經濟部智慧財產局員工消費合作社印製 457 1 20 A7 B7 五、發明說明（） 發明領域: 本發明係關於一種降低排放廢氣t揮發性有機物的 裝置及其方法，特別係關於降低排放廢氣中高沸點揮發性 有機物的裝置及其方法。 發明背景: 本世紀末在民智提昇的今曰，環保工作乃是眾人注視 的焦點I無論對於現今環境或是為往後子孫的生存環境， 環保意識乃是現今世界人類的共識。故各國相關法令紛紛 制定，本國對於廢氣排放亦有相關規定標準。 然而，在半導體製造過程中必然伴隨著一些廢氣體產 生，如何兼顧產業進步，並且盡到應有的環保責任乃是現 今廠商亟欲追求的標的。在半導體製造過程中，尤其是顯 影製程步驟中，通常必須採用大量揮發性有機物 (vaporized organic compound ； V0C)溶劑，例如：DM SO、 二甲基乙醯胺' NMP ' (CH3)2S、（CH3)2S2、甲笨、環庚酮、 異丙醇（iso-propyl alchol: IPA)、丙酮等。而這些揮發 性有機物若不經處理，不當的排放至空氣將造成環境的莫 大傷害，同時也不符合國家法令標準。 一般對於排放廢氣中的揮發性有機物的處理方式可 包含吸附、吸收、熱焚化，以及熱觸媒等方法處理之。其 2 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公釐） -----Γ---訂.---------"、 (請先閱讀背面之注意事項再填寫本頁) 457120 A7Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 457 1 20 A7 B7 V. Description of the invention () Field of the invention: The present invention relates to a device and method for reducing emissions of volatile organic compounds, especially the reduction of high boiling points in the exhaust gas. Device and method for volatile organics. Background of the Invention: At the end of this century, when people ’s wisdom is being promoted, environmental protection is the focus of everyone ’s attention. Regardless of the current environment or the living environment of future generations, environmental protection awareness is the consensus of humanity in the world today. Therefore, relevant laws and regulations of various countries have been formulated one after another, and there are also relevant standards for exhaust emissions in their own countries. However, in the process of semiconductor manufacturing, there must be some waste gas generation. How to take into account industrial progress and achieve due environmental protection responsibilities is the goal that manufacturers are now pursuing. In the semiconductor manufacturing process, especially during the development process, a large amount of volatile organic compound (VOC) solvents must be used, such as: DM SO, dimethylacetamide 'NMP' (CH3) 2S, (CH3 ) 2S2, methylbenzyl, cycloheptanone, iso-propyl alchol (IPA), acetone, etc. If these volatile organic compounds are not treated, improper discharge into the air will cause great harm to the environment, and at the same time, they will not meet national laws and regulations. Generally, the treatment methods for volatile organic compounds in the exhaust gas can include adsorption, absorption, thermal incineration, and thermal catalyst treatment. The 2 paper sizes are applicable to China National Standard (CNS) A4 specifications (210 X 297 mm) ----- Γ --- Order .--------- ", (Please read the first Note: Please fill out this page again) 457120 A7
^ _______—______________________ M 五、發明說明（） 中被現今半導體廠最常採用的方法為吸附的方法，例如： 利用沸石轉輪吸附方法降低排放廢氣中揮發性有機物办 第1圖所示，其中~般採用之沸石為氧化鋁或分子篩的’弗 石》此方法是將來自各場區製程時所產生之揮發性有機物 廢氣，其中揮發性有機物之含量約150〜2〇〇PP[n的廢氣’ 在室溫下，經由管線1 a進入沸石轉輪A1之中，以沸石轉 輪吸附排放廢氣中的揮發性有機物3而經沸石吸附伖的廢 氣分流為2a和3a二管線，其中2a和3a管線的氣體抓量 比約9 : 1。此時經過彿石轉輪吸附過後的排放廢氣’'揮号 性有機物的含量約下降至1 〇〜1 5 p P m。而大部分被，弗石轉 輪吸附後之氣體經2a管線排放至大氣中；只剩一小部份 的之氣體則由管線3a引導至提供沸石之再生用°此一小 部份作為沸石再生的廢氣與來自燃燒器燃燒後的—部份 高溫氣體（約1 8 0°C)結合。此高溫氣體與此少量之廢氣混 合後經由管線4 a ’以和揮發性有機物廢氣送入轉輪方向相 反的方向通過沸石’用以脫除吸附於沸石之濃縮揮發性有 機物°再將經脫除之濃縮的揮發性有機物廢氣（其揮發性 有機物之含量約1000〜1500ppm)經由管線5a送入第一熱 交換器Η1中加熱，再由管線6 a送入一燃燒器B1 _燃燒 掉=而燃燒後產生的高溫廢氣（約760oC )再經由管線7a 進入第一熱交換器HI中以提供作為第—熱.交換器hi的熱 源β此燃燒後的南溫廢氣經第一熱交換器丨丨丨降溫之後， 再進入第二熱交換器Η 2中分為兩個管線。一部份由管線 8a排放’且此廢氣之_的揮發性有機物含量已降低至 3 本紙張尺度適用t國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) 裝-----„----訂---------_ 經濟部智慧財產局員工消費合作社印裂 457120 A7 B7 五、發明說明（） 1 0ppm以下。另一部份則作為沸石之循環再生用= 然而，利用沸石轉輪當作揮發性有機物的吸附源常常 會面臨沸石在熱脫除不完全時，有機物慢慢在沸石上累 積，造成其吸附效率越來越差。其中，特別是DMSO、二甲 機乙醢胺及NMP成分時，其高沸點的特性更容易殘留在沸 石轉輪上而無法被高溫氣體脫除，使得沸石活性降低，進 而降低沸石吸附揮發性有機物的效率。此外，在化學氣相 沈積（CVD)中所產生的臭氧（〇3)也常常是造成空氣汙染重 要的成份之一。 故如何克服利用沸石轉輪去除揮發性有機物的方法 所面臨的問題，並且降低所需的成本乃是必須的。此外， 現今地球資源日漸枯竭，若能善用排故廢棄尹有效的資 源，不但可以降低成本，也可盡到一份環保的義務。 發明目的及概述： 本發明之目的為提供一種有效降低排放廢棄中之撣 發性有機物之裝置及其方法。特別提供一種是有效的降低 排放廢氣中高沸點揮發性有機物之裝置及其方法。 本發明方法係在一個湮式洗滌塔_，以水洗滌並以臭 氧氧化高沸點揮發性有機物。本發明之裝置及其方法主要 4 本紙張尺度適用t國國家標準（CN^4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) 裝·----^----訂------!-,^ 經濟部智慧財產局員工消費合作社印製 457120 A7 87 五、發明說明（） 是將來自各廠區所收集之高沸點揮發性有機物，例如 DMSO、二甲基乙醯胺、關P等成份，送至一個溼式洗滌塔 中以水洗滌。在洗滌塔中排放之廢氣與洗滌液接觸時間約 為0, 3秒以上，然後再將來自CVD製程中所產生的臭氧通 入洗滌廢液中，利用臭氧氧化已經溶解之高沸點的揮發性 有機物。而臭氧與廢氣所產生之二氧化碳則經由洗滌塔的 頂部排放至大氣中。此外，反應所產生之酸性的副產物可 能會使得洗滌液酸化，故可藉由偵測其酸鹼度而加入適當 之調節劑來控制洗滌液的酸鹼度。 圄式簡單說明： 第1圖為現今使用沸石轉輪吸附排放廢氣ΐ揮發性有機物 的示意圖a 第2圖為本發明之方法的設備圖。 (請先閲讀背面之注意事項再填寫本頁) -----^----訂 ---------'" 經濟部智慧財產局員工消費合作社印製 圃號對照說明= la 管線 2a 管 線 3a 管線 4a 管 線 5 a 管線 6a 管 線 7a 管線 8a 管 線 ,U 沸石轉輪 B1 燃 燒器 HI 第一熱交換器 H2 第 二熱交換器 lb 管線 2b 管 線 5 本紙張尺度適用_國國家標準（CNS>A4規格（210 x 297公釐） 457120 A7 B7 五、發明說明（ 3b 管線 1 c 管線 2c 管線 3c 管線 SI 洗滌塔 R1 儲存槽 PI 儲存槽 經濟部智慧財產局員工消費合作社印製 發明詳細說明: 如第2圖所示為本發明方法之設備裝置圖’本發月之 裝置包含以下的部分：洗滌塔S1用來降低排放廢氣中之问 沸點揮發性有機物的含量。管線1 b為收集來自半導體各 廠區所收集之含高沸點揮發性有機物的廢氣，其一端與洗 滌塔S1相通；管線2 b用以收集來自C V D製程中所產生之 臭氧用以注入洗滌塔s1之底部；而廢氣與洗滌液所產生 之二氧化碳則由洗滌塔S1之頂部的管線3 b排放至大氣 中°此外’洗滌塔s 1並透過一洗滌液之儲存槽R1與一管 線1 c連接，此管線1 c係用來將洗滌液注入儲存攢r 1之 中。同時’由洗滌塔S1所產生之廢液亦透過儲存憎R1由 管線2 c排放至外部廢水處理廠集中處理。此外，由於這 些高沸點揮發性有機物與臭氧反應之後會產生酸性物 質’使得洗滌液慢慢酸化；洗滌液酸化後會慢慢腐蚀洗滌 塔S1以及储存槽R丨’故必須進行適當的中和反應，故有 一管線3c用以將氫氣化鈉（NaOH)溶液注入至儲存槽r 1 ; 其令’氩氧化納溶液則由另一儲存槽P1所储存之。 6 本紙張尺度適用令國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁) 裝-----r---訂----------" 45712〇 A7 五、發明說明（） 本發明之裝置及其方法主要是將來自各廠區所收集 之高沸點揮發性有機物，例如DMS〇、二甲基乙醯胺' 等成份，送至一個溼式洗滌塔3丨中以水洗滌。其中洗滌 塔S1為任何可以作為溼式洗滌用的溼式洗滌裝置，例如： 填充塔、泡罩塔1霧塔或以及文式洗料，而且洗蘇塔 s 1底部並與供應洗滌液的儲存槽R丨相通。在洗滌塔s i 中排放之廢氣與洗滌液接觸時間約為0. 3秒以上，然後在 將來自CVD製程中所產生的臭氧通入洗滌廢液中，其中由 CVD製程所產生之臭氧的純度至少j 〇%。並利用此臭氣氧 化已經溶解之高沸點的揮發性有機物。而臭氧與這些高沸 點之揮發性有機物的化學反應如了 . (1) NMP: 3C5H9NO+I 6〇3-> 15C〇2+l 2H2〇 + 3HN〇3 (2) DMSO: C 2 H 6 0 S + 3 0 3 > 2 C 0 2 + 2 H 2 0 + H 2 S 0 4 丨… (3 ) nionothano 1 amine: 〇2Η/ΝΟ + 3〇3-^ 2C〇2 + 3H2〇 + HNO：jia,i! 而臭氧與廢氣所產生之二氧化碳則經由洗滌塔的頂 部之管線3 b排放至大氣中。此外，由反應所產生之酸性 的副產物可能會使得洗滌液酸化，故可藉由偵測其酸鹼度 而加入適當之調節劑來控制洗蘇液的酸驗度；例如：加入 NaOH溶液中和其酸鹼度。 7 本紙張尺度適用t國國家標準（CNS)A4規格（210 X 297公釐） (請先閱讀背面之注意事項再填寫本頁> 裝-----r---訂---------έ"ν 經濟部智慧財產局員工消費合作社印製^ ______________________________ M V. Invention Description () The method most commonly used by semiconductor factories today is the adsorption method. For example: The zeolite runner adsorption method is used to reduce the volatile organic compounds in the exhaust gas, as shown in Figure 1, where ~ The commonly used zeolite is alumina or molecular sieve. This method is to use the volatile organic waste gas generated during the process in each field, and the content of volatile organic compounds is about 150 ~ 200 PP [n waste gas'. At room temperature, it enters the zeolite runner A1 via line 1a. The zeolite runner absorbs the volatile organic compounds 3 in the exhaust gas and the exhaust gas that is adsorbed by the zeolite is divided into two lines 2a and 3a, of which the 2a and 3a lines The gas capture ratio is about 9: 1. At this time, the content of the exhaust gas after the adsorption by the fossil runner was reduced to approximately 10 to 15 p P m. Most of the gas adsorbed by the spar wheel is discharged to the atmosphere through the 2a line; only a small part of the gas is guided by the line 3a to provide regeneration for zeolite. This small part is used for zeolite regeneration. The exhaust gas is combined with some high-temperature gas (about 180 ° C) from the burner. This high-temperature gas is mixed with this small amount of exhaust gas and passed through zeolite in the direction opposite to the direction in which the volatile organic gas exhaust gas is sent to the runner via line 4a to remove the concentrated volatile organic compounds adsorbed on the zeolite. The concentrated volatile organic waste gas (the content of volatile organic compounds is about 1000 ~ 1500ppm) is sent to the first heat exchanger Η1 through line 5a for heating, and then sent to a burner B1 from line 6a. The high-temperature exhaust gas (approximately 760oC) generated afterwards enters the first heat exchanger HI through the line 7a to provide the first heat. The heat source β of the exchanger hi is burned by the south temperature exhaust gas through the first heat exchanger. After the temperature is lowered, it enters the second heat exchanger Η 2 and is divided into two pipelines. Part of it is discharged from pipeline 8a, and the content of volatile organic compounds in this exhaust gas has been reduced to 3 This paper size is applicable to the national standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back first (Fill in this page again.) ------------ Order ---------_ Employee Cooperative Cooperative of Intellectual Property Bureau of the Ministry of Economy printed 457120 A7 B7 V. Description of the invention () 10 ppm or less. The other part is used for the cyclic regeneration of zeolite. However, using the zeolite runner as the adsorption source of volatile organic compounds often faces the zeolite when the thermal removal is incomplete, the organic matter slowly accumulates on the zeolite, causing its adsorption efficiency. Increasingly worse. Among them, especially when DMSO, dimethylacetamide and NMP components, its high boiling point characteristics are more likely to remain on the zeolite runner and cannot be removed by high temperature gas, which reduces the activity of zeolite, which in turn reduces it. The efficiency of zeolite adsorption of volatile organic compounds. In addition, the ozone (〇3) produced in chemical vapor deposition (CVD) is often one of the important components causing air pollution. So how to overcome the use of zeolite wheels to remove volatile organic compounds Methods The problems faced, and the required cost reduction is necessary. In addition, the earth ’s resources are drying up. If you can make good use of the waste resources, you can not only reduce costs, but also fulfill an environmental protection obligation. OBJECTS AND SUMMARY OF THE INVENTION: The purpose of the present invention is to provide a device and a method for effectively reducing the emission of organic compounds in waste. Particularly, a device and a method for reducing the high-boiling volatile organic compounds in the exhaust gas are provided. The method of the invention is in a 湮 -type washing tower, which is washed with water and oxidizes high boiling point volatile organic compounds with ozone. The device and method of the present invention mainly include 4 national paper standards (CN ^ 4 specifications (210 X 297) (Mm) (Please read the precautions on the back before filling out this page) Packing ---- ^ ---- Order --------!-, ^ Printed by the Intellectual Property Bureau of the Ministry of Economic Affairs Consumer Cooperatives 457120 A7 87 V. Description of the invention () The high boiling point volatile organic compounds collected from various factories, such as DMSO, dimethylacetamide, Guan P and other components, are sent to a wet washing tower and washed with water. The contact time between the exhaust gas discharged from the washing tower and the washing solution is about 0, 3 seconds, and then the ozone generated from the CVD process is passed into the washing waste solution, and the dissolved high-boiling volatile organic compounds are oxidized by ozone. The carbon dioxide generated by ozone and exhaust gas is discharged into the atmosphere through the top of the scrubber. In addition, the acidic by-products generated by the reaction may acidify the scrubbing liquid, so appropriate adjustments can be added by detecting its pH. Agent to control the pH of the washing liquid. Simple description of the formula: Figure 1 is a schematic diagram of the current use of zeolite runners to adsorb exhaust gases and volatile organic compounds a. Figure 2 is the equipment diagram of the method of the present invention. (Please read the precautions on the back before filling out this page) ----- ^ ---- Order --------- '" Comparison of printed garden numbers printed by employees ’cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs = la pipeline 2a pipeline 3a pipeline 4a pipeline 5 a pipeline 6a pipeline 7a pipeline 8a pipeline, U zeolite runner B1 burner HI first heat exchanger H2 second heat exchanger lb pipeline 2b pipeline 5 This paper is applicable Standard (CNS > A4 size (210 x 297 mm) 457120 A7 B7 V. Description of the invention (3b pipeline 1c pipeline 2c pipeline 3c pipeline SI washing tower R1 storage tank PI storage tank Intellectual Property Bureau employee consumption cooperative of the Ministry of Economic Affairs printed inventions Detailed description: As shown in Figure 2 is the equipment and device diagram of the method of the present invention. The equipment of the present month includes the following parts: the washing tower S1 is used to reduce the content of volatile organic compounds at the boiling point in the exhaust gas. Line 1 b is Collect the exhaust gas containing high boiling point volatile organic compounds collected from various semiconductor factories, one end of which is connected to the washing tower S1; line 2b is used to collect the ozone generated from the CVD process for injection and washing The bottom of s1; and the carbon dioxide generated by the exhaust gas and the washing liquid is discharged to the atmosphere through the line 3 b at the top of the washing tower S1. In addition, the 'wash tower s 1 is connected to a line 1 c through a washing liquid storage tank R1 This line 1c is used to inject the washing liquid into storage 攒 r 1. At the same time, the waste liquid produced by the washing tower S1 is also discharged from the line 2c to the external wastewater treatment plant through the storage port R1 for centralized treatment. In addition, Since these high-boiling volatile organic compounds react with ozone to produce acidic substances, the washing liquid is slowly acidified; after the acidification of the washing liquid, the washing tower S1 and the storage tank R1 are slowly corroded. Therefore, an appropriate neutralization reaction must be performed. There is a line 3c for injecting sodium hydride (NaOH) solution into storage tank r 1; it allows the sodium argon oxide solution to be stored in another storage tank P1. 6 This paper size is subject to the national standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling this page) Installation ----- r --- Order ---------- " 45712〇A7 V. Description of the invention () The device and method of the present invention are mainly future High boiling point volatile organic compounds collected in each plant area, such as DMS〇, dimethylacetamide 'and other components, are sent to a wet washing tower 3 丨 and washed with water. Among them, the washing tower S1 can be used for wet washing The wet washing device used is, for example, a filling tower, a blister tower 1 or a mist washing tower, and the bottom of the washing tower s 1 is in communication with the storage tank R 丨 for supplying washing liquid. The contact time of the exhaust gas and the washing liquid discharged in the washing tower si is about 0.3 seconds or more, and then the ozone generated from the CVD process is passed into the washing waste liquid, wherein the purity of the ozone generated by the CVD process is at least j 〇%. This odor is used to oxidize the dissolved high-boiling volatile organic compounds. The chemical reaction between ozone and these high-boiling volatile organic compounds is as follows. (1) NMP: 3C5H9NO + I 6〇3- > 15C〇2 + l 2H2〇 + 3HN〇3 (2) DMSO: C 2 H 6 0 S + 3 0 3 > 2 C 0 2 + 2 H 2 0 + H 2 S 0 4 丨 ... (3) nionothano 1 amine: 〇2Η / ΝΟ + 3〇3- ^ 2C〇2 + 3H2〇 + HNO : Jia, i! The carbon dioxide produced by ozone and exhaust gas is discharged into the atmosphere through the line 3 b at the top of the scrubber tower. In addition, the acidic by-products produced by the reaction may acidify the washing liquid. Therefore, the acidity of the washing liquid can be controlled by detecting the acidity and alkalinity of the washing liquid; for example, adding NaOH solution to neutralize it PH. 7 This paper size is applicable to the national standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling this page > Loading ----- r --- Order ---- ----- έ " ν Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs
| :百先，將來自 礙區的廢氣集中收集由管線lb送至《十 ^ s式洗滌塔S 1中以 洗梅之》而將廢氣中的高沸點揮發性有機 $伐物溶解並累積 洗滌塔Si底部。洗滌塔S1之底部並盥從六扯 〜 ’、1邊存槽R ί之底 並相通。接著，由管線2b通入由CVD所| ^ R ^ ^ 往' 王及中之臭氧 讓臭氡與洗滌液充分混合’並讓這些高沸點揮發性有機 進行反應；其反應如上文所述。當反應發生後，所產生 二氧化碳由洗蘇塔頂部之管線3b排玫§ 士 # 认芏大虱。如此可 達到降低排放廢氣中高沸點揮發性有機物之含量。然後 當此洗滌塔S1處理排放之廢氣一段時間後，視洗滌液 睃鹼度可由管線3c自氩氡化鈉之儲存槽p丨注入氫氧化 溶液至洗滌液之儲存槽R1之中，用以中和洗滌液的酸 度’以避免洗蘇液過酸而侵蝕洗滌塔S1。本發明可以將 故廢氣中的高沸點之揮發性有機物的含量降低至 下= 本發明之裝置及其方法不但可以避兔沸石轉輪所遭 遇的問題，並且可以更有效的降低排放廢氣中揮發性有機 物的含量。特別是，本發明方法更可有效除去沸點18(rc 以上之高沸點揮發性有機物（如：DMSO、二甲基乙醯胺、NMp 等）；此類高沸點之揮發性有機物特別不易從彿石上去 除，造成沸石的吸附效用降低。此外，本發明更充分的利 用到原先是廢氣汙染源之一的臭氧來處理廢氣，故本發明 8 本紙張尺度適用中國國家標準（CNS)A4規格（210 X 297公爱） (請先閱讀背面之注意事項再填冩本頁) 裝-----„----訂-------丨--^' 經濟部智慧財產局員工消費合作杜印製 LO 經濟部智慧財產局員工消費合作社印製 4 1 20 A7 _B7 五、發明說明（） 之裝置及其方法時則是一非常符合環保意識抬頭的現今 觀念。 以上所述僅為本發明之較佳實施例而已，並非用以限 定本發明之申請專利範圍；凡其它未脫離本發明所揭示之精 神下所完成之等效改變或修飾，均應包含在下述之申請專利 範圍内^ 本紙張尺度適用中國國家標準（CNS)A4規格（210x 297公釐） I — — — — — — — — — — -fill· — !— »11111111— V . {請先閲讀背面之注意事項再填寫本頁)|: Baixian, the waste gas from the affected area is collected and sent from the line lb to the "washing of plums in the ten-s-type washing tower S 1" to dissolve the high boiling point volatile organic wastes in the waste gas and accumulate washing Tower Si bottom. The bottom of the washing tower S1 is connected to the bottom of the washing tower S1, and is connected to the bottom of the side storage tank R ί. Next, through the line 2b, the CVD || R R ^ ^ goes to the king and the ozone. Let the odor and the washing liquid be thoroughly mixed 'and let these high boiling point volatile organic compounds react; the reaction is as described above. When the reaction occurs, the carbon dioxide produced is discharged from the pipeline 3b at the top of the washing tower. This can reduce the content of high boiling point volatile organic compounds in the exhaust gas. Then, after the scrubber S1 treats the exhaust gas for a period of time, depending on the alkalinity of the scrubbing solution, the hydroxide solution can be injected from the storage tank p of sodium argon trioxide p 3 into the storage tank R1 of the scrubbing solution according to the alkalinity of the scrubbing solution. And the acidity of the washing liquid 'to prevent the washing liquid from being too acidic and eroding the washing tower S1. The invention can reduce the content of high boiling point volatile organic compounds in the exhaust gas to the lower level. The device and the method of the invention can not only avoid the problems encountered by the rabbit zeolite runner, but also can more effectively reduce the volatility in the exhaust gas. Organic content. In particular, the method of the present invention can more effectively remove boiling points 18 (high boiling point volatile organic compounds above rc (such as: DMSO, dimethylacetamide, NMp, etc.); such high boiling point volatile organic compounds are particularly difficult to get from the stone Removal, resulting in reduced adsorption efficiency of zeolite. In addition, the present invention makes fuller use of ozone, which was originally one of the sources of exhaust gas pollution, to treat exhaust gas, so the present invention 8 The paper size is applicable to Chinese National Standard (CNS) A4 (210 X 297) Gongai) (Please read the precautions on the back before filling out this page) Loading ----- „---- Order ------- 丨-^ 'Consumption Cooperation between Employees and Intellectual Property Bureau of the Ministry of Economic Affairs Printed by the Consumers ’Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 4 1 20 A7 _B7 V. The device and method of the invention description is a modern concept that is in line with the rise of environmental awareness. The above is only the present invention. The preferred embodiments are not intended to limit the scope of patent application of the present invention; all other equivalent changes or modifications made without departing from the spirit disclosed by the present invention should be included in the scope of patent application below ^ This paper Applicable to China National Standard (CNS) A4 specifications (210x 297 mm) I — — — — — — — — — — —fill · —! — »11111111— V. {Please read the notes on the back before filling this page )