TW442632B - Device and method for preventing any gas supply system interruption - Google Patents

Abstract

The present invention relates to a device and a method for preventing any gas supply interruption or low gas supply pressure (insufficient gas supply) during an gas supply process. It should at least consist of a manual valve, an gas actuated valve, and an gas supply device of the gas actuated valve. Once the gas supply device of the gas actuated valve detects any insufficient gas supply or gas supply interruption on the operating machine during an gas supply process, the gas supply device of the gas actuated valve will automatically open the gas actuated valve to lead the gas in another air supply device into the operating machine so as to maintain the machine's process operation. Then, no loss of the gas processing product and no process delay may be caused due to insufficient gas supply.

Description

4 4? Β. V. Description of the invention (1) 5-1 Field of the invention: The present invention relates to a gas supply method 'especially to a gas supply device to prevent; in the process of performing gas treatment' because Defects in the product caused by insufficient or interrupted gas supplies' and delays the time required for the process. 5-2 Background of the Invention: In the semiconducting process, 'Almost every process equipment requires a variety of different ideas, such as: Silane (SiH4), boron ethyl commonly used in chemical vapor deposition (Chemical Vapor Deposition) process Carbon tetrafluoride (CF4), trifluoromethane (chf3), oxygen (〇2) and sulfur fluoride in the process of alkane (B2H 6), ammonia (NH 3) and hydrogen (Η 2) 'dry etching Etching) (SF6), and other inert gases widely used in various process equipment and instruments. Therefore, the semiconductor process equipment 'requires an individual gas delivery system to transfer the required processing gases. The gas delivery system is tailored to simple and very complex designs depending on the characteristics of various gases. Valve is the most used accessory in semiconductor equipment. Because the purpose of the valve is to control the flow of fluid in the pipeline, almost the entire process equipment starts from the gas source and passes through the heavy pipeline to the reactor.

5. Description of the invention on page 4 (2), and then to the use of the valve of the vacuum system, you can distinguish an adjustable continuous fluid use to adjust its use (Manual) from the manual input of the gas to our valves should often occur In a certain rectifier, the two types of input and output are output because the reference to the first schematic circle is broken. Cylinder cabinets 10, 2 0 and the pipeline connection between 62 '64, 66, 10, 20, of which 24, when the process is in the cylinder 1 2, 2 2 state. When the operation system automatically converts the gas, it makes a certain body divided into. The man-made phenomenon of the control terminal is controlled by the 12 'user terminal, and the upper part of the transmitter is operated and produced. The discharge terminal of the user terminal has its existence. Basically it is divided into two types, one is switch type. Valve, another valve. On-off valves are mainly used to block or flow between points. Adjustable valves are mainly the flow in the pipeline. The on-off valve can be operated in accordance with Air Actuated and manual (the so-called pneumatic valve is the switch of the valve itself, is a type of valve, and the manual valve can be operated, so it is called Manual valve. Because the gas has to be controlled by many valves during the process, this negligence or its life problem causes the gas supply to cause irreparable losses. This is two independent 14, 22, 24 It is placed on the machine 52, 54, 56 and sends gas to the end-use machine for the operation of the process. At least two or more processes are included, one of the air processes is operated, and the other of the gas cylinders 1 2, 2 2 is on standby. Gas cylinders 1 in 4, machine 52, 54, 56 and cylinders of traditional gas supply devices, using cylinders 58, 62 '64' 66 '68 units 52, 54, 56, 58' are generally used The gas cylinders 12, 14, 22 of the gas cylinder cabinet, and the cylinder cabinets 10, 20 have only one gas cylinder 1, 2, 24. When the standby body runs out of gas, the gas supply 24 supplies the 58 'required in the process. 62 > 64 '66' 68

Page 5 ^^ 2632 5. The process described in the description of the invention (3) 'will not be interrupted due to the problem of gas supply, which will affect the products being processed. Referring to the second figure, this is to install a manifold valve control box (Valve Manifold Box: VMB) or a manifold valve control board (Valve Manifold Panel; VMP) on two independent traditional gas supply lines 30, 40 Schematic. In order to save the equipment cost, usually one cylinder cabinet 10, 20 is connected to multiple end machines 52, 54, 56, 58, 62, 64 '66' 68, and the manifold valve control is not used in the first figure Box or manifold valve control board 30, 40, so use the same gas cylinders 10, 20 gas supply end-use machine 52, 54, 56, 58, 62, 64, 66, 68 ' The required gas pressures are all equal. And if a manifold valve control box or a manifold valve control board 30 or 40 is installed on the gas supply pipeline, the 'manifold valve control box or manifold valve control board 30 or 40 can be used at the end of use. Machines 52,54,56,58,62,64,66,68 have different requirements for gas pressure 'to provide different gas pressures, making the use of gas supply systems more extensive. In traditional gas supply equipment, 'in order to save equipment costs, one cylinder 榧 is usually connected to multiple end-use machines', but there is no mutual support device between the cylinder cabinet and cylinder 气. Each cylinder 各个 is independent Gas supply system. Because the traditional idea is that 'already there is a standby cylinder in the cylinder cabinet, and when the cylinder is in use, a spare gas is provided, so that the process will not be interrupted due to the problem of gas supply, but in actual operation In the process, when the gas cylinder in use has a gas supply problem, it needs to be converted into 442632. V. Description of the invention (4) When the standby gas cylinder is in operation, the standby gas cylinder is often due to human error or machine failure. The inability to properly supply the required gas makes the product operating on the end-use machine a defective product, which will not only increase the company's cost, but also delay the processing time of the process. 5-3 Purpose and summary of the invention: In view of the above background of the invention, the traditional gas supply system only has a spare gas cylinder as a safety measure when the gas supply is interrupted. Causes a significant increase in production. "If the gas supply device of the present invention is used, it can become a second layer of insurance equipment, reducing the chance of problems on the product at the end-use machine due to gas supply interruption. A second object of the present invention is to make each gas cylinder cabinet a backup device with each other by using a gas supply device, and to reduce the interruption of gas supply due to human error. A third object of the present invention is to prevent gas from leaking out of the gas supply equipment when a disaster occurs through the multiple alarm signal input terminals added by the gas supply device, and to prevent the disaster from expanding. A fourth object of the present invention is to make each cylinder cabinet a backup device for each other

Page 7 5. Description of the invention (5) To avoid the increase of the company's production costs caused by the interruption of gas supply. A fifth object of the present invention is to use a gas supply device to quickly detect problems in the gas supply equipment, reduce the opportunity for disaster expansion, and do not delay the use of gas at the end machine during the maintenance process. Another object of the present invention is to reduce the time for adjusting and testing the machine, so as to increase the production speed and reduce the standby maintenance time. According to the above-mentioned purpose, the present invention provides a gas supply device, which makes the gas cylinders of each gas supply system mutually standby equipment, and adds a second layer of insurance measures to prevent sudden interruption of gas during the operation of the process. As a result, the products produced by the end-use machine become waste products, which increases the company's production costs. When a disaster occurs, the gas supply device can quickly cut off the connection between the gas cylinder 榧 and the gas cylinder 随着 with the inputted alarm, so as to prevent the gas in the cylinder cabinet from leaking out and causing the disaster to expand. When the gas interruption affects the use of the end machine, it must be stopped for maintenance, which will cause a delay in the process. When using the gas supply device of the present invention, the gas supply equipment can be found by the alarm input signal when the gas supply system is overhauled. The problem points and maintenance will not affect the gas supply of the end-use machine, reduce the maintenance time and increase the speed of production.

Page 8 V. Description of the invention (6) 5-4 Detailed description of the invention: Some embodiments of the present invention will be described in detail as follows. However, in addition to the detailed description, the present invention can also be widely implemented in other embodiments, and the scope of the present invention is not limited, which is subject to the scope of subsequent patents. The gas conveying system is Cylinder), so that all kinds of gases required by this gas are found in the fab or experiment. These process gases have a way to store the regulators and various valves in the gas cylinder cabinets. And installing a new gas system usually means that it is stored in a large room and used special toxic or easy-to-special gases through various valves and transmission processes. The inner part of the gas cylinder and the accessory parts are placed to help me to keep the bottle as a small part of the gas parts. The explosiveness is usually special. When we work quickly from the body to the germline, I will place the genus. Our speed and personnel "gas supply system. Gas cylinders must be filled with gas into the correct bottle" (for each semiconductor, the ground must be safer than putting in a clean cylinder) .

Gas manufacturing process. A more careful installation and replacement of the gas machine requires that if the pressure is kept constant, the bottle is unloaded. Refer to the third figure, which is a schematic diagram of applying the gas supply device 700 of the present invention to a gas supply system. The traditional gas supply system uses one gas cylinder to supply gas to several end-use machines. The gas cylinder contains two gas cylinders, one is the gas cylinder being supplied, and the other is reserved. Gas cylinder, but there is no pipeline connection between cylinder 榧 and cylinder 榧, each cylinder 榧 is an independent operating entity. When the gas tank cabinet is supplying gas

Page 9 β V. Description of the invention (7) When the gas supply is interrupted or insufficient, and the spare gas cylinder 榧 fails to perform its proper function, the gas supply is normal. It may become a waste product because the normal supply of the required gas cannot be obtained, increasing the cost of the company. Therefore, the main purpose of the present invention is to connect the conventionally operated gas cylinder cabinets 100 and 200 to each other through a gas supply device 70 0 so that the gas cylinder cabinets 100, 2 0 0 and the gas cylinder cabinets 2 0 0, 2 0 0 can support each other, and reserve 100, 200 cylinder tanks for each other, becoming the second layer of protection device to prevent sudden gas supply interruption-in order to increase the use efficiency and increase the use end of cylinder cabinets 1 0, 2 0 0 Machines 520, 540, 560, 580, 620, 640, 660, and 680 are equipped with spirits; most of the gas supply systems currently used are equipped with a manifold valve control box or manifold on the delivery pipeline. Pipe valve control boards 300 and 400, so the current supply mode of gas is that the gas is output from cylinders 榧 100 and 200, and the gas is passed through the manifold valve control box or the manifold valve control board 3 0, 4 0 0. According to the stress required for using machine 520, 540, 560, 580, 620, 640, 660, 680, it is sent to the machine 520, 540, 560, 580, 620, 640, 660, 680, 680, which is used for processing. Operation, so the third figure is to install the gas supply device 700 of the present invention to a manifold valve control Or manifold valve board gas supply system 300,40 0 but not limit the scope of their use. The gas supply device 700 of the present invention can also be applied to a gas supply system without a manifold valve control box and a manifold valve control board 300, 400. In this embodiment, the gas of the present invention is installed between two sets of gas supply systems.

U 巧 32 〜 ----- V. Description of the Invention (8) The body supply device 700 is described as an introduction, but this gas supply device 700 is not limited to p, and can be used in two groups of gas supply systems, and it can also be used in more groups Gas supply system, so that more cylinder cabinets 1000, 2000 can be connected together, using the words to make the end machine 520, 540, 5 6 0, 580, 620, 640, 660, 680 Products have more layers of protection. The gas supply device 700 of the present invention includes at least a manual valve 720, 730, a pneumatic valve 740, and a pneumatic valve air supply device 710. Pneumatic valve 74 0, a manual valve 720, 730 is installed on each side, cylinder cabinet 100, 20 0 is connected to a pneumatic valve air supply device 710, a manifold valve control box or a manifold through a sharp line 712 '71 8 The valve control boards 300 and 400 are also connected to the pneumatic room air supply device through a signal line 714 and 7116. The signals transmitted between cylinders 1 0, 2 0 0 and pneumatic valve air supply device 7 1 0 can be voltage, current, pressure and dry contact signals, and the manifold valve control box or manifold valve control The signals transmitted between the plates 300, 40 0 and the pneumatic valve supply unit 710 can be voltage, current, pressure and dry contact signals. At least one alarm input 760 device and alarm output 770 device are included in the pneumatic valve air supply device Π0.

When the gas cylinder cabinets 100 and 200 output gas, it will provide a signal to the pneumatic air supply device 710. There is a signal comparison determination circuit 7 2 5 in the pneumatic valve air supply device 710 to determine the input signal as the Basis for opening or closing the pneumatic valve. And when the gas flows through the manifold valve control box or the manifold valve control board 300, 400, it will also transmit a signal to the pneumatic valve supply device 710, using the signal comparison in the pneumatic valve supply device 7 1 0 Decision circuit 7 2 5 'Judgment

V. Description of the invention (9) Determine the input signal and control the opening or closing of the pneumatic valve. When the cylinder cabinets 100 and 2000 are in the normal gas supply state, the cylinder cabinet 1002 0 0 inputs the signal of the pneumatic valve supply device 71 0 and the manifold valve control box or the manifold valve. The signals from the control board 30 and 4 0 to the pneumatic valve air supply device 71 are normal signals, so the manual valves 72 and 73 on both sides of the pneumatic valve 740 are open. And the pneumatic valve 74 is The closed state makes the gases in the two cylinders 100 and 200 independently transported. Referring to the fourth figure, when the gas supply to one of the cylinder cabinets is interrupted or the gas supply pressure is too low, the signal transmitted from the gas cylinder 榧 100 to the pneumatic valve gas supply aggregate 710 and Generally, the signals under normal conditions are different. The signal comparison and judgment circuit 725 in the pneumatic valve air supply device 7100 receives this alarm input and then sends a signal to the pneumatic valve 740. This signal can be transmitted in the form of pressure. Pneumatic valve 740 opens after receiving this signal, allowing the gas of another gas supply system in operation to quickly pass through manual valves 720, 730, pneumatic valves, manual valves 7 2 0, 7 3 0 and manifold valve control box or It is the direction of the manifold valve control board 30 0 78 2 to reach the end-use machine 520, 540, 560, 580, and an alarm signal 770 is issued to 'make the process performed on the end-use machine 520, 540, 560, 580' There will be no gas supply interruption caused by the cylinder 榧 100, which will cause the loss of the products produced on the end-use machines 520, 540, 560, and 580 ', and the maintenance personnel will be immediately notified to proceed. Refer to the fifth figure ’when one of the gas supply systems ends

Page 12 4 and 32 V. Description of the invention (ίο) When the gas leaks at the end, the gas cylinder 榧 100 of the gas supply system will have a gas over-flow phenomenon, and the gas supply of the gas cylinder 榧 100 will be interrupted. Although the signal transmitted from the manifold valve control box or the manifold valve control board 3 0 0 to the pneumatic valve supply device 710 is different from the normal signal, the pneumatic valve supply device 7 1 0 receives an alarm signal 7 6 0, so that the pneumatic valve 74 0 is still in a closed state 'and the manual valves 720 and 730 are still in an open state. Because the pneumatic valve 7 40 is in a closed state, the spare gas cylinder cabinet 2 00 will not cause the gas leakage to be more serious because of the opening of the pneumatic valve 7 4 0, causing the expansion of the disaster and the gas leakage. The gas cylinder cabinet 100 used in the gas supply system of the phenomenon also shut down the supply of gas due to over-flow, so as to prevent the gas leakage from becoming more serious. In addition, when the pneumatic valve supply device 710 receives an alarm signal 76 0, there will be an alarm output 770 to promptly inform the maintenance personnel to go to the repair to minimize the loss. In order to reduce the cost of the equipment, the gas supply device of the present invention, where the gas signal is input to the pneumatic valve gas supply device 710, will be controlled in the cylinders 100, 2000 and the manifold valve control box or the manifold valve. Choose one of the boards 3 0 0 and 4 0 0 as the signal capture point. “If no manifold valve control box or manifold valve control board 3 0 0, 4 0 0 is used, it will be in the gas cylinder cabinet 1 〇〇, 2000 and the main road close to the end-use machine to choose a signal capture point, in order not to affect the operation of the gas supply device 'acquisition of better signals, reduce the cost of equipment burden. Referring to the sixth figure, this is the operation of the gas supply device of the present invention

44 ^ 632 V. Description of the invention (11)-Flow chart "First, the pneumatic valve supply device will receive a signal 805 to determine whether the pneumatic valve 8 1 0 needs to be opened. The source of this signal is the gas cylinder cabinet, the manifold valve control box Either the manifold valve control board or other alarm signal inputs. When the received signal is a normal signal 815, the pneumatic valve closes 820. When the received signal is insufficient gas flow or gas interruption 840, the pneumatic valve opens 845, and the gas in the reserve cylinder cabinet passes the manual valve 730, pneumatic valve 740, manual valve 720 and the manifold valve control box or manifold. The valve valve control board 30 (), 400 flows into the gas at the user's side and issues an alarm signal mo to warn maintenance personnel to go to maintenance. If the received signal is other alarm signal 825, the pneumatic valve closes 830 and outputs an alarm signal 835. Warn the maintenance personnel to go to confirm and repair. The manual valves 720 and 730 on both sides of the pneumatic valve 740 are generally “the opened state”. The pneumatic valve 74o controls the gas flow mode between the gas cylinder cabinets. When the pneumatic valve 74o is faulty and needs to be repaired, the manual valve 72o, = 〇 must be closed to prevent the gas in the cylinder cabinet from leaking out, and it is convenient to perform maintenance or replacement steps in the pneumatic room. The gas supply device of Anba of the present invention includes at least one safety device. This device includes an alarm input and an alarm output. For the alarm input, the abnormal signal input to the cylinder plant or the abnormal signal input from the manifold control box or the control panel is regarded as the alarm input, which is used for fire alarm and earthquake When the phenomenon occurs, the pneumatic air supply device will act as an alarm input and close the pneumatic valve to prevent a disaster or a disaster.

4

6SS 5. Description of the invention (12) Expansion of harm. The alarm output is to inform the maintenance staff to confirm when the pneumatic valve is opened or the pipeline is leaking to prevent the disaster from expanding. The gas used in the present invention replaces its function. Using a signal transmission line and the manifold valve control box or the manifold valve control signal transmission line can be RS232, RS422, or the like. When the gas supply of the gas cylinder cabinet is interrupted, the line is passed to the computer, and the computer judges that the pneumatic valve is opened, and the spare gas cylinder is guided to continue the operation of the process, and the repair personnel go to the maintenance as soon as possible. When the transmission number can also be transmitted to the type through the signal transmission line, a signal is output to expand the pneumatic valve, and an alarm signal is output. With the gas device, a computer can be used to connect the computer to the gas cylinder cabinet or the computer board and the computer and Pneumatic valve, when this signal is transmitted by RS485 or other computer signals, after the signal is transmitted through the type of signal, the gas within a signal is output to enter the end-use machine to output an alarm signal to notify the leak of the gas pipeline , The computer, through the computer to determine the status of one of the signal is closed, to avoid the disaster to notify the maintenance staff to go to the repair as soon as possible, according to the current situation of the gas supply system, because in the process of gas supply must pass through many valves to reach the use End of the machine, and when any of the passing valve problems, it is possible that the supply of gas will be interrupted. The problems with valves are, on the one hand, the life of the parts, and on the other hand, the problem of human error, and the problem of human error is the most common. If the gas supplied suddenly

Article 15 I 4 4 ^ 6 V. Description of the invention (13) If the product is produced on the end-use machine, it may become a waste product. This loss is considerable. Coupled with the sudden interruption of gas, causing the cylinder cabinet to crash, if you want to restore its normal operation, you must first go through the relevant steps of maintenance and testing. It will definitely delay the operating time of the process and increase the cost of the company's production. If the gas supply device of the present invention is used, the gas cylinder cabinet and the gas cylinder cabinet can serve as backup equipment for each other, which not only does not affect the function that the gas cylinder cabinet should play in its own gas supply system, but also prevents human error. The loss caused reduces the company's production costs. In summary, the method and device provided by the present invention can basically connect gas cylinders and gas cylinder cabinets of a gas supply system with a gas supply device in parallel, making them mutually redundant equipment and a gas supply system. The second layer of insurance measures guarantees that the machine at the end of use will not cause a delay in the process due to the sudden interruption of the gas supply, and will make the products that are in the process of operation become waste products, increasing the company's production costs. When a disaster occurs, the device and method of the present invention can immediately cut off the gas supply system, so that the gas will not leak due to the occurrence of the disaster, endangering the safety of workers, not only has practical effects, but also the former The design that has not been seen has the enhancement of efficacy and progress, so it has met the requirements of the new type of patent law, and applied for it in accordance with the law. To this end, we would like the examiner to examine it in detail and pray for the grant of the patent early. To the sense of virtue. The above descriptions are merely preferred embodiments of the present invention, and are not intended to limit the scope of patent application for the present invention; all others that do not depart from the disclosure of the present invention

4 s3 ^ V. Description of the invention (14) Equivalent changes or modifications made in the spirit should be included in the scope of the patent application described below.

Uni diagram brief description The first picture is a schematic diagram of a traditional traditional gas supply system without a manifold valve control box or a manifold valve control board, and the second picture is a traditional traditional gas supply system using a manifold valve control box or a manifold Schematic diagram of the valve control board; the third diagram is a schematic diagram of using a gas supply device in a gas supply system using a manifold valve control box or a manifold valve control board; the fourth diagram is a gas supply device passing through when a gas supply interruption occurs The schematic diagram of the gas flow direction of the gas supply to the reserve gas cylinder cabinet; Figure 5 is the schematic diagram of the gas flow direction of the gas supply of the reserve gas cylinder cabinet through the control of the gas supply device when a gas leak occurs; and Figure 6 shows the operation of the gas supply device The flowchart. Main symbols: 1 0 gas cylinder cabinet 1 2 gas cylinder 1 4 gas cylinder 2 0 gas cylinder cabinet 2 2 gas cylinder 2 4 gas cylinder

Simple explanation of style on page 18 3 Manifold valve control box or manifold valve control board 4 0 Manifold valve control box or manifold valve control board 5 2 Use end machine 5 4 Use end machine 5 6 Use End machine 5 8 End machine 6 2 End machine 6 6 End machine 6 6 End machine 6 8 End machine 10 0 cylinders 1 2 0 cylinders 1 4 0 cylinders 2 0 0 gas cylinder 2 2 0 gas cylinder 2 4 0 gas cylinder 3 0 0 manifold valve control box or manifold valve control board 4 0 0 manifold valve control box or manifold valve control board 5 2 0 use end machine Station — 5 4 0 using end machine 5 6 0 using end machine 5 8 0 using end machine 6 2 0 using end machine 6 4 0 using end machine

Brief description of the drawings on page 19 6 6 0 Use of a machine 6 8 0 Use of a machine 7 0 0 Gas supply device 71 0 Pneumatic valve gas supply device 7 1 2 Signal line 7 1 4 Signal line 7 1 6 Signal line 7 1 8 signal line 720 manual valve 7 2 5 signal comparison judgment circuit 7 3 0 manual valve 740 pneumatic valve 7 5 0 gas supply pipe 7 6 0 alarm input 7 7 0 alarm output 782 gas flow direction 7 8 4 gas flow direction 78 6 gas Problems with supply 7 8 8 Problems with gas supply

Page 20

Claims (1)

4 Jun632_ 6. Scope of patent application 1. A device for preventing the interruption of the gas supply system, which includes at least: a pipeline connected to a first manifold valve control box and a second manifold valve control box, which is used to make a Gas flows between the first manifold valve control box and the second manifold valve control box; a pneumatic valve is located on the pipeline and is used to control whether the gas can flow in the pipeline; a control device, It is used to receive a first signal from the first manifold valve control box and the second manifold valve control box, and send a second signal to the pneumatic valve to control the opening and closing of the pneumatic valve. Close; and when the first manifold valve control box or the second manifold valve control box receives a fault signal and cannot successfully supply the gas, sends the first signal to the control device, and the control device thus transmits the A second signal is sent to the pneumatic valve, and the pneumatic valve is opened so that the gas flowing through the second manifold valve can be transmitted to a terminal supplied by the first manifold valve through the pipeline. 2. If the device in the scope of the patent application, the above pneumatic valve air supply device includes at least one alarm device, which is used to notify the maintenance personnel to handle 3. If the device in the scope of the patent application, the above pneumatic device The valve air supply p device includes at least one receiving alarm device, which can detect whether the gas has an external bubble. 4. For the device in the scope of patent application item 3, wherein the above-mentioned receiving alarm device Page 21 442 63 2 VI. Application for Patent Scope can detect whether the external operating environment will affect the safety of system operation, and close the pneumatic valve to prevent the expansion of disasters. The description of the installation and reception of alarms is described above in terms of installation 4 * ο No. Circumstance Fan Zhen Lidi is exclusively requested to apply if possible. 5 The description of the installation and reception of alarms in the installation is described in item 4 above. No. Circumvention Fan Jinglihuo specifically requested to accept the application of the installation of the pipe valve, which can be reversed to the phase of the valve, and the valve in the position should be installed in its position. Fan valve f'Jfel a Γ \ Please hand in hand as always. 7 Including the side can, as in the system of the current installation of the news, the first one is to control whether the hair is sent out or not, the second is the first force 1 1 The pressure of the gas should be the same as that of the supply bottle of the enclosure, please apply for the first one. Please refer to the sentence 8. If you follow the description of the installed control. The status of uploading and transmitting is as follows, the pressure of the installed force is one—I can be the first, and the suffix Fan Xunli is the second one of Xuan Xuan. *? &Quot; > u ° Shen Zhiru Send 9. Pass 10. A device for gas supply, comprising at least: a first gas cylinder cabinet 'connected to a first manifold valve control box and a first end-use machine by a first pipeline; Page 22_ VI. Patent application scope A second cylinder cabinet connects a second manifold valve control box with a second end-use machine through a second pipeline; a third pipeline connects the first A manifold valve control box and the second manifold valve control box, the third pipeline contains at least a pneumatic valve; a pneumatic valve air supply device, which connects the pneumatic valve and the pneumatic valve air supply device through an air supply pipe To determine whether the pneumatic valve is open; and a signal transmission line connecting the pneumatic valve air supply device and a signal output terminal to provide a signal to the pneumatic valve air supply device. 11. The device according to item 10 of the scope of patent application, wherein the above-mentioned pneumatic valve air supply device includes at least one receiving alarm device, which can detect whether the gas is out of the air. 1 2. The device of item 11 in the scope of patent application, in which the above-mentioned alarm receiving device can detect whether the external operating environment will affect the safety of system operation, so as to close the pneumatic valve to prevent the expansion of disasters. 1 3. The device according to item 12 of the patent application range, wherein the above-mentioned alarm receiving device can receive an earthquake signal. 1 4. The device of item 12 in the scope of patent application, wherein the above-mentioned alarm receiving device can receive a fire alarm signal. 15. The device according to item 10 of the scope of patent application, in which the above pneumatic valve is provided Page 23 44 VIII. 6. Scope of patent application The gas device includes at least an alarm device, which is used to notify maintenance personnel to deal with it. 16. The device according to item 10 of the scope of patent application, wherein the above-mentioned pneumatic valve air supply device includes at least a signal comparison and judgment circuit. 17. The device as claimed in claim 10, wherein the air supply pipe is a device for driving the pneumatic valve to open or close. 18. The device according to item 10 of the scope of patent application, wherein the pneumatic valve includes at least one manual valve on both sides. 19. The device according to item 10 of the scope of patent application, wherein the signal output terminal connected to the above signal transmission line is in the first cylinder cabinet and the second cylinder cabinet. Device, wherein the signal output end to which the signal transmission line is connected is on the first manifold valve control box and the second manifold valve control box. 21. The device as claimed in claim 10, wherein the signal output end connected to the signal transmission line is on the first pipeline and the second pipeline. 22. —A method to prevent interruption of gas supply, including at least: Page 24 44 ^ S32 VI. Patent Application Scope When a first gas cylinder cabinet or a first manifold valve control box cannot supply a gas to the first terminal or the gas pressure supplied to the first terminal is too low Sending a first signal to a control device; after receiving the first signal, the control device sends a second signal to a pneumatic valve located on a pipeline, wherein the pipeline is used to communicate with the first manifold valve The control box and a second manifold valve control box allow the gas to circulate between the first manifold valve control box and the second manifold valve control box; and the pneumatic valve starts to make after receiving the second signal The gas of a second cylinder cabinet can reach the first terminal via the pipeline. 2 3. The method according to item 22 of the scope of patent application, wherein the first cylinder 上述 mentioned above includes at least one cylinder. Gas cylinders 24. The method according to item 22 of the scope of patent application, wherein the above-mentioned cabinet contains at least one gas cylinder. 25. The method according to item 22 of the scope of patent application, wherein the above-mentioned pneumatic valve air supply device includes at least an alarm device for notifying maintenance personnel to deal with it. 26. The method according to item 22 of the scope of patent application, wherein the above-mentioned pneumatic valve air supply device includes at least a receiving alarm device, which can detect whether the gas has an external bubble. Page 25 4 ^ 2632 6. Application for Patent Scope 2 7. If the method for applying for Patent Scope No. 26, the above-mentioned receiving alarm device can detect whether the external operating environment will affect the safety of system operation, so as to turn off the Pneumatic valve prevents the expansion of disasters. 2 8. The method according to item 27 of the scope of patent application, wherein the above-mentioned receiving alarm device can receive an earthquake signal. 29. The method according to item 27 of the scope of patent application, wherein the above-mentioned receiving alarm device can receive a fire alarm signal. 30. The method according to item 22 of the scope of patent application, wherein the above pipeline includes at least a first manual valve and a second manual valve located on opposite sides of the pneumatic valve. 3 1. The device according to item 22 of the scope of patent application, wherein the second signal transmitted by the above control device can be transmitted in a pressure type. 32. A method of gas supply, comprising at least: connecting a first gas cylinder, a first manifold valve control box, and a first end-use machine with a first pipeline to supply a first gas radon A second pipeline is used to connect a second gas cylinder cabinet, a second manifold valve control box and a second end-use machine to supply a second gas; a third pipeline is connected to the first manifold A valve control box and a second manifold valve control box, the third pipeline includes at least one pneumatic valve; Page 26 6. Scope of patent application Install a first signal transmission line to connect the first manifold valve control box with a pneumatic valve air supply device, and transmit a first signal to the pneumatic valve air supply device and install a second signal transmission line Connecting the second manifold valve control box and the pneumatic valve air supply device, and transmitting a second signal to the pneumatic valve air supply device, using an air supply pipe to connect the pneumatic valve and the pneumatic valve air supply device; and by The pneumatic valve supply device determines the type of the first signal and the second signal. When the pneumatic valve supply device determines that the first signal indicates that the gas supply of the first cylinder is interrupted, the pneumatic valve uses The gas supply pipe is opened, and the second gas delivered by the second gas cylinder cabinet is guided by the third pipeline to the first end-use machine. 33. The method of claim 32, wherein the first gas cylinder cabinet described above includes at least one gas cylinder. 34. The method according to item 32 of the scope of patent application, wherein the above-mentioned second gas cylinder cabinet contains at least one gas cylinder. 35. The method according to item 32 of the scope of patent application, wherein the first gas and the second gas are the same gas. 36. The method according to item 32 of the scope of patent application, wherein the pneumatic valve air supply device includes at least one alarm input terminal. Page 27 6. Scope of patent application 37. The method according to item 32 of the scope of patent application, wherein the above-mentioned pneumatic valve air supply device includes at least one alarm output terminal. 3 8. The method according to item 32 of the scope of patent application, wherein the above-mentioned pneumatic valve air supply device includes at least a signal comparison and judgment circuit. 39. The method according to item 32 of the scope of patent application, wherein the pneumatic valve includes at least one manual valve on both sides. 40. The method according to item 32 of the scope of patent application, wherein the air supply pipe is a device for controlling the opening or closing of the pneumatic valve. 41. The method according to item 32 of the scope of patent application, wherein the first manifold valve control box includes at least one manifold valve control board. 42. The method of claim 32, wherein the second manifold valve control box includes at least one manifold valve control board. Page 28