TW501069B - Method of operating capacitive thin film transistor arrays - Google Patents

Method of operating capacitive thin film transistor arrays Download PDF

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Publication number
TW501069B
TW501069B TW089115927A TW89115927A TW501069B TW 501069 B TW501069 B TW 501069B TW 089115927 A TW089115927 A TW 089115927A TW 89115927 A TW89115927 A TW 89115927A TW 501069 B TW501069 B TW 501069B
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Taiwan
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array
charge
capacitor
tft
capacitors
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TW089115927A
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Chinese (zh)
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Michael Gillis Kane
Hongjin Kim
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Thomson Licensing Sa
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    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/1333Constructional arrangements; Manufacturing methods
    • G02F1/1343Electrodes
    • G02F1/134309Electrodes characterised by their geometrical arrangement
    • G02F1/134336Matrix
    • GPHYSICS
    • G02OPTICS
    • G02FOPTICAL DEVICES OR ARRANGEMENTS FOR THE CONTROL OF LIGHT BY MODIFICATION OF THE OPTICAL PROPERTIES OF THE MEDIA OF THE ELEMENTS INVOLVED THEREIN; NON-LINEAR OPTICS; FREQUENCY-CHANGING OF LIGHT; OPTICAL LOGIC ELEMENTS; OPTICAL ANALOGUE/DIGITAL CONVERTERS
    • G02F1/00Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics
    • G02F1/01Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour 
    • G02F1/13Devices or arrangements for the control of the intensity, colour, phase, polarisation or direction of light arriving from an independent light source, e.g. switching, gating or modulating; Non-linear optics for the control of the intensity, phase, polarisation or colour  based on liquid crystals, e.g. single liquid crystal display cells
    • G02F1/133Constructional arrangements; Operation of liquid crystal cells; Circuit arrangements
    • G02F1/136Liquid crystal cells structurally associated with a semi-conducting layer or substrate, e.g. cells forming part of an integrated circuit
    • G02F1/1362Active matrix addressed cells
    • G02F1/1368Active matrix addressed cells in which the switching element is a three-electrode device
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/0416Control or interface arrangements specially adapted for digitisers
    • G06F3/04166Details of scanning methods, e.g. sampling time, grouping of sub areas or time sharing with display driving
    • GPHYSICS
    • G06COMPUTING; CALCULATING OR COUNTING
    • G06FELECTRIC DIGITAL DATA PROCESSING
    • G06F3/00Input arrangements for transferring data to be processed into a form capable of being handled by the computer; Output arrangements for transferring data from processing unit to output unit, e.g. interface arrangements
    • G06F3/01Input arrangements or combined input and output arrangements for interaction between user and computer
    • G06F3/03Arrangements for converting the position or the displacement of a member into a coded form
    • G06F3/041Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means
    • G06F3/044Digitisers, e.g. for touch screens or touch pads, characterised by the transducing means by capacitive means
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01LSEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
    • H01L29/00Semiconductor devices specially adapted for rectifying, amplifying, oscillating or switching and having potential barriers; Capacitors or resistors having potential barriers, e.g. a PN-junction depletion layer or carrier concentration layer; Details of semiconductor bodies or of electrodes thereof ; Multistep manufacturing processes therefor
    • H01L29/40Electrodes ; Multistep manufacturing processes therefor
    • H01L29/43Electrodes ; Multistep manufacturing processes therefor characterised by the materials of which they are formed
    • H01L29/49Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET
    • H01L29/4908Metal-insulator-semiconductor electrodes, e.g. gates of MOSFET for thin film semiconductor, e.g. gate of TFT

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  • Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • General Physics & Mathematics (AREA)
  • General Engineering & Computer Science (AREA)
  • Theoretical Computer Science (AREA)
  • Nonlinear Science (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Chemical & Material Sciences (AREA)
  • Mathematical Physics (AREA)
  • Crystallography & Structural Chemistry (AREA)
  • Optics & Photonics (AREA)
  • Human Computer Interaction (AREA)
  • Power Engineering (AREA)
  • Geometry (AREA)
  • Ceramic Engineering (AREA)
  • Condensed Matter Physics & Semiconductors (AREA)
  • Computer Hardware Design (AREA)
  • Image Input (AREA)
  • Measurement Of Length, Angles, Or The Like Using Electric Or Magnetic Means (AREA)

Abstract

A method of scanning a matrix of capacitors, with an associated matrix of TFT devices which are connected to respective capacitors, includes scanning the matrix of capacitors to sequentially precharge respective capacitors to a precharge voltage, and then scanning the matrix of capacitors to sequentially detect the capacitor charges and thereby to determine respective capacitor values. The TFT's operate as switches to connect respective capacitors to column electrodes which alternately operate as sources of precharge potential and sense electrodes. The precharge voltage is selected to have the same polarity as the turn-off transitions of the scanning pulses applied to the TFT's. Selecting the precharge voltage to have the same polarity as the TFT turn-off transitions tends to enhance the effective dynamic range of the detected charges.

Description

A7 B7 五、發明説明( feg領域 本發明關於操作TFT陣列及更特別地係操作TFT,S用以掃 描電容性矩陣陣列。 曼Jg背景 已知使用薄膜電晶體(TFT)用以說明陣列元件。例如,一 種用以執行指印檢測的方法係安排一陣列電極以作動如一 版各別的電容。請參閱圖2之範例。一指之凸凹處被帶接近 該陣列作動如第二版各別電容。該陣列電容值可被轉換為該 只攜至鄰近該陣列的指印之電子圖像。 琢電子圖可由xy掃描形成及以習知順序檢測電容值。該電 容值係間接由一測量電容上電荷之程序來決定。該陣列被順 序地掃描兩次。在第一次掃描,每一電容由一TFT表示及預 充電至一習知電壓Vp。該各別電容上電荷是A、,其中q 是各別陣列電容器之電容。在第二掃描,各別陣列 0電容被放 電。即是,該電荷被移走及集成以提供一輸出電壓值。該檢 測的電壓值則直接相關電容值。 現在考量形成TFT,S在基片上而㈣之程序,如形成一掃 描電容陣列。該程序並未如—平常積體電路程序般精簡。該 複雜性可能造成非期望之特性於製造電路◊例如,若一TFT 係經由沈積閘極電極首先在下面基片’及接著形成TFT本體 於閘極電極上’該所得之電晶體一般而言將具有非期望之較 疊電容。其次,該所得之設備-將具有非期望之較大間限電壓及必然需要較大激磁 -4- 煩請#員明云 年 月 日所提之 修正本准無^曼實5?^客是^^予修正。 5麵1·ί·2Ϊ Α7 Β7 五、發明説明(2 ) 考慮該等特徵如何影響電容陣列指印檢測器之作動。該 電容陣列指.印檢測器的動態範圍被給予可被檢測之最大至 最小電容值比率,或更適切地是經由可被檢測之最大和最小 對應電荷。假設最大電容係關聯一電極鄰近一凸起及對應 Qmax之電荷及最小電容對應Qmin之一電荷。該期望之動態 範圍為Qmax/Qmin。最小電容值在此陣列是關於一非鄰近該 指之任何埠的電極。其值被期望僅由雜散電容來決定,及假 設係非常小及為怪定值。 為經濟理由,該陣列之TFT’s可以非晶型技術形成《該等 電晶體之作動特徵希望比較大掃描脈衝被供給至該等電晶 體的閘極。大閘極脈衝電壓將被耦合,至少部份,至各別源 極和汲極。因此當一特別TFT被閘極關某些電荷將被耦合關 該關聯陣列電容。在下一掃描,當TFT被閘極開啟以感測, 假定一等量電荷將被耦合回該陣列電容。發明者將發現此假 設是不正確的因此引發本發明之動機。 發現簡要說明 陣列電容,及較大電容值,將具有比TFT的閘汲或閘源重 疊電容較多電容。因此,閘極關閉的耦合所有電荷將不顯著 地改變電極(電容)電壓。因此該電晶體,如預期,將在關閉 閘極電位被供給時關閉。A7 B7 V. Description of the invention (feg field) The present invention relates to an operating TFT array and more particularly an operating TFT, S is used to scan a capacitive matrix array. MAN Jg Background It is known to use a thin film transistor (TFT) to describe an array element. For example, one method for performing fingerprint detection is to arrange an array of electrodes to act as individual capacitors of one version. See the example in FIG. 2. The convex and concave portions of one finger are brought close to the array to act as individual capacitors of the second version. The capacitance value of the array can be converted into an electronic image of fingerprints carried only to the vicinity of the array. The electron pattern can be formed by xy scanning and the capacitance value can be detected in a conventional order. The capacitance value is indirectly determined by measuring the charge on the capacitance. The array is scanned twice in sequence. In the first scan, each capacitor is represented by a TFT and precharged to a conventional voltage Vp. The charge on the respective capacitor is A, where q is each The capacitance of each array capacitor. In the second scan, the capacitance of each array 0 is discharged. That is, the charge is removed and integrated to provide an output voltage value. The detected voltage value is directly related Capacitance. Now consider the procedure of forming TFT and S on the substrate, such as forming a scanning capacitor array. This procedure is not as streamlined as the usual integrated circuit procedure. This complexity may cause undesired characteristics in manufacturing circuits ◊ For example, if a TFT is first deposited on the lower substrate via a sunk gate electrode and then a TFT body is formed on the gate electrode, the resulting transistor will generally have an undesired stacked capacitance. Second, the resulting transistor The equipment-will have a larger expected uninterrupted voltage and will inevitably require a larger excitation -4- I would like to ask #Mingyun Yun on the date of the amendments ^ Manshi 5? ^ Customers are ^^ to be amended. 5面 1 · ί · 2Ϊ Α7 Β7 V. Description of the invention (2) Consider how these characteristics affect the operation of the capacitive array fingerprint detector. The dynamic range of the capacitive array fingerprint is given the maximum to minimum capacitance that can be detected. The value ratio, or more appropriately, the maximum and minimum corresponding charges that can be detected. Assume that the maximum capacitance is associated with an electrode adjacent to a bump and the charge corresponding to Qmax and the minimum capacitance corresponds to a charge of Qmin. This period The dynamic range is Qmax / Qmin. The minimum capacitance value in this array is about an electrode that is not adjacent to any port of the finger. Its value is expected to be determined only by stray capacitance, and is assumed to be very small and odd. For economic reasons, the TFT's of the array can be formed using amorphous technology. The operating characteristics of these transistors are expected to be relatively large scanning pulses are supplied to the gates of these transistors. The large gate pulse voltage will be coupled, at least in part To the respective source and drain. Therefore, when a particular TFT is turned off by the gate, some charges will be coupled off the associated array capacitor. In the next scan, when the TFT is turned on by the gate to sense, assuming an equal amount of charge Will be coupled back to the array capacitor. The inventors will find that this assumption is incorrect and thus trigger the motivation of the present invention. It is found that a brief description of the array capacitor, and the larger capacitance value, will have a larger value than the gate-sink or gate-source overlapping capacitance of the TFT Multiple capacitors. Therefore, coupling all the charges with the gate closed will not significantly change the electrode (capacitance) voltage. Therefore the transistor, as expected, will turn off when the gate potential is supplied.

陣列電容,具較小電容值,可能反之,具有電容值於相 同程度大小或比TFT的閘汲或閘源重疊電容值略小。因此, 其可能有顯著關閉閘極電壓耦合至陣列電容電極。該閘極至 電容電壓可超過TFT的開啟值(如閥限),因此預先排除TFT -5· 本紙張尺度適用中國國家標準(CNS) A4規格(210X 297公釐)Array capacitors have a small capacitance value. On the contrary, they may have the same capacitance value or slightly smaller than the TFT gate-drain or gate-source overlapping capacitance. Therefore, it may have significant off-gate voltage coupling to the array capacitor electrodes. The gate-to-capacitance voltage can exceed the TFT's turn-on value (such as the threshold), so TFT -5 is excluded in advance. This paper size applies to China National Standard (CNS) A4 (210X 297 mm)

煩請娄員明示 年 月 日所提之 •正t有無變更實質内容是否准予修正。 可變振幅脈衝產生器 可變DC源 TFT閘極和汲極電極間之電容 TFT閘極和源極電極間之電容 運算放大器 開關 時間 A7 B7 五、發明説明(3 ) 從立即關閉及絕緣電容電極。該電容將最後充電至關閉TFT 之點。此充.電之結果,附加電荷,A Q,非相關電容關於指 印,將發生在該電容。此具以減少掃描系統動態範圍之效應 。Qmax/Qmin之期望系統動態範圍實質為Qmax/ (Qmin+AQ) ο 本發明者瞭解到電容充電發生在關閉之後電荷暫態可被 使用以加強明顯得動態範圍。在先前動態範圍比率,若電荷 Qmin及AQ是相對極性,該電荷將刪除某些Qmin電荷及該 分母將傾向於零有效地增加明顯動態範圍。本發明將經由下 列圖式明顯地澄清。 圖式之簡單說明 圖1是先前掃描電容陣列之一部份示意圖; 圖2是圖1所示更詳細之一邏輯格的一示意圖; 圖3是在TFT閘極脈衝關閉暫態之前和之後的電壓轉接一 陣列電容之一波形; 圖4是本發明所具體化之TFT掃描陣列之一示意圖。 元件符號說明 40 42 Cgd CgsMembers are kindly requested to indicate clearly the date mentioned on year, month, and day. • Are there any changes to the substance that are allowed to be amended? Variable Amplitude Pulse Generator Variable DC Source Capacitor Between TFT Gate and Drain Electrode Capacitance Operational Amplifier Switching Time between TFT Gate and Source Electrode A7 B7 V. Description of the Invention (3) Immediately close and insulate the capacitor electrode . This capacitor will eventually charge to the point where the TFT is turned off. As a result of this charging and charging, the additional charge, A Q, and unrelated capacitance related to fingerprints will occur in this capacitance. This has the effect of reducing the dynamic range of the scanning system. The expected system dynamic range of Qmax / Qmin is essentially Qmax / (Qmin + AQ) ο The inventors have learned that capacitor charging can be used after the charge transients can be used to enhance the apparent dynamic range. In the previous dynamic range ratio, if the charges Qmin and AQ are relatively polar, the charge will delete some Qmin charges and the denominator will tend to zero effectively increase the apparent dynamic range. The invention will be clearly clarified via the following scheme. Brief Description of the Drawings Figure 1 is a schematic diagram of a part of a previously scanned capacitor array; Figure 2 is a schematic diagram of a more detailed logic grid shown in Figure 1; Figure 3 is before and after the TFT gate pulse turn-off transient A waveform of one of the capacitors of the voltage switching array. FIG. 4 is a schematic diagram of a TFT scanning array embodied by the present invention. Component symbol description 40 42 Cgd Cgs

Op-Amp SI 、 S2 、 S3 ΤΙ、T2 -6- 本紙張尺度適用中國國家標準(CNS) A4規格(210X297公釐)Op-Amp SI, S2, S3 Ti, T2 -6- This paper size applies to China National Standard (CNS) A4 specifications (210X297 mm)

A7 B7 五、發明説明( 4 TI3 9ί ί·29 煩請娄員明示 年·/]·Β所提之 修正本有無變更實質内容是否准予修正。A7 B7 V. Explanation of the invention (4 TI3 9ί ί 29) I would like to ask members of Lou to indicate clearly whether the amendments mentioned in the amendments are permitted to be amended.

Til 、 TI2 TFT 發明詳細說明 二本發明將以一電容陣列指印撿測器之環境予以描述,·無 啷如何’其將發現到更廣泛之使I典型地本發明在所有掃 私陣列將疋有用的其中比較大掃描脈充被使用及掃描τρτ 被耦合至包含部份電容之高阻抗元件。 參考圖1,一掃描電容陣列之一部份被說明。在此該電容 陣列包括僅一板每一各別電容器。該陣列被組態為xy掃描, 及元件掃描,或定址,係*TFT,S連接至每一電容板來執行 。在一列之所有TFT,s的閘極或控制電極則被耦合至一共同 列閘極驅動電極,及一行内所有TFT,s的汲極電極被連接至 一共同行匯流排。接近該電路(未示)之列和行週邊將順序地 選通及定址各別列和行匯流排。典型地,在此型式陣列,一 脈衝將被供給為閘極驅動至一列匯流排以將所有TFT,s啟動 為一列開啟’及接著該行匯流排將經由訊號檢測電路順序掃 描。 圖2詳細地展示陣列的一邏輯格。在圖2,該關於TFT的既 有及寄生電容性元件被包括。其存在有一電容,Cgd,在TFT 閘極和汲極電極間,及一電容,Cgs,在閘極和源極電極間 。一般該等電容之電容值在技術可行上儘可能做的小。在普 通積體電路製造,該等電容之值由於自行排列閘極技術而變 得非常小。很不幸的,自行排列閘極製造技術無法用於特定 型式TFT’s製造及該結果Cgs和Cgd電容值可能比較大。 週期 薄膜電晶體 本紙張尺度適用中國國家標準(CNS) A4規格(21〇x297公釐) 裝 訂 線 五、發明説明(5 ) 該檢測器電容如示具有一實線畫之陣列板及一虛線畫之 第二板。第二板則假設經由一人手指或其間埠連接至地電位 。對一並非相當鄰近一指之一埠的一檢測器電容器,其電容 值被假設為零值。 一特定量寄生電容將關於該檢測器電容器的該板如由電 容器STRAY所示。該檢測器電容的最小值將因此等於寄生 或雜散電容之水平結合及該該閘極-源極電容Cgs,如該指電 容為非顯著。 COLL 2 假設一具有一感測器節距50微米乘50微米之陣列(約為 35x35 um電容板)最大指電容計算為40 fF,及整個寄生電容 約為6.8 fF。對一具有一 4 um通遒寬之開關電晶體,該閘-源極電容為2 fF。其將瞭解到對該等電容值而言,在無指電 容值時,約只有三分之一脈衝電壓供給至選定電晶體的閘極 將經由電容Cgs耦合至一陣列指電容板。考量,例如,供給 15伏特的閘極脈衝至一選定電晶體及預充電該陣列指板至3 伏特。當選定電晶體被關閉,約負5伏特被耦合至該指板結 果是一負2伏特的預充電。一般該耦合將僅有些許結果因為 失去的預充電電壓將被儲存於選定電晶體為正脈衝以讀取 電容電荷值時。無論如何,若負耦合是一大小以使得結果選 定之電晶體閘極至源極電壓大於電晶體的閥限或啟動電壓 ,接著該電晶體不會關閉。該結果則是陣列指板的部份持續 充電或放電其將給予檢測之電容值。若行電位保持在正3伏 特的預充電電位,接著該指板電容將充電於正方向直至選定 電晶體的閘源極電位等於或小於其閥限電壓。此充電效應的 -8- 本纸張尺度適用中國國家標準(CNS) Α4規格(210X297公釐) 煩請委員明示 日所提之 修正本有無變更實質内容是否准予修正ο A7 B7 五、發明説明(6 ) 一範例將如圖3所示(電壓未劃入格線)。 在圖3,在.週期ΤΙ 1,該選定電晶體被脈衝及該陣列指板電 容被預充電至3伏特。在時間T1,該選定電晶體被閘極脈衝 從15至0伏特的負向暫態關閉。暫態之結果是一4.5伏特負電 壓被耦合至該陣列板。該陣列板的端子電壓將始3伏特減4.5 伏特或負1.5伏特。因為電晶體閘極電壓現為零伏特,其有 一正1·5伏特閘-源極電壓。假設一伏特的電晶體閥限值,在 週期Τ12,該電晶體將保持向前傳導。該陣列板電容將正充 電直至電容電壓到達負1伏特在此點電晶體將停止傳導。 在時間Τ2,一正脈衝被供給至選定電晶體的閘極以讀取 陣列電容之電荷。該啟動脈衝之正暫態將耦合一 4.5伏特正 電壓至陣列電容,提升其電位為·1伏特加4.5伏特或正3.5伏 特。此係大於預充電值〇·5伏特,或0.5伏特誤差。此轉換為 一期望的0.5xCstray檢測電荷誤失,其傾向導至最小電容值 以出現大於其應為,及由是減少系統的動態範圍。 當選定電晶體至適切關閉於閘極脈衝被移走時,該陣列 電容上最小電荷等於VpCstray,其中Vp是預充電電荷。耦合 閘極脈衝的負暫態至陣列電容,最小電荷實際為(VP+AV) Cstiray,其中AV是在週期Τ12由電容超充電所引起的誤差電 壓。 該系統的動態範圍則是Qmax/Qmin比率,其對應VpCmax/ (Vp+AV)Cstray = Cmax/(l+AV/Vp)Cstray。本發明者瞭解若 △ V/Vp為負,該分母將變成較小及有效動態範圍將被加強。 此可以經由預充電該陣列電容器至一負而非正預充電電壓 -9 _ 本紙張尺度適用中國國家標準(CNS) A4規格(210 X 297公釐)Til, TI2 TFT invention detailed description 2. The invention will be described in the context of a capacitive array fingerprint reader. No matter how, it will be found to make it wider. I typically the invention will be useful in all anti-smuggling arrays. Among them, a relatively large scanning pulse charger is used and the scanning τρτ is coupled to a high-impedance element including a partial capacitance. Referring to FIG. 1, a portion of a scanning capacitor array is illustrated. Here the capacitor array includes only one plate for each individual capacitor. The array is configured for xy scanning, and element scanning, or addressing, and is connected to each capacitor plate to perform * TFT. The gates or control electrodes of all TFTs in a row are coupled to a common gate drive electrode, and the drain electrodes of all TFTs in a row are connected to a common bus. The columns and rows around the circuit (not shown) will be sequentially gated and addressed for each column and row bus. Typically, in this type of array, a pulse will be supplied as a gate drive to a row of buses to turn on all TFTs, s to turn on in a row 'and then the row of buses will be scanned sequentially via the signal detection circuit. Figure 2 shows a logical grid of the array in detail. In FIG. 2, the existing and parasitic capacitive elements regarding the TFT are included. There is a capacitor, Cgd, between the TFT gate and the drain electrode, and a capacitor, Cgs, between the gate and the source electrode. Generally, the capacitance of these capacitors is as small as possible in terms of technical feasibility. In ordinary integrated circuit manufacturing, the value of these capacitors is very small due to the self-aligned gate technology. Unfortunately, the self-aligned gate fabrication technology cannot be used for the manufacture of a specific type of TFT's and the resulting Cgs and Cgd capacitance values may be relatively large. Periodic thin film transistor This paper size is in accordance with Chinese National Standard (CNS) A4 specification (21 × 297 mm) Binder line 5. Description of the invention (5) The detector capacitor is shown as an array board with a solid line drawing and a dotted line drawing The second board. The second board is assumed to be connected to ground via a human finger or its port. For a detector capacitor that is not quite close to a finger-to-pin port, its capacitance is assumed to be zero. A specific amount of parasitic capacitance will refer to the board of the detector capacitor as shown by the capacitor STRAY. The minimum value of the detector capacitance will therefore be equal to the level combination of parasitic or stray capacitance and the gate-source capacitance Cgs, if the finger capacitance is non-significant. COLL 2 assumes an array with a sensor pitch of 50 microns by 50 microns (approximately a 35x35 um capacitor plate) with a maximum finger capacitance of 40 fF, and an overall parasitic capacitance of approximately 6.8 fF. For a switching transistor with a 4 um width, the gate-source capacitance is 2 fF. It will learn that for these capacitance values, when there is no finger capacitance value, only about one-third of the pulse voltage is supplied to the gate of the selected transistor and will be coupled to an array finger capacitor plate via the capacitor Cgs. Consider, for example, supplying a 15 volt gate pulse to a selected transistor and pre-charging the array finger to 3 volts. When the selected transistor is turned off, approximately negative 5 volts are coupled to the fingerboard. The result is a negative 2 volt precharge. Generally this coupling will have only a small effect because the lost precharge voltage will be stored when the selected transistor is a positive pulse to read the capacitance charge value. In any case, if the negative coupling is of a magnitude such that the resulting gate-to-source voltage of the transistor is greater than the threshold or start-up voltage of the transistor, then the transistor will not turn off. The result is that the part of the array finger that is continuously charged or discharged will give the capacitance value that it will detect. If the row potential is maintained at a positive precharge potential of 3 volts, then the fingerboard capacitor will be charged in the positive direction until the gate source potential of the selected transistor is equal to or less than its threshold voltage. The charging effect of -8- This paper size applies to Chinese National Standard (CNS) A4 specifications (210X297 mm) Members are kindly requested to indicate whether there are any changes to the amendments proposed on the day. Whether the substance is allowed to be amended A7 B7 V. Description of the invention (6 An example will be shown in Figure 3 (the voltage is not drawn into the grid). In Fig. 3, at period T1, the selected transistor is pulsed and the array finger capacitance is precharged to 3 volts. At time T1, the selected transistor is temporarily turned off by the negative pulse of the gate pulse from 15 to 0 volts. As a result of the transient, a 4.5 volt negative voltage is coupled to the array board. The terminal voltage of the array board will be reduced from 3 volts to 4.5 volts or minus 1.5 volts. Because the transistor gate voltage is now zero volts, it has a positive 1.5-volt gate-source voltage. Assuming a one-volt transistor threshold, the transistor will keep conducting forward during period T12. The array board capacitor will charge positively until the capacitor voltage reaches negative 1 volt at which point the transistor will stop conducting. At time T2, a positive pulse is supplied to the gate of the selected transistor to read the charge of the array capacitor. The positive transient of the start pulse will couple a positive 4.5 volt voltage to the array capacitor, raising its potential to · 1 volt plus 4.5 volts or positive 3.5 volts. This is greater than the precharge value of 0.5 volts, or 0.5 volt error. This conversion translates into a desired 0.5xCstray detection charge miss, which tends to lead to a minimum capacitance value to appear larger than it should, and reduces the dynamic range of the system. When the selected transistor is properly closed when the gate pulse is removed, the minimum charge on the array capacitor is equal to VpCstray, where Vp is the precharge charge. Coupling the negative transient of the gate pulse to the array capacitor, the minimum charge is actually (VP + AV) Cstiray, where AV is the error voltage caused by the capacitor overcharge in period T12. The dynamic range of the system is the Qmax / Qmin ratio, which corresponds to VpCmax / (Vp + AV) Cstray = Cmax / (l + AV / Vp) Cstray. The inventors understand that if ΔV / Vp is negative, the denominator will become smaller and the effective dynamic range will be enhanced. This can be done by pre-charging the array capacitor to a negative rather than a positive pre-charging voltage -9 _ This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)

V: Γ ^ 項請委員明示,.午:e Q所提之 修IL本有無變更實質C容是否准予修正。 來完成,及合it改變閘極脈衝的電壓位準。例如,改變預充 電電恩為負3伏特需要開極脈衝電壓位準由負6伏特改變至 正9伏特由系統驅動參數保持相等。該關閉暫態仍然耦合負 4·5伏特在陣列$谷上’及該結果閘源極電壓將是正Μ伏特 ’排除電晶體關閉。該電容將充電i(K5伏特直至電晶體關 閉。該有效動態範圍是Cmax/(1_AV/Vp)Cs。 (l-AV/Vp)之值是寄生參數及所施值的函數。該寄生參數 不能精確地評估因為無法預測之製程序。為了調節該等參數 變數,該等電壓值之一可能被調整以產生期望i(1_AV/Vp) 值。孩預充電值vp*—可以被調整以控制(1_Δν/νρ)值的參 數。然而,訊號對噪音比考量可能決定該量由此該參數被減 少。訊號大小則直接比例於VP,因為Qmax等於VpCmax。 Cmax是數十fF ’因此vp應是足可以獲致好的訊號對噪音比 例。 其他調整變化則是閘極脈衝大小。此值可被調整以導致 較多或較少Δν被耦合至陣列電容板上。此電壓唯一之限制 是崩饋限制。第三,為了確保適切耦合於陣列電容板上,該 閘源極重疊電容可以在製造時傾向增加。 圖4展示一 TFT掃描電容陣列的一埠包括一感測放大器耦 合至該行匯流排。較佳地每行將被輕合至一分離感測放大器 ,但行可能多乘為一較小數量感測放大器。 在圖4,該行匯流排被選定耦合至一可變電壓源,預先充 電,經由開關S1,及選定耦合至一電荷感測放大器。該電 荷感測放大器是一運算放大器或Op-Amp與一回授電容 -10- ^紙張尺度適用中國國家標準(CNS) A4規格(210X297公釐) " _V: Γ ^ Please ask members to indicate clearly. Afternoon: whether the revision of the IL mentioned in e Q has been changed in substance and whether the content is allowed to be amended. To complete, and then change the voltage level of the gate pulse. For example, changing the pre-charge voltage to minus 3 volts requires the open-pole pulse voltage level to be changed from minus 6 volts to plus 9 volts by the system drive parameters to remain equal. The turn-off transient is still coupled with negative 4.5 volts on the array $ valley 'and the result is that the gate-source voltage will be positive volts, excluding the transistor turning off. The capacitor will charge i (K5 volts until the transistor is turned off. The effective dynamic range is Cmax / (1_AV / Vp) Cs. The value of (l-AV / Vp) is a function of the parasitic parameter and the value applied. The parasitic parameter cannot be Accurate evaluation because of unpredictable manufacturing procedures. In order to adjust these parameter variables, one of these voltage values may be adjusted to produce the desired i (1_AV / Vp) value. The pre-charge value vp * —can be adjusted to control ( 1_Δν / νρ) value. However, the signal-to-noise ratio may determine the amount and this parameter is reduced. The signal size is directly proportional to VP, because Qmax is equal to VpCmax. Cmax is tens of fF ', so vp should be sufficient You can get a good signal-to-noise ratio. The other adjustment change is the gate pulse size. This value can be adjusted to cause more or less Δν to be coupled to the array capacitor plate. The only limitation of this voltage is the collapse-feedback limit. Third, in order to ensure proper coupling to the array capacitor board, the gate-source overlapping capacitor may tend to increase during manufacturing. Figure 4 shows a port of a TFT scan capacitor array including a sense amplifier coupled to the row of buses. Each row will be lightly coupled to a separate sense amplifier, but the row may be multiplied by a smaller number of sense amplifiers. In Figure 4, the row bus is selected to be coupled to a variable voltage source and precharged. Via the switch S1, and selected to be coupled to a charge-sensing amplifier. The charge-sensing amplifier is an operational amplifier or Op-Amp and a feedback capacitor-10- ^ Paper size applies to China National Standard (CNS) A4 specification (210X297) )) &Quot; _

修產 i聲爲轉 A7 B7 五、發明説明( 8Revise i sound to A7 B7 V. Description of invention (8

Cintegrate相連一開關S3跨接於該回授電容之間且重設電容於 感測既足俾列電容上電荷之前。該Op-Amp是一高增益設 備,以使得當作動在習知電荷集成方式,其實質呈現為零輸 入阻柷。因此所有關於該行匯流排之電容是無結果及不會影 響檢測功能之靈敏度。 在預先充電時,開關S1為關及開關S2為開。在預先充電 時,該選定電晶體可以一次啟動於一列上,或其可^;同時啟 動。整個陣列可以順序掃描於預先週期時及接著整個陣列順 序地掃描以為讀取。替代地,各別列電容可以首先預先充電 及接著感測。 在訊號讀取時,開關S1為開及開關S2為閉。即是開關U 和S3交互作動,如當開關S2為閉,開關83為開及反之等等 。開關S3關閉以重設感測各別電荷封裝間該集成電容。開 關S3為開於一掃描TFT傳導時,如,在一掃描週期時。 開關S2可以於感測預先充電及感測模式各別列時調整為 開或閉。替代地,S2可以保持為閉於整個陣列的順序掃描 該閘極驅動耦合至列選擇電極包括可變DC源42及一可變 振幅脈衝產生器40之串聯》該裝置如示如獨特電路元件以^ 示各別功能,不論其可能安排成一單一脈衝供給。其以此方 式顯示以標示兩個脈衝擺幅及其絕對陣幅值為範圍控制之 電位源。例如,若系統動態範圍為經由改變預先充=電壓 vp來調整,其可能必須調整閘極脈衝之之DC位準而無需改 變脈衝電壓擺幅。記住該超過電容電荷之量是—閘_源極電Cintegrate is connected to a switch S3 across the feedback capacitor and resets the capacitor before sensing the charge on the existing capacitor. The Op-Amp is a high-gain device, so that the charge integration method in practice is essentially zero-input impedance. Therefore, all capacitors related to the bus of the bank are inconclusive and will not affect the sensitivity of the detection function. During pre-charging, switch S1 is off and switch S2 is on. When pre-charging, the selected transistor can be activated on one row at a time, or it can be activated simultaneously. The entire array can be scanned sequentially at the pre-cycle and then the entire array can be scanned sequentially for reads. Alternatively, the individual column capacitors may be precharged first and then sensed. When the signal is read, the switch S1 is on and the switch S2 is off. That is, switches U and S3 act interactively, such as when switch S2 is closed, switch 83 is on and vice versa, and so on. The switch S3 is turned off to reset the integrated capacitor between the sensing charge packages. The switch S3 is turned on when a scanning TFT is conducted, for example, during a scanning period. The switch S2 can be adjusted to be on or off when sensing the pre-charging and sensing modes. Alternatively, S2 can be maintained as a sequential scan that is closed across the array. The gate drive is coupled to the column selection electrode including a series of variable DC source 42 and a variable amplitude pulse generator 40. The device is shown as a unique circuit element to ^ Shows individual functions, regardless of their possible arrangement as a single pulse supply. It is displayed in this way to indicate the potential source of the two pulse swings and their absolute amplitude values for range control. For example, if the dynamic range of the system is adjusted by changing the precharge = voltage vp, it may be necessary to adjust the DC level of the gate pulse without changing the pulse voltage swing. Remember that the amount of charge that exceeds the capacitance is-gate_source

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A7 B7 五、發明説明(。) Ό 位之函數,脈衝之多數負值進入閘·源極電位等式。因此, 僅改變Vp可影響超出電容電荷之量,而且也改變多數負DC 值,或閘極驅動脈衝之閉電壓。替代地,若動態範圍為經由 改變脈衝大小來調整,以調整A V之值,接著需要一可變大 小脈衝產生器。該檢測訊號的動態範圍可以經由閘極驅動脈 衝振幅,多數閘極驅動脈衝的負值,及預先充電電壓之值來 控制。 其較佳經由瞭解訊號處理技藝,電容感測所產生的顯示 影像之對比也可以經由前述相同變數來調整。 不論使用於掃描一矩陣如該範例電容感測陣列之掃描電 晶體之型式,其是關於各別電容感測陣列之雜散電容。為了 掃描無需超電容器充電就會關閉之電容器,其可以有益地實 質導引該超出電荷以刪除如本發明般累積在雜散電容上之 電荷。此可能經由超過掃描脈衝所需振幅來完成,或經由較 大電晶體重疊電容如Cgs設計,及接著適切地偏壓該系統以 刪除雜散電容上電荷。 在下列申請專利範圍,該”極性"項目當參閱如一暫態,為 正若該暫態從比較負擺動至比較正值(比較正至比較負)。 煩請委員明示 年月曰所提之 修正本有無變更實質内容是否准予修ή 〇 本紙張尺度適用中國國家標準(CNS) Α4規格(210X 297公釐)A7 B7 V. Description of the invention (.) As a function of the Ό position, most of the negative values of the pulse enter the gate-source potential equation. Therefore, changing only Vp can affect the amount of charge beyond the capacitor, and also change most negative DC values, or the closing voltage of the gate drive pulse. Alternatively, if the dynamic range is adjusted by changing the pulse size to adjust the value of A V, then a variable-size pulse generator is required. The dynamic range of the detection signal can be controlled by the gate drive pulse amplitude, the negative value of most gate drive pulses, and the value of the precharge voltage. It is better to understand the signal processing technology, and the contrast of the display image generated by the capacitance sensing can also be adjusted by the same variables as described above. Regardless of the type of scanning transistor used to scan a matrix such as this example capacitive sensing array, it is related to the stray capacitance of each capacitive sensing array. In order to scan a capacitor that would close without charging the ultracapacitor, it may be beneficial to physically guide the excess charge to delete the charge accumulated on the stray capacitance as in the present invention. This may be done by exceeding the required amplitude of the scan pulse, or by a larger transistor overlapping capacitor such as Cgs design, and then biasing the system appropriately to remove the charge on the stray capacitance. In the scope of the following patent application, the "polarity" item should be referred to as a transient state if it is positive if the transient state swings from a relatively negative value to a relatively positive value (more positive to more negative). Members are requested to indicate the amendments mentioned Whether there is any change in the content of the paper is allowed to repair the price 〇 This paper size applies the Chinese National Standard (CNS) Α4 specification (210X 297 mm)

Claims (1)

D8 六、申請專利範圍 1· 一種以連接至各別電容之相關TFT陣列掃描一陣列電容 器之方法,其中該電容器陣列被依序地預先充電至一預 先充電電壓,該方法包含: 提供掃描脈衝至該TFT元件,用以調整該TFT元件以傳 導於一行匯流排和該電容器間,該掃描脈衝具有一極性 的關閉暫態以趨向調整該TFT元件在該電容被預先充電 後離開傳導; 提供一耦合該行匯流排的直流預先充電源,該預先充 電電壓源具有和該暫態相同之極性。 2.如2請專利範圍第丨項之方法,其中該陣列是一電容性感 測器陣列及該方法操作以感測各別陣列電容上電荷,且 該方法另包含可變地調整該掃描脈衝之大小以調整感測 電荷之動態範圍。 w 3·如申請專利範圍第1項之方法,其中該陣列是一電容性感 測器陣列其係經由感測各別陣列電容上電荷而操作,1 該方法另包含可變地調整該預先充電電壓之直流值以調 整感測電荷之動態範圍。 4·如申請專利範圍第3項之方法,其中該陣列是一電容性感 測器其係經由感測各別陣列電容上電荷操作,且該方^ 另包含可變地調整該掃㈣衝之直流大小以嫉=測電 荷之動態範圍。 •5·如申請專利範圍第丨項之方法,其中該陣列是一電容性感 測器陣列及該方法作動以感測各別陣列電容上感測電荷 ,及該方法另包含經由調整該掃描脈衝之直流位準之一 -13- ^、申請專利範圍 ,及該掃描脈衝之大小來調整感測電容值之影像訊號之 飽合。 6. —種電容性薄膜電晶體陣列裝置,包含: 一可變電容陣列; 一以行匯流排和各別電容間連接之各別TFT的傳導路 徑來掃描TFTfs之陣列; 一計時和脈衝產生器以提供掃描脈衝至各別該TFT’s 以調整該TFT、為傳導,該脈衝具有一極性之暫態以調整 該TFPs離開傳導; 一預先充電電壓源具有如該暫態之相同極性; 一電荷感測器; 開關用以交互地連接該預先充電電壓源或該電荷感測 器至該行匯流排。 7. 如申請專利範圍第6項之裝置,另包括可變控制電路以 調整直流值之一值及該掃描脈衝之振幅值。 -14 - 本紙張尺度適用中國國家標準(CNS) A4規格(210X297公釐)D8 VI. Application Patent Scope 1. A method for scanning an array capacitor with related TFT arrays connected to respective capacitors, wherein the capacitor array is sequentially precharged to a precharge voltage, the method includes: providing a scan pulse to The TFT element is used to adjust the TFT element to be conducted between a row of buses and the capacitor, and the scan pulse has a polarity off transient to tend to adjust the TFT element to leave conduction after the capacitor is precharged; to provide a coupling The DC pre-charge source of the busbars has the same polarity as the transient state. 2. The method according to item 2 of the patent scope, wherein the array is a capacitive sensor array and the method is operated to sense the charge on the respective array capacitors, and the method further comprises variably adjusting the scan pulses. Size to adjust the dynamic range of the sensed charge. w 3. The method according to item 1 of the patent application range, wherein the array is a capacitive sensor array which is operated by sensing the charge on the respective array capacitors. 1 The method further comprises variably adjusting the precharge voltage DC value to adjust the dynamic range of the sensed charge. 4. The method according to item 3 of the patent application range, wherein the array is a capacitive sensor which is operated by sensing the charge on the respective array capacitors, and the method also variably adjusts the sweeping DC The size is measured by the dynamic range of the charge. • 5. The method according to item 丨 of the patent application range, wherein the array is a capacitive sensor array and the method operates to sense a charge on each array capacitor, and the method further comprises adjusting the scan pulse One of the DC levels -13- ^, the scope of patent application, and the size of the scanning pulse to adjust the saturation of the image signal of the sensing capacitance value. 6. A capacitive thin film transistor array device, comprising: a variable capacitor array; an array of TFTfs scanned by a conductive path of a respective TFT connected between a row bus and a respective capacitor; a timing and pulse generator To provide a scanning pulse to each of the TFT's to adjust the TFT, for conduction, the pulse has a polarity transient to adjust the TFPs to leave conduction; a pre-charged voltage source has the same polarity as the transient; a charge sensing A switch for interactively connecting the pre-charged voltage source or the charge sensor to the row bus. 7. If the device in the scope of patent application No. 6 further includes a variable control circuit to adjust one of the DC value and the amplitude of the scan pulse. -14-This paper size applies to China National Standard (CNS) A4 (210X297 mm)
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