TW469469B - Fabrication method of vacuum display and its structure - Google Patents

Abstract

The present invention provides a fabrication method of vacuum display with support pillars and the vacuum display using the method in which lots of support pillars are fixed to a clipping device first to make the bottom of the support pillars extend outward vertically and are exposed from the clipping device, the clipping device is pressed to a substrate with an adhesive layer applied, and finally the clipping device is moved away from the adhesive layer to be pressed on the bottom glass panel of vacuum display hence the support pillars contact active area of the bottom glass panel after fully coating an adhesive layer on the bottom of the support pillars. The completed structure can be optionally annealed at a temperature between 250 to 600 DEG C to improve the binding strength and to release the binding stress. After the support pillars are fully bound to the bottom glass panel, removing the clipping device and binding the upper glass panel to the top of the support pillars and to the outer four-side walls of the vacuum display to form a vacuumed airtight chamber.

Description

469469 V. Description of the invention (1) [Field of the invention] The present invention generally relates to a method and a structure for manufacturing a vacuum display, and more particularly to a method for manufacturing a vacuum display using a support column having a high / width ratio 'and the use of the support column Manufactured vacuum display.

[Background of the Invention] D 〇 In recent years, the development of flat displays has been widely used in electronic products, such as personal computers. A widely used flat panel display is an active array liquid crystal display (AM LCD) 'which provides better resolution. However, liquid crystal displays have many inherent limitations that make them unsuitable for many applications. For example, a 'liquid crystal display' has many manufacturing limitations, including a slower deposition process of coating glass panels with amorphous stone, high complexity of manufacturing, and low production yield. In addition, a liquid crystal display requires a high-power backlight, but most of the light it generates is wasted. Under strong light conditions or at wide viewing angles, it is also difficult to see the liquid crystal display image, which limits many applications of the liquid crystal display. In recent years, other flat panel displays have been developed to replace liquid crystal display panels. One of these devices is a field emission display (FED), which overcomes some of the limitations of a liquid crystal display (LCD) and provides more advantages than a liquid crystal display (LCD). For example, a field emission display has a higher contrast ratio, a larger viewing angle, a higher brightness, a lower power consumption 'and a wider operating temperature range than a thin film transistor (TFT) liquid crystal display panel. The biggest difference between a field emission display (FED) and a liquid crystal display (lcd) is that unlike a liquid crystal display (LCD), a field emission display (FED) uses colored fluorescent light to generate its own light source. Field emission display (FED) does not need to be complicated and

P99-047. Ptd Page 4 4, 6 9 4 6 9 V. Description of the invention (2) Power-consuming backlight and filter plate 'So users can see most of the light generated by the field emission display (FED). In addition, the field emission display (FED) is not a large array of thin film transistors, so the high cost and low production yield issues of the active array liquid crystal display (AM LCD) are eliminated. In a field emission display (fed), the cathode emits electrons and strikes the phosphor 'on the transparent upper plate to produce an image. This cathodic emission process is considered to be one of the most effective methods of generating light. Unlike the conventional cathode ray tube (CRT),

Each pixel or emission unit in a field emission display (FED) has its own electron source, i.e. a typical array emission microtip (eraitting m 1 crot 1 ps). The voltage difference between the cathode and the gate draws electrons out of the cathode and accelerates toward the phosphor layer. Generally speaking, the emission current, display brightness, and work functi on are closely related. In order to achieve the necessary efficiency of a field emission display (FED), the clarity and uniformity of the source material is therefore very important. In order to make the electrons move in the field emission display (FED), most field emission displays (FED) are pumped to a low pressure, such as 10-7 torr, to increase the average free path of emitted electrons, and to avoid Microtips are contaminated and worn. Using a focusing grid to gather electrons from the microtip can improve the resolution of the display.

Field emission cathodes, which were developed in the early days, are metal microtip emitters using molybdenum. In this device, 'a silicon wafer is first oxidized to produce a thick layer of dioxide' and then a metal gate layer is deposited on top of the oxide. The metal closing layer is patterned to form a gate opening. Silicon dioxide is then etched under the opening, the gate is cut down, and a recess is created. Deposit a sacrificial metal layer (eg

d 6 q ^ 6 9 _____ ^ ___ V. Description of the invention (3) (such as aluminum) ’to avoid turning and depositing in the silo. Then molybdenum is deposited under normal incidence, and a sharp-pointed cone is formed in the cavity until the opening is closed above it. When the aluminum sacrificial layer is removed, an emission cone is left behind. In another design, 'the oxide is first formed by thermal oxidation on silicon, then the oxide is patterned and selectively etched to form a silicon crystal moon to form a silicon microtip emitter. Further oxidation or etching protects the silicon and sharpens the point to provide a sacrificial layer. In another design, the microtip is formed on a substrate of an ideal material (such as glass), which can be used as an ideal substrate for large-area flat display. The microtips are formed from a conductive material, such as a metal or a doped semiconductor material. In the design of this field emission display (FED) device, an intermediate layer with controlled conductivity deposited between the cathode and the microtip is ideal. Proper interlayer resistivity allows the device to operate in steady state. To manufacture this field emission display (fed) device, an amorphous silicon film is preferably deposited, and the silicon film has conductivity between intrinsic amorphous silicon and n + doped amorphous silicon. Adjusting the phosphorus atom content of the film can control the conductivity of n + doped amorphous silicon. In general, during the manufacture of a field emission display (fed) device, the device is contained in a very low-pressure vacuum and therefore does not hinder the emission of electrons. For example, a low pressure of 10-7 torr is usually required. In order to avoid the collapse of the glass panel of the field emission display (FED), it is necessary to support and provide proper spacing between the two panels by supporting columns. For example, in conventional field emission display (FED) devices, glass balls have been used to maintain the spacing of this field emission display (FED) device. For a field anode display (FED) device with a high anode voltage, an elongated support post is also used for this purpose, as shown in the figure

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1 A and Figure 1B. Figure 4 A is a partial exploded view of a conventional field emission display (FED) device (丨). The field emission display (FED) device (10) is composed of an upper glass panel (12) and a glass panel (14). The space between the two glass panels is supported by a plurality of elongated support columns (20) under the vacuum pressure between the two glass panels (12, 14). The majority of the support columns () are in a proper position, that is, under the broken glass. Between the active area (16) formed on the surface (22) of the panel (14). Most of the support columns (20) are fixed in place by the grooves (24) of the side wall plate (18), as shown in the figure. As shown in the enlarged top view of the figure. The conventional method of assembling a plurality of support columns (20) as shown in Figure U and FIG. 1B has many manufacturing difficulties. First, because the extended support column cannot be positioned at its center, the support column The central part is easy to slide from the correct position of the bottom glass panel. In addition, the extension support column (20) must have a vacuum channel to facilitate vacuum. In addition, the groove must be located on the side plate (丨 8) accurately. Position 'makes the manufacturing process of field emission display (FED) device more miscellaneous.

D In modern field emission display (fed) devices, higher operating voltages are often needed to achieve south resolution and brightness. For example, a high voltage of several thousand volts is often used as the anode voltage of a field emission display (FED). At this high voltage, a sufficient interval between the upper and lower glass panels (0.5 to 5 mm) must be maintained between the upper and lower glass panels to avoid a discharge between the two broken glass panels. Therefore, in a high-pressure field emission display (FED) device, the proper space between the upper and lower plates of the field emission display (FED) vacuum chamber is very important. 469469 V. The key to the description of the invention (5). Therefore, 'the purpose of the present invention is to provide a method, the vacuum display device has no conventional method ^ vacuum display device y / 25Γ Μχ, another object of the present invention is to provide a floppy, the device can resist atmospheric pressure and does not Collapse.乂 Vacuum display device method. Another object of the present invention is to provide a method for designing a vacuum display device for high-tech work; an empty display device, and the problem of indoor discharge. The use of chalk does not cause space. Another object of the present invention is to provide-劁 4 the method of emptying the display device between two glass panels by the vacuum display device, and another-other purpose of the invention d5 mm interval. Method, which uses an extension of the pillar to keep the two $ true = display device apart. (Two thousand) positioning between the glass panel Another object of the present invention is to provide-manufacture a vacuum side, which uses an elongated support post adhered to the bottom edge of the lower glass panel. Method f 罝 'Another object of the present invention is to provide a field emission display method that uses an extended support pillar fixed to a lower glass panel, and the κ-supported pillar system uses a fixing device to apply an adhesive to Bottom Support of Support Columns Another object of the present invention is to provide a method for manufacturing a field radiation display device. Firstly, an elongated east support column is used, which is clamped in a fixed device, and then coated with a mesh or other method to coat the adhesive layer Then stick a layer of adhesive to the bottom edge of the post. [Summary of the Invention] According to the present invention, it provides a method for manufacturing the use of extended support posts

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Empty display device and use in a preferred concrete room. First, provide a long-shaped support pillar so that each support pillar extends straight outwards; move the clamp away from the clamp, so the clamp is pressed against the lower glass lower end to closely contact the lower glass and the lower glass panel to one end and the lower glass panel. Remove the fixture; place the upper end. A device made by this method. In the example, 'the following work is to use the upper glass panel and the lower slope to move the upper end of the directly adjacent branch column to pre-press into a layer of adhesive so that the top surface of the lower panel of each column is on the top surface. The top surface of the panel; when the temperature is maintained and maintained for a period of time, the top surface is sufficient to form a sticky glass panel fixed to the support step to form a vacuum glass panel, which provides a tightening in the cooler, so a fixed distance, is suspended by the fixture, and The layer of adhesive is coated with the adhesive; and each support column is heated between the fixture and the support column so as to be closed under the support column; the upper end column of the self-supporting column and the four side wall plates are used to form a vacuum chamber. The support pillars may be elongated and have a width / height aspect ratio of at least ½, or beading between about ½ and 1/2. The method further comprises a step of heating the clamping device, at least two support columns and the lower glass panel to reach a temperature of at least 250 °: 'or between 250 °: and 600 ° C. The lower glass panel has an active area 'with a predetermined space therebetween to hold at least two gift posts. The method further includes a step of adhering the upper glass panel to the upper end of the supporting column 'or fixing the upper glass to the supporting column and the four side wall plates' between the upper and lower glass panels to form a sealed chamber. In another preferred embodiment, the following working steps are used to manufacture a vacuum display device. The vacuum display device has a support column in the active section. The working step includes providing a first glass panel, the glass panel having a top surface

P99-047.ptd Page 9 4 6 9 4 6 9 V. Description of the invention (7). Most active areas' Most active areas are separated by a fixed distance and arranged in a matrix shape with a predetermined interval in between; Lengthened support columns, the top and bottom edges of each support column are parallel to each other; a plurality of support columns are fixed in the clamping device, and the top edges of the support columns are detachably clamped in the clamping set, and the bottom Most of the edges are exposed; press the clamping device of the plurality of supporting columns clamped against the adhesive layer until the bottom of the supporting column is coated with adhesive; press the clamping device on the top surface of the first glass panel Up, until the bottom edges of the support pillars are bonded to the top surface at a predetermined interval, and the clamping device is removed; and the second glass panel is fixed on the bottom edges of the plurality of support pillars forming the vacuum display device. A method for manufacturing a vacuum display device having a supporting column in an active section, further comprising a step of providing a layer of an adhesive of a dielectric material, or providing a layer of an adhesive of an electrically insulating material, which can withstand an operating temperature of 50 ° C, Or provide-The method further includes a step of providing a pattern of an adhesive material layer coated with a screen printing technique. The pattern of the adhesive material layer corresponds to the arrangement of the support pillars. The method further includes a step of applying a layer of an adhesive material by a spin coating technique until a predetermined adhesive thickness is achieved. In a method of manufacturing a vacuum display device having a supporting column in an active section, the clamping device used may be a mechanical clamping device. The method further includes a step of providing a first glass panel having a plurality of pixels, and the plurality of pixels are separated by a predetermined interval and electrically insulated from each other. The predetermined interval is in the range between about 50 ”m and 200 A m. The thickness of the adhesive layer is sufficient, and the thickness of the coating on the bottom of the supporting branch is between about 5 and 20. The height of most supporting columns /

469469 V. Description of the invention (8) The aspect ratio of the width is between about 1/5 and 1/20. Most pillars. Between .5 mm and The method further includes the following steps: placing the support pillar and the first glass panel at a temperature of approximately one degree, so that sufficient adhesion is formed between the support tightly J and the top surface of the first glass panel J = two-step plus the hot clip Tighten the device, the support column and the first plate to MO C, or a temperature between about 25 ° C and 600 t. The method 5 will: two glass panels are bonded to the top edge of the support column and bonded to form a vacuum male The four side walls of the closed chamber. In order to make the above and other purposes, features, h, and features of the present invention, the preferred embodiments of the present invention are given below, and will be described in detail in conjunction with the attached month. Detailed description of examples] The present invention discloses a method for manufacturing a vacuum display device, which uses the disadvantages of an extended support column without a conventional method. The extended support column can be easily bonded to the glass panel underneath without complicated Processing steps. The novel method of the present invention adheres the extended support pillars to the vacuum display device, and is applicable to the manufacture of any flat panel device using a vacuum to prevent the panel from collapsing. Device, in which the interval between the two glass panels is increased to prevent unwanted electrons from being released in the interval. The extended support column used in the method of the present invention can be simply and reliably used to 'effectively bond to the active area or electronics of the lower glass panel. Emission interval. The extended support pillars of the present invention can achieve the larger interval required by modern vacuum display devices, where glass balls cannot provide this large interval. In addition, using this

469469

The novel method of the invention adheres the elongated support column, and the side wall of the display device does not need a groove. Therefore, the device can be manufactured by a simpler manufacturing process, and has a higher reliability. Reference is now made to Fig. 2A, which shows that the clamping device (30) of the present invention includes a clamping plate (32) for clamping most of the supporting columns (20) therebetween. The clamp (32) can be operated by a mechanical device such as a spring and a bolt, and a force is applied to the support (20) 'to fix the support post in place. The splint (32) fixes the top edge (26) of the support column (2-0), and exposes the bottom edge (28) a. The figure also shows that an adhesive layer (40) is coated on another substrate (36).

In the novel method of the present invention, the adhesive layer (40) coated on the substrate (36) is an excellent high-temperature adhesive material, such as an oxide coating or a glass glaze adhesive, which should withstand at least 2 5 0 C, or as high as The annealing temperature of 600, which is often used in the annealing process to form a bond between the support pillar and the glass panel. The adhesive material of the adhesive layer (40) should have a proper viscosity, that is, a shear strain rate of 1.0 [1 / second], between about 10,000 cps and 1,000, 000 cPS, Therefore, the viscosity of the adhesive is sufficient to be implemented by the screen printing method or the spin coating method, and it can be wet enough to wet the bottom end of the support post in a contact.

The adhesive film (40) can be applied on the surface of the substrate (36) by a screen printing method corresponding to the type corresponding to the supporting pillars on the glass panel. In other words, 'only the selection area on the top of the substrate (36) must be covered with an adhesive. The adhesive layer (\ 〇) can also be evenly coated on the surface of the substrate (36) by a spin coating method. The storage life of the adhesive material is also extremely important, and this adhesive layer can be used in a variety of combined applications.

^ 09469 V. Description of the invention (10) Figure 2 is a cross-sectional view of the structure of the present invention shown in Figure 2A. The clamping device (30) is pressed into the adhesive layer (40), and the bottom edge (28) of the support column (20) is pressed. ) Immerse or contact the adhesive layer (40). The pressure of the clamping device (30) into the adhesive layer (40) should be high enough to allow sufficient contact between the bottom edge (28) of the support post (20) and the adhesive layer (40), but support must be avoided Damaged or misplaced column (20). The bottom edge (2 8) of the support column (20) is fully immersed in the adhesive layer (40). The clamping device (30) moves upward from the adhesive layer (40), so that the bottom edge of the support column (20) (28) Fully coated with adhesive layer (40), as shown in Figure 2C. "The operator should note that the coating amount of the adhesive material on the bottom edge (28) is related to the properties of the adhesive, such as the viscosity of the adhesive. The coating (40) of the adhesive on the bottom edge (2 8) should have a thickness between about 5 / ζπ and 20, so the support pillars can be bonded to the glass substrate without contaminating the active area. As shown in Fig. 2d, Fig. 2E and Fig. 2F. As shown in FIG. 2D, in the next step of the method of the present invention, an elongated support post is bonded to a lower glass panel of a vacuum display device, and a clamping device (30) is positioned on the lower glass panel (50). It should be noted that on the top surface (54) of the lower glass panel, a plurality of active areas (52), or electron emission areas are provided. Each active area, or electron emission area is a pixel. An appropriate interval (56) formed between the active areas (52) is a range between about 50em and 200nm. When the vacuum display device is designed, the range is set first. It is often used at intervals of 100 yni. The appropriate width / height of the lengthened support column (20) is between about 1/5 and 1/20. For example, the visibility C or thickness of the extended support column (20) is between about 30 μπ! And 150 / zm, and its height is about 0.5

469469

Range between millimeters and 3 millimeters. The typical extension of a field emission display (FED) is the width (or thickness) of the supporting column (20), which is about 1mm. '

It can be known that the maximum interval between the active area (52) is 200, and the maximum width (or thickness) of the supporting column (20) allows the maximum coating on both sides of the supporting column (20) of the field emission display (FED). The layer thickness is about 4〇 # m ', so the adhesive will not contact or contaminate the active area (52). Figure 2E illustrates that the bottom edge (28) of the support pillar contacts the active area (52) on the glass panel (50), The interval (56). As shown in Fig. 2e, the adhesive (40) does not contact or pollute the active area (52), so it shows that the ideal adhesion is in the last step of the novel adhesion process of the present invention. Remove the clamping device (30) of the support column 20) to make the support column (20) a panel (50). As shown in Figure 2F. The novel method of the present invention may optionally include a step of annealing the adhesive material ^. Before removing the clamping device (3) of the support column (20), as shown in the figure, the loosening device (30), the support column (20) and the lower glass panel can be placed in the oven. Or in the conveyor belt e η η of the oven. And according to the type of adhesive material used, exposed to about 2 50. (: and = ^ annealing temperature. The annealing step is freely selectable, because the main support 〇 Some of the adhesive materials of the bonded lower glass panel (50) do not need to be retired. The annealing process is only used to improve the space between the two components, resulting in a highly reliable structure.

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d69 9 V. Description of the invention (12)

Figures 3A and 3B illustrate the complete structure using the novel method of the present invention. For example, 'Fig. 3A is a sectional view' illustrating a vacuum display device (60) formed by the novel method of the present invention. The vacuum display device (60) is an upper glass panel (70) bonded to the top edge (26) of the support frame (20), and four wall panels (62) of the outer periphery of the vacuum display device (60). The bonding process can be effectively performed using a similar type of adhesive material as described above. Figure 3B shows a perspective view of the upper glass panel (70) of the vacuum display device (60) suspended from the lower glass panel (50). For the sake of clarity, in the illustration, the upper glass panel (70) is separated from the lower glass panel (50). Therefore, the interval (on the top surface (54) of the lower glass panel (50) is bonded to the extended support column (20) ( 56), you can easily see the position of the extended support 枉 (20). In addition, according to the structural requirements, the interval between the two glass panels, the total number of support columns (20) and their positions can be adjusted appropriately. The vacuum display device formed by the novel method of the present invention has elongated support posts therein, and the structure formed has been disclosed in detail in the above description and Figs. 2A to 2D. Although the present invention is described by way of illustration, § we use it for § children's sake, and are not limited in addition. 'Although the present invention has been used to limit the present invention, any familiarity within the spirit and scope should be regarded as various protection scopes. The attached application is specifically disclosed, but the scope of the invention used should be understood. The above-mentioned preferred embodiment discloses, but it is not the artist, without departing from the changes and modifications of the present invention, so the scope of the present invention shall prevail.

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Brief description of the drawings [Simplified illustration of the drawings] = Department-a partially exploded perspective view of a conventional flat display device, which has a supporting column. Fig. 1B is an enlarged plan view of the structure shown in Fig. 1A, which shows that a support pillar and a groove of the side wall are combined.

J2A is a different view of the method of the present invention 'showing that the supporting column is a clamping device applied on a layer of adhesive material. Fig. 2B is a cross-sectional view of the support post of the present invention shown in Fig. 2A, with the lower end of the support post immersed in the adhesive layer. FIG. 2C is a cross-sectional view of the support pillar of the present invention shown in FIG. 2B after it is in contact with the adhesive layer and is removed therefrom. FIG. 2D is a cross-sectional view of the support pillar of the present invention shown in FIG. 2C. The two ends of the support pillar are coated with an adhesive layer and positioned on a glass panel with an active area.

The random 2E is a cross-sectional view of the supporting pillar and the lower glass panel of the present invention shown in FIG. 2D after the supporting pillars are pressed against the lower glass panel in the active zone. FIG. 2T is a cross-sectional view of the supporting pillar of the present invention shown in FIG. 2E after the lower pillar is bonded with the adhesive coating to break the glass panel. Fig. 3 and A are cross-sectional views of the vacuum display device of the present invention, which are provided with extended support posts. Fig. 3.B is a perspective view of the vacuum display device of the present invention shown in Fig. 3A, with the top glass panel suspended from the lower glass panel. [Illustration of the drawing number] 10 Field emission display device 12 Overfill panel

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Brief description of the drawings 14 Lower glass panel 16 Active 18 Side wall plate 20 Support column 22 Surface 24 Groove 26 Top edge 28 Bottom edge 30 Clamping device 32 Clamping plate 36 Substrate 40 Adhesive layer 50 Lower glass panel 52 Active area 54 Top surface 56 Space 60 vacuum display. 62 Side wall panel 70 Upper glass panel P99-047.ptd Page 17

Claims (1)

Amendment_First, the scope of patent application 1. A method for manufacturing a vacuum chamber, including the following steps: providing an upper broken glass panel and a lower glass panel; providing at least two elongated support pillars, the upper end of which can be clamped in a fixture movably So that each of the support pillars has a certain distance from its directly adjacent support pillars and extends vertically outward from the fixture; dust the sink into an adhesive layer and remove the A clamp so that the lower ends of the at least two supporting pillars are coated with the adhesive; pressing the clamp on a top surface of the lower glass panel so that each of the lower ends of the two supporting pillars closely contacts the lower The top surface of the glass panel; heating the fixture, the at least two support columns, and the lower glass panel to a temperature 'and maintaining for a sufficient time' to form a gap between the lower end of the at least two standard posts and the top surface of the lower glass panel Adhesive bonding; removing the jig from the upper ends of the at least two support columns; and fixing the upper glass panel to the upper ends of the at least two building columns. 2. The method for manufacturing a vacuum chamber according to item 1 of the scope of patent application, wherein the at least two elongated support pillars have an aspect ratio of at least a 1/5 width / height. 3. The method for manufacturing a vacuum chamber according to item 1 of the scope of patent application, wherein the at least two support columns are elongated and have a width / height aspect ratio between about 1/5 and 1/20. 4. If the method of manufacturing a vacuum chamber according to item 1 of the patent application scope, further includes a step of heating the clamping device, the at least two support columns, and the lower glass panel to a temperature of less than 250 ° C. 5. If the method of manufacturing a vacuum chamber in the scope of the patent application item 1 includes another 469A69 6. The scope of the patent application plus a heating of the clamping device, the at least two support columns and the lower glass panel reach about 2 50 ° Steps between C and 600 ° C. 6. The method for manufacturing a vacuum chamber according to item 1 of the patent application scope, wherein the lower glass panel is provided with an active area with a predetermined space therebetween for the at least two support columns to be fixed. 7. The method for manufacturing a vacuum chamber according to item 1 of the patent application scope, further comprising a step of bonding the upper glass panel to the upper ends of the at least two support columns. 8. If the method of manufacturing a vacuum chamber according to item 1 of the patent application scope further comprises a step of fixing the upper glass panel to the at least two support columns and four side walls between the upper and lower glass panels to form a Sealed room. 9. A method of manufacturing a vacuum display device having support columns in an active section, comprising the following steps: providing a first glass panel 'forming a plurality of active areas on its top surface', the plurality of active areas being separated by a fixed distance And a matrix shape arrangement with a predetermined interval therebetween; providing a plurality of support pillars of an elongated shape, 'the top edge and the bottom edge of each support pillar are parallel to each other;' — fixing the plurality of support pillars in a tension device, The top edge of the supporting post is releasably clamped in the fixture, and the shame is substantially exposed; the clamps holding the plurality of supporting posts are placed and pressed on a layer of adhesive until the support The bottom edge of the post is coated with the adhesive; the clamping device is pressed against the top surface of the r-glass panel until the bottom edge of the support post is adhered to the top surface at the predetermined interval, ^ the clip Tight device; and% 4 6 9 469 6. The scope of the patent application will be a second to form a true 10. The vacuum display material as applied. 11. If you apply for a vacuum display material, you can accept 12. If you apply for a vacuum display glue and glass glaze 13. If you apply for a vacuum display, the screen printing technology corresponds. 14. Vacuum display as requested Rotary coating technology 1 5. Vacuum display as requested. 16. The vacuum display element as applied is formed on a glass panel fixed to the top edge of the plurality of support columns, and the display device is empty. Item 9 of the method of manufacturing a method having a pillar support device in an active section, wherein the layer of adhesive is a dielectric material. The agent is an electrical insulating material subjected to an operating temperature of 600 ° C. A method of manufacturing a pillar device having a support column in an active section according to item 9 of the patent, wherein the adhesive is selected from the group consisting of an oxide coating group. A method for manufacturing a pillar device having a support column in an active section of the patent scope item 9, wherein the layer of adhesive material uses a coating and a pattern to align with the plurality of support pillars. A method for supporting a pillar device in an active section, wherein the layer of adhesive material is coated by a technique until the adhesive reaches a predetermined thickness. The method of manufacturing the item 9 in the patent scope has a method for supporting the post device in the active section, wherein the clamping device is a mechanical clamping method of the patent scope of the 9th jaw, which has a method of supporting the post device in the active section, where the first On a majority image of a glass panel, the majority of pixels are at a predetermined distance from each other. Article 20 I 469469 6. Scope of patent application Separated and electrically insulated from each other. 17. The method of manufacturing a vacuum display device having a supporting column in an active section as claimed in item 9 of the scope of patent application, wherein the predetermined distance interval is in a range between 50 #m and 2000. 18. The method of manufacturing a vacuum display device having a supporting column in the active section according to item 9 of the patent application 'wherein the adhesive of the layer has a sufficient thickness' so that the thickness of the adhesive of the bottom edge of the supporting column is coated Between 5 / zm and 40 ren m. 19. For example, a method for manufacturing a vacuum display device having support columns in an active section as in item 9 of the scope of patent application, wherein the plurality of support columns really have a width / height aspect ratio between about 1/5 and 1/20. 2 0. A method for manufacturing a vacuum display device having a support column in an active section as described in item 9 of the scope of patent application, wherein the plurality of support columns have a height β between about 0.5mm and 3mm. The method for manufacturing a vacuum display device with support columns in the active section further includes a step of heating the clamping device, the plurality of support columns, and the first glass panel to a temperature 'sufficient to the bottom of the plurality of support columns. A bond is formed between the edge and the top surface of the first glass panel. 22. If the method of manufacturing a vacuum display device having a supporting column in the active section according to item 9 of the scope of patent application, further comprising a step of heating the clamping device, the plurality of supporting columns and the first glass panel to approximately -50 Temperature between ° C and 6 00 ° C. 23. If the manufacture in the scope of patent application No. 9 has a supporting column in the active section 46 9 4-6 9 Page 22