced submerged arc should be controlled by different voltages and currents to control the temperature of the heat source. Different actions cause the electrodes to oscillate and perturbate; the amplifier of the ultrasonic oscillator 2 is adjusted when the frequency is adjusted to ultrasonic oscillation 3 Equal the overall resonance frequency, and the sixth, patent-pending fan® produces the largest relative motion, making the raw materials of the two rice daggers condensed and nucleated into smaller nucleus. Due to the vibration, the repeated force balance control system is used. The parameter control system is the temperature and temperature of the pump and the vacuum pump system of the cold liquid and the cooling liquid can be uniformly and precisely manufactured. The method is: / The degree of powder obtained is easy to control. The ultrasonic enhanced submerged arc vacuum oscillation 4 manufacturing machine described above, in which the ultrasonic oscillator is connected to the arc initiator and placed in a vacuum chamber or a structure in a vacuum chamber. 4. The ultrasonic enhanced submerged arc vacuum oscillating nano powder manufacturing machine as described in item 1 of the application scope, wherein the raw materials are buried in a vacuum chamber, and the cooling liquid can be circulated outside or inside the cryocooler. Constructor. 5 · The ultrasonic enhanced submerged arc vacuum oscillation nanometer powder manufacturing machine as described in the application No. 1 of the Fan Garden, in which the 疋 negative electrode is made in a linear shape to achieve a small current and low voltage bow. 6. Ultrasonic enhanced submerged arc vacuum oscillation as described in the application No. 2 of the Fan Garden. Nano-powder beam system = method; where the direction of oscillation of the amplifier of the ultrasonic oscillator can be vertical or horizontal. Page 18
TW90126815A 2001-10-29 2001-10-29 Method for producing nano-grade powder by ultrasonically-reinforced submerged arc vacuum oscillation and device thereof TW506867B (en)

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Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7501095B2 (en) 2003-07-04 2009-03-10 National Taipei University Of Technology Apparatus for on-line sampling of metal nanoparticle fluid and technique of the same
CN102335749A (en) * 2011-07-12 2012-02-01 四川大学 Device for preparing metal micro-nano hollow sphere powder
CN113893773A (en) * 2021-10-11 2022-01-07 天津包钢稀土研究院有限责任公司 Method for granulating high-purity anhydrous rare earth halide

Cited By (4)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US7501095B2 (en) 2003-07-04 2009-03-10 National Taipei University Of Technology Apparatus for on-line sampling of metal nanoparticle fluid and technique of the same
CN102335749A (en) * 2011-07-12 2012-02-01 四川大学 Device for preparing metal micro-nano hollow sphere powder
CN113893773A (en) * 2021-10-11 2022-01-07 天津包钢稀土研究院有限责任公司 Method for granulating high-purity anhydrous rare earth halide
CN113893773B (en) * 2021-10-11 2023-07-25 天津包钢稀土研究院有限责任公司 Method for granulating high-purity anhydrous rare earth halide

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