TW429552B - Manufacturing method of ETOX cell - Google Patents

Manufacturing method of ETOX cell

Info

Publication number
TW429552B
TW429552B TW87111748A TW87111748A TW429552B TW 429552 B TW429552 B TW 429552B TW 87111748 A TW87111748 A TW 87111748A TW 87111748 A TW87111748 A TW 87111748A TW 429552 B TW429552 B TW 429552B
Authority
TW
Taiwan
Prior art keywords
manufacturing
etox cell
etox
cell
source
Prior art date
Application number
TW87111748A
Other languages
Chinese (zh)
Inventor
Huei-Huang Chen
Yun-Ding Hung
Original Assignee
United Microelectronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by United Microelectronics Corp filed Critical United Microelectronics Corp
Priority to TW87111748A priority Critical patent/TW429552B/en
Application granted granted Critical
Publication of TW429552B publication Critical patent/TW429552B/en

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  • Semiconductor Memories (AREA)
  • Non-Volatile Memory (AREA)

Abstract

A manufacturing method of an ETOX cell is disclosed. It uses a self-aligned contact etching process. Cap layer and spacer are used as an etching buffer layer to protect the gate till the source being exposed. Then, use a conductive layer to connect the discrete sources to form the common source of ETOX cell.
TW87111748A 1998-07-18 1998-07-18 Manufacturing method of ETOX cell TW429552B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW87111748A TW429552B (en) 1998-07-18 1998-07-18 Manufacturing method of ETOX cell

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW87111748A TW429552B (en) 1998-07-18 1998-07-18 Manufacturing method of ETOX cell

Publications (1)

Publication Number Publication Date
TW429552B true TW429552B (en) 2001-04-11

Family

ID=21630714

Family Applications (1)

Application Number Title Priority Date Filing Date
TW87111748A TW429552B (en) 1998-07-18 1998-07-18 Manufacturing method of ETOX cell

Country Status (1)

Country Link
TW (1) TW429552B (en)

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Legal Events

Date Code Title Description
GD4A Issue of patent certificate for granted invention patent
MM4A Annulment or lapse of patent due to non-payment of fees