TW497523U - Improved positioning ring structure for wafer polishing - Google Patents

Improved positioning ring structure for wafer polishing

Info

Publication number
TW497523U
TW497523U TW90219298U TW90219298U TW497523U TW 497523 U TW497523 U TW 497523U TW 90219298 U TW90219298 U TW 90219298U TW 90219298 U TW90219298 U TW 90219298U TW 497523 U TW497523 U TW 497523U
Authority
TW
Taiwan
Prior art keywords
ring structure
positioning ring
wafer polishing
improved positioning
improved
Prior art date
Application number
TW90219298U
Other languages
English (en)
Inventor
Shui-Yuan Chen
Shui-Sheng Chen
Tien-Ting Chen
Original Assignee
Shui-Yuan Chen
Shui-Sheng Chen
Tien-Ting Chen
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Shui-Yuan Chen, Shui-Sheng Chen, Tien-Ting Chen filed Critical Shui-Yuan Chen
Priority to TW90219298U priority Critical patent/TW497523U/zh
Publication of TW497523U publication Critical patent/TW497523U/zh

Links

TW90219298U 2001-11-09 2001-11-09 Improved positioning ring structure for wafer polishing TW497523U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW90219298U TW497523U (en) 2001-11-09 2001-11-09 Improved positioning ring structure for wafer polishing

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW90219298U TW497523U (en) 2001-11-09 2001-11-09 Improved positioning ring structure for wafer polishing

Publications (1)

Publication Number Publication Date
TW497523U true TW497523U (en) 2002-08-01

Family

ID=21687256

Family Applications (1)

Application Number Title Priority Date Filing Date
TW90219298U TW497523U (en) 2001-11-09 2001-11-09 Improved positioning ring structure for wafer polishing

Country Status (1)

Country Link
TW (1) TW497523U (zh)

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004
MK4K Expiration of patent term of a granted utility model