TW427205U - Device for processing semiconductor waste gas - Google Patents

Device for processing semiconductor waste gas

Info

Publication number
TW427205U
TW427205U TW89204408U TW89204408U TW427205U TW 427205 U TW427205 U TW 427205U TW 89204408 U TW89204408 U TW 89204408U TW 89204408 U TW89204408 U TW 89204408U TW 427205 U TW427205 U TW 427205U
Authority
TW
Taiwan
Prior art keywords
waste gas
processing semiconductor
semiconductor waste
processing
gas
Prior art date
Application number
TW89204408U
Other languages
Chinese (zh)
Inventor
Tsung-Mau Chen
Original Assignee
Chen Tsung Mau
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Chen Tsung Mau filed Critical Chen Tsung Mau
Priority to TW89204408U priority Critical patent/TW427205U/en
Publication of TW427205U publication Critical patent/TW427205U/en

Links

TW89204408U 2000-03-20 2000-03-20 Device for processing semiconductor waste gas TW427205U (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW89204408U TW427205U (en) 2000-03-20 2000-03-20 Device for processing semiconductor waste gas

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW89204408U TW427205U (en) 2000-03-20 2000-03-20 Device for processing semiconductor waste gas

Publications (1)

Publication Number Publication Date
TW427205U true TW427205U (en) 2001-03-21

Family

ID=21665472

Family Applications (1)

Application Number Title Priority Date Filing Date
TW89204408U TW427205U (en) 2000-03-20 2000-03-20 Device for processing semiconductor waste gas

Country Status (1)

Country Link
TW (1) TW427205U (en)

Cited By (2)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107224870A (en) * 2017-06-26 2017-10-03 佛山瀚兽环境科技服务有限公司 Pipeline heat treatment structure and VOC processing systems
CN113413746A (en) * 2021-07-02 2021-09-21 北京京仪自动化装备技术股份有限公司 Exhaust gas treatment device and exhaust gas humidity control method thereof

Cited By (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN107224870A (en) * 2017-06-26 2017-10-03 佛山瀚兽环境科技服务有限公司 Pipeline heat treatment structure and VOC processing systems
CN107224870B (en) * 2017-06-26 2023-06-09 佛山瀚兽环境科技服务有限公司 Pipeline heat treatment structure and VOC processing system
CN113413746A (en) * 2021-07-02 2021-09-21 北京京仪自动化装备技术股份有限公司 Exhaust gas treatment device and exhaust gas humidity control method thereof

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Legal Events

Date Code Title Description
GD4K Issue of patent certificate for granted utility model filed before june 30, 2004
MM4K Annulment or lapse of a utility model due to non-payment of fees