449663 五、發明說明⑴ --- (發明背景） 光柵影像為利用各種不同的微細光柵排列組合所形成 的影像°由於光柵可依其間距、方向、繞射效率而對不同 波長的光線有不同的繞射效果。因此一個光柵影像的製作 方法必須能控制光柵形成的間距、方向、繞射、效率、大 小’並能夠將其排列組合，以形成光柵影像。 第 圖所示為形成光栅的基本方法’雷射光a與同調 雷射光b交會處即會形成干涉駐波，此時若將感光物質放 置於平面A-A處’即可記錄干涉駐波形成光柵α 第二圖及第三圖所示為光柵影像製作方法中常用的形 成光栅方法，當兩道平行的雷射光a、b垂直入射透鏡51， 經由透鏡51的偏折，雷射光a、b將於透鏡51之焦點處交會 形成干涉駐波，此時於透鏡51之焦平面處放置感光物質6 ，即可將干涉駐波，轉換成光栅。因此，控制雷射光a、b 入射透鏡51的位置’即可控制光柵間距及光栅方向；控制 曝光量即可控制光柵繞射效率；控制雷射光a、b的光束大 小及發散角度，則可控制光柵形成範圍的大小。 第四圖所示為先前技術之一，雷射光源丨丨發出雷射光 L ’經過聲光調變器（AOM )21控制曝光量。雷射光[繼續 通過擴束器3a ’擴束器3a係由透鏡31及透鏡32組成，移動 透鏡31或透鏡32即可控制雷射光L的發散角度，進而控制 光柵形成le圍的大小。反射鏡111改變雷射光L的進行方 向’無特別功能’雷射光L進入分光及導光裝置4a，分光 鏡41將雷射光L分成雷射光a及雷射光b，雷射光^經反射 449663 五、發明說明（2) 鏡4 2、44反射後垂直入射透鏡51 ’雷射光b經反射鏡43反 射後垂直入射透鏡51，雷射光a、b經透鏡51偏折後於透鏡 51的焦點處交會’形成干涉駐波’感光物質6置於透鏡51 的焦平面上’將干涉駐波記錄成光栅。此時同時移動分光 鏡41及反射鏡4 2可改變雷射光a、b之相對距離，並改變光 柵形成之間距。沿雷射光L之入射光軸整個旋轉分光及導 光裝置4a，可改變光柵形成之方向。精密位移平台？！用來 承載並移動感光物質6 ’以排列組合各種不同的光柵，形 成光栅影像。聲光調變器21、擴束器3a、分光及導光裝置 4a、精密位移平台71均可經由電腦控制以達到自動化的目 的。 第四圖 涉駐波的方 (LDA)，由 慢動態響應 本發明 方法、局部 (圖式部分） 第一圖 第二圖 第三圏 第四圖 第五圓 第六囷 所示的分光及導充裝置乜及利用透鏡5丨形成干 法均借用於既存的雷射都卜勒流場干涉儀 於其分光及導光裝置4a及精密位移平台71的緩 ，形成此光栅影像製作方法的速度瓶頸^ 的方法架構、導光方法、對稱光產生 掃描方法，以達到光栅影像的製作需求。 形成光栅的基本方法示意圖 常用的形成光柵方法示意圖 第2圖之俯視圖。 先前技術示意圖。 本發明之構想方塊圖。 本發明之導光控制焚婆〜 449663 五、發明說明（3) 第七圖：本發明之導光控制裝置之二。 第八圖··本發明之對稱光產生裝置。 第九圖：本發明之局部掃描裝置之一。 第十圖：本發明之局部掃描裝置之二。 第十一圖：本發明之局部掃描裝置之三。 第十二圖：本發明之可行例參考圖。 (圖號部分） a、b雷射光 L雷射光 L同調光 1同調光源 11雷射光源 111反射鏡 2曝光控制裝置21聲光調變器 3光柵尺寸控制襄置 3a擴束器 31、32透鏡 4a分光及導光裝置 41分光鏡 42、43、44反射鏡 51透鏡 6感光物質 7感光物質承載裝置 71精密位移平台 8導光控制裝置8a導光控制裝置 8b導光控制裝置81透鏡 82掃描鏡片 83、84透鏡 85聲光偏折器 86透鏡 87遮光器 9對稱光產生裝置 9a對稱光產生裝置91分光鏡 9 2钱尾棱鏡 96分光鏡 10b局部掃描裝置 103掃描透鏡 93、94反射鏡 1 〇局部掃描裝置 1 01婦描鏡片 104聲光偏折器 95鴿尾稜鏡 10a局部掃描裝置 102透鏡 1 0 5透鏡 106遮光器 1〇7、1〇8透鏡 12控制單元 1 3人機界面449663 V. Description of the invention ⑴ --- (Background of the invention) The raster image is an image formed by using various different fine grating arrangements and combinations ° Because the grating can have different wavelengths of light according to its spacing, direction, and diffraction efficiency Diffraction effect. Therefore, a method of making a raster image must be able to control the pitch, direction, diffraction, efficiency, size of the raster formation, and arrange and combine them to form a raster image. The figure shows the basic method of forming a grating. 'Interfering standing waves will form at the intersection of laser light a and coherent laser light b. At this time, if a photosensitive substance is placed on plane AA', the interference standing wave can be recorded. The second and third figures show the method of forming a grating commonly used in the production method of grating images. When two parallel laser lights a and b enter the lens 51 perpendicularly, the laser lights a and b will pass through the lens 51 through the deflection of the lens 51. An interference standing wave is formed at the focal point of 51. At this time, a photosensitive material 6 is placed at the focal plane of the lens 51 to convert the interference standing wave into a grating. Therefore, controlling the position of the incident light 51 of the laser light a, b can control the grating pitch and the grating direction; controlling the exposure amount can control the grating diffraction efficiency; controlling the beam size and divergence angle of the laser light a, b, can control The size of the grating formation range. The fourth figure shows one of the prior arts. The laser light source 丨 丨 emits laser light L ′ through an acousto-optic modulator (AOM) 21 to control the exposure amount. Laser light [continued through the beam expander 3a 'The beam expander 3a is composed of a lens 31 and a lens 32. Moving the lens 31 or the lens 32 can control the divergence angle of the laser light L, and then control the size of the grating to form a circle. The reflecting mirror 111 changes the direction of the laser light L. “No special function”. The laser light L enters the light splitting and light guiding device 4a. The beam splitter 41 divides the laser light L into laser light a and laser light b. The laser light ^ is reflected 449663. Description of the invention (2) Mirror 4 2 and 44 reflect perpendicularly incident lens 51 'Laser light b is reflected by mirror 43 and incident on lens 51 vertically, laser light a and b meet at the focal point of lens 51 after being deflected by lens 51' Forming an interference standing wave 'the photosensitive material 6 is placed on the focal plane of the lens 51' records the interference standing wave as a grating. At this time, moving the beam splitter 41 and the reflector 42 at the same time can change the relative distance between the laser light a and b, and change the distance between the gratings. The rotation of the beam splitter and light guide device 4a along the incident optical axis of the laser light L can change the direction in which the grating is formed. Precision displacement platform? !! It is used to carry and move the photosensitive material 6 'to arrange and combine various gratings to form a grating image. The acousto-optic modulator 21, the beam expander 3a, the light splitting and light guiding device 4a, and the precision displacement platform 71 can all be controlled by a computer to achieve the purpose of automation. The fourth figure involves standing wave (LDA), which is based on the slow dynamic response of the method of the present invention, and part (schematic part) of the first figure, second figure, third figure, fourth figure, fifth circle, and sixth figure. The filling device and the use of the lens 5 to form a dry method are used to slow the existing laser Doppler flow field interferometer in its beam splitting and light guiding device 4a and the precision displacement platform 71, forming the speed bottleneck of this raster image production method ^ Method architecture, light guide method, and symmetrical light generation scanning method to meet the needs of raster image production. Schematic diagram of the basic method of forming the grating Schematic diagram of the commonly used method of forming the grating The top view of Figure 2. Schematic of prior art. Conceptual block diagram of the present invention. The light guide control burner of the present invention ~ 449663 V. Description of the invention (3) The seventh figure: The second light guide control device of the present invention. Eighth Figure ... The symmetrical light generating device of the present invention. Figure 9: One of the local scanning devices of the present invention. Tenth figure: The second partial scanning device of the present invention. Figure 11: The third part of the local scanning device of the present invention. Figure 12: Reference drawing of a feasible example of the present invention. (Part of drawing number) a, b laser light L laser light L co-modulation 1 co-modulation light source 11 laser light source 111 reflector 2 exposure control device 21 acousto-optic modulator 3 grating size control 3a beam expander 31, 32 lens 4a beam splitting and light guiding device 41 beam splitter 42, 43, 44 reflecting mirror 51 lens 6 photosensitive material 7 photosensitive material bearing device 71 precision displacement platform 8 light guiding control device 8a light guiding control device 8b light guiding control device 81 lens 82 scanning lens 83, 84 lenses, 85 acousto-optic deflectors, 86 lenses, 87 shutters, 9 symmetrical light generating devices, 9a symmetrical light generating devices, 91 beam splitters, 9 2 money tail prisms, 96 beam splitters, 10 b local scanning devices, 103 scanning lenses, 93, and 94 reflecting mirrors. Local scanning device 1 01 Women's tracing lens 104 Acousto-optic deflector 95 Pigtail tail 10a Local scanning device 102 Lens 1 0 5 Lens 106 Shade 1 07, 108 Lens 12 Control unit 1 3 Human machine interface
449663 五、發明說明（4) (發明概述） 第五圖為本發明之構想方塊圖，每個方塊代表一項基 本功能’實線表示同調光，實線箭頭表示同調光杆推方仓 ，虛線表示訊號傳輸。其中： 先订進方〜 同調光源1用來提供同調光L。 同調光L·經過曝光控制裝置2，控制曝光量。 同調光L繼續經過光栅尺寸控制裝置3，控制光拇的 大小。 同調光L繼續經光導光控制裝置8，控制光柵的間距 及方向。 同調光L進入對稱光產生裝置9，分成互相對稱之同 調光a、b。 同調光a、b經過局部掃描裝置1〇後，互相交會形成干 涉駐波，局部掃描裝置1 〇並可在局部範圍内改變干涉駐波 形成之位置。 感光物質6將干涉駐波以光柵之形式記錄。 感光物質承載裝置7承載並移動感光物質6，在大範圍 區域内記錄光栅。 人機界面1 3提供必須之資料輸入界面。 控制單元12接受人機界面13提供之輸入資料，將其轉 換成控制訊號，控制曝光控制裝置2、光栅尺寸控制裝置3 、導光控制裝置8、局部掃描裝置1〇、感光物質承載裝置7 各個方塊基本功能的達成方法，將於以下詳述。449663 V. Description of the invention (4) (Summary of the invention) The fifth diagram is a block diagram of the concept of the present invention. Each square represents a basic function. The solid line indicates co-dimming. Signal transmission. Among them: order first ~ co-modulating light source 1 is used to provide co-modulating light L. The co-dimming L · passes through the exposure control device 2 to control the exposure amount. The co-dimming light L continues to pass through the grating size control device 3 to control the size of the thumb. The co-adjusted light L continues to control the pitch and direction of the grating through the light guide control device 8. The co-modulated light L enters the symmetric light generating device 9 and is divided into co-modulated lights a, b which are symmetrical to each other. After the co-adjusted lights a and b pass through the local scanning device 10, they intersect to form an interference standing wave. The local scanning device 10 can change the position of the interference standing wave in a local range. The photosensitive substance 6 records the interference standing wave as a grating. The photosensitive substance carrying device 7 carries and moves the photosensitive substance 6, and records a grating in a wide area. HMI 1 3 provides the necessary data input interface. The control unit 12 receives the input data provided by the man-machine interface 13 and converts it into control signals, and controls the exposure control device 2, the raster size control device 3, the light guide control device 8, the local scanning device 10, and the photosensitive substance bearing device 7 The method for achieving the basic functions of the block will be described in detail below.
第7頁 4 49 66 3 五、發明說明（5) (發明詳述） 本發明之基本構想已於第五圖中說明。 本發明中之同調光源丨、曝光控制裝置2、光栅尺寸控 制裝置3、感光物質6、感光物質承載裝置7、控制單元12二 、人機界面1 3等將沿用一般習知的方法。 本發明中之導光控制裝置8、對稱光產生裝置9、局部 掃描裝置1 0，將於以下詳細說明。 第六圖為導光控制裝置之一，當雷射光L入射導光控 制裝置8a，經由透鏡81聚焦在掃描鏡片82之旋轉中心上， 再經過透鏡83將雷射光L平行化。透鏡83與掃描鏡片82之 旋轉中心距離為透鏡83之焦距，因此，當掃描鏡片82偏轉 時，以可將雷射光L平移。掃描鏡片82必須可做二維的偏 轉，以達成將雷射光L做二維平移之功能。若掃描鏡片82 只能做一維偏轉時，則可使用兩套如第六圖所示的裝置達 成雷射光L做二維平移之功能。 第七圖為導光控制裝置之二，雷射光1入射導光控制 裝置8b，經過透鏡84聚焦至聲光偏折器（A〇D)85，聲光偏 折器85可控制其第一階繞射光之偏轉角度’透鏡μ與聲光 偏折器85之距離為其焦距，可將雷射光L平行化。控制聲 光偏折器85第一階繞射光之偏折量，即可控制雷射光[之 =移。遮光器87可擋掉多餘之雷射光。一般之聲光偏折器 只能做一維之導光，兩組如第七圖之裝置即可做二維之導 光。 第八圖為對稱光產生装置，雷射光L經導光控制裝置8Page 7 4 49 66 3 V. Description of the invention (5) (Detailed description of the invention) The basic idea of the present invention has been explained in the fifth figure. The coherent light source, the exposure control device 2, the grating size control device 3, the photosensitive material 6, the photosensitive material bearing device 7, the control unit 122, and the human-machine interface 13 in the present invention will follow the conventional methods. The light guide control device 8, the symmetrical light generating device 9, and the local scanning device 10 in the present invention will be described in detail below. The sixth figure is one of the light guide control devices. When the laser light L enters the light guide control device 8a, it is focused on the rotation center of the scanning lens 82 via the lens 81, and then the laser light L is parallelized by the lens 83. The distance between the center of rotation of the lens 83 and the scanning lens 82 is the focal length of the lens 83. Therefore, when the scanning lens 82 is deflected, the laser light L can be translated. The scanning lens 82 must be capable of two-dimensional deflection to achieve the two-dimensional translation function of the laser light L. If the scanning lens 82 can only perform one-dimensional deflection, two sets of devices as shown in Fig. 6 can be used to achieve two-dimensional translation of the laser light L. The seventh figure is the second of the light guide control device. The laser light 1 enters the light guide control device 8b, and is focused by the lens 84 to the acousto-optic deflector (AOD) 85. The acoustooptic deflector 85 can control its first order. The distance between the deflection angle of the diffracted light 'lens μ and the acoustooptic deflector 85 is its focal length, and the laser light L can be parallelized. By controlling the deflection amount of the first-order diffracted light of the acoustooptic deflector 85, the laser light [of = shift can be controlled. The shutter 87 can block excess laser light. The general acousto-optic deflector can only do one-dimensional light guidance, and two sets of devices as shown in Figure 7 can do two-dimensional light guidance. The eighth figure is a symmetrical light generating device, and the laser light L passes through the light guide control device 8
449663 五、發明說明（6) 平移後，入射對稱光產生裝置93，經由分光鏡9〗分成兩道 光，其中一道經由鴿尾稜鏡92、反射鏡93、分光鏡96而出 射對稱光產生裝置9a ;另一道經由反射鏡94、鴿尾稜鏡95 、分光鏡96而出射對稱光產生裝置9&。鴿尾稜鏡、”具 有將影像反轉的特性。如第八圖所示，在平行紙面的平面 上，鴿尾棱鏡95可將雷射光移至反向之位置，鴿尾稜鏡92 放置之角度與鴿尾稜鏡95相差9〇。，在此平面上不具任何 效應，但在垂直紙面之平面上可將雷射光移至反向之位置 ，鴿尾棱鏡95則否。因此對稱光產生裝置心之出射雷射光 a、b，為一組沿系統光軸互相對稱的雷射光。 第九圖為局部掃描裝置之一’雷射光a、b入射局部掃 描裝置l〇a後，經由掃描鏡片101改變其方向，再經由透鏡 102聚焦至感光物質6之相互干涉。由於雷射光&、匕入射透 f 102之方向可由掃描鏡片101控制，即可控制雷射光a、b 在感光物質6上之平涉位置’達到局部掃描之功能。 第十圖為局部掃描裝置之二，雷射光a、b入射局部掃 描裝置透鏡1〇3後’在感光物質6 i干涉。掃描透鏡1〇3可 做一維之平移，當掃描透鏡丨〇3平移時，即可改變雷射光 a、b在感光物質6上之干涉位置，達到局部掃描之功能 雷射光a、b入射局部 第Η 圖為局部掃描裝置之三 : 偏折器U4繞射出第-階繞射光， 、b繼續經由請。光在透鏡ι〇5之焦平面上 J用遮先1^106將第-階繞射光之外的雷射光阻絕，所利449663 V. Description of the invention (6) After translation, the incident symmetrical light generating device 93 is divided into two lights by the spectroscope 9; The other one emits a symmetric light generating device 9 & via a mirror 94, a pigeontail 95, and a beam splitter 96. The dovetail owl, "has the feature of reversing the image. As shown in Figure 8, on a plane parallel to the paper surface, the dovetail prism 95 can move the laser light to the opposite position, and the dovetail owl 92 is placed on it. The angle differs by 90 ° from the dovetail ridge 95. There is no effect on this plane, but the laser light can be moved to the opposite position on the plane perpendicular to the paper, and the dovetail prism 95 does not. Therefore, the symmetrical light generating device The laser light a and b emitted from the heart are a group of laser lights that are symmetrical with each other along the optical axis of the system. The ninth picture shows one of the local scanning devices, 'laser light a and b, enter the local scanning device 10a and pass through the scanning lens 101. Change its direction, and then focus on the mutual interference of the photosensitive material 6 through the lens 102. Since the direction of the laser light & and the incidence of f 102 can be controlled by the scanning lens 101, the laser light a and b on the photosensitive material 6 can be controlled. The horizontal position 'achieves the function of local scanning. The tenth figure is the second of the local scanning device. After the laser light a and b enter the local scanning device lens 103, they interfere with the photosensitive material 6i. The scanning lens 103 can be used as one Dimension translation when scanning the lens丨 〇3 When shifting, you can change the interference position of laser light a and b on photosensitive material 6 to achieve the function of local scanning. Laser light a and b are incident on the third part. The picture shows the third part of the local scanning device: deflector U4 around The first-order diffracted light is emitted, and b continues to pass through. The light is on the focal plane of the lens ι05, and the laser light other than the first-order diffracted light is blocked by the shield 1 ^ 106.
五、發明說明（7) 用之第一階繞射光再經由透鏡107將雷射光a、b平行化， 雷射光a、b經過透鏡108在感光物質6上相互干涉。控制聲 光偏折器104即可控制雷射光a、b入射透鏡1〇8之方向，改 變雷射光a、b在感光物質6上之干涉位置，達成局部掃指 的功能。 第十二圖為本發明之可行例參考圖，雷射光源11發出 雷射光L ’通過聲光調變器21控制曝光量。雷射光乙繼績 通過擴束器3a控制所形成光柵之大小。然後經由導光裝置 8a將雷射光L平移，對稱光產生裝置9a將入射之雷射光乙 分成一組沿系統光軸互相對稱之雷射光a、b，雷射光a、b 經由局部掃描裝置l〇b在感光物質6上形成干涉駐波，並可 在感光物質6之局部平面上改變干涉駐波形成之位置，組 合不同的光柵。感光物質6將干涉駐波以光栅的形式記錄 。當局部小面積上之光柵组合完成時，利用精密位移平a Π移動感光物質6至下一位置繼續記錄局部光栅。如此即口 可製作光栅影像。當然’第十二圖所示之可行例是由控制 單元接受人機界面13所輸入之資料，轉換成控制 控制的。 第十二圖所示之可行例中，導光裝置心可 8b取代；局部掃描裝置i〇b，可由片都这以抽职 取代。 了由“掃插裝置i0a或10c 第十二圖所示之可行例中， 光控制裝置8a時，可將擴束器3a省、=裝置8選用導 前後移動，即可達成控制光柵尺時只須將透鏡81V. Description of the invention (7) The first-order diffracted light is used to parallelize the laser light a and b through the lens 107, and the laser light a and b interfere with each other on the photosensitive material 6 through the lens 108. By controlling the acousto-optic deflector 104, the direction of the laser light a and b incident on the lens 108 can be controlled, and the interference position of the laser light a and b on the photosensitive material 6 can be changed to achieve the function of partial scanning. The twelfth figure is a reference diagram of a feasible example of the present invention. The laser light source 11 emits laser light L 'through an acousto-optic modulator 21 to control the exposure amount. The laser beam B continues to control the size of the grating formed by the beam expander 3a. Then, the laser light L is translated through the light guide device 8a, and the symmetric light generating device 9a divides the incident laser light B into a group of laser lights a and b that are symmetrical with each other along the optical axis of the system. The laser light a and b pass through the local scanning device 10. b. An interference standing wave is formed on the photosensitive material 6, and the position where the interference standing wave is formed can be changed on a local plane of the photosensitive material 6, and different gratings can be combined. The photosensitive substance 6 records the interference standing wave in the form of a grating. When the combination of the gratings on a small local area is completed, the precise displacement level a Π is used to move the photosensitive material 6 to the next position to continue recording the local grating. In this way, a raster image can be produced. Of course, the feasible example shown in the twelfth figure is that the control unit receives the data input by the human-machine interface 13 and converts it into control. In the feasible example shown in Fig. 12, the light guide device can be replaced by 8b; the local scanning device i0b can be replaced by a piece of film. In the feasible example shown in the twelfth figure of the "swipe device i0a or 10c", when the light control device 8a, the beam expander 3a can be saved, and the device 8 can be moved forward and backward to achieve the control of the grating scale. Must put the lens 81
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