TW460692B - Automatic crack detection method for acid tank heater and the apparatus - Google Patents

Abstract

This invention provides the method and apparatus of automatic crack detection for acid tank heater. An acid tank contains acid solution which has to be heated using a heater. The heater consists of a hollow quartz tube with a closed end and open end. The closed end is immersed in the acid solution while part of the quartz tube is exposed to the air. The heating filament of the heater is inserted into the tube from the open end toward and until reaching the closed end. Moisture detection device is placed on the inner wall of the quartz tube and using chemical agents changing color once encountering moisture or using moisture detecting electric device which detects moisture variation in the tube to monitor if any cracking is present on the quartz tube. This arrangement enables the replacement of quartz tube of the heater in time before any crack appears on the tube.

Description

Printed by Shellfish Consumer Cooperation of the Central Bureau of Standards, Ministry of Economic Affairs 460692

V. Description of the Invention (5-1 Field of the Invention: The present invention relates to a method and a device for using a heater of a pickling tank: In particular, it relates to a method and a device for detecting a heater of a pickling tank. 5- 2 BACKGROUND OF THE INVENTION: The manufacturing process of integrated circuits includes hundreds of process steps, such as thermal oxidation process, micro-to-process, plutonium process, or cleaning process, so that it can be fabricated on the Shi Xi wafer. Among them, semiconductors Among the waste, the chemical cleaning process is used quite frequently. It is usually used to remove the thin chemical cleaning process on the wafer surface. It is used in a series of pickling and scouring processes: Erxi chemical cleaning The manufacturing process is designed for the consideration of component manufacturing, especially for the surface of certain film layers, such as metal substrates, refractory metal layers, Shaojin 2 ^ surface layer and deposited glass layer. ㈣ layer or stone dioxide The "film washing process" of the evening film layer is carried out before the high temperature process, such as an oxidation process, an expansion process, a deposition process, or an annealing process. The residual cleaning process includes several types of cleaning. Method, such as using a plasma peeling, photoresist layer on the reverse side, and then putting the substrate into sulfuric acid (h2so4) and double hybrid, cleaning the surface of the substrate, holding the mixed solution between 18 to 23t; or, using Deionized water ⑼) The base surface is cleaned, and then the surface of the substrate is flushed with heated nitrogen. The above process steps are all cleaning steps commonly used in Japanese-Japanese-Yen production lines. In the cleaning steps commonly used in wafer fabs, a pickling tank process step is used (please read the precautions on the back before filling this page)

Printed by the Central Laboratories of the Ministry of Economic Affairs, Consumer Cooperatives 460692 Λ7 __B7_ V. Description of the invention () Step, cleaning the wafer surface. An acid solution is placed in the pickling tank. This acid solution is a mixed solution of NH4OH, H2O2, and H20, and is heated to 60 to 80 ° C. Put the Shixi wafer in the mixed solution, wait for 10 to 15 minutes, take it out ', and clean it with DI water. Using this pickling bath to clean silicon wafers can remove contaminants such as organics or metals on the surface of the silicon wafers. The acid solution of the pickling tank must be maintained at about 80 ° C and not more than 80 ° C. The heating method of the acid solution is to use a heating wire that is hot and insert it into the mixed solution to warm the acid solution. Because the solutions used in the pickling tank are all strong acids, the heating wire cannot be in direct contact with the acid solution, otherwise pollutants will be generated and the cleaning solution will be contaminated. After the cleaning solution is contaminated, the silicon wafers cleaned by this pickling tank will be contaminated and scrapped. Therefore, the heating wire is sheathed by a quartz sleeve, and then placed in the acid solution to warm the acid solution. Please refer to the first figure, which shows a schematic cross-sectional view of a pickling tank 1000. An acid liquid 1100 is placed in the pickling tank 1000. This acid liquid 1100 is formed by (NH40H): H202: H20 The mixed solution is usually mixed in a ratio of about (0.1 to 1): 1: 5 according to the volume ratio, and different ratios of mixed solutions are selected according to different processes. Please refer to the first figure again. The heating of the acid solution 1100 is to extend into the acid solution 1100 with the heater 2000. The shell of the heater 2000 is a hollow quartz sleeve 2100. The quartz sleeve 2100 has a closed end and an opening. At the end, a part of the quartz sleeve 2100 is immersed in the acid solution 1100, and the other part protrudes beyond the acid solution 1100. One end of the immersion in the acid solution 1100 is the closed end of the quartz tube 2100. Applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) on the Zhang scale (please read the precautions on the back before filling out this page) 'Packing. Order ^ 6069 2 Printed by the Staff Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs Λ7 B7 5 、 Explanation of the invention () ~~~~ --- The quartz tube 21G0 extends into the person-the heating wire 2 is thin and extends from the measured end of the quartz tube to the closed end of the quartz tube fan. The operation mode of the heating wire 2200 'is generally to apply electricity to the heating wire 2200 and heat the acid solution 11000 through the tube wall of the sleeve 2100. In this pickling tank 1100, because the acid solution must be kept between 5 and thief, the acid solution must be heated for a long time, and the heater 2000 must also be immersed in it for a long time. The acid solution u〇〇, but ^ heater 2_ shell used is quartz sleeve 2100, quartz material will be = acid solution erosion, resulting in the heater 2 000 quartz sleeve 2 00. rupture. When the quartz sleeve 2100 is broken, the wire 22 is heated. . It will contaminate the acid solution. After the wafer is cleaned, the phenomenon of contamination will occur, resulting in waste. However, the ruptured part of the quartz sleeve 2100 is buried in the acid solution u〇〇 'It is not easy to find a fracture after operating the money, but the quartz sleeve 21 can only be found after a problem occurs. 〇〇's break. Therefore, a method for detecting the heater cracking of the pickling tank is needed. When the quartz sleeve of the heater cracks, the heater can be damaged, and the production quality of the parts can be replaced immediately, and the quality of the heater can be reduced. The number of wafer losses in Shixi. 5-3 The purpose and summary of the invention: The present invention discloses a method and a method for detecting the cracking of a heater of a pickling tank. The second method is: heating: placed in the heater, wherein the heater is-the: The central sleeve and the quartz sleeve have an opening, and—the closed end, in the quartz sleeve—this paper is redundant in the paper standard (^ ϋ In n ^ in ml nn .. ί i nd ^^^ 1 -. * VV US. (Please read the precautions on the back before filling out this page) 460692 --- V. Description of the invention (Placed inside-heating wire, from the quartz so that the quartz sleeve covers the open end of the 埶 S Until the closed end, in the device, the water gas detection element is placed on the heater, and the water gas element is the color of the tube wall that is placed in the quartz sleeve. The tube used to discriminate against water is 'when it encounters water and gas, it will change anhydrous sulfuric acid steel and chi-color atmosphere ^ into the heater' The chemical is selected from the sub-components, and the group consisting of One of them, or the electric heater is placed in the second pickling tank. Next, the 'heater-part of I' is extended beyond the acid solution. R acid = yes Put a mixed solution of ΓΓ and $ 〇. Γ ΰ 史 履 疋 nh4〇h, h2〇2 solution for heating, use water and gas to generate heat energy, the acid tube of the acid tank of the pickling water #; / | 70 pieces '4 Measure the water emulsion of the hollow quartz entering the heater to see if the hollow quartz sleeve of the heater has a gap. 5-4 Schematic illustration: Many of the objects and advantages of the present invention will be referred to the following details Explain that 'change # is easier to be appreciated and understood' while referring to the following explanations, among which: The first picture is a schematic cross-sectional view showing the structure of a pickling tank and a heater in the conventional technology, illustrating that the heater is immersed in the pickling tank The second picture is a schematic cross-sectional view of a water vapor detection element installed in the heater of the pickling tank in the present invention to detect whether water vapor has entered the heater. Whether the pipe wall of the device is broken; and the third figure shows the installation position of the water and gas debt measuring element in the heater of the pickling tank in the present invention, and the electronic detection element is placed at the end of the heater. Read the I & note first

I Sided Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs This paper size applies to the national standard (CNS) A4 (210X297 mm) of country f

460692 Λ7 B7 V. Description of the invention () It is easier to measure the change of water vapor in the heater 1100-acid 2100-quartz sleeve 2300-water vapor detection element, please read the precautions on the back, and then J 1000-Pickling tank 2000-Heater 2200-Heating wire 5-5 Invention Detailed description The present invention is disclosed-A heater for detecting the pickling tank is broken. Inside the hollow quartz sleeve of the heater, a water vapor is placed. / With the device, water or gas will change the color of the chemical or the electronic components of the test stone. When the quartz tube ruptures, water and gas will enter the sleeve =: The tube measuring element will detect the water and gas, so that the quartz is detected. Please refer to the second picture, which shows the pickling tank and heater Dove's profile is not intended. The pickling tank 1000 is filled with an acid solution 1100 ', and the electric component of the acid solution is a mixed solution of H2O, NH4OH and h2O2, and the mixing ratio is about 5 · (〇_1 ~ 1): about 1 According to the different processes, different solution ratios are selected, and the acid solution 1100 'must be heated to between 60 and 80 t in order to play the cleaning function. Please continue to refer to the second figure. The acid solution 1100 is heated by the heater 2000. The heater 2000 is composed of a hollow quartz sleeve 2100. The quartz sleeve 2100 has a closed end and an open end. The closed end of the quartz sleeve 2 放置 is placed in the i-liquid 1 1 00, resulting in a quartz sleeve. A part of 2100 is placed in the acid solution u⑼, and the other part is exposed to the air. The heater 2000 is based on a heating wire of 2200. This paper size is applicable to the China National Standards of Standards (CNS), the Ministry of Economic Affairs, Central Standards Bureau, consumer cooperation, and printed 460692. V. Description of the invention (/ For heating, the heating wire is 22. ° Yes-long The heating wire extends from the open end of the quartz s to the closed end of the quartz sleeve 2100. The operation mode of 4 2200 is to apply electric energy to heat the heating wire 2200. Please continue to refer to the second figure 'Heating The recommended appearance of the device is a three-section curved shape. Although: the sleeve 2100, half of the quartz sleeve 2100 extends into the acid solution. In the preferred embodiment of the present invention, the described quartz sleeve The shape of the fan is three-section curved, but the shape measured by the quartz sleeve is not limited to this type of quartz heater 2000. The method of the present invention can be used, whether the central sleeve s 2100 is broken. 邙, see the third figure 'in The quartz tube 2100 of the heater 2000 is equipped with a water vapor detection element 2_. The installation position of the water vapor_element 2 fan is set on the inner wall of the quartz tube 2100 'and attached to the tube wall for solid measurement. The position of the 2 fan of the element. The water vapor used can be deleted Chemicals that change color when exposed to water, such as copper sulfate sulfate or blue and greener than…, the damage detection element 2 3 0 〇 ㈣ also use U-capillary, as a water vapor point ^ medicine port As a water and gas detection element 2300, the medicine must be used to detect the ^ ^ color ^ visually to determine whether water and gas have entered the sleeve 2 石英 ηΓ of the quartz tube. The color change of Lepin means that the quartz tube 2 has just ruptured. It is very important to replace the quartz and place it in the position of your water lice detection unit 2300. The stone = tube = see ΓΓΓ must be put on. For example, the change in the liquid level of the acid solution 1 is convenient. Observe the water and gas detection element 2300 C crack-(Please read the precautions on the back before filling this page)

'1T 460692 A7 B7 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention () ---- The surface of the pickling tank 1000 and the heater 2_ is not intended. The structure shown in the figure is $ 2000, and the structure of the surface is similar to that of the first put mxn. The difference is in the water, and the measurement element 2300: put: the position is different. The water and gas extraction and measurement element 2300 can make IS == the inside of the sleeve 2100 for humidity monitoring-if the file is used as the water and gas detection element 2300, the high production of the water and gas production element 2300 need not be limited to the liquid level of the acid solution 1100 Above. The same degree of temperature is not as shown in the second picture. The water and gas detection element is also attached to the quartz sleeve. The height of Z is lower than the level of the acid blue. Since the electronic element is used as the water and milk price measuring element 230, there is no need to visually check the water and gas detection 1 2300, and the water and gas detection element 2 can be placed closer to the stone center sleeve The position of the closed end of the tube 21GG, or put in the part of the quartz sleeve soaked in the acid solution. Since the fracture of the quartz casing dove occurs in the part immersed in the acid solution, the water vapor_element ㈣ is placed closer to the rupture part of the heater 2000, and it is easier to detect the water vapor entering. To the case of quartz sleeve 21 00. According to m, the present invention uses a kind of water vapor detection element to detect or monitor the water vapor inside the heater-sleeve S, and to know whether there is water vapor, which enters the quartz sleeve, and judges If the quartz sleeve has a gap, it is helpful to replace the parts in time before the quartz sleeve of the heater breaks, to avoid the phenomenon that the heating wire of the heater pollutes the pickling tank. The present invention has been described in the preferred embodiment above, and those skilled in the art can make some modifications and modifications without departing from the spirit of the present invention. The patent guarantee (please read the precautions on the back before filling in this education ) ------, ^ 1 ------ ζ

Standard (CNS) M Specification (21 ^^ FIII ..... 460692 Printed by Staff Consumer Cooperative of Central Standards Bureau of the Ministry of Economic Affairs Λ7 B7 V. Description of Invention () The scope of protection shall be treated as the scope of patents attached and their equivalent fields Rather 9 (Please read the precautions on the back before filling this page) This paper size is applicable to China National Standard (CNS) A4 specification (210X297 mm)

Claims (1)

Economy t Central Standards Bureau Bureau Employees Cooperatives pi ^ VI. Patent Application Fanyuan 460 ^ 92 'The method for measuring the heater rupture of a pickling tank includes at least: placing a heating wire in a lean quartz sleeve, Γ The heater is-hollow, The sleeve has two ends, and a heating wire is placed within the quartz sleeve, extending from one end to the other end of the quartz sleeve. Wei is placed in the heater, wherein the water vapor_ 元 牛 疋Placed on the tube wall inside the quartz sleeve; Put the heater into the acid solution of the pickling tank, where a part of the heater extends into the acid solution. A part protrudes out of the acid solution, / causes the heating wire to emit thermal energy, and heats the acid solution in the pickling tank; and uses the water and gas detection element to enter the heater. Moisture of the hollow quartz sleeve, to know whether a gap is created in the hollow quartz sleeve of the heater. 2. The method as described in item (i) of the patent application, wherein the acid is a mixed solution of 40%, 〇2 and η2ο. 3. The method as described in the patent application item i, wherein the heater is composed of a quartz sleeve, and has a closed end and an opening #, and the closed end of the quartz sleeve projects into the acid solution, It's time to heat! !! The mouth end of the __ stretches out the heating wire, and extends to the closed end as i, so that the quartz sleeve surrounds the heating wire. '4. The method described in the patent application item!' Wherein the water vapor element is a tube filled with chemicals and will change color when it encounters water vapor to identify whether water vapor has entered the heater. in. Please read the notes on the back of 1¾ and write this page again. 460692 Printed by the China Standards Bureau of the Ministry of Economic Affairs, printed by the Consumer Cooperative Λ X Β8 CS D8 7, the scope of patent application 5. The method described in item 4 of the scope of patent application, ^, Dangjiayu Chemical Music is selected from one of the group consisting of ',, copper sulfate water and blue azaki chloride. 6. As described in item 丨 of the scope of patent application ^ The water and gas detection element of Ba Ning is electronically read to monitor the humidity in the heater_quartz sleeve f. 7 · —A device for detecting the cracking of the heater of the pickling tank, including at least: —The heating wire is placed in the tank, wherein the pickling tank is filled with acid solution, and the heater heats the acid solution. The heater is a hollow quartz sleeve. The quartz sleeve has two cakes. A heating wire is placed inside the quartz sleeve and extends from the-end of the quartz sleeve to the other end. -Part of the person extends into the acid towel, the heating pad is outside the acid solution; and a water vapor detection element is placed on the tube wall inside the quartz sleeve to detect Water and gas entering the hollow quartz sleeve of the heater, and know whether the heater has a gap in the hollow quartz sleeve. 8. The method as described in item 7 of the scope of patent application, wherein the acid solution is a mixed solution of OHh, H2O2 and H2O. 9. The method according to item 7 of the scope of patent application, wherein the heater is composed of a quartz tube sealed at one end, the closed end of the heater extends into the acid tank, and the other end of the heater is used for Extend into the heating wire to form the heating wire covered by the quartz sleeve ----------- ^ > installed --- '(Please read the precautions on the back before filling this page) ----- discuss Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 460692 m C3 --- ~ ____ Shen 6. Scope of Patent Application —— Settled by the management office. 10. If you apply for the paste _ item 7, the method of measuring the element is a tube filled with chemical music. 'When it encounters water vapor, it will change its color to identify whether water vapor has entered the heater. in. π. The method as described in the application section 1G, wherein the chemical is selected from one of the group consisting of anhydrous copper sulfate and blue chloride. 12. The method as described in item 7 of the scope of the patent application, wherein the water and gas detection element is an electronic element to monitor the humidity in the quartz sleeve of the heater. 13 ·-A device for rupturing a heater of a side pickling tank, including at least: adding, ... ,,,, and 糸 placed in the heater to heat the acid solution, wherein the acid pickling tank is filled with acid solution A part of the heater protrudes into the acid solution, a part of the heater protrudes out of the acid solution, and the heater is composed of a closed-end quartz tube. The closed end extends into the acid tank, and the other-end of the 4 plus ^ is used to extend the heating wire to form the heating wire covered by the stone central sleeve, and the heating wire is placed inside the quartz sleeve. Extending from the open end of the quartz sleeve to the closed end; and an under-gas Russia test element is placed on the tube wall inside the quartz sleeve, and the hollow quartz sleeve entering the heater is measured. Water vapor to see if there is a gap in the quartz sleeve of the heater. Paper size J-- n '. ^ 1!, L- ^ Ύ nnn III, 1T ^ — —— 1-I --- I Λ. N!' HI i-IV—-1-I = · Γ I .n II— m--I f. (Please read the precautions on the back before filling this page) B8 α D8 16 460692 、 Shenqing Patent Fanyuan 14. If the scope of patent application is the first The mysterious method, wherein the acid solution is a mixed solution of ΝΗ4〇ί · ί, Wei 02 and Η20. = The method described in item 13 of the patent application, wherein the water and gas detection element is equipped with a tube of medicine, and when it encounters water and gas, it will change color to identify whether water and gas enter the heater. The method according to item 15 of the application patent, wherein the chemical is selected from one of the group consisting of anhydrous copper sulfate and blue cobalt chloride. π. The method according to item 帛 η of the scope of patent application, wherein the water-gas component is an electronic 7G component, and the humidity in the quartz sleeve of the heater is monitored. (Please read the notes on the back before filling out this page) -11J ----- 1 -------- ^ 1 Pack ——-- 1-I. 、-° Staff of Central Standards Bureau, Ministry of Economic Affairs Printed by Consumer Cooperatives 13 This paper is sized for China National Standard (CNS) Α4 (210 × 297 mm) * mnm ^ im