TW476870B - Branch transmission line, driver circuit, and semiconductor test system using same - Google Patents

Abstract

Two-divided transmission line, two-divided driver circuit and semiconductor test system involved therein which are able to reduce unnecessary ringing waveform at each receiving point of two-divided transmission line which is divided at intermediate point of the line that is driven at one end of one-transmission line, are provided. For this aim, two-divided transmission line for providing predetermined quality of waveform signal at first receiving point and second receiving point, having serial terminated register, third transmission line with predetermined characteristic impedance, and first and second transmission line each of which has 2 times of third transmission line's characteristic impedance, wherein the end of third transmission line is connected at the common end of first and second transmission lines and fast driving waveform signal is applied at the other end of third transmission line through the serial terminated register toward each receiving point of first and second transmission lines, comprises waveform improving means between the receiving point of first transmission line and the receiving point of second transmission line.

Description

A7 A7 Printed by the Consumer Cooperative of the Ministry of Intellectual Property Bureau

V. Description of the Invention (i) This month is about the signal driven from the driving end of the transmission line. When 2 points are added to the money, one of the waveform signals received by the two ends of the two transmission lines can be reduced. Useless oscillating waveforms to obtain more loyal H Tiger's 2-knife transmission line, two-branch drive circuit, and semiconductor test equipment using this transmission line. ^ Firstly, the schematic diagram of the bifurcated driving circuit used in the semiconductor test device shown in Fig. 4 is as follows. In this case, the bifurcation driving circuit divides the transmission line into two branches on the way of the transmission line. At the same time, the terminal form of a transmission line includes a parallel terminal and a series terminal. In this case, the resistance is connected in series with the transmission terminal side. Furthermore, the 'semiconductor test device' is a device for f, whose technology is well known, so the description of the overall system architecture is omitted. This semiconductor test device has a multi-channel driver. However, when measuring most time lapses at the same time, the limited number of driver channels is sometimes not enough. If a 2-div drive circuit is used at this time, sometimes the number of components that can be tested can be doubled. The main components of FIG. 4 include the pulse signal source ⑽ 'driver DR1, series termination resistor TR2, third transmission line ⑽, first transmission line CB1, second transmission line CB2, and 2 units under test. The pulse signal source 100 in a semiconductor test device is used to generate a test pattern required for testing a DUT, such as a test pattern generating device and a waveform shaper. Driver DR1 will be driven by the semiconductor test device with high-level voltage and low-level VIL voltage to convert the logic signal to a high-speed drive with a certain amplitude voltage -------- ^ --------- e (Please read the back first Please pay attention to this page before filling in this page) This paper size is applicable to China National Standard (CDS) A4 specification (21〇X 297 public love) 4 476870 A7

476870 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the Invention (3) One end of the line CB2 is connected to the third transmission line CB3. Furthermore, of course, it is properly connected so that the characteristic impedance of this connection point does not occur discontinuously. Two DUTs are the same component and are installed in a contact-dedicated socket (connector) in an information processing device for use, for example. The distance between two DUTs varies depending on the system, but is close to, for example, about 10 cm. The 1C pin terminal connected to one DUT is called the first receiving terminal, and the other is called the second receiving terminal. The two receiving ends of the DUT respectively have the input capacitance of the DUT and the stray capacitance of the 1C socket. The picofara (j) distributed capacitances Csl, Cs2. Next, the unsuitability shown in FIG. 3 will be explained. In Figure 4, the path from 2 points to the first receiving end is called PASSlf, the double path is called PASSlr, the path from 2 points to the second receiving end is called PASS2f, and the double path is called PASS2r. 3 Figures A, B, and C are waveform distortions at the receiving end. The receiving waveforms of Figure 3 on one side are the two delays from the two branch points of the transmission line in Figure 4 to the receiver. Tdl and Td2 are the same delay amount. An example of receiving waveforms at the two receiving ends at this time. This is an ideal receiving waveform without any problems. That is, the waveform propagation at this time is approximately totally reflected from both receiving ends, completely in the same phase, and the same voltage returns to 2 points. Therefore, the two returned signals end directly through the third transmission line CB3 at the termination of the series termination resistor TR2. The receiving waveforms of Figure 3A and B of the other side are from the 2nd branch point to the receiving end of Figure 4 1 Broadcast delay amount Tdl of transmission line CB1, and When the propagation delay amount Td2 of the second transmission line CB2 is a slightly different propagation delay amount, the paper size applies the Chinese National Standard (CNS) A4 specification (210 X 297 mm) 6 ----------- --------- Order ------ (Please read the precautions on the back before filling out this page) 476870 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs Is an example of the oscillating waveform of one of the two receiving ends at this time (refer to Fig. 3A) and the oscillating waveform of the other (refer to Fig. 3). The difference in the amount of propagation delay may be that even with the same length The same cable was cut due to the delay difference caused by the non-uniformity of the welding end of the electrical winding. At the same time, "even though the first transmission line CB1 and the second transmission line CB2 have the same propagation delay amount", but the contactor (IC socket, etc.) ) And other stray capacitances, or stray capacitances Csl, Cs2 generated by components with different input capacitances (manufacturing batch, manufacturer, etc.) The same oscillating waveform is generated. The oscillating waveform of Fig. 3 will be explained again. At 2 points of divergence, the drive waveform signal sent by the driver is 2 points of divergence, and the two receiving ends go back and forth, and total reflection occurs and returns separately. At this time, the waveform propagation returns to the 2 points of divergence with different phase relationships. 3 The transmission line CB3 is transmitted to the transmission line of the other party (the first transmission line CB1, the second transmission line CB2) outside the series terminating resistor TR2. The result of repeated occurrence of this situation is' Figure 3A Oscillation waveforms of B and B. The oscillation amplitude of this figure (refer to Figure 3D) is related to the phase difference and the passing rate of the waveform. The oscillation period (refer to FIG. 3E) is related to the one-way approach PASS 1 f and the double-pass PASSlr ’the other-way approach pASS2f and the double-pass PASS2r. For test implementation, in recent years, it has been necessary to generate a waveform that applies a higher speed (eg, 0.2 nS / V) for a South-speed device operating at a frequency of hundreds of MHz or more. With this, the slight phase difference mentioned above also becomes a large oscillation amplitude. The edge interval of the pulse will also be close, so the amplitude of the oscillation (refer to Section 3 ------- ^ ---- Shang -------- Order --------- (please first Read the notes on the back and fill in this page) 476870 A7 V. Description of the invention (5) Θ) f. The next edge of Xianyue J will arrive. Therefore, although it is stipulated in Daigoji Temple, the influence of the oscillating waveform of the leading and trailing edges of the previous pulse will still be described and the waveform will be changed (refer to Figure 3, F, G). As a result, the edge timing of the leading edge of the trailing edge / the trailing edge changes as shown in FIG. 3 (a). This situation is not ideal for semiconductor test equipment that requires timing accuracy.

The above-mentioned oscillating waveforms are generated, and especially when testing high-speed components, it is difficult to apply appropriate test waveforms to the DUT. The reason is that it is very inappropriate to maintain the performance of component testing. In the conventional technology explained above, a high-speed pulse signal is transmitted by one transmission line, and the two-divided transmission line in the form of two-division transmission to two receiving ends on the way is prone to generate useless oscillation waveforms. This will become a distorted waveform at the receiving end, making the timing of the edges of the waveform worse. This is a very difficult practical difficulty. Therefore, the problem to be solved by the present invention is to provide a method that can reduce the useless oscillation in the received waveform signal at the receiving end of the two transmission lines on the receiving end by reducing the signal driven from the driving end by one transmission line on the way. Waveform bifurcated transmission line, 2-branched drive circuit and semiconductor test equipment used. Intellectual Property Bureau employee consumption No. 1 'In order to solve the above-mentioned problem, the structure of the present invention is that a third transmission line CB3 (for example, a coaxial line or a microwave strip line) provided with a series termination resistor TR2 and a certain characteristic impedance is provided. 3 The characteristic impedance value of the transmission line CB3 is twice the characteristic impedance value of the first transmission line cm and the second transmission line CB2, and one end of the series termination resistor TR2 is connected to the third transmission 1 The paper size applies to the Chinese National Standard (CNS) A4 size (210 X 297 mm)

I 476870 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 -------_ _ V. Description of Invention (6) " The -end of line CB3, and the other end of the third transmission line CB3 are connected to 1 transmission line CB1 and the second transmission line CB2 are divided into two ends, and the other end of the transmission line CB1 (called the receiving end) and the other end of the second transmission line CB2 (called the second (Receiving end), the high-speed driving waveform signal is applied from the other end (referred to as the driving end) of the series termination resistor TR2 of the above line, and is distributed to the two ends of the first and second receiving ends via a 2 distribution to supply a certain quality The two-division transmission line of the waveform signal is provided between the two ends of the receiving end of the first transmission line CB1 and the second transmission line CB2 with a structural member connecting the waveform improving member 10 to improve the quality of the receiving waveform at the receiving end. As its characteristic. According to the present invention, it is possible to realize that when a tiger driven from the driving end of one transmission line is added with 2 points on the way, it can reduce the 2 points of the unnecessary oscillation waveform in the received waveform signals at the receiving ends of the two transmission lines. Transmission line. Secondly, in order to solve the above-mentioned problems, the structure of the present invention is that a third transmission line CB3 (for example, a coaxial line or a microwave strip line) having a certain characteristic impedance is provided with a driver, a series terminating resistor D, and a certain characteristic impedance. The transmission impedance of transmission line CB3 is twice the characteristic impedance value of transmission line CB1 and second transmission line CB2. The driver can accept the input waveform signal and supply the buffered driving waveform signal to the series termination resistor TR2. At one end, the output impedance of the driver and the series termination resistor TR2 constitute a certain impedance for the third transmission line CB3 to become a series termination. The other end of the series termination resistor TR2 is connected to one end of the third transmission line CB3, and the other of the third transmission line CB3. One end is connected to the first transmission line cB 1 and the second transmission respectively. The paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm). (Please read the note on the back? Matters before you fill out this page) Gift 9 476870 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 ----------- B7__ V. Description of Invention (7) Send Line CB2 of the two lines The other end of the "dedicated transmission line CB1 (referred to as the first receiving end) and the other end of the second transmission line CB2 (referred to as the second receiving end), from the output end (drive) of the above driver The terminal generates a high-speed driving waveform signal, and transmits the 2 branched driving circuit that supplies a waveform signal of a certain quality to the two ends of the first receiving terminal and the second receiving terminal through 2 distributions. The first transmission line CB1 and the second transmission line CB2 Between the two ends of the receiving end, there are structural members connected to the waveform improving member 10 to try to improve the quality of the received waveform and its characteristics. Figure 5 (b) shows the solution of the present invention. A characteristic of the transmission line or the above-mentioned bifurcated driving circuit is that a form of the waveform improving member 10 connected between the two receiving ends is a fourth transmission line having the same characteristic impedance as the characteristic impedance value of the first transmission line CB1. CB4 (such as a coaxial line or a microwave strip line). The above-mentioned two-division transmission line or the two-division driving circuit is characterized in that one form of the waveform improving member 10 connected between the two receiving ends is, A resistance element having an impedance of less than a fraction of the characteristic impedance value of the first transmission line CB1 (for example, less than one-fifth). The characteristic of the above-mentioned two-distribution transmission line or the two-distribution drive circuit is that it is connected between two receivers. One form of the waveform improvement member 10 between terminals is a capacitive element having an impedance of a fraction of a characteristic impedance value of the first transmission line CB1 (for example, less than one-fifth). Figure 5 (c) shows Means for Solving the Problem The characteristic of the above-mentioned two-division transmission line or the two-division driving circuit described above, one form of the waveform improving member 10 connected between the two receiving ends is: this paper standard meaning + Megunitsu standard (CNS ) A4 size (21G x 297 mm 10 ^ -------- ^ ------ C Please read the notes on the back before filling out this page} 476870 A7

A7 B7

Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs

The above-mentioned semiconductor test apparatus is characterized in that the waveform improving member is connected between two contactors corresponding to the same IC pin of two test elements tested in the semiconductor test apparatus by electrical contact. Refer to the schematic diagram of the bifurcated transmission line in Figure 1, the principle of the bifurcated drive circuit in Figure 2 (2), the waveform distortion diagram at the receiving end in Figure 3, and the three forms of the waveform improvement component in Figure 5. Examples illustrate the invention as follows. Moreover, the components corresponding to the traditional architecture are marked with the same symbol. First, the architecture of the present invention will be described. Fig. 1 is a structure of a 2-divided transmission line. The main components are: a pulse signal source 100, a series termination resistor TR2, a third transmission line CB3, a first transmission line CB1, a second transmission line CB2, and a waveform improvement component ⑺. At this time, the loyal waveform signal transmitted to the two ends of the first receiving end and the second receiving end is a driving waveform signal. This is achieved by adding a waveform improvement member 10 to the conventional architecture. The other components are the same as those of the traditional ones, so the description is omitted. Furthermore, it is assumed that stray capacitances Csl and Cs2 are present at the input of the device or component receiving at the first receiving end and the second receiving end, but a load having a resistance component other than the stray capacitance may be used. However, its resistance value must be, for example, 10 k Ω or more, which is a practically large value compared with the characteristic impedance of a transmission line of 100 ω. The waveform improving means 10 is connected between both ends of the receiving end of the first transmission line Cb1 and the second transmission line CB2. An example of the waveform improving member 10 is to use the same characteristic impedance as the characteristic impedance value of the first transmission line CB 1, for example, the 1st

This paper size applies to China National Standard (CNS) A4 (210 X 297 mm)

«^ -------- tr ------ (Please read the precautions on the back before filling out this page) 476870 Five A7 、 Instructions (1〇) 4 Transmission line CB4. The transmission delay of the fourth transmission line CB4 is not limited, as long as the two receiving ends can be connected. Of course, this transmission line may use either a coaxial line or a microwave strip line. Next, referring to Fig. 1 and Fig. 3, the waveform improvement by the above-mentioned structure will be described. It is assumed that the propagation delay amounts of the first transmission line CB1 and the second transmission line CB2 are different. As shown in FIG. 1, one of the circulation paths Lp 1 is a path in the order of the first transmission line CB1, the fourth transmission line CB4, and the second transmission line CB2, and the other circulation path LP2 is in accordance with the order 2 transmission line CB2, 4th transmission line CB4, 1st transmission line CB1 in the order of the order. Because the fourth transmission line CB4 is added in the present invention, unlike the traditional reflection at the two receiving ends to return to the 2 branch point, it forms a circular path around a circular path LP1 and LP2 to return to the 2 branch point. It should be noted here that both the loop paths LP1 and LP2 pass through the same transmission line. Therefore, the propagation delays of cyclic paths LP1 and LP2 are the same. This means that even if the propagation delay amounts of the first transmission line CB1 and the second transmission line CB2 are different, when the two driving waveform signals allocated at the 2nd branch point 2 return to the 2nd branch point through a cycle, Both signals always return at the same timing. As a result, the useless oscillating waveforms shown in the traditional Figure 3A and B will not occur, and the present invention can obtain the ideal shown in Figure 3C at the two receiving ends of the first receiving end and the second receiving end. The waveform is an advantage that should be particularly emphasized. In addition, the connection point of the fourth transmission line CB4 is preferably an ideal circular form that connects the endpoint of the J receiving point and the endpoint of the second receiving point, ----------- Packing -------- Order ------------ ^ 9. (Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 476870 A7 V. Invention Note (11) When printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs but connected to a few places away from the endpoint, the useless oscillation waveform is extremely small, so there is no practical problem. Next, referring to Fig. 5, another specific example of the waveform improving means 10 will be described. FIG. 5 (a) is a conceptual connection diagram of the waveform improving member 10. Fig. 5 (1 ^ is equivalent to the equivalent circuit of Fig. 1. As mentioned above, the driving waveform signals allocated to the first transmission line cbi and the second transmission line CB 2 only need to return after one cycle. Fig. 5 ( An example of the architecture of c) is the insertion of a capacitor C1 that can pass high-frequency components in series on the fifth transmission line cB5 or anywhere on the line. This is because from the standpoint of the oscillating waveform, the DC component or The low-frequency components can be ignored without deteriorating the waveform. That is, the high-frequency components corresponding to the passing rate of the edge or trailing edge of the waveform can be passed in a loop. Therefore, it is also possible to insert the passing rate of the corresponding edge in series as required. A capacitor with a certain capacitance value, for example, about 1000 pf. At this time, it will also return a waveform with the same amplitude at 2 points at the same time, and no oscillating waveform will be generated, so there is no problem in practical use. The structure example of Figure 5 (d) is, Inserting in series on the fifth transmission line cB5 or at any place on the line can make the assigned driving waveform signal have a resistance value enough to pass by%. For example, For a transmission line with a characteristic impedance of 丨 〇〇, it is in the form of, for example, a resistor R1 of 10 Ω or less below / 5. At XI, it will also return a waveform with the same amplitude at 2 points at the same timing, which will not produce uselessness. Oscillation waveform, so there is no problem in practice to use medium energy Ω

----------- Install -------- Order --------- ^ 9. (Please read the precautions on the back before filling this page) 476870

Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of the invention (12). If necessary, use the capacitor C1 in Figure 5 (c) and the resistor r 1 in Figure 5 (d) to improve the waveform. Component 1 〇. Furthermore, in Figure (b, c, and d), if the two receiving ends are close to a few millimeters, and the waveform deterioration of the two receiving ends is practically no problem, you can replace the fifth transmission line CB5 with a single line if necessary. . A specific example of the application of the above-mentioned two-division transmission line is shown in FIG. 2 and is an example of a drive channel provided in a pin electronic circuit of a semiconductor test device. That is, the output terminal of the driver DR1 of the pin electronic circuit, and the corresponding 1 (: between pins of the two GUTs connected to this output terminal, are allocated to the information processing device or detection via a working board or a fixed frequency connector. The two-division transmission line of the device's contact points. As described above, because of the application of the present invention, the waveform of the driver DR1 can be directly applied to 〇1; the IC pin of Ding. As a result, excellent waveform quality can be obtained. It is a great advantage to implement the component test. Therefore, it is necessary to improve the component test quality of the semiconductor test device, and further improve the accuracy of timing measurement. As can be understood from the foregoing, the present invention can obtain the following effects: 0 as above In the description, according to the present invention, because a structure is provided that has a structure that connects a waveform improving member between both ends of the receiving end of the first transmission line CB1 and the second transmission line CB2, it is allocated at 2 points 2 When both sides of the driving waveform signal return to the 2 points after one cycle, the two signals will return with the same timing, 0 will not receive the first! Transmission line CB1 The effect of the difference in the transmission delay amount of the second transmission line CB2. As a result, it is possible to obtain and eliminate useless oscillation waveforms, and to use good waveforms. ----------- • Install -------- Order ---- (Please read the notes on the back before filling this page) 15

The advantages of quality or timing confessions to both receivers deserve special emphasis. If the present invention is applied to a driving channel of a pin electronic circuit of a semiconductor test device, the component test quality of the semiconductor test device can be improved, and the timing measurement accuracy can be further improved. Therefore, the technical effect of the present invention is great, and the industrial economic effect is also great. Brief Description of the Drawings Figure 1 is a schematic diagram of a bifurcated transmission line of the present invention. Fig. 2 is a schematic diagram of a bifurcated driving circuit of the present invention. Figure 3 is a diagram illustrating waveform distortion at the receiving end. Fig. 4 is a schematic diagram of a bifurcated driving circuit used in a conventional semiconductor test device. Fig. 5 is an example of three forms of the waveform improving member of the present invention. Component number comparison ^^ 装 -------- Order ---- (Please read the precautions on the back before filling this page)

I ϋ I I

S Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 100. Pulse signal source 10 ... Waveform improvement component CB1 ... First transmission line CB2 ... Second transmission line CB3 ... Third transmission line CB4 ... 4Transmission line TR2 ··· Series termination resistors TD1, TD2, TD3 .. · Propagation delays Csl, Cs2 ··· Stray capacitance DR1 ··· Driver This paper standard applies to China National Standard (CNS) A4 specification (210 X 297 mm) 16

Claims (1)

A8 B8 C8 476870 ΦΜ, -------- ^ --------- ^ 91. (Please read the precautions on the back before filling out this page) Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A8 B8 C8 D8 6. The scope of the patent application is called the first receiving end) and the other end of the second transmission line (called the second receiving end), and a high-speed driving waveform signal is generated from the output end (driving) end of the driver. After 2 is allocated, a waveform signal of a certain quality is transmitted and supplied to both ends of the first receiving end and the second receiving end, and is characterized in that two signals between the first transmitting line and the receiving end of the second transmitting line are provided. Between the terminals, there is a constituent member connected to the waveform improving member to try to improve the quality of the received waveform at the receiving end. 0 If the bifurcation transmission line of the first patent application scope or the bifurcation drive of the second patent application scope or the second bifurcation driver of the second patent application scope, the waveform improvement component connected between the two receiving ends has the characteristic impedance of the first transmission line The fourth transmission line with the same characteristic impedance. 4_If the 2 branch transmission circuit of the scope of the patent application or the 2 branch drive circuit of the scope of the patent application, the waveform improvement component connected between the two receiving ends is the characteristic impedance value of the first transmission line. Resistive element with a fraction of a resistance. 5 · If the 2 branch transmission circuit of the first patent application scope or the 2 branch communication drive circuit of the second patent application scope, the waveform improvement member connected between the two receiving ends has the characteristic impedance value of the first transmission circuit. Capacitive element with a fraction of an impedance. 6 · If the two-distribution transmission line in item 丨 of the patent scope or the two-distribution drive circuit in item 2 of the patent application scope, the waveform improvement member connected between the two receiving ends has a characteristic impedance with the first transmission line The same fifth transmission line and a capacitive element having an impedance of a fraction of a characteristic impedance value of the fifth transmission line. This paper is scaled to Gus Family Standard (CNS) A4 (21 × 297 mm 3 18-Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A8B8C8D8 For example, the bifurcation transmission line in the first patent application scope or the bifurcation drive circuit in the second patent application scope, the waveform of the connection between the two receiving ends is changed. The component 'is a resistance element having a fifth transmission line having the same characteristic impedance as that of the fifth transmission line and a resistance having a fraction of a fraction of the characteristic impedance value of the fifth transmission line. 8 · If the bifurcated transmission line in item 丨 of the patent application scope or the bifurcated drive circuit in item 2 of the patent application scope, the waveform improvement component connected between the two receiving ends is the drive for the high frequency component at the 2 divergence point. The waveform signals are propagated through the two receiving ends and the waveform improvement component, and return to the transmission line of the 2 points at a circle. For example, the bifurcated transmission line in item 1 of the patent scope or the bifurcated drive circuit in item 2 of the patent application scope, the third transmission line, the first transmission line, and the second transmission line are coaxial lines or microwave strip lines. 10. If the bifurcated driving circuit of item 2 of the patent application scope, the connection target connected to the first receiving end 'second receiving end is a device under test (DUT) of a semiconductor test device. 11. A semiconductor test device, characterized in that a 2 branch transmission line is suitable for the output terminal of the drive channel to the pin electronic circuit of the semiconductor test device, and between the corresponding same pins of the two DUTs connected to the drive channel. Distribution of signals. 12. If the semiconductor test device according to item 11 of the patent application scope, the waveform improvement member is connected between two contactors corresponding to the same 1C pin of the two tested components tested by the semiconductor test device electrically. I --- (Please read the note on the back? Matters before filling out this page) Order ---- s'. This paper size applies to China National Standard (CNS) A4 (21G x 297 public love) 19