494206 五、發明說明（1) 發明領域： 本發明係有 偵測渗漏之水管 壽命且可儘早發 相關技術說明： 在半導體積 熱氧化製程及擴 體設備中，一般 持設備正常運作 冷卻的區域並在 。此外，在高溫 質通常使用金屬 )之官體結構， part )所構成之 能夠承受較高的 半導體設備損害 冷卻區域以順利 然而，在進 通入腐姓性氣體 (rusting gas ) 屬冷卻水管加速 如此一來， 卻水夾雜著金屬 爐内的晶圓，導 關於一種冷卻水管，特別是有關於一種可 ，適用於冷卻裝置中，用以延長水管使用 現漏水之問題而加以解決。 ，電路製程中，常需在高溫下進行，例如 政製程等，而配合這些製程所使用的半導 都骏設有冷卻裝置以有效地控制溫度而維 。，統上，冷卻裝置係藉由一水管圍繞愈 水官内通入冷卻水來達到冷卻降溫的目的 的製程中，例如80 0到12〇〇，水管的材 ’例如鐵，且採用具有可撓性（bendable 例如由連續的複數個關節部（knural 推形官（bellows pipe)，此乃由於金屬 溫度而不易因溫度異常時發生破裂而造成 、。另一方面，摺形管體可順應性地貼附於 進行冷卻。 仃高溫製程時，例如熱氧化製程，通常會 ’例如含氯（C 1 )的氣體或其他鏽氣 ’造成高溫爐管的冷卻裝置中的摺形金 腐1虫而劣化，特別是在最脆弱的關節部。 金屬管壁會出現裂縫，使得管内的高壓冷 離子（金屬管腐蝕時所產生）濺射到高溫 致晶圓報廢無法使用。494206 V. Description of the invention (1) Field of the invention: The present invention has the service life of leaking water pipes and can be issued as early as possible. Technical description: In the semiconductor thermal oxidation process and expansion equipment, the equipment is generally cooled in the normal operating area. And in. In addition, in high-temperature materials, the official structure of metal is usually used, and part) is able to withstand high semiconductor equipment damage to the cooling area to be smooth. However, the cooling water pipe is accelerated when the corrosion gas is introduced. In the meantime, the water is mixed with the wafer in the metal furnace, and it is related to a cooling water pipe, and in particular, it is applicable to a cooling device to extend the problem of water leakage caused by the extension of the water pipe. In the circuit manufacturing process, it is often necessary to perform at high temperatures, such as government processes, and the semiconductors used in conjunction with these processes are equipped with cooling devices to effectively control the temperature and maintain. In general, the cooling device is a process in which cooling water is passed through a water pipe to pass cooling water around the hydrating water, for example, from 80 to 1200. The material of the water pipe is, for example, iron, and it is flexible. (Bendable, for example, consists of a plurality of continuous joints (knural bellows pipe), which is caused by the temperature of the metal and is not easily broken due to abnormal temperature. On the other hand, the folded tube can be compliantly It is attached for cooling. 时 In high-temperature processes, such as thermal oxidation processes, 'such as chlorine (C 1) -containing gas or other rust gas' usually causes the folded gold rot in the cooling device of the high-temperature furnace tube to deteriorate. , Especially at the most fragile joints. Cracks will appear on the wall of the metal tube, which will cause high-pressure cold ions in the tube (produced when the metal tube is corroded) to sputter to high temperatures and cause wafer scrap to be unusable.
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·· - ίϊ於發：提供-種可摘測滲漏之水管，包括 _藉由保護套=jg二一偵測裝置以及一警示裝置，其 管體使用°妄入S披覆於管體上以防止管體受到腐蝕而延長 ，以以：2;管體與保護套管之間設置-摘測裝置 出警訊。/ I ’、、出液體日寸輸出一觸發信號至警示裝置而發 損害。σ 4可立即進行處理而防範晶圓受冷卻水污染而 發明概述·· 由-1:: : ί目的在於提供-種可偵測滲漏之水管，其藉 保€套管來防止鏽氣腐#水管，以延長水管之使用壽 其萨：：：之另-目的在於提供-種可偵測滲漏之水管， 出二tf;;:侦測裝置，以在水管發生渗漏時可立即债測 ’包括：— 管體上；一 管體滲漏出 性連接於偵 中’上述偵 及一絕緣膜 ’以部分露 線接觸時， 護套管係一 述之目的，本發 管體，用以裝載 偵測裝置，設置 液體時輸出一觸 測裝置， 測裝置包 用以在 括：兩 ，披覆於導線上 出任一導線，當 電性導 及鐵氟 導線彼此 熱縮套管 明提供 一液體 於管體 發信號 接收觸 導線， ，其中 渗漏出 通而輸 龍套管 一種可 ;一保 與保護 ;以及 發信號 彼此並 絕緣膜 之液體 出觸發 之任' 债測滲 護套管 套管之 一警示 後發出 未電性 具有至 與部分 性號。 種且警 間，以 裝置， 警訊。 接觸； 少一海 露出之 此外， 示裝i··-ίϊYufa: provide-a kind of removable water pipe for leak detection, including _ by protective cover = jg two one detection device and a warning device, the tube body is covered with ° S In order to prevent the pipe body from being corroded and extended, to: 2; set between the pipe body and the protective sleeve-a warning signal is provided by the extraction device. / I ′, the output liquid will output a trigger signal to the warning device and cause damage. σ 4 can be processed immediately to prevent wafers from being contaminated by cooling water and the invention is summarized by -1 ::: ί The purpose is to provide a water pipe that can detect leakage, which is protected by rust and corrosion by using a sleeve. # 水管 ， Extend the use of water pipes Shouqisa ::: Another-the purpose is to provide-a type of water pipe that can detect leakage, two tf ;;: detection device to immediately debt in the event of water pipe leakage The test includes: — on the pipe body; a leaky connection of the pipe body is connected to the 'the above-mentioned detection and an insulation film' in the detection with a partial exposed wire, the sheath is for the purpose described above. The detection device is loaded, and a touch detection device is output when the liquid is set. The test device package is used to include: two, covering any wire to produce any one of the wires. The liquid in the tube sends a signal to the receiving wire, where leakage can pass through the casing; a guarantee and protection; and any signal that triggers the liquid out of the insulating film to trigger each other. After the warning is issued, the non-electricity has to and part number. Kind and alert, with device, alert. Contact; less one sea exposed; moreover, display equipment i
494206 五、發明說明（3) 一顯示器、一警示燈及一蜂鳴器之任一種。 圖式之簡單說明： 為讓本發明之上述目的、特徵和優點能更明顯易懂， 下文特舉一較佳實施例，並配合所附圖式，作詳細說明如 下： 第1圖係繪示出根據本發明實施例之可偵測滲漏之水 管組合平面示意圖。 第2圖係繪示出根據本發明實施例之可偵測滲漏之水 管之分解平面示意圖。 第3圖係繪示出應用本發明之垂直式爐管平面示意 圖。 [符號說明] 1 0 a〜關節部； 1 1〜導線； 1 2a〜缺口； 1 4〜保護套管； 1 6〜警示裝置； 20〜載具； p C W〜冷卻水° 10〜金屬管體 1 0 b〜剛性管口 1 2〜絕緣膜； 1 3〜偵測單元 1 5〜水管； 1 8〜爐管； S1〜觸發信號 較佳實施例之詳細說明： 以下配合第1到3圖說明本發明實施例之可偵測滲漏之 水管，其適用於一高溫爐管之冷卻系統。首先，請參照第 1，其繪示出根據本發明實施例之可偵測滲漏之水管組合 平面示意圖。其中此水管1 5包括：一金屬管體1 0，例如鐵494206 V. Description of the invention (3) Any of a display, a warning light and a buzzer. Brief description of the drawings: In order to make the above-mentioned objects, features, and advantages of the present invention more comprehensible, a preferred embodiment is given below and described in detail with the accompanying drawings as follows: FIG. 1 is a drawing A schematic plan view of a water pipe assembly capable of detecting leakage according to an embodiment of the present invention is shown. FIG. 2 is a schematic exploded plan view of a leakable water pipe according to an embodiment of the present invention. Fig. 3 is a schematic plan view showing a vertical furnace tube to which the present invention is applied. [Description of symbols] 1 0 a ~ joint; 1 1 ~ lead; 1 2a ~ notch; 1 4 ~ protective sleeve; 16 ~ warning device; 20 ~ carrier; p CW ~ cooling water ° 10 ~ metal pipe body 1 0 b ~ rigid nozzle 1 2 ~ insulation film; 1 3 ~ detection unit 15 ~ water pipe; 18 ~ furnace pipe; S1 ~ detailed description of the preferred embodiment of the trigger signal: The leakable water pipe according to the embodiment of the present invention is suitable for a cooling system of a high-temperature furnace pipe. First, please refer to No. 1 which shows a schematic plan view of a water pipe assembly capable of detecting leakage according to an embodiment of the present invention. The water pipe 15 includes: a metal pipe body 10, such as iron
0503-7195TWF ； TSMC2001-1207 ； SPIN.ptd 第6頁 494206 五、發明說明（4) 、一保護套管1 4以及一偵測單元丨3。 接下來’請參照第2圖，其繪示出根據本發明實施例 之可摘測滲漏之水管分解平面示意圖。金屬管體！ 〇係用以 裝載供作冷卻之一液體（未繪示），例如冷卻水。另一方 面為了使金屬管體1 〇具有可撓性以順應性地圍繞欲冷卻 之區域’其結構上除了兩端的剛性管口丨0 b之外，中間部 刀係由連縯的複數個關卽部（k n U r a 1 p a r t ) 1 〇 a組成而形 成一摺形（be 1 lows )金屬管體丨〇。 少 接下來，將保護套管14披覆於該金屬管體1〇上。在 實施例中，保護套管14可使用熱縮套管（heat s^^nkabie cross-linked p〇ly〇lefin tubing)及鐵氟 1月5〇(r^fln)套管之任一種。一般而言，前者可耐溫至 150 C’後者可耐溫至25〇t。因此，可依據高溫製程的溫 ίΐϊ:使用：如先前所述，由於在高溫製程,，例如熱 ;，為Ϊ避ΚΙ匕= =他程反 ==:護;…防:該::管==體 使内部的高壓：；水面保；壁出現裂縫而 f 直接錢射至熱氧化彭程中二：2:14亦可避免冷卻水 在太造成嚴重的後果。 在本貝奴例中，為了使水管15具有偵， 因此在金屬管體10與保護套管14之間設置―;貞測二 其包含兩導線11，例如金屬線，及由、“、 ” 緣膜1 2。纟中’兩導線11彼此平行排置1 :製成之一鈀 丁拼置而亚未電性接觸。0503-7195TWF; TSMC2001-1207; SPIN.ptd page 6 494206 5. Description of the invention (4), a protective sleeve 14 and a detection unit 丨 3. Next, please refer to FIG. 2, which is a schematic plan view showing a disassembled leaky water pipe according to an embodiment of the present invention. Metal pipe body! 〇 is used to load a liquid for cooling (not shown), such as cooling water. On the other hand, in order to make the metal pipe body 10 flexible and compliant to surround the area to be cooled, its structure is in addition to the rigid nozzles at both ends of the two sides. The knuckle (kn Ur 1 part) 1 oa is formed to form a be 1 lows metal pipe body. Less Next, the protective tube 14 is coated on the metal pipe body 10. In the embodiment, the protective sleeve 14 may use any one of a heat shrinkable sleeve (heat ^ nkabie cross-linked pololy tubing) and a Teflon January 50 (r ^ fln) sleeve. Generally speaking, the former can withstand temperatures up to 150 C 'and the latter can withstand temperatures up to 25 ° t. Therefore, it can be used according to the temperature of the high temperature process: use: as mentioned earlier, because of the high temperature process, such as heat; to avoid ΚΙΙ = = other process counter = =: protect; ... prevent: the :: pipe = = The internal pressure of the body: water surface protection; cracks in the wall and f direct injection of thermal oxidation Peng Chengzhong 2: 2: 14 can also prevent the cooling water from causing serious consequences. In this Benu example, in order to make the water pipe 15 detectable, it is provided between the metal pipe body 10 and the protective sleeve 14;-Zhenxian 2 contains two wires 11, such as a metal wire, and a "," edge Film 1 2.纟 中 'two wires 11 are arranged in parallel to each other 1: one of palladium and butyl is made up and the contacts are not electrically contacted.
494206 五、發明說明（5) 接著’絕緣膜1 2，披覆於兩導線1 1上，用以防止與金屬管 體電性導通以及確保兩導線1 1無電性接觸。此外，絕緣^ 12表面具有至少一缺口 i2a以部分露出任一導線11。透過、 缺口 1 2a，滲漏出之冷卻水便與部分露出之導線丨丨接觸k 使得兩導線1 1彼此電性導通而輸出一觸發信號（未繪示 ):在本實施例中，絕緣膜12表面具有複數個缺口丨^'。 如第2圖所不，這些缺口丨2a彼此相對設置，其目的在於使 冷卻水易於滲入絕緣膜丨2内而增加偵測單元丨3的偵測能 ，亦及增加積測單元13之靈敏度。另一方面，可依據金 官體10的長度來決定缺口12a的數量，以便於金屬管體i。屬 旦卷生漏水的狀況時，能立即偵測出而輸出觸發信號。 嫿’其繪示出應用本發明之垂直示 以:#擒：1::并標號18表示為石英爐管’標號20表示用 置a ϋ卻6壯具且本發明之可偵測滲漏之水管15係設 ί::丨二爐管18與載具20之間的真空裝置（未 示器、警示燈及蜂鳴心：錄甘一警示裝置，例如顯 線11(未繪示），用:Π。其搞接於水管15上的導 water)水管15管辟矢展在/部抹水PCW (PUre C0011叫 之觸發信號S1而發收偵測單元13 (未繪示） 之後可iLg卩ilM- ^ 3 S 此—來，使用者在收到警訊 後叮即進订後續維修或更換水管i 5箄盧理，德备尤乂 要的問題產生。 ksk寺處理避免不必 雖然本發明已以較佳电 限定本發明，任何孰抑Λ靶例揭硌如上，然其並非用以 7…、自此項技藝者，在不脫離本發明之精494206 V. Description of the invention (5) Next, an insulating film 12 is coated on the two wires 11 to prevent electrical conduction with the metal pipe body and to ensure that the two wires 11 are not in electrical contact. In addition, the insulation surface has at least one notch i2a to partially expose any of the wires 11. Through the notch 1 2a, the leaked cooling water will contact the exposed wires 丨 丨 k, so that the two wires 1 1 are electrically connected to each other and output a trigger signal (not shown): In this embodiment, the insulating film The 12 surface has a plurality of gaps. As shown in Figure 2, these notches 2a are arranged opposite each other, the purpose of which is to make it easy for the cooling water to penetrate into the insulating film 2 and increase the detection energy of the detection unit 3, as well as increase the sensitivity of the measurement unit 13. On the other hand, the number of the notches 12a may be determined according to the length of the metal body 10 to facilitate the metal pipe body i. When it is in a state of water leakage, it can immediately detect it and output a trigger signal.婳 'It shows the vertical display to which the present invention is applied: #Capture: 1 :: and the reference number 18 indicates a quartz furnace tube. The reference number 20 indicates that a ϋ but 6 tools are used and the present invention can detect leakage. The water pipe 15 is provided with a vacuum device (not shown, warning light and beeping heart) between the second furnace tube 18 and the carrier 20: a warning device such as the display line 11 (not shown). : Π. It is connected to the water pipe 15) The water pipe 15 pipe Pi Yazhan in / Wipe PCW (PUre C0011 called the trigger signal S1 and send and receive the detection unit 13 (not shown) can be iLg 卩ilM- ^ 3 S Therefore, after receiving the warning, the user will order the follow-up repair or replacement of the water pipe i 5 箄 Lu Li, especially the problem of De Bei arises. Ksk Temple processing to avoid unnecessary Although the invention has been The invention is defined by a better electrical method, and any target examples of suppression are uncovered as above, but it is not intended to be used by those skilled in the art without departing from the spirit of the present invention.
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