CN1268492A - Glass and metal joining electronic parts - Google Patents

Glass and metal joining electronic parts Download PDF

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Publication number
CN1268492A
CN1268492A CN00105372A CN00105372A CN1268492A CN 1268492 A CN1268492 A CN 1268492A CN 00105372 A CN00105372 A CN 00105372A CN 00105372 A CN00105372 A CN 00105372A CN 1268492 A CN1268492 A CN 1268492A
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CN
China
Prior art keywords
glass
metal
aforementioned
hardware
thermal expansivity
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Pending
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CN00105372A
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Chinese (zh)
Inventor
山上英雄
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Fuji Electronics Industry Co Ltd
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Fuji Electronics Industry Co Ltd
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Publication date
Application filed by Fuji Electronics Industry Co Ltd filed Critical Fuji Electronics Industry Co Ltd
Publication of CN1268492A publication Critical patent/CN1268492A/en
Pending legal-status Critical Current

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    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/02Electrodes; Screens; Mounting, supporting, spacing or insulating thereof
    • H01J29/04Cathodes
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J29/00Details of cathode-ray tubes or of electron-beam tubes of the types covered by group H01J31/00
    • H01J29/46Arrangements of electrodes and associated parts for generating or controlling the ray or beam, e.g. electron-optical arrangement
    • H01J29/467Control electrodes for flat display tubes, e.g. of the type covered by group H01J31/123
    • HELECTRICITY
    • H01ELECTRIC ELEMENTS
    • H01JELECTRIC DISCHARGE TUBES OR DISCHARGE LAMPS
    • H01J2237/00Discharge tubes exposing object to beam, e.g. for analysis treatment, etching, imaging
    • H01J2237/03Mounting, supporting, spacing or insulating electrodes

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  • Electrodes For Cathode-Ray Tubes (AREA)
  • Manufacture Of Electron Tubes, Discharge Lamp Vessels, Lead-In Wires, And The Like (AREA)

Abstract

The object of the present invention is to provide a glass and metal junction electronic part with a high degree of precision and capable of preventing a crack such as a craze or a breakage from occurring at a glass member near a junction during heating, baking, and joining even if a difference of thermal expansion coefficients of the glass and the metal is large. To achieve the object, this electronic part is composed of joining auxiliary members 17 having a thermal expansion coefficient between 30 DEG C to 500 DEG C inside a range of 70% to 130% of a thermal expansion coefficient of a glass member 13 fixed to predetermined places of the joining parts of a metal member 12b between a predetermined portion where the glass member 13 and the metal member 12b contact. Also spacers 19a are arranged at the gap portion of each member and shielding members 19b are arranged at the gap portion of the glass member 13 and the metal member 12b.

Description

The joining electronic parts of glass and metal
The present invention relates to the joining electronic parts of a kind of glass and metal, in more detail, relate to burn till glass component is engaged with hardware when becoming one by heating, prevent from crackles such as dry and cracked and scar take place near the glass component the bonding part, and improve the glass of precision and the joining electronic parts of metal.
The panel part of teletron is coated with red, green, blue 3 primary colours, and used electron tube electron beam gun such as colored visualization machine are towards making the luminous fluorescent screen emission electron beam corresponding with each 3 primary colours of these 3 primary colours.Electron beam will cover whole patterns ground by electromagnetic field and carry out deflection scanning, and video is reproduced.This electron tube has array or the assortment in one plane of assortment at certain intervals to become triangular form with electron beam gun, but all must be adjusted to 3 electron beams launching with electron beam gun by electron tube and on window of tube, concentrate on 1 point separately, this is adjusted when insufficient, can produce colour cast on image.
As the example of electron tube with electron beam gun, the electron tube that Fig. 3 (a) expression is made of negative electrode, G1 electrode (the 1st gate electrode), G2 electrode (the 2nd gate electrode) longitudinal sectional view of electron beam gun.This electron tube is with electron beam gun 20, and it has the front portion of the minim gap faces cathode 21 of the G1 electrode 22a of micro-holes and about 50-200 μ m, G2 electrode 22b with the arranged spaced of about 50-350 μ m after G1 electrode 22a.Stacked again G3-G6 electrode becomes the parts of electronic gun as composite part.
Electron tube is to burn till and engage with 27 heating of metal system housing by the cylindraceous metal negative electrode keeper 25 with glass 23, formation negative electrode 21 to make with electron beam gun 20.In other words, with the through hole that is provided for 3 negative electrode keepers 25 are inserted with becoming row, and be configured as the blocky glass 23 of platelet by compressing tablet shaping etc. and be housed in bottom surface sections and be provided with in the metal system housing 27 of peristome, and be fixed on and do not give on the illustrated anchor clamps.Then, after in 3 negative electrode keeper 25 patchholes, heat and burn till, glass 23, negative electrode keeper 25, metal system housing 27 is engaged and become one.Afterwards, G1 electrode 22a is placed on the negative electrode 21, again that G2 electrode 22b is thereon stacked, to finish manufacturing.
But using the stacked operation of negative electrode, G1 electrode and the G2 electrode of this method mainly is to carry out with handwork, thereby time-consuming and low precision, is the big operation of error.Therefore, now become in advance, heated and burn till and engage, made the incorporate electron tube of each member with electron beam gun (with reference to Fig. 3 (b)) with manufacturing with negative electrode, G1 electrode, G2 electrode layer poststack.
This electron tube roughly is with the bottom expansion of the G2 electrode 22b of the existing electron beam gun 20 shown in Fig. 3 (a) with electron beam gun 30 and bends to container-likely, becomes the structure that G1 electrode and negative electrode is contained in its inboard.The electron tube of this pattern is that negative electrode 31, G1 electrode 32a and G2 electrode 32b, glass 33 heating are burnt till with electron beam gun 30, realizes each member engages integrated.
At this, the big factor that hinders metal and glass bond is the stress-strain that the difference of the thermal contraction (thermal expansivity) of metal and glass in the process of cooling after burning till causes.Adopt as the general thermal expansivity of the glass that uses with metallic joint and to be 4.5-6.5 * 10 30-500 ℃ the time -6/ ℃, for reducing this strain, be to use the Fe-Ni class alloy close with the thermal expansivity of glass as hardware.
Table 1 expression Fe-Ni is the thermal expansivity of alloy.
The thermal expansivity of table 1 Fe-Ni class alloy
Thermal expansivity (10 -6/℃) 42 alloys Kovar alloy Fe (soft steel) *
?30-300℃ ????4.1 ????4.9 ????13.0
?30-400℃ ????5.8 ????5.2 ????13.9
?30-500℃ ????8.1 ????6.1 ????14.6
* reference
Be heated as the negative electrode keeper of parts of electronic gun electronics, become high temperature, thereby generally use the Kovar alloy (Fe-29%Ni-17%Co) that at high temperature thermal expansivity is low owing to emission of cathode.In addition, other hardwares are not owing to be heated to the such high temperature of negative electrode keeper, thereby mainly use cheap 42 alloys (Fe-42%Ni).
Parts of electronic gun is that the electrode of G1-G6 is overlapping, by the acceleration of the electronics of emission of cathode, inhibition, dispersion, convergence direction etc., thereby is strict with the positional precision of each part with control when assembling.In the past, once assembled the electrode of G1-G6, but, also developed part, and can realize the easy and the high precision int of assembling operation G1, compoundization of G2 electrode for improving operation with handwork.
By compoundization of parts of electronic gun, solved the problem when assembling, but produced problem again at generation crackle on glass.Fig. 3 is the sectional view of existing part with G1 electrode and compoundization of G2 electrode.The reason that the inventor etc. are taken place this crackle has been carried out investigation and has been found: during with G1 electrode and compoundization of G2 electrode, because the hardware with glass bond increases, in the process of cooling after glass burns till, produce because the strain that the thermal contraction difference of glass and metal causes, in addition owing to the reasons such as glass attenuation of part folded between hardware, generation crackle as a result.
In addition, the part for compoundization requires high-precision size.The span that passes through of the electronics of G1 electrode and G2 electrode wants the precision good control in ± 5 μ m specifically.In addition, when part is carried out compoundization, the shortcoming of glass attachment on the edge of negative electrode keeper taken place also when the burning till of glass.When glass attachment on the negative electrode keeper, by the emission of cathode electronics time, the Ba ion of negative electrode is attached on its periphery, causes conduction, hinders the insulativity of glass.
Studied the whole bag of tricks for preventing to crack on glass, the result finds out: the hardware of use, the thermal expansivity of its metal in the time of 30-500 ℃ is glass in the scope of the 70-130% of the thermal expansivity of synthermal scope the time, can obtain good result.In other words, as shown in table 1, the material coefficient of thermal expansion coefficient shows different values according to each temperature, and it is worth according to temperature range, and the situation of reverse is also arranged at storeroom.Situation when the inventor etc. only investigate glass and burn till with regard to the relation of the thermal expansivity of the strain temperature of glass and thermal expansivity, metal is found: even such composite part, when glass and metallic joint, as mentioned above, if the thermal expansivity of metallic substance in the time of 30-500 ℃ is in the scope of the 70-130% of glass the time, suit for joint.
The object of the present invention is to provide a kind of optimum range of finding out in according to the present invention, even the difference that adds thermal expansivity of used glass component and hardware is big, burn till and when engaging heating, what crackles such as dry and cracked and scar can not take place near the glass component the bonding part yet comprises that electron tube is with the glass of electron beam gun and the joining electronic parts of metal.In addition, its purpose also is to provide simultaneously the glass of raising precision and the joining electronic parts of metal.
For addressing the above problem, technical scheme 1 described the present invention burns till the part that glass component and hardware are joined by heating to engage and make the glass that both become one and the joining electronic parts of metal, it is characterized in that: when the thermal expansivity during at 30-500 ℃ is not in the scope at the 70-130% of the thermal expansivity of this glass component with the bonding part of the hardware of glass bond, the metallic joint auxiliary member of thermal expansivity during with 30-500 ℃ in the scope of the 70-130% of the thermal expansivity of aforementioned glass component is fixed on the regulation position at junction surface of the hardware that engages with this glass component, burning till by heating when engaging, because the difference of the thermal expansivity of bonding part reduces, and has prevented to take place on glass component crackle.
For addressing the above problem, technical scheme 2 described the present invention engage the joining electronic parts that becomes one by the hardware that heating is burnt till majority with glass component, it is characterized in that: when the thermal expansivity during at 30-500 ℃ is not in the scope at the 70-130% of the thermal expansivity of this glass component with the bonding part of the hardware of glass bond, the metallic joint auxiliary part of thermal expansivity during with 30-500 ℃ in the scope of the 70-130% of the thermal expansivity of glass component is fixed on the regulation position at junction surface of the hardware that engages with this glass component, burning till by heating when engaging, because the difference of the thermal expansivity of bonding part reduces, and has prevented to take place on glass component crackle.
For addressing the above problem, technical scheme 3 described the present invention are as the joining electronic parts of technical scheme 1 or 2 described glass and metal, it is characterized in that: the thermal expansivity of the material of glass component in the time of 30-500 ℃ is 4.5-6.0 * 10 -6/ ℃, the material of hardware is the Fe-42%Ni alloy, the material of metal sheet is Kovar alloy (Fe-29%Ni-17%Co).
For addressing the above problem, technical scheme 4 described the present invention are as the joining electronic parts of each described glass and metal among the technical scheme 1-3, and it is characterized in that: the joining electronic parts of glass and metal is the electron tube parts of electronic gun.
For addressing the above problem, technical scheme 5 described the present invention burn till by heating part that glass component and hardware join to be engaged make the glass that both become one and the joining electronic parts of metal, it is characterized in that:, in the gap portion of this hardware, dispose dottle pin for the correct size shape that keeps between hardware.
For addressing the above problem, technical scheme 6 described the present invention are the joining electronic parts as each described glass and metal among the technical scheme 1-4, it is characterized in that:, in the gap portion of this hardware, dispose dottle pin for the correct size shape that keeps between hardware.
For addressing the above problem, technical scheme 7 described the present invention burn till by heating part that glass component and hardware join to be engaged make the glass that both become one and the joining electronic parts of metal, it is characterized in that: when the heating of glass is burnt till, in order not make glass attachment in hardware, on the unwanted part, in the gap portion of this glass component and this hardware, dispose shading member.
For addressing the above problem, technical scheme 8 described the present invention are the joining electronic parts as each described glass and metal among the technical scheme 1-4, it is characterized in that: when the heating of glass is burnt till, in order not make glass attachment in hardware, on the unwanted part, in the gap portion of this glass component and this hardware, dispose shading member.
Fig. 1 is the electron beam gun exploded perspective view as an embodiment of the joining electronic parts of glass of the present invention and metal.
Fig. 2 is the longitudinal sectional view of electron beam gun shown in Figure 1.
Fig. 3 (a) is the longitudinal sectional view of existing electron beam gun, (b) is the longitudinal sectional view with negative electrode and the incorporate existing electron beam gun of electrode.
Utilize most preferred embodiment shown in the drawings to describe the joining electronic parts of glass of the present invention and metal in detail.Fig. 1 is the electron tube electron beam gun exploded perspective view as an embodiment of the joining electronic parts of glass of the present invention and metal, and Fig. 2 is the longitudinal sectional view that electron tube shown in Figure 1 is used electron beam gun.
At first, Fig. 1 roughly comprises with the formation of electron beam gun 10 shown in Figure 2: as the negative electrode keeper 15 of hardware, G1 electrode 12a with G2 electrode 12b, glass component 13, engage auxiliary part 17, dottle pin 19a, shading member 19b.
Negative electrode keeper 15 is the members that constitute the negative electrode 11 of divergent bundle, and inside is the cylindric of hollow, mainly is to make with Kovar alloy (Fe-29%Ni-17%Co).Can launch the electron beam corresponding with 3 primary colours for making electron tube with electron beam gun 10,3 negative electrode keepers 15 engage with glass 13, to insulate.
On G1 electrode 12a and G2 electrode 12b, be configured such that the micro-holes that 11 ejected electron bundles of negative electrode pass through.G1 electrode 12a and G2 electrode 12b have the various functions such as electronic flow of modulation by negative electrode 11 ejected electron bundles, in order to modulate fluoroscopic brightness, the tone of color picture.G1 electrode 12a and G2 electrode 12b generally are with 42 alloys, and promptly the Fe-42%Ni alloy is made.Negative electrode 11 faces one another with the slight gap of about 50-200 μ m with G1 electrode 12a, and G2 electrode 12b in thereafter, is the raising modulation efficiency with the arranged spaced of about 50-350 μ m, and preferably general interval is separately assembled narrow and smallly as far as possible.
G2 electrode 12b has its inside can accommodate the shape that G1 electrode 12a and negative electrode 11 and bottom have the container sample of opening, with inner wall section that glass 13 engages on around joint auxiliary part 17 that Kovar alloy (Fe-29%Ni-17%Co) is made is fixed on methods such as welding with becoming band.Use the Kovar alloy close can prevent to heat and burn till the crackle that the back produces with the thermal expansivity of used glass.If engage the coefficient of expansion of the used metallic substance of auxiliary part 17 when surpassing the scope of 70-130% of used glass swelling coefficient, find to have the generation of crackle, therefore the coefficient of expansion of used metallic substance should be no more than this scope.
Glass 13 is to be used for by negative electrode keeper 15, G1 electrode 12a and G2 electrode 12b heating are burnt till and each member engages is integral, and at this, in order to adapt with the Kovar alloy that is used on the negative electrode keeper 15, being to use the coefficient of expansion is 5.2 * 10 -6/ ℃ glass.
Dottle pin 19a is configured in the gap of G1 electrode 12a and G2 electrode 12b, is the mutual size shape that is used to keep G1 electrode 12a and G2 electrode 12b.Dottle pin 19a forms for example has the tabular of through hole in central authorities, is made by heating is burnt till or the emission of electronics etc. is also indeformable, rotten material, for example pottery etc. even be.Shape is not limited to the tabular body shown in the present embodiment, preferably waits according to the sizes and shape in the gap of each member to form.The interval of G1 electrode 12a and G2 electrode 12b is about 50-350 μ m, and dottle pin 19a keeps this at interval.
Shading member 19b is configured in G2 electrode 12b and the interval of glass 13 that is provided with negative electrode keeper 15.The shading member 19b of present embodiment is the tabular body that is provided with 3 through holes that the negative electrode keeper can be inserted, but is not limited in this shape certainly, preferably waits according to the sizes and shape in the gap of each member to form.It is to be attached on the negative electrode keeper 15 in order to prevent that glass 13 softens and rises owing to thermal conductance causes when heating is burnt till that shading member 19 is configured on this part.Shading member 19b is identical with above-mentioned dottle pin 19a, is burnt till or the emission of electronics is also indeformable, rotten material, for example pottery etc. are made by heating even be.
Roughly following the carrying out that engage of glass 13 and negative electrode keeper 15, G1 electrode 12a, G2 electrode 12b.At first, use granular glass blank can contact the microplate of the tabular body on the inwall that is contracted in G2 electrode 12b by formation such as compressing tablet shapings.The groove 13b that 3 hole 13a that 3 negative electrode keepers 15 can insert respectively is set on this glass microplate and touches with the end of G1 electrode 12a.And, glass microplate, negative electrode keeper 15, G1 electrode 12a, G2 electrode 12b, dottle pin 19a, shading member 19b are configured in do not give on the illustrated anchor clamps after, utilize fired ware under 700-850 ℃, to heat to burn till and engage, each member is become one.
As mentioned above, formation of the present invention is between the established part that glass component and hardware join, thermal coefficient of expansion during with 30-500 ℃ is on the regulation position at the joint auxiliary part of the metal in the scope of the 70-130% of the thermal coefficient of expansion of the glass component junction surface that is fixed on the hardware that engages with this glass component, therefore, even for example the difference of the thermal coefficient of expansion of glass component and hardware is large, but because glass component is to engage with the little metal joint auxiliary part of difference that is fixed on the thermal coefficient of expansion on the assigned position of hardware, so burns till and to prevent that also glass component from the effect of the crackles such as dry and cracked and scar occuring even still have heating. Thereby the effect of the joining electronic parts of the glass of performance hardware characteristic and metal is made on the difference ground with thermal coefficient of expansion of can not minding glass component and hardware.
In addition, owing to take the measure of configuration dottle pin in the gap portion between engagement member, thereby have interval and the shape that can correctly keep being used in each member on the electronic component, and the effect of the joining electronic parts of can the accuracy of manufacture high glass and metal.
Moreover, owing to take the measure of the configuration shading member between glass component and hardware, can prevent that when heating is burnt till glass component from soften owing to heat so that being attached on the hardware beyond the part that should engage, so have the effect of the joining electronic parts of the glass that can make very high-quality and metal.

Claims (8)

1. the joining electronic parts of glass and metal, burn till by heating and part that glass component and hardware join to be engaged both are become one, it is characterized in that:
When the thermal expansivity during at 30-500 ℃ is not in the scope at the 70-130% of the thermal expansivity of this glass component with the bonding part of the aforementioned metal member of aforementioned glass bond, the joint auxiliary part of the metal of thermal expansivity in the scope of the 70-130% of the thermal expansivity of aforementioned glass component during with 30-500 ℃ is fixed on the regulation position at junction surface of the aforementioned metal member that engages with this glass component, burning till by heating when engaging, because the difference of the thermal expansivity of aforementioned bonding part reduces, and has prevented from aforementioned glass component crackle to take place.
2. the joining electronic parts of glass and metal, burning till a plurality of hardwares are engaged with glass component by heating becomes one, it is characterized in that:
When the thermal expansivity during at 30-500 ℃ is not in the scope at the 70-130% of the thermal expansivity of this glass component with the bonding part of the aforementioned metal member of aforementioned glass bond, the joint auxiliary part of the metal of thermal expansivity in the scope of the 70-130% of the thermal expansivity of aforementioned glass component during with 30-500 ℃ is fixed on the regulation position at junction surface of the aforementioned metal member that engages with this glass component, burning till by heating when engaging, because the difference of the thermal expansivity of aforementioned bonding part reduces, and has prevented from aforementioned glass component crackle to take place.
3. the joining electronic parts of glass as claimed in claim 1 or 2 and metal is characterized in that:
The thermal expansivity of the material of aforementioned glass component in the time of 30-500 ℃ is 4.5-6.0 * 10 -6/ ℃, the material of aforementioned metal member is the Fe-42%Ni alloy, the material of aforementioned metal plate is Kovar alloy (Fe-29%Ni-17%Co).
4. as the joining electronic parts of each described glass and metal among the claim 1-3, it is characterized in that:
The joining electronic parts of aforementioned glass and metal is the electron tube electron beam gun.
5. the joining electronic parts of glass and metal, burn till by heating and part that glass component and hardware join to be engaged both are become one, it is characterized in that:
For the size shape that correctly keeps the aforementioned metal member to ask, in the gap portion of this hardware, dispose dottle pin.
6. as the joining electronic parts of each described glass and metal among the claim 1-4, it is characterized in that:
In order correctly to keep the size shape between the aforementioned metal member, in the gap portion of this hardware, dispose dottle pin.
7. the joining electronic parts of glass and metal, burn till by heat and part that glass component and hardware join to be engaged both are become one, it is characterized in that:
When the heating of glass is burnt till, in hardware, on the unwanted part, in the gap portion of this glass component and this hardware, dispose shading member in order not make glass attachment.
8. as the joining electronic parts of each described glass and metal among the claim 1-4, it is characterized in that: when the heating of glass is burnt till, in order not make glass attachment in hardware, on the unwanted part, in the gap portion of this glass component and this hardware, dispose shading member.
CN00105372A 1999-03-31 2000-03-31 Glass and metal joining electronic parts Pending CN1268492A (en)

Applications Claiming Priority (2)

Application Number Priority Date Filing Date Title
JP91146/1999 1999-03-31
JP11091146A JP2000285819A (en) 1999-03-31 1999-03-31 Glass and metal junction electronic part

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CN1268492A true CN1268492A (en) 2000-10-04

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CN00105372A Pending CN1268492A (en) 1999-03-31 2000-03-31 Glass and metal joining electronic parts

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KR (1) KR100352676B1 (en)
CN (1) CN1268492A (en)
TW (1) TW434633B (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100360991C (en) * 2003-02-06 2008-01-09 株式会社日立显示器 Liquid crystal display device and an electromagnetic wave absorbing device
CN101783659A (en) * 2009-01-20 2010-07-21 精工电子有限公司 Piezoelectric vibrator

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100360991C (en) * 2003-02-06 2008-01-09 株式会社日立显示器 Liquid crystal display device and an electromagnetic wave absorbing device
CN101783659A (en) * 2009-01-20 2010-07-21 精工电子有限公司 Piezoelectric vibrator

Also Published As

Publication number Publication date
JP2000285819A (en) 2000-10-13
TW434633B (en) 2001-05-16
KR100352676B1 (en) 2002-09-16
KR20000062220A (en) 2000-10-25

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