TW486708B - Field emission display panel having cathode and anode on the same substrate - Google Patents

Field emission display panel having cathode and anode on the same substrate Download PDF

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Publication number
TW486708B
TW486708B TW90100891A TW90100891A TW486708B TW 486708 B TW486708 B TW 486708B TW 90100891 A TW90100891 A TW 90100891A TW 90100891 A TW90100891 A TW 90100891A TW 486708 B TW486708 B TW 486708B
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Taiwan
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cathode
anode
display panel
layer
emission display
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TW90100891A
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Chinese (zh)
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Feng-Yu Juang
Wen-Jiun Wang
Jeng-Jung Li
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Ind Tech Res Inst
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Abstract

A two-pole vacuum tube structured field emission display panel employs a nano-meter tube emitter layer as an electron emission source, and has the cathode and anode formed on the same substrate. The nano-meter tube emitter layer is formed by mixing a hollowed carbon fiber tube with a diameter of several nano-meters to several tens of nano-meters, diamond or diamond-like carbon fiber tube, and an adhesive of polymer substrate. The nano-meter tube emitter material can be conveniently applied and formed on a silver glue-like electrode by a low-cost thick film printing technique. Since the cathode and anode are formed on the same substrate of a bottom panel, the operating voltage is controlled by the thickness of the dielectric material used for forming the nano-meter tube emitter stack. Therefore, it is able to properly select the distance between a top glass plate and a bottom glass plate to rapidly exhaust air for achieving a vacuum state without influencing the operation voltage of the device. This novel two-pole vacuum tube structured field emission display panel of the present invention can reduce the cost and be manufactured by a large area.

Description

5-1發明領域: 本發明一般#右μ 此種元件的方法’、,Ρ關於一種場發射顯示(FED)元件和製造 極和陽極於同一個特別地,本發明是有關於一種具備陰 源的二極直介其姓板底材,且以奈米管射極為電子發射 刷技術製造::;的::射顯示元件,和-種利用厚膜印 2發明背景: 近 產品上 平面顯 改進了 使其不 上有許 速率, 者,液 但其所 明亮光 它的應 示元件 個人電 動式矩 然而, 多的應 包括塗 高度複 需要有 大部份 角下不 而且廣泛 較為廣泛 器(LCD) 件有許多 ’液晶顯 玻璃面板 過程的良 其會耗用 液晶顯示 ’因此又 年來平面顯 ’例如用在 示元件是主 的解析度。 適合用在許 多的限制, 製造過程的 晶顯示元件 產生的光又 線下或廣視 用〇 已被研發出 腦上。其中 陣液晶顯示 液晶顯示元 用上。例如 佈非晶石夕於 雜性和製造 背光源,而 都浪費了。 容易看清楚 應用在電子 使用的一種 ’其可提供 先天的限制 示器在製造 時的低沉積 率很低。再 大量能源, 器的影像在 更加限制了5-1 Field of the invention: The present invention generally refers to a method of such an element, and the present invention relates to a field emission display (FED) element and a method for manufacturing a pole and an anode. In particular, the present invention relates to a method having a negative source. Diodes are directly introduced to their substrates, and are manufactured with nanometer-emitting electron-emitting brush technology ::; :: emitting display elements, and a kind of thick film printing. BACKGROUND OF THE INVENTION: Near the product, the plane is significantly improved. It does not have a slight rate, or liquid, but its bright light and its display elements are personal electric moments. However, many should include the coating height, the need for most of the corners, and a wide range (LCD). There are many 'good liquid crystal display glass panel processes that consume liquid crystal displays', so flat displays have been used for many years, for example, the display element is used for the main resolution. Suitable for use in many limitations, the light produced by crystal display elements in the manufacturing process is used offline or in wide viewing. It has been developed on the brain. Among them, the liquid crystal display liquid crystal display element is used. For example, cloth amorphous stone is wasteful because of its heterogeneity and manufacturing backlight. It is easy to see that it is applied to electronic use, and it can provide inherent limitations. The indicator has a low deposition rate during manufacture. No matter how much energy is used, the image of the device is even more limited.

486708 修正 月 曰 _案號90100刖1_ 五、發明說明(2) 點。Ξ:限:發:J供了明顯較傳統液晶顯示元件好的優 晶顯示面板:ί ί::件與傳統的薄膜電晶體⑽液 的視覺角度;容;;,示元件有較高的對比率,較廣 且較寬的操作溫度範^的最大明亮m肖耗較低而 器利m ϊ示器最大的不同是場發射顯示 幾乎都可;見:再:=射顯示f所產生的光,使用者 的缚膜電晶體,因冷相對於主動式矩陣液晶領 本及良率問題’場發射顯示器在此方面都可獲得解γ 子,撞擊塗佈在透明 這種陰極發光( 生光的方法中,最有 線管(CRT)元件,在 都有自己的電子源。 陣列。存在於陰極和 子’而且電子被加速 正比於顯示亮度,且 係。為了達到場發射 淨度和均勻性是非常 %發射顯不器是由陰極發射出電 面板背面的螢光粉來發光產生影像。 cathodo - luminescent)過程是已知產 效的方法之一。反之於傳統的陰極射 場發射顯示器的每一像素或發射單元 例如,典型的微尖端發射(micr〇tip) 閘電極間的電壓差會由陰極吸引出電 往塗佈螢光粉的方向移動。發射電流 與微尖端材料的功函數有非常大的關 顯示|§的必要效率,發射源材料的潔 重要的。 第5頁 486708 篆號 90100891 五、發明說明(3) 為了使電子在場發射顯示器中移動,大部分的場發射 顯示器都必須抽真空到如壓力1 托的低壓,如此可提供 被激發電子的平均自由徑(mean free path)而可避免微尖 端的污染和退化。顯示器的解析度可藉由使用對焦柵極將 微尖端放出的電子聚集來提高。486708 Amendment Month _Case No. 90100 刖 1_ Fifth, the description of the invention (2). Ξ: Limit: Hair: J provides a superior crystal display panel that is significantly better than traditional liquid crystal display elements: ί :: The visual angle between the element and the traditional thin film transistor liquid; Ratio, a wider and wider operating temperature range, the maximum bright m consumption is lower, and the biggest difference between the display device and the display device is that the field emission display is almost all available; see: again: = light display f The user ’s film-bound transistor, due to the cold compared to the active matrix liquid crystal collar and yield issues, the field emission display can obtain a solution of γ in this respect, and it is impacted and coated on a transparent cathode-emitting (light-emitting In the method, the most wired tube (CRT) elements have their own electron source. Array. Exists in the cathode and the sub- 'and the electrons are accelerated proportional to the display brightness, and the system. In order to achieve the field emission clarity and uniformity is very% The emission display is a method in which the cathode emits fluorescent powder on the back of the electrical panel to emit light. The cathodo-luminescent process is one of the known methods of producing effects. In contrast, each pixel or emission unit of a conventional cathode field emission display, for example, a typical microtip emitter (micr0tip) voltage difference between the gate electrodes will be attracted by the cathode to move in the direction of the phosphor coating. The emission current has a very large relationship with the work function of the micro-tip material. It is shown that the necessary efficiency of the | source material is important. Page 5 486708 篆 90100891 V. Description of the invention (3) In order to move electrons in the field emission display, most field emission displays must be evacuated to a low pressure such as a pressure of 1 Torr, which can provide the average of the excited electrons. Mean free path to avoid contamination and degradation of the microtip. The resolution of the display can be improved by focusing electrons emitted from the microtip using a focusing grid.

早期發展的場發射陰極是利用鉬(Mo)做的金屬微尖端 發射器。此種元件是將矽晶圓首先氧化產生一層厚的二氧 化石夕層’然後再沉積一層金屬閘極層於氧化層上,再將金 屬閘極層圖案轉印形成閘極開口,接下來在開口下之氧化 石夕的钱刻會底切閘蟬下方的二氧化矽並形成一井(〜611), 犧牲材料層例如鎳是沉積在閘極上,並要防止鎳沉積到 發射井裡面。然後將鉬以垂直的沉積方式沉積在凹洞處, 形成有尖點的圓錐體直到與開口同高。當把鎳犧牲層去除 後就產生了發射圓錐體。 另 熱氧化 成矽尖 種設計 玻璃是 端可用 。在此 的中間 的中間 一種設計中 ,然後接著 端。再重覆 中,微尖端 用於作為大 多種導電材 種場發射顯 1 . 層於陰極和 層可使元件 ,矽微 圖案轉 進行的 形成在 面積的 料做成 示元件 微尖端 在穩定 尖端射 印於氧 氧化與 欲使用 平面板 ,例如 設計中 之間是 狀況下 化層, 钱刻且 的底材 顯示器 金屬或 ’沉積 非常需 操作 造是先於矽上發生 再選擇性的钱刻形 使端點更尖。再一 上,例如玻璃,而 的理想底材。微尖 參雜的半導體材料 一層控制了導電率 要的。適當電阻率 因此在製Early field emission cathodes were metal microtip emitters made of molybdenum (Mo). This kind of device is to oxidize a silicon wafer to produce a thick layer of stone dioxide, and then deposit a metal gate layer on the oxide layer, and then transfer the pattern of the metal gate layer to form a gate opening. The money carved by the oxidized stone under the opening will undercut the silicon dioxide under the gate and form a well (~ 611). A sacrificial material layer such as nickel is deposited on the gate, and it is necessary to prevent nickel from being deposited in the emitter. Molybdenum is then deposited in the recesses in a vertical manner, forming a cone with a sharp point until it is the same height as the opening. When the sacrificial nickel layer is removed, an emission cone is created. Another design is thermally oxidized into silicon tips. The glass is end-useable. In this middle of the middle one design, then continue to the end. Repeatedly, the microtip is used as a field emission display for a large variety of conductive materials. 1. Layers on the cathode and the layer can make the element, the silicon micropattern is formed by the area of the material, and the microtip is shot on the stable tip. Printed on oxygen oxidation and the use of a flat plate, for example, in the design is a conditional layer, the substrate and the metal engraved and deposited on the substrate need to be manipulated to make the selective engraving before the silicon occurs The ends are sharper. Again, such as glass, and the ideal substrate. A layer of micro-tipped semiconductor material controls the conductivity. Proper resistivity

第6頁 4δ0/υδ 五Page 6 4δ0 / υδ Five

Es_90100891 發明說明(4) ---—_______ 号务射龜 一 一 生非晶:::時’沉積一層非晶矽薄膜導電率介於天 的。參雜:ΐ雜n+非晶矽的導電率之間的範圍内是报需要 來控制 晶石夕的導電率可依薄膜内的磷原子含量多寡 曰 修正 敬而言 非常低懕沾古在製造場杳射顯示元件時,元件處於一個 。例如二ίί態’因此使得電子的發射不會受到阻礙 發射顯干ΐ:: 壓力小於1〇—7托。&了避免構成場 耵頌不兀件的兩塊相當大的玻璃面板崩 :、 统:31支持和提供兩片面板間適當的空隙。例如,在心' :射顯不疋件的空隙。長形的間隙支撐物也可用於同樣目 。ρίΐ第Γ A圖傳統場發射顯示元件10的放大橫切面圖 琢發射顯不兀件1 〇是沉積一層阻抗層丨2於玻璃底材丨4上 ,典型的阻抗層是一層非晶矽基膜。介電材料的絕緣層玉6 和^屬閘極層18再沉積形成於阻抗層上,然後形成金^微 尖端20和陰極結構22,而陰極結構22被阻抗層12所覆蓋, 因此一層有阻抗又有點導電性的非晶矽層丨2置於由介電材 料,例如二氧化矽(Si〇2),形成的高絕緣層16之下。控制 非晶矽層1 2的阻值,使其不會有過高阻抗而又可表現^有 限制的電阻器,以避免如果其中一個微尖端短路時,不會 有過大的電流通到金屬層18是非常重要的。 曰Es_90100891 Description of the invention (4) ------- _______ The life shot of the amorphous ::: 'When a layer of amorphous silicon film is deposited, the conductivity is in the range of one day. Miscellaneous: In the range between the conductivity of doped n + amorphous silicon, it is necessary to control the conductivity of spar. It can be adjusted according to the amount of phosphorus atoms in the film. In fact, it is very low. When projecting a display element, the elements are in one. For example, the state of two ίί ’so that the emission of electrons will not be hindered. The emission is significantly dry :: The pressure is less than 10-7 Torr. & Avoid the collapse of the two rather large glass panels that make up the inconspicuous parts. System: 31 supports and provides a proper gap between the two panels. For example, in the heart ': shot reveals the gaps of unseen pieces. Long gap supports can also be used for the same purpose. ρίΐ Figure Γ A enlarged cross-sectional view of a conventional field emission display element 10. The emission display element 10 is deposited with a resistance layer 丨 2 on a glass substrate 丨 4, and the typical resistance layer is an amorphous silicon-based film . An insulating layer of dielectric material 6 and metal gate layer 18 are deposited on the resistance layer, and then gold microtips 20 and cathode structure 22 are formed, and the cathode structure 22 is covered by the resistance layer 12, so one layer has resistance The somewhat conductive amorphous silicon layer 2 is placed under the high-insulation layer 16 formed of a dielectric material, such as silicon dioxide (SiO2). Control the resistance value of the amorphous silicon layer 12 so that it does not have excessively high impedance and can represent a limited resistor to avoid that if one of the microtips is short-circuited, no excessive current will flow to the metal layer 18 is very important. Say

486708486708

案號 90100891 五、發明說明(5) :個完整的場發射顯示器結構包括陽 圖所顯示的結構圖30上方。同時必須罝於弟 由而將陰極層22和阻抗層12表示成單一的 形成微尖端20可以由尖端放射電子2 二】層 的正電壓時,同時給予問電極18正電壓:以= 之部分放大橫切面圖。整個媒菸舢 — L圖所不 有2毫平,是脾、毐二 發射顯不元件的厚度大約只 有毛未且將邊板38所封閉住的底部玻璁姑1 4 s如士 璃板36之間的範圍抽真空(如第一B圖所示)。板14和了“玻 第一 A到C圖所示的由微尖端形 件較液晶顯示元件,產生了品質改 然而,微尖端場發射顯示元件最主 時的複雜製造程序。例如,元件中 別是形成微尖端時需要用到利用微 。結果是必須執行許多個光罩程序 顯示器的各種結構功能。所涉及的 程和微影(photolithographic)製 場發射顯示元件的成本。 成的傳 良的平 要的缺 各種不 影方法 才可定 化學氣 矛呈更大 統場發 面板顯 點是製 同層的 的薄膜 義及製 相沉積 大的增 射顯示元 示元件0 造該元件 形成,特 沉積技術 造場發射 (CVD)製 加了製造 同樣在審查中的專财請,代理人文 Attorney’s Docket No) 64,600-0 50 ,苴讀無=為( 相同的受讓人,於專利申請中揭露了一種呈,^與本發明 構和利用奈米管射極為電子放射源的場發射;虽真:管: 造此兀件的方法。三極真空管結構場發射顯‘干不=件和集 土_由^二個電性^屬^Case No. 90100891 V. Description of the invention (5): A complete field emission display structure includes the structure shown in the figure above the figure 30. At the same time, the cathode layer 22 and the impedance layer 12 must be expressed as a single formation. The microtip 20 can emit electrons from the tip. When the positive voltage of the layer is given, the positive voltage of the interrogation electrode 18 is given at the same time. Cross section. The entire media smoke — the L picture does not have 2 millimeters, which is the thickness of the spleen and the second emission display element is about only Mao Wei and the bottom glass seal that is enclosed by the edge plate 1 4 s, such as the glass plate 36 Vacuum between the range (as shown in the first B diagram). The plate 14 and the "glass first A to C" shown in Figures A to C show that the micro-tip-shaped parts have a higher quality than the liquid crystal display element. However, the micro-tip field emission display element is the most complicated manufacturing process. For example, the component It is necessary to use the micro when forming the micro tip. As a result, it is necessary to perform a variety of structural functions of the photomask program display. The cost of the process and photolithographic field emission display elements involved. The absence of various indiscriminate methods can be used to set the chemical air spear to have a larger uniform field. The panel display points are made of the same layer of thin film and phase deposition. The field emission (CVD) system has been added to the manufacturing process, and it is also under review. Attorney's Docket No) 64,600-0 50, read no = = (the same assignee, disclosed a patent in the patent application, ^ Construct and use the nanometer tube to emit field emission from an electron source; though true: tube: the method of making this element. Field emission of a triode vacuum tube structure shows' Don't = component and soil __ ^ Electrical resistance ^ ^ genus

第8頁 486708 &案號 90100891 五、發明說明(6) 陰極。於陰極上形成一 極層由碳、鑽石或類鑽 ,而陰極、電阻率層和 (emitter stack),其 隔開以達到絕緣效果, 極堆疊之上,在介電材 成於覆盖在閘電極上的 顯示元件提出比利用微 點為,利用製造成本相 效率。然而,其仍需要 極和陽極,而其又都必 另外一份同樣在審 為64,60 0-0 56,其讓受 申請中揭露了具二極真 放射源的場發射顯示元 二管結構的場發射顯示 疊形成於第一個玻璃板 玻璃板橫向平行方式形 其例如銀膠,和在電性 玻璃板上有由 於發射極堆疊 。第二個玻璃 錫34,其以有 後塗佈螢光粉 修正Page 8 486708 & Case No. 90100891 V. Description of Invention (6) Cathode. A cathode layer made of carbon, diamond, or diamond-like material is formed on the cathode, and the cathode, the resistivity layer, and the emitter stack are separated to achieve an insulating effect. Above the electrode stack, a dielectric material is formed to cover the gate electrode. The display element is proposed to be more efficient than using micro-dots, using manufacturing costs. However, it still needs a pole and an anode, and it must be another one which is also being examined as 64,60 0-0 56. It allows the application to reveal the field emission display element structure with a two-pole true radiation source. The field emission shows that the stack is formed on the first glass plate in a laterally parallel manner, such as silver glue, and on the electrical glass plate there is a stack due to the emitter. A second glass tin 34, coated with phosphor after correction

高電子 石碳的 奈米管 被絕緣 介電材 料層之 第二個 尖端的 當低的 三個不 須在不 電阻率材 材料形成 射極層合 突起區塊 料層則垂 上再形成 電性絕緣 場發射顯 厚膜印刷 同的電極 同的製程 料層,一奈 於電阻率材 起來形成射 與鄰近的射 直覆蓋於眾 閘電極層, 板上。此種 示器在製造 技術和較高 ,例如陰極 中產生。 米管射 料層上 極堆疊 極堆疊 多的射 陽極形 場發射 上的優 的製造 、閘電 在第一個 區塊形成 絕緣屏障 如氧化銦 板上。然 查中的專利 給與本發明 空管結構和 件,和製造 元件的構成 表面上’而 成’其包括 導電材料層 絕緣材料形 之間,用做 板内部表面 間距分隔的 末32於氧化 申請,代理 相同的受讓 利用奈米管 此元件的方 ’是由多數 每一個發射 了一電性導 上的一奈米 成的許多突 為發射極堆 塗佈一導電 橫條形成於 姻錫層3 4上 人文件序號 人,於專利 射極為電子 法。二極真 的發射極堆 極堆疊以與 電材料層, 管射極層。 起區塊’該 疊間的電子 材料層,例 第一個玻璃 ,當電子由 4^6708High electron stone carbon nanotubes are insulated from the second tip of the dielectric material layer. When the low three do not need to form emitter laminated protrusions on the non-resistivity material, the block material layer hangs down to form electrical properties. Insulating field emission shows a thick film and prints the same electrode and the same process material layer. The resist material is used to form a radiation and the adjacent radiation covers the gate electrode layer and the plate. Such indicators are produced in manufacturing technology and higher, such as the cathode. On the emitter layer of the meter tube, pole stacking, pole stacking, multiple emitters, anode manufacturing, field emission, excellent manufacturing, and switching power supply. In the first block, an insulating barrier such as an indium oxide board is formed. The patent under investigation gives the empty pipe structure and parts of the present invention, and the forming surface of the manufacturing element is formed, which includes the conductive material layer and the insulating material shape, and is used as the last 32 of the inner surface of the board to separate the oxidation application. , The same transferee who uses the nano tube for this component is composed of many protrusions each of which emits a nanometer on the electrical conductance, and a conductive stripe is coated on the emitter stack to form a matte tin layer. 3 4 The person who filed the document has the serial number, and the patent shoots the electronic method. The two-pole true emitter stack is stacked with the electrical material layer and the tube emitter layer. From the block ’s layer of electronic material, for example, the first glass, when the electrons from 4 ^ 6708

光粉3 2的條狀氧化銦錫 光。利用邊板將第一個 成一個内室真空的場發 場發射顯示元件只需製 璃板的第一個電極,和 而在兩個板子間不需要 射極放射出之電子撞擊 不如利用閘電極方法時 案號 _ 五、發明說明(7) 射極堆疊發射出時,每一個塗有螢 34會被激發出紅色,綠色或藍色的 和第二個玻璃板周圍封閉起來,形 射顯示面寺反。此專利申請所揭露的 造兩個電極,例>,塗佈在底部玻 塗佈在頂部玻璃板的第二個電極, 使用到閘極。在此配置中,奈米管 在塗佈螢光粉的頂部破璃板的能量 來的強。 遭遇到I種製= 構=射顯示器時’也會 構場發射顯示器而t果’以三極真空管結 靠度較不易達“為,因此產品可 電層的厚度和電極間的門距二::网的’對於絕緣介 真空管結構場發射顯形須非常精確。以二極 ,的陰極之間的間=二=粉奈米 疋因為奈米管型的場#射 i '、 I,的限制 “。Us/…的摔作二顯不/要產生-個每微米5伏特( _伏特。頂二可ΛΓ所需的驅動電堡小 子中間要達到的上==困難’例如在兩塊板 料於陽極上。〃以及/、可塗佈低電壓的螢光粉材Photo powder 3 2 strip of indium tin oxide light. The use of a side plate to form the first field emission display element with an internal chamber vacuum only requires the first electrode of the glass plate, and the electrons emitted by the emitter without the emitter between the two plates are not as good as the gate electrode. Method case number _ V. Description of the invention (7) When the emitters are stacked and fired, each one coated with fluorescent 34 will be excited by red, green or blue and closed around the second glass plate, forming an emission display surface Temple counter. The two electrodes disclosed in this patent application, for example >, are coated on the bottom glass and the second electrode is coated on the top glass plate, using the gate electrode. In this configuration, the energy of the nano tube breaking the glass plate on top of the phosphor coating is strong. When encountering I system = structure = radiation display, 'field emission display will also be constructed, and t' result is that the triode vacuum tube junction is less accessible, so the thickness of the electrical layer of the product and the door distance between the electrodes are two: : The grid's manifestation of the field emission of an insulated dielectric vacuum tube structure must be very accurate. With the two poles, the interval between the cathodes = two = powder nanometers, because of the limitation of the field of the nanotube type # 射 i, I, " . The fall of Us / ... is not obvious / to produce-5 volts per micrometer (_ volts. The top two can be reached in the middle of the driving electric boy required == difficult ', for example, in two sheets on the anode 〃 and / or low-voltage fluorescent powder

^號 90100 只 οη 五、發明說明(8) 5 一 3發明目的及概述 鑒於上述之發明背景 、 件所衍生的諸多缺點,因 /為解決傳統的場發射顯示元 場發射顯示元件,具有先j报需要設計一種二極真空管型 子間的微小距離而難達成4、°構間單的優點’卻沒有因板 是提供一種場發射顯示元:真空的缺點。本發明的目的即 製造,但是不會有傳統場私如其可以利用厚膜印刷技術來 的缺點。 X射顯示元件利用薄膜沉積製程 本發明的另一目的,係 ,其可以利用厚膜印刷技術 有陰極和陽極。 用以提供一種場發射顯示元件 來製造且在同一塊面板底材上^ No. 90100 only ο 5. Description of the invention (8) 5-3 Purpose and summary of the invention In view of the many shortcomings derived from the above background of the invention, because of / in order to solve the traditional field emission display element field emission display elements, It is necessary to design a micro-distance between two types of vacuum tube tubes, which is difficult to achieve the advantages of 4, ° inter-structural single 'but there is no shortcoming of the plate is to provide a field emission display element: vacuum. The purpose of the present invention is to manufacture, but it does not have the disadvantages of traditional field private use, which can use thick film printing technology. X-ray display elements use a thin film deposition process. Another object of the present invention is to use a thick film printing technology, which has a cathode and an anode. Used to provide a field emission display element, manufactured on the same panel substrate

本發明的再一目的,#用丨、/ M ^ L . ±窃双U肢-L 你用以提供一種二極真空管結構 %發射顯不兀件,JL可以利用戶摇c /、」M〜用知膜印刷技術來製造且將陰 極和陽極兩個電極都做在底部面板上。 本發明的又一目的,係用以提供一種二極真空管結構 場發射顯示元件,其可以利用網版印刷技術(screen printing techniQue)製造而不需要非常嚴謹的對準。 本發明的再一目的,係用以提供一種二極真空管結構 場發射顯示元件,其可以利用厚膜印刷技術形成陰極且利 用薄膜濺鍍技術(thin film sputtering)形成氧化銦錫電Yet another object of the present invention is to use #, / / M ^ L. ± steal double U limbs-L. You use to provide a diode vacuum tube structure with% emission inconsistencies, JL can help users shake c /, "M ~ It is manufactured by the known film printing technology and both the cathode and anode electrodes are made on the bottom panel. Yet another object of the present invention is to provide a field emission display element with a diode vacuum tube structure, which can be manufactured using screen printing technique without requiring very strict alignment. Yet another object of the present invention is to provide a field emission display element with a diode vacuum tube structure, which can form a cathode by using a thick film printing technique and form an indium tin oxide electrode by using thin film sputtering.

第11頁 五、發明說明(9) 極薄膜 案號 90100891 曰 修正 本發明的又一目的,係用以提供一種二極真空管結構 ~發射顯示元件,其利用厚度大的介電層來絕緣陰極和陽 〇 本發明的另一目的’係用以提供一種製造二極真空管 結構場發射顯示元件的方法,其首先使用厚膜技術將奈米 管材料塗佈於陰極,然後利用薄膜濺鍍技術形成陽極的氧 化錄I錫。 本發明的再一目的,係用以提供一種製造二極真空管 結構場發射顯示元件的方法’其利用厚膜印刷技術形成奈 米管射極層於陰極層上,而奈米管射極層是由混和直徑毫 微米的中空碳管、鑽石破纖或類鑽石碳纖於高分子基底之 黏著劑所形成。 一 根據以上所述之目的’本發明提供了一種陰極和 形成在相同底材上的二極真空管結構場發射顯示元件,和 利用厚膜印刷技術製造此二極真空管結構場發射顯示 的方法。 ’干 以ΐίΐΓ的較佳實施例中’提供了 —種陰極和陽極形 成在同面板底材上的場發射顯示面板,其包括了一 個多數的射極堆疊 個電性絕緣板做為第一個面板底材,. Μ 第12頁 ^ου /u〇 案號 五、發明說明(10) 橫列以預設間 個電性絕緣板 個電性絕緣板 絕緣板緊密接 奈求管射極層 的材料形成, 極堆疊間的第 粉末塗佈條列 數的射極堆疊 個多數的螢光 的光,第二個 個電性絕緣板 一個和第二個 的空間。 90100891Page 11 V. Description of the invention (9) Polar film case No. 90100891 It is another object to modify the present invention, which is to provide a diode vacuum tube structure ~ emission display element, which uses a thick dielectric layer to insulate the cathode and Another object of the present invention is to provide a method for manufacturing a field emission display element having a diode vacuum tube structure. First, a thick film technology is used to coat a nano tube material to a cathode, and then a thin film sputtering technology is used to form an anode. The oxidation recorded I tin. A further object of the present invention is to provide a method for manufacturing a field emission display element with a diode vacuum tube structure, which uses a thick film printing technology to form a nanometer emitter layer on a cathode layer, and the nanometer emitter layer is It is formed by mixing a hollow carbon tube with a diameter of nanometers, a diamond fiber-breaker or a diamond-like carbon fiber adhesive on a polymer substrate. According to the above-mentioned object, the present invention provides a cathode and a field emission display element of a diode vacuum tube structure formed on the same substrate, and a method for manufacturing the field emission display of the diode vacuum tube structure by using a thick film printing technology. In the preferred embodiment of "Qian Yi ΐ ΐ ΐ 种 Γ", a field emission display panel in which a cathode and an anode are formed on the same substrate is provided. The field emission display panel includes a plurality of emitters and an electrical insulating plate as a first. Panel substrate, Μ Page 12 ^ ου / u〇 Case No. 5. Description of the invention (10) In the horizontal row, preset electrical insulation boards, electrical insulation boards, and insulation boards are closely connected to the tube emitter layer. The material is formed, and the plurality of emitters of the powder-coated row between the electrode stacks are stacked with a plurality of fluorescent light, and the second electrical insulating plate is provided with a space for the second. 90100891

距,縱向相 上,每一個 的方向放置 觸的介電材 ’第二個多 其條狀塗佈 一個電性絕 於第二個多 中的奈米管 粉末塗佈條 電性%緣板 之上,做為 電性絕緣板 當的等 射極堆 ’且其 料層、 數的導 於以介 緣板上 數的導 射極層 列會被 以有間 第二個 周圍封 距於彼此 豐橫列以 依序包含 第一個電 電條縱列 電材料區 ,形成第 電條縱列 放射出電 激發出紅 距分隔的 面板底材 閉起來形 的距離 橫向平 了與第 性導電 係以實 隔絕緣 二個多上,當子,每 色,綠 方式放 置於第一 行於第一 一個電性 材料層和 質上透明 眾多的射 數的螢光 第一個多 一個第二 色或藍色 置於第一 ’數個邊板將第 成一個真空緊密 ,^陰極和陽極在同面板底材 一個導電條可更進一步包 Ϊ二個多數的導電條和第一個電 :::是由金屬所形成。第-個 =二貝透明的陶竟材料所形成。 固導電材料層是陰極。第一 膠笛對場發射顯示面板而言弟第 極ί;個多數的導電條可以由氧 以由直徑毫微米的中空奈 -—。奈米管射極層亦可ι^ηι 上之場發射顯示 括’塗佈一反射 性絕緣板之間。 和第二個電性絕 對場發射顯示面 個導電層的材料 二個多數的導電 化銦錫所形成。 米管以及黏著劑 以由直徑毫微米 面板發甲 塗佈層灰 反射塗句 緣板可d 板而言, 可以是錦 條是陽極 奈米管射 材料的混 類似中空Distance, vertical phase, each direction of the dielectric material is placed in the direction of the second one, the stripe is coated with a nano tube powder coated strip, the electrical properties of which are second to the second. On the other hand, as the iso-emitter stack of the electric insulation board, and its material layer, the number of the guide-emitter layers on the interface board will be separated by a second peripheral distance from each other. The row contains the first column of electric columns in sequence, forming the column of the first row of electric strips, which emits electricity and excites the red space. The distance between the closed and closed panel substrates is horizontally flat. Isolate the edge more than two, when the child, each color, the green way is placed in the first row of the first electrical material layer and the number of transparent fluorescent light in the first one more second or blue The color is placed on the first side. Several side plates will make the first vacuum tight. The cathode and anode are on the same panel substrate. A conductive strip can further include two majority conductive strips and the first electrical ::: Formed by metal. The first-Erbei is made of transparent ceramic materials. The solid conductive material layer is a cathode. The first plastic flute is the second most important field emission display panel; most conductive strips can be made of oxygen and hollow nanometers with a diameter of nanometers. The nano-emitter emitter layer can also be field-emission display on ^^ ι including coating a reflective insulating plate. And a second electrical absolute field emission display surface, a conductive layer material, and two majority conductive indium tin. Rice tubes and adhesives are composed of nanometer diameter panel nails, coating layers, gray, reflective coatings, and edge plates can be d. In the case of plates, they can be brocades, anodes, and nano tube materials. They are similar to hollow materials.

"+ου /uo -^^90100891 五、發明說明(11) 曰 修正 奈米管的碳;I;,μ 著劑的混合物二鑽管和以高分子為基底之黏 條,可被第一厅形成。母一個第二個多數的螢光粉末塗佈 近腎鄱沾♦:個多數的射極堆疊放射出的電子激發出與鄰 顏色的紅色,綠色或藍色的光。在第 米之間。且的;|電材料層的厚度大約介於5微米和5 0 0微 本發明另 之場發射顯示 個第一個電性 的材料 上,利 的射極 包含了 個導電 條上的 疊中的 色或藍 放置於 形成第 用厚膜 堆疊於 與第一 材料層 第二個 奈米管 色的光 第一個 多的邊板將第 成一個真空緊 一個方向是製造陰極和陽極在同面板底材上 面板的方法,其操作步驟包括,首先提供一 絕緣板做為第一個面板底材,使用實質透明 ^個身數的導電條橫列於第一個電性絕緣板 Ρ刷技術以橫向平行的方式形成第一個多數 第一個電性絕緣板上,每一個射極堆疊依 個電性絕緣板緊密接觸的介電材料層、第一 ,奈米管射極層,形成於第一個多i的導f 二數的榮光粉末塗佈條,其當第一個射極 射極層放射出電子時,會被激發出紅色, ,將第二個電性絕緣板以有間距分隔的方二 電性絕緣板之上,做為第二個面鉍式 一個和第二個電性絕緣板的周圍閉戈眾 密的空間。 封閉起來形 製造陰極和陽極在同面板底材上之場發 方法可進一步包括,提供實質透明的玻璃板面板的 第二個電性絕緣板的步驟。製造方法更包 ·、、、第一個和 _________________〜刷以銀膠做" + ου / uo-^^ 90100891 V. Description of the invention (11) The carbon of the modified nano tube; I ;, a mixture of μ-adhesives, two drill tubes and polymer-based sticky strips, can be used first Hall formation. A second majority of fluorescent powder coating near the kidney: 近: The electrons emitted by the majority of the emitter stack excite red, green or blue light with adjacent colors. Between the meters. And; | the thickness of the electrical material layer is between about 5 microns and 500 micrometers. In addition, the field emission of the present invention shows the first electrical material, and the sharp emitter includes a stack of conductive strips. Color or blue placed in the first layer with a thick film stacked on the second material tube with the first material layer color of the first multiple side plate will be the first vacuum tight one direction is to manufacture the cathode and anode on the bottom of the same panel The method of wood-on-panel method includes the following steps. Firstly, an insulating plate is provided as the first panel substrate, and a substantially transparent conductive strip is arranged on the first electric insulating plate. The first majority of the first electrical insulation plates are formed in parallel, and each emitter is stacked with the dielectric material layer, the first, and the nano-tube emitter layer in close contact with each other through the electrical insulation plates. A plurality of glorious powder-coated strips with multiple guides f, which will be excited red when the first emitter emitter layer emits electrons, and the second electrically insulating plate is separated by a distance. The second side of the electrical insulation plate is used as the second surface bismuth And around a second electrically insulating plate closing all the Ge-tight space. The method of manufacturing the cathode and anode on the same panel substrate may further include the step of providing a second electrically insulating plate of a substantially transparent glass plate panel. Manufacturing methods are more packaged. 、、、 the first and _________________ ~ brushed with silver glue

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案號 90100SQ1 五、發明說明(12) 為第二個電性導電材料層的步驟。& 米管射極層的步驟,其為黏著劑和^ 法更包括印刷奈 管、鑽石碳纖或類鑽石碳纖所組 從宅微米的中空碳 。製造方法更包括連接負電極到位在2之混合物 二個多數的電性導電條的步;極於每:個第 可由氧化銦錫所形成。 夕數的電性導電條 製造 板的方法 數的導電 陰極和陽極形成 ,可進一步的包 條和第一甸電性 刷技術形成第二個眾多的 得每一個 的射極堆 同顏色的 材料或以 法更包括 螢光粉末 弟一個多數的螢 疊放射出的電子 紅色’綠色或藍 鉻(Cr)或叙(Ai) 以一種材料,其 塗佈條的步驟。 在同面 括塗佈 絕緣板 螢光粉 光粉末 ,激發 色的光 塗佈反 例如螢 板底材上 一反射塗 之間的步 末塗佈條 塗佈條, 出與鄰近 。製造方 射塗佈層 光粉,形 之場發射顯示面 佈層於第一個多 驟。利用厚膜印 。其形成方式使 個多數 佈條不 以金屬 製造方 多數的 可被第一 緊鄰的塗 法更包括 的步驟。 成第二個 5一4發明詳細說明: 細扩,發明的一些實施例會詳細描述如下。然而’除了詳 =^,外,本發明還可以廣泛地在其他的實施例施行,且 —範圍不受限定,其以之後的專利範圍為準。 本發明揭露了一種陰極 極真空管結構場發射顯亍 %y成在相同底材上的二 好4:1 % π α、 面板元件,其電子射極由太丰总 材枓所形成。由夺米營姑社& / l 町找田不水官 成本的厚膜印刷技術實現,:了利用低 ink-jet)。 八i括洞版印刷和喷墨印刷( 本場發射顯 的陰極和單一的 材上的新 做在同一 用最低驅 用於本發 和底部面 第二個優 上’例如 組合起來 準程序不 要的步驟 構不僅可 方向看到 極層下塗 只能由頂 穎安排 塊面板 動電壓 明結構 板之間 點則是 做在同 的排列 似其在 。第三 以由頂 。當由 佈一反 部面板 示元件發明 陽極。將陰 有很多的優 底付上,則 ’而對上底 。結果為可 ’使其形成 ’既然將陰 一塊底部底 對準程序就 傳統發射顯 個優點則是 部面板方向 頂部面板方 射塗佈層。 端看提供了 之二極真空管結構利 於同一 然將陰 示元件 限制考 隙物於 易達到 同一塊 面板和 。結果 ’再視 的場發 可以由 要於氧 統發射 極和陽極形成 點。例如,既 通常場發射顯 部面板間距的 運用較大的間 的空間可較容 極和陽極做在 材上,則頂部 變得簡單許多 示元件製造中 ’本發明新穎 看到顯示,也 向看時也許需 這個優點比傳 更大的益處。 用了單一 塊面板底 極和陽極 因必須使 量就不適 頂部面板 高真空。 面板底材 底部面板 為排列對 為非常重 射顯示結 底部面板 化ίδ]锡電 顯示元丛 486708 曰 修正 j號 90100891 五、發明說明(14) 的陰極可非常便利的利用銀膠農 膜形成。陽極則可非常便利 2 f、他導電的膠狀材料或薄 部絕緣板上,如透明導電的材,明導電的材料形成於底 的玻璃板上。氧化銦錫材料實K =塗佈於光學透明 顯示面板的功能。本二極真::二透日f的,因此不會影響 可以利用低成本的製造方法=^ =構%發射顯示元件發明 層和形成陰極的奈米管射極用厚膜印刷銀膠 的螢光粉末塗佈條。 層和利用厚膜印刷當陽極層Case No. 90100SQ1 V. Description of the invention (12) The step of the second electrically conductive material layer. & The step of the emitter layer of the meter tube, which is an adhesive and the method further includes printed carbon nanotubes, diamond carbon fibers or diamond-like carbon fibers. The manufacturing method further includes the step of connecting the negative electrode to a two-position mixture of two majority electrical conductive strips; each of which can be formed of indium tin oxide. The method of manufacturing a conductive plate with a plurality of electrically conductive strips is formed by a plurality of conductive cathodes and anodes. Further strips and the first brush technique can be used to form a second plurality of materials of the same color for each emitter pile or The method further includes the step of coating a strip of fluorescent material with a majority of the electrons emitted by red, green, blue or chromium (Cr) or silver (Ai) with a material. On the same side, it includes coating the insulating plate with fluorescent powder and light powder, and the light of the excited color is coated. For example, a step between a reflective coating on a substrate of a fluorescent plate and a coating layer, which is adjacent to the coating layer. Manufacturing method The coating layer is light powder, and the field emission display surface is laid in the first step. Use thick film printing. It is formed in such a way that the majority of the strips are not made by the metal, and the steps can be further included by the first coating method. Into the second 5-4 invention detailed description: Fine expansion, some embodiments of the invention will be described in detail as follows. However, in addition to the detailed description, the present invention can also be widely implemented in other embodiments, and the scope is not limited, which is subject to the scope of subsequent patents. The invention discloses a field emission display of a cathode vacuum tube structure with a% y formed on a same substrate, a 4: 1% π α, a panel element, and an electron emitter thereof is formed by a Taifung material. This is achieved by the thick film printing technology at the cost of the rice-growing camp & 8i stencil printing and inkjet printing (the cathode of the field emission display and the new material on the single material are used in the same with the lowest drive for the hair and the bottom surface of the second advantage. Not only can the structure be seen in the direction of the polar layer, the top panel can only be arranged by the top panel, the points between the dynamic voltage and the structural panel are arranged in the same arrangement as if they are there. The third is by the top. When the cloth is shown by the opposite panel The element invents the anode. Put a lot of excellent base on the cathode, then 'on the upper base. As a result, it can be' made '. Since the bottom of the female is aligned with the procedure, the traditional emission is a significant advantage. It is the top of the panel. Panel square shot coating layer. The end view provides a bipolar vacuum tube structure which is conducive to restricting the display element to the same panel easily. As a result, the field emission of the re-view can be determined by the oxygen emitter. And the anode to form a point. For example, the distance between the panel of the field emission display panel is usually larger, and the space between the anode and the anode can be made on the material, so the top becomes simpler. In the manufacturing process, the present invention is novel when it is displayed, and when viewed, it may require this advantage to be greater than the transmission. With a single panel bottom and anode, the top panel is not suitable for high vacuum because the amount must be adjusted. Panel substrate bottom panel The display panel is arranged at the bottom of the junction for very re-emission. Δ] Tin electric display element cluster 486708 (Revision j 90100891) V. The cathode of the invention (14) can be conveniently formed by using a silver gel film. The anode can be very convenient 2 f. Other conductive gel-like materials or thin insulating boards, such as transparent conductive materials, bright conductive materials are formed on the bottom glass plate. Indium tin oxide material K = Function of coating on optical transparent display panels . This dipole is true: the second day f, so it will not affect the manufacturing method that can use low cost = ^ = structure% emission display element invention layer and the formation of the cathode of the nano tube emitter with thick film printed silver glue Fluorescent powder-coated strip. Layer and thick film printing as anode layer

本二 疋提供以 底材。然 絕緣板上 刷技術和 狀材料做 的中空的 印刷技術 中是由介 科用薄膜 層,如氧 疊中之介 锡陽極層 佈條,JL 極真空管 一透明玻 後利用厚 。沉積介 喷墨印刷 成的電極 奈米管、 將其形成 電材料層 濺鍍技術 化銦錫層 電層的作 上再沉積 可發射出 結構場發射顯示元件 ,板做為底部絕緣板 膜印刷技術形成一厚 電層的適當厚膜印刷 技術。然後在介電層 層’其例如銀膠,然 鑽石碳纖管或類鑽石 多數的射極堆疊於電 、銀膠層和奈米管射 沉積一層實質透明的 。氧化銦錫層是用來 用疋使1¼'極間彼此絕 一通常為填化合物的 三種基本顏色,例如 發明的 或稱為 厚的介 技術可 上再沉 後再用 的碳纖 極層上 極層所 電性導 做為陽 緣。然 眾多的 紅色, 形成,首先 第一個面板 電層於底部 以是網版印 積以導電膠 直徑毫微米 管,以厚膜 。射極堆疊 構成,然後 電材料電極 極。射極堆 後在氧化鋼 螢光粉末塗 綠色和藍色 第17頁The second erode is provided with a substrate. Of course, the hollow printing technology made of brushing technology and material on the insulating board is made of thin film layers for media, such as interlayers of oxygen, tin anodes, strips, and JL vacuum tubes. Electrode nanotubes printed by ink-jet printing are deposited, and an electro-material layer is sputter-sputtered. The indium-tin layer is deposited on top of the electrode and then deposited to produce a field emission display element. The board is used as the bottom insulating film film printing technology. A suitable thick film printing technique to form a thick electrical layer. A layer of dielectric, such as silver glue, is then deposited on the diamond carbon fiber tube or diamond-like carbon. Most emitters are stacked on top of the electrical, silver glue layer and nano tube to deposit a substantially transparent layer. The indium tin oxide layer is used to make 1¼ 'poles separate from each other. The three basic colors are usually filled with compounds. For example, the invented or thick dielectric technology can be re-sinked and reused. All electrical conductances are referred to as the Yang margin. However, many red colors are formed. First, the first panel has an electrical layer at the bottom, so the screen is printed with a conductive adhesive, a nanometer tube, and a thick film. The emitter is formed by stacking, and then the electrode is made of electric material. Emitter Pile Post-Oxide Steel Fluorescent Powder Coating Green and Blue Page 17

稭由利用 和陽極形成於 的優點,包括 之間,使其形 可利用較厚的 官結構場發射 。更重要的是 器的程序已可 的排列對準製 發射顯示元件 的放在底部底 射顯示器的新 面板方向看到 部面板方向看 佈材料層,而 本二極真 同一塊面 可運用較 成的空間 間隙物是 顯示器, ,製造此 被大大的 程序不再 ,必須將 材的辛米 穎發明更 顯示也可 時,需要 適當的反 空管結 板底材 大的間 可較容 因為間 將其用 新穎的 簡化了 像其在 頂部底 管射極 可提供 以由底 於陽極 射塗佈 構場發 上的新 隙物於 易抽掉 隙物不 於控制 二極真 ,因為 傳統中 材上塗 上。本 的優點 部面板 的氧化 層可利 穎發明 頂部面 空氣而 再像傳 陰極和 空管結 頂部底 利用奈 佈的螢 二極真 是,其 方向看 鋼錫層 用絡或 元件, ,可達 板和底 達到南 統的二 陽極間 構場發 材和底 米管射 光粉精 空管結 不僅可 到。當 下加一 鋁輕易 到报多 部面板 真空。 極真空 的間距 射顯示 部底材 極的場 確對準 構場發 由頂部 想由頂 反射塗 的形成 塗佈於陽極或為氧化銦錫層上的眾多的螢光粉末塗佈 條,父到由多數的射極堆疊發射出的電子激發會發射出紅 色,綠色或藍色的光。每一個螢光粉末塗佈條發射出的光 與鄰近緊鄰的螢光粉末塗佈條發射出的光顏色不同。最後 利用數塊,其例如四塊,材料如玻璃的邊板將頂部和底部 底材的周圍封閉起來形成一個真空緊密的空間。The advantages of using straws and anodes, including between, make it possible to use thicker official field emission. What's more important is that the program of the device can be aligned and aligned. The emission display element is placed on the bottom panel of the new panel. The direction of the panel is viewed from the direction of the material layer. The same surface of the two poles can be used. The space spacer is a display. The process of manufacturing this is no longer large. It is necessary to display the material of Xin Miying's invention. When it is necessary, an appropriate anti-air tube junction plate substrate is needed. It is novel and simplified, as it can provide a new gap on the top bottom tube emitter coating from the bottom to the anode, which can easily remove the gap and not control the dipole, because the traditional Chinese materials are coated on top. on. The advantage of this part is that the oxide layer of the panel can be used to invent the air on the top surface and then be used as the cathode and the top of the empty tube junction. The use of the fluorescein diode of Naibu is really true. The bottom-to-bottom structure of the two anodes in the Southern System and the bottom tube light emitting powder fine tube junction are not only accessible. Adding aluminum at the moment can easily report the vacuum of many panels. The field of the extremely-vacuum-spaced-radiation display substrate is aligned with the structure of the field. It is formed by coating the top surface with a number of fluorescent powder coating strips coated on the anode or indium tin oxide. The electrons emitted by most emitter stacks emit red, green or blue light. The light emitted by each fluorescent powder coated strip is different from the light emitted by the adjacent fluorescent powder coated strip. Finally, several blocks, such as four, are used, such as glass edge plates, to seal the surroundings of the top and bottom substrates to form a vacuum tight space.

第18頁 "+OO/U8Page 18 " + OO / U8

=然將陰極和陽極都形成於底部玻璃底材上,電子由太半 類似反射的方法撞擊在塗 二 雖”、、、疋真的反射觀點,因為電子不是被堅硬的矣 2反射而是受到陽極的吸引,使電子做18〇度的轉、广 :j二圖所顯示。仍應注意的是,在製造的過程中轉,着 :。極無法沉積成如第二圖所示的完美直角長方形,列 膠層上。因此電子有可能從 從!而不是像完美直角長方形的射極只 參考第二圖所,示的本二極真空管 件發明的單-像素50的放大橫切面圖= =極堆疊54於第一個玻璃底材52上所形成象素== 數,射極堆疊5 4是首先㈣厚膜印刷技術沉積形成厚产大 約"於5微米和500微米之間的介電材料⑽。在此所ς的 以大二^思是在所給值的土 1〇%的範圍。該介電材料可 .十疋二=乳化石夕(Silicon oxide)、氮化石夕(silicon n; t # : ; ί : : (ts ^;; ;Ω ΓΓ; Γd e} ^ ^ 材料58,或其他合適的導電膠狀材料;刷:::: 層58利用網版印刷製成任何適當“度,例 如介於5〜1G微米之間的範圍。利用厚膜印刷技街^一 i =約介Γ微米和50微米之間的奈米管射極層60於銀膠 層上,以完成射極堆疊W的製造。 486708 μ 曰 修正 _ 案號 90I00S91 五、發明說明(17) 銀膠或其他適合的導電膠狀材 混和形成,例如銀和以高分子由金屬微粒的 膠塗佈層58是連接到負電極(子未為於基 。在多數的射極堆疊54間所形成的實質為光學二月Τ陰極 :=Jlciear)的導電材料條層62,是用以運载:電行 田做為%極,因此受其影響,並έ士人 電何 58和陽極62之間形成了電場“…了陰極層58,於陰極 上,ί = Ϊ 錫材料形成的多數的導電㈣ 多的術沉積眾多的螢光粉末塗佈條66,眾 ,^末塗佈蜂66可由如磷化合物的螢光粉末所形 二個塗佈條以與鄰近緊鄰的塗佈條發射出不同顏 =的方式,發射出紅色,、綠色或藍色的光。眾多的^ ^塗佈條層64和眾多的導電條62,是利用眾多的介電堆 :極層62可彼此充分的絕緣開來。長度短的眾多 人螢先私末塗佈條66(如第三圖所示),可將其以每一群組 3有二個塗布條的方式排列,如條塊72,74和76,JL分別 2射出紅色’綠色和藍色的光,以構成單—像素元素的 ^此。眾多的螢光粉末塗佈條72,74和76可由第三圖之單 透視圖50更清楚明顯的看出。如此一來,可利用適 二控制從奈米管射極發射出的電子,分別控制每一個像素 :7050來產生有顏色的影像以形成多色彩的影像。不同型 式的螢光粉塗佈材料可形成紅色,綠色或藍色的光。 ^應注意的是’在本新穎的二極真空管結構場發射顯 m 第20頁 曰 _修正 i號 9〇ioosgi 五、發明說明(18) mi二陰極58和陽極62兩者都是做在底部玻璃底 *陽㈣電材科層56的Μ可以適當的控制陰極58 =4伏特二電麼。—般而言,操作電場強度大约介於 母从未4伏特和母微米6伏特之間。例#,以平均操作 強f為每微米5伏特的場發射顯示元件為例,其介電層厚 度是介於10微米和50微米之門,而9 〇,n 倣木之間,而其刼作電壓應該大約介= The cathode and anode are both formed on the bottom glass substrate, and the electrons are impinged on Tu Er's reflection by a method similar to that of reflection, because the electrons are not reflected by the hard 矣 2 but are affected by it. The attraction of the anode causes the electrons to rotate 180 degrees and wide: as shown in the second figure. It should still be noted that during the manufacturing process, the poles cannot be deposited into a perfect right angle as shown in the second figure Rectangle, on the glue layer. Therefore, it is possible for electrons to pass from! Instead of a perfect right-angled rectangular emitter, just refer to the second figure. The enlarged cross-sectional view of the single-pixel 50 invented by this diode vacuum tube fitting = = The number of pixels formed by the electrode stack 54 on the first glass substrate 52 is equal to the number. The emitter stack 5 4 is firstly deposited by a thick film printing technology to form a dielectric layer with a thickness between about 5 microns and 500 microns. The material ⑽. The sophomore thinking here is in the range of 10% of the given value of the soil. The dielectric material can be ten = two = silicon oxide, silicon oxide (silicon n ; T #:; ί:: (ts ^ ;;; Ω ΓΓ; Γd e} ^ ^ Material 58, or His suitable conductive gel-like material; brush :::: layer 58 is made of any suitable degree using screen printing, for example in the range between 5 and 1G microns. Using thick film printing techniques ^ 一 i = 约 介The nano-tube emitter layer 60 between Γ and 50 microns is on the silver glue layer to complete the manufacture of the emitter stack W. 486708 μ Revision_ Case No. 90I00S91 V. Description of the invention (17) Silver glue or other suitable The conductive gel-like material is formed by mixing, for example, silver and a polymer coating layer 58 made of metal particles with a high polymer is connected to the negative electrode (the base is not a base. The majority formed between most of the emitter stacks 54 is an optical two (T cathode: = Jlciear) conductive material strip layer 62 is used to carry: Dianxing Tian as a% pole, so affected by it, and an electric field is formed between Renhe 58 and anode 62. The cathode layer 58, on the cathode, = = 的 most of the conductive material formed by tin material, and a large number of fluorescent powder coating strips 66 are deposited on the cathode. The coating bee 66 may be made of a fluorescent powder such as a phosphorous compound. The two coating strips emit hair in a different way from the adjacent coating strips. Emitting red, green, or blue light. Numerous ^ ^ coated strip layers 64 and numerous conductive strips 62 utilize a large number of dielectric stacks: the pole layers 62 can be fully insulated from each other. Many of the short lengths Human Firefly first coated the strip 66 (as shown in the third picture), which can be arranged in such a way that there are two coated strips in each group 3, such as bars 72, 74, and 76, and JL emits red 2 'Green and blue light to form a single-pixel element. Numerous fluorescent powder coating strips 72, 74, and 76 can be more clearly seen from the single perspective view 50 of the third figure. In this way The electrons emitted from the emitter of the nano tube can be controlled by Shiji, and each pixel is controlled separately: 7050 to generate a colored image to form a multi-colored image. Different types of phosphor coating materials can produce red, green or blue light. ^ It should be noted that 'field emission display m in this novel diode vacuum tube structure is described on page 20_Modified i No. 9ioosgi V. Description of the invention (18) Both mi cathode 58 and anode 62 are made at the bottom Can the M of the glass bottom * anode material layer 56 properly control the cathode 58 = 4 volts. In general, the operating electric field strength is approximately between 4 volts from the mother never and 6 volts from the mother micron. Example # Take a field emission display element with an average operating strength of 5 volts per micrometer as an example. The thickness of the dielectric layer is between the gates of 10 micrometers and 50 micrometers. Operating voltage should be about

=0 =和250伏特之間。在此發現本新穎的二極直空管 約介於5微米和5。。微米之間,而較佳的以圍:J 和100微米之間。 礼固疋,丨πιυ被水 奈 之上, 極層58 米管射 管,鑽 斷裂成 稠度適 〇這些 和50毫 介於30 放射出 元件發 傳統場 米管射極 且與銀膠 通入負電 極層6 0的 石奈米管 眾多小段 合用於厚 奈米管通 微米之間 伏特和5 〇 電子。因 明中所需 發射顯示 層6 0是利用 層或稱陰極 壓時,奈米 形成是利用 或類鑽石碳 ’然後與含 膜印刷技術 常是中空的 。通常需要 伏特之間的 此在本新穎 的操作電壓 元件所需的 厚膜印刷技術 層58形成了射 管射極層60發 厚膜印刷技術 奈米管。首先 有溶劑的膠狀 ,其例如網版 ’且其直徑大 較低的操作電 電壓,來激發 的二極真空管 ’明顯的較低 操作電壓。 沉積於陰極層5 8 極堆疊54。當陰 射出電子68。奈 ’其例如碳奈米 將奈米管枋料弄 物質混和,其濃 印刷或噴墨印刷 約介於30毫微米 壓’其例如大約 奈米管射極材料 結構場發射顯示 於使用微尖端的= 0 = and 250 volts. It was found here that the novel bipolar straight tube was between about 5 microns and 5 microns. . Micron, and preferably around: J and 100 microns. Ligu 疋, 丨 πιυ is over water, the pole layer is 58 meters in diameter, and the drill is broken to a suitable consistency. These and 50 millimeters are between 30 and 50. The radiation element emits a traditional field meter emitter and is connected to the silver glue. Numerous small sections of the stone nanometer tube with an electrode layer of 60 are used for thick nanometer tubes to pass between volts and 50 electrons. Because the required emission display layer 60 in the Ming is to use the layer or the cathode pressure, the formation of nanometer is by using or diamond-like carbon ′ and then with the film-containing printing technology is often hollow. The thick-film printing technology layer 58 required for this novel operating voltage element is usually required. The layer 58 forms a 60-thick film-thick-film printing technology for the nanotube. First, there is a jelly of a solvent, which is, for example, a screen plate, and its diameter is large and the operating voltage is low, so the diode vacuum tube that is excited is significantly lower in operating voltage. Deposited on the cathode layer 5 8 pole stack 54. When Yin emits electrons 68. Nano ', such as carbon nanotubes, mix materials with nano tube materials, and its thick printing or inkjet printing is about 30 nanometers pressure', such as about the nano tube emitter material structure field emission is shown in the micro-tip

第21頁 486708 日 -案號 90100Μΐ 五、發明說明(19) 不米&射極層6 0首先用網版印刷於銀膠層4 $利用硬烤將膠質材料所含的溶劑驅除,且二:=後 射極層。奈米管射極材料通常含有重量百分.,,、聚5該 和80之間的奈米管而苴餘為令 匕大約介於20 ,# 叨〆、餘马3有溶劑的黏者劑0击工乂土仏士 未管混膠為重量百分比大約為5〇的奈米管和重旦^的/丁、 =為50的黏著劑的混和。經過硬烤程序後,夺::二t 或尖銳的端點就從射極堆疊層表面穿透突二=目,尖端 為本新穎的場發射顯示元件的電子發射源。〃功旎乃做 如第四圖本場發射顯示元件發一 面圖所示,多數的奈米管射極堆疊5月二;向=放大平 微米的間隙形成於底部玻璃隹:4 由單壁或多壁中空的太二Λ板5 2/ ?反奈米管材料可 丁、米g形成。奈米管經斷裂鞀床妨 其長度大約介於丨微米和3微米之間。=私序後, 於5毫微米和5〇毫微米之間, ^ 徑大約介 10毫微米時,1县声吉π ^ 田長又為1微米而直徑為 *…Γ 其長度直技比例大約為1〇〇。如第四圖所+ ,不米官射極層54的寬度大約為120微米。 β ’、 t%發射顯示元件由頂部面板方向 氧化銦錫電極層下塗佑也e L Α α π β .、貝不吟而要於 厚+ 佈先反射塗佈層。適當的光反射塗佈 i時,則=1絡形成、。當場發射顯示元件由底部面板方向 因益4 Μ止 町耋佈層。當由兀件底部面板方向看時 因無政射先,而可察覺到其/ 較好的對比。 軚疋件由頂邛面板方向看時有 第22頁 娜708Page 21 486708 Day-Case No. 90100 Μΐ 5. Description of the invention (19) The rice & emitter layer 60 is first printed on the silver glue layer by screen printing 4 $ The solvent contained in the gum material is removed by hard baking, and two : = Back emitter layer. Nano tube emitter materials usually contain 100% by weight of the nano tube between 50 and 80, and the remainder is the adhesive agent that makes the dagger approximately between 20, # 叨 〆, Yu Ma 3 solvent A 0-kilometer mixing tube is a mixture of a nano tube with a weight percentage of about 50% and a weight of an adhesive of 50% by weight. After the hard-bake process, the t: 2 or sharp end point penetrates the second layer from the surface of the emitter stack layer, and the tip is the novel electron emission source of the field emission display element. The work is done as shown in the fourth picture of this field emission display element. Most of the nano tube emitters are stacked on May 2; the gap = magnified flat micron is formed in the bottom glass. 4: Single-walled or multi-walled The hollow wall of the Tai 2 Λ plate 5 2 /? Anti-nanotube material can be formed by Ding, Mg. The length of the nanometer tube through the fractured bed may be between about 1 μm and 3 μm. = After the private sequence, between 5 nm and 50 nm, ^ when the diameter is about 10 nm, the sound length of a county is π ^ The length of the field is 1 μm and the diameter is * ... Γ The length ratio is approximately Is 100. As shown in the fourth figure, the width of the emitter emitter layer 54 is approximately 120 microns. β ’, t% emissive display elements are oriented from the top panel under the indium tin oxide electrode layer and are coated with e L Α α π β. When the appropriate light reflection coating i is used, = 1 is formed. On the spot, the display element was directed from the bottom panel to the 4M stop. When viewed from the direction of the bottom panel of the element, the / good contrast can be noticed because of the involuntary shot first. The file is viewed from the direction of the top panel. Page 22

製造本場發射顯示元件發明時,在不同的材料層沉積 1而要執行無數個後熱聚合步驟。例如,以奈米管射極層 為例’經過網版印刷後必須在溫度大約攝氏45〇度,進行曰 時間大約30〜40分鐘的熱聚合程序。介電層和銀膠層通常 在溫度大約介於攝氏550度和570度之間,進行時間大約介 於30到40分鐘的熱聚合程序。磷化合物材料的螢光粉末塗 7條通常以類似的時間長度,在攝氏57〇度進行後熱聚合 ,序。頂部玻璃板和底部玻璃板可由厚度為〇·7毫米或 耄米的商業材料中取得。頂部玻璃板和底部玻璃板間的距 離通常保持在大約介於1毫米和3毫米之間。 本新穎的二極真空管結構場發射顯示面板發明和製造When manufacturing this field emission display element invention, a number of post-thermal polymerization steps were performed to deposit 1 on different material layers. For example, taking the nano-tube emitter layer as an example ', after screen printing, the thermal polymerization process must be performed at a temperature of about 45 ° C and a time of about 30 to 40 minutes. The dielectric layer and the silver glue layer are usually subjected to a thermal polymerization process at a temperature between about 550 ° C and 570 ° C for a time of about 30 to 40 minutes. Phosphorous compound materials are coated with fluorescent powder. 7 strips are usually post-polymerized at a similar length of time at 570 ° C. The top glass plate and the bottom glass plate can be obtained from a commercial material having a thickness of 0.7 mm or a millimeter. The distance between the top and bottom glass plates is usually maintained between approximately 1 mm and 3 mm. Invention and manufacture of novel novel field emission display panel with diode vacuum tube structure

此面板的方法已經充分的描述在上列敘述和附圖之二 四圖中。 一 J 本發明是以例證方法來做描述,但是應了解的是,所 用的術sf疋意欲用做文字描述的本性而非僅用來做本發明 的限制。 再者,本發明所述之較佳實施例所被重視的是本技術 的技巧可輕易的應用於其他可能的不同的發明。 以上所述僅為本發明之較佳實施例而已,並非用以限 定本發明之申請專利範圍;凡其他未脫離本發明所揭示之 精神下所含A夕莖从於傲# A . A ufe A人+ 、,、The method of this panel has been fully described in the above description and the second and fourth figures of the drawings. The present invention is described by way of example, but it should be understood that the technique used is intended to be used for the nature of the text description and not only as a limitation of the present invention. Furthermore, what is valued in the preferred embodiments of the present invention is that the techniques of this technology can be easily applied to other possible different inventions. The above is only a preferred embodiment of the present invention, and is not intended to limit the scope of patent application of the present invention; all other A contained in the spirit disclosed by the present invention is not included in the A stalk from the proud # A. A ufe A People + ,,,

第23頁 486708 案號90100891 年月日 修正 五、發明說明(21) 專利範圍内。 画 HillPage 23 486708 Case No. 90100891 Month, Amendment V. Description of Invention (21) Within the scope of patent. Painting Hill

的傳統場發射顯示 元 第一 A圖為利用微針尖發射電子 件的放大橫切面圖; 第一 B圖為第一 a 圖傳統場發射顧干$ & 面圖,其包含了陽極和邊彳 二=頦不兀件的放大橫切 運板形成的封閉空間; 第一C圖為第_B圖傳統 圖,其舉例說明了單=f射顯不兀件的部分放大 早一微針尖的結構; 切面 橫 第一圖為本陰極和 元件發明的單一像素的同面板底材上之場發射顯示 人杈切面圖; 發射顯 第三圖為第二圖本場 放大透視圖;及 不元件發明的單一像素的 場發射顯示 第四圖為第二圖本 放大平面圖。 元件發明的單一像索的 主要部分之代表符號:Figure A of the traditional field emission display element is a magnified cross-sectional view of a microneedle-emitting electronic component; Figure B is a first field of Figure A a conventional field emission Gugan $ & 2 = Enclosed space formed by magnifying the cross-section of the inconsistent part; Fig. 1C is the traditional figure of Fig. _B, which illustrates the structure of the part of the single = f-radiation inconspicuous part enlarged by a microneedle earlier. The first cross-sectional view is the cross-sectional view of the field emission display on the same panel substrate of a single pixel invented by the cathode and the device; the third display is an enlarged perspective view of the second view of the field; The field emission of the pixel shows that the fourth picture is an enlarged plan view of the second picture. Symbols of the main parts of the single picture element invented by the component:

切面 10場發射顯示元件的橫 1 2電性阻抗層 、 14玻璃底材 16介電材料的絕緣層 18金屬閘極層 曰Section 10 Transverse of 10-field emission display element 1 2 Electrical resistance layer 14 Glass substrate 16 Insulation layer of dielectric material 18 Metal gate layer

486708 _案號 90100891_年月日_修正 圖式簡單說明 20金屬微尖端 22 陰極 26 電子 2 8 陽極 3 0 場發射顯示元件的放大橫切面 32螢光粉 34 氧化銦錫(ITO) 3 6頂部玻璃板 3 8邊板 50單一像素 52第一個玻璃底材 5 4 射極堆疊 56介電材料層 5 8銀膠層 6 0奈米管射極 62條狀導電材料層 6 4 電場 6 6螢光粉末塗佈條 68 電子 72 紅色 74綠色 76藍色486708 _Case No. 90100891_Year Month Date_Revised Schematic Description 20 Metal Micro Tip 22 Cathode 26 Electron 2 8 Anode 3 0 Magnified Cross Section of Field Emission Display Element 32 Fluorescent Powder 34 Indium Tin Oxide (ITO) 3 6 Top Glass plate 3 8 side plate 50 single pixel 52 first glass substrate 5 4 emitter stack 56 dielectric material layer 5 8 silver glue layer 6 0 nanometer tube emitter 62 strip-shaped conductive material layer 6 4 electric field 6 6 fluorescent Light powder coated strip 68 electron 72 red 74 green 76 blue

第26頁Page 26

Claims (1)

486708 曰 」多正 案號 90100MI 六、申請專利範圍 1 · 一種陰極和陽極在同 裝置至少包含: -材上的場發射顯示面板,該 一:Ϊ一個電性絕緣板做為第-個面板底材. 一個第一個多數的射極板底材, 此的距離置於該第一個電性心:5又間距縱向等距於彼 以横向平行方式置於哕笛 +板上,母一個該射極堆疊 極堆叠依序至少包含= 板,且每-個該射 -個電性絕緣板射極層,且該介電材料層與該第 個第一個多數的電性莫雷戌 料形成於以該介電材料區隔質上透明的材 一個篦-徊夕缸i㈣七緣該小多的射極堆疊之間; 夕 個苐一個夕數的螢光粉末塗佈條形成於該第-個1 多的電性導電條之上,當該第相了H 弟一個眾 未官射極層放射出電子時, #, Γ 藍色的光; 而被激發出一種紅色,綠色或 姑署::ί二個電性絕緣板做為第二個面板底材有間距的 放置於該第一個電性絶緣板上;及 私Ρ1杂t多數的邊板將該第—個和第二個電性絕緣板周圍 封閉起來形成一個真空緊密的空間。 孜门固 ϋΐί專利範圍第1項之陰極和陽極在同面板底材上的 場:射顯示面板,…述該第二個多數的電性導= ^含了-個反射塗佈層在該第二個多數的輯和j 第一個電性絕緣板之間。 $ μ 第27頁 486708 _ 案號 90100SQ1 六、申請專利範圍 3場ΐI請專利範圍第2項之陰極和陽極在同面板底材上的 。發射顯不面板,其中上述該反射塗佈層是由金屬所形成 t申叫專利範圍第i項之陰極和陽極在同面板底材上的 =發射顯示面板,其中上述該第一個和第二個電性絕緣板 疋由一種實質透明的陶瓷材料所形成。 =申睛專利範圍第1項之陰極和陽極在同面板底材上的 射顯示面板,其中上述該第—個電性導電材料層是該 琢發射顯示面板的一個陰極。 申明專利範圍第1項之陰極和陽極在同面板底材上的 :發射顯示面板,纟中上述該第—個電性導電材料層是銀 Lΐ申請專利範圍第1項之陰極和陽極在㈤面板底材上的 劳,射顯示面板,其中上述該第二個多數的電性導電條是 該%發射顯不面板的一個陽極。 , ^如申請專利範圍第丄項之陰極和陽極在同面板底材上 贫發射顯示面板,其中上述該第二個多數的電性導 由氧化銦錫(ΙΤ0)形成。 疋486708 "Duo Zheng Case No. 90100MI 6. Scope of patent application1. A cathode and anode in the same device at least include:-Field emission display panel on the material, the first: an electrical insulation plate as the first panel bottom Material. A first majority of the emitter plate substrate, the distance of this is placed in the first electrical core: 5 and equally spaced longitudinally equal to each other placed on the flute + plate in a horizontal parallel manner, the mother one The emitter stacked electrode stack sequentially includes at least = plates, and each of the emitter-electrically insulated plates has an emitter layer, and the dielectric material layer is formed with the first first majority of electrical Morley materials. Between the transparent material on the dielectric material, a transparent material on the substrate and a small emitter stack; a fluorescent powder coating strip is formed on the first- On more than one electrically conductive strip, when the second phase emits electrons from an unofficial emitter layer of H, #, Γ is blue light; it is excited with a red, green, or extravagance: : Ί Two electrical insulation plates are placed on the first one with a gap as the second panel substrate The electrical insulation board; and the majority of the edge plates of the private P1 heterotectant seal the surroundings of the first and second electrical insulation boards to form a vacuum tight space. The field of the cathode and anode on the same panel substrate in the first scope of the patent: the display panel, the second majority of the electrical conductivity = ^ contains-a reflective coating layer in the first Between the two majority series and the first electrical insulation board. $ μ Page 27 486708 _ Case No. 90100SQ1 VI. Scope of patent application 3 fields ΐI ask the cathode and anode of the second item of the patent scope on the same panel substrate. Emission display panel, where the above-mentioned reflective coating layer is made of metal. The cathode and anode of the scope of patent application item i on the same panel substrate = emission display panel, where the first and second An electrically insulating plate 疋 is formed of a substantially transparent ceramic material. = The radiation-emitting display panel with the cathode and anode on the same panel substrate as in item 1 of Shenyan's patent scope, wherein the first electrically conductive material layer is a cathode of the emission-emitting display panel. It is stated that the cathode and anode on the same panel substrate as in item 1 of the patent scope: the emission display panel. The first electrically conductive material layer mentioned above is silver L. The cathode and anode on the same panel in the scope of patent application No. 1 The display panel on the substrate, wherein the second majority of the electrically conductive strips described above is an anode of the% emissive display panel. ^ If the cathode and anode of the scope of the patent application are in the same panel substrate as the lean emission display panel, wherein the second majority of the electrical conductivity is formed by indium tin oxide (ITO). Bolt of cloth 第28頁Page 28 9 ·如申請專利範圍第1 場發射顯示面板,苴中卜^陰極和陽極在同面板底材上的 微米中空管和一種黏 ^奈米管射極層是-種直徑毫 者M材料的混合物所形成。 ^S_i〇l〇〇891 六、申請專利範圍 I 〇 ·如申請專利範圍第1項 場發射顯示面板,纟中上:J極和險極在同面板底材上的 微求中空碳管該奈米管射極層是—種直徑毫 底之黏著劑材料的混合物所形:。“和種间刀子為基 II ·如申請專利範圍、第1頊 β恭私廉-二4 ^ 員之陰極和%極在同面板底材上的 %發射顯不面板,其中上祕q U 4A八Y上迷該第二個眾多的螢光粉末塗佈 條被該第一個多數的射極玱晶 射出的該種紅色,、綠色❹的電子激發’其所放 被激發所放射出的光的顏色不同。 朱 12. 如中請專利範圍第i項之陰極和陽極在同面板 場發射顯示面板’ I中上述位於該第一個多數的 : 的該介電層的厚度大約介於5微米和5〇〇微米之間。 且 13. —種製造陰極和陽極在同面板底材上的場 板的方法,其步驟至少包含: 不面 提供一個第一個電性絕緣板做為第一個面板底材. 形成一個第一個多數的電性導電條於該第一個電性絕 第29頁 486708 一修正 案號90〗00891_年月 日 六、申請專利範圍 ^ :板上’該第一個多數的電性導電條是一種實質透明的; 形成一個第一個多數的射極堆疊於該第—個電性 板上,利用厚膜印刷技術,該射極堆疊以橫向 —、、E緣 於該第一個電性絕緣板上,且每一個該射極聶二=式置 包含了一個介電材料層、一個第二個電性導 ^至少 個奈米管射極層,且該介電材料層與該第一性㈢和一 緊密接觸; 彳固電11絕緣板 形成一個第二個多數的螢光粉末塗 個多數的電性導電條之上,當該第一個;==該第- 該奈米管射極層放射出電子_,而被激發出 ^豐的 色或藍色的光; 種、、工色,綠 放置一個第二個電性絕緣板以有間距分 該第一個電性絕緣板上做為第二個面板底材;及式置於 利用一個多數的邊板連接封閉該第一個 絕緣板的周圍形成一個真空緊密的空間。 一個電性 二上範圍第13項之製造陰極和陽極在同面板底 材上的%發射顯示面板的方法,更 j甸板底 璃板做為該第—個和第二個電性絕緣板的步ς質透明的玻 15·如申請專利範圍第1 3項之製造险榀知塔代产门 材上的場發射顯示面板的方法穴= 同面板底 導電材料層於銀膠的步驟。 p刷該第~個電性 第30頁9 · As in the case of the first field emission display panel under the scope of the patent application, the micron hollow tube and a sticky nano tube emitter layer of the cathode and anode on the same panel substrate are a kind of M material of diameter A mixture formed. ^ S_i〇l〇〇891 六 、 Applicable patent scope I 〇 · If the patent application scope item 1 field emission display panel, middle and upper: J pole and dangerous pole on the same panel substrate to find the hollow carbon tube The meter tube emitter layer is formed by a mixture of adhesive materials with a diameter of the bottom: "With inter-species knife as the base II · As the scope of patent application, No. 1 顼 β respect privately-two 4 ^ members of the cathode and% pole on the same panel substrate, the% emission display panel, of which the secret q U 4A The Y, Y, the second numerous fluorescent powder coating strips are excited by the red, green electrons emitted by the first majority of the emitter crystals, and the light emitted by the excitation is excited. Zhu 12. The cathode and anode of the item i in the patent application are requested to be in the same panel field emission display panel as described above in the first majority: the thickness of the dielectric layer is approximately 5 microns And 500 microns. And 13. —A method for manufacturing a field plate with a cathode and an anode on the same panel substrate, the steps at least include: not providing a first electrically insulating plate as the first Panel substrate. Forms a first majority of electrically conductive strips on the first electrical insulation Page 29 486708 Amendment No. 90〗 00891_year month day 6, scope of patent application ^: on the board 'the first A majority of the electrically conductive strips are substantially transparent; forming a The first majority of the emitters are stacked on the first electrical board. Using thick film printing technology, the emitters are stacked in a horizontal direction, E, and E are on the first electrical insulating board. The emitter electrode set includes a dielectric material layer, a second electrical conductivity, and at least one nanometer tube emitter layer, and the dielectric material layer is in close contact with the first polarity 一 and 一; 彳The solid electricity 11 insulating plate forms a second majority of fluorescent powder and coats a majority of the electrically conductive strips. When the first one; == the first-the nano tube emitter layer emits electrons_, and It is excited to produce ^ abundant color or blue light; seed, working color, green place a second electrical insulation board to divide the first electrical insulation board with a gap as the second panel substrate And the type is placed by using a plurality of side plates to connect the surrounding of the first insulating plate to form a vacuum tight space. An electrical second upper range of the manufacture of item 13 of the cathode and anode on the same panel substrate% The method of launching the display panel uses the bottom plate and the bottom plate as the first and second Step 15 of transparent insulating board. For example, the method of manufacturing the field emission display panel on the door material produced by the knowledge tower as described in item 13 of the patent application. Cavity = The same layer of conductive material as the bottom of the panel is coated with silver. Step p. Brush the first ~ p.30 1 6 ·如申請專利範圍第1 3項之製造陰極和陽極在同面板底 ^上的場發射顯示面板的方法,更包含印刷該奈米 = 層66半酿? & «ι 勺人該奈米管射極層是一種直控宅微米中空纖維由 ^ 3碳纖、鑽石纖維和類似鑽石碳纖所組成的族群中登 擇和一種黏著劑的混合物。 & 1 *71 6 · If the method for manufacturing a field emission display panel of a cathode and an anode on the same panel bottom ^ as in item 13 of the scope of patent application, further includes printing the nano = layer 66 semi-fermented? & «The spoon emitter layer of the nano tube is a mixture of a carbon fiber, a diamond fiber and a diamond-like carbon fiber, and an adhesive. & 1 * 7 材如申明專利範圍第13項之製造陰極和陽極在同面板底 每^的,發射顯示面板的方法,更包含連接一個負電極到 ^和該第二個電性導電材料層,其位於該多數的射極堆疊 半蹄連接一個正電極到每一該第〆個多數的電性導電條的 18 材上 T請專利範圍第13項之製造陰極和陽極在同面板底 的場發射顯示面板的方法,其中上述該第一個多數的 導電條是由氧化銦錫(ITO)形成。 19 , , ^ 材上、3請專利範圍第13項之製造陰極和陽極在同面板底 層在發射顯示面板的方法,更包含塗佈一個反射塗佈 二*^該第一個多數的導電條和該第一個電性絕緣板之間的 2 Q 材上、t漬專利範圍第13項之製造陰極和陽極在同面板底 的%發射顯示面板的方法,其中上述該第二個眾多的The method of manufacturing a cathode and anode on the same panel bottom as described in item 13 of the patent claims, the method of emitting a display panel, further includes connecting a negative electrode to the second and electrically conductive material layer, which is located in the majority The emitter stack half-hoof connects a positive electrode to each of the 18 materials of the first majority of the electrically conductive strips. The method of manufacturing the field emission display panel with the cathode and anode on the same panel bottom according to item 13 of the patent The first majority of the conductive strips are formed of indium tin oxide (ITO). 19, ^ on the material, and 3, the method for manufacturing the cathode and anode on the same panel as the emission display panel at the bottom of the patent, and further includes coating a reflective coating 2 * ^ the first majority of conductive strips and The method of manufacturing a% emission display panel of a cathode and an anode on the same panel bottom on a 2 Q material between the first electrical insulating plate and the item 13 of the patent scope of the patent, wherein the second plurality of 第31頁 486708 -MM 90100891 _月 __§ 修正 六、申請專利範圍 ’ 螢光粉末塗佈條是利用厚膜印刷技術形成。 21·如申請專利範圍第13項之製造陰極和陽極在同面板底 材上的場發射顯示面板的方法,其中上述該第二個多數的 營光粉末塗佈條被該第一個多數的射極堆疊放射出的電子 激發’其所放射出的該種紅色,綠色或藍色的光是與鄰近 緊鄰的條層被激發所放射出的光顏色不同。Page 31 486708 -MM 90100891 _month __§ Amendment 6. Scope of patent application ′ The fluorescent powder coating strip is formed by thick film printing technology. 21. The method for manufacturing a field emission display panel of a cathode and an anode on the same panel substrate as claimed in item 13 of the scope of the patent application, wherein the second majority of the Yingguang powder-coated strip is irradiated by the first majority. The red, green, or blue light emitted by the electrons emitted by the electrode stack is excited in a color different from the light emitted by the adjacent and adjacent strip layer. 22·如申請專利範圍第19項之製造陰極和陽極在同面板底 材上的場發射顯示面板的方法,更包含以金屬材料塗佈該 反射塗佈層的步驟? 23.如申請專利範圍第13項之製造陰極和陽極在同面板底 材上的場發射顯示面板的方法,更包含以鉻或塗佈該反 射塗佈層的步驟。 24.如申請專利範圍第13項之製造陰極和陽極在同面板底 材上的場發射顯示面板的方法,更包含以一種材料至少包 含磷化合物來形成該第二個眾多的螢光粉末塗佈條的步驟22. If the method for manufacturing a field emission display panel of a cathode and an anode on the same panel substrate as in item 19 of the scope of patent application, further includes the step of coating the reflective coating layer with a metal material? 23. The method for manufacturing a field emission display panel having a cathode and an anode on the same panel substrate as claimed in item 13 of the patent application, further comprising the step of applying chromium or coating the reflective coating layer. 24. The method for manufacturing a field emission display panel with a cathode and an anode on the same panel substrate as in item 13 of the patent application scope, further comprising forming the second plurality of fluorescent powder coatings with a material containing at least a phosphorus compound. Steps 第32頁Page 32
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Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI448196B (en) * 2010-12-16 2014-08-01 Tatung Co Field emission planar lighting lamp

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI448196B (en) * 2010-12-16 2014-08-01 Tatung Co Field emission planar lighting lamp

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