445242 3 5 65twf.doc/006 Λ 7 B7 ___·—·.. - — —— - — ' .… -- --_ 五、發明説明（I) 本發明是有關於一種模造玻璃（Moldmg Glass)之模仁 (Molding Die)，且特別是有關於一種高精度模造玻璃鏡片 使用之模仁。 闻精度玻璃模造較爲完整的實施’最早揭示於1974 年Eastman Kodak公司之美國專利第3,833,347號。而在約 20年的硏發歷程中，模仁之使用因應各種材質之開發，製 程之成熟化，約略可區分出幾個世代，由最早的非晶質碳、 碳化砂（Silicon Carbide, SiC)與氮化砂（Silicon Nitride ; Si3N4) 硬質陶瓷、金屬、貴金屬材料、各種薄膜應用，乃至類鑽 石薄膜（Diamond Like Carbon, DLC)、硼化物陶瓷等。 模仁之適用性必須考慮到下列幾點：（1)離型性，以避 免與玻璃產生反應、黏附現象；（2)足夠的硬度與機械強度， 以成形玻璃並避免表面刮傷；（3)高溫穩定性，以避免在模 造氣氛中發生分解現象與氣氛反應；（4)耐熱衝擊性，以忍 受模造過程中的熱循環；（5)可加工性，以加工形成特定光 學面並考慮加工時間與成本；（6)模仁壽命，延長模仁壽命 可降低成本。 請參照第1圖及第2圖，其所繪不的是習知模造玻璃 之模仁的剖面示意圖。請參照第1圖，模造玻璃之模仁至 少包括底材10與保護膜12之組合結構，或者是包括底材 1〇、中介層(Buffer Layer)14與保護膜12之組合結構，如 第2圖所示。其中底材10之材質包括不鏡鋼、碳化砂和 碳化鎢(Tungsten Carbide, WC)等。增加中介層14結構之目 的係用以增加附著性，或加工容易，或爲求易於成形。而 3 本紙张尺度逆用十阐囤家標车（CNS ) A4规格（210X297公釐} -------Γ J---裝-------iT------線 ("先閱讀背面之注意事項再"寫本頁) 445242 3565iwt'.doc/006 A7 B7 五、發明説明（λ) 保護膜12之材質若以非晶質碳而言，如美國專利第 3,833,347、3,844,755、3,900,328號，雖然具有良好的離型 性，但是因爲其結構性差、容易損傷、易氧化、易破裂、 衝擊強度低與熱導性不佳等缺點，所以在使用上有困難。 因此，Eastman Kodak公司隨後發展出碳化矽、氮化矽等 硬質陶瓷1如美國專利第4，139,677、4,168,961號，然而硬 質陶瓷也具有加工困難的缺點，因而降低其適用性，此外 製程中的燒結助劑如氧化鋁(Aluminium Oxide, A10J、氧化 硼（Bone Oxide, B203)等容易與玻璃反應，而降低了模仁之 離型性。 爲了改善模仁加工耗時的問題，因而有各種系列之鍍 膜被開發。其中貴金屬系列模仁的開發，以Matsushita公 司之發展最爲完善，而非貴金屬系列之陶瓷材料，則以 Olympus公司的發展較爲完善。445242 3 5 65twf.doc / 006 Λ 7 B7 ___ · ——... Molding (Molding Die), and in particular, a mold for using a high-precision molded glass lens. A more complete implementation of the high-precision glass molding was first disclosed in US Patent No. 3,833,347 to Eastman Kodak Company in 1974. In the course of about 20 years of development, the use of mold kernels can be divided into several generations according to the development of various materials and the maturation of the process. The earliest amorphous carbon, silicon carbide (SiC), and Silicon nitride (Silicon Nitride; Si3N4) hard ceramics, metals, precious metal materials, various film applications, even diamond-like films (DLC), boride ceramics, etc. The applicability of the mold core must take into account the following points: (1) release properties to avoid reaction and adhesion with glass; (2) sufficient hardness and mechanical strength to form the glass and avoid surface scratches; (3) High temperature stability to avoid decomposition and reaction in the molding atmosphere; (4) thermal shock resistance to endure thermal cycling during the molding process; (5) processability to process to form specific optical surfaces and consider processing time And cost; (6) mold core life, extending the mold core life can reduce costs. Please refer to Fig. 1 and Fig. 2. What cannot be drawn is a schematic cross-sectional view of a mold core of a conventional mold glass. Please refer to Figure 1. The mold core of the molded glass includes at least the combination structure of the substrate 10 and the protective film 12, or the combination structure of the substrate 10, the buffer layer 14 and the protective film 12, as shown in Figure 2. As shown. The materials of the substrate 10 include non-mirror steel, carbide sand, and tungsten carbide (Tungsten Carbide, WC). The purpose of increasing the structure of the interposer 14 is to increase adhesion, or to facilitate processing, or to facilitate forming. The 3 paper sizes are reversed and used to explain the standard car (CNS) A4 specifications (210X297 mm) ------- Γ J --- installation ------- iT ------ (&Quot; Read the precautions on the back before writing this page) 445242 3565iwt'.doc / 006 A7 B7 V. Description of the invention (λ) If the material of the protective film 12 is amorphous carbon, such as US patent Nos. 3,833,347, 3,844,755, and 3,900,328 have good release properties, but they are difficult to use due to their poor structure, easy damage, easy oxidation, easy cracking, low impact strength, and poor thermal conductivity. Therefore, Eastman Kodak Company subsequently developed hard ceramics such as silicon carbide and silicon nitride, such as U.S. Patent Nos. 4,139,677 and 4,168,961. However, hard ceramics also have the disadvantages of difficult processing, thus reducing their applicability. In addition, sintering Additives such as aluminum oxide (A10J, A10J, boron oxide (B203), etc.) easily react with glass and reduce the mold release property. In order to improve the processing time of mold cores, there are various series of coatings Developed. One of the precious metals series To develop the most complete company of Matsushita, rather than precious metals series of ceramic material, Olympus places the company's development more perfect.
Matsushha公司發展出一系列的貴金屬鍍膜模仁，第 —階段的發展包括以鉑（Platinum，P〇合金爲主的模仁。此 種模仁受限於使用溫度，只能用於模造溫度500°C〜520°C 以下的玻璃，於模造應用上，是以SF玻璃爲主。由於貴 金屬的化學鈍性良好，因此對SF玻璃的模造次數可達loooo 次，但是仍然需要配合適當的中介層以及提供抑制晶粒成 長之機制 在第二階段的發展中，爲了將貴金屬模仁應用於模造 高溫玻璃，如LF、SK或是BK等系列玻璃，因而採用以 銥（Iddium, Ir)或釕（Ruthenium，Ru)爲合金成分的貴金屬合 本紙张尺度適扣中囤國家標卒（CNS > A4規格（210Χ；297公釐） ..-----裝-------訂------線 ("先閲讀背面之注意事項再功寫表頁) 44524 匕 35 6 5twf.doc/006 A7 B7 五、發明说明（彡） 金，使得模造次數可以達到上萬次。 請參照第1圖，其所繪示的是一種習知模造玻璃之模 仁的剖面示意圖°此模造玻璃之模仁係由材質爲碳化鎢之 底材10與保護膜12組合而成。首先，將碳化鎢底材1〇 的表面硏磨拋光之後，接著以濺鍍法（Sputtering)濺鍍銥鍊 合金（Ir-Re)、銥釕合金（Ir-Ru)、鉑與氧化鋁其中之一，或 以電漿化學氣相沈積法⑺asma Enhanced Chemical Vapor Deposition, PECVD)沈積碳化砂、類鑽石薄膜、碳化欽(TiC) 及氮化鈦（TiN)其中之一 ’或以離子束沈積法（Ion Beam Deposition, IBD)沈積類鑽石薄膜，覆蓋於底材i0之上，形 成厚度約爲Ιμιη的保護膜12。其中保護膜12上具有模造 面（Molding Surface)16,由此模造面丨6定義出模造凹槽(Mold Cavity)18，以作爲模造玻璃之用。 樣品製備完成之後，接著，對於不同材質鍍膜之模仁 進行一系列保護膜之脫模性測試。其中，脫模性測試係使 用氮氣爲氣氛控制，而測試的玻璃材料包括BK7、SK5及 LaK13等，測試的溫度分別爲58CTC、640°C及700°C，測 試的方式有20次壓模測試及高溫反應測試(依測試玻材分 別爲100次、丨〇〇〇次、2000次及3000次）。高溫反應測試 時間係以1000次壽命爲依據，即以模仁處於模造溫度時 之80秒乘以1〇〇〇次，約等於22,2小時。 請參照表1，其所列示的是一系列保護膜之脫模性測 試結果。其中所有的樣品都是以碳化鎢爲模仁底材，表面 經硏磨拋光後，再於底材上形成厚度約爲Ιμπι的保護膜。 5 (誚先閱讀背面之注意事項再楨寫本頁) •裝- 線 本紙張尺度( CNS 说格（210X297公釐j #τ"部中呔"^-/;J.h 消於合竹妇卬" 4452^^ 3565twf.doc/i)06 八7 B7 五、發明説明（今） 第1號至第2號樣品之保護膜，係以濺鍍法形成之銥銶合 金膜與銥釕合金膜。其中Ir:Re成分比例約爲4:1，InRu 成分比例亦約爲4:1。而第3號至第9號樣品之保護膜則 分別是以電漿化學氣相沈積法沈積的碳化矽、類鑽石薄 膜、碳化鈦、氮化鈦；以離子束沈積法鍍的類鑽石薄膜； 以濺鍍法沈積的鉑及氧化鋁。 -------‘-----裝-------訂------線 (請先閲讀背面之注意事項再功j"本頁) 表1溫度520°C脫模性評估 樣 品 保護膜 形成方法 保護膜材 質 20次壓模 高溫反應後狀態 1 濺鍍 Ir:Re=4:1 良好 保護膜未變色 2 濺鍍 Ir:Ru=4:l 良好 保護膜未變色 3 PHCVD SiC 保護膜剝 離 保護膜變色、與玻 璃產生反應 4 PECVD DLC 保護膜剝 離 保護膜氧化變色、 剝離 5 PECVD TiC 保護膜剝 離 保護膜氧化變色 6 PECVD TiN 保護膜剝 離 保護膜氧化變色 7 離子束沈 積 DLC 保護膜剝 離 保護膜氧化變色、 剝離 8 漉鍍 Pt 保護膜剝 離 保護膜變色、剝離 9 濺鍍 — A10X 保護膜剝 離 保護膜未變色 6 本紙張尺度適扣-(1¾¾¾. ( CNS } a7^ ( 210X297^7 445242 3 565l wf.doc/006 A7 B7 ' 1 — 一釋—‘ ,·，·ι· _ I ι· " ·.— ’ · — — I ·Ι 丨 ^_____ _____ 五、發明説明（€) 測試的結果如表1所示。第1號至第2號樣品，即銥 銶合金、銥釕合金等硬膜模仁，都能於溫度520t時，通 過20次壓模測試及高溫反應測試，在壓模之後，鍍膜並 未產生剝離(Peel-Off)現象，表示其附著性良好，此外鍍膜 亦未氧化變色。而第3號至第9號樣品，皆由於剝離而造 成鍍膜損傷。其中第4號至第6號及第7號樣品之類鑽石 薄膜、碳化鈦及氮化鈦等鍍膜，因爲高溫氧化而造成鍍膜 變色與剝離。第3號樣品之碳化矽鍍膜則是由於與玻璃產 生反應而導致破壞。第8號至第9號樣品之鉑、氧化鋁等 鍍膜雖然未氧化，但也因單層薄膜之附著性不佳而導致鍍 膜剝離。 在習知技藝的發展中，就貴金屬鍍膜而言，是以鈾銥 合金(Pt-Ir)系列之貴金屬模仁爲主，應用於SF玻璃，但是 也只能限制在溫度520t~550°C使用，以確保能有上千次 的模造壽命。在後續所發展出之銥鍊合金、銥釕合金系列 貴金屬模仁，則可以適用於較高溫玻璃，但是也只能限制 在使用溫度580°C以內使用。再繼續提高使用溫度時，將 會因爲嚴重的熱腐餓(Thermal Etching)作用，導致模仁表面 急速劣化而無法使用。 因此本發明的主要目的就是在提供一種模造玻璃之模 仁，在銥銶合金、銥釕合金系列之貴金屬保護膜中，添加 氮化鉻（CrN)、氮化鉅(Tantalum Nitride, TaN)、其他氮化物 或氧化鋁等陶瓷成分。此外，亦可以在保護膜與模仁基座 ' Ί _本紙張尺度迸川中囤國家榇率（CMS ) A4規游（210Χ297公釐） ~ (誚先閲讀背面之注意事項再硝寫本頁) -裝- 訂 44524^ 3 565twt'.doc/006 五、發明説明（έ ) 之間加入中介層之設計，增加保護膜與底材之間的附著 性。藉由添加物可以放寬銥銶合金、銥釕合金系列等貴金 屬保護膜在應用上之成分限制，使得成分比例的可變範圍 增大，並提高模仁使用壽命與溫度，以改善習知模造玻璃 之模仁的缺點。 根據本發明之目的提供一種模造玻璃之模仁，包括下 列結構：底材，以及位於底材上之保護膜。此保護膜具有 模造面，由此模造面定義出模造凹槽，以作爲模造玻璃之 用。其中底材之材質包括碳化鎢，保護膜之材質則包括含 氮化鉻、氮化鉅、其他氮化物或氧化鋁之銥銶合金或銥釕 合金等貴金屬合金。在保護膜中添加陶瓷成分，可以改善 貴金屬保護膜在應用上之成分限制，並提高模仁使用溫 度。而底材與保護膜之間也可以加入一層中介層，例如爲 含鎳的銥鍊合金（Ir-Re-Ni)或含鎳的銥釕合金(Ir-Ru-Ni)等， 以增加底材與保護膜的附著性，延長模仁使用壽命。 本發明中模仁表面被覆之保護膜係使用含氮化鉻、氮 化鉅、其他之氮化物或氧化鋁等陶瓷材料之銥銶合金或銥 釘合金系列等貴金屬合金。在模造應用上，可以於580°C 高溫中，模仁的使用壽命達5000次以上°而模造成品之 品質仍可維持粗糙度在丨〇〇A以下的光學品質。由於模造 溫度範圍大，將可以使光學玻璃選擇性較大’適用於更廣 域的光學設計，在量產技術之推動上更具可行性。 爲讓本發明之上述和其他目的、特徵、和優點能更明 顯易懂，下文特舉一較佳實施例’並配合所附圖示，作詳 8 本紙張尺度速川中囤阖家標準（CNS ) Α4規格（2Ι0Χ297公釐） .--------^---1---1r!----.^ (誚先閱讀背面之注意事項再填寫本育) 44b ^ 3565t%vt'.doc/006 A7 B7 五、發明説明（ο ) 細說明如下： 圖示之簡單說明： 第1圖係繪示一種習知模造玻璃之模仁的剖面示意 圖； 第2圖係繪示另一種習知模造玻璃之模仁的剖面示意 圖， 第3圖係繪示依照本發明之一較佳實施例，一種模造 玻璃之模仁的剖面示意圖；以及 第4圖係繪示依照本發明之另一較佳實施例，一種模 造玻璃之模仁的剖面示意圖。 圖示之標記說明： 10、20 :底材 12、22 :保護膜 14 ' 24 :中介層 26 :模造面 28 :模造凹槽 第一實施例 請參照第3圖，其所繪示的是依照本發明一較佳實施 例，一種模造玻璃之模仁的剖面示意圖。其中，此模造玻 璃之模仁包括依序堆疊的底材20、中介層24與保護膜22 之組合結構。首先，將底材20的表面硏磨拋光，其中底 材20之材質包括碳化鎢。接著在底材20表面上，形成中 介層24，例如以濺鍍法濺鍍一層含鎳的銥鍊合金或含鎳的 銥釕合金等貴金屬物質。中介層24的厚度約爲0,3μιη，其 本紙張尺度適州十國國家標皁（CNS ) A4規格（2丨0X297公釐） -----^-----t------if------線 {誚先閱讀背面之注意事項再读，κ-本頁) ^?;r;^r^"!;Ji?;:J，-ji-T'"於合作.71印製 4 4524 3565twt'.doc/ti〇0 Λ7 五、發明説明（》） 目的係在增加保護膜22與底材2〇之附著性 然後於中介 層24上形成保護膜22，例如以濺鍍法濺鍍形成貴金屬薄 膜，覆蓋於中介層24上。保護膜22之厚度約爲1μη1，材 質包括銥銶合金、銥釕合金等貴金屬合金。其中保護膜22 上具有模造面26 ’由此模造面26定義出模造凹槽28，以 作爲模造玻璃之用。而貴金屬合金的Ir:Re成分比例約爲4:1 至1:4之比例’ Ir:Ru成分比例亦約爲4:1至1:4之比例。 請參照表2，其所列示的是以銥銶合金、銥釕合金爲 保護膜22 ’以含鎮之銥鍊合金、含鎮之銥釕合金爲中介層 24之模仁的脫模#測試結果。其中所有的樣品都是以碳化 鎢爲模仁底材20，表面經硏磨拋光後，以濺鍍法於底材20 上彤成厚度約爲0·3μπι的含鎳之貴金屬合金中介層24。第 10號至第12號樣品之中介層24爲含鎳之銥銶合金’其InRe 成分比例分別爲1:4、1:1及4:1 ;而第13號至第15號樣 品之中介層24爲含鎳之銥釕合金，其Ir:Ru成分比例亦分 別爲1:4、1:1及4:1。再於中介層24表面上，以濺鍍法形 成厚度約爲1 μηι的銀釘合金、銀鍊合金鑛膜’以作爲保護 膜22。保護膜22中之IrRe與Ir:Ru成分比例與中介層24 相同。爲證明本發明之優點，採用與第1號至第9號樣品 相同的方式進行脫模性測試，以氮氣爲氣氛控制，測試的 玻璃種類包括BK7、SK5及UK13等，測試的溫度分別爲 580°C及 640°C。 測試的結果如表2所示。其中第1〇號、第11號樣品 與第13號、第Μ號樣品等四個樣品，其Ir:Re及InRu的 本紙張尺度逆川屮國囷家插半（CNS ) A4規格（2ί〇Χ29"7公釐） ---^---：----¾----·--ΐτ------痒 (許先鬩讀背而之注意事項再"寫本頁) ^部屮Α«.ί?·^,,».·τ.>/ί抡合竹.s-ip家 4 4 b乙，〜 3565twt'.doc/006 A7 _________ B7 五、發明説明（7 ) 成分比例分別爲1:4及1:1，這些樣品的脫模性皆不良，其 模仁使用壽命都小於1〇〇次。第12號及第15號樣品之Ir:Re 及Ir:Ru的成分比例皆爲4:1，在溫度580°C之脫模性測試 時，二者均可以承受5000次之使用壽命。但是當溫度提 高至640t時，則都無法通過脫模性測試。 表2以銥銶合金(Ir-Re)、銥釕合金(Ir-Ru)爲保護膜及中介 層之脫模性評估 樣 保護膜材 580°C使用 壽命評 640°C使用壽命評 品 質 估 估 10 Ir:Re=l:4 <100 次 <100 次 11 Ir:Re=l: 1 <100 次 <100 次 12 Ir:Re=4:1 5000 次 <100 次 13 Ir;Ru=l :4 <100 次 <100 次 14 Ir:Ru=l: 1 <100 次 <100 次 15 Ir:Ru=4:1 5000 次 <100 次 第二實施例 請參照第4圖，其所繪示的是依照本發明另一較佳實 施例，一種模造玻璃之模仁的剖面示意圖。其中’此模造 玻璃之模仁係由底材20與保護膜22組合而成。首先’將 底材20的表面硏磨拋光之後。接著以濺鍍法濺鍍貴金屬 物質，例如銥銶合金，覆蓋於底材20之上，形成保護膜22 ° 其中保護膜U上具有模造面26，由此模造面26定義出模 本紙浓尺虎述扣'卜國國家榇準（CNS ) A4规格（210X297公釐） -----^----装------ΪΤ------線 (誚先閱讀背面之注意事項再"3本頁) 4 Αυ c.. 3565iwf.doc/006 ρ^η _____________Β7 _ 五、發明説明（~) 造凹槽28 ’以作爲模造玻璃之用。其中底材20之材質包 括碳化鎢。保護膜22之厚度約爲Ιμπι，材質包括含氮化 銘之銀鍊合金(Ir-Re-CrN)。 請参照表3，其所列示的是以含氮化鉻的銥銶合金爲 保護膜22之模仁的脫模性測試結果。其中所有的樣品都 是以碳化鎢爲模仁底材20，表面經硏磨拋光後，以濺鍍法 於底材20上形成厚度約爲ΐμιη之含氮化鉻的銥銶合金保 護膜22。第16號至第18號樣品中，銥鍊合金之Ir:Re成 分比例分別爲1:4、1:1及4:1。採用第一實施例中的方式 進行脫模性測試，以氮氣爲氣氛控制，測試的玻璃種類包 括BK7、SK5及UK13等，測試的溫度爲640°C。 表3以含氮化鉻的銥鍊合金(ir-Re-CrN)爲保護膜之模仁的 脫模性評估 樣 品 銥銶成分 比 640°C使用壽命評 估 Ir-Re保護膜 640°C使用壽命評 估 Ir-Re-CrN保護膜 16 Ir:Re=l:4 <100 次 1000 次 J7 Ir:Re=l:l <100 次 1000 次 J8 Ir:Re=4:1 <10◦次 1000 次 測試的結果如表3所示。使用未加入添加物的銥鍊合 金所製作之保護膜22，其IrRe成分比例分別爲丨:4、1:1 及4:丨。但是這些樣品在溫度64(TC的脫模性皆不佳，其模 本紙張尺度通/彳1十珣囤家梯皁（CNS ) A4現格（210X297公釐） ------------#------ΪΤ------線 J (誚先Μ讀背面之注項再填{:ίϊ本頁) 3565twf.doc/006 A7 B7 五、發明説明（/丨） 仁使用壽命都小於100次。改以含氮化鉻之銥鍊合金作爲 保護膜22材料，其IrRe之成分比例亦分別爲1:4、1:1及 4:1，但是在溫度640°C之脫模性測試時，均可以承受1000 次之模造使用壽命。 第三實施例 請參照第4圖，此模造玻璃之模仁係與第二實施例類 似，由底材20與保護膜22組合而成。首先，將底材20 的表面硏磨拋光之後。接著以濺鍍法濺鍍貴金屬物質，例 如銥銶合金，覆蓋於底材20之上，形成保護膜22。其中 保護膜22上具有模造面26，由此模造面26定義出模造凹 槽28，以作爲模造玻璃之用。而底材20之材質包括碳化 鎢。保護膜22之厚度約爲Ιμηι，材質包括含氮化鉅的銥 鍊合金（Ir-Re-TaN)。 表4以含氮化鉅的銥鍊合金(Ir-Re-TaN)爲保護膜之模仁的 脫模性評估 銀銶成分 640°C使用壽命評 640°C使用壽命評 Π an 比 估 估 Ir-Re保護膜 Ir-Re-TaN保護膜 19 Ir:Re=l:4 <100 次 1000 次 20 Ir：Re=l:l <100 次 1000 次 21 Ir:Re=4:l <100 次 1000 次 請參照表4，其所列示的是以含氮化鉅的銥鍊合金爲 本紙張尺度適川,丨，國囤家#準（CNS ) A4规格（2丨OX297公釐） ---„--------裝----„--IT------^ ("先閱讀背面之注意事項再填寫本頁) 好："'部中呔ir^'i;J’.i(工消卟合作妇卬裝 445242 3565twf.doc/U〇6 __B7 五、發明説明（丨之） 保護膜22之模仁的脫模性測試結果。其中所有的樣品都 是以碳化鎢爲模仁底材20，表面經硏磨拋光後，以濺鍍法 於底材20上形成厚度約爲Ιμιη含氮化鉅之銥銶合金保護 膜22。第19號至第21號樣品中，銥銶合金之lr:Re成分 比例分別爲1:4、1:1及4:1。採用第一實施例中的方式進 行脫模性測試，以氮氣爲氣氛控制，測試的玻璃種類包括 BK7、SK5及LaK13等，測試的溫度爲64CTC。 測試的結果如表4所示。使用未加入添加物的銥鍊合 金所製作之保護膜22，其InRe成分比例分別爲1:4、1:1 及4:1，但是這些樣品在溫度640°C的脫模性皆不佳，其模 仁使用壽命都小於100次。改以含氮化鉅之銥銶合金作爲 保護膜22材料，其InRe之成分比例亦分別爲L4、1:1及 4:1，但是在溫度640°C之脫模性測試時，均可以承受1000 次之模造使用壽命。 苐四實施例 請參照第4圖，此模造玻璃之模仁係與第二實施例類 似，由底材20與保護膜22組合而成。首先，將底材20 的表面硏磨拋光之後。接著以濺鍍法濺鍍貴金屬物質，例 如銥銶合金，覆蓋於底材20之上，形成保護膜22。其中 保護膜22上具有模造面26，由此模造面26定義出模造凹 槽28 ’以作爲模造玻璃之用。而底材20之材質包括碳化 鎢。保護膜22之厚度約爲ΐμηι，材質包括含氧化鋁的銥 鍊合金(Ir-Re-A10J。 請參照表5，其所列示的是以含氧化鋁的銥銶合金爲 本纸張尺度述扣·Ι，圈囷家標卒（CNS ) A4规格（2Ι〇Χ297公嫠） ----------汾衣----^--ir------β (誚先閱讀背面之注意事項再蛾寫本頁) 445242 3 5 ή 5 l w t'. do c/O 06 B7 五、發明説明（丨3) 保護膜22之模仁的脫模性測試結果。其中所有的樣品都 是以碳化鎢爲模仁底材20，表面經硏磨拋光後，以灘鍍法 於底材20上形成厚度約爲Ιμπι含氧化鋁之銥銶合金保護 膜22。第22號至第24號樣品中，銥銶合金之ir;Re成分 比例分別爲1:4、1:1及4:1。採用第一實施例中的方式進 行脫模性測試，以氮氣爲氣氛控制，測試的玻璃種類包括 BK7、SK5及LaK13等，測試的溫度爲640°C。 表5以含氧化鋁的銥銶合金(Ir-Re-A10x)爲保護膜之模仁 „ 裝-- ("先閱讀背面之注意事項再硝寫本頁) 的脫模性評估 樣 銥鍊成分 640°C使用壽命評 640°C使用壽命評 n 叩 比 估 估 Ir-Re保護膜 Ir-Re-AIO,保護膜 22 Ir:Re=l :4 <100 次 1000 次 23 Ir:Re=l:l <100 次 1000 次 24 Ir:Re=4:1 <100 次 1000 次 訂 線 ^沪部中""^而卩·7消几合竹私卬父 測試的結果如表5所示。使用未加入添加物的銥銶合 金所製作之保護膜22，其Ir:Re成分比例分別爲1:4、1:1 及4:1，但是這些樣品在溫度640°C的脫模性皆不良，其模 仁使用壽命都小於100次。改以含氧化鋁之銥銶合金作爲 保護膜22材料，其IrRe之成分比例亦分別爲1:4、1:1及 4:1，但是在溫度640°C之脫模性測試時，均可以承受1〇〇〇 次之模造使用壽命。 15 本紙乐尺度通州t困國家栋率（CNS ) A4说格（210X297公嫠） 3565[\vf.doc/〇06 五、發明説明（/(/) 第幵實施例 請參照第4圖，此模造玻璃之模仁係與第二實施例類 似’由底材20與保護膜22組合而成。首先，將底材20 的表面硏磨拋光之後。接著以濺鍍法濺鍍貴金屬物質，例 如銥銶合金，覆蓋於底材20之上，形成保護膜22。其中 保護膜22上具有模造面26，由此模造面沉定義出模造凹 槽28 ’以作爲模造玻璃之用。而底材20之材質包括碳化 鎢。保護膜22之厚度約爲Ιμηι，材質包括含其他金屬成 分的銥銶合金（Ir-Re-Me)。 第22號至第24號樣品中，銥銶合金之Ir:Re成分比 例分別爲1:4、1:1及4:1。採用第一實施例中的方式進行 脫模性測試，以氮氣爲氣氛控制，測試的玻璃種類包括 BK7 ' SK5及LaK13等，測試的溫度爲640°C。 請參照表6,其所列示的是以含其他金屬成分的銥鍊 合金爲保護膜22之模仁的脫模性測試結果。其中所有的 樣品都是以碳化鎢爲模仁底材20，表面經硏磨拋光後，以 濺鍍法於底材20上形成厚度約爲Ιμπι含其他金屬成分之 銥銶合金保護膜22。第25號至第28號樣品分別是以含氮 化鉻、氮化鉬、氧化銘及氧化鉻(Chromium Oxide, CrO)之 銥銶合金爲保護膜22。各樣品中Ir:Re或Ir:Ru成分比例約 爲 4:1。 請參照表7，其所列示的是各樣品中添加物的相對成 分。採用第一實施例中的方式進行脫模性測試，以氮氣爲 氣氛控制，測試的玻璃種類包括BK7、SK5及LaKl3等， ---^--------^----.--If------0 {邻先閱讀背面之注意事項再硝巧本頁) 本紙張尺度適州巾國國家#準（CNS } A4規格（210X297公釐） 經濟部中央標準局貝工消費合作社印製 445242 3565twf.doc/006 八7 B7 _ 五、發明説明（/_c) 測試的溫度爲580°C、640°C及700°c。 測試的結果如表6所示。在溫度580°C之脫模性測試 時，除了使用添加氧化鉻之銥鍊合金爲保護膜22的第28 號樣品外，其餘樣品皆可以承受5000次之模造使用壽命。 當溫度提高至640°C時，銥銶合金、銥釕合金及含氧化鉻 之銥銶合金等樣品的脫模性都不佳，其模仁使用壽命都小 於100次。在溫度70CTC之脫模性測試時，含氮化鉻、氮 化鉅及氧化鋁之銥鍊合金等樣品’均可以承受1000次之 模造使用壽命，使得高溫模造玻璃成爲可行性高的選擇。 --—^^1 I nn «In n I HE ^ ^^^1 m -- I tf <諳先閲讀背面之注f項再填寫本頁) 表6以含其他金屬成分(Ir-Re-Me)的銥銶合金爲保護膜之 模仁的脫模 巨評估 樣 品 保護膜材 質 580〇C 使用壽命評 估 640〇C 使用壽命評 估 700°C 使用壽命評 估 12 Ir-Re 5000 次 <100 次 <100 次 15 Ir-Ru 5000 次 <100 次 <100 次 25 Ir-Re-CrN 5000 次 1000 次 1000 次 26 Ir-Re-TaN 5000 次 1000 次 1000 次 27 Ir-Re-A10x 5000 次 3000 次 2000 次 28 Ir-Re-CrO <100 次 <100 次 <100 次 本紙張尺度逍用中國國家樣牟（CNS)A4说格（210x297公瘦） 3565twf,doc/006 A7 B7 五、發明説明（/t〇 表7含添加物的銥銶合金(Ir-Re-Me)保護y之添加物成分 樣 添加 Wt% At% 品 物 25 CrN 14.06 40.67 26 TaN 16.79 28.57 27 Al〇x 5.1 33.3 28 Cr〇 12.73 45.7 經濟部中央標準局貝工消費合作社印装 本發明主要是在銥銶合金、銥釕合金等系列中，藉由 氮化鉻、氮化鉅、其他氮化物及氧化鋁等材料之添加，使 得原先貴金屬合金中的成分限制得以放寬，成分比例的可 變範圍變大，配合自行設計的鍍膜系統，硏製出比習知技 術模造使用溫度更高、使用壽命更長的模仁。此外由於本 發明獨特之鍍膜製程，可以使得氮化鉻、氮化钽、其他氮 化物及氧化鋁等添加物之含量的限制縮小，因而使得製程 的控制較爲容易，成品的穩定性高，製作成本較低。以本 發明之較佳實施例說明，在模造應用上，於溫度640°C時， 模仁的使用壽命達3000次以上；於溫度700°C時，模仁的 使用壽命達2000次以上。而模造成品之品質仍可維持粗 糙度在100A以下的光學品質。由於模造溫度範圍大，將 可以使光學玻璃選擇性較大。適用於更廣域的光學設計， 在量產技術之推動上更具可行性。 綜上所述，本發明具有以下的特點： (1)本發明之保護膜係使用添加陶瓷材料之銥銶合金或 n >^—^1 ^nife Afl—^ ^^^^1 I , U3, ,¾ (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國囷家樣牟（CNS )人4現格（210X297公釐） 4 i-, 145 2 ..... .. .·. A «-.A -·— 修厂 1Matsushha company has developed a series of precious metal coating mold cores, the first stage of development includes platinum (Platinum, P0 alloy-based mold cores. This type of mold core is limited by the use temperature, can only be used at a molding temperature of 500 ° The glass below C ~ 520 ° C is mainly SF glass for molding applications. Due to the good chemical inertness of precious metals, the molding times of SF glass can reach loooo times, but it still needs to be matched with an appropriate interposer and Provide mechanisms to inhibit grain growth. In the second stage of development, in order to apply precious metal molds to mold high-temperature glass, such as LF, SK, or BK series glass, iridium (Iddium, Ir) or ruthenium (Ruthenium) , Ru) is an alloy composition of precious metal composite paper, suitable for national standards (CNS > A4 size (210 ×; 297 mm)) ..-------------------- ---- Line (" Read the notes on the back first, then write the table page) 44524 Dagger 35 6 5twf.doc / 006 A7 B7 V. Description of the invention (彡) Gold makes the molding times up to 10,000 times. Please Refer to Figure 1, which shows a conventional molded glass Schematic cross-section of the kernel ° The mold kernel of this molded glass is a combination of a substrate 10 made of tungsten carbide and a protective film 12. First, the surface of the tungsten carbide substrate 10 is honed and polished, and then the sputtering method is used. (Sputtering) Sputtering one of Ir-Re, Ir-Ru, platinum and alumina, or carbonization by plasma chemical vapor deposition (asma Enhanced Chemical Vapor Deposition, PECVD) One of sand, diamond-like film, carbide (TiC) and titanium nitride (TiN) 'or diamond-like film deposited by Ion Beam Deposition (IBD), covering the substrate i0 to form a thickness The protective film 12 is about 1 μm. The protective film 12 has a Molding Surface 16 on which the Molding Cavity 18 is defined as a molding glass. After the sample preparation is completed, Then, a series of protective film release tests were performed on mold cores coated with different materials. Among them, the release test used nitrogen as the atmosphere control, and the tested glass materials include BK7, SK5, and LaK13. Different types are 58CTC, 640 ° C and 700 ° C. The test methods include 20 stamping tests and high temperature reaction tests (100 times, 1000 times, 2000 times, and 3000 times according to the test glass). High temperature reactions The test time is based on a life of 1,000 times, that is, 80 seconds when the mold core is at the molding temperature times 1000 times, which is approximately 22.2 hours. Please refer to Table 1, which shows the release test results of a series of protective films. All of the samples used tungsten carbide as the mold core substrate. After the surface was honed and polished, a protective film with a thickness of about 1 μm was formed on the substrate. 5 (诮 Read the precautions on the back before writing this page) • Packing-Thread paper size (210S297mm j # τ " 部 中 呔 "^-/; Jh " 4452 ^^ 3565twf.doc / i) 06 8 7 B7 V. Description of the invention (today) The protective films of samples No. 1 to No. 2 are iridium-rhenium alloy films and iridium-ruthenium alloy films formed by sputtering. The Ir: Re composition ratio is approximately 4: 1, and the InRu composition ratio is also approximately 4: 1. The protective films of samples 3 to 9 are silicon carbide deposited by plasma chemical vapor deposition. , Diamond-like film, titanium carbide, titanium nitride; diamond-like film deposited by ion beam deposition method; platinum and alumina deposited by sputtering method -------'----- pack- ----- Order ------ Line (please read the precautions on the back first, and then work on this page) Table 1 Evaluation of mold release temperature at 520 ° C Sample protective film formation method Protective film material 20 times stamper State after high temperature reaction 1 Sputtering Ir: Re = 4: 1 Good protection film is not discolored 2 Sputtering Ir: Ru = 4: l Good protection film is not discolored 3 PHCVD SiC protective film peeling protective film is discolored and reacts with glass 4 PEC VD DLC protective film peeling protective film oxidative discoloration, peeling 5 PECVD TiC protective film peeling protective film oxidative discoloration 6 PECVD TiN protective film peeling protective film oxidative discoloration 7 ion beam deposition DLC protective film peeling protective film oxidative discoloration, peeling 8 Pt plating Film peeling protection film discoloration, peeling 9 Sputtering — A10X protective film peeling protection film does not change 6 This paper is suitable for size-(1¾¾¾. (CNS) a7 ^ (210X297 ^ 7 445242 3 565l wf.doc / 006 A7 B7 '1 — Yishi — ', ·, · ι · _ I ι · " · .—' · — — I · Ι 丨 ^ _____ _____ 5. Description of the invention (€) The test results are shown in Table 1. No. 1 Samples No.2, i.e., iridium-rhenium alloy, iridium-ruthenium alloy, and other hard film mold cores, have passed 20 mold test and high temperature reaction tests at a temperature of 520t. After the mold, the coating did not peel off (Peel -Off) phenomenon, which indicates that the adhesion is good, and the coating is not oxidized and discolored. The samples Nos. 3 to 9 are damaged due to peeling. Among the samples Nos. 4 to 6 and 7 Diamond-like film, titanium carbide and Plated titanium, etc., because of high temperature oxidation and discoloration caused by film peeling. Sample No. 3 of the SiC film is produced due to the reaction with the glass and cause damage. Although the coatings of platinum and alumina of samples Nos. 8 to 9 were not oxidized, the coatings were peeled due to poor adhesion of the single-layer film. In the development of conventional techniques, as far as precious metal coatings are concerned, noble metal molds of the uranium-iridium alloy (Pt-Ir) series are mainly used in SF glass, but they can only be used at temperatures of 520t ~ 550 ° C. To ensure that it can have a molding life of thousands of times. The precious metal molds of the iridium chain alloy and iridium ruthenium alloy series developed in the following can be applied to higher temperature glass, but they can only be used within 580 ° C. If you continue to increase the use temperature, the surface of the mold kernel will deteriorate rapidly and cannot be used due to the severe thermal etch effect. Therefore, the main purpose of the present invention is to provide a mold core for molding glass, and add chromium nitride (CrN), Tantalum Nitride (TaN), and others to the precious metal protective film of the iridium-rhenium alloy and iridium-ruthenium alloy series. Ceramic components such as nitride or alumina. In addition, you can also use the protective film and the mold base 'Ί _ This paper is a standard paper in the country (CMS) A4 rule (210 × 297 mm) ~ (诮 read the precautions on the back before writing this page) -装-Order 44524 ^ 3 565twt'.doc / 006 5. The design of the invention (intermediate layer) is added to increase the adhesion between the protective film and the substrate. Additives can relax the restrictions on the application of precious metal protective films such as iridium-osmium alloys and iridium-ruthenium alloy series, increase the variable range of composition ratios, and increase the service life and temperature of mold cores, in order to improve conventional molded glass The shortcomings of the model. According to the purpose of the present invention, a mold core for molding glass is provided, which includes the following structures: a substrate, and a protective film on the substrate. This protective film has a molding surface from which the molding groove is defined as a molding glass. The material of the substrate includes tungsten carbide, and the material of the protective film includes noble metal alloys such as iridium-rhenium alloy or iridium-ruthenium alloy containing chromium nitride, nitride nitride, other nitrides, or aluminum oxide. Adding ceramic components to the protective film can improve the composition limit of the precious metal protective film in application and increase the temperature of the mold kernel. An intermediate layer may also be added between the substrate and the protective film, such as nickel-containing iridium chain alloy (Ir-Re-Ni) or nickel-containing iridium-ruthenium alloy (Ir-Ru-Ni), etc. to increase the substrate Adhesion to the protective film extends the life of the mold. In the present invention, the protective film coated on the surface of the mold kernel is a precious metal alloy such as iridium-rhenium alloy or iridium nail alloy series containing ceramic materials such as chromium nitride, nitrided nitride, other nitrides, or alumina. In the application of molding, the service life of the mold core can reach 5000 times at a high temperature of 580 ° C, and the quality of the molded product can still maintain the optical quality of the roughness below 丨 〇A. Due to the large molding temperature range, optical glass can be made more selective 'for a wider range of optical designs, and it is more feasible to promote mass production technology. In order to make the above and other objects, features, and advantages of the present invention more comprehensible, a preferred embodiment is given below with reference to the accompanying drawings to make details. ) Α4 specification (2Ι0 × 297 mm) .-------- ^ --- 1 --- 1r! ----. ^ (诮 Please read the notes on the back before filling in this education) 44b ^ 3565t% vt'.doc / 006 A7 B7 V. Description of the invention (ο) The detailed description is as follows: A brief description of the figure: Figure 1 shows a schematic cross-section of a mold core of a conventional molded glass; Figure 2 shows another A schematic sectional view of a mold core of a conventional molded glass, FIG. 3 is a schematic sectional view of a mold core of a molded glass according to a preferred embodiment of the present invention; and FIG. 4 is a schematic view of another mold core according to the present invention. A preferred embodiment is a schematic cross-sectional view of a mold core for molding glass. Explanation of the marks in the figure: 10, 20: Substrate 12, 22: Protective film 14 '24: Intermediate layer 26: Molded surface 28: Molded groove For the first embodiment, please refer to FIG. 3, which is shown in accordance with A preferred embodiment of the present invention is a schematic sectional view of a mold core for molding glass. Wherein, the mold core of the molded glass includes a combined structure of a substrate 20, an interposer 24, and a protective film 22 sequentially stacked. First, the surface of the substrate 20 is honed and polished, and the material of the substrate 20 includes tungsten carbide. Next, on the surface of the substrate 20, an interposer 24 is formed, for example, a layer of noble metal such as nickel-containing iridium chain alloy or nickel-containing iridium ruthenium alloy is sputtered by sputtering. The thickness of the interposer 24 is about 0.3 μm, and its paper size is suitable for the National Standard Soap (CNS) A4 specification of the 10 countries (2 丨 0X297 mm) ----- ^ ----- t ---- --if ------ line {诮 read the precautions on the back before reading, κ-this page) ^ ?; r; ^ r ^ "!;Ji?;: J ， -ji-T '& quot Yu cooperation. 71 printed 4 4524 3565 twt'.doc / ti〇0 Λ7 V. Description of the invention (") The purpose is to increase the adhesion between the protective film 22 and the substrate 20 and then form a protective film 22 on the interposer 24 For example, a precious metal thin film is formed by sputtering, and the intermediate layer 24 is covered. The thickness of the protective film 22 is about 1 µη1, and the material includes a precious metal alloy such as an iridium-rhenium alloy, an iridium-ruthenium alloy, and the like. Wherein, the protective film 22 has a molding surface 26 'from which the molding groove 28 is defined as a molding glass. The ratio of the Ir: Re component of the precious metal alloy is about 4: 1 to 1: 4. The ratio of the Ir: Ru component is also about 4: 1 to 1: 4. Please refer to Table 2, which shows the demolding of the mold core using the iridium-rhenium alloy and iridium ruthenium alloy as the protective film 22 'and the iridium chain alloy containing the town and iridium ruthenium alloy containing the town as the interlayer 24 result. All the samples are made of tungsten carbide as the mold core substrate 20, and the surface is honed and polished, and then the substrate 20 is sputtered to form a nickel-containing noble metal alloy interposer layer 24 with a thickness of about 0.3 μm. The interposer 24 of samples Nos. 10 to 12 is an iridium-osmium alloy containing nickel. The InRe composition ratios are 1: 4, 1: 1, and 4: 1, respectively; and the interposers of samples Nos. 13 to 15 are 24 is an iridium-ruthenium alloy containing nickel, and its Ir: Ru composition ratios are also 1: 4, 1: 1, and 4: 1, respectively. On the surface of the interposer 24, a silver nail alloy and silver chain alloy ore film ' having a thickness of about 1 m was formed as a protective film 22 by a sputtering method. The ratios of the IrRe and Ir: Ru components in the protective film 22 are the same as those of the interposer 24. In order to prove the advantages of the present invention, the mold release test was performed in the same manner as the samples No. 1 to No. 9, with nitrogen as the atmosphere control. The glass types tested include BK7, SK5, and UK13, and the test temperatures were 580. ° C and 640 ° C. The test results are shown in Table 2. Among them, the samples No. 10, No. 11 and No. 13 and No. M, including Ir: Re and InRu, have the same paper size as CNS A4 (2ί〇Χ29 ").; 7 mm) --- ^ ---: ---- ¾ ---- · --ΐτ ------ itch (Xu Xianyi read the precautions and then write this page) ^ 部 屮 Α «.ί? · ^ ,,». · Τ. ≫ / ί 抡 合 竹 .s-ip 家 4 4 b B, ~ 3565twt'.doc / 006 A7 _________ B7 V. Description of the invention (7 ) The composition ratios are 1: 4 and 1: 1, respectively. These samples have poor mold release properties, and the mold cores have a service life of less than 100 times. The composition ratios of Ir: Re and Ir: Ru of samples No.12 and No.15 are both 4: 1, and both of them can withstand a service life of 5000 times when tested at a temperature of 580 ° C. However, when the temperature is raised to 640t, it cannot pass the mold release test. Table 2 Samples of releasability evaluation using iridium-rhenium alloy (Ir-Re) and iridium-ruthenium alloy (Ir-Ru) as protective film and interlayer Protective film material 580 ° C service life evaluation 640 ° C service life evaluation 10 Ir: Re = l: 4 < 100 times < 100 times 11 Ir: Re = l: 1 < 100 times < 100 times 12 Ir: Re = 4: 1 5000 times < 100 times 13 Ir; Ru = l: 4 < 100 times < 100 times 14 Ir: Ru = l: 1 < 100 times < 100 times 15 Ir: Ru = 4: 1 5000 times < 100 times For the second embodiment, please refer to the fourth FIG. Is a schematic cross-sectional view of a mold core for molding glass according to another preferred embodiment of the present invention. Among them, the mold core of this molded glass is a combination of a substrate 20 and a protective film 22. First, after the surface of the substrate 20 is honed and polished. Then, a precious metal substance, such as an iridium-osmium alloy, is sputter-coated on the substrate 20 to form a protective film 22 °. The protective film U has a molding surface 26, and the molding surface 26 defines a thick paper tiger. Describe the 'National Standards of China (CNS) A4 (210X297 mm) ----- ^ ---- installation ------ ΪΤ ------ line (诮 Please read the note on the back first) Matters " 3 pages) 4 Αυ c .. 3565iwf.doc / 006 ρ ^ η _____________ Β7 _ 5. Description of the invention (~) The groove 28 'is used for molding glass. The material of the substrate 20 includes tungsten carbide. The thickness of the protective film 22 is about 1 μm, and the material includes a silver chain alloy (Ir-Re-CrN) containing a nitride inscription. Please refer to Table 3, which shows the results of the mold releasability test using the chromium nitride-containing iridium-osmium alloy as the protective film 22. All the samples are made of tungsten carbide as the mold core substrate 20, and the surface is honed and polished, and then a chromium nitride-containing iridium-rhenium alloy protective film 22 is formed on the substrate 20 by sputtering to a thickness of about ΐμιη. In the samples Nos. 16 to 18, the Ir: Re component ratios of the iridium chain alloys were 1: 4, 1: 1, and 4: 1, respectively. The releasability test was performed in the same manner as in the first embodiment, and nitrogen was used as the atmosphere control. The glass types tested included BK7, SK5, and UK13. The test temperature was 640 ° C. Table 3 Evaluation of mold release properties of the mold core using chromium nitride-containing iridium chain alloy (ir-Re-CrN) as the protective film. Iridium-osmium composition ratio 640 ° C service life evaluation Ir-Re protective film 640 ° C service life Evaluation of Ir-Re-CrN protective film 16 Ir: Re = l: 4 < 100 times 1000 times J7 Ir: Re = l: l < 100 times 1000 times J8 Ir: Re = 4: 1 < 10 times 1000 times The results of this test are shown in Table 3. The protective film 22 made of iridium chain alloy without added additives has IrRe composition ratios of 丨: 4, 1: 1, and 4: 丨. However, these samples have poor mold release properties at a temperature of 64 ° C (TC). The size of the mold paper is 通 1/10 珣, and the housekeeping soap (CNS) A4 is present (210X297 mm). ---- # ------ ΪΤ ------ line J (I read the note on the back and fill it out {: ίϊ page) 3565twf.doc / 006 A7 B7 V. Description of the invention (/丨) The service life of the kernel is less than 100 times. The iridium chain alloy containing chromium nitride is used as the protective film 22, and the IrRe composition ratio is also 1: 4, 1: 1, and 4: 1, but at a temperature of 640 During the demoldability test at ° C, it can withstand a molding life of 1000 times. For the third embodiment, please refer to Fig. 4. The mold core of this molded glass is similar to that of the second embodiment. The substrate 20 and the protective film 22 is formed. First, after honing and polishing the surface of the substrate 20, and then sputtering a precious metal material, such as an iridium-osmium alloy, by sputtering to cover the substrate 20 to form a protective film 22. The protective film 22 There is a molding surface 26 on which the molding groove 28 is defined as a molding glass. The material of the substrate 20 includes tungsten carbide. The thickness of the protective film 22 is about 1 μm. Including Ir-Re-TaN containing nitrided giant alloy. Table 4 Evaluation of mold release properties of silver tincture using Ir-Re-TaN containing nitrided giant alloy (Ir-Re-TaN) as protective film ° C Lifetime Evaluation 640 ° C Lifetime Evaluation Π an Ratio Estimation Ir-Re Protective Film Ir-Re-TaN Protective Film 19 Ir: Re = l: 4 < 100 times 1000 times 20 Ir: Re = l: l < 100 times and 1000 times 21 Ir: Re = 4: l < 100 times and 1000 times please refer to Table 4, which lists the nitride-containing giant iridium chain alloy as the paper size.家家 # 准 （CNS） A4 Specification （2 丨 OX297mm） ----------- Install ---------- IT ------ ^ (" Read the back first Please pay attention to this page before filling in this page) Good: " '部 中 呔 ir ^' i; J'.i (Working and removing co-worker dress 445242 3565twf.doc / U〇6 __B7 V. Description of the invention (丨 of) Results of the mold release test of the mold core of the protective film 22. All the samples were made of tungsten carbide as the mold core substrate 20, and the surface was honed and polished, and then formed on the substrate 20 by sputtering to a thickness of about 1 μm. Iridium-Iridium Alloy Protective Film Containing Giant Nitrides 22. In samples Nos. 19 to 21, the lr: Re composition of Iridium-Iridium alloy The fraction ratios are 1: 4, 1: 1, and 4: 1. The demoldability test was performed in the manner of the first embodiment, and the atmosphere was controlled with nitrogen. The types of glass tested include BK7, SK5, and LaK13. The temperature is 64CTC. The test results are shown in Table 4. The protective film 22 made of an iridium chain alloy without added additives has an InRe composition ratio of 1: 4, 1: 1, and 4: 1, but these samples have poor mold release properties at a temperature of 640 ° C. The mold cores have a service life of less than 100 times. The iridium-osmium alloy containing giant nitride is used as the material of the protective film 22. Its InRe composition ratio is also L4, 1: 1, and 4: 1, but it can withstand the mold release test at a temperature of 640 ° C. 1000 times mold life. 24th Embodiment Referring to FIG. 4, the mold core of this molded glass is similar to the second embodiment, and is composed of a substrate 20 and a protective film 22. First, after honing and polishing the surface of the substrate 20. Then, a precious metal substance, such as an iridium-osmium alloy, is sputter-coated on the substrate 20 by a sputtering method to form a protective film 22. The protective film 22 has a molding surface 26 thereon, and the molding surface 26 defines a molding recess 28 'for molding glass. The material of the substrate 20 includes tungsten carbide. The thickness of the protective film 22 is approximately ΐμηι, and the material includes an alumina-containing iridium chain alloy (Ir-Re-A10J. Please refer to Table 5 for a description of the alumina-containing iridium-rhenium alloy as the paper size). Deduction · Ⅰ, circle standard (CNS) A4 specification (2Ι〇 × 297) 嫠 ---------- Fen Yi ---- ^-ir ------ β (诮Read the precautions on the back before writing this page.) 445242 3 5 ή 5 lw t '. Do c / O 06 B7 V. Description of the invention (丨 3) The results of the mold release test of the mold core of the protective film 22. All of them The samples were made of tungsten carbide as the mold core substrate 20, and the surface was honed and polished, and then the substrate 20 was formed on the substrate 20 with a thickness of about 1 μm, and an iridium-osmium alloy protective film 22 containing aluminum oxide was formed. Nos. 22 to In the sample No. 24, the ir; Re component ratios of the iridium-osmium alloy were 1: 4, 1: 1, and 4: 1. The demoldability test was performed in the same manner as in the first embodiment, and nitrogen was used as the atmosphere control to test The types of glass include BK7, SK5, LaK13, etc., and the test temperature is 640 ° C. Table 5 Molded with alumina-containing iridium-rhenium alloy (Ir-Re-A10x) as the protective film. Read the notes on the back to re-nit This page) Evaluation sample of iridium chain for 640 ° C service life evaluation 640 ° C service life evaluation n 叩 ratio estimate Ir-Re protective film Ir-Re-AIO, protective film 22 Ir: Re = 1: 4 < 100 times and 1000 times 23 Ir: Re = l: l < 100 times and 1000 times 24 Ir: Re = 4: 1 < 100 times and 1000 times booking ^ Hubuzhong " " ^ 而 卩 · 7 The results of the test of the Chihuzhu private father are shown in Table 5. The protective film 22 made of the iridium-osmium alloy without added additives has an Ir: Re component ratio of 1: 4, 1: 1, and 4: 1, respectively. However, these samples have poor mold release properties at a temperature of 640 ° C, and their mold cores have a service life of less than 100 times. The alumina-containing iridium-osmium alloy is used as the protective film 22 material, and the IrRe composition ratios are also 1 : 4, 1: 1, and 4: 1, but can withstand a mold life of 10,000 times when tested at a temperature of 640 ° C. 15 Tongzhou National Building Standard (CNS) A4 said grid (210X297) 嫠 3565 [\ vf.doc / 〇06 5. Description of the invention (/ (/) Please refer to Figure 4 for the first embodiment. The mold core of this molded glass is similar to the second embodiment. ' By substrate 20 and security After the film 22 combination. First, the grinding surface of the substrate 20 is polished WH is then sputtered by sputtering a noble metal material, e.g. Kau iridium alloy, overlying substrate 20, a protective film 22. The protective film 22 has a molding surface 26 thereon, and the molding surface 28 defines a molding recess 28 'for molding glass. The material of the substrate 20 includes tungsten carbide. The thickness of the protective film 22 is about 1 μm, and the material includes an iridium-rhenium alloy (Ir-Re-Me) containing other metal components. In the samples Nos. 22 to 24, the Ir: Re composition ratios of the iridium-osmium alloy were 1: 4, 1: 1, and 4: 1, respectively. The releasability test was performed in the same manner as in the first embodiment, and nitrogen was used as the atmosphere control. The glass types tested included BK7 'SK5 and LaK13, and the test temperature was 640 ° C. Please refer to Table 6, which shows the results of the mold release test using an iridium chain alloy containing other metal components as the protective film 22. All of the samples were made of tungsten carbide as the mold core substrate 20, and the surface was honed and polished, and then an iridium-rhenium alloy protective film 22 containing other metal components was formed on the substrate 20 by sputtering to a thickness of about 1 μm. Samples Nos. 25 to 28 were made of iridium-rhenium alloy containing chromium nitride, molybdenum nitride, oxide oxide, and chromium oxide (CrO) as the protective film 22, respectively. The Ir: Re or Ir: Ru composition ratio in each sample was approximately 4: 1. Refer to Table 7 for the relative composition of the additives in each sample. Use the method of the first embodiment to perform the mold release test with nitrogen as the atmosphere control. The types of glass tested include BK7, SK5 and LaKl3, etc., --- ^ -------- ^ ----. --If ------ 0 {Please read the precautions on the back first, and then make this page) This paper size is suitable for the state of China # 州 （CNS} A4 size (210X297 mm) Printed by Industrial and Consumer Cooperatives 445242 3565twf.doc / 006 8 7 B7 _ V. Description of the invention (/ _c) The test temperature is 580 ° C, 640 ° C and 700 ° c. The test results are shown in Table 6. At the temperature During the mold release test at 580 ° C, with the exception of the No. 28 sample using the iridium chain alloy with chromium oxide as the protective film 22, the other samples can withstand a mold life of 5,000 times. When the temperature is increased to 640 ° C The samples of iridium-rhenium alloy, iridium-ruthenium alloy, and iridium-rhenium alloy containing chromium oxide have poor mold release properties, and their mold cores have a service life of less than 100 times. When the mold-release properties were tested at a temperature of 70CTC, chromium nitride was contained Samples such as, nitrided giant and alumina iridium chain alloys can withstand a molding life of 1,000 times, making high-temperature molded glass into Choice of high performance. --- ^^ 1 I nn «In n I HE ^ ^^^ 1 m-I tf < 谙 Read the note f on the back before filling this page) Table 6 to include other metals Composition (Ir-Re-Me) of the iridium-rhenium alloy as the mold core of the protective film. Sample evaluation of the protective film material. 580 ° C. Service life assessment. 6400 ° C. Service life assessment. 700 ° C. Service life assessment. 12 Ir-Re 5000 Times < 100 times < 100 times 15 Ir-Ru 5000 times < 100 times < 100 times 25 Ir-Re-CrN 5000 times 1000 times 1000 times 26 Ir-Re-TaN 5000 times 1000 times 1000 times 27 Ir- Re-A10x 5000 times 3000 times 2000 times 28 Ir-Re-CrO < 100 times < 100 times < 100 times This paper is scaled to the standard of China National Samples (CNS) A4 (210x297 thin) 3565twf, doc / 006 A7 B7 V. Description of the invention (/ t〇 Table 7 Additive-containing iridium-osmium alloy (Ir-Re-Me) protection y Additive composition sample Add Wt% At% Product 25 CrN 14.06 40.67 26 TaN 16.79 28.57 27 Al〇x 5.1 33.3 28 Cr〇12.73 45.7 Printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs The present invention is mainly in the series of iridium-rhenium alloy, iridium-ruthenium alloy, etc. The addition of materials such as chromium nitride, nitrided nitride, other nitrides, and alumina makes the composition restrictions of the original precious metal alloys relaxed, and the variable range of the composition ratios becomes wider. Moulds used at higher temperatures and longer life than conventional techniques. In addition, due to the unique coating process of the present invention, the limitation of the content of chromium nitride, tantalum nitride, other nitrides, and other additives such as alumina can be reduced, thereby making it easier to control the process, and the stability of the finished product is high. Cost is lower. According to the preferred embodiment of the present invention, in the application of molding, the service life of the mold kernel is more than 3000 times at a temperature of 640 ° C; and the service life of the mold kernel is more than 2000 times at a temperature of 700 ° C. The quality of the molded product can still maintain the optical quality of the roughness below 100A. Due to the wide molding temperature range, the optical glass can be made more selective. It is applicable to a wider area of optical design and is more feasible in the promotion of mass production technology. To sum up, the present invention has the following characteristics: (1) The protective film of the present invention uses an iridium-osmium alloy or a ceramic material plus n > ^ — ^ 1 ^ nife Afl— ^ ^^^^ 1 I, U3 ,, ¾ (Please read the notes on the back before filling out this page) This paper size is applicable to the Chinese family sample (CNS) 4 people (210X297 mm) 4 i-, 145 2 ....... ... A «-.A-· — Repair shop 1
<<yc 4t PM 福充 i 五、發明説明（η ) 銥釕合金等貴金屬薄獏，合金中銶或釕與銥之重量t匕 率約爲1:4至4:1 ° (2) 本發明之保護膜中，所添加之陶瓷材料包括氮化 鉻、氮化鉅及氧化鋁等。其中氮化鉻之重量百分比約爲 11%〜15.7%，氮化鉬之重量百分比約爲10%〜20%，氧化鋁之 重量百分比約爲0.1%〜7%。藉由添加物可以放寬責金屬！呆 護膜在應用上之成分限制1使得成分比例的可變範圍增 大3 (3) 本發明應用的玻璃種類爲BK7、SK5及LaK13等> 其成形溫度可提高至約64Qt左右3 (4) 本發明之中介層所使周之材料包括含鎳的銥錬合 金、銥釕合金等，坷以增加底材與保護膜的附著性。 (5) 本發明所提供的模仁可應兩的範圍很廣，包括顯微 鏡（Microscope)、掃描器（Scanner)或是數位影碟（Digital Video Disk ; DVD)等。 雖然本發明已以一較佳實施例揭露如上，然其並非浔 以限定本發明，任何熟習此技藝者，在不脫離本f明之精 神和範圍內，當可作各種之更動與潤飾，因此本發明之保 護範圍當視後附之申請專利範圍新界定者爲準。 錡先閱讀背面之注意事項再填寫本頁 .裝< < yc 4t PM Fuchong i 5. Description of the Invention (η) Noble metals such as iridium and ruthenium alloys are thin, and the weight t of rhenium or ruthenium and iridium in the alloy is about 1: 4 to 4: 1 ° (2) In the protective film of the present invention, the added ceramic materials include chromium nitride, giant nitride, and alumina. The weight percentage of chromium nitride is about 11% to 15.7%, the weight percentage of molybdenum nitride is about 10% to 20%, and the weight percentage of alumina is about 0.1% to 7%. Metals can be relaxed with additives! The composition limit of the protective film in application 1 makes the variable range of the composition ratio increase 3 (3) The type of glass used in the present invention is BK7, SK5, LaK13, etc.> Its forming temperature can be increased to about 64Qt 3 (4 The materials used in the interposer of the present invention include nickel-containing iridium-osmium alloy, iridium-ruthenium alloy, etc., to increase the adhesion between the substrate and the protective film. (5) The mold core provided by the present invention can be used in a wide range of applications, including a microscope, a scanner, or a digital video disk (DVD). Although the present invention has been disclosed as above with a preferred embodiment, it is not intended to limit the present invention. Any person skilled in the art can make various changes and decorations without departing from the spirit and scope of the present invention. The scope of protection of the invention shall be subject to the newly defined scope of the patent application attached.阅读 Read the precautions on the back before filling in this page.
—'1T 經濟部中央標準局員工消費合作社印製 本紙張尺度通用中國國家標準（CNS ) Λ4規格（210 X 公尨）—'1T Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs This paper is in accordance with the Chinese National Standard (CNS) Λ4 specification (210 X cm)