經濟部中央標準局員工消費合作社印製 '· . ^ q 3 4 9 A7 ________B7 五、發明説明丨) 【發明領域】 本發明係有關使用於通訊機器等之頻率選擇用之爐波 器’使用於尚安定度之振盪器之諧振子等兀件等所使用之 表面彈性波元件。 【相關技術之槪要】 作爲先行技術之表面彈性波元件用之基板，一般爲使 用鈮酸鋰，鉅酸鋰，四硼酸鋰（例如，參照曰本特昭6 〇 -4 1 3 1 5號公報）’將水晶等之壓電性單結晶，以適 當截切面所切斷 > 硏磨之基板。 使用於表面彈性波元件之壓電基板之重要性能，係可 列舉其延遲時間溫度係數（T C D )與電氣機械結合係數 CK2) ，TCD若愈近於零’又’ κ2愈大，作爲表面彈 性波元件用基板較佳。先行技術，係作爲表面彈性波元件 用之基板，一般爲使用將使用鈮酸鋰（L i Nb〇3)，钽 酸鋰（L i T a 0 3)，四硼酸鋰（L i 2B 4〇 7)，水晶 等之壓電性單結晶，以適當之截切面加以切斷，硏磨之基 扳。L i N b 0 3 (例如，1 2 8。Y截切—X傳播）， K2係具5 . 5%大，由於TCD爲高到74ppm/°C， 所以，會發生由於溫度變化之頻率漂移，而不能使用於欲 求取窄頻帶特性之濾波器，或欲求取高安定精度之振盪器 等。又’Li2B4〇7(例如，45。X截切—Z傳播）， 其K 2爲1 %，T C D爲0 p p / °c，但是，基板溶解於水 ，又因其具有潮解性，製程爲困難，或具有劣於可靠性等 紙張尺度適用中國國家標準（CNS ) A4规格（2Ϊ0Χ 297公釐) ~7~_ " (請先閱讀背面之注項再填寫本頁)Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs ^ q 3 4 9 A7 ________B7 V. Description of the invention 丨) [Field of the invention] The present invention relates to a furnace wave device for frequency selection used in communication equipment, etc. Surface acoustic wave devices used for oscillators such as oscillators with stable stability. [Summary of related technologies] As the substrate for the surface acoustic wave device of the prior art, lithium niobate, lithium giant acid, and lithium tetraborate are generally used (for example, refer to Japanese Patent Publication No. 6 0-4 1 3 1 5 Gazette) 'Piece a piezoelectric single crystal of crystal or the like and cut it with a suitable cutting plane> Honed substrate. The important properties of piezoelectric substrates used in surface acoustic wave devices include the delay time temperature coefficient (TCD) and the electromechanical combination coefficient CK2). The closer the TCD is to zero, the larger the κ2 is. As a surface acoustic wave An element substrate is preferred. The prior art is a substrate for surface acoustic wave devices. Generally, lithium niobate (L i Nb〇3), lithium tantalate (L i T a 0 3), and lithium tetraborate (L i 2B 4) are used. 7). Piezoelectric single crystals such as crystals are cut with appropriate cutting planes, and the base is polished. L i N b 0 3 (for example, 1 2 8. Y cut-X propagation), K2 is 5.5% large. Since TCD is as high as 74ppm / ° C, frequency drift due to temperature changes will occur. , And can not be used for filters that want to obtain narrow frequency band characteristics, or oscillators that want high stability accuracy. Also, Li2B4〇7 (for example, 45.X cut-Z propagation), its K 2 is 1%, TCD is 0 pp / ° c, but the substrate is dissolved in water, and because of its deliquescent nature, the process is difficult , Or paper sizes that are inferior to reliability, such as Chinese National Standard (CNS) A4 specification (2Ϊ0χ 297 mm) ~ 7 ~ _ " (Please read the note on the back before filling this page)
、1T 經濟部中央樟準局員工消費合作社印製 a? _____B7 五、發明説明$ ) 之問題。又’ ST截切水晶雖然具有零TCD，但是，由 於K 2爲小至〇 1 %，所以，不能獲得寬頻帶之濾波器。 對於表面彈性元件之高性能化，高頻率化之要求， T C D爲具有近於零更大之K 2，而要求化學上安定之基板 材料。 【發明槪要】 本發明係依據上述情形所發明者，具有小的τ C D與 較大之K 2，提供一種具有化學上安定之基板材料之表面彈 性波元件爲其目的。 達成上述目的之本發明之第1表面彈性波元件，係於 砂酸鑭鎵C L a a a 5 S i Ο Η )單結晶板上形成激振， 收訊，或反射表面彈性波所需之金屬膜之表面彈性波元件 ’其特徵爲將從砂酸鑭鎵之單結晶之截切角度及表面彈性 波傳播方向，以歐拉角（Euler angle )表示，若爲（ 180° + 〇：，40° + 召’2〇° + r)時，變成 α = 一2。〜+ 6。 ，/3二一4〇〜+9。 ，丫=-]_。〜 + 9 ，或與此等値之方位。 又，達成上述目的之本發明之第2表面彈性波元件， 係於矽酸鑭鎵（L a 3 G a 5 S i Ο η )單結晶板上形成激 振，收訊，或反射表面彈性波所需之金屬膜之表面彈性波 元件，其特徵爲將從矽酸鑭鎵之單結晶之截切角度及表面 彈性波傳播方向，以歐拉角（Euler angle)表示，若爲（ 9° + a，150° + /3，37° + r)時，變成 α = (請先閱讀背面之注意事項再填寫本頁)1. 1T printed by the Consumer Cooperatives of the Central Zhangzhun Bureau of the Ministry of Economic Affairs. A? _____B7 V. Invention Description $). Also, although the ST-cut crystal has zero TCD, since K 2 is as small as 0 1%, a wide-band filter cannot be obtained. For the requirements of high performance and high frequency of surface elastic elements, T C D is a substrate material with K 2 which is close to zero and larger, and requires chemical stability. [Summary of the invention] The present invention is based on the inventor according to the above situation, has a small τ CD and a large K 2, and provides a surface elastic wave element with a chemically stable substrate material for its purpose. The first surface acoustic wave device of the present invention that achieves the above-mentioned object is a metal film required for exciting, receiving, or reflecting the surface acoustic wave on a single crystal plate of CL aaa 5 S i Ο 镧). The surface acoustic wave element is characterized by the cut-off angle of the single crystal of lanthanum gallium oxalate and the propagation direction of the surface acoustic wave, expressed in Euler angle, if (180 ° + 〇 :, 40 ° + When you call '20 ° + r), it becomes α = -2. ~ + 6. , / 3 two one four 40 to +9. , Ya =-] _. ~ + 9, or an orientation like this. In addition, the second surface acoustic wave device of the present invention that achieves the above-mentioned object is formed on a single crystal plate of lanthanum gallium silicate (L a 3 G a 5 S i Ο η) to form vibration, receive, or reflect the surface acoustic wave. The required surface acoustic wave element of the metal film is characterized by the cut-off angle of the single crystal of lanthanum gallium silicate and the propagation direction of the surface acoustic wave, expressed in Euler angle, if (9 ° + a, 150 ° + / 3, 37 ° + r), becomes α = (Please read the precautions on the back before filling this page)
本紙張尺度逋闳中國國家標率（CNS ) Λ4規格（210X297公1 ) _ 5 4243 49 A7 ____B7_ 五、發明説明P ) -6。〜6。’召=-5。〜5。，r = —5。〜5。， 或與此等値之方位。 於此，本發明之第2表面彈性波元件，係從上述矽酸 鑭鎵基板之單結晶之截切角度及表面彈性波傳播方向，若 以歐拉角表示時，爲（13.4° ， 150.5。， 3 7.2°)，或與此等値之方位爲尤其較佳。 並且’達成上述目的之本發明之第3表面彈性波元件 ’係於矽酸鑭鎵（L a 3G a 5 S i ◦ u)單結晶板上形成 激振，收訊，或反射表面彈性波所需之金屬膜之表面彈性 波元件，其特徵爲將從矽酸鑭鎵之單結晶之截切角度及表 面彈性波傳播方向，以歐拉角（Euler angle )表示，若爲 (0° + α，140° + 冷，2 4 ° + Τ)時，變成 α = —5。〜5。 ，/3 = — 5。〜5。 ，7=— 5。〜5。 ， 或與此等値之方位。 本發明之第3表面彈性波元件，係從上述矽酸鑭鎵基 板之單結晶之截切角度及表面彈性波傳播方向，若以歐拉 角表示時，爲（0° ，140° ，24° )，或與此等値 經濟部中央標準局負工消費合作社印製 .Ji 1^1 _-I I ^^1 I*<^ϋ - m I ¥."*ve - (請先閱讀背面之注意事項再填寫本頁) 之方位爲尤其較佳。 本發明人等係發現具有壓電性單結晶之矽酸鑭鎵（ L a 3G a 5S i Ο 14)之特定截切面之傳播方向形成金屬 膜之表面彈性波元件，爲具有小溫度係數與較大電氣機械 結合係數，而化學上爲安定，而終於完成了本發明。 若依據本發明，具有小延遲時間溫度係數與較大電氣 機械結合係數|可獲得具有化學上安定之基板材料之表面 本紙張尺度適用中國國家#準（CNS ) Λ4规格（2I0X297公釐） -6 - 4243 49 經濟部中央標準局負工消资合作社印象 五、發明説明) 彈性波元件。 【圖式之簡單說明】 第1圖係傳輸型s A W (表面彈性波）濾波器之模式 圖。 第2圖係表示在（175°〜185° ，40° ’ 2 〇° )截切面之K2與TCD變化之圖表。 第3圖係表示在（180° ’ 35°〜45° ’ 20° )截切面之K2與TCD變化之圖表。 第4圖係表示在（180° ，40° ，15°〜 25° )截切面之K2與TCD變化之圖表。 第5圖係表示中心頻率之溫度依存性之圖表。 第6圖係表示在（3°〜15° ，150.5° ， 37.2。）截切面之K2與TCD變化之圖表。 第7圖係表示在（10° ，146°〜156° ， 37.2° )截切面之K2與TCD之變化之圖表。 第8圖係表示在（10° ，150·5° ，32°〜 42。）截切面之Κ2與TCD變化之圖表。 第9圖係表示中心頻率之溫度依存性之圖表。 第1◦圖係表示在（一5°〜5° ，140° ， 24° )截切面之Κ2與TCD變化之圖表。 第11圖係表示在（0° ，：135°〜145° ， 24° )截切面之Κ2與TCD變化之圖表。 第12圖係表示在（0° ，140° ，19°〜 (讀先閱讀背面之注意事項再填荈本頁) 本紙張尺度適用中國國家榡準（CNS } Λ4現格（210Χ297公釐） 4 2 4 3 4 9 A7 B7五、發明説明$ ) 29° )截切面之K2與TCD變化之圖表。 第1 3圖係表示中心頻率之溫度依存性之圖表。 【較佳實施例之詳細說明】 第1圖係傳輸型S A W濾波器之模式圖。 在矽酸鑭鎵單結晶基板1 0上形成成對之梳形電極， 在此一方（激振用電極2 0 )若施加高頻率電壓時就激振 表面彈性波而達到收訊電極3 0。此輸出入間之頻率特性 係具有帶通濾波器特性，由於壓電結晶之特性，來決定此 濾波器之溫度特性。 作爲計算矽酸鑭鎵單結晶上之表面彈性波特性所需之 常數，在下表1表示了在1 2 0 °C之密度，彈性常數，壓 電常數，介電常數及線膨脹係數。 又，在表2表示了各常數之一次及二次之溫度係數。 (請先閲讀背面之注意事項再填寫本頁) 訂 經濟部中央標準局員工消費合作社印掣 本紙張尺度適用中國國家標孪（CNS ) Λ4規格（210X297公釐） -8- 4 2 4 3 4. 9 Λ7 B7 五、發明説明0 ) 表 1 使用於計算之矽酸鑭鎵之各種常數 測定溫度，°c 2 0 密度；〇 (Kg/m3) 5 7 6 4 彈性常數，C^UOMN/m2) C κ I ! 18 • 9 3 C E 1 2 10 5 0 C E 1 3 9 . 5 2 8 C E H 1 · 4 9 3 C E 3 3 2 6 • 2 4 C E 4 . 5 · 3 8 4 C E 6 6 4 · 2 16 壓電常數，e(C/m2) e i i -0 431 6 1 Λ 0 . 1 0 8 介電常數，ε T/ e ° ε T 1 1 / ε 0 18 • 9 7 £ T 3 3 / £ 0 5 2 0 0 線膨張係數(10_6/K) λ 1 1 5 •07 λ 3 3 3 •60 L----------%------訂------f I . (請先閱讀背面之注意事項再填艿本頁) 經濟部肀央標準爲員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) Λ4規格（210 X 297公釐） -9- 4243 49 五、發明说明f ) 表 2 使用於計镜之矽酸鑭鎵之各種常數 測定溫度°c 2 0 一次係數（10 —6/ 二次係數（1(TV K) K) 彈性定數，CE( C Κ ! 1 -5 3 -4.2 10loN/m2) C Ε 1 2 -9 2 + 25 C Ε 1 3 一 8 8 - 1 3 1 C E 1 4 -205 + 870 C E 3 3 -1 0 4 -10 9 C E 4 4 -62 -111 C E 6 6 4.7 -40*7 壓電常數，e(c/ e ii 4 5 6 10 3 2 m ) e i a -6 2 8 14 8 0 介電常數ε τ/ e T i i / ε 0 13 7 8 2 £ 0 e T a 3 / ε 0 —7 9 5 10 7 6 (請先閱讀.背面之注意事項再填寫本莨) 、1Τ 線！ 經濟部中央榡準局員工消費合作社印裝 茲首先就本發明之第1實施形態說明如下。 在此，使用表1，表2所示之常數•在壓電基板表面 之牛頓運動方程式，壓電方程式，近似準靜電之馬克斯威 爾之方程式連成加以解題，T C D之絕對値就變成5 p p m以下，作爲電氣機械結合係數K 2成爲〇 . 3 %以上 之角度範圍以歐拉角表示成爲（18〇° +α，40° + 卢’20。 + r)時，發現了 α = -2。〜+ 6。 ， β = 本紙乐尺度適用中國國家標準（CNS ) A4規格（210X297公釐） -10- 424349 A7 經濟部中失標準局負工消费合作社印製 B7五、發明説明$ ) 4°〜+9。 ，r=—1。〜+9。，或與此等値之方位 較佳。（參照第2圖〜第4圖）。 TCD-r - (1-/V) ( σ V / σ T ) . (1) V :在溫度T = 2 5 °C之表面彈性波之音速 T :溫度 r :欲截切之截切面，傳播方向之熱膨脹率 在此，作爲電極材料之膜厚h，若將表面彈性波之波 長視爲λ時1位於h/A=0.005〜0.2之範園較 佳。又，作爲電極材料則使用鋁爲適合，其他材料也可使 用金，也可以適合使用鋁+鈦，或鋁+銅。 將圖1之模式圖所示之傳輸型表面彈性波濾波器之圖 案，由歐拉角以（180° -40° ，20°)所表示之 截切面及傳播方向由光刻成像技術（photolithography)所 形成。 此時之梳形電極之線寬，線間分別爲4 // m，輸出入 之電極對數爲分別3 0對，梳形電極之開口長度爲4 0 0 // m。電極之材料係使用鋁，其膜厚係使用噴濺（ superttering)法形成爲 2 4 0 0 A (埃）(h / λ = 1 . 5 % )。將此元件封裝於金屬封裝，將收發訊之梳形 電極由接合線取出，而連接於網路分析儀（network analyzer )。並且，將此裝置放入恒溫槽，測定了在—2 0 °C〜8 0 °C之溫度範圍之中心頻率變化時，獲得了如第5 (請先閱讀背面之注意事項再填寫本頁} 本紙張尺度適用申國國家樣準（CNS ) Λ4規格（2 j 0 X 297公釐） -11 - 4 2 4 3 4 9 A7 B7 五、發明説明自) 圖所示之特性，而確認了在2 5 T：時爲T C D (= (請先閱讀背面之注意事項再填寫本页) 一 TCD) = 3 p pm/°C。茲就本發明之第2實施形態 說明如下。 在此係使用表1 ，表2所示常數，在壓電基板表面之 牛頓運動方程式，壓電方程式，近似準靜電之馬克斯威爾 之方程式連成加以解題，T C D之絕對値就變成7 p p m 以下，作爲電氣機械結合係數K 2成爲〇 · 3%以上之角度 範圍以歐拉角表示時成爲（9。+ α，150。+召， 37 +7)時’發現了 α = — 6。〜6。，乃=—5° 〜5° ，τ二一5°〜5° ，或與此等値之方位較佳。並 且，詳細地檢討之結果，歐拉角表示時爲，（13.4。 ’150.5° ’37.2。），或與此等値之方位時， 發現了成爲TCD = 〇ppm/°C並且Κ2=〇 , 45%而 爲屬於較佳之方位（參照第6圖〜第8圖）。 經濟部中央標準局員工消費合作社印製 在此· TCD係由上述之（1)式表示。又，與上述 第1實施形態同樣，作爲電極材料之膜厚h，若將表面彈 性波之波長視爲λ時，1ι/λ = 〇 . 00 5〜0 . 2之範 圍爲較佳。又，作爲電極材料則鋁爲適合，作爲其他材料 也可使用金，也適合使用鋁+鈦，或鋁+銅。 將圖1之模式圖所示之傳輸型表面彈性波濾波器之圖 案，由歐拉角以（13.4° ，150.5。， 3 7 . 2 0 ° )所表示之截切面及傳播方向由光刻成像技 術所形成。 此時之梳形電極之線寬，線間分別爲4 // m，輸出入 本紙張尺度逋用中國國家標準（CNS ) Λ4現格（210X297公楚} 經濟部中央標準局員工消費合作社印製 424349 Λ7 Β7 __五、發明説明自) 圖所示之特性，而確認了在2 5 °C時爲T C D (= —T C D ) = 3 p P m / °C。茲就本發明之第2實施形態 說明如下。 在此係使用表1，表2所示常數，在壓電基板表面之 牛頓運動方程式，壓電方程式，近似準靜電之馬克斯威爾 之方程式連成加以解題，T C D之絕對値就變成7 p p m 以下，作爲電氣機械結合係數K 2成爲0 . 3 %以上之角度 範圍以歐拉角表示時成爲（9° + α，150° +冷， 37° 十7〇 時，發現了 α=_6° 〜·6° ，/5 = -5° 〜5° ，5°〜5° ，或與此等値之方位較佳。並 且，詳細地檢討之結果，歐拉角表示時爲，（13.4° ，150.5° ，37 .2°)，或與此等値之方位時， 發現了成爲TCD = 〇ppm/°C並且K2=0 . 45%而 爲屬於較佳之方位（參照第6圖〜第8圖）。 在此.TCD係由上述之（1)式表示。又，與上述 第1實施形態同樣，作爲電極材料之膜厚h，若將表面彈 性波之波長視爲Λ時，h / λ = 〇 . 0 0 5〜0 . 2之範 圍爲較佳。又，作爲電極材料則鋁爲適合，作爲其他材料 也可使用金’也適合使用鋁+鈦，或鋁+銅。 將圖1之模式圖所示之傳輸型表面彈性波濾波器之圖 案，由歐拉角以（13.4。 ，150.5° ， 3 7 · 2 0 ° )所表示之截切面及傳播方向由光刻成像技 術所形成。 此時之梳形電極之線寬，線間分別爲4 # m，輸出入 ----.--"--.--Ά------訂------咪 (^'先閱"'背面之注意事項再填寫本頁} 本紙張尺度適用中國國家標準（CNS ) Λ4規格（210X297公釐） -12- 424349 Λ7 經濟部中央標準局員工消费合作社印製 _____ B7 五、發明説明（1〇 ) 之電極對數爲分別3 0對，梳形電極之開口長度爲4 0 0 μ m。電極之材料係使用鋁，其膜厚係使用噴濺法形成爲 2400人（埃）（h/A = 1.5%)。將此元件封裝 於金屬封裝，將收發訊之梳形電極由接合線取出1而連接 於網路分析儀。並且，將此裝置放入恒溫槽，測定了在-2 0 °C〜8 0 °C之溫度範圍之中心頻率之變化時，獲得了 如第9圖所示之特性，確認了在2 5 °C時爲T C D (= —TCD) = 0ppm/°C。 茲就本發明之第3實施形態說明如下。 在此發現了，使用表1 ，表2所示常數，在壓電基板 表面之牛頓運動方程式，壓電方程式，近似準靜電之馬克 斯威爾之方程式連成加以解題，以歐拉角表示，在（ -5°〜5° ，140° ，24°)之範圍（參照第10 圖），（0° ，135° 〜145。 ，24° )之範圈（ 參照 11 圖），及（0° ，140° ，19° 〜29°) 之範圍（參照12圖），或在與其等範圍等値方位之範圍 在溫度2 5 °C之T C D之絕對値變成5 p p m / °C以下， 作爲電氣機械結合係數K 2成爲〇 . 3 %以上。更詳細檢討 之結果，歐拉角表示若成爲（0° 1 4 0 9 ，24°) 時，或與此等値之方位時爲，TCD = 〇 p pm/°C並且 K 2 = 0 . 3 7 5 %，發現了作爲S A W (表面彈性波）裝 置用爲最佳之方位。在此.T C D係由上述之（1 )式表 示。 又，與上述第1實施形態，第2實施形態時同樣，作 (請先閱讀背面之注項再填舄本頁) 本紙張尺度適用中國國家標準（CNS ) Λ4規格（21.0 X 297公釐） _ 13 _ ______B7 五、發明説明（11 ) (請先閱讀背面之注意事項再填寫本頁) 爲電極材料之膜厚h ’若將表面彈性波之波長視爲λ時， h/A=〇.〇〇5〜〇.2之範圔爲較佳。又，作爲電 極材料則鋁爲適合，作爲其他材料也可使用金，也適合使 用鋁+鈦，或鋁+銅。或，也被廣爲適合金，鉬，鈦等之 金屬。 將圖1之模式圖所示之傳輸型表面彈性波濾波器之圖 案，由歐拉角以（〇° ，140。 ，240。）所表示之 截切面及傳播方向由光刻成像技術所形成。 此時之梳形電極之線寬，線間分別爲4 μ m，輸出入 之電極對數爲分別3 0對，梳形電極之開口長度爲4 0 0 "ni。電極之材料係使用鋁，其膜厚係使用噴濺法形成爲 2400A (埃）= l . 5%)。將此元件封裝 於金屬封裝，將收發訊之梳形電極由接合線取出，而連接 於網路分析儀。並且，將此裝置放入恒溫槽，測定了在-2 0 °C〜8 0 °C之溫度範園之中心頻率之變化時，獲得了 如第1 3圖所示之特性，而確認了在2 5 °C時爲T C D ( = ~TCD) = 〇ppm/°C。 經濟部中央標準局員工消費合作社印製 本纸張尺度適用中國國家標準（CNS ) Λ4規格（2丨0X297公楚）_ 14 .The dimensions of this paper are: China National Standards (CNS) Λ4 specification (210X297 male 1) _ 5 4243 49 A7 ____B7_ V. Description of the invention P) -6. ~ 6. ‘Call = -5. ~ 5. , R = —5. ~ 5. , Or the position of these crickets. Here, the second surface acoustic wave device of the present invention is a cutting angle of a single crystal of the above-mentioned lanthanum gallium silicate substrate and a propagation direction of the surface acoustic wave. When expressed in Euler angle, it is (13.4 °, 150.5). , 3 7.2 °), or an orientation with these angles is particularly preferred. In addition, the "third surface acoustic wave device of the present invention that achieves the above-mentioned object" is formed by exciting, receiving, or reflecting surface acoustic wave on a single crystal plate of lanthanum gallium silicate (L a 3G a 5 S i ◦ u). The required surface acoustic wave element of the metal film is characterized in that the cut angle of the single crystal of lanthanum gallium silicate and the propagation direction of the surface acoustic wave are expressed by Euler angle, if (0 ° + α , 140 ° + cold, 2 4 ° + T), it becomes α = —5. ~ 5. , / 3 = — 5. ~ 5. , 7 = — 5. ~ 5. , Or the position of these crickets. The third surface acoustic wave device of the present invention is the cut angle of the single crystal of the above-mentioned lanthanum gallium silicate substrate and the propagation direction of the surface acoustic wave. When expressed in Euler angles, it is (0 °, 140 °, 24 ° ), Or printed by the Central Government Bureau of Standards, Ministry of Economic Affairs and Consumer Cooperatives. Ji 1 ^ 1 _-II ^^ 1 I * < ^ ϋ-m I ¥. &Quot; * ve-(Please read the back first Note that you should fill out this page) is particularly preferred. The present inventors have found that a surface acoustic wave element having a small temperature coefficient and a relatively low temperature coefficient is a surface acoustic wave element having a piezoelectric single crystal of lanthanum gallium silicate (L a 3G a 5S i Ο 14) in a direction of propagation in a specific section to form a metal film With a large electrical-mechanical coupling coefficient and chemical stability, the present invention was finally completed. According to the present invention, a temperature coefficient with a small delay time and a large electrical-mechanical combination coefficient can be obtained. A surface with a chemically stable substrate material can be obtained. The paper size is applicable to China #standard (CNS) Λ4 specifications (2I0X297 mm) -6 -4243 49 Impression of the Consumers and Consumers Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention) Elastic wave element. [Simplified description of the diagram] Fig. 1 is a mode diagram of a transmission type s A W (surface elastic wave) filter. Figure 2 is a graph showing the changes in K2 and TCD at (175 ° ~ 185 °, 40 ° '2 0 °) cut plane. Figure 3 is a graph showing the changes in K2 and TCD at (180 ° '35 ° ~ 45 °' 20 °) section. Figure 4 is a graph showing the changes in K2 and TCD at (180 °, 40 °, 15 ° ~ 25 °) cut planes. Figure 5 is a graph showing the temperature dependence of the center frequency. Figure 6 is a graph showing the changes in K2 and TCD at (3 ° ~ 15 °, 150.5 °, 37.2.) Figure 7 is a graph showing the changes in K2 and TCD at (10 °, 146 ° ~ 156 °, 37.2 °) cut planes. Fig. 8 is a graph showing the changes of K2 and TCD at (10 °, 150 · 5 °, 32 ° ~ 42.) Fig. 9 is a graph showing the temperature dependence of the center frequency. Figure 1◦ is a graph showing the changes of K2 and TCD in the (-5 ° ~ 5 °, 140 °, 24 °) section. Figure 11 is a graph showing the changes in K2 and TCD at (0 ° ,: 135 ° ~ 145 °, 24 °) cut planes. Figure 12 shows (0 °, 140 °, 19 ° ~ (read the precautions on the back before filling in this page) This paper size is applicable to the Chinese national standard (CNS) Λ 4 grid (210 × 297 mm) 4 2 4 3 4 9 A7 B7 V. Description of the invention $) 29 °) The graph of K2 and TCD changes of the cut surface. Figure 13 is a graph showing the temperature dependence of the center frequency. [Detailed description of the preferred embodiment] FIG. 1 is a schematic diagram of a transmission type SAW filter. A pair of comb-shaped electrodes are formed on the lanthanum gallium silicate single crystal substrate 10, and when one side (excitation electrode 20) is applied with a high-frequency voltage, the surface acoustic wave is excited to reach the receiving electrode 30. The frequency characteristics between this input and output are band-pass filter characteristics. Due to the characteristics of the piezoelectric crystal, the temperature characteristics of this filter are determined. As the constants needed to calculate the surface elastic wave characteristics on the single crystal of lanthanum gallium silicate, the density, elastic constant, piezoelectric constant, dielectric constant and linear expansion coefficient at 120 ° C are shown in Table 1 below. In addition, Table 2 shows the temperature coefficients of the primary and secondary of each constant. (Please read the precautions on the back before filling out this page.) Order the printed paper of the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs. The paper size applies to the Chinese National Standard (CNS) Λ4 specification (210X297 mm) -8- 4 2 4 3 4 9 Λ7 B7 V. Description of the invention 0) Table 1 Various constants used for calculation of lanthanum gallium silicate, temperature, ° c 2 0 density; 〇 (Kg / m3) 5 7 6 4 elastic constant, C ^ UOMN / m2 ) C κ I! 18 • 9 3 CE 1 2 10 5 0 CE 1 3 9. 5 2 8 CEH 1 · 4 9 3 CE 3 3 2 6 • 2 4 CE 4. 5 · 3 8 4 CE 6 6 4 · 2 16 Piezoelectric constant, e (C / m2) eii -0 431 6 1 Λ 0. 1 0 8 Dielectric constant, ε T / e ° ε T 1 1 / ε 0 18 • 9 7 £ T 3 3 / £ 0 5 2 0 0 Linear expansion coefficient (10_6 / K) λ 1 1 5 • 07 λ 3 3 3 • 60 L ----------% ------ Order ------ f I. (Please read the notes on the back before filling in this page) The central standard of the Ministry of Economic Affairs prints this paper for employee consumer cooperatives. The paper size applies to the Chinese National Standard (CNS) Λ4 specification (210 X 297 mm) -9- 4243 49 V. Description of the invention f) Table 2 Various constants of lanthanum gallium silicate used in counters Measurement temperature ° c 2 0 Primary coefficient (10-6 / Quadratic coefficient (1 (TV K) K) Elastic constant, CE (C KK! 1 -5 3 -4.2 10loN / m2) C Ε 1 2 -9 2 + 25 C Ε 1 3-8 8-1 3 1 CE 1 4 -205 + 870 CE 3 3 -1 0 4 -10 9 CE 4 4 -62 -111 CE 6 6 4.7 -40 * 7 Piezoelectric constant, e (c / e ii 4 5 6 10 3 2 m) eia -6 2 8 14 8 0 Dielectric constant ε τ / e T ii / ε 0 13 7 8 2 £ 0 e T a 3 / ε 0 --7 9 5 10 7 6 (Please read the note on the back before filling in this card), 1T line! The printout of the employee consumer cooperative of the Central Procurement Bureau of the Ministry of Economic Affairs is described below as the first embodiment of the present invention. Here, using the constants shown in Tables 1 and 2 • Newton's equation of motion on the surface of the piezoelectric substrate, piezoelectric equation, and approximate quasi-static Maxwell's equations are combined to solve the problem. The absolute value of TCD becomes 5 ppm. Hereinafter, when the angle range of the electrical-mechanical coupling coefficient K 2 to be 0.3% or more is expressed in Euler angles (18 ° + α, 40 ° + Lu '20. + r), α = -2 is found. ~ + 6. , Β = Chinese paper standard is applicable to the Chinese National Standard (CNS) A4 specification (210X297 mm) -10- 424349 A7 Printed by the Consumers' Cooperatives of the Bureau of Standards and Loss of Standards of the Ministry of Economics B7 Fifth, the description of the invention $) 4 ° ~ + 9. , R = —1. ~ + 9. , Or a better orientation with these 値. (See Figures 2 to 4). TCD-r-(1- / V) (σ V / σ T). (1) V: sound velocity of surface elastic wave at temperature T = 25 ° C T: temperature r: section to be cut and propagate The thermal expansion coefficient in the direction is here. As the film thickness h of the electrode material, if the wavelength of the surface elastic wave is regarded as λ, 1 is located in the range of h / A = 0.005 ~ 0.2. In addition, it is suitable to use aluminum as the electrode material, and other materials may be gold, and aluminum + titanium, or aluminum + copper may be suitably used. The pattern of the transmission type surface acoustic wave filter shown in the schematic diagram of Fig. 1 is represented by the Euler angle (180 ° -40 °, 20 °) and the propagation direction is determined by photolithography. Formed. At this time, the line width of the comb electrode is 4 // m between the lines, the number of input and output electrode pairs is 30 respectively, and the opening length of the comb electrode is 4 0 0 // m. The material of the electrode is aluminum, and the thickness of the electrode is 2400 A (Angstrom) (h / λ = 1.5%) using a sputtering method. This component is packaged in a metal package, and comb electrodes for transmitting and receiving are taken out of the bonding wire and connected to a network analyzer. In addition, this device was placed in a thermostatic bath, and the change in the center frequency in the temperature range of -20 ° C to 80 ° C was measured, and the result was as shown in Figure 5 (Please read the precautions on the back before filling in this page} This paper size applies to the National Standard of China (CNS) Λ4 specification (2 j 0 X 297 mm) -11-4 2 4 3 4 9 A7 B7 V. Description of the invention) 2 5 T: TCD (= (Please read the notes on the back before filling this page)-TCD) = 3 p pm / ° C. The second embodiment of the present invention will be described below. Here, the constants shown in Tables 1 and 2 are used to solve the problem. Newton's equations of motion, piezoelectric equations, and quasi-static Maxwell's equations on the surface of the piezoelectric substrate are combined to solve the problem. The absolute value of TCD becomes less than 7 ppm. When the angle range of the electrical-mechanical coupling coefficient K 2 to be 0.3% or more is expressed in Euler angles, it becomes (9. + α, 150. + zhao, 37 + 7) when α = -6 is found. ~ 6. It is = -5 ° ~ 5 °, τ21 ° -5 ° ~ 5 °, or the orientation of 値 is better. As a result of a detailed review, the Euler angle was expressed as (13.4. '150.5 ° '37 .2.), Or at a position similar to this, and it was found that TCD = 〇ppm / ° C and K2 = 〇, 45% is a better orientation (refer to Figure 6 to Figure 8). Printed by the Consumer Cooperatives of the Central Bureau of Standards, Ministry of Economic Affairs. TCD is expressed by the above formula (1). In the same manner as in the first embodiment, when the wavelength of the surface elastic wave is regarded as λ as the film thickness h of the electrode material, a range of 1 m / λ = 0.005 to 0.2 is preferable. In addition, aluminum is suitable as the electrode material, and gold can be used as other materials, and aluminum + titanium, or aluminum + copper is also suitable. The pattern of the transmission type surface acoustic wave filter shown in the schematic diagram of FIG. 1 was imaged by lithography with a cut plane and a propagation direction indicated by Euler angles (13.4 °, 150.5 °, 37.20 °). Formed by technology. At this time, the line width of the comb-shaped electrode is 4 // m between the lines. The input and output dimensions of this paper are in accordance with Chinese National Standard (CNS) Λ4 (210X297). It is printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 424349 Λ7 Β7 __V. Description of the invention) The characteristics shown in the figure, and confirmed that TCD (= —TCD) = 3 p P m / ° C at 25 ° C. The second embodiment of the present invention will be described below. Here, using the constants shown in Tables 1 and 2, the equations of Newton's motion, piezoelectric equations, and approximate quasi-static Maxwell's equations on the surface of the piezoelectric substrate are combined to solve the problem. The absolute value of TCD becomes less than 7 ppm. When the angular range of the electrical-mechanical coupling coefficient K 2 is 0.3% or more, when expressed in Euler angles, it becomes (9 ° + α, 150 ° + cold, 37 °, ten o'clock, and α = _6 ° ~ · 6 °, / 5 = -5 ° ~ 5 °, 5 ° ~ 5 °, or a better orientation of these 値. And, after a detailed review, the Euler angle is expressed as (13.4 °, 150.5 ° , 37.2 °), or similar azimuths, it was found that TCD = 0 ppm / ° C and K2 = 0.45% are the preferred orientations (see Figs. 6 to 8). Here, TCD is represented by the above formula (1). Also, as in the first embodiment, if the film thickness h of the electrode material is the wavelength of the surface acoustic wave as Λ, h / λ = 〇. The range of 0 0 5 to 0.2 is preferable. Aluminum is suitable as the electrode material, and gold can also be used as other materials. Aluminum is also suitable for use. , Or aluminum + copper. The cut surface of the transmission-type surface acoustic wave filter shown in the schematic diagram of Figure 1 is represented by the Euler angle at (13.4., 150.5 °, 37.20 °) and The propagation direction is formed by the photolithographic imaging technology. At this time, the line width of the comb electrode is 4 # m between the lines, and the input and output are ----.-- " --.-- Ά ----- -Order ------ Mi (^ 'Read first "' Notes on the back then fill out this page} This paper size applies the Chinese National Standard (CNS) Λ4 specification (210X297 mm) -12- 424349 Λ7 Ministry of Economy Printed by the Consumer Standards Cooperative of the Central Bureau of Standards ___ B7 V. Description of the invention (10) The number of electrode pairs is 30 pairs, and the comb electrode has an opening length of 400 μm. The material of the electrode is aluminum, and its film The thickness is formed by a sputtering method to 2,400 people (Angstroms) (h / A = 1.5%). This component is packaged in a metal package, and the comb-shaped electrodes for transmission and reception are taken out from the bonding wire and connected to a network analyzer. Furthermore, when this device was placed in a thermostatic bath and the change in the center frequency in a temperature range of -20 ° C to 80 ° C was measured, the characteristics shown in Fig. 9 were obtained. It was confirmed that TCD (= -TCD) = 0 ppm / ° C at 25 ° C. The third embodiment of the present invention is described below. It was found here that the constants shown in Table 1 and Table 2 were used. The equations of Newton's motion, piezoelectric equations, and approximate quasi-static Maxwell's equations on the surface of the electrical substrate are combined to solve the problem, expressed in Euler angles, in the range of -5 ° ~ 5 °, 140 °, 24 ° ( Refer to Figure 10), (0 °, 135 ° ~ 145. (24 °) (see Figure 11), and (0 °, 140 °, 19 ° ~ 29 °) (see Figure 12), or in a range of equal orientations at a temperature of 2 5 ° The absolute TCD of C becomes 5 ppm / ° C or less, and the electromechanical coupling coefficient K 2 becomes 0.3% or more. As a result of a more detailed review, the Euler angle indicates that if it is (0 ° 1 4 0 9, 24 °), or when it is at such an orientation, TCD = 〇p pm / ° C and K 2 = 0.3 75%, found the best orientation as a SAW (surface acoustic wave) device. Here, T C D is expressed by the above formula (1). In the same way as in the first and second embodiments described above, please read (please read the notes on the back and fill in this page) This paper size applies the Chinese National Standard (CNS) Λ4 specification (21.0 X 297 mm) _ 13 _ ______B7 V. Description of the invention (11) (Please read the precautions on the back before filling this page) is the film thickness of the electrode material h 'If the wavelength of the surface elastic wave is taken as λ, h / A = 〇. A range of 0.005 to 0.2 is preferred. In addition, aluminum is suitable as the electrode material, and gold can be used as other materials, and aluminum + titanium, or aluminum + copper is also suitable. Or, it is widely used for metals such as gold, molybdenum, and titanium. The pattern of the transmission type surface acoustic wave filter shown in the schematic diagram of FIG. 1 is represented by Euler angles (0 °, 140 °, 240 °), and the cutting plane and propagation direction are formed by photolithographic imaging technology. At this time, the line width of the comb electrodes is 4 μm between the lines, the number of input and output electrode pairs is 30 pairs, and the opening length of the comb electrodes is 4 0 " ni. The material of the electrode is aluminum, and the thickness of the electrode is 2400A (Angstrom) = 1.5% using a sputtering method. This component is packaged in a metal package, and the comb-shaped electrodes for transmitting and receiving are taken out from the bonding wires and connected to the network analyzer. In addition, when this device was placed in a thermostatic bath and the change in the center frequency of the temperature range of -20 ° C to 80 ° C was measured, the characteristics shown in Fig. 13 were obtained, and it was confirmed that 2 TCD at 5 ° C (= ~ TCD) = 〇ppm / ° C. Printed by the Consumers' Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs This paper is sized to the Chinese National Standard (CNS) Λ4 specification (2 丨 0X297). 14