TW432256B - Positive resist composition of chemical amplification type - Google Patents

Abstract

Amplification type, comprising (a) an alkali-soluble resin having crosslinkage and groups which are decomposed by the action of an acid to increase the solubility in an alkali developer and (b) 0.1 to 20 wt.% of a compound represented by the following formula (I) or (II) which generates a sulfonic acid by irradiation with active rays or radiation; wherein R1 to R5 are the same or different, and each represents a hydrogen atom, an alkyl group, a cycloalkyl group, an alkoxy group, a hydroxyl group, a halogen atom or S-R6 group; R9 represents an alkyl group or an aryl group; and X<SP>-</SP> represents an anion of benzenesulfonic, naphthalenesulfonic or anthracenesulfonic acid having at least one substituent selected from the group consisting of branched or cyclic alkyl groups having at least 8 carbon atoms and branched or cyclic alkoxy groups having at least 8 carbon atoms, or at least two substituents selected from the group consisting of straight-chain, branched or cyclic alkyl groups having from 4 to 7 carbon atoms and straight-chain, branched or cyclic alkoxy groups having from 4 to 7 carbon atoms, or at least three substituents selected from the group consisting of straight-chain or branched alkyl groups having from 1 to 3 carbon atoms and straight-chain or branched alkoxy groups having from 1 to 3 carbon atoms.

Description

P4322 5 6 A7 __, _ _B7 ________ 5. Description of the invention (1) The invention of the present invention The present invention relates to a chemically enhanced positive photoresist composition, which is used in lithographic plates or semiconductor devices such as ICs. The manufacturing process is used to produce circuit materials, substrates, or thermal heads for liquid crystals, and is used for other photofabrication processes. Background of the invention

-A commonly used positive photoresist composition contains an alkali-soluble resin and a gadolinium diazide compound as a photosensitive substance. For example, U.S. Patent Nos. 3,666,473, 4,115,128 and 4,173,470 disclose that a mixture of novolac phenol resin with diazide quinone-substituted compounds is used as an unformed composition, and L.F1 · Thompson in Introduction to M.icrolitho graphv No. 2, 1 9, page 1 I 2 -1 2 1, ACS

Publisher, and mentioned that the mixture of Pannen varnish made from oxymethoxamine and formic acid and tetrahydroxydiphenyl ketone-1,2-diazide hydrazone quinone sulfonate is the most typical mixture. Printed by the Consumer Bureau of Standards Bureau --- Please read the notes on the back before filling out this page) Here, the role of novolak resin in positive photoresist basically composed of novolac resin and diazinequinone While providing high resistance to plasma etching (pl asrna etching), the perylene diazide compound has a dissolution inhibitor effect. In addition, diazide naphthalene + sulfur is characterized in that it will generate carboxylic acid under light irradiation and lose its ability to inhibit dissolution, thereby increasing the solubility of novolac resin in alkali. Based on the above viewpoints, a variety of positive photoresist compositions containing novolac resins and perazide naphthoquinone type light-sensitive materials have been developed and put into practical use. In microlithography with a width of about 0.8-2 microns, the size of these papers is -4-this paper size is applicable to the Chinese National Standard (CNS) A4 scale (210X297 mm) printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs Control 432 2 5 6 A7 _____B7 V. Description of the invention (2) The effect is satisfactory 9 On the other hand, the degree of integration in integrated circuits has become higher and higher in recent years, resulting in the need for an ultra-fine micro Lithography can produce ultra-fine lines that are only half a micron wide or thinner for semiconductor materials such as VLSI. In order to solve this problem, the shorter the wavelength of the lithography exposure instrument is used, the far ultraviolet light and the exciton laser beam (XeC] [, KrF, ArF) are being tested. When using a conventional resist containing a varnish resin and a diazide quinone compound for lithography using far-ultraviolet light or an excimer laser beam, it is difficult for the light to reach the resist, because the novolak resin and the two Azid quinone has strong absorption in the far ultraviolet region. The sensitivity of such a resist is too low, and it can only produce a sharp profile pattern. As a means to solve the problems described above, for example, U.S. Patent No. 4,4,9,6 2 8 and European Patent No. 0,2 4 9,1 3 9 disclose that a chemically strong photoresist composition can be used. The chemically-enhanced positive photoresist composition means a molding material that generates an acid when exposed to an active radiation such as far ultraviolet light, and uses the acid as a catalyst to cause a reaction, so that the developer is in the active radiation irradiated area. And unirradiated areas produce different solubility. By virtue of this difference in solubility, a mold is formed on a substrate coated with a material of the aforementioned type. As an example of a chemically enhanced photoresist composition, a compound capable of generating an acid by photolysis (hereinafter referred to as a photoacid generator (photoacid 吕 巳 1 ^^ {〇] *) and acetal can be mentioned. A mixture of aldehyde or β, ^ -acetal compound (] 1 &gt;-厶 -4 8-89003), in which "jP_A," means here an unapproved published Japanese patent application), photoacid The paper size of the generator and the orthoester or acetamide is applicable to the Chinese National Standard (CNS) 8-4 (210X297 mm): &quot; Please read the precautions on the back before filling this page)

»43225 6 A7 B7 printed by the Consumer Cooperative of the Central Government Bureau of the Ministry of Economic Affairs 5. Description of the Invention (3) Mixture of aldehyde compounds (JP-A-51-120714), photoacid generator and acetal on the main chain Or a mixture of polymers with ketal groups (JP_A_ 5 3-1 3 3 4 2 9), a mixture of photoacid generators and alcohol ether compounds (JP-A-5 5 -1 2995), Mixture of photoacid generator and N-imine carbonic acid compound (JP-A-55-126236), mixture of photoacid generator and polymer with orthoester group on the main bond (jp_A-56 -17345), a mixture of a photoacid generator and a triyl alkyl ester compound (JP-A-60-3 625) 'A mixture of a photoacid generator and a silyl ester compound (JP-A-60 -10274) and a mixture of a photoacid generator and a formazanyl compound (JP-A-60-3 7549 and JP-A-60-121446). The quantum produced by these mixtures is in principle greater than 1, and therefore exhibits high sensitivity. Similar to the above-mentioned system, an example of stabilizing at room temperature but decomposing in the presence of acid will produce a dissolution test. One can mention such a system, in which compounds that produce acid under exposure to light and tertiary Or a mixture of secondary alkyl (such as tertiary butyl or 2. cyclohexenyl) esters or carbonate compounds, such as JP-A-59-45439, JP-A-60-3 625, JP-A-62 , 229242, JP-A-63 -27829, JP-A-63-3 6240, JP-A-63 -250642, Pol vm. Eng. See.. Vol. 23, page 1012 (1 9 8 3); ACS Svm., Vol. 242, p. 11 (1984);

Semiconductor World, the November number, page 91 (1987); Mi crn tn o 1 ec ul es. Vol. 21, page 1475 (1 9 8 8); and SPIE. Vol. 920, page 42 (1988) . Compared with diazide naphthoquinone / novolac resin system, this type of system also has high sensitivity-6- This paper size is applicable to China National Standard (CNS) Α4 specification (2 丨 〇297297 mm) ί: Outfit-X Please Please read the notes on the back before filling in this page), 1T 322 5 6 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 Β7 V. Description of the invention (4) Sensitive, weak absorption in the deep ultraviolet region β, so use this The system is also effective in shortening the wavelength of the light source. The above chemically-enhanced positive photoresist compositions can be divided into two categories, namely, three-component systems. This system contains rhenium-dissolved resins, compounds that generate acids when exposed to radiation (photoacid generators), and acid-containing methylates Groups of compounds that inhibit the dissolution of alkali-soluble resins (dissolution inhibitors) and two-component systems containing resins and photoacid generators that decompose when reacted with acids and dissolve in alkalis. The two- or three-component chemically-enhanced positive photoresist composition is subjected to heat treatment in the presence of an acid generated by exposure of a photoacid generator to light, and development occurs to form a photoresist. When a conventional alkali-soluble resin having an acid-decomposable group is used in the photoresist composition, the photoresist film produced by the method has a problem of thermal resistance. This thermal resistance problem can be solved with an alkali-dissolving resin. The protection ratio of acid-decomposing groups in this resin is reduced or increased as much as possible. However, the reduction of the protection ratio with acid-decomposed groups will lead to the inability to distinguish between the unexposed area and the exposure interval, or insufficient resolution; if the protection ratio is increased as much as possible with the acid-decomposed groups, the film will be shortened and exposed during the drying after exposure. The adhesion of the matrix is reduced. SUMMARY OF THE INVENTION Therefore, the purpose of the present invention is to solve the problems of the aforementioned conventional technologies. More specifically, it is to provide a positive type photoresist composition. The complex has high sensitivity and resolution, and can form an excellent composition. In view of the above characteristics, the inventors have made unremitting research and found that the paper size of this paper is applicable to the Chinese National Standard (CMS) Α4 specification (2 丨〇X ^) (Please read the notes on the back before filling out this page) -1Τ A7 B7 V. Description of the invention (5) For the purpose, you can borrow the following resins with special structures and can be used in positive chemistry Sulfur-producing compounds within the stubborn system are achieved. More specifically, the present invention has one of the following structures [丨] to [6]: [1] A chemically enhanced positive photoresist composition containing a scopolamine-soluble resin having crosslinked and The base map that is decomposed by the action of acid to increase the solubility of the developer, and the compound represented by formula (I) or (II) below, this compound produces acid when exposed to radiation;

Ri

(I) (II) (Please read the precautions on the reverse side before filling out this page) 装 装.. Order _ Printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs, where h to R5 can be the same or different, each representative Hydrogen atom, alkyl group, cycloalkyl group, alkoxy group, hydroxy group, halogen atom or -S-R6 group; R, 6 represents alkyl group or aryl group; X—represents benzyl acid, auditing acid or perpetual acid An anion having at least one substituent selected from the group consisting of a branched or cycloalkyl group having at least 8 carbon atoms and a branched or cycloalkoxy group having at least 8 carbon atoms, or at least two The substituents are selected from the group consisting of 4 paper standards applicable to Chinese National Standards (CNS) A4 specifications (2) 0X297 mm. 醪 43225 6 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (6) Straight-chain, branched or cycloalkyl groups of 7 to 7 carbon atoms and straight-chain, branched or cycloalkoxy groups of 4 to 7 carbon atoms, or at least three substituents, such substitutions The radical is selected from the group consisting of a linear or branched gauge group having 1 to 3 carbon atoms, a linear or branching group having 1 to 3 carbon atoms Burning branched group. [2] The chemically enhanced positive photoresist composition according to the structure [1], wherein the crosslink is formed by the reaction of a compound having at least two phenolic hydroxyl groups, the age-based hydroxyl groups of an alkali-soluble resin and an alkyl vinyl ether Bond formation. [3] The chemically enhanced positive photoresist composition according to the structure [1] or [2], further comprising a phosphonium organic basic compound. [4] The chemically-enhanced positive photoresist composition according to any one of the structures [1], [2], and [3], wherein the alkali-soluble resin is synthetically prepared from low-dispersity poly (hydroxystyrene), This synthesis is based on the anionic living polymerization method, and introduces cross-linking and groups. These groups decompose when interacting with acid to increase the solubility in the developer. [5] The chemically-enhanced positive photoresist composition according to any one of the structures [1], [2], [3], and [4] further contains (d) at least one phenolic compound whose single molecular weight is not greater than 3,000. [6] The chemically-strength positive photoresist composition according to any one of the structures [1], [2], [3], [4], and [5] further contains (e) a low-quantity acid decomposition and dissolution Inhibitor. This inhibitor is a compound made by introducing an acid-decomposing group into a phenolic compound with a single molecular weight not greater than 3,000. By using the aforementioned compound of formula (I) or (II) as a photoacid generator and the aforementioned alkali-soluble resin having acid-decomposing groups and cross-linking, the thermal resistance and resolution of the chemically enhanced photoresist have been successfully improved And ensure its satisfactory sensitivity * 9-This paper size is applicable to China National Building Standard (CNS) M specifications (2 丨 0 &gt; &lt; 297mm) (Please read the note on the back ^ 1 ^ item before filling (This page)-Order 槔 32 2 5 6 Α7 Β7 V. Description of the invention Γ Sensitivity and profile &gt; Detailed description of the present invention The compound used in the present invention is described in detail below. ΓΠ Formula ΓΙ) The photoacid generator of Wei ΠΠ In the aforementioned formula (I) or (Π), the alkyl group represented by R 〖to Re is an example of an alkyl group having 1 to 4 carbon atoms. The radical may be substituted, such as methyl'ethyl, propyl, n-butyl, secondary butyl and tertiary butyl. In the case of cyclic radicals, it has 3 to 8 carbon atoms and may be substituted. Examples thereof include propylpropyl %% pentyl, and hexadecyl. In terms of entertainment &gt; oxygen, there are 1 to 4 carbon atoms such as methoxy, ethoxy, hydroxyethoxy, dioxy, n-butoxy, secondary butoxy, and tris Grade butoxy. As for the halogen atom, examples thereof include a fluorine atom ', a gas atom, a stream atom, and an onium atom. In terms of rearyl, it has 6 to 14 carbon atoms and may be substituted, such as phenyl, tolyl, methoxyphenyl, and fluorenyl. Examples of suitable substituents that may be included in the aforementioned groups include alkoxy groups having i to 4 carbon atoms, halogen atoms (fluorine, gas, bromine, iodine), and aromatic groups having up to 10 carbon atoms. Group, alkenyl group with 2 to 6 carbon atoms, cyanohydroxy, carboxyl, alkoxycarbonyl and nitro 6 C, please read the precautions on the back before filling out this page} &quot; pack ·

-.II Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs, respectively, with hydrazone or iodonium represented by formula (I) or formula (Π) containing benzoic acid 'naphthalenesulfonic acid or anthracenesulfonic acid anion as the relative anion X, At least one substituent, selected from branched or cycloalkyl or alkoxy groups having at least 8, preferably at least i 0 carbon atoms, or at least two substituents, selected from 4 to 7 carbons Atomic straight or branched or cycloalkyl or alkoxy, or at least two substituents, selected from straight or branched alkane having 1 to 3 carbon atoms W3225 6 A7 ___ '&gt; _ B7 —— &quot; ..... — V. Description of the invention (8) group or alkoxy group. Due to the specific substituent on x-, the diffusivity of the acid (the aforementioned benzenesulfonic acid, sulfonic acid or anthracenesulfonic acid with substituents) produced after exposure is reduced, and the solubility of osmium or iodonium in the solvent is increased . From the viewpoint of reducing diffusivity in particular, branched or cyclic alkyl groups or ethoxy groups are more suitable as substituents than straight chain alkyl or ethoxy groups. In one case, the resulting acid had a substituent, and there was a marked difference in diffusivity between the linear and branched or cyclic substituents. Specific examples of the alkyl group having at least 8, preferably 8 to 20 carbon atoms include branched or cyclic octyl, nonyl, decyl, --carbyl, dodecyl, and thirteen carbons Burning base, fourteen carbon entertainment 1 base, and seventeen broken alkyl. Specific examples of alkoxy groups having at least 8 and preferably 8 to 20 carbon atoms include branched or cyclic octyloxy, nonyloxy, decyloxy, -carbyloxy 'twelve carbon • Oxygen, thirteen-carbamyl * oxy, fourteen-carbon pitoxy, and seventeen-carbon alkoxy. Specific examples of the alkyl group having 4 to 7 carbon atoms include straight-chain, branched or cyclic butyl, pentyl, hexyl and heptyl. Specific examples of the alkoxy group having 4 to 7 carbon atoms include linear, branched or cyclic butoxy, pentyloxy, hexyloxy and heptyloxy. Specific examples of the alkyl group having 1 to 3 carbon atoms include fluorenyl, ethyl, n-propyl, and isopropyl. Specific examples of the alkoxy group having 1 to 3 carbon atoms include a methoxy group, an ethoxy group, an n-propoxy group, and an isopropoxy group. In addition to the above-mentioned substituents, the aromatic sulfonic acid represented by χ- may have another substituent halogen atom (gas, chlorine, brook's broken atom), and 6 to 10 carbon atoms. Turn (CNS) _Congmi (21GX297 mm) (Please read the precautions on the back before filling out this page) -1 Pack 43225 6 A7 B7 The following is a description of the invention (9-membered aryl, cyano, Sulfido group, mesityl group, nitro group, nitro group, etc. A suitable ratio of these compounds represented by formula (I) or (II) in the total composition is 0, 1 to 20% by weight It is preferably from 5 to 10% by weight, and most preferably from 1 to 7% by weight, based on solids. Specific examples of these compounds represented by formula (I) or (II) include the inclusion compound ( 1-1) to (1-59) and compounds, but these examples are by no means limiting the scope of the present invention. (Please read the note on the back before filling this page} Printed by the Consumer Cooperative of the Central Bureau of the Ministry of Economic Affairs -12- This paper is compliant with China National Standards (CNS) M specifications (210 X 297 mm) r4 32 2 5 6 A7 B7 V. Description of the invention β

S · h21c10,

Cl-ι (1-2) ch3 1 〇? + H25C1 ^ S03- ό -S '〇-S〇3' (Please read the precautions on the back before filling this page) I-3) (&gt; CH3〇- ^ Hl7Ca〇- {1-4) S03 * (1-5;

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Cl Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs (1-7) (1-8) This paper size is applicable to China National Standard (CNS) A4 specifications (2 [0X297 mm) 馔 4 322 5 6 A7 B7 V. Description of the invention (11 OC ^ Hg H9C4 -Ό-

lH25Ci2y = v _ I _ &lt; 〇η-3 +] Η17〇3-〇 ^^ Ξ〇3 0 * C4Hg [(l-9) (I-10.) _ j '_. ^ j &gt; -S +, H21Cn〇-〇-^^-S03 '-S03': ,, (please fill out this page without reading the precautions on the back) (1-11 ch3 (1-12) OCH3 〇 ^-宁 + 丨 H17cv〇 乂) -so, ^^ S + lH17C8-〇-^^ S〇3 1-13) 1-14)

Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs H0 ^ O ~ fl ^ 7Cs-〇 ^ ys〇i ^ -S- 1-15 14 This paper size is applicable to China National Standard (CNS) A4 (210 X 297 mm) ) -So. A7 B7 V. Issue a note (12)

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O-C ^ Hg11

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This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) P432 2 5 6 A7 B7 V. Description of invention (16)

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1, 1T Printed by the Consumers 'Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs The paper size is applicable to the National Garden Standard (CNS) A4 specification (210X297 mm) ^ 432 2 5 6 A7 B7 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economics (Please (Read the notes on the back before filling out this page)

V. Description of the invention (17

OCH3

c2h5c2h5- ^ Vs〇3 C2H5 (l-55) OCH3

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c3h; ^ _ ^-s + iC3h7 ^ Vso3- (1-57)

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20- This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) 4 3225 6 A7 B7 V. Description of the invention) H17Cs 0 ~ '~ 0'O ~ s〇, ^ &gt; S〇3 ~ ( 1b1) (11-2), o_, ~ o H2sC12 &gt; ^ = ^ t &so;,

CK 3 (Ί-3) (11-4: (Please read the notes on the back before filling out this page) τ &gt; (11-5) SO,, .c | -〇 &lt; -〇 (11-6) Άΐ2, SO,

Cl ύύ 'Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs _ .〇 · -〇H17C8-〇 ^^ _ s〇3- (Π-7;, o ~' ~ o H21 Cl tr 0-^^-S03_ ( Ί-8) 21-This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) 屙 4 32 2 5 6 A7 B7 V. Description of the invention (19) ^ 25 ^ 12-〇-^ &gt; -5 〇3 ™ (Ιί-9) H9C4 ^^ — C ^ Hg1 H3C ~ 〇 ~, -h〇 ^ ch3 ^ 17 ^ 8-0 ~ ^ ~ ^ ~ S03 ~ (II-10) Go -〇 ~ &quot; 〇 ^ 丨 q ~ ch2 Ηΐ7〇Β-〇- ^ ^ &gt; -S〇3 ~ (Please read the notes on the back before filling in this page) (li-11) (I Bu 12: s H17Ce -so. H3c4 . s

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η 0 ^ ι_0 OC ^ Hg1 h9c, -0 (II -19) ci_〇_l ^) H &quot; cl ch / 1 H9C4- ^ ~ y ~ S03 &quot; c &lt; h91 (11-18) i ^ 〇-〇 3 ^ ΐ7 h17cv〇h ^ -so3- (11-20) (Please read the precautions on the back before filling in this purchase)

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HgCij

(11-25)

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(II-34) η

(11-35) V. Description of the invention (22 ^ Or OC ^ Hg H9C ^ 〇 ^ C / S〇3_ 11-33) 1 h9c4h〇 ^ ~ ^)-c4h3e h3c-o-^}-i ^^ 〇- ch3 H17Ca-0 -S03 &quot; * H17C0-〇- \ / -S〇3 11-36 0 ~ i _0 (Read the precautions on the back before filling in this page)

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(ii-40) so. nH9C4-0- ^ V〇-C, H9n -25- This paper size is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) P4 32 25 6 A7 B7 V. Description of invention)乂)-丨 ^^ C4H3E Η3〇0-〇 ^ -1-^^-0-0Η3

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-26- This paper size is applicable to China National Standard (CNS) A4 (2! 0 × 297 mm) ^ 4 32 25 6 A7 B7 V. Description of the invention (24 .CH3 H3C_0 ^ s〇3 &quot; ^ ch3 (! Ί- 46) h3c〇-^-i-^^-^ ch3 CH, (M-48 OCH,

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([i-53 —M. -27- This paper size applies to the Chinese National Standard (CNS) A4 specification (2 丨 0 X 297 mm.) P4 3225 6 A7 B7 V. Description of the invention (25) ~ In the previous specific example The subscripts η, s, t, and i used in the formulae are linear, secondary, tertiary, and branched, respectively. The compounds represented by formulae (I) and (II) may be corresponding chlorides (in formulae or (π) Compounds in which cr is substituted for χ- and compounds represented by χ-γ + (where X has the same meaning as in formula (I) or (II), υ + is a cation, such as Η +, Na + ,, ΝΗ4 + It can be prepared by exchange reaction in an aqueous solution. Iiii Other compounds that can be used with the compounds of the present invention. In addition to the compounds of formula (I) or (II) that generate a continuous acid as described above, the present invention can also be used with other active light or light Compounds of formula (I) or (II) and photoacid generators used together are 100/0 to 5/95, preferably 90/10 to 20/80, more preferably 80/20 to 3 0/70, in moles. The photoacid generator used with these compounds can be selected from photoinhibitors for photocationic polymerization. Photoinhibitors for co-photopolymerization, photodecolorants for dyeing, photofading agents, photoacid generators for microresistors, etc., or two or more mixtures of these agents. Central Bureau of Standards, Ministry of Economic Affairs Specific examples printed by Shellfish Consumer Cooperatives include diazonium salts, such as those described by T.S.Bal et al., Poviv. 21,423 (198); phosphonium salts, such as ammonium salts, such as U.S. patents 4,069,055 '4,069,056, and Re 27,992; scale salts, such as DC, Necker et al., Macromoleclnl 17, 2468 (1 984), CS Wen et al., Teh. Proc Pnnf Rad-Curing A§.IA, p. 478, Tokyo (October 1988), and those described in US Patent Nos. 4,069,055 and 4,069,056, broken town salt, such as jv -28- This paper size applies the Chinese National Standard (CNS) A4 specifications (2 丨 0X297 mm) Printed by the Central Standards Bureau Shellfish Consumer Cooperative_4 322 5 6 A7 A 7 B7 V. Description of the Invention (26)

Crivello et al., Macronolecules. 10 (6), 1307 (19 7 7), Chem. &Amp; Eng. News. Nov. 28, p. 31 (1 988), European Patent 0,104,143, JP-A-2-150848 As described in JP-A-2-2965 14, phosphonium salts, such as JV Crivello et al., Polymer J .. 17, 73 (1985), JV Crivello et al., J. Qrg. Chem ·· 43, 3 0 5 5 (1 9 78), WR Watt et al., J. Polymer Sci .. Polymer Chem. Ed., 22, 17 8 9 (1984), JV Crivello et al., Polymer Bull .. 14, 279 (1985), JV Crivello et al.,

Macromolecules. 14 (5), 1141 (1981), J.V.

Crivello et al., J. Polvmer Sci .. Polymer Chem. Ed., 17, 2S77 (1979), European patents 0,370,693, 3,902,114,0,233,567, 0,297,443 and 0,297,422, U.S. patents 4,933,377, 4,760,013, 4,734,444 and 2,833,827 , And German Patent Nos. 2,904,626, 3,604,580 and 3,6 04,5 8 1, phosphonium salts, such as j, v. Crivello et al., Macromolecules. 10 (6), 13 0 7 (1977) 'and JV

Crivello et al., JL_Polymer Sci: Polymer Chem,

Ed_, 17, 10 4 7 (1979), and bell salts, such as cS Wen et al., T eJL__Proc .__ Conf. Rad. Curing ASAT p. 478, Tokyo (Oct1988); organic halogen compounds, For example, U.S. Patent 3,905,815, JP-B-46-4605 (the term "JP-B" means an approved Japanese patent application), 1 &gt; -A-48-3 628 1,]? -Ya-55-32070 &gt; JP-A-60-239736 &gt; JP-A-61-169835 5 -29- This paper size applies the Chinese National Standard (CMS) A4 specification (210X297 mm) I. ^; 01 Binding J. (Please read the notes on the back before filling this page) P432 25 6 A7 — B7 V. Description of Invention (27) JP-A-6 1-1 6983 7, JP-A-62-5 824 1, JP-A-62-212401, JP-A-63-70243 and JP-A-63-298339; organometallic compounds / organic halides, such as K. Meier et al., J. Rad. Curing. 13 (4), 26 (1 9 8 6), TP Gill et al., In or g. C h em .. 19, 3 0 7 (1980), D. Astruc, Acc. Chem. Res.. 19 ( 12), 377 (1 896), as described in JP-A-2-1 6 1 445; a photoacid generator having an o-nitrobenzyl deprotecting group, such as S. H ay as e et al., J. Polymer S c i., 2 5., 7 5 3 (1 9 8 7), E. Reichmanis et al., J. Polymer Sci ·. Polymer Chem. Ed., 23, 1 (1 985), QQ Zhu et al., J. Photo chem .. 36, 85, 39, 3 1 7 (1 987), B. Amit et al., Tetrahedron Lett. (24) 2 2 0 5 (1973), DHR Barton et al., J. Chem. Soc .: 3 5 71 (1 9 6 5), PM Collins et al.} J. Chem. S η Perkin I, 1 69 5 (1 975), M. Rudinstein et al., Tetrahedron Lett, .., (1 7), 1445 (1 975), JW Walker et al. , L. Am. Chem. S o c .. 1 1 0, 7170 (1 98 8), S, C. Busman et al., J. Imaging Techηo 1 .. 1 1 (4), 191 (1 9 8 5), Yin Fan, a consumer cooperative of employees of the Central Procurement Bureau of the Ministry of Economic Affairs, (#Read the precautions on the back before filling this page) HM Houlihan et al., Macromolecul es 2 1} 2 0 0 1 (1 98 8), P, M. Collins et al., J. Chem. Soc.. Chem. Commun., 5 3 2 (1 972), S. Hay ase et al.,

Macromolecules. 18, 1 7 9 9 (1985), E. Reichmanis et al., J. Electro chem .. Soc .. Solid State Sci. T e chno 1., 13 0 (6), F. M. Houlihan et al., This paper size is in accordance with Chinese National Standard (CNS) A4 (210X297 mm). 4 32 2 5 6 Printed by the Consumer Cooperatives of the Central Bureau of the Ministry of Economic Affairs. A7 B7. 5. Description of the invention (28)

Macromolecules. 21, 2 0 01 (19 8 8), European patents 0,290,750, 0,046,083, 0,156,535, 0,271,851 and 0,388,343, U.S. patents 3,901,710 and 4,181,531,1? A-60- 1 98 53 8 and JP-A-53-1 3 3022; compounds that produce sulfonic acids by photolysis, such as imino-peptidic acid vinegar, etc., such as M. Tunooka et a 1 ·, Polymer Preprints Japan. 3 5 ( 8), G. Berner et.al ·, J. Rad. Curing · 13 (4), WJ Mi js et al., Coating Technol.. 55 (697), 45 (1 983),

Akzo, H. Adachi et al., Polymer Preprints Japan. 37 (3), European Patent Nos. 0,199,672,0,084,515, 0,044,115 and 0,101,122, U.S. Patents 4,371,605 and 4,431,7 74, JP-A-64 -18143, JP-A-2-245756 and JP-A-4-365048; and dihydrazone compounds, as described in JP-A-61-166544. In addition, it is also possible to use a polymer whose main chain or branched chain can introduce a compound or group which generates an acid under light, such as ME Woodhouse et al., J, Am. Chem. Soc.. 104, 5 5 8 6 (1982), S. P. Pappas et al., J. Imaging Sci., 3 0 (5), 2 1 8 (1 98 6), S. Kondo et al., Makromol. Chem, Rapid Commun., 9, 625 (1 98 8), Y. Y amada et al., Makromol. Chem .. 1 5 2, 1 5 3, 1 63 (1 9 7 2), J. V. C ri v el 1 0 et al., J, Polymer S ci .. Polymer Chem. Ed. 1 7, 3 845 (1 979), US Patent 3,849,137, German Patent 3,914,407, JP-A-63-26653, JP- A-55-1 64824 &gt; JP-A-62-69263, JP-A-63- -31-This paper size is applicable to the Chinese National Standard (CNS) A4 specification (21 × 297mm) I: ^-( (Please read the notes on the back before filling out this page)

, 1T, 432256 A7 B7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs. 5. Inventors) 1 4 6 0 3 8, JP-A-6 3-1 6 3 4 5 2, J p-a-6 2 -1 5 3 8 5 3 and J PA-63-146029a In addition, compounds that can generate acid under light can also be used, such as VNR Pillai, Synthesis .. (1), 1 (1 980), A. A bad ef al., I_etrahedron Lett .. (47) 45 5 5 (1971), DHR Barton et al., J. Che m. Soc (C), 3 29 (1970), U.S. Patent 3,779, 77 8 and European Patent 0,12 6,71 2. Among the above-mentioned compounds I which are decomposed under the irradiation of active light or radiation to generate an acid, the following compounds are particularly useful for mixing with the compounds of the formulae (I) and (II): (1) a trihalomethyl group of the formula (PAG1) Substituted humazole compounds, or trihalo compounds substituted with trihalomethyl of formula (PAG 2): N——N // \\ / CC, R201, 0〆c (Y) 3 (PAG1) where R2131 is A substituted or unsubstituted aryl or alkenyl group, R2G2 is a substituted or unsubstituted aryl, alkenyl or alkyl group or -C (Y) 3, where γ is a gas or bromine atom. Specific examples of the subclass compounds are described below, but should not be construed as limiting the scope of the invention. R202. N people NΛ Λ (Y) 3C N. ⑺3 (PAG2) {Please read the notes on the back before filling in this page): Binding. Order -32-This paper size is applicable to China National Standard (CNS) A4 (2iOX297) 漦 32 2 5 6 A7 B7 V. Invention Explanation (3〇

N—N // \\ CH = CH-C, C-CCI3, 〇 &quot; d (PAG1-1)

N——N // \\ CH = CH-C C-CGI3 (PAG1-2)

CH3O

CnJC ^ HgO Ο ο Ν—Ν // \\ CH ^ CH-C C-CBr3;, 〇〆 (PAG1-3) Ν—Ν // \\ CH = CH-C C-CCI3, 〇 / (PAG 1 -4) (Please read the notes on the back before filling in this 1)

Ν—Ν // \\ CH = CH-C C-CCh (PAG Bu 5)

CH = CH Ό ~ ', cr -N \\ C-CCI3 Printed by the Consumer Cooperative of the Central Bureau of Standards, Ministry of Economic Affairs

CH = CH (PAGl-6) Ν—N // \\ CH two CH—C C-CCI3 (PAGl — 7)

; N // \\ CH = CH-C C-CCI3 (PAGl-8) 33- This paper size applies to China National Standard (CNS) A4 specification (210 × 2 · 97 mm) r4 32 2 5 6 A7 B7 V. Invention Instructions 纟 1) CC13 N ^ N Renren C13C N CCi3 • (PAG2-1)

Cl

(PAG2-2)

(PAG2-3)

Cl # N Λ N CC13 (PAG2-4) (Please read the precautions on the back before filling this page) H-pack _

COCH3 Order. ¥ Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs

(PAG2-7)

CI3C N (PAG2-6) 〇CH3

CH II CH N CCI3 (PAG2-8) -34 This paper size is applicable to Chinese National Standard (CNS) A4 specification (2 丨 0X297 mm) Γ * _4 V. Description of the invention f2 A7 B7

.CI3C iN CCh (PAG2 ~ 9)

CH = CH

锵 Emei salt of the following formula (PAG3), or osmium salt of the following formula (PAG4) Ar (R203 \ Shao Z — R204-S '/ r205 (PAG3) (Please read the precautions on the back before filling this page)

'1T Noodles, the Central Bureau of Selective Work of the Shell, Consumer Cooperative, Du printed (PAG4) in the above formulas' Ar1 and Ar2 are each an aryl group with a substituent as needed. Examples of suitable substituents include alkyl, sulkan, cycloalkyl, aryl, alkoxy, nitro, carboxy, alkoxycarbonyl, hydroxy, sulfhydryl and ganglin atoms. R2Q3, R2Q4 and r2G5 are each a substituted or unsubstituted alkyl or aryl group. Preferably, each is a C6_! 4aryl group having a substituent as needed or a Cualkyl group optionally having a substituent. Examples of suitable substituents for the aryl group include a Ci_8 alkoxy group, a Ci_8 fluorenyl group, Pin base, stub base, warp base, and halogen atom 'Maung base -35-' This paper size applies to China National Standard (CNS) A4 specifications (210x297 mm)

广 艚 43225 S A7 B7 V. Description of the invention (Examples of suitable substituents of 33 include c 1-8 alkoxy, carboxyl and alkoxycarbonyl groups. Z'relative ions' include high gas alkanesulfonic anions, such as CF3S03 -, And pentafluorobenzenesulfonic acid anion. In addition, 'R203, r204 is 6, R and R center two, and eight and two can be connected to each other through a single bond or a substituent. The characteristics of such compounds ^ For example, the following, but the scope should not be clearly stated. 屙 疋 屙 疋 本本 (Please read the precautions on the back before filling out this page j, θι Install · -'11 Printed by the Consumer Cooperatives of the Central Government Bureau of the Ministry of Economic Affairs -36- This paper size applies to Chinese National Standard (CNS) A4 specification (210X297 mm) P432 2 5 6 V. Description of invention r) A7 B7

cf3s〇3 (PAG3-1)

〇CH3 CF3SO3 (PAG3-2)

CF3SO3 '^ ~ 1 + ~ &quot; \ z / ~ N〇2 CF3SO3 (PAG3-4)

H3C-^^ Kr-^^-CH3 CF3SO3 (PAG3-5) (Please read the notes on the back before filling out this page) Printed by the Staff Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs

H3C

h3c

CF3SO3 37- This paper size is in accordance with Chinese National Standard (CNS) A4 (2 丨 OX297 mm) w- · 432 2 5 6 A7 B7 V. Description of the invention 抻 (n) C7H15 ^^^-I'-γ ^^ (η) 〇7Η15 CF3SO3, (PAG3-7)

01 V / ~ I + ~ \ ^ ~ C1 CF3SO3 (PAG3-8)

F3C-A 7 ~ Ι + -Λ / -cf3 CF3SO3 (PAG3-9)

CF3SO3 H3COOC COOCH3 (PAG3-10)

Cl CF3SO3 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs +

fcBu— ^ /; —I — &lt; \ /) — CF3SO3 '(PAG3-12) 38- (Please read the precautions on the back before filling this page)

This paper size is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) Glue 4 3 2 2 5 6 A7 B7 V. Description of the invention (36

CF3SO3

CF3S〇3. C1 CPAG3 -14)

CF3S03 (Please read the precautions on the back before filling in this page)

(PAG3-16)

F FF ^ &gt; ~ S〇3 F F k ’Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs

C8F17S03 (PAG3-17) -39- This paper size applies to Chinese National Standard (CNS) A4 specification (2 丨 〇 X 297 mm) P4 32 2 5 6 A7 B7 V. Description of invention (37)

S. CF3SO3 (PAG4-1)

S; C8Fi7S03 · 3 (PAG4-2)

S '3 (PAG4-3)

F F

F F F- \ / -SO3 '(Please read the precautions on the back before filling out this page): Install-h3c

S &quot; -K \ / ^ OC2H5; CF3SO3 (PAG4-4) Order

H3CO

CF3S03 ’ik IH. Printed by the Consumers’ Cooperative, Central Standards Bureau, Ministry of Economic Affairs

(PAG4-6) CF3S〇3 -40-This paper size applies to Chinese national standards (CNS &gt; A4 size (210X297 mm) 骅 4 32 2 5 6 A7 B7 V. Description of the invention (38)

(PAG4-7) CF3SO3 H0'A &C; C (PAG4-8) CF3SO3 (Please read the precautions on the back before filling this page): Pack.

H3CO h3c〇 (PAG4-9) CF3SO3, ', order (n) C4H9 HO' (n) C4Hg

(PAG4-10) CF3SO3 '-kT- Printed by the Consumer Cooperatives of the Central Procurement Bureau of the Ministry of Economic Affairs

CF3SO3 41 This paper size applies to Chinese National Standard (CNS) A4 specification (210X297 mm) P432 25 6 A7 B7 V. Description of invention (39)

CF3SO3

CF3SO3 Ί ----- P Pack I— (Please read the precautions on the back before filling this page) (PAG4-13)

C8? I7S〇3 'Order (PAG4-14) 〇'4 Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs-CH3 CH3 (PAG4-15) CF3SO3' 〇 (PAG4-16) CF3SO3 '-42- This paper is applicable China National Standard (CNS) A4 specification (2f〇X297 mm) • 4 32 2 5 6 A7 B7 V. Description of the invention (40

C1 〇 c-ch2-s 'CF3SO3' (PAG4-17)

0 c-ch2-s

CF3S03 '(PAG4-18)

〇 II C-CH2-S '(PAG4-19) CF3SO3

i? C-CH2 &quot; S +-(n) C4H9 CF3S03 ’(n) C4Hg (PAG4-20) — .., .3 pack — I. Order, Λ (锖 Read the precautions on the back before filling in this 1)

S S '

C8F17S〇3 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs

S (PAG4-21) s'

CF3SO3 (PAG4-22) 43 This paper size applies to Chinese National Standard (CNS) A4 specification (210X297 mm) P4 32 2 5 6 A7 B7 V. Description of the invention (41

s'

S 2CF3SO3 (PAG4-23)

(PAG4-24) OC2

〇 I! / Λ c-ch2-s ^ (PAG4-23J

S03 F F

F F

F Printed by Shellfish Consumer Cooperative, Central Bureau of Standards, Ministry of Economic Affairs 44 (Please read the notes on the back before filling this page)

This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) F432 25 6 A7 B7 V. Description of the invention (42) The phosphonium salts of the above formulas (PAG3) and (PAG4) are known and can be used, for example JW Knapczyk et al., J. Am. Chem So c.. 91, 145 (1 969), AL Maycok et al., J, Ore. C he m .. 35, 253 2 (1970), E. Goethas et al., Bull. S oc. Chem. Bel.g ^, 73, 546 (1 964), HM Leicester, J ,. A.me. Chem. Soc .. 51, 3 5 87 (1 929), JV Crivello et al., J. Polvm. Chem. Ed.. 1 8, 2677 (1 980), US patents 2,807,648 and 4,247,473? -A-53-10 133 1 prepared by the method described. (3) Compound of the following formula (PAG5):

Ar3-S02-S02-Ar4 (PAG5) wherein Ar3 and Ar4 are each a substituted or unsubstituted aryl group. Specific examples of such compounds are described below, but should not be construed as limiting the scope of the invention. (Please read the precautions on the back before filling out this page):

'1T Printed by Shellfish Consumer Cooperative, Central Standards Bureau, Ministry of Economic Affairs-45- This paper size is applicable to the national skirt standard (CNS) A4 size (210X297 mm) 鳜 4 3 2 2 5 6 A7 B7 V. Description of the invention ( 43 C1

S〇2-S〇2 ~ ^ (PAG5-1)

Cl H3c- _S〇2 ~ S〇2 (PAG5-2)

ch3 h3co

so2-so2 .- ^^-och3 (FAGS —3) h3c 0 S02-S02 CPAG5-4)

Cl (Please read the precautions on the back before filling this page).

F3C

S02-S02- cf3 order (PAG5-5)

S02-S02

Cl (PAG5-6) Printed by the Consumers' Cooperative of the Central Government Bureau of the Ministry of Economic Affairs h5c2o

(PAG5-7) S〇2_S〇2

Cl

S02 —S02 (^-(PAG5-8)

Cl-46 This paper size is applicable to China National Standard (CNS) A4 specification (210X297 mm) 32 25 6 A7 B7 V. Description of the invention (44)

S〇2-S02A ^ CH3 (PAG5-9) 〇CH3

Cl

〇CH3 (Please read the precautions on the back before filling out this page)

h3cx HC

S〇2_S〇2 (PAG5-12) Printed by Shellfish Consumer Cooperative, Central Bureau of Standards, Ministry of Economic Affairs

S〇z-S02-^^ (PAG5-14) 47- This paper size applies Chinese National Standard i CNS) A4C grid (210X297 mm) A7 B7 'O 4 4 2 2 5 5 __ 丨 ...____ V 、 DESCRIPTION OF THE INVENTION (45) A sulfonylimide compound of the formula (PAG 7)

X N—CW 〇 (PAG-7) where Y represents alkyl, cycloalkyl, optionally substituted aralkyl, or a group of the formula

or

(Please read the notes on the back before filling this page)

Bi Pack-Printed by the Shelling Consumer Cooperative of the Central Standards Bureau of the Ministry of Economy (Nitro, amine, amino, sulfonylamino, aryl or alkoxycarbonyl); X represents an alkylene group substituted as required, a cycloalkylene group substituted as required, and an alkylene group substituted as required , Or optionally substituted alkenyl. Specific examples of such compounds are described below, but should not be construed as limiting the scope of the invention. -48 MM scale is applicable to Chinese National Standard (CNS) A4 specification (2 丨 0X297 mm) P432 ^ 5 6 A7 B7 V. Description of the invention (46)

0

Me 0

El 〇

2

NO (Please read the notes on the back before filling this page)

.IT ά.-τ Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs 〇

OMe -49-This paper size applies Chinese National Standard (CNS) A4 specification (21〇 × 297 mm) ^ ΨΑ32 2 5 6 A7 B7 V. Description of the invention (47) 〇

〇

0

Guang Yiyi, (Please read the precautions on the back before filling in this page)

Printed by tT-M, Consumer Cooperatives, Central Standards Bureau, Ministry of Economic Affairs

-50-Ningguo National Standard (CNS) A4 specification (2I0X297 mm) applies to this paper. * 4 32 2 5 u A7 B7 V. Description of the invention (48

〇

COMe 〇

NHS02Me 〇

Printed by the Central Consumers Bureau of the Ministry of Economic Affairs, Consumer Cooperatives 〇

OMe 51 '(Please read the notes on the back before filling in this page)

This paper size applies to Chinese national standards (CNS &gt; A4 specifications (2 [0X297 mm) Γ P4 32 2 5 5. Invention description (49 A7 B7 〇

〇Me, (Read the precautions on the back before filling this page) t-Bu Economy

A Printed by the Bureau of Standards and Consumer Products Co.

CI η

Ν〇2 -52- This paper size applies to Chinese National Standard (CNS) A4 specification (210 × 297 mm) 32 2 5 6 A7 B7 V. Description of the invention (500 〇 t-Bu

(PAG7-21) OMe

N—OSO-

Me (PAG7-23)

(PAG7-24) 1 .— ^ --- τ—Hl ^ .— (Please read the notes on the back before filling out this page) Order Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 〇

Me -53 This paper size is in accordance with Chinese National Standard (〇 阳) 8 4 specifications (210 乂 297 mm)-ΓΡ4 32 2 5 6 A7 B7 V. Description of the invention (51)

〇

OMe (Please read the notes on the back before filling out this page) ϊ. 41Τ

2

NO Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 〇

Cl-54- This paper size is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) @ 432 2 5 6 A7 B7 V. Description of the invention (52 〇

OMe 〇 Me

Ο

(PAG7-33) 〇

OSO

OMe (Please read the precautions on the back before filling out this page) Wide-format. Order (PAG7-34) Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs 55 Printed on paper This paper applies the Chinese National Standard (CNS) A4 specification (2! 0 × 297 Mm) Bu Si 4 32

25 S A7 B7 V. Description of the invention (53. is:

N-OSO

No. 2 (PAG7-35) o c

Mg N——OSO: -OMe

Me

(PAG7-37) After t A # quasi-office staff consumption cooperation.

Ph N—〇S〇t

Ph

〇 (PAG7-38) -56- This paper size is applicable to China National Standard (CNS) A4 (2! 0X297 mm)

Me ‘(Please read the notes on the back before filling this page)

Bu Heng 4 32? 5 F A7 B7 V. Description of the invention (54) 〇-nitrofluorenyl-type photoacid generator of the following formula (P A G-8):

R211 C-0-Y4 Η

(PAG8J wherein the substituents R 2 G 7 to R 2 1 〇 may be the same or different, each is a hydrogen atom, Ci-6 group, C5-14 aryl group, fluorene 6-20 aryl group, C3-6 crater group 'Perfluoroalkyl, (: 5-14 perfluoroaryl, nitro, or cyano; R211 is a hydrogen atom C] 匸 6-20 dry group, C3-6 ring pit group, C 丨 _6 two fluoro group 'Or C5-14 square group, the hydrogen atom can be substituted with C t -6 perfluoroalkyl or fluorine atom. Specific examples of such compounds are described below, but should not be construed as limiting the scope of the present invention.

Cu alkyl, or c5. 4 aryl; η is -S〇2-R212; R212 is -6 alkyl, C 5-! 4 aryl, C 5-I with C i-6 alkoxy 4Fangji, the employee of the Central Standards Bureau of the Ministry of Economic Affairs' is fee cooperative society printed -57- Nano scale is applicable to Chinese countries, (Please read the precautions on the back before filling this page)

A7 rP4 32 2 5 6 B7 V. Description of the invention (55) N02 〇HCH2-OS02- &lt; 〇 &gt; ·-n ° 2 (PAG8-1) N02 &lt; ^^ CH2-〇-S02- &lt; ^) ~ 〇CH3 No. 2 (PAG8-2)

"^ 〇2 F-F 〇 ^ ch2-o-so2h〇 &gt; -f No 〇2 (PAG8-3) FFN〇2 &lt; ^^ CH2-〇-S02- &lt; ^ y-CF3 n〇2 ( PAG8-4) N02 CH: 2 — 〇- S〇2CH3 No 〇2 (PAG8-5) No 〇2 CH2 -〇-S02 _ CH3 No 〇2 (PAG8-6) .NO? &Lt; ^^-CH2- 〇-S〇2-CF3 N02 (PAG8-7) •-58-This paper size applies to China National Standard (CNS) A4 (210X297 mm) (please read the precautions on the back before filling out this page) &quot; Binding and printing printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs ^ Ρ432 2 5 6 A7 B7 V. Description of the Invention (volume)

(PAG8-9)

No. 2 f F —CH-O-SO2 ch3 No. 2 F F (PAG8-10)

F (Please read the notes on the back before filling out this page):.

CH-〇-S〇2 ~ CH3 ch3 N02 Employees of the Central Bureau of Standards of the Ministry of Economic Affairs. F Printed by the cooperative N〇2

OCH3 CF3 (PAG8-13) 59 This paper size is applicable to China National Standard (CNS) A4 specification (2 丨 〇 X 297 mm)

.L P4 32 2 5 6 A7 B7 V. Description of the invention (57) N〇2

F F

CH2 — 0 — S〇2 ~~ F CF3 (PAG8-14) f f N〇2

CHg-Q-S〇2 ~ ^^^) ~ CF3 (PAG8-15) cf3 'N〇2

CH2-〇-S〇2 ~ &lt; ^^ CF3 (PAG8-16) ch3 N〇2

CH2_〇 一 S〇2 —oh3 CF3 (PAG8-17) N02

CHg -〇 ™ S〇2-CF3 CF3 (PAG8-18) Printed by the Consumer Cooperatives of the Central Standards Bureau, Ministry of Economic Affairs

CH2 ™ 〇-S〇2 CF3 (PAG8-19)

-60 • (Please read the notes on the back before filling this page)

This paper size applies Chinese National Standard (CNS) A4 specification (2 〖0 X 297mm） r &quot; Ha 4 32 2 5 6 kl B7 V. Description of the invention (58

ch-o-so2- &lt; ^^ ch3 N〇2 〇ch3 cf3

(PAG8-20) No. 2 F F • CH-〇-S〇2 ch3 CF3 F F (PAG8-21) N02 CH-O-SO2-CH3 CH3

F (Please read the notes on the back before filling this page) CF3 (PAG8-22)

Order: Line Consumer Cooperation of Central Standards Bureau of the Ministry of Economic Affairs in India N02

0CH3

CH2-0-S〇2 ~ &lt; ^^ CN (PAG8-24)

N〇2 ′ F P ch2-〇-s〇2 ^ () yp

CN. (PAG8-25) F F -61 The paper size is applicable to Chinese National Standard (CNS) A4 (210X297 mm), 432256 A7 B7 V. Description of the invention (59) N〇2

CH2 — 0-S02 CF3CN (PAG8-26) No. 2

ch2-o-so2-{^^ ch3CN (PAG8-27) N02

CH2-〇-S〇2-CH3CN (PAG8-28) No. 2 CH2 — 〇 —S〇2 — CF3 (PAG8-29) NO2

CN (PAG8-30) CH2-0 ~ S〇2

. (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs

Noz

CN -CE-O-SO2 〇H3 (PAG8-31) 〇CH3 -62. This paper size applies to Chinese national standard (CNS) 'A4 specification (2 丨 0XM7 mm) 432 2 5 6 A7 B7 V. Description of the invention (㈤)

F (PAG8-32)

Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs -63. (Please read the precautions on the back before filling this page)

This paper size applies to Chinese National Standard (CNS) A4 (210X297 mm) Ά32256 Α7 Β7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (61) The above compounds can be used with compounds of formula (I) or (II) Among the photoacid generators used together, it is preferable to use a hormonal imine compound represented by the formula (PAG7) and a 0-nitrogenyl type photoacid generator represented by the formula (pAGq). (Iji) It is affected by an acid. Decompose and add solubility cross-linking and alkali slag hydrolysis of the group in the alkali developing 剞 (hereinafter also referred to as 醢 public fresh group): According to the present invention, the dissolved resin is on the main chain or side chain. Acid-decomposable resins, or resins with acid-decomposable groups on the main chain and side chains. Among these resins, resins with acid-decomposed groups on their side chains are preferred. Groups' formula-COO-A0 group and formula-〇_B0 group as appropriate examples. As for the part containing such a group, -R 0 _ C 〇〇_ A 0 or -Ar-O- B &quot; 5 is preferred. Here, A. represents the formula _c (r01) (r02) (r〇3), or _c (r〇4) (r05) () _ r06, B. represents the A or formula -.C O_〇_A〇 group, and R0, R0i, r02, r03, rcm, R'R. 6 and Ar are as defined above. Suitable examples of decomposition base diagrams include methyl sand Alkenyl relay group, cumyl ester group, acetal group, tetrahydropiperanyl ether group, tetrahydropiperanyl ester group, enol ether group, methyl alcohol ester group, tertiary An alkyl ether group, a tertiary alkyl ester group, and a tertiary alkyl carbonate group β in the above-mentioned groups, which are more reliably decomposed by an acid, such as a methyl crushed ether group 'B The acid group and the tetrahydrofuran group can fully achieve the effect of the present invention. The combination of the aforementioned alkali-dissolving resin and the photogenic agent according to the present invention can claim high sensitivity and local resolution. It will make the photoresist type thin, and it will not make the photoresist type -64-(please read the precautions on the back before filling this page). Installation. -S -Τ · ί Γ Γ corpse, 4 32 2 5 6 Printed by the Central Standards Bureau of the Ministry of Economic Affairs and Consumer Cooperatives A7 B7 V. Description of the invention (62) The top of the contour is "T" and controls the contour to deteriorate or suppress the stationary wave (s tationary wave) does not cause the retention and suppression of the photoresist type. Among them, the acetal group is particularly preferred. In terms of the acetal group, the formula _〇_C (R04) (R05) -〇-R06 Is better. The acid decomposition group is connected to the resin with _Ar-OC (R04) (R05) -〇-R ° 6. The 'foot' and foot 05 are the same or different, Each represents a hydrogen atom, an alkyl group, a cycloalkyl group, a fluorenyl group or an aryl group, and RG6 represents an alkyl group or an aryl group. Moreover, Han ^ and Rule ^ 5 can be combined into a ring. AΓ is a double bond or a higher-valent monocyclic or polycyclic aromatic group, and may have a substituent thereon. Suitable examples of such alkyl groups include fluorenyl groups having 1 to 4 carbon atoms, such as methyl, ethyl, propyl, n-butyl, secondary butyl, and tertiary butyl; such cycloalkyl Suitable examples include cycloalkyl having 3 to 10 carbon atoms, such as cyclopropyl, cyclobutyl, cyclohexyl, and adamantyl; suitable examples of such alkenyl include 2 to 4 carbons Atomic fluorenyl groups such as ethenyl, propyl, allyl, and butenyl; suitable examples of such aryl groups include aryl groups having 6 to 14 carbon atoms, such as phenyl, di Tolyl, tolyl, cumyl, naphthyl, and anthracenyl. In terms of substituents, examples thereof include a hydroxyl group, a southern atom (fluorine, gas, bromine, and iodine), a nitro 'cyano' alkyl group as described above, and an alkoxy group such as fluorenyloxy, ethoxy, and hydroxyethoxy , Propoxy, hydroxypropoxy, n-butoxy, isobutoxy, secondary butoxy, tertiary butoxy, alkoxycarbonyl, such as methoxycarbonyl'ethoxycarbonyl, arane Groups such as fluorenyl, ethoxyphenyl, and cumyl, aralkyloxy, fluorenyl, such as formamyl, acetamyl, butylamyl, benzamidine-65- (Please read the precautions on the back before filling out this (Page) .Packing'-order. This paper size applies Chinese National Standard (CNS) (210 × 297). A7 B7 V. Description of the invention (63) base, cinnamon base, and glutinous rice, # w Butyryloxy, the aforementioned alkenyl 'fluorenyloxy such as Wyloxy, fluorenyloxy, dipropyloxy' and butanyloxy 'the aforementioned aryl, aryloxy such as phenoxy And aryloxycarbonyl 'such as benzoyl. Specific examples of preferred acetals in the present invention are as follows: CH3 ch3 -0-C-0-C-CH3 H i ch3 ch3 〇'g'〇-CH2-CH3 Jd. (Please read the back Note: Please fill in this page again) 6¾ Pack-gh3 / CH3 • oc ~ o-ch2-ch H 'ch3 ch3 〇-0-ch2ch2ch2ch3

, 1T

CH3 -O-G-0 H —〇, ch3

X CH30 ch3 .0 '

Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs, the following formulas are better than others: ch3 ch3 〇 ~ c—oc—ch3 Η I ^ ch3 66 This paper size applies the Chinese National Standard (CMS) Α4 specification (210X297 mm) ) 64 32 2 5 6 A7 B7 Printed by Shellfish Consumer Cooperative, Central Stairway Bureau of the Ministry of Economic Affairs 5. Description of the invention () As the master resin, it is preferable to use the aforementioned acid decomposition base diagram as a side branch, with -0H Or C 0 0H alkali-soluble resin, preferably a resin having -RG-COOH or -Ar-OH on its side branch. Suitable examples thereof are the following acid-free methyl-group-soluble alkali-soluble resins (hereinafter abbreviated as "alkali-soluble resins,"), including poly (styrene-based) varnish resins and derivatives thereof. For example, In the present invention, hydroxystyrene units are preferably used. (Preferably poly (para-stilbene styrene), p-hydroxystyrene and m-hydroxystyrene copolymer, p-stilbene and o-hydroxystyrene copolymer, P-hydroxystyrene and styrene copolymers) alkali-soluble resins, alkyl-substituted hydroxystyrene resins, such as 4-mercapto-3-fluorenyl hydroxystyrene resin and 4-hydroxy-3,5-dimethyl Styrene resins and resins prepared from alkylated or acetylated OH groups of the foregoing resins are used as parent resins. In addition, when a part of the phenolic core (up to 30% of the total phenolic core) of each of the above resins is used. ) When hydrogenated, the transparency of the resin will increase, so that the formed resin achieves the desired effects in sensitivity, resolution, and right-angle contour formation. More specifically, the above-mentioned dissolution testing resin as the mother resin includes acid testing varnish resin, Acetone-pyrophenol resin, poly (hydroxyl Based styrene), poly (based styrene) substituted with alkene or alkyl, hydroxystyrene-N-substituted cis-butylene diimine copolymer 'portion of 0-alkynyl or 0-vinyl Poly (trans-styrene) 'styrene-maleic acid copolymer, carboxyl group-containing methacrylic resin and its derivative' styrene-short-based styrene copolymer and hydrogenated poly (trans-styrene), However, these resins are not meant to limit the scope of the present invention. In terms of the dissolving resin used as the master resin in the present invention, an example is Panlu varnish resin having an alkali-dissolving resin based on styrene units (preferably including polymer -67- This paper size is applicable to China National Standards (CNS) A4 scale (210X297 mm) (Please read the precautions on the back before filling out this page) Packing ^ * 43225 6 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs Preparation of A7 B7 V. Description of the invention (65) (hydroxystyrene) 'P-hydroxystyrene and m-hydroxystyrene copolymer, p-light styrene and o-hydroxyphenylethyl fluorene copolymer, p-hydroxystyrene and styrene Copolymer), alkyl substituted styrene resin, 4-kiloyl_3-methyl light styrene resin and 4-ceryl · 3,5-dimethyl styrene resin, and resins prepared by calcining or ethylating the aforementioned resins, in addition to the above Outside the resin 'partially hydrogenated poly (hydroxystyrene), and partially hydrogenated phenol while varnish resins. The term "poly (styrene-based styrene)" used in the present invention includes at least one selected from the group consisting of early-stage polymerization Polymers, para-styrene monomers, meta-super phenyl ethyl acetamidine monomers, o-hydroxyphenyl ethyl fluorene monomers, and hydroxy styrene monomers with Ci "alkyl groups in the ortho position. The resin is used as the master resin. In this way, the dissolution rate in alkali is at least 170 A / s when measured with 0.261 trimethylammonium hydroxide (TMAH) at 23 ° C, preferably It is at least 33 people / second. In addition, from the viewpoint of achieving a right-angle profile, it is necessary to use an alkali-dissolving resin, which can transmit a high percentage of far-ultraviolet light or excimer laser beam. More specifically, when the dissolving resin is tested to form a 1 micron thick film, the resin film needs to have a transfer percentage of 20 to 80% at 248 nm. Examples of specific dissolving resins that are more suitable as a master resin include, from the foregoing point of view, 'including poly (based on styrene), hydrogenated poly (based on styrene), and halogen- or sulfonyl-substituted poly (hydroxy Phenylethyl fluorene), part of the 0-fermented poly (light styrene) 'styrene-hydroxystyrene copolymer, and hydrogenated novolac resin. The best alkali-soluble resin as the mother resin is poly (hydroxystyrene). This -68- paper rule ¥ ^ Chinese national standard ¥ _ ((: 阽) 8 4 gauge Pan (210 father 297 male Chu)- {Please read the precautions on the back before filling this page): Binding and ordering A7 B7 V. Description of the invention (66) It is prepared by anionic living polymerization and has a narrow molecular weight distribution. A suitable distribution coefficient of such poly (hydroxystyrene) is 10 to 40, preferably 1.0 to 3.5. The resin having an acid-decomposable group can be prepared by reacting an acid-decomposable group with an alkali-decomposing resin, or by copolymerizing an alkali-dissolving resin monomer with an acid-decomposable group and other monomers, such as European Patent 0,254,853, Tϋ A 25850 'JP-A-3-223 860 and JP-A-4-25 1259. According to the present invention, specific examples of the resin having an acid-decomposed fluorene are shown below, but should not be construed as limiting the scope of the present invention. -69 This paper is in accordance with China National Standard (CNS) A4 specification (210 X M7 mm) ΓΈ4 32 2 5 6 at B7 V. Description of invention (67)

CH2)-CH2

fCH-CH2 ^--&lt; GH-CH2 &gt;

^ ch-ch2)-

O-GH-O-CH3 OH CH3 (iv) fCH-CH2)--(CH-CHZ &gt; -fCH-CH2)-(Please read the precautions on the back before filling this page}

O-CHp-C-O-tBu II 0. (V)

OH 0-CH2-C -〇-u '0 (vi) -iCH-CH2F- (CH- CH2MCH-CHZ ^--f CH-CH2) —f CH-CH2)-

Order Printed by Zhengong Consumer Cooperative, Central Standards Bureau, Ministry of Economic Affairs OH O-CHp-C-O-tBu II 0 (vii)

H Ύ OH Ό)

〇One CII2 One C —〇 _ tBu Jl 〇

OH

This paper size applies to China National Standards (CNS) from specifications (210X297 mm) ^ P4 32 2 5 b A7 B7 V. Description of invention (68) ~ iCR-CB.zf

0-CH? -C-0-C ii I ° (X) GH3 fCH2CH)-

ch3 -fC-CH2) — ch3 coo-c

ch3 tCOO-CH3 .- I ·: ·.

—CH) — i I COOCH3 COOCH3 GOO-tBu (xii) ch3 -iCHz-Cf- CH3 1CH2-C BU ‘C 0 0 — CH 2 ~

COO

(xiii) (Please read the precautions on the reverse side before filling out this page)

Bu Yi 4 32 2 6 A7 B7 V. Description of the invention (69

(xvi) (xvii) 0-CH2-C-〇-tBu 0 ch3 1CH2-C)-(Please read the precautions on the back before filling in this 1)

〇tBu I coo-ch2ch2 ~ oh (xviii)

(xix)

〇 ~ N 〇〇

〇-C-〇tBu OH [| 〇 Printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs

(xx) Chinese paper standard (CNS) A4 specification (210X297 mm) 32 2 5 8 A7 B7 V. Description of the invention (70ch3 -fCH-CH25 ~ (C-CH2)-~ fCH-CH2 )-COO-tBu

ΌΗ (xxi) 〇-CH-〇-C4Hgt 〇H (xxil) CH3

(xxiii) 0 (Please read the precautions on the back before filling in this page) Pack. CH3 ch3

i I

-fC &quot; CH2) —-(C-CH2) — I I COO-tBu C00-CH2, \ ^ l \ ^ (xxiv) -iCPI-CH2) -fCH_CH2 Bu

OH (XXV) Printed by employees of the Central Bureau of Standards of the Ministry of Economic Affairs

OH (xxv i) 〇-CH-〇-C4H9n

CH 3 -73 This paper size applies to China National Standard (CNS) 8 4 specifications (21 × 297 mm). '4 4 2 2 Α7 Β7 V. Description of the invention (71 Printed on the staff consumer cooperative of the Central Standards Bureau of the Ministry of Economic Affairs Among the exemplary alkali-soluble resins having an acid-decomposing group, the resins (ii) (iv) (xiii) '(xv), (xxii)' (χχν) and (xxvi) are better than others. The crosslink can have any structure. However, the crosslinked structure must have at least a part of the group that can be decomposed in the presence of acid. In this type of acid decomposition group, acetal bonding represented by -C-0-C- An example is an oxidized ether represented by _〇_ and _〇_. An acetal bond is particularly preferred. Regarding resins protected by an acetal group as an acid decomposition group, cross-linking It can be introduced in the following manner. Moreover, as long as the same effect can be achieved, it can also be introduced in other ways. When protecting poly (acrylic styrene) with acid-decomposing groups, at least two phenolic hydroxyl groups are added in a small amount. This compound can be added on the same or different chains of poly (hydroxystyrene) molecules. A compound having at least two phenolic hydroxyl groups per molecule forms a cross-linking β. According to the present invention, the cross-linking thus formed can ensure an improvement in the thermal resistance of the photoresist. It is preferred that the cross-linking of the present invention be carried out by having at least two phenolic compounds. Compounds based on phenolic hydroxyl groups on an alkali-soluble resin are reacted with alkyl vinyl ether compounds. Compounds having at least two phenolic hydroxyl groups for cross-linking are not particularly limited. However, aromatic compounds are used for exposure High absorption of active light or radiation in the ultraviolet region is not required. Examples of such compounds having at least two hydroxyl groups include 1,4-dihydroxycyclohexane, 2,2-bis (V- Hydroxycyclohexyl) propane, tris (4, hydroxycyclohexyl) ethane and pentaerythritol. However, these examples are not to be construed as limiting the present invention. The average ratio of compounds added with at least two phenolic hydroxyl groups for crosslinking is − 74- The paper scale is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling out this page) θί Installation ·, ιτ 黩 32 4 32 2 5 6 A7 B7 V. Description of the invention (72 0 .01 to 10%, preferably 0.05 to 5%, particularly preferably 0 to 3%. This is based on the number of undissolved resin-soluble groups (brewing groups, benzyl groups, etc.) or more. The number of alkali-dissolving groups before the acid decomposition group is protected is β. As for the alkyl vinyl ether compound, a compound represented by the following formula (X) is required.

R 11,

• R 13

R 12 14 Employees of the Central Standards Bureau of the Ministry of Economic Affairs_Consumer Cooperatives, where the substituents RI to R 3 may be the same or different, and each substituent is a hydrogen atom, alkyl, propyl, aralkyl, or cycloalkyl; R, 4 is alkyl, allyl'aralkyl or cycloalkyl. In addition, R!! Can be combined with R 丨 2 or R, 3 to form a 5 _ or 10 -membered carbon ring or a bond containing -0-, -S-, -so2-or / and -n (r15) _ Heterocyclic. R i 5 is alkyl, allyl or aralkyl. In addition, Ri 2 can be combined with R, 4 to form a 5- to 8-membered ring containing oxygen and carbon atoms. In the aspect of formula (X) represented by Rh to R15, suitable examples are those having 1 to 4 broken atoms, such as methyl, ethyl, propyl, n-butyl, 5 secondary butyl, and tris. Butyl. As for allyl, vinyl is preferred. In the case of aralkyl, suitable examples are those having 7 to 10 carbon atoms, such as fluorenyl, ethoxyphenyl, and cumyl. As for the cycloalkyl group, suitable examples are those having 3 to 10 carbon atoms, such as cyclopropyl, cyclobutyl, cyclohexyl, and adamantyl. Examples of the 5- to 10-membered carbocyclic ring formed by the combination of R M and R! 3 or R, 2 include cyclohexyl, cyclopentyl, and cyclobutyl. The heterocyclic ring formed by the combination of R ii and R, 3 or R 12 includes -0-, -S-, -S02-, or / and -N (R15) · bonds. Examples include the following: -75- The national standard of this paper is applicable (CNS) A4 (21 × 297 mm) (Please read the precautions on the back of Min Min before filling out this page). Packing. The booklet t 矣 shall be η X Consumption Cooperative printed "Sheng Sheng 32 25 6 V. Structure of Invention Note (73):

s- Α7 Β7

o2s- 0 °

R

'fy, HN- ~~ &gt; 〇 (Please read the notes on the back before filling out this page)-Installation · The above rings can also be replaced. As for the 5- to 8-membered ring containing oxygen and carbon atoms formed by R, 2 and Rm, examples thereof are tetrahydropiperanyl and tetrafluorfuranyl. The amount of alkyl alkenyl ether to be added depends on the ratio of solids to solids required for acid decomposition. The content ratio of Sa_. Decomposition base circle in tree moon a is represented by b / (b + s), where b is the number of solid decomposition groups in tree such as I, and s is alkali dissolution in the resin that is not protected by acid decomposition groups. The number of groups'. A suitable content ratio is from 0.0003 to 0055, preferably from 0.08 to 0.45, and more preferably from 0-12 to 0. Resins having an acid-decomposed radical content ratio larger than the above-mentioned Fan Yuan are not needed because they cause film shrinkage after pEB to cause poor adhesion to the substrate and foaming. On the other hand, when the content ratio is smaller than the above range, it is difficult to form a good quality image, including a high resolution. In addition, when synthesizing the resin of the present invention, an appropriate proportion of other comonomers may be added to control the resin breaking point and the like. The weight I average molecular weight (Mw) of the resin with cross-linking and acid-decomposing groups is larger than the size of this paper. It conforms to the Chinese National Standard (CNS) A4 specification (Tiox ^ h ^ order

.I--κ — I! P4 32 2 5 6 Printed by member of the Central Standards Bureau of the Ministry of Economic Affairs, M Consumer Cooperative A7 B7 V. Description of Invention (74) It is preferably in the range of 2,000 to 200,000. When 1 ^ is less than 2,000, the thickness of the film in the unexposed area will be greatly reduced due to development; at the same time, when Mw is greater than 200,000, the resin's dissolution rate in the test will be slower, reducing sensitivity. Therefore, the resin of the present invention needs to be between 5,000 and 150,000, preferably between 8,000 and 100,000, and particularly preferably between 10,000 and 80,000. In terms of molecular weight distribution, the degree of dispersion (Mw / Mix) of the resin of the present invention needs to be between 1.0 and 4,5, preferably between 0 and 3, and particularly preferably between 1.0 and 3.0. It is not necessary to use a resin with a dispersion greater than 4.5 as it will cause a reduction in resolution and thermal resistance. The smaller the dispersion of the resin, the greater its thermal resistance. 'The better the image forming characteristics (profile, defocus latitude, etc.) °, where' weight average molecular weight is defined as the gel penetration color Layer analysis is based on radon measured on the basis of polyethylene. The dissolution rate of the resin having cross-linking and acid-decomposing groups of the present invention varies with the amount of cross-linking and acid-decomposing groups. The dissolution rate of this resin in an alkaline aqueous solution is reduced by an increase in crosslinking or acid-decomposing groups, and is increased by a decrease in crosslinking or acid-decomposing groups. To enhance the properties of the light blocker, which are mainly affected by the opposite of the dissolution of the exposed and unexposed areas, success can be achieved by increasing only the amount of acid-decomposed groups introduced. However, the introduction of too many acid-decomposable groups sometimes causes the film to dry and shrink after exposure, the contours deform, and it is not easy to stick to the substrate. On the other hand, in order to expand the exposure range, such as the exposure range and processing range, success can be achieved by controlling the dissolution rate of the specific resin used. Therefore, the resin of the present invention has become a good light-blocking resin because the acid-decomposed group and the cross-linking are introduced into the alkali-dissolved resin by separate reactions to make the amount of the acid-decomposed group and the cross-link independent. China National Standards (CMS} A4 Regulation ^ (2i0X297mm) ”(Please read the precautions on the back before filling this page) • Installation ·

Glue 4 32 2 5 S A7 —---- B7 V. Explanation of the invention (π) is changed so that the dissolution rate can be controlled within the required range. As a result of tireless research, it has been found that the satisfaction of the following two requirements is the required criterion for the effect of the present invention to be successfully achieved: 1. The acid-decomposable group is introduced into the introduceable position of the resin of the present invention in a ratio of at least 0 mole%. 2. The alkali dissolution rate of the resin of the present invention is not more than 丄 nm / s when measured at 23 ° C with an aqueous solution of tetramethylammonium hydroxide (TMAH) of 0 3! Preferably, the alkali dissolution rate is from 0 nm to 1 μm / s, especially from 0.2 μm / s to 0.8 nm / s. The resin having a crosslinking and acid-decomposing group according to the present invention may be used as a mixture of two or more kinds thereof. For example, a resin having a group capable of being decomposed by an acid, such as an acetal group, may be used in a mixture with a resin having a group difficult to be decomposed by an acid, such as a tertiary alkyl ester group. These resins according to the present invention are used at 40 to 98% by weight, preferably 50 to 95% by weight, of the total solids (excluding solvents) in the light-sensitive composition. In addition, an alkali-soluble resin having no acid-decomposable group may be added to the light-sensitive composition to adjust the solubility in the alkali. Printed by the Consumer Cooperatives of the Central Bureau of Procurement, Ministry of Economic Affairs The aforementioned acid generators and the aforementioned resins with cross-linking and acid hydrating groups need to be mixed with the following acid-decomposition low-molecular-weight dissolution inhibiting compounds. Wherein the content of the dissolution inhibiting compound is 3 to 45% by weight, preferably 5 to 30% by weight, and more preferably 10 to 20% by weight, which is based on the total solids in the light-sensitive composition. (Except for solvents). [I_V] Other alkali saccharum that can be used in the present invention: In the present invention, other alkali-soluble resins (or insoluble in water but soluble -78-) are required. This paper is in accordance with Chinese National Standard (0) 8 ( 21〇 &lt; 297 Gongchu) printed r * 4 322 5 6 A7 B7 printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (76) Resin in aqueous solution). Specific examples of usable dissolving resins include novolac resins, hydrogenated novolak resins, acetone pyrolysis resins, poly (0-hydroxystyrene), poly (m-hydroxystyrene) 'poly (p-hydroxybenzene Ethylene), hydrogenated poly (hydroxystyrene), self-substituted or alkynyl-substituted poly (kisylphenethylfluorene), styrene-N-substituted maleic amine copolymers' 〇 / p_ and m / p-light phenyl ethyl fluoren copolymers whose poly (hydroxystyrene) is partially alkylated (e.g. its η-methylated, 1-methoxyethylated, i- Ethoxyethylated, 2-tetrahydropiperanylated or tertiary butoxycarbonyl fluorinated poly (hydroxystyrene) 'alkylated at 5-30 mole%), Its ◦ fluorenyl partially fluorinated poly (hydroxystyrene) (for example, its fluorenyl ethylated, tertiary butoxycarbonylated poly (hydroxystyrene), its fluorinated ratio is 5-3 0 % Mole), styrene maleic anhydride copolymer, styrene hydroxystyrene copolymer, α_τ-based styrene-ethyl styrene-hydroxyphenylethyl fluorene copolymer, carboxyl-containing methacrylic resin And its derivatives, but these examples should not be construed as limiting the scope of the invention. Among these alkali-dissolving resins, novolac resins, poly (0-hydroxystyrene), poly (m-hydroxystyrene), poly (ρ-hydroxystyrene), copolymers of these hydroxystyrenes, alkanes -Substituted poly (hydroxystyrene), partially 0-alkylated or 0-fluorinated poly (hydroxystyrene), styrene hydroxystyrene copolymer, α-fluorenylstyrene-hydroxystyrene copolymer The thing is particularly good. The above-mentioned novolak resin can be prepared by using a specific monomer as a main component and performing an addition condensation reaction with an aldehyde in the presence of an acid catalyst. As for specific monomers, phenol, cresol (such as m-cresol, p-cresol, and o-cresol), xylenol (such as 2,5-diphenylbenzene-79-)- Applicable to China National Standard (CNS) A4 specification (210 X 297 mm) (Please read the precautions on the back before filling out this page) Binding. Order &quot; f! 432 2 B ^ A7 B7 Employee Consumer Cooperatives, Central Standards Bureau, Ministry of Economic Affairs Printed 5. Description of the invention (77) Phenol, 3,5-xylenol, 3,4-xylenol, 2,3-xylenol), alkylphenol (such as m-ethylphenol, p-ethylphenol , O-ethylphenol, p-tert-butylphenol, p-octylphenol, and 2,3,5-trimethylphenol), alkoxyphenols (such as p-methoxyphenol, m-methoxyphenol, 3 , 5-dimethoxyphenol, 2-methoxy-4-methylphenol, m-ethoxyphenol, p-ethoxyphenol, m-propoxyphenol, p-propoxyphenol, m-butoxyphenol And p-butoxyphenol), dialkylphenols (such as 2-methyl_4-isopropyl-based brewing), m-gas brewing ·, p-chlorine brewing ·, o-qi, di-acryl biphenyl, bis Phenol A, phenylphenol, resorcinol, and resorcinol "However, these examples are not combined It should not be seen as limiting the spirit of the invention.

Examples of specific aldehydes that can be used include formaldehyde, paraformaldehyde, acetaldehyde, dialdehyde, benzamidine, phenylacetaldehyde, α-phenylpropylaldehyde, β-phenylpropylaldehyde, o-hydroxybenzaldehyde, M-hydroxybenzaldehyde, p-hydroxybenzaldehyde, o-benzaldehyde, m-benzaldehyde, p-chlorobenzaldehyde, o-nitrobenzaldehyde, m-nitrobenzaldehyde, p-nitrobenzaldehyde, p-methylbenzene Formaldehyde, p-ethylbenzaldehyde, p-n-butylbenzaldehyde, furfural, chloroacet, and its acetal compounds, such as gas ethyl, while diethyl acetal. Among these, formic acid is particularly preferred. These aldehydes can be used alone or as a mixture of two or more thereof. In the case of the acid catalyst, hydrochloric acid, sulfuric acid, formic acid, acetic acid, and oxalic acid can be used. The weight average molecular weight of the novolak resin prepared in the above manner needs to be 1,000 to 30,000. When the weight-average molecular weight is less than 1, 000, the thickness of the film in the unexposed area is greatly reduced due to development; when it is increased to more than 30,000, the development speed becomes slower. The weight-average molecular weight of the novolak resin used is particularly preferably from 2,000 to 20,000. This paper size is applicable to Chinese National Standard (CNS) A4 specification (210X297 male thin), outfit --------- 1T ------ j • (Please read the note on the back W before filling in this J) Α7 Β7 Show 4 3 2 2 5 3 —-V. Description of the invention (78) Except for the phenol varnish resin, the above-mentioned dissolving resins include poly (basic styrene), its derivatives and hydroxystyrene copolymers, and their weight The average molecular weight needs to be at least 2,000, preferably 5,000 to 20,000, more preferably 10,000 to 100,000. From the increase in thermal resistance of the photoresist film, its weight average molecular weight It must be at least 25,000. In addition, the above weight average molecular weight needs to be determined by coagulation and permeation chromatography based on polystyrene. The above-mentioned alkali-soluble resins may be used alone or in a mixture of two or more kinds thereof. a Its proportion should be less than 60%, preferably 40% by weight, of the total solids (excluding solvents) in the light-sensitive composition. When the amount of such resins exceeds 60% by weight, it will not affect image formation. Desired effect, because the film can be significantly thinned. Inhibition of molecular acid decomposition and dissolution inhibition. In the present invention, a low molecular acid decomposition and dissolution inhibiting compound is used. As used herein, "low molecular acid decomposition and dissolution inhibiting compound" means a compound having a molecular weight of not more than 3,000 'which A chemical structure is a phenolic compound whose acid-decomposing group is introduced into a single structure, and becomes soluble in a base when an acid acts thereon. The low-molecular acid-decomposition-dissolving inhibiting compound usable in the present invention is such a compound that has at least There are two acid-decomposing groups, and in addition to the atoms contained in the acid-decomposing group, at least 8 bonding sources are located between the two acid-decomposing groups furthest from each other. In particular, the acid-decomposing used in the present invention The dissolution-inhibiting compound must have at least two acid-decomposing groups, in addition to the original content contained in the acid-decomposing group, at least &quot; 81-This paper size applies to China National Standard (CNS) A4 specification (2! 0 × 297 male thin)- ---- (Please read the precautions on the back before filling this page)-Equipment_ Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 4 32 2 5 6 A7 B7 V. Description of the invention (79 have 10 Bonding atoms, preferably at least 11 bonding atoms, more preferably at least 12 bonding atoms, located at two acid-decomposing groups furthest apart from each other. Countries; or at least three acid-decomposing groups In addition to the atoms contained in the hydrazone decomposition group, there are at least 9. bonding. Luzi, preferably at least) bonding atoms, preferably at least 11 bonding atoms, located at the two most apart from each other. The distance between the acid decomposing groups is far away. In addition, the upper limit number of the bonding atoms is preferably 50, more preferably 30. There are at least 3, preferably at least 4 acid-decomposing groups in the acid-decomposition dissolution inhibiting compound. Even when there are two acid-decomposing groups, as long as the acid-cleaving groups are located at a certain distance or more from each other, there is a significant ability to inhibit the alkali from dissolving the resin. In addition, the distance between the acid-decomposable groups of the present invention is expressed by the number of bonded atoms in which the acid-decomposable group and the acid-decomposable group 圑 are linked. For example, the distance between the acid-decomposing groups of the following compounds ⑴ and ⑵ is represented by 4 bonding atoms; while in the lower compound. Compound ⑶ is represented by 12 bonding atoms: 0-B1 (1) C Please (Please read the notes on the back before filling out this page). Packing. 、 1α Printed by the Consumers' Cooperative of the Central Government Bureau of the Ministry of Economic Affairs

A ° -〇〇C-1CH2 ~ 2CH2-3CH2-4CH2-COO ~ AC

ch2-dch2- ch3

ch3 (2) (3) -82 Form paper recognition of financial wealth_ 家 转 (CNS) (2 [〇 &gt; &lt; 297 Gongchu 5. Inventive note (80) A7 B7 Employee consumption cooperation of the Central Government Bureau of the Ministry of Economic Affairs Printed, -COO-A0 and -〇 · Β〇 are acid-decomposing groups. In addition, the acid-decomposition dissolution inhibiting compound used in the present invention may have one or more acid-decomposing groups on a benzene ring. It is preferred to use a compound with a skeleton, in which each benzene ring has an acid-decomposing group. In addition, the molecular weight of the acid-decomposition-dissolution inhibiting compound used in the present invention must be not more than 3,000, preferably 5,000 to 3,000. 0.00, more preferably 10,000 to 2,500. In a preferred embodiment of the present invention, the portions containing the acid decomposition group 分解 of the formula _C〇__A (^^ _ 〇_B〇 are respectively represented by the formula _RI C 0 0 _ a0 and _ Ar-0 -B ^ 6 Here, A0 represents the formula _c (R01) (r02) (r〇3), _Si (RtH) (R〇2KR〇3) or -C (R04) (R05) _〇_R〇6 group; B〇 represents a (^ _ c〇_〇a〇. RW 'RG2, RQ3, feet 04 and feet 05 can be the same or different, each represents Hydrogen atom, alkyl, cycloalkyl, fluorenyl or aryl; rM represents alkyl or aryl: The prerequisite is that two of R01, R02 and R2 are not hydrogen atoms. Therefore, two of R0 1, R0 2 and R0 3 can be bonded to each other to form a ring, and two of RG4, R05 and R06 can also be each other. Synthesize one ring. Ro represents a divalent aliphatic or aromatic hydrocarbon group that is optionally substituted, -Ar- represents a monocyclic or polycyclic ring, and optionally an aromatic group that has at least two bonding bonds. Wherein, Examples of suitable alkyl groups include alkyl groups having 1 to 4 carbon atoms, such as methyl, ethyl, propyl, n-butyl, secondary butyl, and tertiary butyl; examples of suitable cycloalkyl include Cycloalkyl groups having 3 to 10 carbon atoms, such as cyclobutyl, cyclohexyl, and adamantyl; examples of suitable alkenyl groups include fluorenyl groups such as vinyl, propenyl, having 2 to 4 carbon atoms , Allyl and butenyl; -83- This paper size applies to Chinese National Standard (CNS) A4 specification (210X297 mm) (Please read the precautions on the back before filling in this page) Λ7 .. · · Order B4 3 2 2 5 6 A7 B7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (81) Examples of suitable aryl groups include 6 to 14 Aryl groups of carbon atoms, such as phenyl, xylyl, tolyl, cumyl, fluorenyl, and anthracenyl. Examples of the substituents of the above-mentioned fluorene may include a hydroxyl group, a halogen atom (such as fluorine, Chlorine, molybdenum, alkoxy, cyano, oxo, thio, alkoxy (such as methoxy, ethoxy, hydroxyethoxy, propoxy, isopropylpropoxy, n-butoxy, Isobutoxy, secondary butoxy, tertiary butoxy), alkoxycarbonyl (such as methoxycarbonyl, ethoxycarbonyl), aralkyl (such as hexyl, ethoxyphenyl, cumyl ), Aryloxy, coolyl (such as fluorenyl, ethyl, fluorenyl, benzyl, cinnamyl, amyl), oxy (such as butyl), the above olefin A radical, a quinyloxy group (such as a vinyloxy group, a propenyloxy group, an allyloxy group, a butenyloxy group), the aforementioned aryl group, an aryloxy group (such as a phenoxy group), and Aryloxycarbonyl (for example phenylfluorenyloxy). Suitable examples of such acid-decomposing groups include a silyl ether group, a cumyl ester group, an acetal group, a tetrahydropiperanyl ether group, an enol ether group, an enol ester group, and a tertiary alkyl ether. Group, tertiary alkyl ester group, and tertiary alkyl carbonate group. Among these groups, tertiary alkyl ester group, tertiary alkyl carbonate group, cumyl ester group, and tetrahydropiperan Ether group is better than others. Examples of suitable acid-decomposition-dissolution-inhibiting compounds include compounds prepared by combining part or all of the following phenolic compounds of the following polyacryl compounds with the aforementioned groups, or by the formula -R ° -COOA, or B0, Protect 0 bases. For these polyhydroxy compounds, &amp; JP-A-1-289946, JP-A-1-289947 »JP-A-2-2560 ^ JP-A-3-1 2895 9» JP-A-3- 158855, JP-A-3-179353, JP-A-3-191351, JP-A- -84-This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) Please fill in this page again for matters) 1-. Pack. -5 Γ Musk 4 32 2 5 6 'A7 B7 V. Description of Invention (82) 3-20025 1 »JP-A-3 -200252» JP-A-3-200253 5 JP-A-3-200254, JTP-A-3 -20025 5, JP-A-3 -259149, JP-A-3-279958, JP-A-3-279959, JP-A-4-1650, JP-A-4-1651, JP-A-4-11260, JP-A-4-12356, JP-A-4- 1 23 5 7, JP-A-4-28 1 349, JP-A-5 -45 869, JP-A-5-15 B23 3, JP-A-5-224409, JP-A-5-257275, JP-A-5 -2 9 75 8 1, JP A-5 -297 5 83 The compounds described in JP-A-5- 3 03 1 9 7, JP-A-5 -3 03 200, and JP-A-5-3 4 1 5 1 0 are specific examples. Among the aforementioned acid decomposition dissolution inhibiting compounds, JP-A-Bu 289946, JP-A-3-1 28959, JP-A-3-1 5 8 85 5, JP-A-3-179353, JP-A -3-200251, JP-A-3-200252, JP-A-3 -20025 5, JP-A-3 -259 1 49, JP-A-3-279958, JP-A-4-1 650, JP -A-4- 1 1 260, JP · A-4-1 23 56, JP-A-4- 1 23 5 7, JP-A-5 -224409, JP-A-5-2975 81, JP_ A- 5-297583, JP-A-5-303197, JP-A-5-303200, and JP-A-5-341510 are better than others. More specifically, it is a suitable example that the compounds represented by the formulae [I] to [XVI] are acid-decomposition-dissolution inhibiting compounds, respectively. J ---.-------) 1 ^ — (Read the notes on the back and read this page before filling out this page) Order by the Central Bureau of Standards of the Ministry of Economic Affairs, Shellfish Consumer Cooperatives -85- This paper size applies to China National Standard (CNS) A4 specification (2I0X297 mm) Γ®4 32 2 5 6 Α7 Β7 V. Description of the invention (83)

(R (R

a \ 1/1 C 104} R10

2 ο ο 1 CR CR

ο R 5 ο 1 e h \ — / (Please read the notes on the back before filling in this one hundred) | ~ | 1 Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs

(R R 1 (R

This paper size applies to Chinese National Standard (CNS) A4 specification (210X297 mm) Α7 Β7 V. Description of invention (84)

This paper size applies the Chinese national standard (CNS &gt; A4 specification (2 [0X297mm) Age Λ322 5 6 a7 B7 V. Description of the invention (85).

[VH]

(Please read the notes on the back before filling this page)

Printed by Shellfish Consumer Cooperative, Central Bureau of Standards, Ministry of Economic Affairs

[IX] -88-This paper size is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) 432256 A7 B7 V. Description of invention (86

[X]

XI] rL Indian policy of the Central Standards Bureau of the Ministry of Economic Affairs

R

[XU] -89, (Please read the precautions on the back before filling this page)

This paper size applies to Chinese National Standard (CNS) A4 (210X297 mm). Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs. M 32 25 6 Α7 _________ Β7 ______ V. Description of the invention. (87) R1 () 1, ruler 108 and Rulers 130 may be the same or different from each other, each being a hydrogen atom, -R0-COO-C (R01) (R02) (R.3) or -C0-0-C (R01) (R02) (R〇3), Among them, R (M, and r〇3 have the same meanings as above. R100! -CO-, -COO-, -NHCONH-, -NHCOO-,-0- '-S-' -so-, -S02 -, -So3- or R150 I 1 C — R151 where G is 2 to 6 'prerequisite is at least £ 50 or Ri51 is alkyl when g is 2; R15 and R151 are the same or different from each other and each is argon Atoms, alkyl radicals -OH-, -COOH-, -CN, halogen atoms, '-Rl52-COOR153 or' _R154_OH; Rj52 &amp; Rl54 are alkenyl groups; R153 is a hydrogen atom, Alkyl, aryl or aralkyl. R99, from R103 to Ri07, R109 '* RllliRllS, from Min. 12 | to .R123, R128, R129, * RI31iR134, from Rl3qRl41, and R143 are the same or the same as each other Different, each is a hydrogen atom, a mesityl group, an alkyl group, an alkyl group, an alkyl group, Oxy, aryl 'aryloxy, aryl gauge, arylamino, pixel' nitro, diphenyl, cyano, or -N (Ri55) (R156) (R 丨 55, RJ56: fluorene, alkyl Or aryl). R &quot; is a single bond, alkenyl or

(Please read the precautions on the back before filling in this page) Binding · Binding -90- This paper; ^ degree applies to Chinese National Standard (CNS) Α4 specifications (210X297 public epidemic [A7 B7 V. Description of the invention (88) '-R157 -&lt; g &gt; -K159- ΐ58 wherein R157 and R159 are the same or different from each other, each is a single bond, an alkenyl group, -〇_, -S-, -C0- or a carboxyl group; 158 is a hydrogen atom, an alkane Group, alkoxy group, fluorenyl 'fluorenyloxy, aryl, nitro, hydroxy, cyano or carboxyl, wherein the radical can be acid-decomposed fluorene (such as tertiary butoxycarbonylmethyl, tetrahydroxyl Ranyl, 1-ethoxy-1-ethyl or 1-tert-butoxy-1-ethyl). R | 1 9 and R 1 2. Are the same or different from each other, each is a methylene Group, lower alkyl substituted methylene group, methylene group or self-extended alkyl group, wherein the term low alkyl group is meant to include a Cj.4 ^ group. R〗 24 to Ri27 are the same or different from each other 'each is a hydrogen atom Or radixyl. R135 to R137 are the same or different from each other, and are hydrogen atom, carbyl, ammonium oxy, alkynyl or alkynyloxy. R142 is hydrogen atom, -11.-(: 〇〇- (: (11.]) (11.2) (foot 03), -co-0-(:( 1 ^) (1 ^ 2) (1 ^ 3), or A group of formula (Please read the Notes on the back to fill out this page) τ ^ · ^ V. 'equipment.

, 1T Printed by Bei Gong Xiao 1 Cooperative, Central Bureau of Standards, Ministry of Economic Affairs

-91-The paper rule for money and wealth management standards (CNS), 8 secrets (210X297 Gongchu)-»432256 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs, printed A7 B7 V. Description of the invention (89) Where (*) is intended It's -0. R144 and R145 are the same or different from each other, and each is a hydrogen atom 'lower alkyl, lower haloalkyl or aryl. R] 46 to R149 are the same or different from each other, and each is a hydrogen atom, a hydroxyl group, a halogen atom, a nitro group, a cyano group, a carbonyl group, an alkyl group, an alkoxy group, an alkoxycarbonyl group, an aralkyl group, an aralkoxy group Group, fluorenyloxy, alkenyl, alkenyloxy, aryl, aryloxy, or aryloxycarbonyl, in which the group of four substituents indicated by the same symbol, when included in the above group, may be Β Υ which is different from each other is -C0- or -so2-. Z and B are each a single bond or -0. A is methylene, lower alkyl substituted methylene, or methylene or haloalkyl. E is a single bond or hydroxymethylene. When a to ζ and al to yl are each two or more numbers, the groups in parentheses may be the same or different from each other. From a to q, s, t, V, from gl to il, from kl to ml, 〇1, ql, si ′ and ιΐ are each an integer of 0 or 1 to 5; r, u, w, x, y, z, from al to fl, pl, ri, tl, and from vl to xl are integers of 0 or 1 to 4; jl, nl, zl, a2, b2, c2, and d2 are integers of 0 or 1 to 3 The prerequisite is that at least one of zi, a2, c2, and d2 is an integer of 1 or greater; yl is an integer of 3 to 8; the prerequisite is a + b &gt; 2, e + f + g &gt; 2, k +1 + m 2 2, q + r + s &gt; 2, w + X + y &gt; 2, cl + dl &gt; 2, g 1 + h 1 + i 1 + j 1 &gt; 2, o 1+ p 1 &gt; 2, si + tl &gt; 2, j 1 + n 1 &lt; 3, r + u &lt; 4 »w + z &lt; 4, x + a 1 &lt; 4, y + b 1 &lt; 4, c1 + e1 &lt; 4, d1 + f1 &lt; 4, p1 + r1 &lt; 4, t1 + v1 &lt; 4, -92- The paper Λ degree applies the Chinese National Standard (CNS) A4g (21 OX 297 mm). (Please read first (Notes on the back then fill out this page)

14 322 5 6 A7 B7 V. Description of the invention (eg) xl + wlS4 'But in formula [v] w + zs5 & x + ai &lt; 5, a + cS5, b + d &lt; 5 &gt; e + h &lt; 5 &gt; f + i &lt; 5 »g + j &lt; 5» k + n ^ 5 »I + o &lt; 5» m + p &lt; 5 &gt; q + t &lt; 5 »s + v &lt; 5 ^ gl + kl &lt; 5 »Hl + il &lt; 5» il + mlS5 ， 〇ΐ + ηΐ25 &amp; "+ ιι1 € 5 0

R 164 165 163 164 RJ (Xm) where R160 is an organic radical diagram, a single bond, "s_, _s〇 ^ _s〇2—; Rl is a hydrogen atom monovalent organic radical circle, or the following is the basic standard of the Ministry of Economic Affairs Central Standard Bureau CN Λ1 «printed by employee consumer co-operative society

Έ | cm 7 9 2 (Please read the notes on the back before filling this page)

隳 4 32 2 5 6 A7 B7 V. Description of the invention (91) (where X is a divalent organic radical); 62 to 11166 are the same or different from each other, each is a hydrogen atom, a hydroxyl group is a self atom, an alkyl group , Alkoxy, alkenyl, -0-R-C00-C (R) (R02) (R03M_〇_c〇_〇c (Rcn) (R〇2) (R〇3), the prerequisite is at least Two of them are -〇_R〇_C〇〇_C (R) (R) (R) or -〇_c〇_.〇_c (R0 ^ (R.2 ^ R.3), but The group of four or six substituents referred to by the same symbol may be different as long as they are included in the above group; and e2 is. R168 R167

169 R170 Rv7 ° 173 167

R170 r171 R167 R168 (Please read the note ^ on the back before filling this page) ΘΙ Pack.

r170 R169 CH2) f2 &quot; C-(CH2) g 2-C-(CH2) h2 ^ R173 (XIV) R 169

168 173 R 167. 佥 172 Ordered by the Central Standards Bureau of the Ministry of Economic Affairs and printed in the above formula 'R1 67 to the same or different from each other, each is a hydrogen house, a hydroxyl group, a prime atom, an alkyl group, an alkoxy group , Alkenyl, but the group of 4 or 6 substituents referred to with the same consignment number may be different as long as they are included in the above group @. R171 and R172 are each an argon atom, an alkyl group, or a group of the following formula 94- This paper size applies to the Chinese National Standard (CNS) A4 specification (210X297 mm) Μ 32 25 6 A7 B7 V. Description of the invention (92) R167r168 , 173

R-169 170 RR, at least two of the R173 bases are -O-R0-COO-C (R01) (R02) (R03) or -O-CO-OC (R01) (R02) (R.3) The rest are hydroxyl. f2 and h2 are each 0 or 1, and g2 is an integer of 0 or 1 to 4. (Please read the precautions on the back before filling out this page.) Equipment-Yinli, Consumers Cooperative, Central Standards Bureau, Ministry of Economic Affairs

In the above formula, R 17 4 to R 1 8 G are the same or different from each other, and each is a hydrogen atom, a radical, a prime atom, a gauge group, a gauge oxygen group, a nitro group, an allyl group, and aryl-95-this paper Standards are applicable to China National Standards (CNS) A4 specification (2IO × 297 mm) 丨 line / r432 25 6 A7B7 V. Description of the invention (93) aryl aryl, alkoxycarbonyl, arylcarbonyl, fluorenyloxy, A fluorenyl group, an aralkyloxy group, or an aryloxy group, but the group of 6 substituents referred to by the same symbol may be different as long as it is included in the above group. And at least two of the R181 groups are -0_R〇_C〇〇_ and the remainder is a hydroxyl group. R184 R183 ^ 182 R 187

RJ

R 182 r 184 w CH2 ^ 1 iT ^ CH2 S〇2 S〇2 183

187 184 183 R 182

187 (XVI) Printed in the above formula by the Central Standards Bureau Shellfish Consumer Cooperative of the Ministry of Economics, each of the substituents referred to by R 1 8 2 is a hydrogen atom or an alkyl group, and all the substituents may be different; R i &quot; Each of the substituents referred to R 1 8 6 is a hydroxyl group, a hydrogen atom, a halogen atom, an alkyl group, or an alkoxy group, but a group of three substituents referred to by the same symbol as long as it is included in the above group May be different; and at least two substituents referred to by R187 are -Or ^ COO is a hydroxyl group. The following describes specific examples of suitable compound skeletons: -96 This paper is sized to the Chinese National Standard (CNS) A4 (210x297 mm) J ^ IK — Binding — Binding __ ^ (Please read the precautions on the back first (Fill in this page) F4322 5 6 A7 B7 V. Description of invention (94 Printed by the Central Standards Bureau of the Ministry of Economy—Industrial and Consumer Cooperatives

-97-The size of this paper music is suitable. Use the Chinese National Standard (CMS) A4 specification (2 [0X297mm) (read the precautions on the back before filling in this page)-Pack ·

1T ft P4 32 2 5 6 A7 B7 V. Description of the invention (95

C

(Please read the notes on the back before filling this page)

RO

OR CIC roo = h3

RO

3 /-Η Η Η c CIC—O R οS i ^ oHS ο / λτο—c Printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs ^

CH 丨 CH 丨 OH

RO

OR -98- This paper size applies to Chinese national standard (CNS &gt; A4 size (210X 29 &quot; 7mm) P432256 A7 B7 V. Description of the invention (96)

OR ch3

Printed by Zhengong Consumer Cooperative, Central Bureau of Standards, Ministry of Economic Affairs

-99- * (Please read the notes on the back before filling in this page)

This paper size applies to Chinese National Standard (CNS) A4 (210X29? Mm) P4 32 2 5 6 A7 B7 V. Description of invention (97 Printed by the Central Bureau of Standards of the Ministry of Economy—Industrial and Consumer Cooperatives

-100 This paper size is applicable to China National Standard (CNS) A4 specification (210 × 297 mm) (please fill in the notes on the back, fill in this page). Binding, order Γ1432 2 5

G A7 B7 V. Description of the invention (98

OR

OR

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OR This paper size is applicable to China National Standard (CNS) A4 (2ΙΟ × 297mm)

Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs I 143225 6 A7 B7 V. Description of Invention (99)

-102-. (Read the precautions on the back before filling in this page) This paper size is applicable to the Chinese National Standard (CNS) A4 specification (2 丨 0 &gt; &lt; 297 mm) 14 32 2 6 〇Α7 Β7 V. Invention Instructions (100)

OR OR OR

(twenty two)

OR

OR OR OR

OR OR OR

(twenty four)

OR (Please read the notes on the back before filling out this page)

OR OR OR

-103 This paper size applies to China National Standard (CNS) A4 (210 X 297 mm) 14 32 2 5 6 A7 B7 V. Description of the invention (101) OR R〇

ch3 C I ch3 ch3 ron Ic — I ch3

OR (26)

OR OR

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〇R OR -104- This paper size is applicable to Chinese National Standard (CNS) A4 specification (210X297 mm) _ 2 b b A7 B7 V. Description of the invention (1〇2)

RO

h3c,

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: H3C—c —CH3

H3c ch3 (31) ch3

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rIT

OR

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ch3 OR -105- This paper size is applicable to Chinese National Standard (CNS) A4 (210X297 mm) 5. Description of the invention (103 Α7 Β7

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-CH3 OR (Please read the notes on the back first to fill out this page) -Pack.

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-OR 106- This paper size is in accordance with Chinese National Standard (CNS) A4 (210X297 mm) 14 32 2 b g 5. Description of the invention (104) A7 B7

OR H3C ch3 (36) OR 0

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OR 0 R 190

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attached'to -0— -107 This paper size is applicable to the Chinese National Standard (CNS) A4 grid (210X297 mm) 臃 43225 &amp; A7 B7 V. Description of the invention (105)

. (Please read the notes on the back before completing this education) Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs

-108- This paper size is in accordance with Chinese National Standard (CNS) A4 specification (210X 297 mm) Γ 隳 4 32 2 5 6 Α7 Β7 V. Description of the invention (106)

(42)

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(44) 109- This paper is again applicable to China National Standard (CNS) A4 (2 10 × 297 mm) Glue 432 2 5 6 A7 B7 V. Description of the invention (107)

OR

OR (Please read the precautions on the back before writing this page)

'Printed by the Consumer Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs

OR OR -110 The paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) 醪 4 3 2 2 5 Α7 Β7 V. Description of the invention (108)

(Please read the precautions on the back before filling out this page.)

, Line-111-This paper string scale applies the Chinese National Standard (CNS) A4 specification (2! 〇 × 29 · 7 mm) ^ 43225 6 A7 B7 V. Description of the invention (Ga) Printed by the Central Standards Bureau of the Ministry of Economic Affairs system

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112- The size of this paper applies to the Chinese National Standard (CNS) A4 (210X297 mm) r1432256 Α7 Β7 5. Description of the invention (11〇)

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This paper size applies to Chinese National Standard (CNS) A4 specification (210X297 mm) 鳜 4 32 2 5 6 A7 B7 V. Description of invention (111)

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OR 114 (Please read the notes on the back before filling this page)

This paper size applies to Chinese National Standard (CNS) A4 specification (210X297 mm) P4 32 2 5 β A7 B7 V. Description of invention ("2)

OR

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3 I3HR Hc ο, -115- This paper size is applicable to the National Standard for Chinese Bacteria (CNS) A4 (2 丨 OX 297 mm) Yue 4 32 2 A7 B7 V. Description of the invention (113) Each compound ⑴ to (63) R groups are each a hydrogen atom, _ c H 2 _ c 〇〇_ C (CH3) 2C6H5 »-CH2-C〇-c4H9 (t)» -COO-C4H9 (t) or tetrahydropiperan-2 -Radical, the prerequisite is at least two of the R groups, or two, depending on the construction conditions, not a hydrogen atom group. These substituents represented by ruler, other than hydrogen, may be different as long as they are included in the above-mentioned base picture. When the above-mentioned dissolution inhibiting compound is used in combination with an acid-generating compound and an alkali-dissolving resin, it is added at a weight ratio of 3 to 50%, preferably 5 to 40% by weight, and more preferably 10 to 35% by weight. 'This weight ratio is based on total solids (excluding solvents) in the light-sensitive composition. f V π basic compound: The organic basic compound suitable for the present invention is a compound having a stronger basicity than phenol. Among such compounds, it is advantageous to use a nitrogen-containing basic compound. In such compounds, examples of the chemical environment required for the nitrogen atom can be described by the structures represented by the following formulae (A) to (E): 'R251 (A) r250-n-r252 Staff Consumption of the Central Bureau of Standards, Ministry of Economic Affairs Cooperatives print R25 of them. R251 and R 2 5 2 are the same or different from each other, each of which is a hydrogen atom, Ci-6 radical, C] -6 amine radical, Ci-6 light radical, or Cfi-2o substituted or unsubstituted Substituted aryl, or R 2 5. And R 2 51 merge with each other to form a ring; -116-This paper size applies the Chinese National Standard (CNS) A4 specification (2 丨 0X297 mm) Γ glue 4 32 2 5: 6 Α7 Β7 V. Description of the invention (114) I! --NC = N- (B)

I ί: C-N = C- (C): C-N— (〇)

R R254 R255 253 CN-c_R256 (E) Please read the back first. V | Notes> 4 ^ really fill in this book 萸) where R253, r 2 5 4, r 2 5 5 &amp; r 2 5 6 are the same as each other Or different, each is a C 1-6 fluorene radical. A more suitable nitrogen-containing test compound is a compound having at least two nitrogen atoms in different chemical environments in the molecule. In particular, the molecule has substituted and unsubstituted amine groups and nitrogen-containing ring structures. Compounds or compounds with alkylamine groups are preferred over other compounds. "Suitable examples of such compounds are mentioned substituted or unsubstituted guanidines, substituted or unsubstituted aminopyridines, substituted or unsubstituted Substituted aminopyrrolidine, substituted or unsubstituted »5, Jun, substituted or unsubstituted midazolam, substituted or unsubstituted ρβ, substituted or unsubstituted pyridine, substituted or unsubstituted Substituted pyrimidines, substituted or unsubstituted purines, substituted or unsubstituted imidazolines, substituted or unsubstituted &lt; &quot; Substituted amino morpholine, lin, substituted or unsubstituted amino morpholine pho. Examples of suitable substituents for the above compounds are amine group, amine group, alkyl group 117- This paper size applies the Chinese National Standard (CNS) A4 specification (2 丨 〇 &gt; &lt; 297 Gongchu) Ministry of Economic Affairs Printed by the Consumer Standards Cooperative of the Central Standards Bureau. Printed instantaneously 43225 6 Printed by the Consumer Standards Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs. Group, fluorenyl, fluorenyloxy, aryl, aryloxy, nitro, hydroxyl, and hydrogen. Examples of specific preferred basic compounds are guanidine, 1,1-dimethylguanidine, 1,1,3,3-tetramethylfox, 2-aminopyridine, 3-aminopyridine, 4- Aminopyridine, 2-dimethylaminopyridine, 4-dimethylaminopyridine, 2-diethylaminopyridine, 2- (aminomethyl) pyridine, 2-amino-3- Methylpyridine, 2-amino-4-methyl p ratio, 2-amino-5 · methyl p ratio, 2-amino-6-fluorene p ratio, 3-aminoethylpyridine , 4-aminoethylpyridine, 3-aminopyrrolidine, piperadine, N- (2-aminoethyl) piperadine, N- (2-aminoethyl) hexahydropyridine, 4-amino- 2,2,6,6-tetramethylhexahydropyridine, 4-hexahydropyridylhexahydropyridine, 2, iminohexahydropyridine, 1-(2-aminoethyl) pyrrolidine, imidazole, 2,4,5-triphenylimidazole, pyrazole, 3-amino-5-methyl p ratio, 5′-amino-3-methyl-1-p-tolyl p ratio, 比 ratio. Well, 2- (amino fluorenyl) -5 -methyl p than 11 wells, shout Jun, 2,4-diamino shout bite, 4,6- dijingyl shout '2-p ratio bite' 3-p than drench, N-aminomorphine, Lin and N-(2-aminomethyl) Ming Fulin. However, these age-effective compounds useful in the present invention should not be construed as a limitation on the aforementioned compounds. These nitrogen-containing basic compounds may be used alone or as a mixture of two or more thereof. The amount of the nitrogen-containing basic compound used is generally 0 to 10 parts by weight, preferably 0. 0 to 1 to 5 parts by weight. This part by weight is based on 100 parts by weight of the light-sensitive composition (excluding the solvent). When the compound is added in an amount of more than 10 parts by weight, the sensitivity is reduced and the developing ability of the unexposed areas is destroyed. [νίπSpecific molecular weight of 3,00, Cheng,. ,, phenol compounds; -118 »This paper method scale is applicable to Chinese national standards (CNS &gt; A4 specifications (2 丨 0X297 male thin &gt;) (Please read the note on the back Please fill in this page again.). Pack., Order printed by the Consumer Standards Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs P4 32 2 5 6 A7 _________B7_______ V. Description of the invention (116) The dissolution in the developer can use at least two phenolic OH groups in the molecule Among such compounds having at least two phenol OH groups, the present invention can use phenol compounds having a molecular weight of not more than 3,000, preferably not more than 1,000. Although such phenols The compound needs to have at least two phenol OH groups in the molecule, but the development range will be lost when the number of phenol OH groups exceeds 10. In addition, when the ratio of phenol OH groups to aromatic rings is less than 0 in such compounds. At 5, the film thickness dependence will increase and the development range will decrease. In addition, the aforementioned ratio should not be greater than 1.4, because the stability of the light-sensitive composition containing such phenol compounds will deteriorate, making it difficult to achieve high resolution. Effect and satisfaction Film thickness dependence. The g component compound used in the present invention needs to be added to the resin used together at a weight ratio of 2 to 50%, preferably 5 to 30%. Its addition ratio is greater than 50% by weight. Unnecessary 'because it will aggravate the developer residue' causes new development distortion. These phenol compounds having a molecular weight of not more than 3,000 are referred to, for example, JP-A-4-122938, JP-A- 2-28531 'U.S. Patent No. 4,916,210 and European Patent No. 0,219,294 are easily prepared. Specific examples of the above-mentioned compounds include the compounds described above, but these examples do not limit the range of compounds that can be used in the present invention. The aforementioned phenol Specific examples of the compound are resorcinol, resorcinol, 2,3,4-trihydroxydiphenyl ketone, 2,3,4i4, _tetrahydroxydiphenyl ketone, 2,3,4,3 ', 4', 5'-Hexahydroxydiphenyl ketone, acetone-pyrophenol condensed tree moon day 'm-triphenylene test compound (? | 11〇1 &quot; 〇 £ 111 £ ^ (56), 2,4 , 2,, 4,-四 经 -119- The standard of this book is toward the Chinese coffee house fresh (⑽) Α4 · (21 () χ297 public fee) ~~ (Please read the precautions on the back before filling this page). · 丨 43225 6 A7 B7 V. Explanation of the invention (117) The hydrazone '4,4'- sulfobis (1,3-dienyl) benzene, 2,2,4,4, -tetrakidyl Phenyl ether, 2,2 ', 4,4, -tetrahydroxydiphenyl sulfoxide, 2,2,4f4, _ tetrakisyldiphenylwind' ginseng (4-methylphenyl), 1,丨 _Bis (4-merylphenyl) cyclohexane '4,4- (α-methylbenzylidene) bisphenol, α, α ,, α &quot; _ 参 (4- 趣 基 笨 基) _1, 3,5-triisopropylbenzene, 〇1, 〇 /, 〇1 &quot; -gins (4-Ethylphenyl) -buethyl-4-isopropylbenzene'1,2,2-gins (hydroxyphenyl ) Propane, 1,1,2-ginseng (3,5-dimethyl-4-merylphenyl) propane, 2,2,5,5- 5- (4-hydroxyphenyl) hexane, 丨, 3 , 3,5-Hydroxy (hydroxyphenyl) pentane, 1,1,2,2-Hydroxy (4-hydroxyphenyl) ethene 1,1,3-Hydroxy (hydroxyphenyl) butane ' [«, 〇 ^, 〇1 ', 〇1'-4- (4-alkylphenyl)] xylene and the like.

The phenol compound used in the present invention is preferably a compound represented by the following ㈧ or (B): (R2) k OH (Please read the precautions on the back before filling this page)-Pack. Order

A

A &quot; Line r Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs

〇 H

Ho

R9) b

E) h G)

B -120- The standard of this paper is suitable for households (CNS) from Tao (2iQx297). A7 B7 5. Description of the invention (118) 'In the above formula and (B), A is a hydrogen atom or a hydroxyl group; E and G are each a group of the formula

R, to R4 are each a hydrogen atom, -X-R, 3, or a halogen atom; R5 and R6 are each a hydrogen atom, a ψ group, an ethyl group, or a CI_2 haloalkyl group; R7 is a hydrogen atom, a Group, ethyl, or C 丨 -2 haloalkyl; a to f and k to η are each 0, or an integer of 1 to 3; g to j are each 0, 1, or 2; p is an integer of 1 to 3 : D is a single bond, carbonyl, sulfido, sulfonyl, -C (R5) (R6)-, or a group of the following formula (please read the precautions on the back before filling this page) h quasi-stationary, industrial consumption, f cooperative printing

Rule 8 to 1 ^ 2 are each a hydrogen atom, -OH, -CN, -COOH, -XR 1 3, or a halogen atom; R! 3 is a C! -8 technical group; and X is a single bond '-0-' -S-, -C0-, or -0C0-. .Line '丨 -121-This paper size applies to Chinese National Standard (CNS) A.4 specifications (210 X 29? Mm) A 3 2 v. · O A7 _________B7 5. Description of the invention (119) (B) In the compound, alkyl groups such as R13 include alkyl groups such as alkyl, ethyl, hydroxyethyl, propyl, hydroxypropyl, n-butyl'isobutyl, hexyl, and 2- Ethylhexyl. R13 is particularly preferably a C! .4 alkyl group over other alkyl groups. In the compounds of formula (A) or (B), examples of gas-substituted substituents are gas, brook, hydrogen, and fluorine. Especially preferred are chlorine and bromine atoms. In the case of Cu haloalkyl groups at R5'R · 6 or R ?, examples are gas methyl, dichloromethyl'trifluoromethyl, bromomethyl, and dibromomethyl. , Tribromomethyl, ethyl, monoethyl, trichloroethyl, bromomethyl, and tribromoethyl. However, in terms of Re and R ?, a hydrogen atom or a methyl group is most suitable. In X On the one hand, it represents a single bond, -0-, -S-, -C0-or-0C0-, but single bonds, _〇_ and-OCO · are better than others. The aforementioned (A) and (B) compounds are more It is preferably a low molecular compound, in which the total number of carbon atoms per molecule is 27 to 60, and the aromatic hydroxyl group is The total number is 2 to 10 per molecule. Especially compounds added to the alkali-dissolving resin can increase the alkali-dissolving speed of the alkali-dissolving resin. When the total number of carbon atoms of such compounds is greater than 60, the compound is more effective On the other hand, when the total number of carbon atoms of such compounds is less than 27, the compounds have new harmful effects, such as reducing thermal resistance. To fully exert the effect, the aforementioned compounds need at least two hydroxyl groups, but in each When the number of hydroxyl groups in the compound exceeds 10, the effect of the compound is also reduced. Examples of useful low-molecular compounds having an aromatic group represented by the formula (A) or (B) are described below, but they should not be construed as such. And other compounds are limited to these examples. -122- P432 A7 B7 V. Description of the Invention (120) Compound

HO

Or OH H2c- 2 -CH:

H3C—C—CH3

HQ HOXt)) — H2C CH2 ((]) ~ 0HOH. Compound 2

CH

3 h2c OH t_cCH3

ch2-^ \ oh H3C — C — CH3

H, C &quot; ^ v ^ 'CH2OH

ch3 OH (Please read the precautions on the back before filling out this page) Pack 'Order Compound h3c HO h3c

OH h2c

CH:

Printed by the Consumer Standards Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs

H3C —C—CH3

H2C CHj OH

ch3 OH CH3. ch3 OH CH3 line · -123 This paper size applies Chinese National Standard (CNS) A4 specification (2 丨 0 X 297 mm) .4 32 25 6 A7 B7 V. Description of the invention (121) Compound

Compound 5 rw_

OH OH compound 6

HO

OH Hs ch3 H3C-C-CH3

Printed by Shellfish Consumer Cooperative, Central Standards Bureau, Ministry of Economic Affairs

ch2

OH 124- (Please read the notes on the back ^: Fill out this page)

This paper size applies to China National Twin (CNS) A4 (210X297 mm) printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs, _43225 6 A7 B7 V. Description of the invention (122)

-125- This paper size is in accordance with Chinese National Standard (CNS) A4 (210X29.7mm) 32 2 5 6 A7 B7 V. Description of the invention (123) Compound 10

ch3 HO

(Please read the notes on the back before filling in this page)

The central standard of the Ministry of Economic Affairs of the Beibei Consumer Cooperative Co., Ltd. 126- This paper is again applicable to the Chinese National Standard (CMS) A4 specification (210X: 297 mm) 1 Following 4 32 2 5 6 A7 B7 V. Description of the invention (124) Compounds 12

&quot; (Read the precautions on the back before filling this page) Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs 127- This paper size applies to China National Standard (CNS) A4 (2! 〇2Wmm) 4 3225 A7B7 V. Description of the invention (125) Compound 14 H0 Ότ

OH compound 15

Compound 1S.H0) repair OrOrOr

~ Qr

OH

OH OH

OH

OH

OH, (Please read the precautions on the back before filling out this page)

H0- &lt; (H2C ^ '^, CH2— &lt; () h〇HOH 128- This paper size is applicable to China National Standard (CMS) A4 specification (2I0X297 mm) ΓΡΛ 32 2 5 6 A7 B7 V. Description of the invention (126)

0H, Ότ

-Or

Compound 17 f HO &lt; () &gt;-) V〇H

CO, Όγ

HO ~ (i j) —— (() / ~ OH compound 18

HO

Or

OHOH

HO

Or

OH

OH (Please read the notes on the back *: Fill out this page)-Pack 'Order Compound 19

OH Central Bureau of Standards, Ministry of Economic Affairs *: Printed by Industrial and Consumer Cooperatives

: ^ 0 &quot;

OH

OH 129 This paper size applies to Chinese National Standard (CNS) A4 (210 X 297 mm) r P432 25 A7 B7 V. Description of the invention (127)

(Please read the precautions on the back of the cabinet first, then fill out this page)-Equipment-Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs

r line · 130 This paper size is applicable to Chinese National Standard (CNS) A4 specification (2! 0X297 mm) P43225 6 V. Description of invention (128) A7 B7

(Read the precautions on the back before filling this page)

C0

Printed by the Employees' Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs -131 This paper size is applicable to the Chinese National Standard (CNS) A4 (210X297 mm) rM 32 2 5 6 V. Description of the invention (arsenic Α7 Β7 Employees of the Central Bureau of Standards of the Ministry of Economic Affairs Cooperative print

-132- This paper size applies to Chinese National Standard (CNS) A4 specification (2tOX297 mm) P432 2 5 6 A7B7 V. Description of the invention (130) Compound 27

Compound 2 8

(Please read the precautions on the back before filling this page) Binding and ordering The paper size printed by the staff of the Central Standards Bureau of the Ministry of Economic Affairs 'Consumer Cooperative' applies to the Chinese National Standard (CNS) A4 (210X297 mm) 32 2 5 6 Α7 Β7 Printed by the Staff Consumer Cooperative of the Central Bureau of Standards, Ministry of Economic Affairs

The size of this paper applies to the Chinese National Standard (CNS), 8 squares (2 [〇297mm). Please read the back of the note of © © t ti

II P4.3225 6 A7 B7 V. Description of the invention (132 Compound 32

Compound 3 3

OH HO · ^ — Η2.

CH, (Please read the notes on the back before filling this page)

CO

H2C

OH

, 1T compound 34

CH HO

Printed by the Consumers' Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs

135- The size of this paper is applicable to Chinese National Standard (CNS) A4 (2 丨 OX297mm) V. Description of Invention (133) A7 B7

0H h2c ^ v. COCH3

CO

H2c

OH (Read the notes on the back of the body first # Fill in this note) Pack. Compound 3 6

OCOCH,

H2C

CO order

H, C

OCOCHa line. Printed by the Consumers' Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs -136 This paper size applies to the Chinese National Standard (CNS) A4 specification (210X 297 mm) 432256 A7 B7 V. Description of the invention 〇34 Compound Compound 37

0H H2C-

CO h2c

OH

OH

Printed by the Consumer Cooperatives of the Central Bureau of Accreditation of the Ministry of Economic Affairs -137- This paper size applies to the Chinese National Standard (CNS) A4 (210X297 mm) 羼 4 32 25 6 A7 B7 V. Description of the invention 035 Compound 39

0H Compound 40

CH3 HO

(Read the precautions on the back before filling this page)

Compound 41 Printed by the Consumer Cooperative of the Central Bureau of Standards, Ministry of Economic Affairs Η

h2ct γ, 〇η OH

OH -138-This paper size applies to Chinese National Standard (CNS) A4 (2IOX297 mm) 缛 4 322 5 6 A7 B7

V. Description of the Invention (136) Compound 4 2H3C-C

OH compound 43 h3c-c

(Read the precautions on the back before filling in this page) Binding and ordering OH compound 4 4 h3c-c

Consumers' Cooperatives, Central Standards Bureau, Ministry of Economic Affairs, India

OH

r line,

-139- This paper size is applicable to Chinese National Standard (CNS) A4 specification (2 丨 OX 297 mm) I A7 B7 ^ 32256 V. Description of the invention (137) Compound 4 6 Compound 45

(Please read the note on the back #Fill this page first.)

、 1T Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs -140- This paper size applies to Chinese National Standard (CNS) A4 (210X 297 mm) r 432 25 6 at B7 V. Description of the invention (138 Compound 4 7 C2H5

'OH Compound 48

C6IG 99C

(Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs -141 This paper size is applicable to China National Standard (CNS) A4 (210X297 mm) P432 2 5 6 A7 B7 V. Description of the Invention (139) Compound 49

Compound 50

H3C-C

Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs

Please read the back note first

I Binding 142 This paper size is in accordance with Chinese National Standard (CNS) A4 wash case (210: ^ 97 mm)

^ 4322 5 B A7 ___B7_____ 5. Description of the invention (14〇) The compound of formula (A) or (B) should be 2 to 50% by weight, preferably 3 to 3 ο% by weight, more preferably 3 to 1 A 5% by weight ratio added to the resin such that β is added in an amount greater than 50% by weight is unfavorable and will cause mold distortion during development. The compounds represented by the aforementioned formulae (A) and (B) may also be used as a mixture of two or more of them. Reference may be made to the low-molecular compounds containing aromatic hydroxyl groups represented by the formulae (A) and (B), for example, JP-A-2-2 8 53 1, US Patent 4,9 1 6,2 1 0 and European Patent 0,219,294 The method described in No. is easily made. fVIIIl Other ingredients useful in the present invention: The light-sensitive composition of the present invention may, if necessary, further contain dyes, pigments, plasticizers, surfactants, and light-sensitizers. Examples of suitable dyes are oil body dyes and test dyes. Especially oil yellow # 1 0 1, oil yellow # 1 〇3, oil red # 3 1 2, oil green BG, oil blue Β S, oil blue # 6 0 3, oil black Β Y, oil black BS, oil black T-5 0 5 (these are produced by Orient Kagaku Kogyo Co., Ltd.), crystal violet (CI42555), methyl violet (CI42535), Rhodamine B (CI45 1 70B), Malachite Green (CI42000) and methylene blue (CI52015 ) For the benefit. In addition, the following spectral sensitizer is added to cause sensitivity to wavelength. The photoacid generator used at this wavelength has no spectral absorption, that is, the far ultraviolet region has a long wavelength. i — or g_ lines are sensitive. Specific examples of such suitable spectral sensitizers include diphenyl ketone, p, pf-tetramethyldiaminodiphenyl ketone, ρ, ρ'-tetraethylethylaminodiphenyl-143- Standards apply to Chinese National Standard (CNS) A4 specifications (2 丨 〇X 297 mm) Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs »4322 5 6 A7 _____B7 V. Description of the invention (141) Basic ketones, 2-gas repeated also Ketone, anthrone, 9-ethoxyallium ketone, onion, you, north, phenothion, biphenyl hydrazone, acridine orange, benzoxanthin, cetylflavin_T, 9,10-diphenyl onion , 9-fluorenone, acetophenone, phenanthrene, 2-nitrophenanthrene, 5 · nitrodihydrobenzene 'benzene brewing'. 2-chloro-4-ceranilide, N · ethyl phenyl-p-chloro Aniline, p-nitroaniline, N-ethyl-4-nitro-amyl-pentylamine, bitteramine 'anthraquinone, 2-ethylanthraquinone' 2-tert-butylanthraquinone, i, 2 _Puyuan Mann '3_methyl-I, 3 · dibenzo-1,9-benzidine Mann], Diidene propyl net, 1,2-Pyrenoquinone, 3,3'-carbonyl -Bis (5,7-dimethoxycarbonylcoumarin) and cardamom, but these examples should not be considered as limiting the range of spectral sensitizers usable in the present invention . In addition, these spectral sensitizers can be used as far-ultraviolet light absorbers for light sources. Such an absorber can reduce the reflected light from the matrix to reduce the effect of multiple reflections in the photoresist film; as a result, it can promote the standing wave. All the aforementioned ingredients are dissolved in a solvent to prepare the light-sensitive composition of the present invention and used for scales. Examples of suitable solvents used herein include dichloroethane, cyclohexanone's cyclopentanone, 2-pentyl sea bream, γ-butyrolactone, methyl ethyl ketone, ethylene glycol monoethyl ether, and acetic acid. 2-methoxyethyl ester, ethylene glycol monoethyl ether acetate, propylene glycol monomethyl ether, propylene glycol monomethyl ether acetate, toluene, ethyl acetate, methyl lactate , Ethyl lactate, methyl methoxypropionate, ethyl ethoxypropionate, ethyl pyruvate, ethyl pyruvate, propyl pyruvate 'Ν, Ν-dimethylphosphonium amine, dimethylene Y, N-methylpyrrolidone, and tetrahydrofuran. These solvents may be used alone or as a mixture of two or more thereof. Moreover, a surfactant may be added to the solvent. For this type of interface, the active agent's -144- This paper size is applicable to the Chinese National Standard (CNS) Α4 specification (2 丨 0 × 297 mm) (Please read the precautions on the back first *: fill in this document). Packing. Order &quot;. Line · — S4 32 2 5 〇 A7 ______B7 V. Description of the invention (142) Specific examples include non-ionic surfactants, such as polyoxyethylene alkyl ethers (such as polyoxyethylene lauryl ether, polyoxyethylene stearyl ether, Polyoxyethylene cetyl base, polyoxyethylene oleyl ether), polyoxyethylene alkyl aryl ether (such as polyoxyethyl octyl hope ether, polyoxyethylene nonylphenol ether), polyoxyethylene-polyoxy Propane block copolymers, sorbitol fatty acid esters (eg sorbitol monolaurate, sorbitan monopalmitate, sorbitol monostearate, sorbitol monooleate, tri-oleate Acid sorbitol esters, sorbitan tristearate) and polyoxyethyl sorbitan fatty acid esters (such as polyoxyethylene sorbitan monolaurate, polyoxyethylene sorbitan monolaurate , Polyoxyethylene sorbitol monostearate, Polyoxyethylene sorbitol trioleate, Tristearate Polyoxyethylene sorbitol esters); Fluorinated surfactants such as EftOp BF301, EF3 03, and EF3 5 2 (trade names, Shin_Akiia Kasei KK.K. products), Megafac F171 and F173 (trade names, DaiNippon Ink &amp; Chemicals, Inc.), Florad FC430 and FC431 (trade names 'Sumitomo 3M Co., Ltd.'s port)' As ahi guard AG 7 1 0, Surflon S-382 SC101 SC102, SC103, SC104, SC105 and SC106 (trade names,

Asahi Glass Company, Ltd 'products); printed products of the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economics of Polymerization of Organic Siloxanes, such as KP341 (code name of Shin-etsu Chemcial Co., Ltd.); and propionic acid or methacrylic acid (Co) polymers, such as p〇lyfl〇w

No. 75 and No. 95 (brand names ‘Kyoeisha Yushi Kagaku

Kogyo K.K ’products). The amount of force p of these surfactants is generally not more than 2 parts by weight, preferably not more than 1 part by weight, based on the total solids of the composition of the present invention being 100 parts. -145- This paper size applies Chinese National Standard (CNS) A4 specification (2Ι〇χ2ί &gt; 7 mm) Γ4 322 5 6 A7 ------- ---- B7 V. Description of invention (143) The surfactant can be added alone or in a mixture of two or more of them. The aforementioned light-sensitive composition is coated on the substrate with a suitable coating tool, such as a spinner, a coating machine, etc. Cutting and coating), for the production of accurate and complete circuit parts, exposed to the required mask (mask), and then developed to make a satisfactory photoresist type. The developer usable in the light-sensitive composition of the present invention is an inorganic base, such as sodium hydroxide, potassium hydroxide, sodium carbonate, sodium silicate, sodium silicate or ammonia, and a primary amine such as ethylamine or n-propyl. Amines, secondary amines such as diethylamine or di-n-butylamine, tertiary amines such as triethylamine or methyldiethylamine, alcohol amines such as dimethylethanolamine or diethanolamine, quaternary ammonium salts Such as tetramethylammonium hydroxide or tetraethylammonium hydroxide, or cyclic amines such as pyrroles or hexahydropyridines in alkaline aqueous solutions. Appropriate amounts of alcohol and surfactants can be added to this experimental aqueous solution. The present invention will now be described in further detail with the following examples, but these examples should not be considered to limit the scope of the present invention. Synthesis of Polymer (Non-crosslinking) Poly (P-hydroxystyrene) [VP-8000, Nippon Soda Co.5 Printed by the Consumer Cooperative of the Central Standards Bureau, Ministry of Economic Affairs

Ltd.) 21-grams (0.175 moles, p-hydroxystyrene units) and 7,0 grams (0.07 moles) of tertiary butyl vinyl ether were dissolved in 100 ml of tetrahydrofuran (THF). Add 5 mg of p-toluenesulfonic acid, and stir at room temperature for 24 hours. The resulting reaction solution was poured into 3 liters of water, and the resulting powder was filtered and dried to obtain Polymer 1. The protection ratio of this polymer was measured by TGA. (Protection rate: 32%). Synthesis of Polymer 2 (with cross-linking) -146- This paper size applies to Chinese National Standard (CNS) Αϋ (2IO × 297 mm) 14 32 2 5 6 A7 B7 V. Description of the invention (1 Central Standard of the Ministry of Private Economy) Bureau Shelley Consumer Co., Ltd. printed 21.0 grams (0.175 moles) of poly (p-hydroxystyrene) [vp woo Nippon Soda Co., 'Ltd'), 70 'grams of tertiary butyl vinyl ether (〇 .07 moles, 40 mole% for p-hydroxybenzylethylene) and 0.86 g (0.035 moles) of 2,2-bis (cardiacylcyclohexyl) propane for 2.0 moles %) Was dissolved in 100 ml of THF. Then, 5 mg of p-toluenesulfonic acid was added thereto, followed by stirring at room temperature for 24 hours. The resulting reaction solution was poured into 3 liters of water, and the powder produced by ik filtration was dried to obtain polymer 2. The protection ratio of this polymer was measured by TGA. (Protection rate: 31%). Polymers 3 to 8 Synthetic polymers 3 to 8 were synthesized in the same manner as polymer 2, except that the vinyl ether shown in Table 1 and the poly (ρ · hydroxystyrene) ratio shown in Table 1 were used. And the amount of 2,2 ~ bis (4-Cyclocycloethyl) propane was also changed to the amount shown in Table 1. Synthesis of polymers 9 and 10 Polymers 9 and 10 were each synthesized in the same manner as polymer 2, except that 1,4-dihydroxycyclohexane and tris (4-hydroxycyclohexyl) ethane were used instead of 2, respectively. , 2-bis (4-hydroxycyclohexyl) propane. The proportion of each component used in the synthesis of each polymer, the protection ratio, and the alkali dissolution rate of each polymer synthesized are shown in Table 1 ". Please read the precautions before you charge -147- This paper size applies to the Chinese national ladder Standard (CNS) Α4 specification (210 × 297 mm)

Pd32 2 5 6 A7 B7 V. Description of the invention (145 carboxyl sacrifice 1 recorded life wear 2 Zheng Mingxuan 3 effect life extract 4 effect ^ wear 5 Xiang Ming wear 6 Xiang life wear 7 Xiao Ming # 8 Zhuan Ming wear 9 Lu Ming Rong Yi 〇

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Mw (Please read the notes on the back before filling out this page) _5_________ Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs. Today's 1-3 3 ″ 3,3 3. ° 2_8 f 0 3.〇3.2 3.1 3.5 1, 5 〇.3ο Ο. Ο 0 · 9 2 0.5 -148-This paper size is applicable to China_Home Standard (匚 呢) 戍 4 size (210 father 297 mm) A7 B7 V. Description of the invention (146 The central standard of the Ministry of Economic Affairs is The Tj test dissolution rate of the printed table 1 of the employee consumer cooperative is determined as follows: 0.85 g per polymer is dissolved in 4.15 g of methoxypropyl-2-acetic acid vinegar, and Filtered by a filter to prepare a polymer solution. This polymer solution was coated on a silicon film with a spin coater, and was superimposed on a 100X with a vacuum adsorption type: dried for 90 seconds. This resulted in a 1.0 micron thick polymer film. This polymer film was dissolved in 0.3 3 1 equivalent of argon to oxidize tetramethyl in an aqueous solution at 2 3 ° C, and the dissolution rate was measured by a model of a dissolution rate monitor Model DRM (manufactured by Orbital Science Co., Ltd.). The abbreviations used in 1 represent the following compounds: TBVE: tertiary butyl ethyl ethyl ether EVE: ethyl vinyl ether BHC P: 2,2-bis (4-hydroxycyclohexyl) propane DHCH: 1,4-dihydroxycyclohexane THCE _ · tris (4-hydroxycyclohexyl) ethane Synthesis of the photoacid generator used in the present invention is described below Example: Synthesis Example 1 In 200 ml of ion-exchanged water, 199 g (0.300 mol) of a 45/0 triphenylphosphonium chloride aqueous solution was added. This solution was added at room temperature with stirring. 10.5 A solution of g (0.030 mol) of hard (branched) sodium salt of dodecylbenzenesulfonic acid in 400 ml of ion-exchanged water. In this way, a viscous solid was decanted and separated. The resulting viscous solid was used for 1 It was washed with liters of ion-exchanged water, and then dissolved in 100 ml of acetone. This solution was poured into 500 ml of ion-exchanged water with stirring, resulting in a precipitate. The resulting: The precipitate was dried at 5 ° C in the air. 5 5 grams of glassy solid sample. This -149- This paper size is applicable to 10. National Standards (CNS) M specifications (2 丨 0 &gt; &lt; 297 mm)-Please read the note 4 above and write it first Clothes page

1T S4 32 2 5 6 A7 ---------- B7 ______ V. Description of the invention (147) The solid was confirmed to be the compound of the present invention (j [_ 3) by NMR measurement. Synthesis Example 2 In the same manner as in Synthesis Example 1, except that 93 g (0.030 mol) of the branched sodium salt of octyloxybenzenesulfonic acid was used instead of 10.5 g (0.030 mol) of twelve Sodium benzenesulfonate, 132 g of glassy solid were obtained. This solid was confirmed to be the compound of the present invention by the NMR measurement (〗 -10). Synthesis Example 3 In the same manner as in Synthesis Example 1, except that 257 g (0.30 mol) of 40% sodium dibutyl sulfenyl sulfonate was used instead of 10.5 g (0.030 mol) of ten Sodium diylbenzenesulfonate yielded 148 g of glassy solid. This solid was confirmed to be the compound of the present invention by NMR measurement (〖_ 3 4) β Synthesis Example 4 Into 200 ml of ion-exchanged water was added 95 g (0030 mole) of diphenyl chloride to break into this solution at room temperature. A solution containing 0.5 g (0.030 mol) of a hard (branched) dodecylbenzenesulfonic acid sodium salt in 400 ml of ion-exchanged water was added with stirring. A viscous solid was precipitated in this way, and the viscous solid formed by decantation and separation of the solution was washed with 1 liter of ion. Then dissolve the solid in 100 ml of propidium and pour it into 500 ml of ion. Printed in exchange water produced by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economy, while stirring, and then settling. The resulting precipitate was dried in air at 50 ° C to obtain 14.5 g of a glassy solid. This solid was confirmed to be the compound (II-3) of the present invention by NMR measurement. Rounded to 5 1 _ · In the same manner as in Synthesis Example 4, except that 12-3 g (0.00 mol) of the branched sodium salt of octyloxydinaphthalenesulfonic acid was used instead of i used in Example 4 〇5 克 -150- 本Paper size applies to China National Standard (CNS) A4 (2I0X297 gram) Printed by the Central Laboratories Bureau of the Ministry of Economic Affairs, Fangong Xiao F Cooperative 鲚 4 32 2 5 e? A7 ———___ B7 V. Description of the invention (148) ( 0.030 mole) of sodium dodecylbenzenesulfonate to produce 62 g of glassy solid β. This solid was confirmed to be the compound of the present invention (π_3 1) by NMR measurement. Synthesis Example 6 To 400 ml of ion-exchanged water was added 129 g (0,030 mol) to vaporize 4,4, bis (tributylphenyl) iodine. A solution of 12.7 g (0.030 mol) of 9,10-di (n-butoxy) anthracene-2-sulfonic acid sodium in 400 ml of ion-exchanged water was added to this solution with stirring at room temperature. This precipitated a viscous solid 'and decanted the separation solution. The resulting sticky solid was washed with 1 liter of ion. The solid was then dissolved in 100 ml of acetone, poured into 500 ml of ion-exchanged water 'while stirring, and then precipitated. The resulting precipitate was dried in air at 50 ° C to obtain 21.7 g of a powdery solid. This solid was confirmed to be the compound (III-41) of the present invention by NMR measurement. In a similar manner to the above, the amidine and iodonium compounds of the present invention were synthesized. The following further illustrates the synthesis of dissolution inhibitors used in the examples:

Into I, a solution containing 20 g of α, α ', α &quot; -ginseng (4-hydroxyphenyl) _ι, 3,5-triisopropylbenzene in 400 ml of tetrahydrofuran in w g of tertiary potassium butoxide Mix under nitrogen 'and stir at room temperature for 10 minutes. Then 29.2 grams of di-tertiary butyl carbonate was added. The reaction in the formed solution was performed at room temperature for 3 hours. The obtained reaction mixture was poured into ice-cold water, and the reaction product was extracted with ethyl acetate. The ethyl acetate layer was then washed with water, dried, and the solvent was evaporated. The obtained crystalline solid was recrystallized from diethyl ether and dried. 2 5.6 g of compound VII were obtained (all R groups = t-BOC). Synthetic Π · -151-This paper size applies to Chinese national standard (CNS &gt; A4 size (210X297 mm) (please read this page in the note on the back first)). Pack 1 Order P4 322 5 6 A7 B7 V. Description of the Invention (149 The print of the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs will contain 14.3 grams (0.020 mol) of α, α, α ', 〇 /, α〃, οT-4- (4-hydroxyphenyl) · 1, To a solution of 3,5-diethylbenzyl in 120 ml of dimethylformamide was added 21.2 g (0.15 mol) of benzyl carbonate, and 27.1 g (0.14 mol) of tert-butyl bromide. The solution was stirred at 120 ° C for 7 hours. The resulting reaction mixture was poured into 1.5 liters of water and then extracted with ethyl acetate. The resulting extract was dried over magnesium sulfate, concentrated, and purified by column chromatography (carrier: two Silicon oxide, development solvent: ethyl acetate / n-hexane (2/8, volume ratio)). In this way, 24 g of light yellow powder was obtained. This powder was confirmed by NMR measurement as an exemplary compound ⑽ (all R groups = _Ch2-COOC-C4H9⑴). Synthesized ΠΙ in 48.1 g (〇 · ιmol) containing α, α ,, α〃-ginseno (4-hydroxyphenyl _ 1'3,5-Diisopropyl Basically add 22.1 g (0.16 mol) of potassium carbonate and 42.9 g (0.22 mol) of tertiary butyl acetate to a solution of 300 liters of dimethylmethamine. Ester. The resulting solution is at 120. (: Stir for 5 hours. Pour the reaction mixture into 2 liters of ion-exchanged water, neutralize with acid, and then extract with acetic acid. The resulting extract is concentrated and fractionated , For column chromatography analysis and purification (carrier: silica dioxide 'development solvent: ethyl acetate / n-hexane (丨 / 5 volume ratio)). 10 g of exemplary compound ㈣ was prepared (two R groups = _CH2_ COOC-C4H9 (t), one R group = hydrogen). Examples 1 to 15 and Comparative Examples 1 to 3 The light-sensitive composition of the present invention was prepared using the compounds prepared in the foregoing synthetic examples. The prescription and comparative light-sensitive combination used herein The place of the object is shown in Table 2. Please read

Note: No. U t binding -152 This paper size is applicable to the Chinese National Standard (CMS) A4 specification (2〗 0 × 297 mm) Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs &quot; i, 4 32. 2 bd A7 B7 V. Description of the invention (150) Table 2: Formulation of light-sensitive composition polymer photoacid generator dissolution inhibitor additive information example 1 polymer 2 1-3 without ADD1 (9.46 g) (0.5 g) (0.04 g) Example 2 Polymer 3 1-10 without ADD1 (9.46 g) (0.5 g) (0.04 g) Example 3 Polymer 4 1-34 without ADD1 (9.36 g) (0.6 g) (0.04 g) Example 4 Polymer 5 Π-3 without ADD1 (9.56 g) (0.4 g) (0.04 g) Example 5 Polymer 6 Π-31 without ADD2 (9.46 g) (0.5 g) (0.02 g) Example 6 Polymer 7 11 &quot; 41 without ADD2 (9.68 g) (0.3 g) (0.02 g) Example 7 Polymer 8 I-3 / PAG 6-8 without ADD3 (9.48 g) (0.3 5 g / 0'15 G) (.02 g) Example 8 Polymer 9 I-10 / PAG5-12 without ADD3 (9'58 g) (0.2 g / 0.2 g) (0.02 g) Example 9 Compound 10 I-3 / PAG8-13 without ADD1 (9.36 g) (0_42 g / 0.18 g) (0.04 g) Example 10 Polymer 3 / Π-3 without ADD1 polymer 4 (0.5 g) (0.04 g) (4.73 g / 4.73 g) Example 11 Polymer 2 1-3 Synthesis I ADD1 (9.41 g) (0.5 g) (0.05 g) (0.04 g) Example 12 Polymer 2 1-10 Synthesis of η ADD1 ( 9.3 6 grams) (0.5 grams) (0.10 grams) (0.04 grams) Example 13 Polymer 7 1-3 was prepared as Π ADD1 (9.31 grams) (0.5 grams) (0.15 grams) (0.04 grams) (continued) ) (Please read the notes on the back to fill in this page first) 装-, ιτ -153-This paper size is applicable to China National Standard (CNS) Α4 size (2 丨 0 × 297 mm) 隳 432 25 6

A7 B7 Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (151) Table 2: (continued) Example of polymer photoacid generator dissolution inhibitor additive 14 Polymer 7 1-3 Without DP1 / ADD1 ( 9.56 g) (0.3 g) (0.1 g / 0.10 g) Example 15 Polymer 7 1-3 without DP1 / ADD1 (9,51 g) (0'4 g) (0.15 g / 0.04 g) Comparative polymer 1 1-3 without ADD1 example 1 (9.91 g) (0.05 g) (0.04 g) comparative polymer 2 PAG 4-1 without ADD1 example 2 (9.93 g) (0.03 g) (0.04 g) comparative polymer 1 PAG 4-1 without ADD1 Example 3 (9.93 g) (0.03 g) (0.04 g) The structure of the compounds used in the compositions listed in Table 2 is as follows. 9 '-154- This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) r4 322 5 β A7 B7 V. Description of the invention (152)

Ο S + CF3SO3 &quot; PAG 4-1

NO

OCHi

'Please read back &amp; Note I-A to write this page

Printed by the Consumer and Consumer Cooperatives of the Central and Western Associate Bureaus of the Ministry of Economic Affairs

N / Bu N ADD 2 -155 This paper size is applicable to the Chinese National Standard (CNS) A4 specification (210X 297 mm) 0 · -ΝΗ, ADD 3 '4 3225 6 A7 _____B7__ V. Description of the invention (153) _Light sensitive Evaluation of the composition: Each light-sensitive composition listed in Table 2 was dissolved in 48 g of methoxypropyl-2-acetate, and then filtered through a 0.2 micron filter to prepare a photoresist solution. This photoresist solution was coated on a silicon film with a spin coater, and dried with a vacuum adsorption type at 130 ° C for 60 seconds to prepare a 0.83 micron thick polymer film. Each of the photoresist films thus prepared was exposed with a KrF excimer laser segmenter (NSR1 0505EX; NA = 0.42, manufactured by Nikon). Immediately after exposure, each photoresist film was applied with 100. (: The air-absorption type thermal superposition heat for 60 seconds, and then immediately immersed in a 2.38% aqueous solution of tetramethylammonium hydroxide (TMAH) for 60 seconds. Then rinse with pure water for 30 seconds, and then dry. The shape formed on the hair film in this way is used to determine its contour, sensitivity, and resolution, and the following evaluations are made: [Contour], the shape of each type on the silicon film is observed under a scanning electron microscope to evaluate the photoresist profile [Sensitivity] The exposure required to regenerate a 0.35 micron mask pattern is defined as sensitivity. Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs [Resolution] The resolution is reproduced 0.3 The limitation of resolution at the exposure amount required for the 5 micron mask type represents the characteristics of the light-sensitive composition of the present invention compared with the comparative light-sensitive composition. The results are shown in Table 3. 156- This paper size Applicable to China National Standard (CNS) A4 specification (21 〇 297 Gong Chu) Γ belongs to 432 25 6 Α7 B7 V. Description of the invention (154) [Thermal resistance] Use the following method to make thermal resistance for each photoresistant type generated above Test: There will be The stack was brought into contact with a 130 ° C air-adsorption hot stack for 2 minutes, and then cooled on a cold stack for 1 minute. Then, the outline of the thus-treated pattern (line-and- • void: 10 microns) was observed with an electron scanning microscope, below The column standard evaluates the heat flow intensity: A: The heat flow (shape is nearly rectangular) is smaller than the photoresist type of Comparative Example 1. B: The heat flow is equal to the heat flow of the photoresist type of Comparative Example 1 β C: The heat flow (shape is nearly rectangular) is greater than Comparative example! The results obtained for the photoresist type β are shown in Table 3. Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 157- This paper size applies to the Chinese National Standard (CNS) Α4 specification (2 [0 × 297 mm)

Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs I 黡 4 32 25 6 A7 B7 V. Description of Invention (155)

Allergy Resolution Contour Thermal Resistance-1 I (mJ / cm 2) lm) 1 1 I &gt; Please II Example 1 35 0.25 Rectangular A Read I Γ !: I Example 2 34 0.28 Rectangular A Read Back JII Example 3 39 0.26 Note I of rectangle A! Example 4 42 0.26 Rectangle A means I item, Example 5 40 0.27 Rectangle A: Filling / Price Example 6 45 0.26 Rectangle A Write this page to mount I Example 7 Π 0.25 Rectangle AI t Example S 30 0.26 Rectangle AII Example 9 38 0.26 Rectangle A i [Example 10 41 0.26 Rectangle AI Order example 11 33 0.25 Rectangle AI | Example 12 35 0.25 Rectangle AII Example 13 38 0.25 Rectangle AI i Example 14 30 0.26 Rectangle A) l / line example 15 27 0.28 Rectangle A Strict I Comparative Example r 33 0.29 Rectangle BI Ί Comparative Example 2 30 0.30 Rectangle Θ i | Comparative Example 3. 28 0.30 Rectangle BII -158-This paper size applies to China National Standard (CNS) A4 (210X297) (Mm) "麄 4 32 25 6 A7 B7 V. Description of the invention (156) As can be seen from the results listed in Table 3, compared with the comparative photoresist film, the photoresist film of the present invention Satisfactory shaped profile, high sensitivity and high resolution, in particular entrants, photoresist formulation formed therein have excellent heat resistance. The chemically-enhanced positive-type photoresist composition of the present invention forms a photoresist type with a satisfactory profile, and JL has high sensitivity, high resolution, and excellent thermal resistance. (Please read the precautions on the back # -_ Fill in this page first) Install., Line; ν · Industrial Printing Co., Ltd., Shellfish Consumer Cooperative of Central Bureau of Standards of the Ministry of Economic Affairs-159- This paper is in accordance with China National Standard (CNS) Α4 (21〇_297 mm)

Claims (1)

Mine 4 offenders 2 5 b Patent application No. 86112855 Historical application for Fuli Festival. H1 倏 JL⑼⑼⑼ 朱 6 Η 、 · Member Mingdi, whether the original substance of the original substance is changed after the amendment of this case, and the application for patent I is 1. A chemically enhanced positive photoresist composition containing a lye-base-soluble resin, which has at least two phenols. Compounds based on hydroxyl groups, phenolic bases of alkali-soluble resins, and “cross-linked cross-links generated by the reaction of alkyl vinyl acid compounds with acid groups that are decomposed by the action of acid” to increase the degree of dissolution in alkaline developers. The test-soluble resin has a weight average molecular weight of 2,000 to 20,000; and ⑹0.1 to 20% by weight of the compound represented by the formula (丨) or (π) below: This compound is exposed to active light or radiation Generates acid when: D X (I) Ren Chong first read the notes on the back and fill in this page) Order (II) Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs, where 1 ^ to 115 may be the same or different, and each represents a hydrogen atom, an alkyl group, a cycloalkyl group, a cyclooxy group, a carboxy group, a halogen atom, or -S -An R 6 group; R 9 represents an alkyl group or an aryl group; an anion of epibenzenebenzenesulfonic acid, benzenesulfonic acid, or anthracenesulfonic acid, which has at least one substituent, such substituents being selected from at least 8 carbon atoms A branched or cyclic alkyl group and a branched or cyclic alkoxy group of at least 8 carbon atoms, or at least two substituents, these substituents are selected from 4 to 7 This paper is applicable to Chinese standards (CNS & gt A4 Zigger (210 × 297 mm) ABCD 4 322 5 6, patent application scope of broken atom straight chain, branched or cyclic alkyl group and 4 to 7 carbon atoms straight chain, branched or cyclic alkoxy group, Or at least three substituents, these substituents are selected from straight or branched alkyl groups of 1 to 3 carbon atoms, and straight or branched chain oxygen groups of 1 to 3 carbon atoms. The positive photoresist composition of item 1, which further contains an organic test compound. 3. According to the scope of patent application No. 1 The positive photoresist composition according to the item, wherein the dissolving resin is a low-dispersion poly (light-based styrene) synthesized according to an anionic living polymerization method and cross-linked externally and decomposed by acid to increase the solubility of the dissolving developer "Base Preparation" 4. According to the positive photoresist compound of the patent application No. 1, each of them still has (d) at least one phenolic compound with a single molecular weight of not more than 3,000. 5. According to the patent application The positive photoresist composition of item i, "each of which has a low molecular weight acid decomposition dissolution inhibitor, this inhibitor is based on the introduction of ^ decomposition group, a single molecular weight is not greater than 3,00 Compounds made by the Department of Chemistry ^ \ Read the "##" item on the back of the page before filling in this page) -π Shellfish Consumer Cooperatives, Central Bureau of Standards, Ministry of Economic Affairs_ 袈 -2- This paper applies the gjgf standard (CNS) (2 Xiangongye 432256 Patent No. 86112855 ^ Please note Chinese amendment to February 100 years) "Tong 3 'Amendment · 1 B5 Grooming IV. Chinese Abstract (Name of the invention: chemically enhanced positive type) Photoresist composition A chemically enhanced positive photoresist A composition containing ⑷. Alkali-soluble resin, which has a group which is crosslinked and decomposed by the action of acid to increase the solubility in alkali film, and (b) 0.1 to 20% by weight below formula ( A compound represented by I) or (Π), which produces an acid when exposed to active light or radiation: Ri X (I) Please read the notes on the back before filling in this page. ½ Pack. Printed by the Consumer Cooperatives of the Central Bureau of Standards, Ministry of Economic Affairs 2- X Abstract of the English invention (Name of the invention: &quot; POSITIVE RESIST COMPOSITION OF) CHEMICAL AMPLIFICATION TYPE &quot; Japanese: 増 化 増 型 型 求 9 b 乂 卜 组成 amplification type, comprising (a) an alkali-soluble resin having crosslinkage and groups which are decomposed by the action of an acid to increase the solubility in an alkali developer and (b) 0.1 to 20 wt.% of a compound represented by the following formula (I) or (II) which generates a sulfonic acid by irradiation with active rays or radiation; (i) This paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) -12 P4 32 2 5 6 笫 86112855 Patent Application Chinese Specification Correction Page (Feb 88 ja Ge 5 β _. Β5 Supplement IV. Ningwen Abstract of Invention (Name of Invention) (I work) Read the notes on the back and write the columns on this page. 111 to 5 can be the same or different. Each represents a hydrogen atom, an alkyl group, a cycloalkyl group, an alkoxy group, a hydroxyl group, a halogen atom, or -s. -r6 is fluorene; R9 is alkyl or aryl; X- is an anion of benzenesulfonic acid, sulfonic acid or Esulfonic acid, which has at least one substituent 'these substituents are selected from a branch of at least 8 carbon atoms Or a cyclic alkyl group and a branched or cyclic alkoxy group of at least 8 carbon atoms, or at least two substituents, such substituents being selected from linear, branched or cyclic alkyl groups of 4 to 7 carbon atoms And a linear, branched or cyclic alkoxy group of 4 to 7 carbon atoms, or at least three substituents, these substituents are selected from a linear or branched alkyl group of 1 to 3 carbon atoms, and 1 to 3 Straight or branched alkoxy groups of one carbon atom. English Abstract of Invention (Name of Invention: II Printed by the Consumer Cooperatives of the China Standards Bureau of the Ministry of Economic Affairs wherein Ry to R5 are the same or different, and each represents a hydrogen atom, an alkyl group, a cycloalkyl group, an alkoxy groupr a hydroxyl group, a halogen atom or-Γ * S-R6 group; Rg represents an alkyl group or an aryl group; and X_ represents an anion of benzenesulfonic, naphthalenesulfonic or anthracenesulfonic acid having at least one selected from the group consisting of branched or cyclic alkyl groups having at least 8 carbon- 2a-This paper size is applicable to China National Twin (CNS) A4 size (210X297 mm) &quot; F432256 No. 86U2855 Patent Application Chinese Specification Revised Page (2 in 1988) w. Abstract of Chinese Invention (Name of Invention English Abstract of Invention (Name of Invention: "^^ Read the notes on the back before filling in the sheds on this page ) Tr · Consumer cooperation of the China Bureau of Standards, Ministry of Economic Affairs, printing atoms and branched or cyclic alkoxy groups having at least 8 carbon atoms, or at at least two differents selected from the group consisting of straight-chain, branched or cyclic alkyl groups having from 4 to 7 carbon atoms and straight-chain, branched or cyclic alkoxy groups having from 4 to 7 carbon atoms, or at at least three's selected from the group consisting of straight-chain or branched alkyl groups having from 1 to 3 carbon atoms and straight-chain or branched alkoxy groups having from 1 to 3 carbon atoms. 2b- This paper size applies to China National Standard (CNS) A4 specifications (2 丨 0X297 mm) 4 mines of wire mine 2 5 b Patent application No. 86112855 History application for Fuli Festival. H1 倏 JL Too⑼? Zhu 6Η, · Member Mingdi, whether the original substance of the original substance is changed after the amendment of this case, and the application for patent I is 1. A chemically enhanced positive photoresist composition containing a lye-base-soluble resin, which has at least two phenols. Compounds based on hydroxyl groups, phenolic bases of alkali-soluble resins, and “cross-linked cross-links generated by the reaction of alkyl vinyl acid compounds with acid groups that are decomposed by the action of acid” to increase the degree of dissolution in alkaline developers. The test-soluble resin has a weight average molecular weight of 2,000 to 20,000; and ⑹0.1 to 20% by weight of the compound represented by the formula (丨) or (π) below: This compound is exposed to active light or radiation Generates acid when: D X (I) Ren Chong first read the notes on the back and fill in this page) Order (II) Printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs, where 1 ^ to 115 may be the same or different, and each represents a hydrogen atom, an alkyl group, a cycloalkyl group, a carboxy group, a carboxy group, a halogen atom or -S -An R 6 group; R 9 represents an alkyl group or an aryl group; an anion of epibenzenebenzenesulfonic acid, benzenesulfonic acid, or anthracenesulfonic acid, which has at least one substituent, such substituents being selected from at least 8 carbon atoms A branched or cyclic alkyl group and a branched or cyclic alkoxy group of at least 8 carbon atoms, or at least two substituents, these substituents are selected from 4 to 7 This paper is applicable to Chinese standards (CNS &gt; Α4 wash grid (210 × 297 mm)