TW429208B - Apparatus and method for cleaning abrasive liquid flow meter used in polishing apparatus - Google Patents

Apparatus and method for cleaning abrasive liquid flow meter used in polishing apparatus

Info

Publication number
TW429208B
TW429208B TW89100298A TW89100298A TW429208B TW 429208 B TW429208 B TW 429208B TW 89100298 A TW89100298 A TW 89100298A TW 89100298 A TW89100298 A TW 89100298A TW 429208 B TW429208 B TW 429208B
Authority
TW
Taiwan
Prior art keywords
supply line
abrasive
abrasive liquid
flow meter
cleaning
Prior art date
Application number
TW89100298A
Other languages
English (en)
Inventor
Fujihiko Toyomasu
Takashi Tsuzuki
Original Assignee
Ebara Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Ebara Corp filed Critical Ebara Corp
Application granted granted Critical
Publication of TW429208B publication Critical patent/TW429208B/zh

Links

Landscapes

  • Grinding-Machine Dressing And Accessory Apparatuses (AREA)
  • Finish Polishing, Edge Sharpening, And Grinding By Specific Grinding Devices (AREA)
TW89100298A 1999-01-12 2000-01-11 Apparatus and method for cleaning abrasive liquid flow meter used in polishing apparatus TW429208B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
JP526699A JP2000202765A (ja) 1999-01-12 1999-01-12 ポリッシング装置用研磨剤流量計の洗浄装置及び洗浄方法及びポリッシング装置

Publications (1)

Publication Number Publication Date
TW429208B true TW429208B (en) 2001-04-11

Family

ID=11606436

Family Applications (1)

Application Number Title Priority Date Filing Date
TW89100298A TW429208B (en) 1999-01-12 2000-01-11 Apparatus and method for cleaning abrasive liquid flow meter used in polishing apparatus

Country Status (2)

Country Link
JP (1) JP2000202765A (zh)
TW (1) TW429208B (zh)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI756329B (zh) * 2017-03-15 2022-03-01 以色列商核心流有限公司 具阻塞檢測功能之非接觸式支撐平台

Families Citing this family (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN102267097B (zh) * 2011-07-22 2013-04-24 温州欣视界科技有限公司 小型硬性角膜接触镜抛光液自动清洗装置
US9259982B2 (en) * 2012-10-05 2016-02-16 Consumer Products International Llc. Currency operated tire inflation and repair apparatus and methods
JP5978123B2 (ja) 2012-12-25 2016-08-24 株式会社東芝 電磁流量計を使用した洗浄品質管理システム、及び洗浄品質管理方法
JP6295107B2 (ja) 2014-03-07 2018-03-14 株式会社荏原製作所 基板処理システムおよび基板処理方法
JP6376085B2 (ja) * 2015-09-03 2018-08-22 信越半導体株式会社 研磨方法及び研磨装置
JP6917966B2 (ja) 2017-10-25 2021-08-11 株式会社荏原製作所 弾性膜のストレッチ動作プログラム、弾性膜のストレッチ動作方法、および研磨装置
CN110370156B (zh) * 2019-07-24 2024-08-13 武汉上谱分析科技有限责任公司 一种专门为环氧树脂靶及非金属陶瓷类轻量型抛光机
CN110614577B (zh) * 2019-09-28 2020-07-24 浙江利恩工程设计咨询有限公司 一种老化瓷砖便捷修复设备
CN114147608B (zh) * 2021-12-28 2022-07-12 徐州汉通电子科技有限公司 一种半导体晶圆的划片装置

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
TWI756329B (zh) * 2017-03-15 2022-03-01 以色列商核心流有限公司 具阻塞檢測功能之非接觸式支撐平台
US11305950B2 (en) 2017-03-15 2022-04-19 Core Flow Ltd. Noncontact support platform with blockage detection

Also Published As

Publication number Publication date
JP2000202765A (ja) 2000-07-25

Similar Documents

Publication Publication Date Title
TW429208B (en) Apparatus and method for cleaning abrasive liquid flow meter used in polishing apparatus
IL173444A0 (en) A system for performing fluid administration
MXPA03011139A (es) Aparato y metodo para mezclar y surtir un fango mejorado con aditivo.
ATE492184T1 (de) Handliches wasserversorgungssystem
CA2185965A1 (en) Mixing Device for Mixing a Low-Viscosity Fluid Into a High-Viscosity Fluid
WO1996027109A3 (en) Ice slurry delivery system
WO2003011097B1 (en) Chemical dispenser for a hard floor surface cleaner
ATE26397T1 (de) Zahnreinigungssystem.
GB2440295A (en) A system for controlling the rate of a pump on a water drainage outlet of a water dispensing unit
EP0922534A3 (en) Slurry mixing apparatus and method
WO2008036108A3 (en) Bubble suppressing flow controller with ultrasonic flow meter
GB2382317B (en) Abrasive blasting apparatus
EP0917481A4 (en) TISSUE CLEANING APPARATUS AND METHOD
EP1004723A3 (en) Back-up valve for pool cleaner
DE50203258D1 (de) Abgabevorrichtung für ein Fluid
CA2139383A1 (en) Media Control Valve
JP2005506482A (ja) 螺旋スクリュー形式の液体シールポンプ
CN210473271U (zh) 插卡式水控机用一体化电磁阀过滤器及插卡式水控机
CN214657447U (zh) 一种用于管道水流量平衡调节器
TW347337B (en) Fluid delivery device
CN220666372U (zh) 室内自动加压储水装置
EP1082045A4 (en) DEVICE AND METHOD FOR THE PREPARATION OF TEA WITH A BREWING DEVICE
WO2004042848A3 (en) Fluid supply system
SE9900263D0 (sv) Mätorgan för bränslepump
CN212004382U (zh) 一种一键三控浴缸淋浴水龙头

Legal Events

Date Code Title Description
GD4A Issue of patent certificate for granted invention patent
MK4A Expiration of patent term of an invention patent