TW463204B - Field emission device having a composite spacer - Google Patents

Abstract

A field emission display (100) includes a cathode (102) having a plurality of electron emitters (124), an anode (104) opposing the cathode (102), and a composite spacer (108) extending between the anode (104) and the cathode (102). The composite spacer (108) includes a first layer (107), which is made from a dielectric or bulk resistive material, and a conductive layer (109), which is attached to the first layer (107) and is made from a metal, metal alloy, or a ceramic-metal composite material. The height of the composite spacer (108) is greater than 500 micrometers.

Description

V. Description of the invention (ι) For related applications, please refer to the relevant subject # 姐-The beauty of the production method is titled Field Emitter with Composite Spacer and is assigned to Tong Er Shen :: Application, its law ㈣ 91 91 91 ^: About the field emission device and especially the field emission display. ΤI between the plates = Γ separation: The structure separates the cathode from the anode in field emission display. The surrounding separator structure can maintain the cathode and anode ... the potential difference between the cathode and the anode must be maintained. But the spacer can negatively affect the gate ρ3 crying. This self-risk # # 14 As the electrons ringing near the & benefit flow to the anode. Someone can electrostatically charge the surface of the spacer ’. It is different from those who hope. Distortion of spacer and cathode electron flow. At the same time, in the field of emission display, this proximity can cause distortion of the electron flow at the image produced by the display at Π =?,-The distortion of the position of the spacer can be generated in every visible image-dark area 'And make the spacer a few questions :: I have tried to solve the problems related to the charging of the spacer. For example, in this technique. It is well known to mention a presentation, the surface of the surface is very low, enough to move :, The space between the surface electrons is high enough to cause a collision ^ ,, t _ / _ ”&wen; the power loss caused by% pole current risk; ί evening electricity ^. This resistive meter ^ • 3 has the ideal resistance

C: \ ProgramFiks \ Patent \ 54902.ptd Page 5 46320 Five 'Explanation of the Invention (2): Thin:' The spacer is realized by coating. However, such films are susceptible to mechanical damage: and / or changes, such as those that occur during the handling of spacers. These films ring pi: f y: chemical incompatibility. & Chemical incompatibility can negatively affect ‘::% emission characteristics of the emitter. Moreover, coating spacers are also quite difficult to crack. The f-spacer provides additional independently controlled electrodes for controlling pressure distribution ', which is well known in the art. But in this step, J ί I;: ^ Including the processing steps for the formation of additional spacers by electric shock: When = = vulnerable to mechanical damage. This previous technique 4 also uses additional voltage traces. A and τ @ # apply voltage to the spacer electrode. This can increase the power requirements of the equipment. Therefore, there is a kind of improved field emission device which can reduce the distortion of the electron flow and a brief explanation of the figure. Cutaway? The diagram is a field emission device according to the present invention—a specific example of the non-C 2 concise and clear plan, the components shown in ®, and :: Dimensions 1 such as' Some dimensions of the components, each other Time has been exaggerated. The present invention provides a composite spacer having the first-layer, which can be made of a dielectric. Female: Made of composite material, there is still a conductive layer connected to the first-Ju 15 = large pole, and the first layer is close to the anode. The conductive layer makes electricity ^: layer-by-layer, de-interval, so that the charging of the surface of the spacer layer can be made ^ Second: combining spacer shoes ... ^ k η ° controlled charging due to

^ 63204 V. Description of the Invention (3) ----- Interval! Presence 'can provide reduced distortion of the electron orbit. The composite spacer ^ South degree is greater than _ micro seek, SI This makes the complex mixed spacer of the present invention very useful in the pressure field emission device. The Shaw device is operated under the condition that the potential difference between the cathode and anode exceeds 25 00 volt . In a specific example of the present invention, the field emission device is a field emission display having a composite spacer, and the spacer is visible to a viewer of the field emission display. This unique figure is not a cross-sectional view of a field emission display (FED) 100 according to the present invention. The FED 100 has a cathode 102 and an anode 104. The pressure in a vacated region 106 between the cathode 102 and the anode 104 is less than about 106 Torr. The composite spacer 108 extends between the cathode 102 and the anode 104. The composite spacer 108 may provide mechanical support to maintain separation between the cathode 102 and the anode 104. The composite spacer 108 also has a feature of improving the electrostatic charging of the composite spacer 108. The electrostatic charging control of the composite spacer 108 can control the distortion of the electron flow 1 32 in the FED 100. In the illustration of this specific example, the composite spacer 108 has a characteristic that enables Observers of FED 1 0 0 cannot see the spacers during their operation. The cathode 102 contains a substrate 116, which can be made of glass and tritium. After the substrate 116 is configured, the 'cathode conductor 118 can include a thin molybdenum layer. A dielectric layer 120 is formed on the cathode conductor 118. The dielectric layer 120 may be made of hafnium dioxide. The dielectric layer 1 2 0 defines a number of radiation wells 12 2 in which an electron emitter 124 is arranged. In the specific example in the figure, the electron emitter 124 includes a spindt connector. However, the field emission device according to the present invention is not limited to a sp i n d t junction electron source. For example, a radioactive carbon film can also be used as an electron source for the cathode.

C: \ Program Files \ Patent \ 54902.ptd Page 7 s3 2040 V. Description of the invention (4) '------- Section: Contains many gate extraction electrodes. The first gate extraction electrode 126 is used; as illustrated in the figure. Generally, the gate extraction electrode is used for addressing as a selective electron emitter. The upper transparent base f 110 '-the anode conductor 112 is configured with its pole and may contain a tin oxide surface. Many dishes 114 are disposed on the anode conductor 112. Phosphorus 114 is opposite the electron emitter 124. The first voltage source 136 is connected to the anode conductor 112. The second voltage 8 is connected to the second gate extraction electrode 128. A third voltage source 14 is connected to the first gate extraction electrode 126, and a fourth voltage source is connected to the cathode conductor 118. Composite spacer 108 extends between cathode 102 and anode 104 to provide mechanical support. The height of the composite spacer 108 is sufficient to help prevent arcing between the anode 104 and the cathode 102. For example, if the potential difference between the anode 104 and the cathode 102 is greater than 2500, the height of the composite spacer 108 is greater than about 50 micrometers, preferably in the range of 700,1200 micrometers. One end of the composite spacer 108 is in contact with the anode 104 on a surface not held by the phosphorus 114; the opposite end of the composite spacer 108 is in contact with the cathode 102 at an undefined emitter wall 122. According to the present invention, the composite spacer 108 includes a first layer 107, which extends from the middle of the end of the composite spacer 108 toward the anode. The height of the first layer 107 is Η. The composite spacer 108 also includes a conductive layer 109 connected to the first layer 107 and extended toward the cathode 102. The conductive layer 09 has a conductive layer surface 1 and is disposed in the vacant region 106. The height of the conductive layer 109 is h. The first layer 107 includes a dielectric material or a bulk material. The first layer 1 (Π should be selected to withstand the applied voltage. The first layer 107 should preferably have a high working function in order to improve the true electron emission from the first layer 107. The first layer

C: \ Program Files \ Patent \ 54902. Ptd page 8 463204 V. Description of the invention (5) 107 It is better to have a smooth surface to shoot. The dielectric material product used for the first layer m = and the disordered hair stone'quartz. The material of the body electrical group is used for the first layer of glass sapphire glass ceramics, tin oxide, oxidized metal, Japanese dagger, iron, etc. Generally, the electricity of the bulk material group is between two neodymium, zirconia square ohms, and centimeters. The conductive layer 109 from the fifth power to the third power of 109 includes the conductive material. Hanging gold, copper, etc. are now Therefore, take a good example, the conductive layer 109 is made of aluminum such as Aluminium and Daiji Jinyuan. It can also be composed of the conductive layer 109 in the specific example. In this case, the conductive property of 109 is very necessary. It is described in the power supply layer. For the purpose of deflection or focusing of the electron beam, if the material containing the conductive layer 109 can be selected, for example: ductile metal can reduce the FED 100: = :; other advantages. For example, the material of the conductive layer U9 can There is the danger of the high-work room cathode # being broken. Disturbance of true electron emission. The conductive layer 1092: It is controlled from the conductive layer I. 9 The material is very emotional, in order to prevent Chemical reaction. The formation of intermetallic substances and the height h of the non-ideal conductive layer 109 are selected by 7 and turns to improve the composite spacers m and: 2 to provide enough electron current 132 to be biased to the appropriate phosphorus. It means the selection of height h. ... charging 'and directing the electron current 132 opposite the stone bug. Due to the deflection of the electrons Excessive electrostatic discharge that causes electrons to strike the electron emitter 108, whether the conductive layer 109 can prevent the composite interval ^ ^ i, R3 μ a S from being excessive as the electron flow 132 conducts ", the separator can be seen, and the arc etc. Management. In a preferred embodiment of the present invention, the conductive layer 109 is connected to an electric

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Ά C: \ Program Files \ Patent \ 54902. Ptd No. 4 63204 V. Description of the invention (6) 1 °; ^ fa1 # ^ ^ ^ ^ ^ ^ ^ f, ^ • The bit is transmitted at the Λ’Λ. In the specific example in the figure, the discharge position is provided on the conductive layer 130. The second conductive layer 130 is on top of the dielectric layer 102 'and includes a lightning conductive material #; The squat layer of the material trembling material is molybdenum, and the potential of the second conductive layer 130 can be controlled separately. Preferably, the second 130 is connected to the ground potential. This connection to ground provides an improvement: electron deflection 'without the need for additional power. However, it can also be connected to a fifth potential source $ (not shown) to provide the desired degree of electron deflection and / or the electronic loss characteristics of the composite spacer 108 ^ Alternatively, the second conductive layer 3 can also be connected to or The FED 100 gate extracts part of the electrode without the need for an additional potential source. In the specific example in the figure, the electron flow 132 is controlled so as to make the composite spacer 088 invisible during the work of the observer of FED 100. In particular, a conductive layer 109 is required to be attached to the composite spacer 108 to form an electric field. In order to provide this field-forming function, the conductive layer 109 must be disposed in the vacated area. Exemplary configurations of the field emission device of the present invention are explained below with reference to the accompanying drawings. It should be understood that the field emission device of the present invention is not limited to the configuration β in the reference figure. This configuration is most useful when the potential difference between the cathode 102 and the anode 104 is greater than 300 V, and the operation is best. Between 250,000 and 10,000 volts. It also includes a VGA configuration. It should be understood that the field emission display of the present invention is not limited to the VGA configuration. In the specific example in the figure, the transparent substrate 110 and the substrate 116 each have a thickness of about one millimeter. The composite spacer 108 includes a small rectangular plate having a length

C: \ Program FiIes \ Patent \ 54902.ptd Page 10 463204 V. Description of the invention (7) The degree is about five millimeters. Find the 'locality (between the cathode 102 and anode 104) of about one millimeter' and The thickness t is about 0.07 mm. The center-to-center distance between the first and second gate extraction electrodes 126, 128 is about 0.3 mm. The FED 100 can operate at a potential difference between the anode conductor 112 and the first and second gate extraction electrodes 126, 128 of approximately 2500 to 10,000 volts. At this voltage, the distance between the anode and the cathode should be greater than 500 microns in order to reduce the risk of arcing between the anode 04 and the cathode 102. During the operation of FED 100, the voltage is applied to the first and second gate extraction electrodes 126'128, the cathode conductor 118 and the anode conductor 12 to enable the electron emission of the electron emitter to select and guide the electrons through the vacant area 10. 6 to Phosphorus 114 D Phosphorus 114 emits light by hitting electrons. The conductive layer 109 forms an electric field near the composite spacer 108, so the electrons emitted to the vicinity of the composite spacer 108 will not be guided to the phosphorus and will not impact the composite spacer 108. In the example configuration in the figure, the potential difference between the anode conductor 12 and the first and second gate extraction electrodes 126, 128 is about 2500-10,00 volts, and the height h of the conductive layer 109 is the most. It is preferably in the range of about 75 to 150 microns. The composite spacer according to the present invention can be produced in an extremely economical and simple manner. The composite spacer of the present invention does not require a photolithography step, expensive X f lithography 'or high-directional lithography and deposition techniques. There is no longer a need for the coating of electron emitters, which will cause the danger of incomplete electron emitters. The composite spacer 108 may be made of a thin sheet that is first provided with a dielectric or bulk resistive material. Such flakes are commercially available. A metal layer can be made by one or more conventional methods such as screen printing, brazing of gold foil, electroplating, electroless coating and sound broadcasting.

C: \ Prograin Files \ Patent \ 54902. Ptd Page 11 4 63204 V. Description of the invention (8) Ϊ = Forming on the sheet ^ The metal layer is connected better by, for example, a wire fault or a cutting saw; === The surface of the resistive material is started in order to :: cut; knife cut: two in the coating of // quality or bulk electrical material. It is inevitable that the surface of the first layer 107 is constructed with conductive earth. The specific example is a conductive layer made of ceramic metal material. I into. The mixture is formed into thin slices by standard pottery forming methods. In the self-forming operation, a u is laminated as the selected dielectric or bulk resistive material: at the junction interface, the temperature is lower than Celsius · Yuan to prevent oxidation of metal components. After changing the gold, the mechanical and thermal properties can be matched to achieve the desired characteristics: the best thermal expansion coefficient of layer 1⑽. This specific example is very useful when two = large mechanical stress' is required instead of compliance. Comparison of the formation of the anode 1 04 and the cathode 02 in the day 09 is known to those skilled in the art. 4 After the anode H4 and the cathode 102 are made, the composite "⑷ has been bonded to the second conductive layer HQ by a hot-press ifg bonding method to mask the # vertical configuration. In the composite spacer 108 and the package density =: cathode After 1.2%, the anode m is then placed. The garment is sealed in a vacuum environment. In short, the invention is a field emission device for a field invention with a composite spacer, which can operate at a potential difference between the anode and the cathode higher than the current 'Preferably between about -10 and cav. The invention =

d632〇- 5. Description of the invention (9) The radiation device has a "invisible spacer" which cannot be seen by the viewer of the display. The composite spacer of the present invention can be made by a simple and economical method. The specific embodiment of the present invention has been shown and described as above. For those skilled in the art, further modifications and improvements are feasible. I hope that the present invention is not limited to the particular form shown, and that all the amendments to the scope of the attached patent application are not to be construed without departing from the spirit and scope of the invention.

C: \ Program Files \ Patent \ 54902. Ptd 苐 page 13

Claims (1)

Δ632 \ \ ηη smart number 87116290 ^ 7 years f month wide / said amendment six, apply for profit range '------ ^ 1. A field emission device (1 0 0) contains: One with multiple electron emitters The cathode (102) of (124), among which many electron emitters (1 2 4) are designed to emit an electron stream (1 2 2); an anode (104) is configured to receive a plurality of electron emitters (124) The emitted electron current (132); a vacant region (106) is arranged between the cathode (102) and the anode (104); a composite spacer (108) extends from the anode (104) ) And the cathode (102) and including the first layer (107) and the conductive layer (109), wherein the conductive layer (109) of the composite spacer (108) defines a conductive surface (in) in the vacated area (10) Among which, the height of the conductive layer (109) can cause the deflection of the electron flow (132) to be sufficient to prevent the composite spacer (丨 〇8) from being caused by the electrostatic current (丨 3 2) to cause excessive static electricity. The extent of this and the height of the composite spacer (108) is greater than 500 microns. 2. The field emission device (丨 〇) according to item 1 of the scope of patent application, wherein the first layer (107) extends between the anode (104) and the conductive layer (109), wherein the conductive layer is conductive The layer (109) extends between the first layer (107) and the cathode (102). 3. The field emission device (100) according to item 1 of the scope of the patent application, wherein the conductive layer [109] of the composite spacer (108) contains a metal. 4_ The field emission device (100) according to item 1 of the scope of the patent application, wherein the conductive layer (109) of the composite spacer (108) contains a ceramic metal composite material. 5. Field emission device (100) according to item 1 of the scope of the patent application, in which the first layer (107) of the composite spacer (108) contains a large resistance material "6. According to the scope of the patent application The field emission device (100) of the first item, wherein the first layer (107) of the composite spacer (108) contains a dielectric material "". The field emission device of the first item according to the scope of the patent application (100), where Δ 63204 _ Case No. 87116290 a Amendment 6. The cathode (102) in the scope of patent application includes a dielectric layer (120), wherein the cathode (102) further includes a second conductive layer (130) disposed on the dielectric layer (120). , And the second conductive layer (130) thereof is connected to the conductive layer (: 09) of the composite spacer (108). During the operation of the field emission device (100), the electrostatic discharge developed by the composite spacer (108) is consumed by the second conductive layer (130). 8. The field emission device (100) according to item 7 of the scope of the patent application, wherein the cathode (102) includes a plurality of gate extraction electrodes (126, 128), and a second conductive layer therein (1 3 0) is O: \ 54 \ 54902.ptc connected to many gate extraction electrodes (1 2 6, 1 2 8) Page 2 2 deleted _ 05. 06. 015