4452 u d 經濟部中央樣準局貝工消費合作社印掣 Α7 Β7五、發明说明（！) 〔發明所屬之技術領域〕 本發明是關於利用因熱而使得塑膠材、感熱紙、液晶 等容易產生變形·變色等變化之被處理體的紫外線的黏著 或油墨等硬化處理之紫外線照射裝置，尤其是有關可使被 處理體上之光輻射面的輻射度分布均勻，獲得高平均輻射 度之光程分割型紫外線照射裝置者。 〔習知技術〕 首先於圖9所示，爲一種將因熱而容易變形·變色之 被處理體（以下稱工件）不須經由冷卻手段即可進行處理 之紫外線照射裝置的建議（日本專利特願平8 _ 7 2 1 7 0 號）。 圖9中，10爲紫外線照射裝置框體，11爲棒形高 壓水銀燈管，棒形燈管1 1所放射光的一部份係入射於拱 狀冷反射鏡1 2內，其他的一部份則是入射至平板狀冷反 射鏡14、15內。入射於拱狀冷反射鏡12之光中，一 部份之可視光與紅外線是穿透拱狀冷反射鏡1 2，以拱狀 冷反射鏡1 2反射紫外線（包含部份之可視光與紅外線） 而入射至平板狀冷反射鏡1 4內。並且，其反射光係入射 於冷濾光片1 3內，於冷濾光片1 3中可反射部份之可視 光，另外的光則入射於工件W內。 另一方面，從棒形燈管1 1放射而直接入射於冷反射 鏡1 4、1 5光之中，部份的可視光與紅外線穿透冷反射 鏡1 4、1 5，以平板狀冷反射鏡1 4、1 5反射紫外線 本紙張尺度適用中國國家標準（CNS ) A4規格（2丨0X297公釐)~ .Λ - (1ί先閲讀背面之注意事項再填寫本頁) -* 經濟部中央標準局員工消費合作社印製 Α7 Β7五、發明説明g ) (包含部份的可視光與紅外線）》平板狀冷反射鏡1 4、 1 5所反射之上述紫外線更入射至冷濾光片1 3中，可藉 冷濾光片13反射部份之可視光而將其他光入射至工件W 內。 即，以冷反射鏡1 4、1 5反射來自拱狀冷反射鏡 1 2的反射光，及以冷反射鏡1 4、1 5反射來自棒形燈 管1 1的直接光，僅將來自冷反射鏡1 4、1 5的反射經 過冷濾光片1 3照射在工件W上，藉此可相對減少紅外 線、可視光成份的比例使紫外線成份多的光線照射在工件 W上。 〔發明所欲解決之問題〕 上述之紫外線照射裝置具有以下的問題。 即，爲了有效利用來自棒形燈管1 1的光，必須使光 線平行照射或聚光照射於冷反射鏡14上。 因此，拱狀冷反射鏡1 2的形狀，其剖面係形成橢圓 形或者拋物線狀，但是剖面藉上述形狀之反射鏡所反射的 光係於照射面上形成高斯分布狀之輻射度分布。因此，與 棒形燈管的縱向比較，橫向之輻射度分布不良。 如上述不良之輻射度分布，照射領域上之輻射度分布 不勻時會產生以下等問題。 (a )於工件上之照射領域中，根據最小値之輻射度 限定處理時間時，會增長工件的處理時間。 不使工件造成過熱等問題的場合，雖可提高整體的動 本紙張尺度適用中國國家標準（CNS > A4規格（2丨0X 297公嫠）.c . (請先聞讀背而之注意事項再填寫本頁) 訂 ^-- 445203 經濟部中央標準局負工消費合作社印製 A7 B7五、發明説明$ ) 力，與輻射度分布無關地縮短其處理時間，但是必須對於 燈管投入大的電力而導致效果不佳。 如未能提高光的動力時，則必須在某一輻射度以上的 照射領域內進行工件處理時，可處理的工件小。 (b )異如黏著透鏡等使用時| —旦輻射度分布不均 勻時，會產生因施以黏著劑處之紫外線吸收差所造成的熱 應變·硬化反應不勻稱所產生之應力應變。 因應上述問題例如可以考慮以下的方法。 ① 增加燈管與工件照射面的距離。 ② 使反射鏡及濾光片具有擴散的功能。例如，以噴砂 (sandblast)加工冷濾光片1 3表面/裏面，或以如高爾 夫球表面之凹孔加工拱狀冷反射鏡1 2，或者將拱狀冷反 射鏡1 2/冷反射鏡1 4形成多面體。 採取上述①的方法時，會降低工件表面的輻射度而增 長處理時間《又，增大包含運送系之整體系統時·會增加 處理裝置所占有的空間。 上述②之中，以噴砂（sandblast)加工時會降低輻射 度而降低其效率。又，有效地取光，且具良好輻射度而施 以凹孔加工，或形成多面體時，其形狀·構造的設計困 難。 本發明係考慮上述問題所硏創而成者’其目的爲提供 可不須使用冷卻手段處理因熱容易引起變形·變色等變化 之工件，可以良好輻射度分布，提高平均輻射度工程分割 型紫外線照射裝置。 本紙張尺度適用中國國家標準（CNS ) Ad規格（210X297公釐） (邡先閲請背面之;±意事項再填舄本1}4452 ud Printed by the Central Bureau of Standards, Ministry of Economic Affairs, Shellfish Consumer Cooperative Association A7 B7 V. Description of the invention (!) [Technical field to which the invention belongs] The present invention relates to the use of heat to make plastic materials, thermal paper, liquid crystal, etc. easily deformed. · Adhesion of the ultraviolet rays of the object to be treated such as discoloration or hardening of the ultraviolet irradiation device such as ink, especially related to the uniformity of the radiation distribution of the light radiating surface on the object to obtain an optical path division with high average radiance Type UV irradiation device. [Know-how] First, as shown in FIG. 9, a proposal for an ultraviolet irradiation device capable of processing a subject (hereinafter referred to as a workpiece) which is easily deformed and discolored by heat (hereinafter referred to as a workpiece) without cooling means (Japanese Patent Special) Yuanping 8_ 7 2 1 7 0). In FIG. 9, 10 is a frame of the ultraviolet irradiation device, 11 is a rod-shaped high-pressure mercury lamp, and a part of the light emitted by the rod-shaped lamp 11 is incident into the arched cold mirror 12 and the other part It is incident into the flat cold mirrors 14 and 15. Of the light incident on the arched cold mirror 12, a part of the visible light and infrared light is transmitted through the arched cold mirror 12 and the arched cold mirror 12 reflects ultraviolet light (including some of the visible light and infrared light) ) And incident into the flat cold mirror 14. In addition, the reflected light is incident into the cold filter 13, visible light that can be reflected in the cold filter 13, and the other light is incident into the workpiece W. On the other hand, the light emitted from the rod-shaped lamp tube 11 directly enters the cold reflectors 14 and 15 and part of the visible light and infrared rays penetrate the cold reflectors 14 and 15 and cool in a flat plate shape. Reflector 1 4 and 1 5 reflect ultraviolet light This paper size is applicable to Chinese National Standard (CNS) A4 specification (2 丨 0X297 mm) ~ .Λ-(1ίPlease read the precautions on the back before filling this page)-* Central Ministry of Economic Affairs Printed by the Consumer Bureau of Standards Bureau A7 B7 V. Description of the invention g) (including some visible light and infrared light) "flat cold mirrors 1 4 and 1 5 The above ultraviolet rays reflected by the plate are incident on the cold filter 1 3 However, other visible light can be incident into the workpiece W by the visible light reflected by the cold filter 13. That is, the reflected light from the arched cold mirror 12 is reflected by the cold mirrors 14 and 15 and the direct light from the rod-shaped lamp tube 1 1 is reflected by the cold mirrors 14 and 15 and only the cold light The reflections of the mirrors 14 and 15 are irradiated on the workpiece W through the cold filter 13, so that the proportion of the infrared and visible light components can be relatively reduced, so that the light with more ultraviolet components is irradiated on the workpiece W. [Problems to be Solved by the Invention] The above-mentioned ultraviolet irradiation device has the following problems. That is, in order to effectively utilize the light from the rod-shaped lamp tube 11, it is necessary to irradiate the light rays in parallel or to collect light on the cold mirror 14. Therefore, the shape of the arched cold mirror 12 has an elliptical or parabolic cross section, but the light reflected by the mirror in the cross section has a Gaussian radiance distribution on the illuminated surface. Therefore, compared with the longitudinal direction of the rod-shaped lamp, the radiation distribution in the lateral direction is poor. If the above-mentioned bad radiosity distribution is uneven, the following problems will occur when the radiosity distribution in the irradiation field is uneven. (a) In the field of irradiation on the workpiece, the processing time of the workpiece is increased when the processing time is limited based on the minimum radiation intensity. Where the workpiece does not cause problems such as overheating, although the overall paper size can be increased, the Chinese national standard (CNS > A4 specification (2 丨 0X 297 cm)) can be used. C. (Please read the precautions before reading Fill out this page again) Order ^-445203 Printed by the Central Standards Bureau of the Ministry of Economic Affairs and Consumer Cooperatives printed A7 B7 V. Invention Description $), reducing the processing time regardless of the radiation distribution, but it must be a large investment for the lamp Poor results due to electricity. If the power of light cannot be increased, the workpieces that can be processed are small when the workpieces must be processed in an irradiation area with a certain radiance or higher. (b) When used in different ways such as adhesive lenses, etc.-When the radiation distribution is uneven, stress and strain due to uneven thermal strain and hardening reaction caused by the difference in ultraviolet absorption at the place where the adhesive is applied will occur. In response to the above problems, for example, the following methods can be considered. ① Increase the distance between the lamp and the illuminated surface of the workpiece. ② Make the reflector and filter have the function of diffusion. For example, the surface of the cold filter 1 3 is processed by sandblasting, or the arched cold mirror 12 is processed with recessed holes such as a golf ball surface, or the arched cold mirror 1 2 / cold mirror 1 is processed. 4 forms a polyhedron. When the method of (1) is adopted, the radiation on the surface of the workpiece is reduced and the processing time is increased. When the entire system including the transport system is increased, the space occupied by the processing device is increased. Among the above items (2), when the sandblasting process is performed, the radiation is reduced and the efficiency is reduced. In addition, it is difficult to design the shape and structure of the light when it is effective to extract light and perform recessed hole processing or form a polyhedron with good radiance. The present invention was created in consideration of the above-mentioned problems. Its purpose is to provide a work piece that can be easily deformed or discolored due to heat without the use of cooling means. It can have a good radiance distribution and improve average radiance. Engineering-divided ultraviolet irradiation Device. This paper size applies Chinese National Standard (CNS) Ad specifications (210X297 mm) (邡 Please read the back first; ± Notes, then fill in this one)
、1T 445203 經濟部中央標準局员工消費合作杜印製 A7 _ _ _B7 五、發明説明4 ) 〔解決問題之手段〕 於本發明中可以下之方法解決上述問題。 (1)紫外線照射裝置爲棒形燈管；棒形燈管縱向平 行配置，且反射部份之棒形燈管放射光之拱狀冷反射鏡； 及，至少2片冷反射鏡所構成，將上述棒形燈管所放出的 光予以二分割，使二分割後的光朝著互相不同方向反射之 光程分割鏡：可分別使上述光程分割鏡·二分割後的光反射 之2片全反射鏡；及可穿透上述全反射鏡所反射光之冷滤 光片等所構成。 並且，上述棒形燈管所放出光之中，僅藉光程分割鏡 二分割而穿透冷濾光片的光，部份重叠在光照射面上照射 而配置上述光程分割鏡、全反射鏡及冷濾光片。 (2 )上述（1 )中，配置不致使棒形燈管放出的光 直接照射在冷濾光片上之遮蔽板。並且，遮蔽板也可以使 用在吸收入射光之用，或反射入射光之用者。 使用反射板，作爲使入射光朝著拱狀冷反射鏡方向反 射之遮蔽板，可藉此有效利用來自棒形燈管所放出之光能 源。又，以棒形燈管的管軸爲中心形成圓弧形反射板時， 可將反射板入射的光聚集在棒形燈管附近1更可有效地利 用其光能源者。 (3)於上述（1)(2)中，從棒形燈管放出而以 拱狀冷反射鏡所反射的光二分割，使光程分割鏡朝著互相 不同的方向反射之第1光程分割鏡，及二分割直接從棒形 本紙張尺度適用中國國家^準（CNS ) A4規格（210X297公釐}~~~Ί~. (銪先閱讀背面之注意事項再填寫本頁) 445203 經濟部中央標準局員工消費合作社印製 A7 __B7 五、發明説明§ ) 燈管放出的光而朝著互相不同的方向反射之第2光程分割 鏡所構成，並配設可以上述第1光程分割鏡及第2光程分 割鏡反射光之全反射鏡。 (4 )上述（1 ) ( 2 ) ( 3 )中，於拱狀冷反射鏡 設置通風道，可藉該通風道流入之冷卻風至少冷卻棒形燈 管、拱狀冷反射鏡、光程分割鏡及冷濾光片。 (5 )於上述（1 )中，在光程分割鏡的裏側安裝遮 蔽構件而藉光分割鏡與遮蔽構件形成通風道，使冷卻風流 動於該通風道內，冷卻光程分割鏡。 本發明之申請專利範圍第1〜7項之發明爲將棒形燈 管所放出的光，利用冷反射鏡所構成的光程分割鏡予以二 分割後穿透冷濾光片，使二分割後的光部分重疊在光照射 面上，因此可獲得均一之光照射面的輻射度分布。 又，將棒形燈管放出的光分爲2個光程，利用2片光 程分割鏡及全反射鏡反射，由於光反射次數多，因此可縮 短燈管與光照射面的距離獲得裝置整體的小型化。 此外，如申請專利範圍第2〜4項之發明，藉吸收或 反射光之遮蔽板的配置，可確實防止棒形燈管所放出的光 直接入射於冷濾光片內。尤其是如申請專利範圍第3、4 項發明之遮蔽板係使用反射板，可藉此有效利用棒形燈管 所放出之光能源者。 又，如申請專利範圍第5項之發明，光程分割鏡爲第 1光程分割鏡與第2光程分割鏡所構成，可有效利用棒形 燈管所放出之光能源，其可增強光照射面的輻射度。 本紙張尺度適用中國國家#準（CNS > Α4規格（2!0Χ297公釐）~~7r~. (請先閲讀背面之注意事項再靖寫本頁) 訂 吨 445203 經濟部中央標準局貝工消費合作社印聚 A7 ___B7____五、發明説明P ) 藉申請專利範圍第6、7項所構成之冷卻系可有效地 冷卻棒形燈管、拱狀冷反射鏡、光程分割鏡及冷濾光片 等。 〔發明之實施形態〕 圖1、圖2是表示本發明第1實施例之紫外線照射裝 置之構成圖，圖1是表示以垂直於棒狀之紫外線燈管管軸 的平面截斷本實施例紫外線照射裝置之剖視圖，圖2是表 示以通過上述管軸而沿著光軸的平面截斷本實施例紫外線 照射裝置之剖視圖》 圖1、圖2中，1爲放出包含高壓水銀燈、鹵化金靥 燈等所構成之紫外光的棒形燈，2爲拱狀冷反射鏡，並施 予拱狀冷反射鏡2可反射紫外線與一部份可視光線，而可 穿透其他光線之蒸鍍膜的玻璃等所形成。在上述拱狀冷反 射鏡2上設置複數個送風璋P1，將送風管7傳送而來的 冷卻風經由上述送風道P1，以圖1箭頭表示之經路流入 拱狀冷反射鏡2內。 4、 4’是表示可反射鏡面加工表面之鋁板等所形成 之紫外線、可視光線等大致全波長領域的光線之全反射 鏡，全反射鏡4、4'係如圖1所示配置於拱狀反射鏡2 的兩側，而藉全反射鏡支持構件4 a所支持。又，全反射 鏡4、4’係安裝形成可調節輻射度分布之調節角度者。 5、 5’爲第1光程分割鏡|第1光程分割鏡5、 5’係與拱狀冷反射鏡2相同，施以可反射紫外線與一部 本紙張尺度適用中國國家橾率（CNS > A4規格（2丨0X2S»7公釐)~Zol " {对先閲讀背面之注意事項再填寫本I) ^-- 4452 0 3 經濟部中央標準局員工消費合作社印製 A7 ____B7 五、發明説明f ) 份可視光線，而可穿透其他光線之蒸鍍膜的玻璃等所形· 成，如圖1所示*分別以呈銳角頂接之2片鏡構成其一 邊，2片之第1光程分割鏡5、5’係相對於光軸呈對稱 配置者。 6、6’是與上述第1光程分割鏡5、5’相同之冷 反射鏡2所形成之第2光程分割鏡，如圖1所示，係於第 1光程分割鏡5、5’雨側相對於光軸呈對稱配置者。 第1、第2之光程分割鏡5、5’ 、6、6’是安裝 在上部具突起都，中央部具有大致呈三角形開口部之光程 分割鏡支持構件5 a上側的面上，於光程分割鏡支持構件 5 a之上側側面及下面安裝有可遮蔽（吸收光）穿透上述 第1、第2光程分割鏡5、5' 、6'6’之可視光線、 紅外線用之遮蔽構件S1。即，藉著第1、第2光程分割 鏡5、5’ 、6、6’彤成上部突起之變形7角柱•於變 形7角柱內形成如圖2所示之可通過冷卻風的送風道P 3 〇 此外，第1、第2光程分割鏡5、5’ 、6、6’爲 了防止光利用性不良等，安裝使其反射光不致於拱狀冷反 射鏡2方相反射的角度。 圖3是表示上述拱狀冷反射鏡2及光程分割鏡5、 5’ 、6、6’之光譜反射率之一例圖。上述冷反射鏡 2、5、5’ 、6、6’係如同圖所示，可反射大約20 〇 nm〜5 0 0 nm的光而使可視光線的一部份及紅外線 穿透。 (誚先閱讀背面之注意事項再填寫本頁) 訂 本紙張尺度適用中國國家標準（CNS > A4規格（210X297公嫠）.-|〇 . 4452 0 3 A7 B7 經濟部中央標準局貝工消費合作社印紫 五、發明説明§ ) 回到圖1、圖2，10爲紫外線照射裝置框體，紫外 線照射裝置框體1 0下面係呈開口，在該開口部與上述第 1、第2光程分割鏡5、5’ 、6、6’之間配置2片冷 濾光片3、3’ 。紫外線爲可穿透冷濾光片3、3’ ，反 射可視光線吸收紅外線的一部份而施以蒸鍍膜之玻璃等所 形成。 又，於全反射鏡4、4·與第1光程分割鏡5、5’ 之間設有吸收入射光之遮蔽板S 2，可遮蔽使棒形燈管1 放出的光不致直接射入冷濾光片3、3’上。另外，以下 說明稱可吸收光線遮蔽板爲遮蔽板（光吸收板）。 圖4是表示冷濾光片3、3’之光譜透射率之一例 圖，冷濾光片3、3’係如同圖所示，可穿透大約200 nm〜4 5 0 nm的光，反射大約4 5 0 nm〜6 0 0 n m的可視光線。 圖1、圖2中，棒形燈管1、拱狀冷反射鏡2、冷濾 光片3、3’ 、第1、第2光程分割鏡5、5， 、6、 6 ’等的冷卻係進行如下。 從排風管7傳送的冷卻風是通過設置在拱狀冷反射鏡 2的送風道P1而直接吹向棒形燈管1冷卻棒形燈管1’ 同時冷卻拱狀冷反射鏡2。 使上述冷卻風更經過圖1、圖2表示之經路冷卻第 1'第2之光程分割鏡5、5’ 、6、6’ 、冷濾光片 3'3’ ，如圖1所示，通過全反射鏡4、4，與遮蔽構 件S1，及冷濾光片3、3’與遮蔽構件S1的間隙等， (銪先閱讀背面之注意事項再填湾本S )、 1T 445203 Consumption cooperation of employees of the Central Bureau of Standards, Ministry of Economic Affairs, Du printed A7 _ _ _B7 V. Description of the invention 4) [Methods to solve the problem] In the present invention, the following methods can be used to solve the above problems. (1) The ultraviolet irradiation device is a rod-shaped lamp tube; the rod-shaped lamp tube is arranged in parallel in the longitudinal direction, and the arch-shaped cold reflector that reflects the light emitted by the rod-shaped lamp tube; and, it is composed of at least two cold reflectors. The light path splitting mirror that splits the light emitted by the above-mentioned rod-shaped tube in two ways, so that the light after the two splits reflects in different directions: each of the two light splitting mirrors and the two light splits can be reflected. A reflecting mirror; and a cold filter or the like that can transmit light reflected by the total reflection mirror. In addition, among the light emitted by the above-mentioned rod-shaped tube, only the light transmitted through the cold filter by the optical path splitting mirror in two is partially overlapped and irradiated on the light irradiation surface, and the optical path splitting mirror and the total reflection are arranged. Mirrors and cold filters. (2) In the above (1), the shielding plate is arranged so that the light emitted from the rod-shaped lamp is not directly irradiated on the cold filter. Also, the shielding plate can be used for absorbing incident light or reflecting incident light. The use of a reflecting plate as a shielding plate that reflects incident light toward the arched cold mirror can effectively utilize the light energy emitted from the rod-shaped lamp. When an arc-shaped reflecting plate is formed around the tube axis of the rod-shaped lamp tube, the light incident on the reflecting plate can be collected near the rod-shaped tube 1 and the light source can be used more effectively. (3) In the above (1) (2), the light emitted from the rod-shaped tube is halved by the light reflected by the arched cold mirror, so that the optical path division mirror reflects the first optical path division in different directions. Mirror, and two splits directly from the paper size of the rod-shaped paper are applicable to China National Standards (CNS) A4 specifications (210X297 mm) ~~~ Ί ~. (铕 Please read the precautions on the back before filling this page) 445203 Central Ministry of Economic Affairs Printed by the Consumer Bureau of Standards Bureau A7 __B7 V. Description of the invention §) The second light path splitting mirror composed of the light emitted by the lamp tube and reflecting in different directions is equipped with the first light path splitting mirror and Total reflection mirror that reflects light from the second optical path division mirror. (4) In the above (1) (2) (3), an air duct is provided in the arched cold reflector, and the cooling air flowing in by the air duct can cool at least the rod-shaped lamp tube, the arched cold reflector, and the optical path division. Mirrors and cold filters. (5) In the above (1), a shielding member is installed on the back side of the optical path dividing mirror, and the light dividing mirror and the shielding member form a ventilation channel, so that cooling air flows in the ventilation channel, and the optical path dividing mirror is cooled. The inventions in the scope of claims 1 to 7 of the application for the present invention are to divide the light emitted by the rod-shaped lamp tube by using an optical path splitting mirror composed of a cold reflector and then halving the cold filter, so that Part of the light is superimposed on the light irradiation surface, so a uniform radiation distribution of the light irradiation surface can be obtained. In addition, the light emitted by the rod-shaped tube is divided into two optical paths, and reflected by two optical path splitting mirrors and total reflection mirrors. Since the number of light reflections is large, the distance between the tube and the light irradiation surface can be shortened to obtain the entire device Miniaturization. In addition, if the inventions in the scope of patent application Nos. 2 to 4 are applied, the arrangement of the shielding plate that absorbs or reflects light can surely prevent the light emitted by the rod-shaped lamp from directly entering the cold filter. In particular, if the shielding plates of the third and fourth inventions in the scope of patent application are reflecting plates, they can effectively use the light energy emitted by the rod-shaped tube. In addition, if the invention in item 5 of the patent application is applied, the optical path splitting mirror is composed of a first optical path splitting mirror and a second optical path splitting mirror, which can effectively utilize the light energy emitted by the rod-shaped tube, which can enhance the light The radiance of the illuminated surface. This paper size applies to China National Standards (CNS > Α4 size (2! 0 × 297mm) ~~ 7r ~. (Please read the precautions on the back before writing this page) Order 445203 Central Bureau of Standards, Ministry of Economic Affairs Consumption Cooperative Printing Group A7 ___B7____V. Invention Description P) The cooling system constructed by applying for patents Nos. 6 and 7 can effectively cool rod-shaped lamps, arched cold mirrors, optical path split mirrors and cold filters Film and so on. [Embodiments of the Invention] FIG. 1 and FIG. 2 are structural diagrams showing an ultraviolet irradiation device according to the first embodiment of the present invention, and FIG. 1 is a diagram showing that the ultraviolet irradiation of this embodiment is cut in a plane perpendicular to the axis of the rod-shaped ultraviolet lamp tube. 2 is a cross-sectional view of the device in which the ultraviolet irradiation device of the present embodiment is cut in a plane along the optical axis through the above-mentioned tube axis. In FIGS. 1 and 2, 1 is a place containing a high-pressure mercury lamp, a gold halide lamp, and the like. The formed rod-shaped lamp of ultraviolet light, 2 is an arched cold mirror, and the arched cold mirror 2 is formed by reflecting the ultraviolet rays and a part of the visible light, and can pass through other vapor-deposited glass, etc. . The arched cold mirror 2 is provided with a plurality of air supply ducts P1, and the cooling air transmitted from the air duct 7 flows into the arched cold mirror 2 through the air duct P1 through the path indicated by the arrow in FIG. 4, 4 'are total reflection mirrors that reflect ultraviolet rays, visible rays, etc., which are formed in an aluminum plate or the like on a mirror-finished surface, in approximately the entire wavelength range. The total reflection mirrors 4, 4' are arranged in an arch shape as shown in FIG. 1 Both sides of the mirror 2 are supported by the total mirror support member 4a. Moreover, the total reflection mirrors 4, 4 'are mounted to form an adjustment angle capable of adjusting the radiosity distribution. 5, 5 'is the first optical path splitting mirror | The first optical path splitting mirror 5, 5' is the same as the arched cold mirror 2, and it can reflect ultraviolet rays and a paper scale applicable to the Chinese national standard (CNS) > A4 specifications (2 丨 0X2S »7mm) ~ Zol " {Please read the notes on the back before filling in this I) ^-4452 0 3 Printed by the Consumers Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 ____B7 V. Description of the invention f) It is formed by glass, etc. which is visible light, but can penetrate other rays of vapor-deposited film, as shown in Fig. 1 * 2 mirrors are formed on one side with abutting at an acute angle, and the first of 2 The optical path dividing mirrors 5 and 5 'are arranged symmetrically with respect to the optical axis. 6, 6 'are the second optical path splitting mirrors formed by the cold mirror 2 which is the same as the first optical path splitting mirrors 5 and 5'. As shown in FIG. 1, they are connected to the first optical path splitting mirrors 5, 5 'The rain side is symmetrically arranged with respect to the optical axis. The first and second optical path splitting mirrors 5, 5 ', 6, and 6' are mounted on the upper side of the optical path splitting mirror support member 5a having a substantially triangular opening in the center, and The optical path splitting mirror support member 5 a is provided with a visible light ray that shields (absorbs light) penetrating the first and second optical path splitting mirrors 5, 5 ′, 6 '6 ′, and an infrared ray. Component S1. In other words, the first and second optical path splitting mirrors 5, 5 ', 6, and 6' form a deformed 7-corner post that protrudes from the upper part. A cooling air duct that can pass through the cooling air is formed in the deformed 7-corner post as shown in FIG. P 3 〇 In addition, the first and second optical path division mirrors 5, 5 ′, 6, and 6 ′ are installed at angles such that the reflected light is not reflected by the two phases of the arched cold mirrors in order to prevent poor light utilization and the like. Fig. 3 is a diagram showing an example of the spectral reflectance of the arched cold mirror 2 and the optical path division mirrors 5, 5 ', 6, 6'. The above-mentioned cold mirrors 2, 5, 5 ', 6, 6' are as shown in the figure, and can reflect light of about 200 nm to 500 nm and penetrate a part of visible light and infrared rays. (诮 Please read the notes on the back before filling this page) The size of the paper used for this edition applies to Chinese national standards (CNS > A4 size (210X297) 嫠 .- | 〇. 4452 0 3 A7 B7 Shellfish consumption of the Central Standards Bureau of the Ministry of Economic Affairs Cooperative cooperative printing V. Description of the invention §) Back to Figures 1 and 2, 10 is the frame of the ultraviolet irradiation device. The bottom of the frame 10 of the ultraviolet irradiation device is opened, and the opening is in accordance with the first and second optical paths. Two cold filters 3, 3 'are arranged between the split mirrors 5, 5', 6, 6 '. Ultraviolet rays are formed by passing through the cold filters 3, 3 ', reflecting a part of visible light that absorbs infrared rays, and applying a vapor-deposited glass. In addition, a shielding plate S 2 that absorbs incident light is provided between the total reflection mirrors 4 and 4 and the first optical path dividing mirrors 5 and 5 ′, so that the light emitted from the rod-shaped lamp tube 1 can be prevented from directly entering the cold. Filters 3, 3 '. In the following description, the light-absorptive shielding plate is referred to as a shielding plate (light-absorbing plate). Fig. 4 shows an example of the spectral transmittance of the cold filters 3 and 3 '. The cold filters 3 and 3' are as shown in the figure, and can transmit light of about 200 nm to 450 nm, and reflect about Visible light from 450 nm to 600 nm. In Figures 1 and 2, the cooling of the rod-shaped lamp tube 1, the arch-shaped cold mirror 2, the cold filter 3, 3 ', the first and second optical path division mirrors 5, 5, 6, 6, 6', etc. The system proceeds as follows. The cooling air transmitted from the exhaust duct 7 is blown directly to the rod-shaped lamp tube 1 through the air duct P1 provided in the arch-shaped cold mirror 2 to cool the rod-shaped lamp tube 1 'while cooling the arch-shaped cold mirror 2. The cooling air is further passed through the path shown in FIG. 1 and FIG. 2 to cool the 1 ′ and 2 ′ optical path division mirrors 5, 5 ′, 6, 6 ′ and the cold filter 3 ′ 3 ′, as shown in FIG. 1. , Through the total reflection mirrors 4, 4 and the shielding member S1, and the gap between the cold filter 3, 3 'and the shielding member S1, etc. (铕 Read the precautions on the back before filling in the book S)
.ST 本紙張尺度適用中國國家榡隼（CNS ) A4規格（2丨0X297公釐）.H _ 445203 A7 B7 經濟部中央標準局貝工消費合作钍印製 五、發明説明$ ) 而流出全反射鏡4、4 ’兩側的空間，並通過該空間利用 圖2表示之排風導管8排出至外面。 又，送風管7傳送之冷卻風的一部份是通過圖2的送 風道P 3傳送至送風道P 2，於冷卻第1、第2光程分割 鏡5 '5’ 、6、6’及遮蔽構件S1之後，從排風導管 8排出至外面。 圖5係表示於本實施例之紫外線照射裝置中，從棒形 燈管1放出光的光程圖。 同圖中，從棒形燈管1放出光的一部份係入射於拱狀 冷反射鏡2內，另外一部份是直接入射至第1、第2光程 分割鏡5、5’ 、6、6，、遮蔽板（光吸收板）S2, 而以遮蔽板（光吸收板）S 2吸收入射於遮蔽板（光吸收 板）S 2的光。 拱狀冷反射鏡2具有上述圖3表示之光譜反射率，入 射於拱狀冷反射鏡2之光內一部份的可視光線與紅外線係 穿透拱狀冷反射鏡2，而使紫外線（包含一部份的可視光 線與紅外線）利用拱狀冷反射鏡2，射入第1光程分割鏡 5、5 ’被分割爲二。 第1光程分割鏡5、5’具有與上述拱狀冷反射鏡2 相同之光譜反射率，一部份的可視光線與紅外線係可穿透 第1光程分割鏡5、5’使紫外線（包含一部份的可視光 線與紅外線）反射。 藉第1光程分割鏡5、5’二分割之光係分別入射至 全反射鏡4'4’內，而使其反射光入射於冷濾光片3、 (¾先閱讀背面之注意事項再填寫本頁) -==° ^ 本紙張尺度適用中國國家標準（CNS } Λ4*^格（210X 297公釐）_ -J2 4 452 0 3 A7 B7 經濟部中央標準局員工消費合作社印製 五、發明説明(?〇 ) 3，。 另一方面，第2光程分割鏡6、6’具有與上述拱狀 冷反射鏡2相同的光譜反射率，從棒形燈管1放射而直接 入射於第2光程分割鏡6、6’之光的一部份可視光線與 紅外線係穿透第2光程分割鏡6、6·，使紫外線（包含 —部份的可視光線與紅外線）利用2片第2光程分割鏡 6、6’反射而分別入射至全反射鏡4、4’內，使其反 射光分別入射至冷濾光片3、3’ 》 冷濾光片3、3'具有上述圖4表示之光譜透射率， 入射於冷濾光片3、3’之可視光的一部份被反射，其他 的光則穿透冷濾光片3而入射至載置工件W之照射領域。 此外，棒形燈管1放出之直接光的一部份係藉遮蔽板 (光吸收板）S2予以遮蔽，因此使棒形燈管1放出之直 接光不致入射至冷濾光片3、3’ 。又，從棒形燈管1直 接入射於第1光程分割鏡5、5’之反射光，其一部份係 入射於全反射鏡4、4’內，使其反射光經由冷濾光片 3、3’入射至照射領域。另一方面，其他的光係放射至 全反射鏡4、4’與冷濾光片3、3’間的空間而爲紫外 線照射裝置框體1 0的壁面所吸收，同時其一部份通過冷 減光片3、3’爲紫外線照射裝置框體1 0的壁面所吸 收。 如上述，於本實施例中，從棒形燈管1所放出的光是 經由下述光程而照射在工件W上》 從棒形燈管1放出以 拱狀冷反射鏡2反射的光係入射至第1光分割鏡5、5’ (請先閱讀背面之注意事項再填寫本頁) ^ 本紙張尺度適用中國國家標準（CNS ) A4規格{ 210X297公t ) . -)3- 445203 Α7 Β7 經濟部中央標準局員工消費合作社印製 五、發明説明（Μ ) 內而分割爲二，以全反射鏡4、4’反射後入射至冷濾光 片3、3’內，經由冷濾光片3、3’從2方向照射工件 W。 從棒形燈管1放出的直接光係入射於第2光分割鏡 6 ' 6’內分割爲二，並以全反射鏡4、4’反射後入射 至冷濾光片3、3’內，經由冷濾光片3、3’從2方向 照射工件W。 即，於本實施例中，從棒形燈管1放出的光至少一次 爲冷反射鏡所反射而入射於冷濾光片3、3’內·僅使穿 透冷濾光片3、3’的光照射在工件W上，因此棒形燈管 1放出的光可截斷可視光線、紅外線，僅使紫外線可照射 於工件W上。 又，將2方向的光照射於工件W，使分別的光部份重 疊在工件W上而可獲得良好的輻射度分布。 圖6是表示以本實施例紫外線照射裝置於照射領域上 的輻射度分布之一例圖。同圖中，橫軸係表示圖5之X方 向的位置，縱軸是表示紫外線之輻射度•以虛線表示之輻 射度分布是表示2分割後光之各別輻射度，實線是表示2 光線重疊時的輻射度分布。 同圖中可獲知，在本實施例之紫外線照射裝置中， 1 6 Omm之照射領域內輻射度分布的均勻度大約爲±8 %，與以往的高斯分布狀的輻射度分布比較，可更提高其 均勻度。 圖7是表示本發明第2實施例之圖，本實施例係以第 {請先閲讀背面之注意事項再填湾本頁) 、1Τ 本紙張尺度適用中國國家摞準（CNS > A4規格（210X297公犮）_ λλ •4452 0 3 經濟部中央標準局員工消費合作社印聚 A7 ___B7五、發明説明θ ) 1實施例表示之第2光程分割鏡6、6’置換吸收光之遮 蔽構件S3，表示只利用從第1光程分割鏡5、5’的反 射光。 圖7中，與上述圖1、圖2、圖5所示相同者賦予相 同的符號，於本實施例中係設置遮蔽構件S 3代替上述之 第2光程分割鏡6、6’ 。 本實施例中，從棒形燈管1放出的光是以以下的經路 照射在工件W上。 從棒形燈管1放出之光的一部份是入射於拱狀冷反射 鏡2內，另外的一部份則是直接入射於第1光程分割鏡 5、5’及遮蔽板（光吸收板）S2，遮蔽構件S3，而 入射於遮蔽板（光吸收板）S 2 ·遮蔽構件S3的光則是 爲遮蔽板（光吸收板）S2，遮蔽構件S3所吸收》 入射拱狀冷反射鏡2之一部份可視光線與紅外線係穿 透拱狀冷反射鏡2，紫外線則爲拱狀冷反射鏡2所反射， 入射至冷反射鏡所構成之第1光程分割鏡5、5’後分割 爲二。分割爲二之光係分別入射於全反射鏡4、4'內， 使其反射光分別入射至冷濾光片3、3’內。 又，從棒形燈管1放出直接入射第1光程分割鏡5、 5’而反射的光被遮蔽構件S3所吸收。 即，本實施例中，從棒形燈管1放出的光被冷反射鏡 所構成的第1光程分割鏡5、5’反射而入射至冷濾光片 3，3’內，僅使穿透冷濾光片3、3’的光照射在工件 W上。因此，與上述第1實施例相同，僅截斷可視光線、 (誚先閱讀背面之注意事項再填寫本頁) 訂 本紙張尺度適用中國國家標準{ CNS ) Α4規格（2i〇x 297公釐）_ 15- 445203 經濟部中央標準局負工消費合作社印製 A7 _____B7__五、發明説明（13 ) 紅外線的紫外線照射在工件W上，且從2方向照射在工件 W上的分別光是重疊在工件W上，因此具有良好的輻射度 分布。 再者，在本實施例中，由於並未設置第2光程分割鏡 6、6’ ，因此不能利用從棒形燈管1放出的直接光，光 的利用效率與第1實施例比較有若干的降低•但是本實施 例中，從棒形燈管1放出所有的光係經由拱狀冷反射鏡2 第1光程分割鏡5、5’而入射冷濾光片3、3’內，因 此較第1實施例增大〔紫外線放射能〕/〔全光反射能〕 的値。 但是，上述第1、第2實施例所表示者中，由於遮蔽 板（光吸收板）S 2吸收光線，因此從棒形燈管1放出之 某一角度範圍的光能會形成浪費。其次表示之第3實施例 是使用反射板代替遮蔽板（光吸收板）S 2，將利用遮蔽 板（光吸收板）S2所吸收的光反射至拱狀冷反射鏡2 側，可有效地利用從棒形燈管1放出的光能。 圖8是表示本發明第3實施例之圖，與上述圖1、圖 2、圖5表示相同者賦予相同的符號，本實施例中，係如 上述設置以棒形燈管1的管軸爲中心之圓弧形反射板Μ代 替遮蔽板（光吸收板）S 2。並且，反射板Μ是以表面鏡 面加工的鋁板等所形成之可反射紫外線、可視光線等大致 全波長領域的光之全反射鏡。 本實施例中，從棒形燈管1放出之光的經路是除了入 射反射板Μ的光之外，與第1實施例相同是以其次的經路 (諳先閱請背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準{ CNS ) Α4規格（210X 297公釐）...ST This paper size is applicable to China National Cricket (CNS) A4 specification (2 丨 0X297 mm). H _ 445203 A7 B7 Printed by the Central Bureau of Standards of the Ministry of Economic Affairs for the cooperation of shellfish consumers (printed 5. Description of invention $) and flows out of total reflection The spaces on both sides of the mirrors 4 and 4 ′ are exhausted to the outside through the exhaust duct 8 shown in FIG. 2. In addition, part of the cooling air transmitted by the air duct 7 is transmitted to the air duct P 2 through the air duct P 3 in FIG. 2, and the first and second optical path division mirrors 5 '5', 6, 6 ', and 5 are cooled. After the shielding member S1, it is discharged from the exhaust duct 8 to the outside. Fig. 5 is an optical path diagram showing the light emitted from the rod-shaped lamp tube 1 in the ultraviolet irradiation device of this embodiment. In the figure, part of the light emitted from the rod-shaped lamp tube 1 is incident into the arched cold mirror 2 and the other part is directly incident on the first and second optical path division mirrors 5, 5 ', 6 The shielding plate (light absorbing plate) S2, and the shielding plate (light absorbing plate) S2 absorbs light incident on the shielding plate (light absorbing plate) S2. The arched cold mirror 2 has the spectral reflectance shown in FIG. 3 described above, and a part of visible light and infrared rays incident on the light of the arched cold mirror 2 penetrates the arched cold mirror 2 so that ultraviolet rays (including Part of the visible light and infrared rays) are split into two by the arched cold mirror 2 and incident on the first optical path division mirrors 5, 5 '. The first optical path splitting mirrors 5 and 5 'have the same spectral reflectance as the arched cold mirror 2 described above, and a part of visible light and infrared rays can penetrate the first optical path splitting mirrors 5 and 5' to make ultraviolet rays ( Contains a portion of visible light and infrared) reflections. By using the first optical path splitting mirrors 5 and 5 'to split the light into the total reflection mirror 4'4', the reflected light is incident on the cold filter 3, (¾ Read the precautions on the back before (Fill in this page)-== ° ^ This paper size is in accordance with Chinese National Standards (CNS) Λ4 * ^ (210X 297 mm) _ -J2 4 452 0 3 A7 B7 Printed by the Staff Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs DESCRIPTION OF THE INVENTION (? 〇) 3. On the other hand, the second optical path division mirrors 6, 6 'have the same spectral reflectance as the arched cold mirror 2 described above, and are emitted from the rod-shaped lamp tube 1 and directly incident on the first Part of the visible light rays and infrared rays of the light of the 2 optical path splitting mirrors 6, 6 'penetrate the second optical path splitting mirrors 6, 6 ·, so that the ultraviolet rays (including-part of the visible light rays and infrared rays) use 2 2 The optical path splitting mirrors 6 and 6 'reflect and enter the total reflection mirrors 4 and 4', respectively, so that their reflected light enters the cold filters 3 and 3 'respectively. The cold filters 3 and 3' have the above-mentioned figures. The spectral transmittance indicated by 4 is that a part of the visible light incident on the cold filter 3, 3 'is reflected, and the other light passes through the cold filter 3 and enters. To the irradiation area where the workpiece W is placed. In addition, a part of the direct light emitted by the rod-shaped lamp 1 is shielded by a shielding plate (light absorbing plate) S2, so that the direct light emitted by the rod-shaped lamp 1 is not affected. It enters the cold filters 3, 3 '. In addition, part of the reflected light directly incident from the rod-shaped lamp tube 1 to the first optical path division mirrors 5, 5' is incident on the total reflection mirrors 4, 4 '. Inside, the reflected light is made incident on the irradiated area through the cold filters 3, 3 '. On the other hand, other light is emitted into the space between the total reflection mirrors 4, 4' and the cold filters 3, 3 '. It is absorbed by the wall surface of the frame 10 of the ultraviolet irradiation device, and part of it is absorbed by the wall surface of the frame 10 of the ultraviolet irradiation device through the cold light-absorbing sheet 3, 3 '. As described above, in this embodiment, from The light emitted from the rod-shaped tube 1 is irradiated onto the workpiece W via the following optical path. The light emitted from the rod-shaped tube 1 and reflected by the arched cold mirror 2 is incident on the first light-dividing mirrors 5 and 5. '(Please read the precautions on the back before filling out this page) ^ This paper size applies to China National Standard (CNS) A4 specification {210X297mm t) .-) 3- 445203 Α7 Β7 Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs, printed in the fifth and the invention description (M) and divided into two, reflected by the total reflection mirror 4, 4 'and incident on the cold filter 3, 3 Inside, the workpiece W is irradiated from two directions via the cold filters 3, 3 '. The direct light emitted from the rod-shaped lamp tube 1 is incident on the second light splitting mirror 6 ′ 6 ′ and is divided into two, and is reflected by the total reflection mirrors 4 and 4 ′ and then enters the cold filters 3 and 3 ′. The work W is irradiated from two directions through the cold filters 3 and 3 '. That is, in this embodiment, the light emitted from the rod-shaped lamp tube 1 is reflected by the cold mirror at least once and is incident into the cold filters 3, 3 '. Only the cold filters 3, 3' are penetrated. The light irradiates the workpiece W, so the light emitted by the rod-shaped lamp tube 1 can cut off visible light and infrared rays, so that only ultraviolet rays can be irradiated on the workpiece W. Further, the workpiece W is irradiated with light in two directions, and the respective light portions are superimposed on the workpiece W to obtain a good radiance distribution. Fig. 6 is a diagram showing an example of the irradiance distribution in the irradiation field by the ultraviolet irradiation device of this embodiment. In the figure, the horizontal axis represents the position in the X direction in FIG. 5, and the vertical axis represents the radiance of ultraviolet rays. • The radiance distribution shown by the dotted line represents the individual radiances of the light after 2 divisions, and the solid line represents 2 rays. Radiosity distribution when overlapping. As can be seen in the figure, in the ultraviolet irradiation device of this embodiment, the uniformity of the radiance distribution in the irradiated field of 16 mm is about ± 8%, which can be further improved compared with the radiance distribution of the previous Gaussian distribution. Its uniformity. FIG. 7 is a diagram showing a second embodiment of the present invention. This embodiment is based on {Please read the precautions on the back before filling in this page), 1T This paper size is applicable to China National Standards (CNS > A4 specifications ( 210X297 Gong) _ λλ • 4452 0 3 The Consumers ’Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs, A7 _B7 V. Description of the invention θ) The second optical path dividing mirror 6, 6 'shown in the example replaces the shielding member S3 that absorbs light Indicates that only the reflected light from the first optical path division mirrors 5 and 5 'is used. In Fig. 7, the same symbols as those shown in Figs. 1, 2, and 5 are assigned the same symbols. In this embodiment, a shielding member S 3 is provided instead of the second optical path division mirrors 6, 6 '. In this embodiment, the light emitted from the rod-shaped lamp tube 1 is irradiated onto the work W in the following path. Part of the light emitted from the rod-shaped lamp tube 1 is incident into the arched cold mirror 2 and the other part is directly incident on the first optical path division mirrors 5, 5 'and the shielding plate (light absorption Plate) S2, the shielding member S3, and the light incident on the shielding plate (light absorbing plate) S2. The light of the shielding member S3 is the shielding plate (light absorbing plate) S2, which is absorbed by the shielding member S3. Part of the visible light and infrared rays penetrate the arched cold mirror 2, and the ultraviolet rays are reflected by the arched cold mirror 2 and incident on the first optical path division mirrors 5 and 5 ′ formed by the cold mirror. For two. The divided light is incident on the total reflection mirrors 4, 4 ', and the reflected light is incident on the cold filters 3, 3', respectively. The light emitted from the rod-shaped lamp tube 1 and directly incident on the first optical path dividing mirrors 5, 5 'and reflected is absorbed by the shielding member S3. That is, in this embodiment, the light emitted from the rod-shaped lamp tube 1 is reflected by the first optical path division mirrors 5 and 5 ′ constituted by the cold mirror and is incident into the cold filters 3 and 3 ′. The light of the cold-through filters 3 and 3 'is irradiated on the workpiece W. Therefore, the same as the first embodiment above, only the visible light is cut off, (诮 Please read the notes on the back before filling this page) The size of the paper is applicable to the Chinese National Standard {CNS) A4 (2i0x 297 mm) _ 15- 445203 Printed by A7 Consumers Cooperative of Central Bureau of Standards, Ministry of Economic Affairs A7 _____B7__ V. Description of the Invention (13) Infrared ultraviolet rays are irradiated on the workpiece W, and the workpiece W is irradiated from two directions. The light overlaps the workpiece W. It therefore has a good radiosity distribution. Furthermore, in this embodiment, since the second optical path splitting mirrors 6, 6 'are not provided, the direct light emitted from the rod-shaped lamp tube 1 cannot be used, and the light utilization efficiency is slightly different from that of the first embodiment. • However, in this embodiment, all the light emitted from the rod-shaped lamp tube 1 enters the cold filters 3 and 3 'via the arched cold mirror 2 and the first optical path dividing mirrors 5 and 5'. Compared with the first embodiment, the [ultraviolet radiation energy] / [total light reflection energy] is increased. However, in the above-mentioned first and second embodiments, since the shielding plate (light absorbing plate) S 2 absorbs light, the light energy of a certain angular range emitted from the rod-shaped lamp tube 1 is wasted. The third embodiment shown next uses a reflecting plate instead of the shielding plate (light absorbing plate) S 2, and reflects the light absorbed by the shielding plate (light absorbing plate) S 2 to the side of the arched cold mirror 2, which can be effectively used Light energy emitted from the rod-shaped lamp tube 1. FIG. 8 is a diagram showing a third embodiment of the present invention. The same symbols are assigned to the same as those shown in FIG. 1, FIG. 2, and FIG. 5. In this embodiment, the tube axis of the rod-shaped lamp tube 1 is set as described above. The arc-shaped reflecting plate M in the center replaces the shielding plate (light absorbing plate) S 2. Further, the reflecting plate M is a total reflection mirror formed of a mirror-finished aluminum plate or the like that reflects light in a substantially full wavelength range such as ultraviolet rays and visible rays. In this embodiment, the path of the light emitted from the rod-shaped lamp tube 1 is the same as the first embodiment except that the light is incident on the reflective plate M. The second path is the same (see the precautions on the back first before reading) (Fill in this page) The paper size applies to the Chinese National Standard {CNS) Α4 specification (210X 297 mm) ..
4452 G 經满部中央標準局員工消費合作社印掣 Α7 Β7 五、發明説明丨4 ) 照射在工件上。 棒形燈管1放出之光的一部份係入射於拱狀冷反射鏡 2內，其他一部份是直接入射至第1、第2光程分割鏡 5 ' 5 * 、6 ' 6 一、反射板 Μ。 入射於拱狀冷反射鏡2的光中，一部份之可視光線與 紅外線係穿透拱狀冷反射鏡2，紫外線係以拱狀冷反射鏡 2反射而入射至冷反射鏡所構成之第1光程分割鏡5、 5’被分割爲二。二分割後的光是分別入射至全反射鏡 4、4’內*將其反射光分別入射於冷濾光片3、3’ 內。 又，從棒形燈管1放射而直接入射至第2光程分割鏡 6、6’光之一部份的可視光線與紅外線係穿透第2光程 分割鏡6、6’ ，使紫外線被2片第2光程分割鏡6、 6’反射而分別入射至全反射鏡4、4’內，可將其反射 光分別入射至冷光濾片3、3 ’內。 另一方面，從棒形燈管1放射而入射至圓弧形的反射 板的光是以圖8表示之反射板Μ反射，而入射至拱狀冷反 射鏡2側。因此，反射板Μ是以大約棒形燈管1的管軸爲 中心的圓弧形，因此，全反射Μ所反射的光更朝著棒形燈 管1的管軸爲中心反射，穿透棒形燈管1大致中心而入射 至拱狀冷反射鏡2側。 藉拱狀冷反射鏡2反射的光係入射於上述之第1、第 2光程分割鏡5、5’ 、6、6’ ，分別反射而入射至冷 光濾片3、3 ·內。 本紙張尺度適用中國國家標準( CNS〉A4規格（210X297公釐} ------.---ί ^------1.^------r 1 (对先閱讀背面之注意事項再填将本頁) I . ·________ 經濟部中央標準局員工消費合作社印製 445203 A7 __B7五、發明説明（15 ) 再者，也可以使反射板Μ的形狀形成平板狀，或形成 圖8表示之圓弧形可將入射至反射板Μ的光集中在棒形燈 管1的附近，可有效地利用棒形燈管1放出光的能源。 如上述，於本實施例中，可使用反射板Μ代替吸收光 之遮蔽板，因此可有效利用棒形燈管1放出的光能'又， 與第1、第2實施例相同，可從棒形燈管1放出的光中截 斷可視光線、紅外線，僅使紫外線照射於工件W上。 〔發明效果〕’ 於上述之本發明中，可獲得以下的效果。 (1 )使棒形燈管放出的光利用冷反射鏡所構成的光 程分割鏡予以二分割後穿透冷濾光片，使被分割爲二的光 部份重疊於光照射面上，因此可獲得均勻之光照射面的輻 射度分布，可提高光照射面上之平均輻射度。因此，可不 須使用冷卻手段即可有效地處理容易因熱造成變形、變色 之工件，並且在黏著透鏡時也不致因熱應變、硬化反應不 勻時造成的應力應變。 (2 )使棒形燈管放出的光分爲2光程，而以2片光 程分割鏡及全反射鏡予以反射，增加光的反射次數可縮短 燈與光照射面的距離，減小裝置整體的大小》 (3 )藉第1光程分割鏡與第2光程分割鏡構成光程 分割鏡，可有效利用棒形燈管所放出的光，而可增強光照 射面的輻射度。 (4 )配置可吸收或反射光之遮蔽板，可確實防止棒 (請先閲讀背面之注意事項再填寫本頁) i 衣*4452 G Printed by the Consumer Standards Cooperative of the Central Bureau of Standards of the People's Republic of China Α7 Β7 V. Description of the invention 丨 4) Irradiated on the workpiece. Part of the light emitted by the rod-shaped lamp tube 1 is incident into the arched cold mirror 2 and the other part is directly incident on the first and second optical path dividing mirrors 5 '5 *, 6' 6. Reflective plate M. Of the light incident on the arched cold mirror 2, a part of visible light and infrared rays penetrate the arched cold mirror 2, and the ultraviolet rays are reflected by the arched cold mirror 2 and incident on the first part of the cold mirror. 1 optical path dividing mirror 5, 5 'is divided into two. The divided light is incident on the total reflection mirrors 4, 4 ', respectively. The reflected light is incident on the cold filters 3, 3', respectively. In addition, the visible rays and infrared rays emitted from the rod-shaped lamp tube 1 and directly incident on a part of the light of the second optical path dividing mirrors 6 and 6 ′ pass through the second optical path dividing mirrors 6 and 6 ′, so that ultraviolet rays are blocked. The two second optical path division mirrors 6, 6 'reflect and enter the total reflection mirrors 4, 4', respectively, and the reflected light thereof can be incident into the cold light filters 3, 3 ', respectively. On the other hand, the light radiated from the rod-shaped lamp tube 1 and incident on the arc-shaped reflector is reflected by the reflector M shown in Fig. 8 and is incident on the arched cold reflector 2 side. Therefore, the reflection plate M is a circular arc with the tube axis of the rod-shaped lamp tube 1 as the center. Therefore, the light reflected by the total reflection M is reflected toward the tube axis of the rod-shaped lamp tube 1 as the center, and penetrates the rod. The lamp tube 1 is approximately centered and enters the arched cold mirror 2 side. The light reflected by the arched cold mirror 2 is incident on the above-mentioned first and second optical path division mirrors 5, 5 ', 6, 6', and is reflected and incident on the cold light filters 3, 3, respectively. This paper size applies to Chinese national standard (CNS> A4 specification (210X297 mm) ------.--- ί ^ ------ 1. ^ ------ r 1 (read first Note on the back, please fill in this page again) I. · ______ Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 445203 A7 __B7 V. Description of the invention (15) Furthermore, the shape of the reflecting plate M can be formed into a flat plate, or Forming the arc shape shown in FIG. 8 can concentrate the light incident on the reflecting plate M in the vicinity of the rod-shaped lamp tube 1, and can effectively use the energy source of the light emitted by the rod-shaped lamp tube 1. As described above, in this embodiment, The reflecting plate M can be used instead of the light-absorbing shielding plate, so the light energy emitted from the rod-shaped lamp tube 1 can be effectively used. Also, as in the first and second embodiments, the light emitted from the rod-shaped lamp tube 1 can be cut off. Visible light and infrared rays only irradiate ultraviolet rays on the workpiece W. [Inventive effect] In the present invention described above, the following effects can be obtained. (1) The light emitted by the rod-shaped lamp tube is formed by using a cold mirror. The optical path splitting mirror is divided into two and passes through the cold filter, so that the divided light is overlapped on the light irradiation surface. Therefore, a uniform radiation distribution on the light irradiation surface can be obtained, and the average radiation on the light irradiation surface can be improved. Therefore, it is possible to effectively process workpieces that are easily deformed and discolored by heat without using cooling means, and are adhered. The lens does not cause stress and strain caused by thermal strain and uneven hardening reaction. (2) The light emitted by the rod-shaped tube is divided into 2 optical paths, and reflected by 2 optical path split mirrors and total reflection mirrors. Increasing the number of reflections of light can shorten the distance between the lamp and the light irradiation surface, and reduce the overall size of the device. (3) The optical path division mirror is formed by the first optical path division mirror and the second optical path division mirror, and the rod shape can be effectively used. The light emitted by the lamp can increase the radiance of the light irradiation surface. (4) Configure a shielding plate that can absorb or reflect light, which can prevent the sticks (please read the precautions on the back before filling this page) i Clothing *
*1T • _ 本紙張尺度適用中國國家標準（CNS ) A4规格（210X297公釐）-18 - 4452 0 3 A7 B7 五、發明説明) 形燈管放出的光直接入射於冷濾光片上。且使用反射板作 爲遮蔽板而可有效地利用棒形放出光的能源。 (5 )於拱狀冷反射鏡上設置通風道，可利用該通風 道流入的冷卻風至少冷卻棒形燈管、拱狀冷反射鏡、光程 分割鏡及冷濾光片的同時，於光程分割鏡的裏面側安裝遮 蔽構件，藉光分割鏡及遮蔽構件形成通風道，可有效地冷 卻棒形燈管、拱狀冷反射鏡、光程分割鏡及冷濾光片等。 〔圖示之簡單·說明〕 圖1是表示本發明第1實施例之紫外線照射裝置之構 成圖。 圖2是表示本發明第1實施例之紫外線照射裝置之構 成圖。 圖3是表示冷反射鏡之光譜反射率之一例圖。 圖4是表示冷光濾片之光譜透射率之一例圖。 圖5爲說明第1實施例之紫外線照射裝置之光程圖。 圖6是表示第1實施例之照射領域上的輻射度分布 圖。 經濟部中央標準局貝工消費合作社印製 (請先閲讀背面之注意事項再填艿本頁) 圖7是表示第2實施例之圖。 圖8是表示第3實施例之圖。 圖9係表示習知例圖。 〔符號說明〕 1 棒形燈管 2 拱狀冷反射鏡 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐）.-|g . 經濟部中央標準局員工消<k合作社印製 5 2 0 1 A7 B7 五、發明説明（!7 ) 3 > 3， 冷減光片 4 4 * 全反射鏡 4 a 支持構件 5 5， 第1光程分割鏡 5 a 支持構件 6 、 6， 第2光程分割鏡 7 送風管 8 排風導管 1 0 紫外線照射裝置框體 P 1 〜P 3 送風道 S 1 、S 3 遮蔽構件 S 2 遮蔽板（光吸收板） Μ 反射板 (对先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210乂297公嫠）-20-* 1T • _ This paper size is in accordance with China National Standard (CNS) A4 (210X297 mm) -18-4452 0 3 A7 B7 V. Description of the invention) The light emitted from the tube is directly incident on the cold filter. In addition, the use of a reflective plate as a shielding plate can effectively utilize the energy emitted by the rod. (5) A ventilation channel is provided on the arch-shaped cold reflector, and the cooling air flowing in from the ventilation channel can be used to cool at least the rod-shaped lamp tube, the arch-shaped cold reflector, the optical path dividing mirror and the cold filter. A shielding member is installed on the inner side of the process split mirror, and a ventilation channel is formed by the light split mirror and the shield member, which can effectively cool the rod-shaped lamp tube, the arched cold reflector, the optical path split mirror, and the cold filter. [Simplification and Description of the Drawings] Fig. 1 is a diagram showing the structure of an ultraviolet irradiation device according to a first embodiment of the present invention. Fig. 2 is a configuration diagram showing an ultraviolet irradiation apparatus according to the first embodiment of the present invention. FIG. 3 is a diagram showing an example of the spectral reflectance of a cold mirror. FIG. 4 is a diagram showing an example of the spectral transmittance of a cold light filter. Fig. 5 is an optical path diagram illustrating the ultraviolet irradiation device of the first embodiment. Fig. 6 is a diagram showing the radiosity distribution in the irradiation field of the first embodiment. Printed by Shellfish Consumer Cooperatives, Central Bureau of Standards, Ministry of Economic Affairs (Please read the notes on the back before filling out this page) Figure 7 is a diagram showing the second embodiment. Fig. 8 is a diagram showing a third embodiment. Fig. 9 shows a conventional example. 〔Explanation of symbols〕 1 Rod-shaped lamp tube 2 Arched cold reflector This paper size is applicable to China National Standard (CNS) A4 (210X297 mm) .- | g. Printed by the staff of the Central Standards Bureau of the Ministry of Economic Affairs < k Cooperative 5 2 0 1 A7 B7 V. Description of the invention (! 7) 3 > 3, cold light reduction sheet 4 4 * total reflection mirror 4 a support member 5 5, the first optical path division mirror 5 a support member 6, 6, 2nd optical path dividing mirror 7 Air duct 8 Exhaust duct 1 0 Ultraviolet irradiation device frame P 1 to P 3 Air duct S 1, S 3 Shielding member S 2 Shielding plate (light absorbing plate) MU Reflecting plate (read first Note on the back, please fill out this page again) This paper size applies to China National Standard (CNS) A4 specification (210 乂 297mm) -20-