TW434633B - Glass and metal junction electronic part - Google Patents

Glass and metal junction electronic part Download PDF

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Publication number
TW434633B
TW434633B TW088122216A TW88122216A TW434633B TW 434633 B TW434633 B TW 434633B TW 088122216 A TW088122216 A TW 088122216A TW 88122216 A TW88122216 A TW 88122216A TW 434633 B TW434633 B TW 434633B
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TW
Taiwan
Prior art keywords
glass
metal
thermal expansion
expansion coefficient
firing
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Application number
TW088122216A
Other languages
Chinese (zh)
Inventor
Hideo Yamagami
Original Assignee
Fuji Electronics Co Ltd
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Publication date
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Publication of TW434633B publication Critical patent/TW434633B/en

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/04Cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/467Control electrodes for flat display tubes, e.g. of the type covered by group H01J31/123
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/03Mounting, supporting, spacing or insulating electrodes

Abstract

The object of the present invention is to provide a glass and metal junction electronic part with a high degree of precision and capable of preventing a crack such as a craze or a breakage from occurring at a glass member near a junction during heating, baking, and joining even if a difference of thermal expansion coefficients of the glass and the metal is large. To achieve the object, this electronic part is composed of joining auxiliary members 17 having a thermal expansion coefficient between 30 DEG C to 500 DEG C inside a range of 70% to 130% of a thermal expansion coefficient of a glass member 13 fixed to predetermined places of the joining parts of a metal member 12b between a predetermined portion where the glass member 13 and the metal member 12b contact. Also spacers 19a are arranged at the gap portion of each member and shielding members 19b are arranged at the gap portion of the glass member 13 and the metal member 12b.

Description

434633 經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明説明(丨) [發明之詳細說明] [發明所屬之技術領域] 本發明係關於一種玻璃-金屬接合之電子零件,更詳 細地來說,係關於一種可防止當藉由加熱燒成使得玻璃部 件與金屬部件接合成一體時於接合部分附近之玻璃部件發 生裂縫或裂痕等龜裂的發生,又在精密度上提昇之玻璃-金屬接合之電子零件。 [習知技術] 使用於彩色顯像器等之電子管用電子槍,係朝向彩色 布朗管之面板部所塗佈之可發出紅、綠、藍三原色光的螢 光膜而發射對應於各三原色的電子束之物》電子束以覆蓋 於整個畫面的方式之受到電磁場的影響而偏向掃描,藉以 顯現影像β雖然此電子管用電子槍係以一定的間隔排置於 一平面上之直列(in line)型或是△型(三角形)之物,但不管 是哪一種都必須將自電子管用電子槍所發射之3條的電子 束以集中於螢光面上的1點之方式進行調整,是以,若此 調整不足則會造成畫面發生色差。 做爲電子管用電子槍之一例,如圖3(a)所示之由陰極 、G1電極(第1柵形電極)、G2電極(第2柵形電極)所構成 之電子管用電子槍的縱截面圖β就此電子管用電子槍20而 言,其陰極21之前面係以50~200gm的微小間隔面對著具 有微小孔的G1電極22a,其後則以約50450/zm的間隔配 置G2電極22b。再積層G3-G6電極則成爲複合零件之電子 槍零件。 3 裝----,—訂------線 (請先閲讀背面之注意事項具衿本頁) 本紙張尺度適用中國國家標半(CNS ) A4規格(210X297公釐) 434633 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明(>) 在製造電子管用電子槍20時,首先,係將玻璃23、 構成陰極21之圓筒形狀之金屬製陰極支撐物5以及金屬製 盒27進行加熱燒成後接合來製造。亦即,將穿設有一列用 以插入3條陰極支撐物25的孔之藉由製片成型所成型的片 狀玻璃23收容於底面部設有開口部之金屬製盒27內,而 固定於未圖示之治具中。接著,於孔中插入3條陰極支撐 物25之後,進行加熱燒成使得玻璃23、陰極支撐物25、 金屬製盒27接合成一體。其次,於陰極21之上裝載G1電 極22a,再於其上積層G2電極22b,藉此,乃製造出電子 管用電子槍20。 然而,藉由此種方法的陰極、G1電極、G2電極之積 層作業完全係以人工作業的方式來進行,因而,不但花費 時間、精度不佳,且爲一種變動極大的作業方式。是以’ 電子管用電子槍的製造方法乃改以事先積層陰極、G1電極 、G2電極之後再進行加熱燒成、接合,以使得各構件一體 化(參照圖3(b))。 大體上,此電子管用電子槍30所具有之構造係將圖 3(a)所示之習知類型的電子槍20之G2電極22b的裙部展 開後彎曲成容器狀,而於其內部收容電極以及陰極。 此種類型之電子管用電子槍30係藉由將陰極31、G1電極 32a、G2電極32b、玻璃33加熱燒成以使得各構件接合成 —體。 此處,妨礙金屬-玻璃接合的一大要因係於燒成後之 冷卻過程中由於金屬與玻璃的熱收縮(熱膨脹係數)差造成 4 t請先閲讀背面之注意事項苒為本頁)434633 Printed by A7 B7, Consumer Cooperative of Intellectual Property Bureau of the Ministry of Economic Affairs 5. Description of Invention (丨) [Detailed Description of Invention] [Technical Field to which the Invention belongs] The present invention relates to a glass-metal bonded electronic part. In other words, it relates to a glass-metal that can prevent cracks or cracks in the glass parts near the joint portion from occurring when the glass parts and metal parts are integrated by heating and firing, and the precision is improved. Bonded electronic parts. [Known technology] Electron guns for electronic tubes used in color imagers, etc., emit electrons corresponding to each of the three primary colors toward the fluorescent film coated on the panel portion of the colored Brown tube, which emits three primary colors of red, green, and blue. "Beam of Things" The electron beam is biased to scan by the influence of the electromagnetic field in a way that covers the entire screen, so that the image β is displayed. Although the electron gun with an electron tube is arranged in a line or in line on a plane at a certain interval, It is a △ type (triangle), but in any case, the three electron beams emitted from the electron gun for the tube must be adjusted to focus on one point on the fluorescent surface. Insufficient color will cause color difference in the picture. As an example of an electron gun for an electron tube, as shown in FIG. 3 (a), a longitudinal sectional view of an electron gun for an electron tube composed of a cathode, a G1 electrode (a first grid electrode), and a G2 electrode (a second grid electrode) is shown in FIG. In the electron gun 20 for an electron tube, the front surface of the cathode 21 thereof faces the G1 electrodes 22a having minute holes at a fine interval of 50 to 200 gm, and the G2 electrodes 22b are arranged at an interval of about 50450 / zm thereafter. The re-laminated G3-G6 electrodes become electron gun parts of composite parts. 3 Packing ----,-Ordering ------ line (please read the notes on the back of this page first) This paper size applies to China National Standard Half (CNS) A4 specification (210X297 mm) 434633 A7 B7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs. 5. Description of Invention (>) When manufacturing the electron gun 20 for electronic tubes, first, glass 23, a cylindrical cathode support 5 made of metal and a cathode 21, and metal The cartridge 27 is manufactured by heating and firing. That is, a sheet of glass 23 formed by sheet forming through a row of holes for inserting three cathode supports 25 is housed in a metal box 27 provided with an opening on the bottom surface, and is fixed to Not shown in the fixture. Next, after inserting three cathode support members 25 into the holes, heating and firing are performed so that the glass 23, the cathode support member 25, and the metal box 27 are integrated. Next, a G1 electrode 22a is mounted on the cathode 21, and a G2 electrode 22b is laminated thereon, whereby an electron gun 20 for a tube is manufactured. However, the lamination operation of the cathode, G1 electrode, and G2 electrode by this method is entirely performed manually. Therefore, it not only takes time and accuracy, but also is a highly variable operation method. Therefore, the manufacturing method of the electron gun for an electron tube is to laminate the cathode, G1 electrode, and G2 electrode in advance, and then heat-fire and bond them to integrate the components (see Fig. 3 (b)). Generally, the structure of the electron gun 30 for the electron tube is that the skirt of the G2 electrode 22b of the conventional electron gun 20 shown in FIG. 3 (a) is unfolded and bent into a container shape, and the electrode and the cathode are housed in the container. . This type of electron gun 30 for an electron tube is heated and fired by heating the cathode 31, the G1 electrode 32a, the G2 electrode 32b, and the glass 33 so that the components are integrated. Here, one of the main obstacles to metal-glass bonding is due to the difference in thermal contraction (coefficient of thermal expansion) between metal and glass during the cooling process after firing. 4 t Please read the precautions on the back first (this page)

I 本紙張尺度適用中國國家標準(CNS ) A4規格(210XW7公廣) 434633 A7 五、發明説明(3) 之應力應變。做爲與金屬接合用所使用之玻璃一般係採用 熱膨脹係數在30~500°C爲4.5〜6.5x:l(r6/°C之物,但考慮到要 減少此種應變的程度,做爲金屬部件係使用與玻璃之熱膨 脹係數接近的Fe-Ni系合金。 表1所示係Fe - Ni系合金之熱膨脹係數。 [表1] __系合金之熱膨脹係數 熱膨脹係數(l〇Yt) 42合金 銘合金 Fe(軟鋼)* 30 〜30(TC 4.1 4.9 13.0 30~400〇C 5.8 5.2 13.9 30-50CTC 8.1 6.1 14.6 *參考 經濟部智慧財產局員工消费合作社印製 做爲電子槍零件之陰極支撐物,由於其會受到自陰極 放出之電子加熱而成爲高溫之故,一般係使用於高溫具有 低熱膨脹係數的鈷合金(Fe-29%Ni-17%Co)。又,就其他 之金屬構件而言,由於並不會被加熱至如陰極支撐物般的 高溫,故主要係使用便宜的42合金(Fe-42%Ni)» 由於電子槍零件係由G1~G6之電極重疊所成,爲了控 制自陰極放出之電子之加速、抑制、分散、收斂方向’於 組裝時各零件的位置精度係被嚴格地要求。以往雖有以人 工作業進行G1~G6之電極的組裝,但之後爲提昇作業性乃 開發出將Gl、G2電極複合化的零件,以達成組裝作業的 簡便化、高精度化。 [發明所欲解決之課題] 5 本紙浪尺度適用中國國家棣率(CNS ) A4規格(2丨0X297公釐) ----------^------1T------^ (請先閱讀背面之注意事項真 巧本頁) 43463 3 經濟部智慧財產局員工消費合作社印製 A 7 __B7 五、發明説明(f) 雖藉由將電子槍零件複合化可解決組裝時所會發生的 問題,然而,卻會產生新的問題,那就是於玻璃發生龜裂 現象。圖3係習知之將G1電極與G2電極複合化所得之零 件的截面圖。本發明者等對此龜裂發生之原因進行調查的 結果’發現到若將G1電極與G2電極複合化,則與玻璃接 合之金屬構件將會增多,此造成於燒成後之冷卻過程中由 於玻璃與金屬的熱收縮差而產生應變,或是夾於金屬構件 之間之部分的玻璃變薄等的要因,其結果便發生了龜裂。 又,被複合化之零件係被要求高精度之尺寸。具體而 言如G1電極與G2電極之電子所通過的孔間隔必須以±5/z m以內的良好精度進行組裝。再者,將零件複合化之時, 亦會發生進行玻璃之燒成時於陰極支撐物的邊緣附著上玻 璃此種不佳的狀況。若於陰極支撐物附著有玻璃,則自陰 極放出電子之時,陰極的Ba離子將附著其周圍產生導電情 形,從而損害了玻璃之絕緣性。 爲防止於玻璃中龜裂形成的發生等,經檢討過各種的 方法所得之結果,發現到若使用之金屬構件其金屬在 30〜500°C間的熱膨脹係數相對於在相同溫度範圍內之玻璃 的熱膨脹係數爲70〜130%範圍內之時,將可獲致良好的結 果。亦即,如表1所示般,材料之熱膨脹係數係隨著各溫 度而展現不同的値,該値也有可能因溫度範圍的不同而於 各材料間產生逆轉的現象。本發明者等人對進行玻璃之燒 成時的狀況就應變溫度、熱膨脹係數、金屬之熱膨脹係數 的關係加以考察’結果發現即使是於此種複合零件的情形 6 ^紙張尺度適用中國國家揉準(CNS)Α4規格公釐) ---------^-----—’玎------0 - - (請先聞讀背面之注意事項具¾本頁) 4346 3 3 A7 B7 經濟部智慈財產局員工消費合作社印製 五、發明説明(y) 在接合玻璃與金屬之時,如上述般,只要金屬材料在 30~500°C間的熱膨脹係數爲玻璃的熱膨脹係數70〜130%範 圍內便可適切地進行接合。 本發明之目的係提供一種玻璃-金屬接合之電子零件 ,其所涵蓋的電子管用電子槍等根據已闡明之最適範圍所 使用的玻璃構件與金屬構件,即使其間之熱膨脹係數的差 過大,就進行加熱燒成後接合的情形而言,於接合部分附 近的玻璃構件當中亦不會發生裂縫或裂痕等龜裂現象。又 ,本發明之目的係提供一種玻璃-金屬接合之電子零件, 其合倂之精密度係有所提昇。 [用以解決課題之手段] 爲解決上述課題,於申請專利範圍第1項記載之本發 明係一種玻璃-金屬接合之電子零件,其藉由加熱燒成將 玻璃構件與金屬構件之相接部分進行接合使得兩者成爲一 體;其特徵在於,若與玻璃接合之金屬構件的接合部分在 30-500°C的熱膨脹係數不在該玻璃構件之熱膨脹係數的 70〜130%範圍內之時,則將在30~500°C的熱膨脹係數爲前 述玻璃構件之熱膨脹係數的70~130%範圍內的金屬接合輔 助構件固定於與該玻璃構件接合的金屬構件之接合部的既 定位置上來構成,藉以縮小加熱燒成進行接合之時接合部 分之熱膨脹率的差,來防止於玻璃構件上形成之龜裂的發 生。 爲解決上述課題,於申請專利範圍第2項記載之本發 明係一種接合電子零件’其藉由加熱燒成將複數之金屬構 1 (請先閲讀背面之注意事項再舄本頁) -·· 本紙張尺度適用中國國家標準(CNS ) A4現格(210X297公釐) 434633 A7 B7 經濟部智慧財產局員工消費合作社印製 五、發明説明(L) 件與玻璃構件接合成爲一體;其特徵在於,若與玻璃接合 之金屬構件的接合部分在30~500°C的熱膨脹係數不在該玻 璃構件之熱膨脹係數的70~130%範圍內之時,則將在 30〜500 °C的熱膨脹係數爲玻璃構件之熱膨脹係數的 70〜130%範圍內的金屬接合輔助構件固定於與該玻璃構件 接合的金屬構件之接合部的既定位置上來構成,以加熟燒 成進行接合之時,藉由縮小接合部分之熱膨脹率的差,來 防止於玻璃構件上形成之龜裂的發生。 爲解決上述課題,於申請專利範圍第3項記載之本發 明係如申請專利範圍第1或第2項之玻璃-金屬接合之電 子零件,其中,玻璃構件之材質在30~500°C的熱膨脹係數 爲4.5~6.〇xlO々°C,金屬構件之材質爲Fe-42%Ni合金,金 屬接合輔助構件之材質爲鈷合金(Fe-29%Ni- 17%Co)。 爲解決上述課題,於申請專利範圍第4項記載之本發 明係如申請專利範圍第1〜3項中任一項之玻璃-金屬接合 之電子零件,其中,玻璃-金屬接合之電子零件係電子管 用電子槍零件。 爲解決上述課題,於申請專利範圍第5項記載之本發 明係一種玻璃-金屬接合之電子零件,其藉由加熱燒成將 玻璃構件與金屬構件之相接部分進行接合使得兩者成爲一 體;其特徵在於,爲確保金屬構件間的尺寸形狀,乃於該 金屬構件之間隙部分設置間隔件。 爲解決上述課題,於申請專利範圍第6項記載之本發 明係如申請專利範圍第1〜4項中任一項之玻璃-金屬接合 本紙張尺度適用中國國家梯率(CNS ) Α4規格(210X 297公釐) I — I i I n I 訂 I I 1 I I 線 T (諳先聞讀背面之注再 .C本頁) 經濟部智慧財產局員工消費合作社印製 434633 A7 __B7____ 五、發明説明(^]) 之電子零件,其中,爲確保金屬構件間的尺寸形狀,乃於 該金屬構件之間隙部分設置間隔件。 爲解決上述課題,於申請專利範圍第7項記載之本發 明係一種玻璃一金屬接合之電子零件,其藉由加熱燒成將 玻璃構件與金屬構件之相接部分進行接合使得兩者成爲一 體;其特徵在於,於進行玻璃之加熱燒成時爲避免於金屬 構件之不要有玻璃的部分附著玻璃,乃於該玻璃構件與該 金屬構件之間隙部分配置屏蔽構件。 爲解決上述課題,於申請專利範圍第8項記載之本發 明係如申請專利範圍第1〜4項中任一項之玻璃-金屬接合 之電子零件,其中,於進行玻璃之加熱燒成時爲避免於金 屬構件之不要有玻璃的部分附著玻璃,乃於該玻璃構件與 該金屬構件之間隙部分配置屏蔽構件。 [發明之實施形態] 就有關本發明之玻璃-金屬接合之電子零件使用圖式 所示之較佳實施形態加以詳細說明。圖1所示係有關本發 明之玻璃-金屬接合之電子零件之一實施形態之電子管用 電子槍的分解立體圖,另外,圖2所示係示於圖1之電子 管用電子槍的縱截面圖。 首先,圖1及圖2所示之電子管用電子槍10,在大致 上係由做爲金屬構件之陰極支撐物15、G1電極12a以及 G2電極12b、玻璃構件13、接合輔助構件17、間隔件19a 、以及屏蔽構件19b所構成。 陰極支撐物15係構成發射電子束之陰極11者,其內 9 本紙張尺度適用中國國家標準(CNS ) Α4規格(210Χ297公釐) ---------^------1Τ------^ (請先閱讀背面之注意事項真^本頁) 434633 A7 _ B7_ 五、發明説明(及) (請先閱讀背面之注意事項其芮本萸) 部爲中空之圓筒形狀,主要係以鈷合金(Fe - 29%Ni -17%Co)所製造。電子管用電子槍10係以可發射與3原色對 應之電子束的方式將3個陰極支撐物15與玻璃13接合, 並具絕緣性。 於G1電極12a以及G2電極12b中設置有可使得自陰 極11發射出的電子束通過之微小的孔。G1電極12a與G2 電極12b係具備將陰極所發射出之電子束的電子流量予以 調變等種種性能,並可進行螢光面之亮度以及彩色影像之 色調的調變。G1電極12a與G2電極12b —般係以42合金 (亦即Fe — 42%Ni合金)所製作。陰極11與G1電極12a係 以約50〜200微米之微小間隔對向設置,其後則是以約 50〜350微米的間隔設置G2電極12b ;爲提昇調變效率,乃 希望盡可能將組裝之各物間的間隔縮窄。 經濟部智慧財產局員工消黄合作社印製 G2電極12b,係形成內部可收容G1電極12a與陰極 11、且其底部具有開口之容器般的形狀,於與玻璃13接合 之內壁部分則藉由熔接等方法將以鈷合金(Fe— 29%Ni — 17%Co)製作之接合輔助構件17帶狀般地固定於周圍。藉由 使用與本發明所採用的玻璃之熱膨脹係數接近之鈷合金, 則可防止於加熱燒成後發生龜裂。若所使用之接合輔助構 件17具有之熱膨脹係數超過所使用之玻璃之熱膨脹係數的 70〜130%範圍之時,將被認定會發生龜裂現象,是以,乃 使用所具有之熱膨脹係數不致超過該範圍的金屬材料。 玻璃13係用以將陰極支撐物15、G1電極12a以及G2 電極12b藉由加熱燒成使得各構件一體般接合之物,此處 10 本紙張尺度^用中國國家標毕1匚犯)八4規格(210><297公釐) 一 434633 .經濟部智慧財產局員工消費合作社印製 A7 B7 五、發明説明(γ) 爲配合於陰極支撐物15所使用之銘合金’乃使用熱膨脹係 數爲5.2Χ10·6Α:之玻璃。 於本實施例之間隔件i9a係配置於G1電極12a與G2 電極12b的間隙’係用以使得維持G1電極12a與G2電極 12b彼此的尺寸形狀。間隔件19a例如可爲中央具有連通用 通孔之具有板狀形狀之物’並利用不會隨著加熱燒成或電 子放出等而變形·變質之材質’例如以陶瓷等來製作。其 形狀並不限於本實施例所示之板狀體之物’較佳係配合各 構件之間隙的大小或形狀等來形成之。G1電極12a與G2 電極12b之間隔約50〜350#m ;而間隔件19a就是用來維持 此間隔。 於本實施例中,屏蔽構件19b係配置至在G2電極12b 與設置有陰極支撐物15之玻璃13的間隙中。本實施例之 屏蔽構件19b係穿設有用以插入陰極支撐物之3個孔的板 狀體,惟,並不僅限於此種形狀,較佳係配合各構件之間 隙的大小或形狀等來形成之。於此部分設置屏蔽構件19b 之目的,係爲了防止於加熱燒成時玻璃13因受熱軟化而上 升,從而附著於陰極支撐物15上。屏蔽構件19b係與上述 之間隔件19a相同般利用不會隨著加熱燒成或電子放出等 而變形*變質之材質,例如以陶瓷等來製作。 玻璃13、陰極支撐物15、G1電極12a、以及G2電極 12b的接合大致係以下述的方式進行。首先,使用粒子狀 之玻璃材料藉由製片成型等成爲可接合於G2電極12b之內 壁並爲其收容之板狀製片物。於此玻璃製片物設有用以分 本纸張尺度適用中0國家揉牟(CNS ) A4規格(2丨0 X 297公釐) ----------f------,ΐτ------m (請先閱讀背面之注意事項苒¾¾本頁) A7 B7 43463 3 五、發明説明(丨°) 別插入3個陰極支撐物15的3個孔13a以及用以抵接G1 電極12a端部的槽13b。然後,於未圖示之治具中配置玻璃 製片物、陰極支撐物15、G1電極12a、G2電極12b、以及 間隔件19a與屏蔽構件19b之後,藉由燒成機於700〜850°C 進行加熱燒成之後接合之使得各構件一體化》 [發明之效果] 如上述之本發明,由於係在玻璃構件與金屬構件相接 之既定部分之間,將在30〜500°C的熱膨脹係數爲玻璃構件 之熱膨脹係數的70~130%範圍內的金屬接合輔助構件固定 於與該玻璃構件接合的金屬構件之接合部的既定位置上來 構成之故,縱使玻璃構件與金屬構件彼此之熱膨脹係數相 差極大,由於玻璃構件與固定於金屬構件之既定位置上之 熱膨脹率的差小的金屬製接合輔助構件接合著,即使進行 加熱燒成,亦具有防止於玻璃構件之裂縫或裂痕等龜裂的 發生的效果。從而,可不必顧慮玻璃構件與金屬構件間熱 膨脹係數的差而活用金屬構件的特性來製造玻璃-金屬接 合之電子零件。 又,由於在接合構件間的間隙部分配置有間隔件之故 ,所具有之效果,乃可正確地保持於電子零件所使用之各 構件的間隔或形狀,並可製造精度極高之玻璃-金屬接合 之電子零件。 再者,由於在玻璃構件與金屬構件之間配置有屏蔽構 件,乃可防止於加熱燒成時玻璃構件因受熱軟化而除了應 接合於金屬構件的部分尙附著至其他地方,並可製造極爲 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公釐) ----------^------1T------0 (請先閲讀背面之注意ί項具¾本頁) 經濟部智慧財產局員工消費合作社印製 434633 A7 B7 五、發明説明(ii) 高品質之玻璃-金屬接合之電子零件。 [圖式之簡單說明] 圖1係有關本發明之玻璃一金屬接合之電子零件之一 實施形態之電子槍的分解立體圖。 圖2係示於圖1之電子槍的縱截面圖。 圖3(a)係習知之電子槍的縱截面圖,(b)係將陰極與電 極一體化之習知之電子槍的縱截面圖。 [符號說明] ---------^------ΪΤ------.^ (請先鬩讀背面之注意事項再舄本頁) 10 電子槍 11 陰極 12a G1電極 12b G2電極 13 玻璃 15 陰極支撐物 17 接合輔助構件 19a 間隔件 19b 屛蔽構件 經濟部智慧財產局員工消費合作社印製 本 通 鮮I This paper size is applicable to Chinese National Standard (CNS) A4 specification (210XW7). 434633 A7 V. Description of stress (3) of the invention. The glass used for bonding with metal generally uses a thermal expansion coefficient of 4.5 to 6.5x at 30 ~ 500 ° C: l (r6 / ° C, but considering the degree of such strain reduction, as a metal The components are Fe-Ni-based alloys close to the thermal expansion coefficient of glass. Table 1 shows the thermal expansion coefficients of Fe-Ni-based alloys. [Table 1] Thermal expansion coefficient of __ series alloys Thermal expansion coefficient (10Yt) 42 alloy Ming alloy Fe (soft steel) * 30 ~ 30 (TC 4.1 4.9 13.0 30 ~ 400 ° C 5.8 5.2 13.9 30-50CTC 8.1 6.1 14.6 * Refer to the printed material printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs as a cathode support for electron gun parts. Because it will be heated by electrons emitted from the cathode and become high temperature, it is generally used for cobalt alloys (Fe-29% Ni-17% Co) with low thermal expansion coefficient at high temperature. As for other metal components, Because it will not be heated to the high temperature as a cathode support, it is mainly used the cheap 42 alloy (Fe-42% Ni) »Because the electron gun parts are formed by overlapping G1 ~ G6 electrodes, in order to control the discharge from the cathode Acceleration, suppression, dispersion, and convergence of electrons 'The accuracy of the position of each part during assembly is strictly required. Although the G1 to G6 electrodes were assembled manually in the past, in order to improve workability, the parts with composite G1 and G2 electrodes were developed in order to improve workability. Achieve simplified and high-precision assembly operations. [Problems to be solved by the invention] 5 This paper scale is applicable to China's National Standard (CNS) A4 specification (2 丨 0X297 mm) ---------- ^ ------ 1T ------ ^ (Please read the notes on the reverse page first) 43463 3 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs A 7 __B7 V. Description of Invention (f) Although the problems that occur during assembly can be solved by compounding the electron gun parts, a new problem will occur, that is, cracks in the glass. Figure 3 is a conventional method of combining the G1 electrode and the G2 electrode. A cross-sectional view of a part. The inventors have investigated the cause of the cracking and found that if the G1 electrode and the G2 electrode are combined, the number of metal members bonded to the glass will increase, which is caused by firing. Due to the heat recovery of glass and metal during the subsequent cooling process Cracks may occur due to shrinkage, or thinning of the glass sandwiched between metal members. As a result, cracks may occur. In addition, composite parts are required to have high-precision dimensions. Specifically, For example, the gap between the holes through which the electrons of the G1 electrode and the G2 electrode pass must be assembled with a good accuracy within ± 5 / zm. Furthermore, when the parts are composited, the glass support on the cathode support also occurs when the glass is fired. Poor conditions such as glass on the edges. If glass is attached to the cathode support, when electrons are emitted from the cathode, the Ba ions of the cathode will adhere to the surrounding area and cause conduction, thereby impairing the insulation of the glass. In order to prevent the formation of cracks in glass, etc., after reviewing the results obtained by various methods, it was found that if a metal member is used, the thermal expansion coefficient of the metal between 30 and 500 ° C is higher than that of glass in the same temperature range. When the thermal expansion coefficient is in the range of 70 ~ 130%, good results will be obtained. That is, as shown in Table 1, the thermal expansion coefficient of a material exhibits a different 値 with each temperature, and the 値 may also have a reversal phenomenon between materials due to different temperature ranges. The inventors investigated the relationship between strain temperature, thermal expansion coefficient, and thermal expansion coefficient of metal when firing the glass. 'The results show that even in the case of such composite parts 6 ^ The paper size is applicable to Chinese national standards (CNS) Α4 mm) --------- ^ ------- '玎 ------ 0--(Please read the precautions on the back first ¾ this page) 4346 3 3 A7 B7 Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs V. Description of the invention (y) When joining glass and metal, as described above, as long as the thermal expansion coefficient of the metal material between 30 ~ 500 ° C is glass The thermal expansion coefficient can be appropriately joined within a range of 70 to 130%. The object of the present invention is to provide a glass-to-metal bonded electronic part, which includes an electron gun for an electron tube and the like, and the glass member and the metal member are used in accordance with the optimum range that has been clarified. In the case of bonding after firing, cracks such as cracks or nicks do not occur in the glass members near the bonding portion. In addition, the object of the present invention is to provide a glass-to-metal bonded electronic component, the precision of which is improved. [Means to solve the problem] In order to solve the above-mentioned problem, the present invention described in item 1 of the scope of patent application is a glass-to-metal bonded electronic component, and a glass member and a metal member are joined by heating and firing. The joining is performed to make the two become one body. It is characterized in that if the thermal expansion coefficient of the joint portion of the metal member to be joined with the glass is not within the range of 70 to 130% of the thermal expansion coefficient of the glass member, The metal joint auxiliary member having a thermal expansion coefficient of 30 to 500 ° C in the range of 70 to 130% of the thermal expansion coefficient of the aforementioned glass member is fixed at a predetermined position of a joint portion of the metal member to which the glass member is joined, thereby reducing heating The difference in the thermal expansion coefficient of the joined portion when firing is performed to prevent the occurrence of cracks formed on the glass member. In order to solve the above-mentioned problems, the present invention described in item 2 of the scope of the patent application is a type of bonded electronic component 'which heats and sinters a plurality of metal structures 1 (please read the precautions on the back first and then 舄 this page) This paper size applies to Chinese National Standard (CNS) A4 (210X297 mm) 434633 A7 B7 Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 5. The invention description (L) The piece is joined to the glass member; it is characterized by: If the thermal expansion coefficient of the joint of the metal member to be joined with the glass is within the range of 70 to 130% of the thermal expansion coefficient of the glass member, the thermal expansion coefficient at 30 to 500 ° C will be the glass member The metal joining auxiliary member within the range of 70 to 130% of the thermal expansion coefficient is fixed at a predetermined position of the joint portion of the metal member to which the glass member is joined. When the firing is performed for joining, the joint portion is reduced by reducing The difference in thermal expansion rate prevents cracks formed on the glass member. In order to solve the above-mentioned problems, the present invention described in item 3 of the scope of patent application is a glass-metal bonded electronic part such as the scope of patent application item 1 or 2, in which the material of the glass member has a thermal expansion at 30 to 500 ° C. The coefficient is 4.5 ~ 6.0 × 10 ° C. The material of the metal member is Fe-42% Ni alloy, and the material of the metal joint auxiliary member is cobalt alloy (Fe-29% Ni-17% Co). In order to solve the above-mentioned problems, the present invention described in item 4 of the scope of patent application is a glass-metal bonded electronic part such as any one of the scope of patent applications 1 to 3, wherein the glass-metal bonded electronic part is an electronic Tube electron gun parts. In order to solve the above-mentioned problem, the present invention described in item 5 of the scope of patent application is a glass-to-metal bonded electronic part, which joins a glass member and a metal member by heating and firing so that the two are integrated; It is characterized in that a spacer is provided in a gap portion of the metal members in order to ensure the dimensional shape between the metal members. In order to solve the above-mentioned problems, the invention described in item 6 of the scope of patent application is a glass-metal joint of any one of the scope of application patents 1 to 4. This paper applies the Chinese National Slope (CNS) A4 specification (210X) 297 mm) I — I i I n I order II 1 II line T (谙 read the note on the back and then .C page) printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 434633 A7 __B7____ 5. Description of the invention (^ ]), In which, in order to ensure the size and shape between the metal members, a spacer is provided in a gap portion of the metal members. In order to solve the above-mentioned problems, the invention described in item 7 of the scope of the patent application is a glass-to-metal bonded electronic component, which joins a glass member and a metal member by heating and firing so that the two become one; It is characterized in that, when the glass is heated and fired, in order to avoid the glass from adhering to the part of the metal member where there is no glass, a shielding member is arranged at the gap between the glass member and the metal member. In order to solve the above-mentioned problems, the present invention described in item 8 of the scope of patent application is a glass-metal bonded electronic component as described in any one of the scope of patent applications 1 to 4, and when the glass is heated and fired, it is Avoid attaching the glass to the part of the metal member where there is no glass, and arrange the shielding member at the gap between the glass member and the metal member. [Embodiment of the Invention] A preferred embodiment shown in the drawing using the glass-metal bonded electronic component of the present invention will be described in detail. FIG. 1 is an exploded perspective view of an electron gun for an electron tube according to an embodiment of the glass-metal bonded electronic part of the present invention, and FIG. 2 is a longitudinal sectional view of the electron gun for the electron tube shown in FIG. First, the electron gun 10 for an electron tube shown in FIGS. 1 and 2 is generally composed of a cathode support 15 as a metal member, a G1 electrode 12a and a G2 electrode 12b, a glass member 13, a joining auxiliary member 17, and a spacer 19a. And a shield member 19b. The cathode support 15 is composed of 11 cathodes that emit electron beams, and 9 paper sizes are applicable to Chinese National Standard (CNS) A4 specifications (210 × 297 mm) --------- ^ ------ 1Τ ------ ^ (Please read the precautions on the back of this page really ^ this page) 434633 A7 _ B7_ V. Description of the invention (and) (Please read the precautions on the back first of all) This section is a hollow cylindrical shape , Mainly made of cobalt alloy (Fe-29% Ni -17% Co). The electron gun 10 for an electron tube is formed by bonding three cathode supports 15 to glass 13 so as to emit electron beams corresponding to the three primary colors, and is insulating. The G1 electrode 12a and the G2 electrode 12b are provided with minute holes through which electron beams emitted from the cathode 11 can pass. The G1 electrode 12a and the G2 electrode 12b have various properties such as modulating the electron flow rate of the electron beam emitted from the cathode, and can adjust the brightness of the fluorescent surface and the hue of a color image. The G1 electrode 12a and the G2 electrode 12b are generally made of 42 alloy (ie, Fe—42% Ni alloy). The cathode 11 and the G1 electrode 12a are arranged opposite each other at a minute interval of about 50 to 200 microns, and then the G2 electrodes 12b are arranged at an interval of about 50 to 350 microns; in order to improve the modulation efficiency, it is desirable to assemble it as much as possible. The space between objects is narrowed. The G2 electrode 12b is printed by the staff member of the Intellectual Property Bureau of the Ministry of Economic Affairs, and it is formed into a container-like shape that can accommodate the G1 electrode 12a and the cathode 11 and has an opening at the bottom. The welding auxiliary member 17 made of a cobalt alloy (Fe-29% Ni-17% Co) is fixed to the surroundings in a band shape by a method such as welding. By using a cobalt alloy having a thermal expansion coefficient close to that of the glass used in the present invention, cracks can be prevented from occurring after heating and firing. If the thermal expansion coefficient of the joining auxiliary member 17 used exceeds the range of 70 to 130% of the thermal expansion coefficient of the glass used, it will be considered that cracking will occur. Therefore, the thermal expansion coefficient used does not exceed The range of metallic materials. Glass 13 is used to heat the cathode support 15, the G1 electrode 12a, and the G2 electrode 12b so that the components are integrally joined together. Here, 10 paper sizes are ^ using the Chinese national standard. 1) 4 Specifications (210 > < 297 mm)-434633. Printed by the Consumers' Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (γ) The Ming alloy used to match the cathode support 15 is a thermal expansion coefficient of 5.2 × 10 · 6Α: glass. The spacer i9a in this embodiment is disposed at the gap between the G1 electrode 12a and the G2 electrode 12b 'to maintain the size and shape of the G1 electrode 12a and the G2 electrode 12b. The spacer 19a can be made of, for example, a plate-like object having a through hole for communication in the center 'and a material that does not deform or deteriorate with heating or electron emission, for example, ceramics. The shape is not limited to the plate-like object 'shown in this embodiment, and it is preferably formed in accordance with the size or shape of the gap of each member. The distance between the G1 electrode 12a and the G2 electrode 12b is about 50 ~ 350 # m; and the spacer 19a is used to maintain this interval. In this embodiment, the shielding member 19b is disposed in a gap between the G2 electrode 12b and the glass 13 on which the cathode support 15 is provided. The shielding member 19b of this embodiment is a plate-like body provided with three holes for inserting a cathode support, but it is not limited to this shape, and is preferably formed in accordance with the size or shape of the gap of each member, etc. . The purpose of providing the shielding member 19b in this part is to prevent the glass 13 from rising due to heat and softening during the heating and firing, and thus adhere to the cathode support 15. The shield member 19b is made of a material that does not deform or deteriorate with heating and firing, electron emission, or the like, as in the spacer 19a described above, and is made of, for example, ceramics. The bonding of the glass 13, the cathode support 15, the G1 electrode 12a, and the G2 electrode 12b is performed in the following manner. First, a particulate glass material is used to form a plate-like sheet-like article that can be bonded to the inner wall of the G2 electrode 12b by sheet forming or the like. The glass piece is provided with a paper size applicable to China 0 countries (CNS) A4 specifications (2 丨 0 X 297 mm) ---------- f ----- -, ΐτ ------ m (Please read the precautions on the back of this page 苒 ¾¾ page) A7 B7 43463 3 V. Description of the invention (丨 °) Do not insert the 3 holes 13a of the 3 cathode supports 15 and use them To abut the groove 13b at the end of the G1 electrode 12a. Then, a glass sheet, a cathode support 15, a G1 electrode 12a, a G2 electrode 12b, and a spacer 19a and a shielding member 19b are arranged in a jig not shown, and then fired at 700 to 850 ° C. [The effect of the invention] As mentioned above, the present invention, because it is between a predetermined portion where the glass member and the metal member are connected, will have a thermal expansion coefficient of 30 to 500 ° C. The metal joint auxiliary member within the range of 70 to 130% of the thermal expansion coefficient of the glass member is fixed at a predetermined position of the joint portion of the metal member to which the glass member is joined. Even if the thermal expansion coefficients of the glass member and the metal member are different from each other, Very large, since the glass member and the metal joint auxiliary member with a small difference in thermal expansion coefficient fixed to a predetermined position of the metal member are joined, even if the heating and firing are performed, it can prevent the occurrence of cracks or cracks in the glass member. Effect. Therefore, it is possible to manufacture glass-to-metal bonded electronic parts without taking into consideration the difference in thermal expansion coefficient between the glass member and the metal member, and using the characteristics of the metal member. In addition, since a spacer is arranged in the gap portion between the joining members, the effect is that it can accurately maintain the interval or shape of each member used in electronic parts, and it is possible to manufacture glass-metal with extremely high accuracy. Bonded electronic parts. In addition, since a shielding member is arranged between the glass member and the metal member, the glass member can be prevented from adhering to a place other than a portion that should be joined to the metal member due to heat and softening during heating and firing, and an extremely expensive electrode can be manufactured. Paper size applies to China National Standard (CNS) A4 (210X297 mm) ---------- ^ ------ 1T ------ 0 (Please read the note on the back first) With ¾ page) Printed by the Consumer Cooperatives of the Intellectual Property Bureau of the Ministry of Economic Affairs 434633 A7 B7 V. Description of the invention (ii) High-quality glass-metal bonded electronic parts. [Brief description of the drawings] Fig. 1 is an exploded perspective view of an electron gun according to an embodiment of one of the glass-metal bonded electronic parts of the present invention. FIG. 2 is a longitudinal sectional view of the electron gun shown in FIG. 1. FIG. Fig. 3 (a) is a longitudinal sectional view of a conventional electron gun, and (b) is a longitudinal sectional view of a conventional electron gun in which a cathode and an electrode are integrated. [Symbols] --------- ^ ------ ΪΤ ------. ^ (Please read the precautions on the back first, then this page) 10 Electron gun 11 Cathode 12a G1 electrode 12b G2 electrode 13 Glass 15 Cathode support 17 Joint auxiliary member 19a Spacer 19b Shield member Intellectual property bureau of the Ministry of Economic Affairs Printed by the consumer cooperative

4 A4 A

Claims (1)

A8 B8 C8 D8 434633 六、申請專利範圍 1. 一種玻璃-金屬接合之電子零件,其藉由加熱燒成 將玻璃構件與金屬構件之相接部分進行接合使得兩者成爲 一體;其特徵在於,若與前述玻璃接合之金屬構件的接合 部分在30〜500°C的熱膨脹係數不在該玻璃構件之熱膨脹係 數的70~130%範圍內之時,則將在30〜50CTC的熱膨脹係數 爲前述玻璃構件之熱膨脹係數的7CM30%範圍內的金屬接 合輔助構件固定於與該玻璃構件接合的前述金屬構件之接 合部的既定位置上來構成,藉以縮小加熱燒成進行接合之 時前述接合部分之熱膨脹率的差,來防止於前述玻璃構件 上之龜裂的發生。 2. —種玻璃-金屬接合之電子零件,其藉由加熱燒成 將複數之金屬構件與玻璃構件接合成爲一體:其特徵在於 ,若與前述玻璃接合之金屬構件的接合部分在30〜500°C的 熱膨脹係數不在該玻璃構件之熱膨脹係數的70-130%範圍 內之時,則將在30〜500°C的熱膨脹係數爲前述玻璃構件之 熱膨脹係數的70〜130%範圍內的金屬接合輔助構件固定於 與該玻璃構件接合的前述金屬構件之接合部的既定位置上 來構成,以加熱燒成進行接合之時,藉由縮小前述接合部 分之熱膨脹率的差,來防止於前述玻璃構件上形成之龜裂 的發生。 3. 如申請專利範圍第1或第2項之玻璃-金屬接合之 電子零件,其中,前述玻璃構件之材質在30~500°C的熱膨 脹係數爲4.5~6.〇xlO々°C,前述金屬構件之材質爲Fe -42%Ni合金,前述金屬接合輔助構件之材質爲鈷合金(Fe- 1 _ 本紙張尺度逋用中國國家梯率(CNS ) A4规格(21〇><297公釐) ---.--:----^------訂·------0 (請先閲讀背面之注意事項再¥k本頁) 經濟部智慧財產局員工消費合作社印製 434633 經濟部智慧財產局負工消費合作杜印製 A8 B8 C8 D8_____ 六、申請專利範圍 29%Ni- 17%Co)。 4. 如申請專利範圍第1或第2項之玻璃-金屬接合之 電子零件,該玻璃-金屬接合之電子零件係電子管用電子 槍零件。 5. —種玻璃-金屬接合之電子零件,其藉由加熱燒成 將玻璃構件與金屬構件之相接部分進行接合使得兩者成爲 一體;其特徵在於,爲確保前述金屬構件間的尺寸形狀, 乃於該金屬構件之間隙部分設置間隔件。 6. 如申請專利範圍第1或第2項之玻璃-金屬接合之 電子零件,其中,爲確保前述金屬構件間的尺寸形狀,乃 於該金屬構件之間隙部分設置間隔件。 7. —種玻璃-金屬接合之電子零件,係藉由加熱燒成 將玻璃構件與金屬構件之相接部分進行接合使得兩者成爲 一體;其特徵在於,於進行玻璃之加熱燒成時爲避免於金 屬構件之不要有玻璃的部分附著玻璃,乃於該玻璃構件與 該金屬構件之間隙部分配置屏蔽構件。 8. 如申請專利範圍第1或第2項之玻璃-金屬接合之 電子零件,其中,於進行玻璃之加熱燒成時爲避免於金屬 構件之不要有玻璃之部分附著玻璃,乃於該玻璃構件與該 金屬構件之間隙部分配置屏蔽構件。 ---.—-;----Μ------訂------^ (請先閲讀背面之注意事項再麥t本頁) _2 (CNS )八4綠(210X297公釐)A8 B8 C8 D8 434633 6. Scope of patent application 1. A glass-metal bonded electronic part, which joins a glass member and a metal member by heating and firing so that the two become one; they are characterized by, if When the thermal expansion coefficient of the joint of the metal member bonded to the glass is not within the range of 70 to 130% of the thermal expansion coefficient of the glass member, the thermal expansion coefficient at 30 to 50 CTC is the same as that of the glass member. The metal joining auxiliary member within the range of 7CM30% of the thermal expansion coefficient is fixed at a predetermined position of the joint portion of the aforementioned metal member to which the glass member is joined, so as to reduce the difference in thermal expansion coefficient of the aforementioned joint portion upon heating and firing, To prevent the occurrence of cracks on the glass member. 2. —A glass-to-metal bonded electronic component that joins a plurality of metal members with a glass member by heating and firing: it is characterized in that if the bonding portion of the metal member to the glass is 30 to 500 ° When the thermal expansion coefficient of C is not within the range of 70-130% of the thermal expansion coefficient of the glass member, a metal bonding aid whose thermal expansion coefficient at 30 ~ 500 ° C is within the range of 70 ~ 130% of the thermal expansion coefficient of the aforementioned glass member The member is configured to be fixed at a predetermined position of a joint portion of the metal member to be joined to the glass member, and when the joint is heated and fired, the difference in thermal expansion coefficient of the joint portion is reduced to prevent formation on the glass member. The crack happened. 3. For the glass-to-metal bonded electronic parts in the first or second scope of the patent application, the thermal expansion coefficient of the material of the aforementioned glass member at 30 ~ 500 ° C is 4.5 ~ 6.0 × 10 ° C, the aforementioned metal The material of the component is Fe-42% Ni alloy, and the material of the aforesaid metal joining auxiliary component is cobalt alloy (Fe- 1 _ This paper size adopts China National Slope (CNS) A4 specification (21〇 > < 297mm ) ---.--: ---- ^ ------ Order · ------ 0 (Please read the notes on the back before ¥ k this page) Employees ’Cooperatives, Intellectual Property Bureau, Ministry of Economic Affairs Printed 434633 Duty and Consumer Cooperation of Intellectual Property Bureau of the Ministry of Economic Affairs Du printed A8 B8 C8 D8_____ Sixth, the scope of patent application is 29% Ni-17% Co). 4. If the glass-to-metal bonded electronic component of item 1 or 2 of the patent application scope, the glass-to-metal bonded electronic component is an electronic gun component for a tube. 5. A glass-to-metal bonded electronic component that joins a glass member and a metal member by heating and firing so that the two are integrated; and is characterized in that in order to ensure the size and shape between the aforementioned metal members, A spacer is provided at a gap portion of the metal member. 6. For the glass-to-metal bonded electronic component in the first or second scope of the patent application, in order to ensure the size and shape between the aforementioned metal members, a spacer is provided in the gap portion of the metal member. 7. —A glass-to-metal bonded electronic part is made by heating and firing to join the contact parts of the glass member and the metal member so that the two become one body. It is characterized by avoiding the heating and firing of glass. The glass is attached to the part of the metal member that does not have glass, and the shielding member is arranged at the gap between the glass member and the metal member. 8. For the glass-to-metal bonded electronic parts in the first or second scope of the patent application, in order to avoid the glass from adhering to the glass member when the glass is heated and fired, it is the glass member. A shielding member is disposed in a gap portion with the metal member. ---.—-; ---- M ------ Order ------ ^ (Please read the precautions on the back before making this page) _2 (CNS) 8 4 Green (210X297) %)
TW088122216A 1999-03-31 1999-12-17 Glass and metal junction electronic part TW434633B (en)

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