TW430740B - New leakage detecting system for pneumatic valve - Google Patents

New leakage detecting system for pneumatic valve

Info

Publication number
TW430740B
TW430740B TW88116049A TW88116049A TW430740B TW 430740 B TW430740 B TW 430740B TW 88116049 A TW88116049 A TW 88116049A TW 88116049 A TW88116049 A TW 88116049A TW 430740 B TW430740 B TW 430740B
Authority
TW
Taiwan
Prior art keywords
pipework
detecting system
leakage detecting
fluid
valve
Prior art date
Application number
TW88116049A
Other languages
English (en)
Inventor
Hung-Ru Jian
Ching-Jiun Li
Original Assignee
Taiwan Semiconductor Mfg
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Taiwan Semiconductor Mfg filed Critical Taiwan Semiconductor Mfg
Priority to TW88116049A priority Critical patent/TW430740B/zh
Application granted granted Critical
Publication of TW430740B publication Critical patent/TW430740B/zh

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  • Examining Or Testing Airtightness (AREA)
TW88116049A 1999-09-17 1999-09-17 New leakage detecting system for pneumatic valve TW430740B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW88116049A TW430740B (en) 1999-09-17 1999-09-17 New leakage detecting system for pneumatic valve

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW88116049A TW430740B (en) 1999-09-17 1999-09-17 New leakage detecting system for pneumatic valve

Publications (1)

Publication Number Publication Date
TW430740B true TW430740B (en) 2001-04-21

Family

ID=21642328

Family Applications (1)

Application Number Title Priority Date Filing Date
TW88116049A TW430740B (en) 1999-09-17 1999-09-17 New leakage detecting system for pneumatic valve

Country Status (1)

Country Link
TW (1) TW430740B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI775063B (zh) * 2020-04-01 2022-08-21 力晶積成電子製造股份有限公司 氣動元件用的供氣洩漏偵測系統

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI775063B (zh) * 2020-04-01 2022-08-21 力晶積成電子製造股份有限公司 氣動元件用的供氣洩漏偵測系統

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Legal Events

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GD4A Issue of patent certificate for granted invention patent
MK4A Expiration of patent term of an invention patent