TW475232B - Load port calibration device - Google Patents

Abstract

A load port calibration device is disclosed, which is suitable for use in the load port having three positioning pillars toward the predetermined direction calibrated by laser instrument. The device comprises: a position member having three positioning straight holes installed on said positioning pillar; an alignment member installed on said positioning member and having a straight hole for horizontal calibration along the direction perpendicular to said predetermined direction through the alignment member, and having a straight hole for vertical calibration along said predetermined direction connected to said straight hole for horizontal calibration; a translucent mirror installed at the interconnection between said straight hole for horizontal calibration and said straight hole for vertical calibration.

Description

475232 V. Description of the invention (1) The present invention relates to a load port calibration device 5 and, in particular, to a load port calibration device by radiating light / correcting the position of a load port. ..... The current OHT system (Over Heaci Transport System) is used to place goods (FOUP) on the load port (10ad port), where F0UP contains many wafers. Only when F〇up is accurately placed on the load “oad p0rl”, can the subsequent automatic control be continued. When the position of F0UP in the load port is inaccurate, the entire manufacturing process will be stopped due to errors in the flow. No matter in time or production, it will cause unnecessary waste. Therefore, it is very important to locate the load port in the correct position. Therefore, before each machine starts operation, the load port must be accurately positioned for subsequent operations. 〃 As shown in Figure 1, Figure 1 shows the appearance of the load port. The load chase has three positioning pillars 11, and Ling receives F0UP transmitted by the 甴 HT system. The above-mentioned F0UP must accurately match the above-mentioned positioning pillars in order to stably carry the above-mentioned F0UP. Therefore, the correction of the positioning of the load port 10 is very important. At present ^ For the method of calibrating the load port, the general method is to set a dispute point at load port #, and then use the laser beam that has been positioned at the correct position as a reference to correct the above-mentioned center point to the point where the laser beam passes. Position to complete the calibration process. In particular, the above laser beams are emitted in the vertical and horizontal directions, in other words, if the laser beams pass through the laser beams respectively, the calibration procedure is completed. However, in the current calibration process, the corrector is using eyesight to evaluate whether the load port has been positioned in the correct position. Of course, using this method

0503-5749TWF.ptd 475232 V. Description of the invention (2) The result is not accurate. It is more convenient and accurate for the whole system. It is forged in this device. 'This load is located in a predetermined position. The beam cannot be positioned to the more accurate calibration. In order to obtain the upper position, it is suitable to include: a positioning post, wherein the above-mentioned positioning extends through the above-mentioned alignment, and enters the horizontal alignment straight hole with the above-mentioned horizontal alignment two injection ends to pass through the second laser light. For the straight calibration of straight holes and a smooth way, the above calibration is required during calibration of this port. The purpose of the simple result description consists of the laser component, the positioning straight component, the horizontal straight hole of the component, and the vertical input end of the component. There are three fixed straight holes at the upper input end, and the vertical upper hole extends to the vertical direction and the above. The light-transmitting anti-communication makes the time inverse from the mirror. As important as above. Because 璋. The purpose is to provide an H. When the above-mentioned correction is negative, the working procedure representing the load port is positive. A load-position pillar is provided; a pair of predetermined calibration mirrors are aligned along the upper straight to use the above-mentioned smoothing system fee. Many of them are correct to correct the load. The main purpose of the device is to adjust the traditional calibration when the calibration beam is passed through the straight hole. Straight calibration straight hole with the first incident end light; and a laser light and the transparent reflection of the calibration straight hole. To correct this, the load port must be calibrated with the load port to determine the hole 'if the laser is not correct' and It is possible to obtain a calibrated load port. The positioning support member described above is provided with a straight hole in the predetermined direction, and the collimation hole is provided in the vertical reflection to the incident end of the water pattern. Description

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In order to make the above-mentioned objects, features, and advantages of the present invention more comprehensible, a preferred embodiment is given below in conjunction with the accompanying drawings for detailed descriptions such as:-Illustration: Figure 1 shows the load port Appearance drawing. FIG. 2 is a perspective view showing the appearance of a load port calibration device and a load port according to an embodiment of the present invention. FIG. 3 is a perspective view showing an alignment member 33 according to an embodiment of the present invention.

Explanation of symbols • 10 ~ load port 11 ~ positioning post 20 ~ load port 21 ~ positioning post 30 ~ positioning member 31 ~ positioning straight hole 32 ~ predetermined direction 33 ~ alignment member 34 ~ horizontal alignment straight hole 341 ~ first injection Terminal 342 ~ output

3 5 ~ Vertical alignment straight hole 351 ~ Second injection end

0503-5749TWF.ptd Page 7 475232

V. Description of the invention (4)

Ml, 362 '363 ~ laser light 37 ~ light-transmitting mirror 丨 Embodiments:! Refer to FIG. 2, which shows the perspective of the appearance of the load calibration device and load port 20 according to the embodiment of the present invention. Illustration. , ≪, of

^ According to the embodiment of the present invention, a load port calibration device is provided, which is used to fill the load of the pillar 21 with a load of 20, including the following structure. • It is dry and has an I-position member 30, which has three positioning straight holes 31, which are arranged in the above positioning%, wherein the positioning straight holes 31 extend in a predetermined direction (as shown by the front of reference number 32). ~ The alignment member 33 is disposed on the positioning member 30 and has water passing through the alignment member M along a direction straight to the predetermined direction 32 ^ 栌 ^ = 34 'and extends along the predetermined direction 32, and The above water = 'the vertical alignment straight hole 3 5 5 communicating with the straight hole 34 and enters the laser light at the first entrance end 341 of the horizontal alignment straight ^ 34 and the second entrance 351 of the vertical alignment straight hole 35 ( 361, 362). A light-transmitting mirror 37 is provided at the connection between the horizontal alignment straight hole 34 and the vertical alignment collimation hole 35, and is used to vertically reflect the laser light 361 from the second incident light 351 and the light from the above. * 362 of the first entrance end 341 passes, wherein the light-reflecting surface of the light-transmitting mirror 37 is oriented toward the output end 342 of the flat calibration straight hole. ^ Detect steam 38, set at the output of the horizontal straightening hole 34 above

Formula 5. Description of the invention (5) __342, which is used to detect the above-mentioned laser 〇〇 义 The knee ψ of J Yigg is the laser light 363 of 丄 ^ 23 when laser light is detected. When the detection of J is wrong, the issued sign is set to the correct position. '· 23 and instruct the load port calibration and installation, according to the embodiment of the present invention, the collimation hole 35 is provided in the above positioning + calibration straight hole 34 and vertical calibration horizontal alignment straight hole 34 and 岙 ji f., 隹: Relative to the center line. And in the figure above, the third figure shows that it is cylindrical according to Mr. Taiming. See Figure 3. ^ R ^ For example, the perspective of the dimension member 33. The diameter of the circular cross-section of the horizontal alignment straight hole 34 must conform to the following equation, where D is the horizontally calibrated acre a. The length of the straight hole 34, β rabbit, g β ® surface diameter , L is the allowable V difference of water_ through the horizontal alignment of the straight hole 34, and the vertical cross-section diameter of the circular collimation hole 35 is equal to 1/2 of the allowable error value of the laser light 361 passing through the vertical 1 hole . Correction: The load port calibration device # 2 described in the embodiment of the present invention can be used to check whether the laser beam is detected by the detector 38 and whether the laser beam has been positioned correctly. When the detector detects, 'indicates that the load port has been set in the correct position. Vi. Ό \…; When a laser beam is detected, it indicates that the load port has not been set. 1 «Cry on' the right person The position of the load port must continue to be calibrated until the laser beam is measured to complete the calibration. As mentioned above, the laser beams in the vertical and horizontal directions are calibrated to enter the light, and the structure is directly calibrated to determine whether the laser is detected negatively.

V. Description of the invention (6)-:::: The same laser device emits' and can indicate the laser light east has been sensed in the vertical direction and by making a noise, but ζ is enough to know: the laser light is not Due to the above, the manner of the straight hole can be the same as the 'applicable' b and the precise Γ; it can quickly obtain a more accurate correction junction S. , X I make & order, and although the present invention is in a preferred embodiment ^ the scope of the present invention, any name, as above, but it is not intended to limit the spirit and scope 'Do n’t: some; u 艺Those who do not depart from the scope of protection of the present invention shall regard the modification and retouching of the appended two =, so the definition of the patent scope of the present invention shall prevail.

Claims (1)

475232 With a laser beam calibrator, a load port calibration device is applicable to a load port with three positioning pillars, including a position member 'having three positioning straight holes provided in the above positioning * 2, wherein the positioning straight holes are facing Extending in a predetermined direction; one-to-one alignment members are provided at the above-mentioned positioning # R 曰> The above-mentioned both Honggu axishi a * and L 疋 position structure Ding 'and have a direction along the vertical ^ this existing direction runs through the above Align the level of the member and extend along the above-mentioned predetermined direction, and make a hole connected to the collimating hole on the escape hole, and align the first-shot end and the above-mentioned angle of the straight hole at the above-mentioned level. The second entrance end of the straight-forked collimation hole shoots into the laser clip; and a light-transmitting mirror is disposed on the horizontal alignment straight line; and the vertical calibration position, the vertical line reflects from the second shot And the laser light from the first entrance end is passed through, wherein the light-reflecting surface of the light-transmitting mirror is toward the output end of the horizontal alignment straight hole. 2. The load port calibration device as described in item 1 of the scope of patent application, further comprising a detector, which is arranged at the output end of the horizontal calibration straight hole, and Zhou Yi measures the laser light emitted by the laser device. ′ • The load port calibration device 5 described in item 2 of the scope of patent application, wherein the horizontal calibration straight holes and vertical calibration straight holes are set on the relative center \ center line of the positioning member. 4. The load port calibration device as described in item 3 of the scope of patent application, wherein the horizontal calibration straight holes and vertical calibration straight holes are cylindrical. 5 · Load calibration device as described in item 4 of the scope of patent application, wherein the diameter of the circular cross section of the horizontal calibration straight hole 孔 conforms to the following equation: D = L X tan θ 0503-5749TWF.ptd Page 11 475232 6. Application scope of patents where D is the diameter of the circular cross-section of the horizontally calibrated straight hole, L is the length of the horizontally calibrated straight hole, and Θ is the allowable error value of the laser light passing through the horizontally calibrated straight hole. . 6. The load / calibration device described in item 5 of the scope of the patent application, wherein the diameter of the circular cross section of the vertical alignment straight hole is 1/2 of the allowable error value of the laser light passing through the vertical alignment straight hole. 7. The load port calibration device as described in item 5 of the scope of the patent application, wherein the detector is directed to detect the laser light emitted by the laser instrument by beeping. Ο 0503-5749TWF.ptd Page 12