4470 05 at B7 經濟部中央標準局員工消費合作社印製 五、發明説明（1 ) 本發明偽有關於提供一種氣泡分離器，供用於半導體 裝置之製造，及一液體供應裝置及其驅動方法，持別是一 種_由分離氣泡以自液體中移除氣泡之氣泡分離器，及一 利用該氣泡分離器來供應液體之裝置，及其Μ動方法。 —般而言，在半導體裝置之製造方法的每一齒別製程 中使用不同種類之液體，如去離子水或化學蕖品。 使用於半導體装置製造方法之去離子水應被高度地純 化，然後經純化後之液體在供應至半導體装置製造方法之 設備之前傜暫時存放在一液體儲槽中。 在習用之半導體裝置製造方法中，液體係直接供應至 其設備，但是，近來在半導證裝置之大量製造上，液體係 先經過一過濾器而過濂，再藉由上述之液體儲槽以中央供 應方式供應至製造設備。 第1圖為一簡化圖，潁示習用在半導截裝置製造方法 中供應液體之裝置。 其中顯示一液體供應源10,供容置液雇如去離子水或 化學藥品，以一液體儲槽12供容收來自液體供應源it)之液 體，以供儲存或在操作期間將其供應至製造設備。 此外，其顳示一 S浦14,其藉由泵送操作以將液體供 應源10中之液體供至液體儲槽12,以及在藉由《浦14供臛 液體至液醴貯槽12之線路上提供一過濾器16用以過濾液體 此外，裝設有一偵測器18,其傣利用氮氣（Nd來偵測 在液體供蘸源10内部餘存之液體的量，餘存之液髏的量傜 請 先 閱 之 注 項 再 填%焚 本衣 頁 訂 本紙張尺度適用中國國家標準（CNS )八4说格（2丨0乂297公釐） 4470 05 經濟部中央標準局員工消費合作社印笨 A7 B7五、發明説明（2 ) 藉由將氮氣導入液體供應源10中所裝之液體之頂面而偵測 0 依據習用之液簏供應裝置，液髏供應源10中所含之液 體偽利用一過濾器16過濾，再供應至液體鍺槽12。 但是，由於裝設於過濾器16中之管髏為了排出氮氣而 移動，偵測器18經常發生先萑。 因此，卽使液饈供應源10仍有液轚在其中，仍會偵測 到其内部無液體餘存使得液體供應源10中之液醍有時會被 當作廢料而被丟棄。 此外，氣泡换藉«浦14之操作及氮氣之排出而産生， 使得液體供應至液體儲槽12之頻率相當於之氣泡産生之頻 率。 因此，在液體供應至液體儲播12時産生之氣泡會使過 濾器16之壽命縮短，而導入過濾器10中之氣泡提供顆粒之 來源，因而造成製造方法失敗。 因此，依據習用之供應液髏之裝置，偵測器之失S或 氣泡之産生會造成産量之下降。 本發明偽針對提供一氣泡分離器、一液證供應裝置及 一利用氣泡分離器之驅動方法，藉以在供應液體之前，將 含在液體中之氣泡分難並移除，其可實質上克服相関技術 中之限制及缺點所造成之問題。 依據本發明之目的，欲達到這些優點，提供一種用於 半導髏装置製造之氣泡分離機，其包含有：一液體容器， 供容裝自形成於其側壁之入口所導入之液體；及一内管， -5 - 本紙浪尺度適用中國國家標準（CNS ) Α4規格{ 210 X 297公釐） 4470 05 A7 B7 經濟部中央標隼局員工消費合作社印製 五、發明説明（3 ) 其係裝設在該液體容器之内側，其下端部倦低於該人口之 垂盪水平以浸漬於所容裝之液韹内。 液簏容器及内管較佳傜由鐵氟龍（Teflon)所製得^ 在内管與液體容器之間具有一浮體，其像S液體之浮 力而操作，該浮體係為弧形β 浮體較佳偽由鐵氟龍（Teflon)所製得 較佳地，在液體容器之上方設有一排出口，以將從液 體中分離出之氣泡釋出β 一在半導體製造方法中用以供窿液體之裝置，該裝置 包含：一液髏供躔源；一泵送機構，用以將液體自液體容 器蓮送出；一氣泡分離器，用以依據泵送機構所導入之液 體之重量自液鹺中分離及移除氣泡；及一液體儲槽，供鍺 存導人之已分離及移除氣泡之液髏β 該氣泡分離器含有一液體容器供容裝自形成於其脚壁 之入口所導入之液體；及一内管，其像裝設在該液鼸容器 之内側，其下端部低於該入口之垂直水平以浸漬於所容裝 之液鹾内。 較佳地，在内管與液匾容器之間具有一浮證，其葆藉 液簏之浮力而操作，以及在液睦容器之上方設有一排出口 ，以將從液體中分離出之氣泡釋出β 較佳地，在入口之上方及下方設有偵測器以偵測浮體 之操作狀態。 較佳地，進一步在氣泡分離器及液體儲槽之間裝置一 過濾器，以過濾液髏。 本紙浪尺度逋用中國國家標準（CMS ) Α4現格（2!〇X297公釐） (請先閲讀背面之注意事項再填寫本I) 裝- 訂 4470 〇5 A7 B7 經濟部中央標準局貝工消費合作社印製 五、發明説明（4 ) 該供應液體於半導體製迪方法之裝置之驅動方法包括 下列步驟：a)將液體導入一具有一液體容器及一内管之氣 泡分離器之液體容器中，該液體容器偽用以容裝自形成於 其倒壁之入口所導入之液體，該内管傺装設在該液髏容器 之内倒，其下端部傜低於該入口之垂直水平以浸潰於所容 裝之液靨内；b)操作一位在内管與液體容器間且藉液髏之 浮力操作之浮體；c)利用位在入口上方及下方之偵測器來 偵測浮體之操作狀態；d)利用來自偵測器之訊號來控制一 幫浦，以將液體供應至氣泡分離器之液體容器，及控制一 裝設在液髏容器上方之排放部以釋出從導入液體中分雞出 之氣泡。 應瞭解的是前述概略敘逑及下列的詳細敘述僅傜例示 及説明性質，而不應用以限制本發明所讅之範圍。 在圖式中： 第1圖僳習用之用於製造半導髏裝置之液體供應裝置 之示意圔； 第2圖傈本發明之一實施例之用於製造半導塍裝置之 液體供應裝置之示意圖； 第3圖為一流程圖，顯示本發明之液體供應装置之驅 動方法。 現將參考本發明之較佳實施例來說明，其偽示於圔式 中〇 第2圖僳本發明之一實施例之用於製造半導蘐裝置之 液體供應裝置之示意圖，而第3匯所示為本發明之液體供 I. I ^ n I ! - - (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 4470〇5 A7 B7 經濟部中央標率局員工消費合作，杜印製 五、發明説明（5 ) 應裝置之驅動方法之流程圖。 首先，參考第2圖，液體供應裝置包括一液醱供應源 20,供容裝液體如用於製造半導體裝置之去離子水或化學 藥品，以及一液體儲槽22，供容纳來自液體供應源20之液 體，以將其貯存及在製程中供應至各値生産設備β 本發明之液蘐儲槽為一種中央供鼷方法之儲槽β 在液髏供應源2Q與液體儲槽22之間裝設有一依據本發 明之用以製造半導體裝置之氣體分離器2,其包含有一液 體容器26供容裝自其形於其倒壁之入口導入之液釀；及一 内管28,其僳裝設在液鳢容器26之内側，其下端部你位在 低於該入口之垂直水平，以浸漬於所容裝之液體内β 該氣泡分離器2依據液醴之重量将氣泡自液體中分離 並移除，而滴在液體容器26底部之液體傜經由内管28供應 之液體儲槽22β 亦即，依據本發明，液髏當其中之氣泡利用裝設在液 體供應源20及液體儲槽22之間之氣泡分離器2分離出及移 除其中之氣泡後才供應至生産線。 包括有液體容器26及内管28之氣泡分離器2偽由合成 樹脂如鐵氟龍（Teflon)樹脂所製。 容裝於液體供應源20之液鼉係藉一幫浦30之泵送及導 入來供應。 再者，一浮體32傜裝置於液體容器26與内管23之間， 該浮體32像藉由滴在液體容器26底部之液腥之浮力所操作 Ο 裝 ―一訂 成 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標隼（CNS ) A4規格（210X297公釐） 4470 〇5 經濟部中央標隼局員Η消費合作社印製 A7 _ B7五、發明説明（6 ) 浮體32係由鐵氟龍樹脂等材料所製，且具有弧肜的底 部以提高浮力壓力。 此外，在入口 2 4之上方及下方具有偵測器34以偵测浮 鹺32之操作狀態，一排放口 36傺裝設在液髏容器26之上部 以釋出自液體分離出之氣泡。 該排放口 36包含有一管體及設於該管醱上之一閥件。 排放口 3 6威應來自偵測器34之訊號而打開或醑閉。 藉此，液體之流量傈利用偵測器34來控制，且藉著排 放口 36之閥件戚應來自偵潮器34之訊號作打開/閘閉之操 作，自液賸分離出之氣泡可被排出及移除β 此外，在氣泡分離器2與液體儲樓22之間裝設有一過 濾器38，用以過濾經由氣泡分離器2之内管28供應至液體 鍺槽22之液賸。 亦邸，該液醱傺藉上述之過濾器38過濾或精製過，以 供應至液體儲槽22。 依據本發明，液體在其中之氣泡已利用液鶼之重量而 分離及移除之後才供應至液體儲槽22,以防止半導體製造 方法因氣泡所産生之顆粒而造成失敗，且使過濾器38之壽 命得以延長。 再者，依據本發明，由於偵測器34偽位於氣泡分離器 2之外，於液體供應過程中，偵测器34在某些情況下之失 蚕僳可偵測出且可預防。 據此，在液蘐供_源2D内部之液髏偽完全且安全地供 應至液體儲槽22,因此，在液體供應源20内部之液鼷不會 1 裝 I I I __ 訂（I In I^. - - (請先閱讀背面之注意事項再填寫本頁) 本紙乐尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） ^47005 Α7 Β74470 05 at B7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the Invention (1) The present invention is about providing a bubble separator for the manufacture of semiconductor devices, and a liquid supply device and its driving method. The other is a bubble separator that separates bubbles to remove bubbles from the liquid, a device that uses the bubble separator to supply liquid, and a method for moving the same. -In general, different types of liquids, such as deionized water or chemical counterfeit, are used in each tooth manufacturing process of the semiconductor device manufacturing method. The deionized water used in the semiconductor device manufacturing method should be highly purified, and the purified liquid is temporarily stored in a liquid storage tank before being supplied to the semiconductor device manufacturing method equipment. In the conventional method of manufacturing semiconductor devices, the liquid system is directly supplied to its equipment, but recently, in the mass production of semi-conductive devices, the liquid system is first passed through a filter, and then the liquid storage tank is used to Central supply to manufacturing equipment. Fig. 1 is a simplified diagram showing a device for supplying a liquid used in a manufacturing method of a semiconductor device. There is shown a liquid supply source 10 for holding liquids such as deionized water or chemicals, and a liquid storage tank 12 for receiving liquid from the liquid supply source (it) for storage or supply to Manufacturing Equipment. In addition, it shows a S pump 14 which supplies the liquid in the liquid supply source 10 to the liquid storage tank 12 by a pumping operation, and on the line supplying the liquid to the liquid storage tank 12 through the pump 14 A filter 16 is provided to filter the liquid. In addition, a detector 18 is provided, which uses nitrogen (Nd to detect the amount of liquid remaining in the liquid supply source 10 and the amount of liquid skeleton remaining). Please read the notes first and then fill in the %%. The size of the page is in accordance with the Chinese National Standards (CNS) 8 and 4 (2 丨 0 乂 297 mm) 4470 05 Central Consumers Bureau of the Ministry of Economic Affairs Consumer Cooperatives Benben A7 B7 V. Description of the invention (2) Detection by introducing nitrogen into the top surface of the liquid contained in the liquid supply source 10 According to the conventional liquid radon supply device, the liquid contained in the liquid skull supply source 10 is falsely used. The filter 16 filters and supplies it to the liquid germanium tank 12. However, since the pipe cross installed in the filter 16 moves in order to discharge nitrogen, the detector 18 is often preliminarily broken. Therefore, the liquid radon supply source 10 is not supplied. There is still liquid in it, and no liquid remains in it The liquid plutonium in the body supply source 10 is sometimes discarded as waste. In addition, bubbles are generated by the operation of the pu 14 and the discharge of nitrogen, so that the liquid is supplied to the liquid storage tank 12 at a frequency equivalent to the bubbles The frequency generated. Therefore, the air bubbles generated when the liquid is supplied to the liquid storage and broadcasting 12 will shorten the life of the filter 16 and the air bubbles introduced into the filter 10 provide a source of particles, thereby causing the manufacturing method to fail. The device for supplying the liquid skull, the loss of the detector or the generation of bubbles will cause the decline in the output. The present invention is directed to providing a bubble separator, a liquid certificate supply device, and a driving method using the bubble separator. Before the liquid is supplied, the bubbles contained in the liquid are separated and removed, which can substantially overcome the problems caused by the limitations and disadvantages of the related technology. According to the purpose of the present invention, to achieve these advantages, a method for providing A bubble separator manufactured by a cross-bone device includes: a liquid container for containing liquid introduced from an inlet formed on a side wall thereof; and an inner tube -5-The scale of this paper applies the Chinese National Standard (CNS) Α4 specification {210 X 297 mm) 4470 05 A7 B7 Printed by the Consumers' Cooperative of the Central Standardization Bureau of the Ministry of Economic Affairs 5. Description of the invention (3) It is installed in the Inside the liquid container, the lower end of the container is lower than the drooping level of the population to be immersed in the contained liquid pan. The liquid container and inner tube are preferably made of Teflon. There is a floating body between the inner tube and the liquid container, which operates like the buoyancy of S liquid. The floating system is an arc β float. The body is preferably made of Teflon. Preferably, a discharge port is provided above the liquid container to release the air bubbles separated from the liquid β.-Used in semiconductor manufacturing methods A liquid device, the device includes: a liquid skull supply source; a pumping mechanism for sending liquid from a liquid container; a bubble separator for self-liquid according to the weight of the liquid introduced by the pumping mechanism; To separate and remove air bubbles; and a liquid storage tank for the germanium to store and remove the liquid cross-sections of the air bubbles β The bubble separator contains a liquid container for introduction from the inlet formed on the wall of its foot A liquid; and an inner tube, which is mounted on the inside of the liquid container, the lower end of which is lower than the vertical level of the inlet to be immersed in the contained liquid container. Preferably, there is a floating card between the inner tube and the liquid plaque container, which is operated by the buoyancy of the liquid pan, and a discharge port is provided above the liquid container to release the air bubbles separated from the liquid. Out of β, preferably, there are detectors above and below the entrance to detect the operating status of the floating body. Preferably, a filter is further installed between the bubble separator and the liquid storage tank to filter the liquid skull. This paper uses the Chinese National Standard (CMS) A4 (2! 〇297mm) (please read the notes on the back before filling in this I) Binding-Order 4470 〇5 A7 B7 Central Standards Bureau, Ministry of Economic Affairs Printed by a consumer cooperative. 5. Description of the invention. (4) The driving method of the device for supplying liquid to the semiconductor manufacturing method includes the following steps: a) introducing the liquid into a liquid container having a liquid container and an inner tube bubble separator The liquid container is used to contain the liquid introduced from the inlet formed on its inverted wall. The inner tube is installed inside the liquid skull container and its lower end is lower than the vertical level of the inlet to soak. Collapsed in the contained liquid pan; b) operate a floating body between the inner tube and the liquid container and operate by the buoyancy of the liquid skeleton; c) use the detectors located above and below the entrance to detect the floating D) using a signal from the detector to control a pump to supply liquid to the liquid container of the bubble separator, and to control a discharge portion installed above the liquid skull container to release Bubbles from chicken in liquid. It should be understood that the foregoing general description and the following detailed description are merely exemplary and explanatory and are not intended to limit the scope of the invention. In the drawings: FIG. 1 is a schematic diagram of a conventional liquid supply device for manufacturing a semiconducting device; FIG. 2 is a schematic diagram of a liquid supply device for manufacturing a semiconducting device according to an embodiment of the present invention Figure 3 is a flow chart showing the driving method of the liquid supply device of the present invention. A description will now be given with reference to a preferred embodiment of the present invention, which is pseudo-shown in the formula. FIG. 2 is a schematic diagram of a liquid supply device for manufacturing a semiconducting device according to an embodiment of the present invention. The liquid supply of the present invention is shown as I. I ^ n I!--(Please read the notes on the back before filling this page) This paper size is applicable to China National Standard (CNS) A4 (210X297 mm) 4470〇5 A7 B7 Consumption cooperation between employees of the Central Standards Bureau of the Ministry of Economic Affairs, Du printed 5. Description of invention (5) Flow chart of the driving method of the device. First, referring to FIG. 2, the liquid supply device includes a liquid tritium supply source 20 for containing a liquid such as deionized water or chemicals used for manufacturing a semiconductor device, and a liquid storage tank 22 for receiving the liquid from the liquid supply source 20. The liquid is stored and supplied to various production facilities during the production process. The liquid storage tank of the present invention is a storage tank of a central supply method. Β is installed between the liquid supply source 2Q and the liquid storage tank 22 There is a gas separator 2 for manufacturing a semiconductor device according to the present invention, which includes a liquid container 26 for containing a liquid brew introduced from an inlet formed in an inverted shape thereof; and an inner tube 28 which is installed in Inside the liquid container 26, the lower end of the container is positioned below the vertical level of the inlet so as to be immersed in the contained liquid β The bubble separator 2 separates and removes bubbles from the liquid according to the weight of the liquid container And the liquid dripped at the bottom of the liquid container 26 is the liquid storage tank 22β supplied through the inner tube 28, that is, according to the present invention, when the air bubbles in the liquid container are installed between the liquid supply source 20 and the liquid storage tank 22 Bubble separator 2 separates and Remove the bubbles before supplying to the production line. The bubble separator 2 including the liquid container 26 and the inner tube 28 is made of a synthetic resin such as Teflon resin. The liquid container contained in the liquid supply source 20 is supplied by pumping and introducing into a pump 30. In addition, a floating body 32 is installed between the liquid container 26 and the inner tube 23, and the floating body 32 is operated by the liquid buoyancy dripping on the bottom of the liquid container 26. Note on the back, please fill in this page again) This paper size is applicable to China National Standard (CNS) A4 specification (210X297 mm) 4470 〇5 Printed by A7 _ B7, member of the Central Bureau of Standards of the Ministry of Economic Affairs and Consumer Cooperatives ) The floating body 32 is made of Teflon resin and other materials, and has a curved bottom to increase the buoyancy pressure. In addition, there are detectors 34 above and below the inlet 24 to detect the operating state of the floater 32, and a discharge port 36 傺 is installed above the liquid skull container 26 to release bubbles separated from the liquid. The discharge port 36 includes a pipe body and a valve member disposed on the pipe tube. The discharge port 36 is opened or closed in response to a signal from the detector 34. With this, the flow rate of the liquid is controlled by the detector 34, and by the valve of the discharge port 36, the signal from the tide detector 34 is opened / closed, and the air bubbles separated from the liquid residue can be removed. Exhaust and remove β In addition, a filter 38 is installed between the bubble separator 2 and the liquid storage building 22 to filter the residual liquid supplied to the liquid germanium tank 22 through the inner tube 28 of the bubble separator 2. Also, the liquid mash is filtered or refined by the above-mentioned filter 38 to be supplied to the liquid storage tank 22. According to the present invention, the liquid is supplied to the liquid storage tank 22 after the bubbles therein have been separated and removed by the weight of the liquid plutonium to prevent the semiconductor manufacturing method from failing due to the particles generated by the bubbles, and the filter 38 Life is extended. Furthermore, according to the present invention, since the detector 34 is pseudo-located outside the bubble separator 2, during the liquid supply process, the loss of the silkworm pupae under certain conditions can be detected and prevented. According to this, the liquid skull inside the liquid supply source 2D is completely and safely supplied to the liquid storage tank 22, so the liquid mixture inside the liquid supply source 20 will not be installed in the III__ order (I In I ^. --(Please read the notes on the back before filling this page) The paper scale is applicable to the Chinese National Standard (CNS) Α4 specification (210X297 mm) ^ 47005 Α7 Β7
經濟部中央樣準局貝工消费合作杜印$L 五、發明説明（7 ) 産生交換，故可防止由於偵測器34失蚤所造成之故障。 以下將説明本發明之含有上述構造之實施例之功能及 功效β 首先，為了將液體供應至液醴儲槽22,将裝有液鑤於 其中之液體供窸源20連接至入口 24» S由幫浦30之泵送操作將液體導人氣泡分離器2之液 醱容器26中(> 将導入液體容器26中之液體滴至液體容器26之底部β 在液匾開始被滴入之入口 24末端處，氣泡開始自導入 液體容器26之液藤中分離，然後，液體被滴至液髏容器26 之底部β 亦卽，由於幫浦30之操作所生成而含在液體中之氣泡 自液體中被分離且被移除β 自液體中分離出之氣泡經由排放口 36排放至外界。 此外，供排放氣體之排放口 36偽利用浮體32來控制， 該浮體32傜依據液體之重量而操作，而浮體32之操作狀態 則受偵測器34監視。 再者，偵测器34亦控制幫浦30,使得被導入氣髏分離 器2之液體容器26中之液體之量得以受控制。 亦卽，當偵測到浮體32在入口 24下方時，排放口 36關 閔且莆浦3Q持缠泵送。當偵測到浮體32在入口 24上方時， 排放口 36打開以將從液體分離出之氣泡釋出，且幫浦30停 止操作，停止導入液體。 據此，經由内管28將已分離出氣泡之液體供應至液髏 -Ifl - ---------威— (請先閲讀背面之注_意事項再填寫本頁) 訂 .1:瘃 本紙張尺度適用中國國家標準（CNS > Α4規格（210Χ 297公釐） 4Α70 05 Α7 Β7 經濟部令央標準局負工消費合作社印製 五、發明説明（8 ) 儲槽22β 在此，將經由内管28導入液體儲槽22之液驩利用位在 導至液體儲槽22之管路上之過濾器而過濾或精製。 因此，依據本發明，在液體供應前先將氣泡自其中分 離出並移除，然後液體儲存在液體儲槽22中，並在製程操 作過程中供應至各製造設備。 因此，依據本發明上逑構造，提供一位在氣泡分離器 2外側之偵測器34以控制液體之流鼉，使得偵測器34之失 產及由於偵測器失蚕迪成之失敗得以被防止。 此外，可防止液髏在該裝置之元件之間移動，使液體 容装在液醱容器2G内，減少液體之浪費。 再者，液體偽在其中之氣泡Μ由本發明之氣泡分雄器 而分離及移除之後才供應，以防止因氣泡造成之故障。 亦卽，可防止由於氣泡而産生之顆粒，因而使得過濾 用之機構過濾器38之壽命得以延長。 據此，在液體供應源内部之液體偽在其中之氣泡完全 部移除之狀態下供應至液體儲槽22。 且，偵測器之失靈及該裝置之功能故障可被防止，産 量也因供應之液體其中之氣泡己被分離且移除而增加β 熟於此技者將會明白，在不悖離本發明之精神或範圍 下，可做出多種改良及受化。因此，本發明儀涵蓋這些本 發明之改良及變化，只要其等在下列申謫專利範圍及其等 效範圍之内。 -11 - 本紙張尺度適用中國國家榇準（CNS ) Α4規格（210 X 297公釐） I 裝 ^-訂^, C請先閱讀背面之注意事項再填寫本頁) 4470 05 A 7 B7 五、發明説明（9 ) 經濟部中央標準局員工消費合作社印製 元件编號： 10 液體供應源 12 液體儲槽 14 «浦 16 過濾器 18 偵測器 20 液體供應源 22 液體儲槽 2 氣驩分離器 24 入口 26 液體容器 28 内管 30 幫浦 32 浮疆 34 偵測器 36 排放口 38 過濾器 (請先閲讀背面之注意事項再填寫本頁) -12 - 本紙張尺度適用中國國家標準（CNS ) A4规格（210X297公釐）The Central Government Bureau of the Ministry of Economic Affairs, Bureau of Consumption and Cooperation of Shell Workers, Du Yin $ L 5. The invention description (7) is exchanged, so it can prevent the malfunction caused by the fleas of the detector 34. The function and effect of the embodiment of the present invention including the above-mentioned structure will be described below. First, in order to supply liquid to the liquid storage tank 22, a liquid supply source 20 containing liquid storage therein is connected to the inlet 24. The pumping operation of pump 30 introduces the liquid into the liquid container 26 of the bubble separator 2 (> drops the liquid introduced into the liquid container 26 to the bottom of the liquid container 26 β at the inlet 24 where the liquid plaque begins to be dripped into At the end, the bubbles begin to separate from the liquid vine introduced into the liquid container 26, and then the liquid is dropped to the bottom β of the liquid skull container 26. The bubbles contained in the liquid are generated from the liquid due to the operation of pump 30. Separated and removed β The air bubbles separated from the liquid are discharged to the outside through the discharge port 36. In addition, the discharge port 36 for discharging gas is pseudo-controlled by a floating body 32, which operates according to the weight of the liquid The operating status of the floating body 32 is monitored by the detector 34. Furthermore, the detector 34 also controls the pump 30 so that the amount of liquid introduced into the liquid container 26 of the gas-skeleton separator 2 can be controlled. Also, when the floating body 32 is detected Below the port 24, the discharge port 36 is closed and pumped by Xupu 3Q. When the floating body 32 is detected above the inlet 24, the discharge port 36 is opened to release the bubbles separated from the liquid, and the pump 30 Stop the operation and stop the introduction of the liquid. According to this, the liquid with the separated bubbles is supplied to the liquid skull through the inner tube 28 -Ifl---------- 威 —— (Please read the note_notice on the back first Please fill in this page again). No. 1: The size of this paper applies to the Chinese national standard (CNS > Α4 size (210 × 297 mm) 4Α70 05 Α7 Β7 Printed by the Consumers ’Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 8) Storage tank 22β Here, the liquid introduced into the liquid storage tank 22 through the inner pipe 28 is filtered or refined by a filter located on a pipeline leading to the liquid storage tank 22. Therefore, according to the present invention, in the liquid supply The air bubbles are separated and removed therefrom, and then the liquid is stored in the liquid storage tank 22 and supplied to each manufacturing equipment during the process operation. Therefore, according to the upper structure of the present invention, a one-in-air bubble separator is provided. 2 the outer detector 34 to control the flow of liquid, The loss of the detector 34 and the failure due to the loss of the detector can be prevented. In addition, the liquid cross can be prevented from moving between the components of the device, so that the liquid can be contained in the liquid grate container 2G, reducing Waste of liquid. In addition, the bubbles M in the liquid are supplied after the bubbles are separated and removed by the bubble splitter of the present invention to prevent malfunction caused by bubbles. Also, particles generated by bubbles can be prevented. Therefore, the life of the filtering mechanism filter 38 is prolonged. Accordingly, the liquid in the liquid supply source is supplied to the liquid storage tank 22 in a state where the bubbles therein are completely removed. Moreover, the detector fails. And the function failure of the device can be prevented, and the output is also increased because the bubbles in the supplied liquid have been separated and removed. Those skilled in the art will understand that without departing from the spirit or scope of the invention, Make many improvements and adaptations. Therefore, the present invention covers these improvements and changes of the present invention as long as they are within the scope of the following patents and their equivalents. -11-This paper size applies to China National Standard (CNS) Α4 size (210 X 297 mm) I Pack ^ -Order ^, C Please read the notes on the back before filling this page) 4470 05 A 7 B7 V. Description of the invention (9) Printed component numbers of employees' cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs: 10 Liquid supply source 12 Liquid storage tank 14 «Pu 16 Filter 18 Detector 20 Liquid supply source 22 Liquid storage tank 2 Gas separator 24 Inlet 26 Liquid container 28 Inner tube 30 Pump 32 Fujiang 34 Detector 36 Drain port 38 Filter (please read the precautions on the back before filling out this page) -12-This paper size applies to Chinese National Standard (CNS) A4 specifications (210X297 mm)