TW419390B - Cleaning apparatus, filter and method of manufacturing the same - Google Patents

Abstract

A cleaning apparatus provided with a mechanism for circulation of an air, of which humidity is controlled, characterized by a permeable filter provided with zeolite and having a permeability, and a particle removing filter provided downstream of the permeable filter for removing particulate impurities, the both filters being disposed in an air circulation path. The cleaning apparatus can remove gaseous organic impurities contained in an air circulating therein without decreasing a humidity of the air. Since the cleaning apparatus does not make use of activated charcoal which is combustible, it is excellent in disaster prevention, and enables arranging of the filter and the particle removing filter in a roof section of the cleaning apparatus.

Description

Printed by the staff of the Central Bureau of Standards of the Ministry of Economic Affairs and Cooperatives · 41939Q_ ^ _ V. Description of the Invention (Technical Field of the Invention) The present invention relates to a dust-free environment suitable for manufacturing, for example, a semiconductor element (LSI) or a liquid crystal display (LCD). A clean device with an air environment humidity control function and a gas organic impurity and granular impurity removal function in a room or an airless operation table, etc., and a clean device for use in such a clean device Filter for gaseous organic impurities and its manufacturing method. [Knowledge technology] Today, LSI or LCD are widely used in clean rooms, such as clean rooms. For example, a semiconductor production line from blank wafers (silicon wafers) to manufacturing 1MDRAM wafers contains about 200 processes, and LCD panel production lines from glass raw materials (LCD substrates) to manufacturing 9.4-inch TFTs contain about 80 processes. In these production lines, it is difficult to continuously flow a wafer or an LCD substrate in each process. For example, in the TFT-LCD production line, the semi-finished substrate that has formed all the circuits in the previous stage is forced to be in the Carrier or Stocker during the hours to tens of hours before moving to the later stage. ) Waiting for exposure in a clean environment. When a wafer or an LCD substrate is left in a general clean device environment for a long time like this, organic substances from the clean environment adhere to the surfaces of those substrates. In addition, for example, when an organic substance is adhered to the wafer, the following problems occur. That is, when an insulating oxide film (Si02) is formed on the surface of the wafer in the state where organic substances are adhered, the carbon element component of the organic substance is taken into the insulating oxide film, and the insulation withstand voltage of the insulating oxide film is greatly reduced and leakage occurs. There is also a problem that the current is greatly increased. In addition, because the surface of the wafer is adsorbed, 2 paper octaves are suitable for use. 1¾¾Family (8) 4 叱 (21〇 / 297 cm) < Please read the precautions on the back before filling this page)

4) 9390 A7 B? 5. Description of the invention (printed by Chengong Consumer Cooperative, Central Standards Bureau, Ministry of Economic Affairs, 4 Organic matter, the adhesion of the photoresist film is deteriorated, and exposure and etching failures may occur. In addition, correct circuit patterns may not be formed. The surface resistivity of the wafer on which an insulating film is formed increases, and the wafer becomes susceptible to static electricity. Particles floating in the air are more likely to be electrostatically adsorbed on the surface of the wafer and more likely to cause insulation damage. In addition, it is exposed to organic impurities contained in the clean device environment In the case of ultraviolet rays of optical equipment, a photo CVD reaction occurs in its clean device, and its products adhere to the surface of the lens or reflector of an optical system such as an exposure device, resulting in haziness. The optical efficiency is reduced. In the state of being attached to the glass substrate of the LCD substrate, when the amorphous silicon (a-Si) for a thin film transistor (TFT) is formed on the surface, a poor adhesion between the LCD substrate and the a-Si film occurs. Organic substances from a clean environment have an adverse effect on the manufacture of LSI or LCD. However, using cleaning techniques such as UV / ozone cleaning It can also remove organic matter attached to the surface of the substrate. However, the average cleaning time of a substrate takes several minutes, and frequent cleaning leads to reduced productivity. Therefore, especially recently, not only substrate contamination caused by metal impurities or particles, but also cleanliness® The impact of organic impurities in the environment on semiconductor manufacturing is valued. For example, 'Technology Transfer # 95052812 A-TR', "Forecast of Airborne Molecular Contamination Limits for the 0.25 Micron High Performance Logic" published by SEMATECH in the United States on May 31, 1995 Process ”, published in Table 1 on the wafer surface organic matter pollution control level (permissible surface pollution) ° According to this record, in the previous stage of the process in 1998 need to control the number of 5xl013 carbon element atoms (please read the back (Please fill in this page again)

The size of this paper is 阂 1¾ the home spy standard (C._NS) Λ4 is present (2W public). The Central Standards Bureau of the Ministry of Economic Affairs is printed by the Shellfish Consumer Cooperative. V 419390 2 7 ___; _ _ D / V. Description () / Cm2, the number of carbon element atoms / cm2 in lxl0i5 carbon element needs to be controlled in the later process. Table 1 Requirement Level (Year) 1995 1998 2001 2004 2007 2010 Design size μηι 0.35 0.25 0.18 0.13 0.1 0.07 Organics in the former process 1E14 5E13 3E13 1E13 5E12 3E12 (atoms of C / cm2) Organics in the later process 1E15 1E15 1E15 < 1E15 < 1E15 < 1E15 (atoms of C / cm2) Therefore, a chemical filter that adsorbs and removes gaseous organic impurities with activated carbon has been used in a device for removing gaseous organic impurities contained in a clean environment. In the simplest form of a chemical filter using activated carbon, a filling tower formed by plugging granular activated carbon into a designated box or the like is widely known. In other types, a fibrous activated carbon is compounded with a low-melting point polyester or polyester non-woven adhesive to form a felt-like chemical filter or the granular activated carbon is firmly adhered to the carbamate with an adhesive Ester foam or non-woven chemical filters in block and sheet form are also widely known. For example, in the case of a clean room where the ceiling surface becomes the blowing surface of clean air, a chemical filter is arranged on the upstream side of the particle removal filter installed on the ceiling to remove the gas in the air environment of the clean room An extremely effective device for organic impurities. However, activated carbon is a flammable material specified in the Japanese Fire Fighting Law and requires careful attention to fire. Therefore, from the viewpoint of disaster prevention, it is difficult to arrange a chemical filter using activated carbon on the ceiling. In addition, the cleaning equipment used in the manufacture of LSI or LCD is generally maintained at 4 / L (please read the precautions on the back before filling this page)

The scale of this paper is applicable to the prisoner's family members in CNW i CNS) Λ4 is present (2 丨 "/ _297 Gong) A7 B7 4193 9 0 V. Description of the invention () Temperature 23 ~ 25 ° C, relative humidity (45 ± 1 〇)% of the environment. However, because activated carbon is weakly hydrophobic ', not only gaseous organic impurities but also moisture in the air are adsorbed a lot. Moreover, as long as the relative humidity of activated carbon increases slightly, the amount of moisture adsorbed in the air also increases rapidly. For example, first store unused activated carbon that has almost no moisture absorption in a container in an internal dry environment, and then immediately expose the activated carbon to a chamberless environment at a temperature of 23 to 25 ° C and a relative humidity of 50%. Ground adsorbs moisture in the air until the adsorption is saturated. Therefore, when a chemical filter added with activated carbon is installed on the air supply side of the clean device, the humidity is adjusted on the upstream side of the chemical filter, and the active carbon used in the chemical filter absorbs a large amount of moisture in the air. The relative humidity becomes lower than the specified value. The reduced humidity makes static electricity more prone to cause problems in the manufacture of LSI or LCD. In order to solve this problem, manufacturers of chemical filters with activated carbon need to perform troublesome work, that is, investigate the temperature and humidity of the environment before use and deliberately adsorb the activated carbon of the chemical filter and the moisture of the temperature and humidity balance. Shipped in a sealed package. However, the conventional chemical filter with a filling tower type has a high adsorption efficiency of organic matter, but has the disadvantage of large pressure loss (ventilation resistance). The 'felt-shaped or sheet-shaped chemical filter is excellent in air permeability' and its high adsorption efficiency is similar to that of the filling tower, but it is due to self-filtering elements (such as non-woven fabrics) or adhesives that attach activated carbon to the sheets (such as neoprene). Gases such as resins, carbamate-ethyl resins, epoxy resins, resins, etc.) or sealants (such as neoprene, sand rubber, etc.) used to secure the filter to the surrounding frame Organic impurities will be contained in 5 paper sizes after passing through the chemical filter. 丨 Family standard (C.NS) Λ4 ^ grid (2i0. ≪ public note) (锖 Please read the precautions on the back before filling this page) Ding-3 Industrial-consumer cooperation of the Central Standards Bureau of the Ministry of Economic Affairs Du printed by the Central Standards Bureau of the Ministry of Economic Affairs; printed by the Consumer Cooperative 419390 5. In the air of the invention description (), it may have adverse effects on semiconductor manufacturing. In addition, this ® felt-shaped or sheet-shaped chemical filter removes the trace ppb organic impurities contained in the chamber-free environment at one time, and then mixes the organic impurities of gases generated in the chemical filter # body into the air passing through in. In addition, the filter for removing particulate impurities on the downstream side of the adsorption layer has previously contained materials that generate gaseous organic impurities on the constituent elements, and there are also gaseous organic β substances that can occur in the filter itself that removes particulate impurities. Bad. A filter that can be used as a chemical filter to prevent surface contamination of such a substrate is disclosed in Japanese Patent Application Laid-Open No. 61-103518 or Japanese Patent Application Laid-Open No. 3-98611. The former was developed to remove bad odors. It is a filter made by immersing a substrate made of urethane foam plastic in an aqueous solution containing powder and emulsion type adhesives and solid acid, but it is opaque. Liquid type adhesives such as synthetic rubber emulsions or other water-dispersed organic adhesives and urethane foams of the base material also have gas organic compounds detached. However, the latter was developed to remove harmful gases or malodors that are harmful to health. The necessary condition is that an organic binder is used in the adsorbent. However, the organic binder contains organic substances such as polyethylene, and it is impossible to avoid gaseous organic substances from the filter itself Of it. In other publications related to this filter, JP-A-63-310636 (Patent No. 2579767) and National Publication No. W091 / 169W (Japanese Patent No. 2579767) disclose the use of water glass or inorganic binders. A filter in which an adsorbent such as zeolite is supported on the surface of a honeycomb structure having small through holes. 6 (Please read the precautionary note before filling out this page)

The degree is appropriate. Min: $; standard humble; (τμΓ) μ size factory 1 ^ 297g ^-Printed by the Consumer Cooperative of the Zhongjia Standard Bureau of the Ministry of Economic Affairs 419390 V. Description of the invention It is excellent in disaster prevention and the humidity will not decrease, and there is no detachment of gaseous organic impurities from the filter itself, and the removal of trace gaseous organic impurities in the air to be treated can prevent the organic substances from causing surface pollution of substrates and the like. The invention also provides a method for manufacturing such a filter and a cleaning device. [Comprehensive description of the invention] First, the present invention relates to a cleaning device having a mechanism that circulates air that has been adjusted for humidity, and is characterized in that an air-permeable filter having a hydrophobic zeolite is provided in the air circulation path and the filter is disposed Filter for removing particulate matter on the downstream side of the filter. If the cleaning device is used, gaseous organic impurities in the air circulating in the cleaning device can be removed without reducing the humidity. This cleaning device is excellent in disaster prevention because it does not use flammable activated carbon. The filter and the filter for removing particles can be placed on the ceiling of the cleaning device. In addition, in order to further improve the disaster prevention performance, it is preferable that the filter be made only of a material containing no combustible materials. In addition, it is preferable that the filter is made of only a material which does not generate gaseous organic impurities. In addition, the filter is desirably provided so that hydrophobic zeolite is fixed to the surface of the honeycomb structure. In this case, the method of fixing the honeycomb structure by immersing the honeycomb structure in a suspension in which the powder of the hydrophobic zeolite is dispersed and drying the honeycomb structure, and the method of fixing with an adhesive can be used. In addition, the honeycomb structure contains inorganic fiber as an essential component, and the other components are preferably incombustible structures containing one of clay mineral or calcium silicate. In addition, the effective pore diameter of the hydrophobic zeolite is the most Okay more than 7 Angstroms. In addition, the 7 paper sizes of Shizhou Middle Valve and Valve Jiajia • Bi (A4At Grid Men〗 赵) (Please read the notes on the back first and fill in this page) • 1 ^^ ·

Printed by Shelley Consumer Cooperative, Central Standards Bureau of the Ministry of Economic Affairs M 419390__J; ____ 5. Description of the invention () The filter for removing particles should also be composed of materials that do not generate gaseous organic impurities. Secondly, if the present invention is used, a filter is provided, which is characterized in that an inorganic substance having the property of adsorbing gaseous organic impurities and having an effective pore diameter larger than the effective pore diameter of the zeolite is used as a binder to remove gaseous organic impurities in the environment. The zeolite is fixed on the surface of the support. In addition, a filter is provided, which is characterized in that an inorganic substance is used as an adhesive, and a zeolite used to remove gaseous organic impurities in the environment is fixed on the surface of the support to form a first adsorption layer; and it has the property of adsorbing gaseous organic impurities. In addition, an inorganic substance having an effective pore diameter larger than that of the zeolite is fixed on the surface of the first adsorption layer to form a second adsorption layer. In this filter, an inorganic substance used as a binder on the first adsorption layer (I) may have an effective pore diameter larger than the effective pore diameter of the zeolite. Further, a filter is provided, which is characterized by having An inorganic substance that adsorbs the properties of gaseous organic impurities and has an effective pore diameter larger than the effective pore diameter of the zeolite is used as a binder, so that the pellets formed by granulating zeolite used to remove gaseous organic impurities in the environment are fixed to the support. The surface also provides a filter, which is characterized in that inorganic substances are used as adhesives, and zeolites used to remove gaseous organic impurities in the environment are granulated into pellets, and the adsorbed gas is coated around the pellets. The nature of organic impurities + quality and inorganic pores with an effective pore size larger than the effective pore size of the zeolite are fixed to the surface of the support. In these filters, for example, when using a zeolite with an effective pore size of 8 angstroms, the effective Inorganic substances with a pore size greater than 8 angstroms are removed from the environment. For example, 8 ——--------— (Please read the precautions on the back before filling in this f) Π 屮 Yan Min 孓 Piaobei (('NS) Λ4 Regulations (confirmation) Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs? 4193 90 a? ≫ ___: __; ___H7____ V. Description of the invention () BHT Gas or organic impurities with a molecular diameter of less than 8 angstroms, which cannot be adsorbed by zeolites, such as sand or oxygen, and gaseous organic impurities with a molecular diameter of less than 8 angstroms, such as DOP or DBP. In addition to zeolite and the support, it also has the function of combining zeolite as a layer. In these filters, for example, the support may be a honeycomb structure. At that time, the honeycomb structure is preferably a support using inorganic fibers as an essential component. Not only the support, but also an adsorbent-based zeolite or a binder used to fix the support to the surface of the support also uses an inorganic substance, and the gas constituting the filter of the present invention does not detach from the gas. In this patent specification, the honeycomb structure is not limited to a so-called honeycomb structure, and a cross-section lattice shape, a wave shape, etc. may be used. The structure of the support is not limited to a honeycomb structure. The air can pass through various other structures inside the structure. For example, a three-dimensional mesh structure such as asbestos is also suitable as a support. At this time, as shown below, the mesh structure can be used not only in the plane direction but also in the depth direction. The zeolite of the adsorbent system of the present invention is fixed. The method of fixing the adsorbent to the surface of the support includes the method of fixing the binder with an inorganic substance, or granulating the adsorbent zeolite with the inorganic substance as a binder. Method for bonding the small ball to the surface of the support after forming the small ball. In addition, if the present invention is used, a filter is provided, which is characterized in that it has the property of adsorbing gaseous organic impurities and has an effective pore diameter greater than that of the zeolite +. The inorganic material with a fine pore diameter is used as an adhesive agent. The pellets made of zeolite used to remove gaseous organic impurities in the environment are filled into the shell. In addition, a filter is provided, which is characterized in that inorganic matter is used as a binder, and zeolite used to remove gaseous organic impurities in the environment is granulated into 9 small papers of a suitable size / ... 1½¾ 家 鸪 # (CNS) Λ '! Specification (2 丨 f) 〆297mm 綮 (Please read the notes on the back before filling this page)

P -Γ Γ · 'i 4 ^ 9390 i 4 ^ 9390 Printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 5. Description of the invention () The ball is coated with the property of adsorbing gas and organic impurities around the ball and Small spheres formed by inorganic substances having an effective pore diameter larger than the effective pore diameter of the zeolite are filled into the shell. The same applies to these filters. For example, when using a zeolite with an effective pore size of 8 angstroms, an inorganic substance with an effective pore diameter of more than 8 angstroms is used to remove the molecules contained in the environment that cannot be adsorbed by zeolite, such as BHT or silica. Gaseous organic impurities, and zeolite can remove gaseous organic impurities such as DOP or DBP with a molecular diameter of less than 8 angstroms. You can also get the design flexibility, that is, according to the shape and area of the air flow path and the conditions of the filter, you can appropriately choose the shape and size of the shell, and the amount of small balls. Here, the zeolite may be either hydrophobic or hydrophilic. When sparse 7] C zeolite is used, the amount of moisture absorbed in the air is less than that of hydrophilic zeolite. The original adsorption capacity of the zeolite porous structure will not be reduced by moisture adsorption. Therefore, there is an advantage that the life of the furnace is longer than that of the hydrophilic zeolite. However, hydrophilic zeolites have the advantage of being cheaper than hydrophobic zeolites. In addition, it is preferable that the effective pore size of the zeolite is 7 angstroms or more and has the property of adsorbing the gaseous organic impurities, and the effective pore size is larger than the effective pore size of the zeolite. The total volume of the pores per unit weight is 0.2 cc / g or more, or the specific surface area of the pores of the inorganic substance is more than. The main component of the inorganic substance having an effective pore diameter greater than the effective pore diameter of the zeolite is, specifically, a porous clay mineral, diatomaceous earth, silica, alumina, a mixture of silica and alumina. One of oxalic acid, activated alumina, porous glass, or a mixture thereof. And this porous clay mineral is best to have a ribbon 10 (read the precautions before filling in this page)

In this paper, we select the internal valve ((: _NS)) Λ4 specification (:! 丨 Gongping), the staff consumer cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs, India 419390 B7 * 5. Description of the invention () Water in the structure One or a mixture of magnesium silicate clay minerals, activated white clay, acidic white clay, activated bentonite, microcrystals of aluminum silicate metal salts, and silicon dioxide microparticles. In any case, it has the ability to adsorb the gas organically The nature of the impurities, the inorganic substance having an effective pore diameter larger than the effective pore diameter of the zeolite, and at the same time the performance of mechanically supporting the powder of the zeolite on the surface of the support or as a binder when granulating the zeolite into pellets Performance and the performance of adsorbing gaseous organic impurities whose molecular diameter cannot be absorbed by the zeolite is larger than the effective pore size of the zeolite. In addition, the filter is only composed of materials that do not generate gaseous organic impurities. Combustible material-free material. The inorganic substance may include an inorganic fixing aid. In that case, it is preferable that the inorganic fixing aid contains at least At least one of acid soda, silicon dioxide, or alumina. In addition, if the present invention is used, a method for manufacturing a filter is provided, which is characterized in that a zeolite is used to remove gaseous organic impurities in the environment by immersing a support. The powder and the suspension of powder dispersed inorganic powder which has the property of adsorbing gaseous organic impurities and has an effective pore diameter larger than the effective pore diameter of the zeolite as an inorganic substance as a binder are dried to form an adsorption J ^ 5r on the surface of the support. In addition, a method for manufacturing a filter is provided, which is characterized by immersing a support in a suspension liquid in which a powder of zeolite used to remove gaseous organic impurities in the environment and a powder of inorganic material as a binder are dispersed, and then dried, A first adsorption layer is formed on the surface of the support. By re-immersion, it has the property of adsorbing gaseous organic impurities and the effective pore size is greater than the effective pore size of the zeolite. 11 (Please read the precautions of V1SJ before filling in this page. mn-i .1 ^ This paper is a silver standard of Shizhou Zhong valve and valve house standard (CNS > Λ4 is current (Ή0 / 297) 筇) Printed by the cooperative ^ 4/193 90 A7 ___ R7___ 1. Description of the invention () The suspension of the dispersed powder of inorganic material with pore size is dried and a second adsorption layer is formed on the surface of the first adsorption layer. If these filters are used In the manufacturing method, the filter can be composed only of materials that do not generate gaseous organic impurities. In fact, the filter is only composed of materials that do not contain combustible materials. In addition, in these manufacturing methods, the first surface of the support is formed. When the second adsorption layer is formed on the first adsorption layer after the first adsorption layer, when the suspension of the inorganic substance is mixed with the inorganic fixing aid in the sol state, the inorganic substance includes the inorganic fixing aid. In addition, if the present invention is used, a clean device is provided. In the clean device having a mechanism for circulating the humidity-adjusted air, one of the filters of the present invention described above and a filter disposed in the filter are provided in the air circulation path. Particle filter for removing particulate impurities on the downstream side. By using the cleaning device, the gaseous organic impurities in the air circulating in the cleaning device can be removed without reducing the humidity. The clean device is excellent in disaster prevention because it does not use flammable activated carbon. Therefore, it is possible to arrange the collector and the filter for removing particles on the ceiling of the clean device. Next, if the present invention is used, a purifier is provided, which is characterized in that it is arranged adjacent to the upstream side or the downstream side of the first permeable filter having a synthetic zeolite, and has the property of adsorbing organic impurities in the gas and has effective fineness. The air-permeable second filtering part of the inorganic adsorbent having a pore diameter larger than the effective pore diameter of the synthetic zeolite. This filter is excellent in disaster prevention because it does not use flammable activated carbon. By using this filter ', gaseous organic impurities in the air circulating in the clean device can be removed without reducing the humidity. In this filter, the structure of the first filter section is to fix the synthetic zeolite to the support (please read the precautions before filling in this page)

Speed of this paper;! '| Zhong valve valve home activity ([, > «) / \ 4 present grid (2! 〇 / 2 & ^ public cold) Printed by the Central Standards Bureau of the Ministry of Economic Affairs, Consumer Cooperatives ν ί. I, θ39〇β7 ______ ______ --- 7. Description of the invention () On the surface, the structure of the second filter part may fix the inorganic adsorbent on the surface of the support. At this time, for example, the structure of the first filter unit is obtained by immersing a support in a suspension liquid in which the synthetic zeolite is dispersed and drying the structure to fix the synthetic zeolite on the surface of the support. One is to immerse the support in the suspension in which the inorganic adsorbent is dispersed, and then to dry the inorganic adsorbent to the surface of the support. In addition, the structure of the first filter section is fixed to the rubbing ball using a powder formed of a powder of synthetic zeolite, and the structure of the second furnace section uses a solid ball formed of the inorganic adsorption powder! It can be attached to the support. In addition, a breathable support can also be divided into two areas with the boundary interface that intersects the ventilation direction of the support as the realm. In one area, the beads formed by synthetic zeolite or synthetic zeolite powder are fixed. A first filter portion is formed on the surface of the support, and in another area, a ball formed of an inorganic adsorbent or a powder of the inorganic adsorbent is fixed to the surface of the support to form a second filter portion. In addition, when a small ball formed by synthetic zeolite or a synthetic zeolite powder is fixed to the surface of the support, and / or a small ball formed by an inorganic adsorbent or a powder of the inorganic adsorbent is fixed to the surface of the support. It is preferable to use a fixing adjuvant composed of at least one of talc, kaolin mineral, bentonite, silicate soda, silica, or alumina. '' The inorganic adsorbent of the second filter is composed of diatomaceous earth, silica, alumina, a mixture of silica and alumina, aluminum silicate, activated alumina, porous glass, and ribbon-shaped aqueous silicon. At least one kind of magnesium acid clay mineral, activated white clay, acidic white clay, and activated bentonite may be used. 13 (Please read the notes on the back before filling in this page) i. Ding-m This paper is suitable for medium and small households (CMS > Λ4 size (21ϋ > · π7 埯)) Central Standards Bureau of the Ministry of Economic Affairs Industrial and consumer cooperatives 'printing A7', (A 193 9 0 _ ^ ____ i. Description of the invention () In addition, the effective pore diameter of the synthetic zeolite is 7 angstroms or more, and the inorganic adsorbent in the second filtering section is distributed. The total volume of the pores per unit weight in the range of 15 to 300 Angstroms is 0.2 cc / g or more, or the specific surface area of the pores of the inorganic adsorbent is 100 m2 / g or more. A honeycomb structure can be used. In this case, the honeycomb structure is preferably a support using inorganic fibers as an essential component. In addition, the pellets of the synthetic zeolite are filled in a casing to constitute the first filtering part, and the The pellets of the inorganic adsorbent may be filled in another casing to form the second filtering portion. In addition, the synthetic zeolite is preferably hydrophobic. [Best Embodiment of the Invention] Hereinafter, referring to the attached drawings The preferred embodiment of the present invention will be described below. An explanatory diagram of the structure of the cleaning device 1 of the embodiment 1. The cleaning device 1 is, for example, a clean room or a clean operation table, etc. The cleaning device 1 is used for manufacturing a processing space such as an LSI or an LCD. 2. The ceiling portion (supply booster system) 3 located above and below the processing space 2 and the lower floor portion (return booster system) 4 and the return air passage 5 located on the side of the processing space 2 are formed. 3 gB fan unit 10, air-permeable filter 11 and particle-removing filter 12 clean fan unit 13 »For example, a semiconductor manufacturing device 14 is installed in the processing space 2 as a heat generation source. The bottom floor part 4 is drilled. Multi-well plates 15 with multiple holes are separated. Furthermore, a junction 14 for processing the sensible heat load of the semiconductor manufacturing device 14 is provided on the lower part 4 of the floor. Specifications (UOX 2W public light) (Please read the precautions on the back before filling this page)

Yin Gan, Staff Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs, 4193 90 " 7 • Η / V. Description of the invention () Exposed coil tube 16. The non-condensing coil 16 means an air cooler that cools the air without dew condensation on the surface of the heat exchanger. A temperature sensor 17 is provided in the return air passage 5 to control the cold water flow adjustment valve 18 of the non-condensing coil 16 so that the temperature detected by the temperature sensor 17 becomes a specified setting 値 and there is no condensation on the coil The fixed humidity is maintained below. Furthermore, by operating the fan unit 10 of the clean fan unit 13, the air inside the clean device 1 is adjusted in accordance with the ceiling section 3-processing space 2- > The return air passage 5- > the sequential flow cycle of the ceiling portion 3. In this cycle, it is cooled by the non-condensing coil 16, and the gaseous organic impurities and particulate impurities in the air are removed by the filter 11 and the particle removing filter 12 in the clean fan unit 13 and are supplied into the processing space 2. Suitable temperature and clean air. The filter 11 has a hydrophobic zeolite for removing gaseous organic impurities from the circulating air. The filter 11 is made of a material that does not contain combustible materials and does not generate gaseous organic impurities. The particle removing filter 12 is disposed downstream of the filter 11. The particle removing filter 12 has a function of removing particulate impurities. In addition, the particle-removing filter 12 for removing dust and the like is composed of a material that does not generate gaseous organic impurities. The inhaled outside air is appropriately supplied to the floor lower portion 4 of the cleaning device _ 1 via the outside air path 20. A filter 21 having a hydrophobic zeolite for removing gaseous organic impurities from the inhaled outside air is arranged in the outside air path 20, and an upstream side of the filter 21 is provided for dust removal, temperature adjustment and humidity adjustment of the inhaled outside air. Unit type air conditioner 22. Also, place humidity in the outside air path 20 and set the humidity 15 in the paper size. Quzhou middle threshold same standard Xin (C: NS) Λ4 specifications (]) () 乂 29:? Public 筇) (Read the precautions on the back before filling Book f) Order V 4193 90 B7___ printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs. 5. Description of the invention () Detector 27, water supply pressure adjustment valve 29 of the humidity control section of the control unit type air conditioner 22, to make humidity sensing The humidity detected by the device 27 becomes the specified setting. A humidity sensor 28 'is provided in the processing space 2', and the humidity of the environment in the processing space 2 is detected by the humidity sensor 28. The sucked-in outside air supplied to the lower floor portion 4 of the cleaning device 1 through the outside air path 20 is introduced into the processing space 2 through the return air passage 5 and the ceiling portion 3. In addition, the inhaled outside air and the exhaust gas mainly composed of the produced exhaust gas are controlled to maintain a balance between the supply and exhaust volume so that the indoor pressure becomes constant. Exhaust is discharged to the outside through the exhaust port 25 through the exhaust hole 26. FIG. 2 is a schematic exploded assembly view of the filter 11. A honeycomb structure 32 is provided between the adjacent corrugated sheets 30 to hold the non-concavo-convex sheet 31 in structure. A hydrophobic zeolite is fixed to the entire surface of the honeycomb structure 32. As will be described later, the effective pore diameter of the hydrophobic zeolite is preferably 7 angstroms or more. As shown in the figure, the sprinkler 11 is structurally 'assembled the brocade frames 35a, 35b, 35c, 35d into a cylindrical shape so as to face the flow direction of the processed air (the direction shown by the blank arrow 33 in the figure) A honeycomb structure 32 having a hydrophobic zeolite immobilized on the surface is arranged in its internal space. The shape and size of the adsorption layer 11 can be arbitrarily designed and changed according to the installation space. An example of a method of manufacturing the filter U will be briefly described. Inorganic fiber (ceramic fiber, glass fiber, silicon dioxide fiber, oxidized fiber), organic materials (mixture of pulp, fused vinylon), and calcium silicate are mixed in an equal weight of 1: 1, using wet type The papermaking method makes a thickness of about 0.3 mm. In addition, clay minerals such as sepiolite and attapalgite with magnesium silicate as the main component can also be used instead of 16 papers of moderate size ® 捽 家 捽 双 () ΛΑ specifications (2! 〇 / public money) ~ (Please read the precautions on the back before filling out this page) Ding Yanyan, printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 415 390 5. Description of the invention () Calcium silicate. This copied sheet was processed into a corrugated sheet by a corrugated sheet rolling mill, and the corrugated sheet 30 produced was bonded to the thin sheet sheet 31 with a cement to form a honeycomb structure 32 as shown in FIG. 2. The honeycomb structure 32 was placed in an electric furnace 'and subjected to a 100 t: heat treatment for 1 hour, and then the organic components were completely removed' to make the honeycomb structure 32 porous. Secondly, disperse the porous honeycomb structure aqueous zeolite powder (several μm) and the inorganic sol adhesive (silicone, alumina sol, etc.) in the suspension for several minutes, and then heat-treat at 300 ° C for 1 hour. The filter 11 is obtained by drying. The filter 11 thus obtained does not contain flammable materials in the constituent material, and completely removes and removes gaseous organic impurities that cause surface contamination contained in the constituent material when the adsorption layer is heat-treated. The filter itself does not generate gas Organic impurities. Next, an example of another manufacturing method of the filter 11 will be described. Until the honeycomb structure 32 is manufactured, it is the same as the manufacturing method example just described. In the above example, the porous honeycomb structure 32 is impregnated with the powder (a few μm) of the hydrophobic zeolite. However, in this example, the granular hydrophobic zeolite is adhered to the honeycomb structure 32 by bonding together. Fig. 3 is an enlarged partial sectional view of the filter 11 in the manufacturing method of this example. The granular hydrophobic zeolite 36 is fixed to the entire surface of the corrugated sheet 30 and the thin plate sheet 31 with a non-flammable adhesive without gaps. Then, by putting the honeycomb structure 32 into an electric furnace, and performing a heat treatment at 100 ° C below the heat-resistant temperature of the adhesive for 1 hour, the gas contained in the adhesive that causes the surface contamination is completely removed and removed. Organic impurity component, and the filter 11 is manufactured. The processed air passes through a cylindrical space 37 having a virtual half-moon shape in cross section as shown in FIG. In addition, as shown in FIG. 4, the surface of the honeycomb structure 32 composed of a mountain-shaped sheet 38 and a thin sheet 31 can be adjusted (please read it first. Please note on the back before filling this page)

This paper ilui is applicable to Chinese letter [. ¾ Home Pillow Therapy (M) M is current (2 to) 〆297 public 筇) Printed by the Real Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs ί 4 193 90 V. Description of the invention The flammable adhesive is fixed to the granular hydrophobic zeolite 36 without gaps to produce a filter 11. In the case of Fig. 4, the processed air passes through a cylindrical space 39 having a triangular cross-section. Since the filter 11 manufactured in this way does not contain combustible materials, as shown in FIG. 1, the filter 11 is mounted on the ceiling portion 3, and the conventional chemical filter based on activated carbon based on combustible materials is installed. Compared with the situation on the ceiling, the safety in disaster prevention is significantly improved. In addition, in the clean device 1 shown in FIG. 1, if the filter 21 for processing the inhaled outside air and the filter 11 for processing the circulating air both have the same structure, and the conventional chemical filtering based on activated carbon based on combustibles Compared with the case where the device is installed on the ceiling surface, the safety in disaster prevention is higher. In general, medium-performance filters, HEPA filters, and ULPA filters are filters that remove particles. Because the filter contains an adhesive containing volatile organic compounds, there is an escape gas from the adhesive. Therefore, the filter 12 for removing particles uses a filter without an adhesive, or even if an adhesive is used, a filter with volatile organic compounds removed by heat removal or the like is used. The seal of the device fixed to the frame is also selected to be a type that does not cause outgassing, or a filter element is used to physically press the filter to fix it to the frame. Next, another cleaning device 1 'according to Embodiment 1 of the present invention is shown in FIG. The cleaning device 1 ′ shown in FIG. 5 is not that the filter 11 of the honeycomb structure to which the hydrophobic zeolite is fixed is installed on the ceiling portion 3 of the cleaning device 1 ′ in its entirety and spaced apart from each other. In this example, as compared with FIG. 1, the number of filters 11 is set to half. In other respects, and the cleaning device 1 just described in Figure 1, this paper size is applicable to the China Minjing Beijing Cotton Standard (C / NS) Λ4 specifications (public money) (Please read the precautions on the back before filling this page)

h as ——II,-i ^ n = _ ...... _-printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs, Γ 4193 90 B; 熹-1 1-1-- —— — _ _ Fifth, the invention description () has the same structure. Therefore, in the cleaning device 1 'shown in Fig. 5, the same components as those of the cleaning device 1 described earlier in Fig. 1 are assigned the same reference numerals, and detailed descriptions are omitted. The organic substances that cause the surface contamination of substrates in clean equipment such as semiconductor manufacturing are limited to organic substances that occur from sealants, phosphates that originate from non-flammable agents in building materials, and plasticizers that originate from building materials. High boiling point and high molecular organic compounds such as phthalates, HMDS generated from photoresist adhesives, and BHT that prevents oxidants from occurring. The sources of these organic substances are the constituent materials of clean devices such as clean rooms or various parts used for manufacturing inside the clean devices. Therefore, the role of the filter Η is mainly to remove the high boiling point and high molecular organic compounds that cause surface contamination inside the clean device from the circulating air, and reduce the concentration of these organic substances in the clean device. When a clean device with a filter 11 is in operation, the organic matter concentration in the clean device is highest in the initial stage of the operation. As the operating time elapses, these organic materials are removed one by one from the circulating air, and the concentration decreases. The concentration of the quantity is stabilized. Regarding the amount of organic matter removed once by air circulation, the cleaning device 1 of FIG. 1 installed on the entire ceiling and the cleaning device 1 ′ of FIG. 5 installed at intervals are compared, and there is a 2: 1 relationship. That is, the time from the highest concentration at the beginning of the operation to the balance between the amount of occurrence inside the clean device and the clean device 1 'shown in Fig. 5 installed at intervals is longer than the clean device 1 shown in Fig. 1 installed on the ceiling. a lot of. In addition, the equilibrium concentration finally reached is slightly higher in the case of interval installation than in the case of full ceiling installation. That is, it takes time to reduce the concentration when the installation is spaced. 19 — _ ^ -------- Q II (Please read the precautions on the back and fill in this 1).嗥 |. (-': ^) / \ 4 圯 格 （21〇 / 247 公 漦） Employees of the Central Bureau of Standards of the Ministry of Economic Affairs and Consumers Cooperative Cooperative Association Printing 419390 gi —. V. Description of the invention () Balance after reduction The density is also slightly higher than the case of full installation. However, due to the economic requirements of reducing the initial cost of the filter 11 or the operating costs associated with periodic replacement, as shown in the example of FIG. 5, the filters 11 are arranged at intervals. There are many cases. Next, a filter 100 according to the second embodiment of the present invention will be described with reference to FIG. 6. This filter 100 also has a structure substantially the same as that of the filter 11 just described in FIG. 2. However, in the filter 100 of the second embodiment, an organic substance having an effective pore diameter larger than the effective pore diameter of the zeolite is used as an adhesive in different points of the structure, and the powdered zeolite is fixed to the honeycomb structure 112. The surface of the whole. That is, the filter 100 of the second embodiment is structurally stacked in the inner space of the outer frames 115a, 115b, 115c, and 115d approximately parallel to the aeration direction 113. The inorganic substance is used as an adhesive to fix the powdery zeolite to Corrugated sheet 110 and thin sheet 111 on the surface. The shape or size of the filter 100 can be arbitrarily designed according to the installation space. Here, an example of a method of manufacturing the filter 100 will be described. The process until the honeycomb structure is formed is the same as above. As the honeycomb structure m after the removal of the organic matter component has pits of countless microns in size, a porous honeycomb structure 112 having the pits as holes can be manufactured. Later, fine particles of the adsorbent or the adhesive are embedded in the pit. Secondly, the honeycomb structure 112 is immersed in an inorganic substance, such as clay mineral, diatomaceous earth, which makes the powder of zeolite and has the property of adsorbing gaseous organic impurities and has an effective pore diameter larger than the effective pore diameter of the zeolite. , Alumina, alumina, a mixture of silica and alumina, aluminum silicate, activated alumina, porous glass and other dispersed suspensions after several minutes, pull up at 300 ° c, 1-20__ this Paper scale over-threshold ((.NsTa4 secret (2iOx 297 cm)) (Please read the precautions on the back before filling this page)

Printed by the Central Department of Standards, Ministry of Economic Affairs, for consumer cooperation Du 印: 419390: r— — ~ '--- 1-- * ^ V. Description of the invention () After the heat treatment and drying for hours, as shown in Figure 7, inorganic substances are used as adhesives. The filter 100 is obtained by fixing the zeolite powder to the surface of the corrugated sheet 110 and the thin plate sheet 111 constituting the honeycomb structure U2 to form an adsorption layer 120 ′. This suspension may contain at least an inorganic fixing aid, such as one of silicate soda or silica gel or alumina sol. These are used as the inorganic sol adhesive in the previous example, but in this example, they are used as a fixing aid to firmly join the zeolite and the inorganic substance (adhesive) or as a powder and a zeolite. An inorganic substance used as an adhesive is an auxiliary agent that is firmly fixed to the surface of the honeycomb structure 112 (including the inner surface of the unit that becomes a component of the honeycomb structure 112 (the same applies hereinafter)). The filter 100 obtained in this way does not contain any combustible materials in the constituent materials, completely detaches them, and removes gaseous organic impurities that cause surface contamination contained in the constituent materials during the heat treatment of the adsorption layer. Gas organic impurities have occurred. Next, another manufacturing method of the filter 100 will be described. Since the honeycomb structure Π2 is manufactured, it is the same as the above-mentioned manufacturing method example 'and its explanation is omitted. This manufacturing method is characterized in that pellets made of zeolite powder are adhered to the surface of the honeycomb structure 112 with an adhesive. When granulating the powder of zeolite, an inorganic substance having the property of adsorbing gaseous organic impurities and having an effective pore diameter larger than the effective pore diameter of the zeolite is used as a binder between the zeolites and mixed with the zeolite powder. The powder of zeolite and the inorganic substance used as a binding agent are mixed in a state containing an appropriate amount of water and an inorganic-type fixing auxiliary agent, so as to show clay-like viscosity and plasticity, and can be granulated. Types of inorganic substances or inorganic fixing aids used as adhesives and the manufacturing just described {Please read the precautions on the back before filling in this page)

This paper is applicable to the standard of ^ 1. ¾ furniture (('NS) Λ4 specifications (210〆297)) Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs ^ 4193 90; ) The method is the same. Another manufacturing method of the Shanghai device 100 is further explained. Since the honeycomb structure 112 is the same as the above manufacturing method example, the description is omitted. The manufacturing method is also characterized by the use of an adhesive to make zeolite. The pellets formed by mixing the powder and the inorganic adhesive are adhered to the surface of the honeycomb structure 112. However, the inorganic adhesive may not necessarily have the property of adsorbing gas and organic impurities as in the manufacturing method described above. And it has a larger effective pore diameter than the effective pore diameter of the zeolite. "The point that is completely different from the above-mentioned manufacturing method is the surface structure of the spheres. An inorganic substance having a larger pore diameter than the effective pore diameter of the zeolite. Fig. Δ shows the use of an inorganic substance as an adhesive to fix the pellet 121 made of zeolite to the honeycomb structure 112. An enlarged view of a pattern cross section of a filter formed on the surface of the corrugated sheet 110 and the thin plate sheet 111. An inorganic substance is used as an adhesive, and a non-flammable adhesive is used to fix the small balls 121 made of zeolite to the waveform. All the surfaces of the sheet 110 and the sheet 111 are integral. In addition, for non-flammable adhesives, heat-resistant adhesives such as polyimide-based and polyimide-based adhesives can be used. In this embodiment, the thin cylindrical portion 117 having a virtual half-moon cross-section is formed. Then, the honeycomb structure 112 to which the small balls 121 are fixed like this is put into an electric furnace, and the temperature is 1 ° below the heat-resistant temperature of the adhesive. 〇 ° C After about 2 hours of heat treatment, the gas organic impurities contained in the adhesive that cause surface contamination can be completely removed and removed, and the filter 100 can be manufactured. The filter manufactured in this way is 1㈨, because the constituent materials do not contain Combustible materials, 22 (please read the note on the back and fill in the tr page) fftn tit · ------ order _---- \ fy n ^ i In If — ^ ϋ Chuanzhong® 1¾ Family Standard (CNS) Λ4 坭 Grid (2IOX 297 public power) Central Ministry of Economic Affairs Printed by the Bureau_t Consumer Cooperative ii: 4193 90 a7 'B7 V. Description of the invention () When the filter 100 is installed on the ceiling, and the conventional chemical filter based on combustible activated carbon is installed on the The condition of the ceiling surface is significantly improved in terms of safety in disaster prevention. The cross-sectional shape of the space through which the treated air passes is not limited to the half-moon shape described above, and any shape may be used. Various cleaning devices for semiconductor substrate or glass substrate manufacturing, such as clean rooms, dust-free operating tables, clean rooms, various stockers used to store clean products, etc. Various organic impurities are generated in the cleaning device. However, high-boiling-point, high-molecular-weight organic compounds are the cause of substrate surface contamination. For example, organic siloxanes generated from sealants in clean rooms, phosphate esters generated from non-flammable agents in building materials, phthalates generated from plasticizers in building materials, and photoresist adhesives. HMDS, self-boxed BHT to prevent the occurrence of oxidants, etc. Zeolites, especially synthetic zeolites called molecular sieves, have a uniform effective pore size and cannot adsorb gas molecules larger than their effective pore size. For example, using a zeolite with an effective pore size of δ angstroms can adsorb DOP or DBP (because the size of DOP or DBP is less than 8 angstroms) that causes the surface contamination of the substrate. However, zeolite with an effective pore size of 8 angstroms cannot adsorb BHT or siloxane, which is the cause of contamination of the substrate surface (because the size of BHT or siloxane is greater than 8 angstroms). In the filter 100 of this Example 2, the above-mentioned BHT or siloxane which cannot be adsorbed by the zeolite can be adsorbed and removed by the adsorption of an inorganic substance used as a binder of the zeolite. In addition, since there is no self-binding property in zeolite crystals, in order to form the zeolite powder into small balls or to be fixed in layers on the surface of the honeycomb structure 112, it is necessary to set the standard of 23 papers. (C_NS) Λ4 specification (2I () 〆) (Please read the precautions on the back before filling this page)

Α7 Β7 t ?; Α193 90 V. Description of the invention () Add adhesive. In the past, such adhesives generally used clay minerals such as talc and bentonite. The total volume of pores (per unit weight of each adhesive) of these previous various adhesives distributed in the range of 15 to 300 Angstroms are each 0.07cc / g, 0,06cc / g, 0.03cc / g. The specific surface area of the pores of the anti-adhesive agent should not exceed 28m2 / g, 21m2 / g, 23m2 / g, respectively. These adhesives that have been used before attach importance to air permeability. The main size of the air pores formed between adjacent adhesive particles or the gap between adjacent adhesive particles and zeolite particles is more than 500 angstroms. . That is, the air pores are large pores which are excellent in air permeability and are not prone to physical adsorption. In addition, pores that are prone to physical adsorption do not exist on the surface of adhesive particles such as talc, kaolin and bentonite. This is because it is believed that the adhesive should only be used to mechanically support the zeolite powder on the surface of the support. 'In order to improve the adsorption performance, it is best to increase the amount of zeolite supported' relative to the zeolite content of the adhesive. Keep the proportion as small as possible. That is, the adhesive requires the support performance of the zeolite powder and the excellent gas permeability of the processing target gas to easily reach the surface of the supported zeolite powder, but no adsorption performance is required. However, the filter 100 of this embodiment has the same ventilation holes formed between the adjacent adhesive particles or the gap between the adjacent adhesive particles and the zeolite particles as the previous adhesives, but because of the adhesion There are pores that are prone to physical adsorption on the surface of the particle of the agent itself, that is, small pores with a pore size of less than 20 angstroms, or isopores among pores with a pore size of 20 angstroms and 500 angstroms. The surface itself adsorbs and removes BHT or siloxane that cannot be adsorbed with zeolite. And because it also has the excellent breathability of the target gas easily reach the surface of the zeolite powder, it is the same as before. The paper size of the paper is 24. (CNS). (2 〖(ΐχ2Μ 公 冰) ----- --f (Please read the notes on the back before filling out this page),-° Printed by the Consumer Standards Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 4193 90 Utilizing the selective adsorption characteristics of zeolite, that is, it does not adsorb molecules larger than the pore size of zeolite, and adsorbs molecules smaller than the pore size of zeolite, and has excellent adsorption performance. In addition, the ease of physical adsorption of gaseous molecules The order is micropores, medium pores, and macropores, and the macropores are almost independent of physical adsorption. Figure 9 shows an adsorption layer for supporting zeolite powder on the surface of a support by using inorganic binder particles in the present invention. An enlarged view of the pattern of the section of the adsorption layer shown. The gas to be treated, such as the surface of the adsorption layer (and the contact surface of the gas to be treated), is drilled into the zeolite particles and the adhesive The air pores formed between the particles enter the inside of the adsorption layer or go out of the inside of the adsorption layer on the contrary. At that time, molecules of gaseous organic impurities enter the pores on the respective surfaces of the zeolite particles and the adhesive particles to be adsorbed and In order to achieve the purpose of the present invention, an inorganic substance having pores which are larger than the effective pore diameter of zeolite, mainly medium pore area or micro pore area, is used as an adhesive, so that the zeolite powder is fixed to the honeycomb structure 112, As the adsorption layer 120, the filter 100 is formed, or the same zeolite powder is used to form a small ball 121 by using the same inorganic adhesive, and the small ball 121 is fixed on the surface of the honeycomb structure 112 to constitute the filter 100. In addition, as shown in the AA section and the BB section in FIG. 10, the powder of zeolite is made of an adhesive having inorganic pores which are larger than the effective pore diameter of the zeolite, mainly medium pore regions or micro pore regions. After the small ball 121 is formed, the small ball 121 is filled into a double-cylindrical housing 122 having a plurality of air vents 123 on the side to form a filter 100 '. Purpose of the invention. The processed air flows in from the inner cylinder of the shell 122 and passes through the 25 paper thick scales in the shell 122. The standard is called Zhongmin 1¾ standard (('NS) Λ4 觇 Grid (2 丨 0,, 297) Start) (Please read the notes on the back before filling in this page)

ί 4 193 90 V. Description of the invention () After the filling layer of the small ball 121, go out through the space sandwiched by the outer cylinder 124 and the outer cylinder 124. The flow direction of the treated air is indicated by arrow 113. For example, a powdery synthetic zeolite having a pore size of 8 angstroms and a powdery acid-treated montmorillonite adhesive having a size of several μm are mixed and fixed on the surface of the honeycomb structure 112, or the mixture is mixed. After forming the small ball 121, it can be fixed on the surface of the honeycomb structure 112 or filled into the shell, and the filter 100 or 100 of the present invention can be manufactured. In addition, montmorillonite is produced in The chemical composition of Montmorillon in France is named as the clay mineral of Al4Si8 (OH) 4 · ηΗ20. After montmorillonite acid treatment, the pore volume is about 0.37cc / g, and the specific surface area is about 300m2. / g. The pore volume in the range of 40 to 600 angstroms accounts for about 22% of the total pore volume. By using acid-treated montmorillonite as an adhesive for synthetic zeolite with a pore diameter of 8 angstroms, zeolite can be used. The size of the molecules that cannot be adsorbed is greater than 8 angstroms. BHT or siloxane is physically adsorbed in the pores of the adhesive. Printed by the Central Standards Bureau of the Ministry of Economic Affairs, Consumer Cooperatives (please read the precautions on the back, and then fill out this page). Talc, kaolinite, kaolinite, Bentonite has a large pore area but a small or medium pore area with a small internal surface area or volume and a small physical adsorption performance. In addition, the fibrous porous clay mineral sepiolite pores are composed of 10 angstrom pores and 200 angstrom middle pores. The internal surface area or volume of the small pore area or medium pore area is large, and the physical adsorption performance is also good. Big. Acid-treated montmorillonite (active clay), synthetic magnesium-rich montmorillonite (stevensite), synthetic magnesite, synthetic fraipontite (fraipontite), or 26 paper scales suitable for use by the Fujian family (rNS) A4 size (2K) × 29T mm,) Consumption cooperation by employees of the Central Standards Bureau of the Ministry of Economic Affairs, Du printed Λ7 B7 V. Description of the invention () Microcrystalline crystals such as synthetic aluminosilicate metal salts and fine silica particles Porous clay minerals, such as composites, have the same physical adsorption properties as sepiolite. These porous clay minerals have a pore volume per unit weight of 0.2 cc / g or more, and a specific surface area of 100 m2 / g or more, distributed in a range of 15 angstroms to 300 angstroms. The sepiolite or palygorskite, which is a fibrous porous clay mineral, acid-treated montmorillonite (active clay), and various synthetic clays are also suitable for use as the second adsorption layer of the present invention as described below. . Here, DOP and DBP are the most abundant types of organic contaminants detected from the surface of the substrate in the clean device. These are contained in a large amount in the vinyl chloride material, and their molecular diameters range from 6 to 8 angstroms. Therefore, if the pore size of the zeolite is set to 7 angstroms or more, DOP and DBP, which are the most abundant types of gaseous organic substances that cause the surface contamination of the substrate, can be removed with zeolite. In addition, by using an inorganic substance having an effective pore diameter larger than the effective pore diameter of the zeolite in the adhesive of the zeolite, gaseous organic impurities having an effective pore diameter larger than the molecular diameter of the zeolite are removed. In addition, the strength of the adsorption force to the water or polar material of the zeolite crystal depends on the electrostatic force of the cations corresponding to the number of aluminum atoms in the bone. As the content ratio of silicon dioxide (Si02) and aluminum oxide (A1203) in the crystal becomes larger, the number of cations in the crystal decreases and the hydrophobicity increases. In Si02 / Ai203, about 2 to 5 indicate hydrophilicity, while in Si02 / Al203 above 20 to infinity, the zeolite's hydrophilicity decreases and the hydrophobicity exceeds. Fig. 11 is a graph showing the relationship between the content of Si02 / Al203 and the amount of water adsorbed (cc / 100g) per 100 g of zeolite. The amount of water absorption decreases when SiVCAl2300 + is exceeded, and it is hardly adsorbed above 80V. In addition, for 27 i 4193 90 —I -------- d clothing — (Please read the precautions on the back before filling this page) Order 1

D This paper is of appropriate size. 丨 Η7 Min's Family Standards (C'NS) Λ4 specification (21〇_χ ·: ^ 7 婼) Printed by the Shell Worker Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 A 19-0__ίίZZ ______ V. Description of the invention ()

The adsorption isotherm diagram of SiO2 / Al2O340 hydrophobic zeolite and water is shown in Figure 12. At a relative humidity of 50%, activated carbon has a water adsorption amount (cc) of 0.11 (cc / g), and a hydrophobic zeolite (g) has a water adsorption amount (cc) of 0.03 (cc / g). After zeolite adsorbs water, the adsorption capacity of zeolite for gaseous organics is reduced compared with the case without adsorbed water, because the volume of adsorbed water is reduced, and the duration of the adsorption performance, that is, the life of the adsorbent is also reduced. That is, in a clean device with a general relative humidity of 30 to 60%, the zeolite used to adsorb and remove gaseous organic matter is preferably hydrophobic. However, a hydrophilic zeolite can also be used in the present invention. Although there are some differences in the silicon wafers that are transported in the air environment of a clean room or a clean operation table, the natural oxide film is formed on the surface, so the surface of the wafer is hydrophilic. It is also known that glass substrates transported in this air environment are hydrophilic due to the physical properties of the glass itself. This organic substance from the air environment that contaminates the hydrophilic surface of a silicon wafer or glass substrate on which a natural oxide film is formed has a hydrophilic group that is sufficiently fused to the hydrophilic surface. That is, the organic substance that has just been explained as the cause of surface contamination is a high boiling point and high molecular weight hydrophobic organic substance with a chemical structure of a double combination of carbon elements or a clumsy ring, of course, having a hydrophobic group. However, these organic substances also have a hydrophilic group that causes surface contamination. Therefore, since electronic materials such as silicon wafers are hydrophilic, the organic substances to be adsorbed have hydrophilic groups, and hydrophilic zeolites can be used. In hydrophilic zeolite, the ratio of Si02 / Al203 is about 2 ~ 5, while in hydrophobic zeolite, the ratio of SiO2 / Al203 is from 20 to infinity. The lifetime of hydrophobic zeolite as an adsorbent is longer than that of hydrophilic zeolite, but because hydrophobic zeolite uses hydrophilic zeolite as the raw material, it is treated by acid treatment with dealumination and plus 28 ... ..... I-.- I- -II -— 1 ^ 1 ^^^ 1 ^ 1 (Please read the precautions on the back before filling in this page) Order ο The paper size is suitable Half (), \ 4 specifications (2! 0 > 297 total) Printed by the Ministry of Standards and Technology Bureau of the Ministry of Work and Consumer Cooperatives, A193 90 at ...________ B7 V. Description of the invention () Thermal drying process and Made, the price is more expensive than hydrophilic zeolite. The production of hydrophilic zeolite is easy to reduce the price, but the price of hydrophobic zeolite is not easy to reduce. In addition, a zeolite and an inorganic substance having the property of adsorbing gaseous organic impurities and having an effective pore diameter larger than the effective pore diameter of the zeolite, or an effective pore diameter of a small pore region, are used as a binder to prepare a powder of the zeolite The granulated pellets are fixed on a support, for example, water is mixed with the powder of the zeolite and the inorganic substance to become clay, and granulated by a granulator into pellets of about 0.3 to 0.8 mm. The filter of the present invention as shown in Fig. Δ can be manufactured by blowing it to a support to which an inorganic or non-combustible adhesive is attached in advance by using high-speed air. The support is not necessarily limited to a honeycomb structure, and may include a three-dimensional mesh structure such as asbestos. In the latter case, because the treated air traverses the mesh structure, the air resistance is large, but the contact with the adsorbent is more than that of the honeycomb structure. Next, Fig. 13 is a schematic exploded assembly diagram of another filter 131 according to the second embodiment of the present invention. In addition, in this filter 131, since the structure of the small ball 121 itself is the same as that of the filter 100 just described in FIG. 6, the same constituent elements as in FIG. 13 are given the same symbols as in FIG. 6, and are omitted. Its description. The filter 131 is structurally, as shown in FIG. 14, the surface of the honeycomb structure 1Π on which the corrugated sheet 110 and the thin sheet sheet 1Π are stacked. An inorganic substance having an effective pore diameter is used as an adhesive to fix the zeolite to form a first adsorption layer 125, and then a second adsorption layer Π6 is formed by fixing the same inorganic substance on the surface. In addition, the shape or size of the filter 131 can be matched with the setting 29 (Please read the precautions on the back before filling out this page} Order * This paper size is suitable for 1¾¾ in the state () Λ4 specifications (2 丨 (). ≪ 297 Public Super League) / ^ 1-I ........... .... Printed by the Employees' Co-operation Office of the Central Bureau of Standards of the Ministry of Economic Affairs 4193 90 ___ βτ _________ 5. Description of the invention () Arbitrary design of the space However, the inorganic substance used as an adhesive when the first adsorption layer 125 is formed is different from the inorganic substance used when the second adsorption layer 126 is formed, and the performance of adsorbing gaseous organic impurities is not necessarily required. Small effective pores are also possible. For example, clay minerals such as talc, kaolin and bentonite, which have been used in the past and have little pores that participate in physical adsorption, can also be used. It is also possible to use an inorganic sol-like inorganic fixing adjuvant. Fig. 15 is an enlarged view of a schematic partial pattern of a composite adsorption layer composed of a first adsorption layer and a second adsorption layer according to the present invention. Here, the filter 131 will be described. An example of a manufacturing method. First, The porous honeycomb structure 112 is manufactured. The method of the description above is omitted until the adsorption layer is formed, and the description is omitted. Next, the honeycomb structure Η 2 is immersed in a powder of zeolite and a talc that has been used as an adhesive. , Kaolin, bentonite-like clay mineral powder dispersed in the suspension for several minutes, and then dried at a heat treatment of about 300 ° C for 1 hour to form a first adsorption layer 125. Next, a first adsorption layer will be formed The subsequent honeycomb structure 112 is immersed in an inorganic substance having a larger effective pore diameter than that of zeolite and the property of adsorbing gaseous organic impurities, such as porous clay minerals, diatomite, silica, alumina, dioxide A mixture of silicon and alumina, fine particles of aluminum silicate, activated alumina, porous glass, etc. are used as adhesives-and the dispersed suspension is dried for several minutes at 300 ° C for 1 hour to form The second adsorption layer 120. On the porous clay mineral, there are hydrated magnesium silicate clay minerals such as sepiolite and palygorskite, activated clay, and acid clay. 30, activated bentonite, silicic acid metal salt (please read the precautions on the back before filling in this page) hx Ding-,-° This paper size is suitable for China 1¾ China Standard (CNS) Λ4 specification (2 丨 0 XM7 Public Card> Printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs Γ 419390 V. Description of the invention () A composite of microcrystals and micron particles, etc. In this way, a second adsorption layer can be coated on the first adsorption layer 125 The honeycomb structure 112 of 126. The inorganic substance used in forming the first adsorption layer 125 and the second adsorption layer 126 contains at least an inorganic fixing auxiliary agent, for example, one of silicate soda, silica gel, or alumina sol. The function of the inorganic fixing aid is to help fix the powder of zeolite or inorganic binder forming the first adsorption layer 125 to the pores of the honeycomb structure 112, etc., and also to form the second adsorption. The inorganic substance of the layer 126 is firmly fixed to the auxiliary agent of the first adsorption layer 125. The honeycomb structure 112 obtained in this way does not contain combustible materials in the constituent materials, completely desorbs and removes gaseous organic impurities that cause surface contamination contained in the constituent materials during the heat treatment of the adsorption layer, and the honeycomb structure 112 itself does not. Gas organic impurities can occur. In addition, the material of the outer frame 115 shown in Fig. 13 is preferably a material that does not generate gaseous organic matter such as aluminum and does not contain combustible materials. In addition, in order to fix the honeycomb structure 112 to the outer frame 115 or to seal the gap between the honeycomb structure 112 and the outer frame 115, an adhesive or a sealant is preferred that it does not generate gaseous organic matter and does not contain combustible materials. At this time, for example, the entire filter 131 that has been assembled by installing the outer frame 115 on the honeycomb structure 112 may be heat-treated to completely remove and remove the non-flammable adhesive or sealant from the constituent material of the filter 131. Causes of surface contamination due to gaseous organic impurities. Therefore, the filter 131 as a whole can be composed of a material that does not contain combustible materials or a material that does not generate gaseous organic materials. In addition, of course, in the present invention, the structure of the support to which the zeolite and the adsorbent are fixed is not limited to the honeycomb structure described in FIG. 6 or FIG. 13 and the like. NS) Λ4. «1 Grid (Chuan ΓχπΊίί :) 1! -----— f {Please read the note on the back ^ a ^ item before filling out this page) Order ·· Central Laboratories of the Ministry of Economic Affairs, Consumer Co-operation for Offensive Work 枉Printed W 4Ϊ9390 ___ :; 5. Description of the invention () 112. For example, in FIG. 6 and FIG. 13, the direction of the ridge line of the corrugated sheet 110 arranged by sandwiching the thin sheet ill is arranged parallel to the flow direction of the processed air (direction of arrow Π3), but the corrugated sheet 110 may be arranged. The direction of the ridge line is arranged to have an appropriate angle with the flow direction of the processed air (direction of arrow 113). In FIGS. 6 and 13, the directions of the ridge lines of the adjacent wave pieces 110 are arranged parallel to each other, but the directions of the ridge lines of the adjacent wave pieces 110 may be arranged to cross each other. At that time, because the ridges between the adjacent wave pieces 110 collide, there is no fear that the adjacent wave pieces 110 are tightly connected, and the thin plate piece ill may be omitted. In addition, when the support structure is different from that of the honeycomb structure 112 described in Figs. 6 and 13, the zeolite can be fixed to the surface by the same method as before. A method for manufacturing another filter according to the present invention will be described. The three-dimensional mesh structure of the asbestos or ceramic magnet molded product manufactured by the above-mentioned manufacturing method is used as a support. In addition, in this example of the manufacturing method ', the granular zeolite is adhered to the surface of the support by Adhesive®. Regarding granular zeolite, an inorganic substance is used as a binder and a powder of zeolite is mixed to form a spherical shape. Around the pellets, a zeolite pellet with a coating layer is formed by coating an inorganic substance having an effective pore diameter larger than the effective pore diameter of the zeolite and having the property of adsorbing gaseous organic impurities. The method for producing the pellets may be used to form a coating layer of an inorganic substance by immersing a spherical zeolite in a suspension in which an inorganic substance for a coating film is dispersed and pulling it up and drying. In order to increase the strength of the coating layer, the sol-like inorganic fixing aid and the inorganic substance for coating film are dispersed together in the suspension so that the inorganic substance coated on the pellets contains the inorganic fixing aid. Inorganic substances or inorganic fixing aids for coating film 32 (Please read the precautions on the reverse side before filling out this page) ——— Order · ——, ---- 0 ---- This paper is in use Family rubbing (C'NS) / \ 4 said grid (2i «〆Μ7 'public epidemic) i .. Staff of the Central Standards Bureau of the Ministry of Economic Affairs, Cooperative Cooperative, Printing and Printing, t 419390 at __B7___ V. The types of invention description () are as above As shown. A filter according to the present invention can be manufactured by blowing the pellets thus granulated on a three-dimensional mesh structure impregnated with an inorganic adhesive in advance using a high-pressure air flow. Fig. 16 is an explanatory diagram schematically showing the structure of a cleaning device 201 according to the second embodiment of the present invention. The cleaning device 201 basically has the same structure as the cleaning device 1 described just now in FIG. That is, a processing space 202 for manufacturing, for example, an LSI or an LCD, a ceiling portion 203 and an underfloor portion 204 located above and below the processing space 202, and a return air passage 205 located on the side of the processing space 202. The ceiling unit 203 is provided with a fan unit 210 and a clean fan unit 2Π having one of the filter 100 or the filter 131 described above and a filter 212 for removing granular impurities. The processing space 202 is provided as an example of a heat generation source. Semiconductor manufacturing device 214. A non-condensing coil 210 for processing the thermal load of the semiconductor manufacturing apparatus 214 is provided below the floor portion 204 separated by the perforated plate 215. The cold water flow adjustment valve 18 of the non-condensing coil 16 is controlled so that the temperature detected by the temperature sensor 217 provided in the return air path 205 becomes the specified setting 値, and a fixed humidity is maintained without the coil being dew condensation. In addition, by operating the fan unit 210 and adjusting the appropriate airflow speed, the air inside the cleaning device 201 follows the ceiling portion 203-the processing space 202 and the bottom portion of the floor fen 4- > return air passage 205- > the ceiling portion 203 The sequential flow cycle. In this cycle, it is cooled by the non-condensing coil 216. One of the filter 100 or the filter Π1 in the clean fan unit 213 and the particle-removing filter 212 are used to remove gaseous organic impurities and Particulate impurities. (Please read the notes on the back before filling in this page) ------------ Order ·-* ---

-i HHM The size of this paper music is suitable. 丨 丨 H, Fujian Standards (CNS) Λ4 Specification (2 丨 (> / 297) You printed by the Consumer Standards Cooperative of the Central Standardization Bureau of the Ministry of Economic Affairs 419390 at ___ B7 _-* — _____ —— —. _ ......... V. Description of the invention () The filter 12 for removing particles is arranged on the downstream side of the filter 11, and the filter 12 for removing particles It has the function of removing particulate impurities. In addition, the particle removing filter 12 for removing dust and the like is composed only of materials that do not generate gaseous organic impurities. In addition, the inhaled outside air is appropriately supplied to the cleaning device through the outside air path 220. In the floor portion 204 of 201. A filter 221 having a hydrophilic zeolite for removing gaseous organic substances from the inhaled outside air is arranged in the outside air path 220, and the deaeration, temperature and humidity of the inhaled outside air are performed. The unit type air conditioner 222 and the humidity sensor 227 control the water supply pressure adjustment valve 229 of the humidity control section of the unit type air conditioner 222, so that the humidity detected by the humidity sensor 227 becomes a specified setting. A humidity sensor 228 is disposed in the processing space 202, The humidity sensor 28 detects the humidity of the environment in the processing space 202. The inhaled outside air supplied to the underfloor portion 204 of the cleaning device 201 from the outside air path 220 is introduced into the processing space 202 via the return air passage 205 and the ceiling portion 203 In addition, the amount of air balanced and the amount of outside air taken in is exhausted from the exhaust port 225 to the outside through the exhaust hole 226. In addition, although not shown in the figure, the cleaning device 201 is also the same as the case just described in FIG. 5 It is not necessary to install the filter 100 or the filter 131 on the entire surface of the ceiling portion 203 of the cleaning device 200, but it may be arranged at intervals. Next, the filter 311 of the embodiment of the present invention will be described in detail. FIG. 17 shows the present invention. In the perspective view of the filter 311 of Embodiment 3, U) and (b) respectively show an exploded view and an assembly view. The filter 311 includes a first filter section 31a containing a synthetic zeolite for removing organic impurities passing through the air as shown in FIG. Π (a), and has a filter for removing 34 papers. : Standard ((: NS) Λ'1 condition (210 X 37)) (#Read the precautions on the back before filling this page)

Printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs f: 4193 90. 13 i V. Description of the invention () The gas organic impurities that cannot be removed by the synthetic zeolite in the first filtering section 31 la have a larger effective pore size than the synthetic zeolite The air-permeable second filter portion 311b of the inorganic adsorbent having an effective pore diameter. As shown in FIG. 17C b) 'After the first filter portion 311a and the second filter portion 311b are overlapped to be adjacent to each other, and a fluororesin gasket 339 having a small amount of gaseous organic impurities is sandwiched therebetween, Screw the flange 'to the two. On the upstream side and the downstream side of the filter 311 connected in this way, connection flanges 320 are formed toward pipes or the like not shown in the figure. In addition, these first and second filter sections 311a and 31 lb are made of a material containing no combustible materials except a fluororesin gasket 339, and are made of a material that does not generate gaseous organic matter. Fig. 18 is a schematic exploded assembly view of the first and second filter portions 311a and 311b. Both the first and second filter sections 311a and 311b have substantially the same structure as the filter 11 just described in FIG. That is, as shown in FIG. 1S, the honeycomb structure 332 is used, and the honeycomb structure 332 is structurally sandwiched between the adjacent corrugated sheet 330 without the uneven plate sheet 311, and then the outer frame 335a, 335b, 335c, 335d and flanges 320, 334 are assembled so as to open in [the flow direction of treated air 333]. However, in the filter 311 of Example 3 of the present invention, synthetic zeolite is used in the first filtering portion 311a and 31 lb in the second filtering portion, and an inorganic adsorbent having an effective pore size larger than that of the synthetic zeolite is used. They are respectively fixed to the entire surface of the honeycomb structure 332. As will be described later, the effective pore diameter of the synthetic zeolite is preferably 7 angstroms or more. As will be described later, the inorganic adsorbent is preferably made of diatomaceous earth, silica, alumina, a mixture of silica and alumina, aluminum silicate, activated alumina, porous glass, and a ribbon structure. Water-containing Magnesium Silicate 35 (Please read the precautions on the back before filling in this page) Lamp · 0. The paper size is appropriate 丨 丨 1 屮 Valve Home # 准 ί) 4 specifications (2) 〇 / 297 ) 419390 ... A7 B7, a consumer cooperative of employees of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention () At least ~ species of soil mineral, activated white clay, acidic white clay, activated bentonite. The 3 pore characteristics of these inorganic adsorbents are shown in Table 2 'as a reference. Here, an example of a method of manufacturing the first and second filter sections 311a and 311b will be briefly described. The process until the honeycomb structure is formed is the same as above. The honeycomb structure 332 was immersed on each side of the first filtering part 311a and the second filtering part 311b with a synthetic zeolite powder (several μm) and an inorganic sol adhesive (silica gel, alumina sol, and silicic acid soda). Etc.) of an inorganic adsorbent (made of diatomaceous earth, silica, oxide, etc.) in a dispersed suspension that has an effective pore diameter larger than the effective pore diameter of the synthetic zeolite. ® 丨 ^ 1 sample standard (CNS "eight-four said grid (： ΜΟχ297 公 楚) (Please read the notes on the back before filling in this page)

Table 2 Specific surface area (m2 / g) of leg sample by BET method, pore volume (cc / g) measured by N2 adsorption method Aluminum Silicate 225 0.60 Activated Alumina 300 0.30 Porous Glass 400 0.15 Sepiolite 295 0.33 Activated White Clay 300 0.37 Activated Bentonite 87 0.23 Printed by the Ministry of Economic Affairs of the Central Standards Bureau, Consumer Consumption, printed '419390 a 7 — ~ ---- ---------------- B7 V. Description of the invention () r A mixture of silica and alumina, chopped aluminum, activated alumina, porous glass' ribbon structure At least one composition consisting of hydrous magnesium silicate clay mineral, activated white clay, acidic white clay, activated bentonite powder (several μm) and inorganic sol adhesive (silicone, alumina sol, silicic acid soda, etc.) After a few minutes in the turbid liquid, it was dried by heat treatment at 300 ° C 'for 1 hour, and the first and second filter portions 311a and 311b were obtained. However, the silica gel or alumina sol is a suspension containing primary particles ranging from monodisperse micrometers to tens of micrometers, but in a dry state fixed on the surface of the support, it becomes a collection of primary particles Three-dimensional condensate of silica gel or alumina sol. Therefore, the porous honeycomb structure 332 can be dipped in a suspension of an inorganic sol adhesive containing only silicon gel or alumina sol and dried to obtain an inorganic sol adhesive fixed on the surface of the honeycomb structure 332. The second filtering unit 311b. The filter 311 constituted by the first and second filter portions 311a and 311b is completely free of combustible materials and does not contain gas, which is a cause of surface contamination when the filter is heat-treated. Impurity components, and the filter itself does not generate gaseous organic impurities. FIG. 19 is a schematic exploded assembly view of the filter 311 showing another connection state of the first and second filter portions 311a and 311b. The filter 311 shown in FIG. 19 is structured to assemble a long aluminum frame 335a, 335b, 335c, 335d and a flange 320 longer than those described in FIG. 18 into a cylindrical shape. A honeycomb structure 332a with zeolite fixed on the surface and a honeycomb structure with an inorganic adsorbent having an intersect female pore size larger than the effective pore size of the synthetic zeolite fixed on the surface __________________________ 37_: __ Mu's Zhang scale Illustrated Chinese Minben (('NS) Λ4 will now be (2 丨 public)) (Please read the notes on the back before filling this page)

Printed by the Central Bureau of Standards of the Ministry of Economic Affairs for the consumption cooperation of shellfishers * 4133 90 a? B7__ V. Inventor (). At this time, the honeycomb structures 3: 32a, 332b may be arranged to be in close contact with each other; the honeycomb structures 332a, 332b may be arranged to be separated from each other in the internal space of the common cylindrical aluminum frame 335a, 335b, 335c, and 335d. In Fig. 19, the first filter portion 31a is formed by the honeycomb structure 332a and the outer frames 335a to d, and the second filter portion 311b is formed by the honeycomb structure 332b and the outer frames 335a to d. Fig. 20 is a perspective view showing the structure of a filter 311 according to another embodiment. In this embodiment, the honeycomb structure 380, which is a breathable support, is divided into two areas by the boundary interface (crossing the same distance from the two ends of the filter) as the boundary of the ventilation direction 383. In one area, a ball formed of synthetic zeolite or a synthetic zeolite powder is fixed on the surface of the honeycomb structure 380 to form a first filtering part. In another area, an inorganic adsorbent having an effective pore diameter larger than that of the synthetic zeolite is used. The pellet formed from the powder of the adsorbent or the inorganic adsorbent is fixed on the surface of the honeycomb structure 380 to form a second filtering portion. In this embodiment, about half of the undivided integrated honeycomb structure 380 with respect to the upstream side 381 of the ventilation direction 383 is immersed in a suspension in which the synthetic zeolite is dispersed, and then dried in the honeycomb structure 380. An inorganic material layer of a synthetic zeolite is formed on the surface of the upstream side 381, and approximately half of the honeycomb structure 380 with respect to the downstream side 382 of the ventilation direction 383 is immersed in an effective pore diameter having a larger effective pore diameter than the synthetic zeolite. Inorganic adsorbent (composed of diatomite, silica, alumina, silica. And alumina mixture, aluminum silicate, activated alumina, porous glass, ribbon-shaped hydrous magnesium silicate clay mineral , Activated white clay, acidic white clay, at least one component of activated bentonite) dispersed suspension 38 (read the precautions on the back before filling this page) The size of the paper is suitable for Sichuan Chumin Minjia # 家 （CNS ), \ 4 specifications (210 > ._ 公 f > ί 419390 Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs A 7 Β7 V. Description of the invention () Dry and form the inorganic adsorbent on the surface of the downstream side 382 The inorganic material layer of the agent. The inorganic material layer of the synthetic zeolite and the inorganic material layer of the inorganic adsorbent may overlap each other near the boundary between the upstream side 381 and the downstream side 382; and, the boundary between the upstream side 381 and the downstream side 382 Nearby, the original structure of the honeycomb structure 380 where the inorganic material layer of the synthetic zeolite and the inorganic material layer of the inorganic adsorbent are not formed may be exposed. The honeycomb structure 380 is made of cylindrical aluminum as shown in FIG. 19. The frame 311 forms the filter 311 of the present invention. The upstream side 381 of the honeycomb structure 380 surrounded by the outer frame is equivalent to the first filter portion 311a, and the honeycomb structure 380 surrounded by the outer frame. The portion on the downstream side 382 corresponds to 31 lb of the second filter portion. In this example, either of the first filter portion 31 a including the synthetic zeolite and the second filter portion 31 lb including the inorganic adsorbent is opposed to the filter. The ventilation direction of 311 may be arranged on the upstream side. According to the knowledge of the inventors, as will be described later, an inorganic material layer of synthetic zeolite is set as the first adsorption layer on the surface of the support, and then the inorganic adsorption is performed. The structure in which the inorganic material layer is provided as the second adsorption layer is superimposed thereon, and can be obtained with a smaller structure than the structure in which the respective adsorption layers are divided into the first filter portion 31 a and the second filter portion 31 lb. Equivalent. Removal performance of organic impurities. The manufacturing method of the filter sections 311a and 311b is not limited to the above method, and a synthetic zeolite processed into pellets or the inorganic adsorbent may be attached to a sheet (support), and the method is as described above. Figures 23 (a) and (b) show the filter 370 '(a) of (b) 39 of the other embodiment of the present invention formed by using a shell and filling a small ball (please read the back Matters needing attention fill in this 1)

This paper size is applicable to China Gujia Standard ([,? ^) 6 4 specifications (2 丨 0/297 Gong > Printed by the Central Consumers Bureau of Ministry of Economic Affairs and Consumer Cooperatives ^ 419350 m 5. Description of invention () AA The cross section, (b) is the BB cross section of (a). In the filter 370 of this embodiment, as shown in the figure, the synthetic zeolite ball 371a is filled with a hollow cylindrical shape having a plurality of air vents 373 on the inner and outer sides. The outer casing 372a forms the first filtering portion 370a, and the inorganic adsorption-receiving small ball 371b is similarly filled with a hollow cylindrical outer casing 372b having a plurality of air vents 373 on the inner and outer sides to form the second filtering portion 370b. Because the bottom of the casing 372a and the top of the casing 372b are plugged, when the processed air flows out from the inside of the casing 372a to the outside, it passes through the filling layer of the small ball 371a in the casing 372a. Secondly, the processed air passes through the casing The space sandwiched by the outer cylinder 372a and the outer cylinder 374 flows into the filling layer of the small ball 371b from the outer cylinder of the outer shell 372b. Then, it flows into the inner side of the outer shell 372b and flows out below the filter 370. In addition, The flow direction of the treated air is shown in Figure 23 (b). It is indicated by an arrow 375. In FIG. 23, the first filter portion 370a is disposed on the upstream side and the second filter portion 370b is disposed on the downstream side. However, this order is also reversed according to the embodiment of the present invention. Using a ball The filter and its manufacturing method can also be exemplified as follows. Liangkou, by using high-speed air to blow the ball to the support of inorganic and non-flammable adhesive in advance, can be manufactured as shown in Figure 21, Figure The filter of the present invention shown in 22. The support is not necessarily limited to a honeycomb structure, and can include three-dimensional mesh structures such as asbestos. In the latter, the air resistance is large because the processed air passes through the mesh structure, but Synthetic zeolite or the beads of the inorganic adsorbent have more contact opportunities than honeycomb structures. The pellets made by mixing the powder of the synthetic zeolite or the inorganic adsorbent with the inorganic sol adhesive are fixed to For support, for example, water and powder and the inorganic 40 -5 / (Please read the precautions on the back before filling this page)

Α7 Β7 4193 90 V. Description of the invention () The mixture of the sol-based adhesive is mixed to become clay, and granulated by a granulator into pellets of about 0.3 to 0.8. In the case of the filter 311 or 37 manufactured as such, since the constituent material does not contain combustible materials, the case where the filter 3 η or the filter 370 is installed on the ceiling surface of a non-chamber or non-panel operating table 'will be combustible When the conventional chemical filter with activated carbon as the base is installed on the ceiling surface, the safety in disaster prevention is significantly improved. The organic substances that cause the surface contamination of substrates in clean equipment such as semiconductor manufacturing are limited to organic substances that occur from sealants, phosphates that originate from non-flammable agents in building materials, and plasticizers that originate from building materials. High boiling point and high molecular organic compounds such as phthalates, HMDS generated from photoresist adhesives, and BHT that prevents oxidants from occurring. The sources of these organic substances are the constituent materials of clean devices such as chambers or various parts used for manufacturing inside the clean devices, which are rarely caused by the inhaled air. Therefore, the function of the filter 311 or 370 is mainly to remove the high boiling point and high molecular organic compounds that cause surface contamination inside the clean device from the circulating air, and reduce the concentration of these organic substances in the clean device. [Embodiment] Next, the effect of the cleaning device and the filter of the embodiment of the present invention described above will be described using the embodiment. First of all, in an example of a clean device, in a clean room, two types of chemical filters on the market using granular activated carbon and fibrous activated carbon, and a chemical filter using ion exchange fiber are processed! 1 ----- If (Please read the precautions on the back before filling out this page) Ding-° The paper is printed by the Central Standards Bureau of the Ministry of Economy (Zhan) June 4th (2! 〇 × 297 public) The central ministry of the Ministry of Economy printed 4 193 90 for employees' cooperatives. V. Description of the invention () Room air and the use of liquid nitrogen in the clean room The air is cooled and condensed to remove the impurities and dried; in a total of 4 environments, the measurement results of the contact angle of the surface of the wafer with the oxide film on the surface are shown in Figure 24. The amount of ultrapure water dripped on the surface The measured contact angle is a simple and convenient method to evaluate the degree of organic pollution on the surface. After cleaning, the wafer or glass surface with an oxide film without organic pollution is easy to dissolve with water. The angle becomes smaller, but it is soiled by organic matter The surface after dyeing has a water-repellent property, that is, hydrophobic, and the contact angle becomes larger. For example, it is known to measure the contact angle of ultrapure water dripping on the surface of a glass substrate placed in a clean room environment. There is a correlation between the surface contamination of organic matter measured by X-ray Photoelectron Spectroscopy (XPS: X-ray Photoelectron Spectroscopy) and the contact angle of water on the surface of a substrate with an oxide film on a silicon wafer surface There is also a strong correlation between the size and surface contamination of organics. The results shown in Figure 24 show the following. Ion exchange fibers are originally used. Those that adsorb and remove water-soluble inorganic impurities cannot adsorb organics, and instead produce gaseous organics. It is known that the contact angle increases by about 10 degrees after being placed for one day. In a dry air environment, the contact angle does not increase because it contains almost no gaseous organic matter. Two types of activated carbon filters, which should prevent the surface pollution of organic matter, are placed for one day An increase of about 10 degrees indicates that the surface pollution prevention effect is almost non-existent. The reason why the two types of chemical filters using activated carbon have no effect is 'causalization' The constituent material of the filter includes organic pollutants on the surface, such as binders, adhesives, sealants, etc. The original activated carbon adsorption effect is offset by the escape gas of the constituent materials. However, if a charging tower is used, Tower No. 42 (Please read the notes on the back before filling out this page) Q. The size of the paper is appropriate; 阄 House Standards (CNS 丨 Λ4 Specification (UO · 〆297) 筇), Central Bureau of Standards, Ministry of Economic Affairs Beigongxiao # Cooperative cooperative print 4193 90 A7 __ B7________ 5. Description of the invention () The use of metal materials such as containers does not have this problem, but as shown above, the filling tower has the disadvantage of large pressure loss (ventilation resistance). Secondly, the cleaning device of the present invention described in FIG. 1 is actually manufactured. The wafer substrate with an oxide film sand without oxide pollution immediately after cleaning is placed in a processing space. The filter is structured so that the hydrophobic zeolite is fixed to the honeycomb structure. Then, the contact angles immediately after washing and after 3 days of standing were measured to investigate the increase in the contact angle after 3 days of standing. Repeatedly measure the increase in contact angle every 15 days after being left for 3 days (washing and measuring contact angle-> standing for 3 days-measuring the contact angle), and measured the adsorption performance of the filter over time. Degradation. The circulating air flow in the clean device is set to 5000m3 / min, and the amount of hydrophobic zeolite used to treat the circulating air is 5000kg. That is, the use amount of the hydrophobic zeolite per lm3 / min is 1 kg. The amount of inhaled outside air is set to 200m3 / miri which is 4% of the circulating air flow. The total internal volume of the clean room is 3120m3, and the number of air changes per hour is 100 times. In addition, for comparison, the filter with hydrophobic zeolite was replaced with a chemical structure filter with a conventional structure in which a fibrous activated carbon and a low-melting point polyester compound were compounded into a felt-like structure, and the measurement was repeated every 15 days. The amount of increase in the contact angle of the oxide film silicon crystal substrate after being cleaned for 3 days. At this time, the amount of activated carbon per lm3 / min ventilation was set to 1 kg. The same measurement is also performed in the case where neither the filter having a hydrophobic zeolite of the present invention nor the chemical filter of a conventional structure is provided, that is, no special measures are taken for the gaseous organic substances contained in the clean device environment. In addition, the contact angle of the surface of the silicon wafer with an oxide film immediately after cleaning was 3 degrees. Assume that it is used to prevent the component products caused by the pollution of gas and organic impurities. 43 (please read the precautions on the back before filling this page). _ This paper is suitable for Shizhou Towels® Family Line 4 * · (CNS) Λ4 Specifications (2mm) Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 4193 90 V. Description of the invention () The necessary condition for the environmental requirements of a clean device with reduced quality is to maintain the contact angle of the surface of the silicon wafer with an oxide film after 3 days of exposure Below 6 degrees. The measurement results are shown in Figure 26. The surface of the silicon wafer with an oxide film after three days of exposure to a clean device environment according to the present invention, a clean device environment equipped with a conventional chemical filter, and a clean device environment that does not require special measures for gaseous organic matter are compared. The contact angle varies with time. The contact angle of the surface of the silicon wafer with an oxide film exposed to a clean device that does not require special measures for gaseous organic matter is 3 degrees immediately after cleaning, and it increases 26 to 30 degrees after being left for 3 days. For a filter having a hydrophobic zeolite, the contact angle of the silicon wafer with an oxide film after being left for 3 days in the state immediately after use was kept below 4 degrees. However, as the aeration time increases, the adsorption performance of the hydrophobic zeolite decreases, and the concentration of gaseous organics in the air after passing through the adsorption layer also increases. That is, as the aeration time for the hydrophobic zeolite increases, the contact angle on the surface of the oxide-coated sand wafer exposed to the downstream side of the treated air also increases. It is known that the use time of the filter until the contact angle of the surface of the silicon wafer with an oxide film on the surface of the air exposed to the filter for 3 days reaches 6 degrees is about 6 months. However, for the conventional chemical filter, the contact angle of the silicon wafer with an oxide film even after being left for 3 days after being used has reached 12 degrees. The reason is that all the escape gas from the adhesive of the low melting point polyester for supporting fibrous activated carbon passes through the chemical filter and contaminates the surface of the sand wafer placed on the downstream side. In the filter of the present invention, as shown in the example of the manufacturing method briefly described above, because the constituent material does not contain organic matter, the constituent material itself does not generate gas. 44 ___ This record disproportionates 丨, the rate () Λ 4 蚬 grid (210X 297 characters) (Please read the notes on the back before filling in this page)

Printed by the Consumer Standards Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs / 419390 V. Description of Invention () Organic impurities. The conventional chemical filter 'also decreases due to the increase in aeration time of activated carbon, and reaches 20 degrees after 6 months of use. Second, various reviews were conducted on hydrophobic zeolites. The main components of zeolite are silicon dioxide (Si02) and alumina (Al203). The relationship between the content of weight ratio and the amount of adsorbed water is as shown in the description using FIG. 11. In addition, for the hydrophobic zeolite of Si02 / Al203 series 40, the adsorption isotherm diagram of water measured in an environment of 25 t is shown in FIG. 27. For comparison, Fig. 27 also shows an adsorption isotherm diagram of activated carbon for water. At a relative humidity of 50%, the adsorption amount (cc) of activated carbon (g) to water is llcc / g, and the adsorption amount (cc) of hydrophobic zeolite (g) to Si water is 0 to 03cc / g. In addition, the hydrophilic and hydrophobic zeolite with a pore size of 6 angstroms, the hydrophilic and hydrophobic zeolite with a pore diameter of 8 angstroms, a natural activated carbon using coconut shell as a raw material, and a synthetic activated carbon using petroleum pitch as a raw material Six kinds of adsorbents were used to compare the adsorptive capacity of trace organic substances contained in a chamber-free environment (23 ° C, 40% RH), which are the cause of surface contamination. 0.04 g of each adsorbent was filled into a cylinder having a cross-sectional area of 0.15 cm2, and the circulating air flow rate of the clean room was set to 31 / min. The experimental conditions are shown in Table 3. Regardless of the type of the adsorbent, the filling amount, the cross-sectional area of the cylinder, the circulating air flow rate, and the circulating air velocity are the same, but due to the size or density of each adsorbent powder, the filling density, filling volume, filling layer thickness, contact Time varies by class. After passing through the adsorbent, 31 / min of air flows from the container itself into the inlet of the container with a volume of 1 liter that does not generate gaseous organic impurities, and then flows out from the outlet. The oxide film 45 with no organic pollution immediately after washing (Please read the precautions on the back before filling out this page) * 1Τ- This paper is standardized with Sichuan towel country code and house standard China i CNS) Λ4 specification (2! 0 > · 297 public choice) Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs ^ 19390 _ ^ ___ V. Description of the Invention () The silicon wafer substrate was placed in the container for 20 hours and the contact angle was measured. After repeated (washing-leaving for 20 hours-measuring the contact angle washing ^ leaving for 20 hours-measuring the contact angle-...), the adsorption performance of various adsorbents was measured to deteriorate over time. Type and shape of adsorbent Filling density (g / cc) Filling volume Cylindrical cross-sectional area Filling volume (CC) Bulk hydrophilic zeolite with a pore size of 6 angstroms 0.3 to 0.58 0.069 0.85 mm with a pore diameter of 6 angstroms Hydrophobicity Zeolite with a pore size of 8 angstroms 0.04g 0.15m2 Hydrophilic zeolite 0.30-0.42 0.096 Fine pore size of 8 angstroms 0.85mm Hydrophobic zeolite with coconut shell as the original block 11 Natural 0.30 ~ 0.36 0.11 Natural activated carbon 0.85 mm 0.30 ～ 0.52 0.078 with petroleum tar as raw raw material 0.85mm of activated carbon 46 paper size paper towel valve 悻 绛 i CNS) 4 size (210/297) (please read the back Please fill in this page for the matters needing attention) ___ Γ · -nn · nf ^ i!, _--1-1 aLm _ A7 B7 4 ¢ 939 (¾ V. Description of the invention () Type of adsorbent filling layer thickness (mm) Circulating air flow Circulating air wind speed contact time (sec) Hydrophilic zeolite with a pore size of 6 angstroms and hydrophobic zeolite with a pore diameter of 6 angstroms 4.6 3.01 / min 3.4m / s 0.0014 Hydrophilic zeolite with a pore diameter of 8 angstroms and a pore diameter of 8 angstroms Hydrophobic zeolite 6.5 0.0019 Natural type activated carbon with coconut shell as raw material 7.4 0.0022 Synthetic type activated carbon with petroleum pitch as raw material 5.2 0.0016 The change in contact angle of various adsorbents is shown in Figure 28. In addition, The measurement of the contact angle of the wafer surface immediately after cleaning is about 3 degrees. In Figure 28, curve 440 is that the silicon wafer with an oxide film without organic pollution immediately after cleaning is exposed to the surface of the wafer before the adsorbent is blown. For the air in the clean room, curve 441 is exposed to the air after the adsorbent of hydrophilic zeolite with a fine pore diameter (please read the precautions on the back before filling this page),-° Consumers Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs The scale of printed wood paper fits the standard of Chinese prisoner's standard (C'NS) Λ4 case (210 × 297 male; i) ^ 19390 B \ 7 _ V. Description of the invention () The condition of chamber-free air 'curve 442 The case of exposure to air without a chamber after supplying air to an adsorbent with a hydrophilic zeolite having a fine pore size of 8 Angstrom 'curve 445 Of air In addition, curve 446 is exposed to the chamberless air after the air is supplied to the adsorbent having a hydrophobic zeolite with a pore diameter of 8 angstroms, and curve 443 is exposed to the air after the air is supplied to an adsorbent containing natural activated carbon as the main component. In the case of chamber-free air, curve 444 is exposed to the chamber-free air after the air is supplied to the adsorbent mainly composed of synthetic activated carbon. The following matters are known from FIG. 28. 1. The order of adsorption performance is curve 446 (hydrophobic zeolite with a fine pore size of 8 angstroms) > curve 442 (hydrophilic zeolite with a fine pore diameter of 8 angstroms) > curve 443 (natural activated carbon) > curve 445 (Hydrophobic zeolite with a pore size of 6 angstroms) > Curve 441 (Hydrophilic zeolite with a pore diameter of 6 Angstroms) > Curve 444 (Synthetic activated carbon). Synthetic activated carbon is particularly poor. Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling this page) 2. Hydrophilic zeolite (curve 441) with a pore size of 6 angstroms has been around for 30 hours since the air supply time, and the pore size is 6 Since the zeolite hydrophobic (Curve 445) and natural carbon (Curve 443) of Aezhi have been around for more than 50 hours, the adsorption performance of each has begun to decrease. 3. Hydrophilic zeolite (curve 442) with a pore size of 8 Angstroms until the air supply time is 120 hours, and hydrophobic zeolite (curve 446) with a pore size of 8 Angstroms and synthetic activated carbon (curve 444) until the air supply time exceeds 200 hours. , Adsorption performance does not decrease. 4. In the early stage of use, when the adsorption performance is not reduced, the hydrophilic 48 papers with a pore size of 6 angstroms are compared. The size of the paper is moderate and the size is 1 ¾ palm standard net (CNS). M specifications (2 丨 0/29? Cm). Employees of the Mou Bureau eliminate the cooperatives ’seals 419390 A7 ____ B7 V. Description of the invention () " Zeolite (curve 441) and hydrophilic zeolite (curve 442) with a pore size of 8 angstroms, compared to hydrophilic zeolite with a pore diameter of 6 angstroms (Curve 441) has a change of 3 degrees-> 7,8 degrees, and a hydrophilic zeolite (curve 442) having a pore size of 8 angstroms has a change of 3 degrees-> 3.5 degrees. Similarly, in the initial use period when the adsorption performance does not decrease, the hydrophobic zeolite with a pore diameter of Angstrom (curve 445) and the hydrophobic zeolite with a pore diameter of 8 Angstrom (curve 446) are compared with the hydrophobic zeolite with a pore diameter of 6 Angstrom ( The change of curve 445) is from 3 degrees to 6.4 degrees, and the change of hydrophobic zeolite (curve 446) with a pore diameter of 8 angstroms is from 3 degrees to 3.1 degrees. It is known that hydrophilic and hydrophobic zeolites with a pore size of 8 angstroms can almost completely adsorb and remove trace organic substances that cause surface contamination in the environment of a clean device. Traces of organic matter that are removed by adsorption and cause surface contamination. 5. The adsorption performance of hydrophilic and hydrophobic zeolites with pore diameters of 8 angstroms (curves 442 and 440) and activated carbon (curve 443) is much better than that of hydrophilic and hydrophobic zeolites with pores of 6 angstroms (curves 441 and 445). And synthetic activated carbon (curve 444) has good adsorption performance. Zeolites cannot adsorb molecules larger than the pore diameter. Therefore, the hydrophilic and hydrophobic zeolites (curves 442 and 446) with a pore diameter of δ angstroms can substantially completely adsorb and remove the trace organic substances contained in the clean device environment, which cause the surface contamination. This is shown in Figure 28 as the experimental object. The molecular size of most of the trace organic substances contained in the clean device environment, which causes surface contamination, is 8 angstroms or less. On the other hand, it is shown that although the hydrophilic and hydrophobic zeolite with a pore size of 6 Angstroms has approximately satisfactory adsorption performance compared with synthetic activated carbon, a small amount of it passes through because it cannot be removed by adsorption, which causes surface contamination. Trace organic 49 The paper size is applicable to the national flash version (K NS) Λ4 specification (2 丨 0〆) 97mm 韪 II ------- ο — I {Please read the note on the back before filling in this Page) Order " --- Male Workers of the Central Bureau of Standards of the Ministry of Economic Affairs, Cooperatives and Cooperatives, Yinfan 419390 A7 B7 V. Description of the Invention () Objects The molecular size of the trace organic matter passing is 6 angstroms or more and 8 angstroms or less. Next, the cleaning device of the present invention was investigated at a temperature of 23. (:, Humidity controllability at 50% relative humidity operation. For comparison, a cleaning device equipped with a filter having a hydrophobic zeolite according to the present invention was investigated, and the filter shown in FIG. 1 was replaced with a fiber-like filter. The activated carbon and the polyester non-woven adhesive are compounded to form a spherical chemical filter with a conventional structure. The humidity controllability of a conventional clean device is the same except for a conventional filter. The humidity sensor is set by The humidity-adjusting unit type air conditioner and the outside air suction circuit after the filter. Adjust the water supply valve of the humidity regulator installed in the unit type air conditioner according to the humidity sensor. In order to determine whether the humidity control is good, The invented clean device and the conventional clean device are each provided with a humidity sensor. Also, the external air intake amount is set to only 200 m3 / min with respect to the circulating air amount of 5000 m3 / min. The measurement results are shown in FIG. 29. In the cleaning device of the chemical filter with a conventional structure, the chemical filter easily absorbs moisture in the air. After installing the chemical filter, the activated carbon absorbs Within about 2 weeks until the water reaches an equilibrium state, the relative humidity inside the clean device becomes 45% which is 5% lower than the set value of 50%. In addition, a filter having a honeycomb structure to which a hydrophobic zeolite is fixed is filtered. In the clean device of the device according to the present invention, the relative humidity is kept at a set value of 50% because it hardly absorbs moisture in the air. When the humidity of the LSI or LCD process drops below the set value, the wafer or glass substrate Static electricity is prone to occur, and the yield of those products is reduced due to particle contamination on the surface of the product or electrostatic damage to the components. After cleaning the filter device with a conventional chemical filter, about 2 50 (please read the first Please fill in this page again for the matters needing attention) The paper rule shop Shichuan Chinese valve house is looking for U, NS) Λ4 is now (2 丨 coming) A7 B7 Printed by the Central Bureau of Standards of the Ministry of Economy—Printed by Industrial and Consumer Cooperatives 4 193 90 5 2. Description of the invention () Week, the yield of the product will decrease. However, in the clean device with a furnace according to the present invention, the relative humidity has been maintained at the set value since the filter was installed, and no decrease in the yield of the product was found. In addition, as shown in FIG. 30, two types of cleaning devices A, a cleaning device A provided with a conventional chemical filter 450 carrying a fibrous activated carbon and a cleaning device B provided with no filter like a chemical filter at all, were investigated. Both B and B are humidity-controllable when the temperature is 23 ° C and the relative humidity is 50%. These cleaning devices A and B are connected to each other by a supply air booster 451 on the ceiling portion and a return air booster 452 on the lower portion of the floor, but are separated by a partition 453 (wall). Also in Fig. 30, a humidity sensor 454 is provided in a cleaning device A provided with a conventional chemical filter 450. A processing device 450 for performing the gate oxide film pre-processing process is provided in the cleaning device A, and a silicide processing device 457 is provided for the cleaning device B. Here, Table 4 is published by SEMATECH in the United States on May 31, 1995. Published in Technology Transfer # 95052812A-TR "Forecast of Airborne Molecular Contamination Limits for the 0.25 Micron High Performance Logic Process" in the '0.25μιη process (after 199S) required chemical pollution allowable concentration (ppt). 51 (Please read the notes on the back before filling this page)

The paper size is suitable for the standard of Chinese valve (CNS > Λ4 specification (210 y 207)) J 4193 90 V. Description of the invention () Table 4 The longest waiting time of the process acid-base organic dopant gate oxide film Top 4 13,000 13,000 1,000 0.1 Process 50% 50% 75% 90% Silicide process 1 180 13,000 35,000 1,000 50% 25% 75% 75% Wiring 24 5 13,000 2,000 100,000 50% 25% 75% 75% Light uranium engraving 2 10,000 1,000 100,000 10,000 75% 90% 50% 50% Ί1 -------- (Please read the notes on the back before filling out this page) The Central Standards Bureau of the Ministry of Economic Affairs, Shellfish Consumer Cooperative, is printed in Table 4, Attached bottom line is the case where strict tolerance is required and must be controlled. In addition, %% is the reliability of the data used to set the allowable threshold. It is learned that for organic matter, the process before the gate oxide film requires 1 ppb, and the wiring process requires 2 The ppb is strictly controlled, while 35 ppb is allowed in the chopping process and 100 ppb is allowed in the photo-etching process. There is no need to control the organic matter in the environment. Fig. 31 shows the measurement results of the clean devices a and B shown in Fig. 30. In chemistry with a known structure The clean device A of the filter 450 and the S-type furnace 45 are easy to absorb the moisture in the air. However, because the humidity sensor 454 required for humidity control is installed in the clean device A, after the chemical filter is installed During the period of about 2 weeks until the activated carbon adsorbed moisture and reached equilibrium, 460 unit-type air conditioners for inhaling outside air had only excessively humidified the amount of water lost by being absorbed by the chemical filter 450. Therefore, 52 paper sizes were used. .Shizhou Zhongliwei Family Standard Xin (CNS), \ 4 specifications (210X2y7 male brother) Printed by the Central Standards Bureau of the Ministry of Economic Affairs, Bei Gong Xiao F Cooperative 419390 A7 Guang __. 67 ---- V. Description of the invention () The relative humidity of the clean device A measured by the humidity sensor 454 is maintained at a setting of 値 50% after the chemical filter 450 is installed. However, the humidity sensor 455 was used to measure the absence of a filter like a chemical filter. In the clean device B of the air conditioner, the effect of excessive humidification from the unit type air conditioner 460 appeared intact. After about 2 weeks after the filter was installed, the relative humidity in the clean device B became higher than the set 値 50% 5 ° /。 55%. Because 'Compared to the case of relative humidity of 50 ° /., It is found that the quality of the product that has formed an oxide film due to excessive adsorption of moisture on the wafer surface. Therefore,' replace the chemical filter of the conventional structure of the cleaning device A with a After the filter of the honeycomb structure to which the hydrophobic zeolite was fixed, the relative humidity in the cleaning device B was maintained at the set value, and the above-mentioned defects did not occur at all. Next, in the cleansing device according to the present invention, it is compared to install particulate-removing particulate-removing particulate-removing particles composed of a material that does not generate gaseous organic impurities on the downstream side of a filter having a honeycomb structure to which hydrophobic zeolite is fixed. In the case of a filter, and in the case where a filter constituting material is conventionally known to generate gaseous organic impurities, a particulate-removing filter is known. A silicon wafer substrate with an oxide film without organic contamination immediately after cleaning was placed in the cleaning device. Then measure the contact angles immediately after washing and after 3 days of standing, and find the increase in the contact angle after 3 days of standing. In the case where a particle-removing filter composed of a material that does not generate gaseous organic impurities is installed, the contact angle on the surface of the wafer changes from 3.0 degrees to 4.0 degrees after being left for 3 days, with little increase. This is because the cause of contamination on the surface of the substrate in the adsorption layer is almost absorbed and removed, and the particle removing filter disposed on the downstream side does not generate gaseous organic impurities. However, the filter constituent material will generate gas organic 53 (Please read the precautions on the back before filling out this page) --I ---- The paper sores are suitable for the country W Palm Therapy Office (CNS) Λ4 Specification (2K) (297 boxes) 4t9390i A7 B7 V. Description of the invention () The filter of particles known as impurities is affected by the escaped gas from the material constituting the filter. The contact angle of the wafer surface after 3 days is 3.0 The degree becomes 5.0 degrees, which increases, but it is rare. Next, in the ballastless chamber, there are two types of chemical filters on the market using granular activated carbon and fibrous activated carbon, and the air of the chamberless air treated by the chemical filter using ion exchange fiber, and the filter using the present invention. In the four kinds of environments in which the clean room air is processed, the contact angle of the surface of the wafer with an oxide film is measured to change with time. The measurement results are shown in Figure 32. The manufacturing method of the filter of this invention is shown below. After mixing an effective pore diameter of 8 angstroms as an inorganic adsorbent, a powder of 4 μm of a hydrophobic zeolite of Si02 / Al203 series 40 and a powder of 3 μm of a kaolin as the inorganic substance, and a silicone gel as an inorganic fixing aid The above-mentioned porous honeycomb structure was immersed in the dispersed adhesive together and dried to form a first adsorption layer. Secondly, the active pores with an effective pore size of inorganic substances having the property of adsorbing gas and organic impurities are mainly distributed at 3 pm of activated white clay, and powder of 3 pm is dispersed together with mortar as an inorganic fixing aid. The adhesive is further immersed in the porous honeycomb structure having the first adsorption layer formed thereon, and then dried to form a second adsorption layer. The results shown in FIG. 32 reveal the following. Ion exchange fibers were originally used to adsorb and remove water-soluble organic impurities. They were unable to adsorb organic matter, but instead produced gaseous organic matter. It was found that the contact angle increased by 10 degrees after being placed for one day. There are two types of activated carbon filters that should prevent surface contamination of organic materials. The contact angle is increased by about 10 degrees after being left for one day. The reason why the two types of chemical filters using activated carbon do not work is because the paper size has passed through Chuanzhong ® 1 ^ surprise (C & s) Μ specifications (public box) (Please read the precautions on the back before filling this page ) -Bu ^-

Q 4193 90 at B7 V. Description of the invention () The constituent materials of chemical filters contain surface organic pollutants such as adhesives, fixing aids, sealants, etc. The original activated carbon adsorption effect is offset by the outgassing of the constituent materials. In the filter of the present invention, since the filter element is adsorbed, no gaseous organic impurities are generated, the surface of the organic matter is not polluted, and the contact angle is not increased. Next, the filter of the honeycomb structure to which the hydrophobic zeolite is used as the first adsorption layer and the activated white clay is used as the second adsorption layer on the surface of the support is composed of DOP, DBP, BHT and pentamer of siloxane (D5) were measured with a gas-chromatograph-mass spectrometer (GC-MS) while passing through the chamber-free chamber air and compared with each of the filters provided on the upstream and downstream sides of the filter. The amount of organic contamination on the surface of the silicon wafer in the environment to evaluate the effect of preventing surface contamination. The results are shown in Table 5. (Please read the precautions on the back before filling this page) Order _ Printed by the staff of the Central Standards Bureau of the Ministry of Economic Affairs, printed by co-operative society 5 Types of gaseous organic impurities The filter of the present invention only has No. 1 with kaolin as the adhesive Adsorption layer furnace DOP over 99% 95% DBP over 99% 93% BHT 85% 40% D5 90% 43% Evaluation using a 4-inch p-type silicon wafer. After the cleaned wafers were exposed on the upstream and downstream sides of the filter, surface contamination was measured. Analysis using a combination of a temperature-evolving escaped gas device and a gas chromatograph mass spectrometer, quantity 55 ______ This paper scale is suitable for Sichuan, Shikoku, 1¾ family standard ((, NS) Λ4 specification (2 丨 〇Z: 297) Printed by the Central Standards Bureau of the Ministry of Economic Affairs, Shellfish Consumer Cooperative, 419390 A7 B7___ 5. Description of the invention () Measure the organic matter attached to the surface of the wafer. Also, based on the gas chromatography, find the surface pollution prevention rate as shown below. Surface pollution prevention rate = ( 1- (B / A)) x100 (%) Λ: Area of Peak of surface organic pollutants detected from the surface of the wafer on the upstream side B: Peak of surface organic pollutants detected from the surface of the wafer on the upstream side For example, as shown in FIG. 6, the area filter has a structure in which thin sheets without unevenness are sandwiched between adjacent corrugated sheets. The thickness of the filter in the ventilation direction is 10 cm, and the air velocity is 0.6 m / s. The total area of flakes per unit volume of the filter in contact with the treated air supplied by the filter is 3000m2 / xn3. The filter of the present invention uses 3 μm of powder of kaolin (a kind of kaolin mineral) as a binder and fine 8 Aperture After mixing the powder of hydrophobic zeolite with a size of 3-4 μm, the silica gel is used as an inorganic fixing aid and the dispersed adhesive is immersed in the porous honeycomb structure and dried. The hydrophobic zeolite is used as the first adsorption layer. It is connected to the honeycomb structure. It is also immersed in a powdered acid-treated montmorillonite (reactive white clay) adhesive with several μιη and an inorganic adhesive that is used as an adhesive to disperse the adhesive. The porous honeycomb structure of the adsorption layer is dried and fixed to form a second adsorption layer. The thickness of the first adsorption layer is based on the weight component ratio of hydrophobic zeolite: kaolin: silicon dioxide = 70%: 25%: 5% The thickness of the second adsorption layer is 10 μιη, and its weight component ratio is hydrophobic zeolite: stone dioxide = 87%: 13 ° / .. The density of the entire filter is 230 g / l, and the density of the adsorption layer is 90g / l (39% of the total filter). In addition, '56 in Table 5 _ This paper size is suitable for Sichuan Chuan 1¾ Butcher Pillow Standard (C.NS) Λ4 specification (U0〆297mm f) (Please read first (Please fill in this page for the back note)

419390 at Β7 V. Explanation of the invention () The comparison also shows that the powder of 3 μm kaolin is used as a binder and the powder of the hydrophobic zeolite with an effective pore diameter of 8 angstroms is mixed, and the silica gel is used as an inorganic fixing agent. The measurement result of the filter manufactured by immersing the porous honeycomb structure with the adhesive dispersed together with the auxiliary agent and drying it. The main size of the kaolin vent holes is more than 1000 angstroms, and there is almost no physical adsorption capacity. However, the effective pore size of activated white clay is mainly distributed in the range of 20 angstroms to 1000 angstroms, and the physical adsorption performance is not inferior to that of activated carbon. The shape and aeration conditions of the honeycomb structure of the filter are exactly the same as those of the filter of the present invention shown in Table 5. The difference is that the system fixedly attached to the surface of the honeycomb structure is the first adsorption phase of the present invention. But does not have a layer corresponding to the second adsorption layer (active white clay layer) of the present invention. It can be understood from FIG. 5 that the types of DOP and DBP with the largest amount of surface organic pollutants detected on the surface of the substrate in the cleaning device are smaller than 8 angstroms in molecular weight, and have no physical adsorption performance in the adhesive. Too good, it is only adsorbed and removed by the adsorption performance of hydrophobic zeolite. However, because the molecular size of BHT or pentamer (D5) is larger than 8 angstroms, it cannot be removed with a hydrophobic zeolite, and its adsorption and removal has to rely on a second adsorption layer having physical adsorption properties. Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs {Please read the note on the back ^ η before filling out this page) Second, compare the various types of filters manufactured according to the present invention, using only hydrophobic zeolites. A filter and a filter of two comparative examples which are different from the present invention in a structure in which the order in which the first adsorption layer and the second adsorption layer are fixed to the support is reversed. The results are shown in Table 6. 57 419390 V. Description of the invention (Table 6) Types of gaseous organic impurities The present invention A A filter using only hydrophobic zeolite The present invention B The present invention C Comparative example D Comparative example E DOP 98% 95% 98% 99% or more 95 % 98% DBP 98% 95% 98% 99% above 95% 98% BHT 85% 30% 60% 85% 30% 60% D5 90% 35% 65% 90% 35% 65% (Please read the notes on the back first Please fill in this page again.) In Table 6, the present invention is a filter of a honeycomb structure composed of a first adsorption layer made of zeolite and a second adsorption layer made of an acid-treated montmorillonite adhesive. The first adsorption layer is disposed on the support side, and the second adsorption layer is disposed near the airflow side. In the present invention B, a filter in which an adhesive layer of zeolite and an acid-treated montmorillonite is mixed with an alumina sol which is an inorganic fixing aid is formed on the surface of a honeycomb structure. The present invention C is a filter in which an acid-treated montmorillonite adhesive is used to form a second adsorption layer on the surface of the filter of the present invention B. A filter using only a hydrophobic zeolite forms only an zeolite adsorption layer on the surface of the honeycomb structure. Comparative Example D is a filter in which the first adsorption layer and the second adsorption layer of the invention A are fixed to the support in order. The first adsorption layer is an acid-treated montmorillonite adhesive, and the second adsorption layer is a filter. Filter for honeycomb structure made of zeolite. Comparative Example E is a filter in which the first adsorption layer and the second adsorption layer of the invention C are reversely connected to the support in order. The first adsorption layer is composed of 58 papers and is suitable for China's 1¾ standard (CNS). Specification of Λ4 (public) Printed by the Consumer Cooperatives of the Ministry of Economic Affairs of the Ministry of Economic Affairs of the Ministry of Economic Affairs 419390 5. Description of the invention () Adhesive for the acid-treated montmorillonite, and the second adsorption layer by zeolite and the montmorillonite Filters for honeycomb structures made of chemicals. The structures of the adsorption layers of these filters are enlarged in Figs. 33 to 38, and are shown in a perspective view (a) and a sectional view (b), respectively. These figures 33 to 38 are model diagrams showing the adsorption layer shown in FIG. 9 or FIG. 15 as a schematic diagram partially cut into a cylindrical shape having a height of the thickness of the adsorption layer and located in the cylinder. The distribution of micropores or intermediate pores of the pores involved in adsorption. In addition, the support is omitted in these FIGS. 33 to 38. In the present invention A, as shown in FIG. 33, pores of about 8 angstroms of zeolite are formed in the first adsorption layer 551 and pores of about 15 to 300 angstroms of acid-treated montmorillonite are formed in the second adsorption layer 552. As shown in FIG. As shown in Fig. 34, a filter using only a hydrophobic zeolite has pores of about 8 angstroms formed in the adsorption layer 553. FIG. 35 of the invention B shows that pores of about δ angstroms of zeolite and pores of about 15 to 300 angstroms of acid-treated montmorillonite are formed in the adsorption layer 554. In the invention C, as shown in FIG. 36, pores of about 8 angstroms of zeolite and pores of about 15 to 300 angstroms of acid-treated montmorillonite are formed in the first adsorption layer 555, and acid-treated montenes are formed in the second adsorption layer 556. Fine stone pores of about 15 ~ 300 angstroms. In Comparative Example D, as shown in FIG. 37, pores of about 15 to 300 angstroms of acid-treated montmorillonite were formed in the first adsorption layer 560, and pores of about 8 angstroms of zeolite were formed in the second adsorption layer 561. Comparative Example E As shown in FIG. 38, pores of about 15 to 300 angstroms of acid-treated montmorillonite were formed in the first adsorption layer 562, and pores of about 8 angstroms of zeolite and acid-treated montene were formed in the second adsorption layer 563. Fine stone pores of about 15 ~ 300 angstroms. As for the results of investigating the surface contamination prevention rate of these filters as before, the filter of the present invention and the furnace phase composed of only hydrophobic zeolite 59 -β (please read the precautions on the back before filling this page)

This paper size is applicable to Shimin Valve ’s family standard apple (rNS; Λ4 regulations (2KW 297 gong)) Printed by the Consumers' Cooperative of the China Standards Bureau of the Ministry of Economic Affairs 41939Q__B7____ 5. The description of the invention () ratios are on the adsorption of BHT and D5 Excellent. In addition, the order of superiority of the adsorptivity in the present invention is C, A, and B. The adsorption performance of Comparative Example D is equivalent to that of a filter composed of only a hydrophobic zeolite. From the results in Table 6, it can be understood that, for example, BHT Or D5-like molecular diameter is larger than the effective pore diameter of zeolite. The adsorption performance of gaseous organic impurities is determined by how many effective pore diameters are distributed on the contact surface of the gas to be treated and the direct contact with the adsorption layer. The pores, in other words, are determined by how to increase the area density. Therefore, when the adsorption layer is composed of two different layers of the first adsorption layer and the second adsorption layer, it is suitable for adsorbing a gas having a large molecular diameter such as BHT or D5. The area density of the pores of f is relatively small and the adsorption performance is poor. The area density of the pores suitable for adsorbing gaseous organic impurities with large molecular diameters such as BHT or D5 is relatively large and the result is relatively large. The order of fixing the adsorption layer with excellent adsorption performance to the support is to use the adsorption layer with poor adsorption performance as the first adsorption layer that directly contacts the support, and superimpose the adsorption layer with excellent adsorption performance on the first adsorption layer to form By directly contacting the second adsorption layer of the target gas to be processed, a filter with excellent adsorption performance is obtained. If the order of fixing to the support is reversed, there is an organic impurity for gases with large molecular diameters such as BHT or D5. The adsorption performance deteriorates, so you need to pay attention. In addition, the adsorption performance of gas organic impurities such as DOP or DBP whose molecular diameter is smaller than the effective pore diameter of zeolite depends on the contact surface between the gas to be treated and the adsorption layer in direct contact. There are many small or medium pores involved in physical adsorption, in other words, it is determined by how to increase its area density. Therefore, the first adsorption layer directly contacting the support is not relevant. Then, as long as it directly contacts the second adsorption layer of the target gas to be processed Excellent adsorption performance, regardless of straight 60 (谙 Read the precautions on the back before filling this page) Order-ο The size of this paper is suitable ((ns) λ4 is now (2) 〆 ;: 9? Public; ^) Employees of the Central Standards Bureau of the Ministry of Economic Affairs, Cooperative Cooperative Printing 4193801 V. Description of the invention () Why the structure of the first adsorption layer contacting the support is all right, but it is not so. Table 6 The measured adsorption performance means that after long-term use of the filter, the surface pollution prevention rate before the adsorption efficiency is reduced due to the gaseous organic impurities contained in the gas to be treated, before the filter's performance specifications, not only The adsorption performance also includes the time until adsorption saturation is reached due to gaseous organic impurities, that is, the lifetime of the adsorption performance remains unchanged. Because the lifetime is determined by the entire adsorption layer, the total pore volume of micropores or medium pores involved in physical adsorption or The surface area of the pores is not only in direct contact with the second adsorption layer of the target gas to be processed, but also in a structure in which the pore volume or surface area of the pore is increased by directly contacting the first adsorption layer of the support, so that a long life can be obtained. filter. Secondly, after actually manufacturing the cleaning device of the present invention illustrated in FIG. 16, the silicon wafer substrate with an oxide film without organic contamination immediately after cleaning was placed in the processing space. A clean fan unit having a fan unit, the filter of the present invention, and a particle removing filter is disposed on the ceiling portion of the processed space. A hydrophilic zeolite is used in the filter of the present invention. Then, the contact angles immediately after washing and after 3 days of standing were measured, and the increase in the contact angle after 3 days of standing was investigated. Repeatedly every 15 days, the increase in the contact angle after being left for 3 days was measured (washing-> measuring the contact angle ^ leaving for 3 days-> measuring the contact angle) 'to measure the adsorption of the filter of the present invention Performance deteriorates over time. The circulating air flow in the clean device is set to 5000 m3 / min. The amount of hydrophilic zeolite used to treat the circulating air is 50000 kg. The amount of inhaled outside air is set to the circulating air flow. 4% of 200m3 / min. The volume of the whole chamber is 3120m3, and the number of air changes per hour is 100 times. • 61 _________________—--------— This paper is scaled by Shijia Shijia ((, \ '5), 8 and 4 specifications (2 丨 〇 / 297 Super League) _ (Please read the note on the back first (Fill in this page again)

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* 1T A7 Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 4 \ mm V. Description of the invention () In addition, for comparison, the filter with hydrophilic zeolite was replaced with a fibrous activated carbon and a polyester non-woven adhesive The chemical filter with a conventional structure that is compounded into a felt shape is repeatedly measured every 15 days to increase the contact angle of the silicon wafer substrate with the oxide film after cleaning for 3 days. At this time, the amount of activated carbon per lm3 / min ventilation was set to 1 kg. The same measurement is also performed for a case where a filter of a hydrophilic zeolite or a chemical filter of a conventional structure is not provided at all, that is, a case where no special measures are required for gaseous organic substances contained in a clean device environment. In addition, the contact angle of the surface of the silicon wafer with an oxide film immediately after cleaning is 3 degrees. It is assumed that the necessary condition for the environmental requirements of a clean device to prevent the degradation of module quality due to the contamination of gaseous organic impurities is that the contact angle of the surface of the silicon wafer with an oxide film is maintained below 6 degrees after 3 days of exposure. The measurement results are shown in Figure 39. The contact angles of the surfaces of the silicon wafer with oxide film in the clean device environment exposed to the clean device environment of the present invention, the chemical filter equipped with a conventional structure, and the clean device environment without special measures for gaseous organic matter were compared. With time changes. The contact angle of the surface of the silicon wafer with an oxide film exposed to a clean device environment that does not require special measures for gaseous organic matter has increased by 26 to 30 degrees due to standing for 3 days. For the filter of the present invention, the contact angle of the silicon wafer with an oxide film after being left for 3 days was maintained at 4 degrees or less after being used. However, as the aeration time increases, the adsorption performance of the hydrophilic zeolite decreases, and the concentration of gaseous organics in the air after passing through the adsorption layer also increases. That is, as the ventilation time for the hydrophilic zeolite increases, the contact angle on the surface of the treated film exposed with the oxide film on the downstream side increases, and the contact angle on the surface of the treated paper also increases. 62 This paper is moderate in size. ((, NS) Λ4 Specifications (210X297): (Please read the precautions on the back before filling this page)

Central Bureau of Standards, Ministry of Economic Affairs, negative X; printed by cooperatives 4 mm a, B7 5. Invention Description () Canada. It was learned that the filter of the present invention had a use time of about 3 months until the contact angle of the surface of the silicon wafer with an oxide film exposed to the air after passing through the filter for 3 days reached 6 degrees. However, for the conventional chemical filter, the contact angle of the silicon wafer with an oxide film that has been left for 3 days after being used immediately reaches 12 degrees. The reason is that all the escape gases from the adhesive using a polyester nonwoven fabric to support the fibrous activated carbon pass through the chemical filter and contaminate the surface of the silicon wafer placed on the downstream side. In the conventional chemical filter, the adsorption performance of activated carbon decreases with the increase of aeration time, reaching 20 degrees after 6 months of use. Further description of the adsorption characteristics of hydrophilic zeolites on water. Figure 40 shows the adsorption isotherm of water measured for a hydrophilic zeolite with a pore size of 10 angstroms and activated carbon using coal as the raw material at an environment of 25 ° C. Regarding activated carbon, only the relative humidity increased slightly, and the moisture absorption and weight in the air increased rapidly. For example, store an unused activated carbon-added chemical filter with almost no moisture absorption in a container with a relative humidity of 20%. Take out the chemical filter from the storage container and immediately expose it to a relative humidity of 50%. When the device environment is cleaned, a large amount of moisture in the air is adsorbed until the activated carbon reaches adsorption saturation. The difference between the saturated adsorption moisture content of activated carbon at relative humidity of 20% (water absorption saturation amount of 0.0004 cc / g) and 50% (water adsorption saturation amount of 0.114 cc / g) is as high as 0.1 ncc / 100 g. And 'hydrophilic zeolite with a pore size of 10 angstroms, the saturated amount of moisture adsorption at a relative humidity of 20% was as high as 0.262 pc / g, but the relative humidity changed from 20% to 50%. 〇2cc / g. It can also be understood from FIG. 40 that the unused 10 angstroms that have been stored in an environment with a relative humidity of about 20% 63 (please read the precautions on the back before filling in the {马 页) Ό—丨 丨】 China Valve (.NS) 8 4 specifications (21〇〆 公 .¾) Printed by the Central Government Bureau of the Ministry of Economic Affairs and Consumer Cooperatives? ^ 419390 A7 B7 V. Description of the invention (): When the filter of hydrophilic zeolite starts to be used in a clean device environment with a relative humidity of 50%, it is adjusted to the specified relative humidity on the upstream side, because of the filter used. The hydrophilic zeolite hardly adsorbs moisture in the air, and there is no disadvantage that the relative humidity in the clean device is lower than the specified value. The troublesome task of checking the ambient temperature and humidity of the place of use before shipment and deliberately adsorbing the activated carbon of the chemical filter with the moisture and temperature equilibrium of the chemical filter before shipment, as in the case of a chemical filter added with activated carbon, is not required. Because the environment with relative humidity below 20% is in an ultra-dry state that is impossible in ordinary operating environment, it is usually 10% in ordinary operating environment, and the filter with hydrophilic zeolite does not need to be filtered by chemical formula with activated carbon. The device intentionally absorbs moisture before shipment, and can be directly shipped after packaging. Next, the humidity controllability of the cleaning device of the present invention having a filter with a hydrophilic zeolite was investigated and compared with a conventional cleaning device having a chemical filter. Adjust the water supply valve of the humidifier installed in the unit type air conditioner based on the humidity sensor installed in the air intake circuit after the unit type air conditioner and filter that perform the dehumidification, temperature and humidity adjustment. In order to determine whether the humidity controllability is good, a humidity sensor is also provided inside the cleaning device according to the present invention and the conventional cleaning device. In addition, with respect to the circulating air amount of 5.000 m3 / min, the external air intake amount is set to only 200 m3 / min. In the clean device of the chemical filter with a conventional structure, the chemical filter easily absorbs moisture in the air. After the chemical filter is installed, the activated carbon absorbs moisture and reaches an equilibrium state within about 2 weeks. The relative humidity becomes 45% which is 5% lower than the setting 値 50%. And, with 64 (please read the precautions of back rain before filling out this page)

The scale of this paper is Shizhou, China, Yan Jiacui (CNS) 8-4 specification (2Ι () χ'297) 苋 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 4J9390 5. Description of the invention () Hydrophilicity is fixed by the order The filter inside the honeycomb structure of zeolite according to the present invention cleans the device. Since the moisture in the air is hardly absorbed, the relative humidity is kept at the set value of 5050%. In a cleaning device with a chemical filter having a conventional structure, about two weeks after the filter is installed, the product yield is reduced. However, in the cleaning device with a filter according to the present invention, the relative humidity has been maintained at the set value since the filter was installed, and no decrease in the yield of the product was found. Next, the structure of the filter 311 of the present invention described in FIG. 18 and the first filter portion 31a was actually manufactured so that synthetic zeolite having a pore diameter of δ angstroms was fixed to the honeycomb structure. On the other hand, the structure of the 31 lb of the second filtering part is made of several μm of powdered acid-treated montmorillonite (active white clay) fixed to the honeycomb structure. In addition, the characteristics of montmorillonite have been described above. Here, the most abundant types of organic pollutants detected from the surface of a substrate in a clean room such as a clean room or a clean operating table are DOP and DBP. These are abundant in vinyl chloride materials, and the molecular diameter is in the range of 6 to 8 angstroms. Therefore, if the pore diameter of the synthetic zeolite is set to 7 angstroms or more, most of the gaseous organic substances that cause the organic substance contamination on the substrate surface can be removed by the first filter portion 31a. However, BHT or siloxane having a molecular size greater than 8 angstroms was also detected on the surface of the substrate in the self-cleaning device. These were not removed by the first filter portion, but were removed by the second filter portion 311b. As shown in FIG. 17, the first and second filter sections 311 a and 311 b of this embodiment have a structure in which thin plates without unevenness are sandwiched between adjacent wave plates. The thickness of the filter in the ventilation direction is l0. cm, ventilation speed is 65 (please read the notes on the back and fill in this education)

, 1T οι. The size of this paper is suitable for Sichuan, Fujian, and Fujian (rNS) Λ4 is present (2 Sichuan / 2 (7) public money) Printed by the Central Standards Bureau of the Ministry of Economic Affairs and Consumer Cooperatives 419390 at B7 V. Invention Explanation () 0.6m / s, the total sheet area per unit volume of the filter that comes in contact with the air to be processed to the filter is 3,000m2 / m3. The honeycomb structure of the first filter part 311 a is a binder that disperses a powder of hydrophobic synthetic zeolite with an effective pore size of 3 angstroms and a size of 3 μm, a powder of 3 μm of kaolin mineral as an inorganic binder, and silicone. The porous honeycomb structure is immersed in the medium and dried. On the inorganic adhesive, in addition to the mixture of kaolin mineral and silicone, talc, bentonite, silicate soda, silicon dioxide, or alumina can also be used. Next, the honeycomb structure of the second filter portion 311b is a binder in which a 3 μm powder of active white clay whose effective pore diameter is mainly distributed between 20 angstroms and 100 angstroms is dispersed together with silicone as an inorganic bonding agent. The porous honeycomb structure is immersed and dried. In addition, the physical adsorption performance of activated white clay on gaseous organic impurities is not inferior to that of activated carbon. The thickness of the inorganic material layer of the synthetic zeolite in the first filter section 31 la is 100 μπα, and the weight component ratio is hydrophobic zeolite: kaolin: silica = 70%: 25%: 5%, and the second filter section 31 lb The thickness of the inorganic material layer of the activated white clay is 10 μm, and its weight component ratio is that of the activated white clay: sand dioxide = 87%: 13 ° /. . The density of the entire filter of the first and second filter sections 311a and 3lib is about 250 g / l, and the density occupied by the inorganic material layer is about 90 g / l at the first filter section 31 la (about 36 of the entire filter). %), About 9 g / l in the second filter section 3lib (about 3.6% of the entire filter). The reason why the amount of the inorganic adsorbent of the activated white clay contained in the second filtering portion 311b can be reduced to about 1/10 compared with the amount of the synthetic zeolite contained in the first filtering portion 31a is as follows. Water absorption due to changes in relative humidity due to synthetic zeolite 66 (Please read the precautions on the back before filling this page) —C) · Order. 01 This paper 怅 size fits Sichuan towel valve 丨 sentence standard (CNS) Λ4 specification (public Treatment) Printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs Ⅴ. Description of the invention () Less off-load, compared with activated carbon, does not affect the humidity control of the environment in the clean device. However, an inorganic adsorbent, such as activated white clay, is hydrophilic because it has the same amount of water absorption and desorption as activated carbon. In addition, DOP and DBP, which are the largest types of surface organic contaminants detected from the surface of the substrate in the cleaning device, can be removed by the first furnace section 31a having a synthetic zeolite. . On the other hand, the concentration in the air of BHT or D5 (pentasil siloxane) that cannot be removed by the +1 filter and 3lib of the second filter is much lower than the concentration of DOP or DBP. The amount of detection is also small. Therefore, the amount of the inorganic adsorbent having the activated white clay in the second filtering portion 31 lb can be smaller than that of the synthetic zeolite in the first filtering portion 311a. As shown in FIG. 41, the filter 311, the fan 593, and the HEPA filter 594 of the present invention are mounted on the ceiling of a storage room 591 placed in a ballastless room 590. The fan 595 takes the clean room air 599 from the environment inside the clean room 590 into the storage 591 through the inlet 596, and in the environment of the processing room 597 filled with the clean room air processed by the filter 311, Only after cleaning, 592 wafer substrates with oxide film sand without organic contamination were left for 3 days, and the contact angle was measured. Repeat the measurement of the contact angle after being placed in the environment for 3 days every 15 days (washing—storing for 3 days ^ measurement of contact angle—choosing—storing for 3 days—retesting contact angle —...), The adsorption performance of the furnace 311 deteriorates with time. In addition, the storage 591 is made of a material that does not generate gaseous organic impurities. In the interior, especially in the processing chamber 597, no gaseous organic impurities are generated from the storage itself. The air in the processing chamber 597 flows in the direction shown by the arrow in Fig. 41. 67 paper ruler Mao Shi / Π towel Gumin cotton cotton (('NS ί eight 4 specifications (2 丨 0, 2Q7 male; 1¾) (Please read the notes on the back before filling this page) -Q. Order. Printed by the Employees' Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 遘 193 90 at _________B7 V. Description of the invention () Perforated plate 601, from the bottom of the floor 602 returns to the ceiling portion 604 through the return path 603. The circulating air flow rate in the storage 591 is set to 20 m3 / min. In order to process the circulating air 598, the first filtering portion 311a which is a constituent element of the filter 311 is included The amount of synthetic zeolite was set to 2 kg, and the amount of activated white clay contained in 31 lb of the second filtering part of the same system component was set to 0.2 kg. The amount of inhaled air 599 was set to 598 The flow rate of 4% is 0.8m3 / min. The amount of air discharged from the outflow port 600 and the suction volume is balanced. The overall storage volume of the storage is 12m3, and the number of air changes per hour is 100 times. For comparison, for the comparison, 41 storage 591, only the first with synthetic zeolite In the case where the filter part 31 la was removed and the second filter part 31 lb with activated white clay was removed, the contact angle was measured after the cleaned silicon wafer substrate with an oxide film was left for 3 days, and the contact was repeatedly measured every 15 days In the case where neither the first filter portion 311a nor the second filter portion 311b of the present invention is provided, that is, the same amount is also applied to the case where the gaseous organic substances contained in the clean room air flow directly into the storage without being removed. In addition, the contact angle of the surface of the silicon wafer with an oxide film immediately after cleaning is 3 degrees. It is assumed that the necessary conditions for storage and environmental protection to prevent the deterioration of the quality of the module due to the contamination of gas and organic impurities are exposed for 3 days. The contact angle on the surface of the post-oxidized silicon silicon wafer is kept below 6 degrees. The measurement result is shown in FIG. 42. In the case where the storage 591 has the filter 311 according to the present invention, it has only the first filter 31. In the case of la, and the case where no special measures are required for gaseous organic matter, we compared the surface of the wafer with oxide film sand exposed to the environment in the storage 591. 68 _ The paper size is appropriate. ΐ '料 螵 举 (CNS) Α 4 specifications (210/2 [; 7 Ministry of Public Affairs ·; (please read the precautions on the back before filling out this page?) Order _ Printed by the Central Consumers Bureau of the Ministry of Economic Affairs Consumer Cooperatives 419390 at B7_____ 5. Description of the invention () The contact angle varies with time. The contact angle of the surface of the silicon wafer with an oxide film exposed to a clean device environment that does not require special measures for gaseous organic matter has increased by 26 to 30 degrees due to standing for 3 days. According to the cleaning device of the filter 311 according to the present invention, the contact angle of the silicon wafer with an oxide film after being left for 3 days in the state (elapsed time 0 days) after "1" is kept below 4 degrees. However, as the ventilation time increases, the adsorption performance of the filter 311 decreases, and the concentration of gaseous organics in the air after passing through the filter also increases. That is, as the ventilation time to the filter 311 increases, the contact angle of the surface of the silicon wafer with an oxide film after the fixed air exposed to the downstream side for a fixed time also increases. It was learned that the filter 311 0¾ exposed to the air with an oxide film on the surface of the wafer after 3 days of passing through the filter 311 had a contact angle of 6 degrees, and the use time was about 8 months. Meanwhile, the cleaning device 'with the first filter section 311a and the second filter section 3lib constituting the filter 3n having only the first filter section and lacking the 31 lb of the second filter section' is in a state immediately after use (elapsed time) Day 0), the contact angle of the silicon wafer with oxide film after being left for 3 days has exceeded 5 degrees. Moreover, it was learned that the exposure time of the first furnace 咅 E 31 la until the contact angle of the surface of the silicon wafer with an oxide film exposed to air for 3 days after passing through the first filter portion 311 a with synthetic zeolite reached 6 degrees was only 2 months. In order to investigate the cause in more detail, as shown in FIG. 43, the dust-free structure in which the filter 311 (consisting of the first and second filter sections 31a and 31 lb) of the present invention used in FIG. 41 is installed in the storage 59Γ The condition of the inlet 596 of the room air 599 and the case where only the first filter 31a is installed in the inlet 596 '. Measure the four kinds of organic impurities 69 that cause the surface contamination of the substrate. (Please read the Note: Please fill in this page again.) Order-419390 at B7___ V. Description of the invention () DOP, DBP, BHT, D5 (pentameric oxaxane) substrate surface pollution prevention effect 'Comparison of two cases. Unlike FIG. 43 'and FIG. 41, the air in the processing chamber 597 flows in the direction shown by the arrow in FIG. 43 and passes through the perforated plate 601 and is directly discharged from the lower part 602 of the floor through the outflow port 600. That is, Fig. 43 corresponds to the case where the circulation path in Fig. 41 is closed, and the air in the storage chamber does not circulate and flows in one direction. The concentrations of DOP and DBP are each coefficient ten ppb, while the concentrations of BHT and D5 are each coefficient ppb. The cleaned silicon wafer with oxide film 592 was placed in the environment of the clean room 590 in FIG. 43 and the environment in the storage 591 ′ only after 4 hours, and the DOP on the surface of the silicon wafer was measured and compared. , DBP, BHT, D5 caused the amount of organic surface pollution, and evaluated the prevention effect of organic surface pollution. The results are shown in Table 7. (谙 Please read the notes on the back before filling this page)

, TT Printed by the Central Bureau of Standards, Ministry of Economic Affairs, Consumer Cooperatives x Table 7 Types of pollutants The first filter section 31 la and the second filter section 31 lb are arranged in series. The first furnace section 31 la is separately configured with D0P 99% or more and 99% or more. Above DBP 95% 95% rate BHT 90% 35% D5 90% 40% οι. Using a 4-inch p-type sand wafer to evaluate the amount of organic surface contamination. A combination of a temperature-evolving fugitive gas device and a gas chromatography mass spectrometer was used to analyze and measure the organic matter adhering to the wafer surface. In addition, according to the gas chromatograph, the paper is suitable for 70 papers in accordance with the standard of 70 papers: Libei (CNS) Λ4 is present (2) f) y 297 is good) Consumption Cooperation between Employees of the Central Standards Bureau of the Ministry of Economic Affairs Du Yin ¾ 419390 V. Description of the invention () The surface contamination prevention rate is calculated | required as follows. Surface pollution prevention rate = (B / A) χΙΟΟ (%) A: Area of Peak where organic pollutants are detected from the surface of the wafer in the clean room environment B: From the surface of the wafer in the vault environment The area of Peak where organic pollutants are detected is shown in Table 7. Among the four kinds of gaseous organic pollutants DOP, DBP, BHT, and D5, because the molecular sizes of DOP and DBP are less than 8 angstroms, the effective pore diameter is 8 The first filtering part 311a of the zeolite synthetic zeolite was almost completely removed. However, since the molecular sizes of BHT and D5 are larger than δ angstroms, the first filtering section 31 a using a synthetic zeolite with an effective pore diameter of 8 angstroms cannot be removed, and the main pores with an effective pore diameter are mainly distributed at 20 angstroms to 100 angstroms. The second filtering portion 311b of the activated white clay of Angstrom was removed. That is, like the filter 311 of the present invention, a first filter portion 311a having a synthetic zeolite is used, and an organic gas having an adsorbed gas disposed on the upstream side or the downstream side of the first filter portion 31a has an effective pore diameter larger than that. Synthetic zeolite, the effective pore size of the inorganic adsorbent in the second filter part 31 lb both, can completely prevent the surface pollution of organic matter caused by a clean device environment like a clean room, only use the first filter part 31 with synthetic zeolite At la, it is not possible to adsorb molecules larger than the pore size of synthetic zeolite, which cannot completely prevent the surface pollution of organic matter caused by the clean device environment. This is also clear from the measurement results in FIG. 42. Next, the reason why the hydrophobic zeolite of the present invention preferably has an effective pore diameter of 7 angstroms or more is explained. It has been explained earlier that it becomes an organic surface in a clean room or a clean operation table. 71 (Please read the precautions on the back before filling out this page) —Ρ 丁 Γ " *乂 S) M specifications (2 丨 〇 ,,: 297 gong) Consumer Co-operation of the Central Bureau of Standards of the Ministry of Economic Affairs · Social Printing t 419390 A7 B7 __ 5. Description of the invention, () Organic matter of the cause of pollution 'but in dust-free Although there are some differences in the silicon wafers processed in the air environment of the chamber or the operation platform, the natural oxide film is formed on the surface, so the wafer surface is hydrophilic. Also, the glass substrates processed in this air environment are also The physical properties of glass itself are hydrophilic, which is well known. Organic materials from the air environment that contaminate the hydrophilic surface of the silicon wafer or glass substrate that forms this natural oxide film should have hydrophilic groups that are fused to the hydrophilic surface. In fact, the organic substances that have been described as the cause of surface contamination are high boiling points with a double bond of carbon elements or a chemical structure of a benzene ring. Polymeric hydrophobic organic substances with hydrophobic groups. But at the same time, these organics also have hydrophilic groups that cause the pollution of clean hydrophilic surfaces. However, once the hydrophilic clean surfaces of silicon wafers or glass substrates are contaminated by these organics, the contaminated surface parts become and adhered organics The same hydrophobicity. Because the surface that becomes hydrophobic is easy to combine with the hydrophobic group of the hydrophobic organic matter, the surface pollution of organic matter proceeds rapidly, forming a multi-molecular layer of organic matter. The organic matter that is the cause of surface pollution is high boiling point and high The hydrophobic nature of the molecule has a hydrophobic group, so the reason for choosing a hydrophobic zeolite is to have affinity with the hydrophobic group. However, in the second-best choice, the organic matter that is the cause of these surface contaminations also retains hydrophilicity. Hydrophilic zeolites with affinity to hydrophilic groups can also be used. However, in the case of using hydrophobic zeolites, the amount of moisture absorbed in the air is less than that of activated carbon or hydrophilic zeolites, and the zeolite porous structure has the original gas organic impurities The adsorption capacity will not decrease due to the adsorption of water. In the case of using hydrophobic zeolite as an adsorbent for organic matter, the life span is the same as that of porous structure 72 (锖 Please read the precautions on the back before filling in this page)

The size of this paper is Hong K 丨 Sample of Chinese housekeepers {CNS > A4 size (2 丨 丨) × 2 ^ 7 male dragon) 41S390 printed by the Consumer Cooperatives of the Central China Bureau of the Ministry of Economic Affairs 5. Description of the invention () Activated carbon or hydrophilicity Zeolite is long. On the other hand, activated carbon or hydrophilic zeolite with a porous structure has a large amount of water adsorption in the air, and the original adsorption capacity of the porous structure is largely due to the adsorption of water. Only the adsorption capacity remaining after deducting the amount of water adsorption participates. The adsorption of organics has a shorter life than hydrophobic zeolites. Next, the adsorption characteristics of synthetic zeolite for water will be described. About the hydrophilic synthetic zeolite with a pore size of 10 angstroms, the adsorption isotherm of water measured at an environment of 25 ° C is also shown in FIG. 27. The hydrophilic synthetic zeolite with a pore size of 10 Angstroms has a saturated moisture absorption amount of 0.262cc / g at a relative humidity of 20%, but the relative humidity has changed from 20% to 50%, and the increase in the saturated moisture absorption amount is only 0.02cc. / g, is only 27% of the increase in activated carbon. It can also be understood from FIG. 27 that when a filter having unused synthetic zeolite stored in an environment with a relative humidity of about 20% is started to be used in a clean device environment with a relative humidity of 50%, its upstream side is adjusted to the specified relative The humidity is also due to the fact that the synthetic zeolite used in the filter hardly absorbs moisture in the air. The relative humidity in a clean device without a chemical filter is lower than that of a chemical filter containing activated carbon. The preferred embodiment of the present invention has been described above with respect to the clean room used for the entire LSI or LCD manufacturing process and the storage room for small clean machines, but the present invention is not limited to such an embodiment. According to local cleansing devices or cleanrooms or cleanrooms of various sizes called mini-environments, cleansing devices of various sizes, such as clean conveying paths used to convey clean products, as well as the filter's air volume, circulating air volume and external The ratio of the amount of air to the air, the presence or absence of gas, organic impurities from the inside of the clean device, and other processing environments may have 73 wood paper 怅 standard 坷 川 中国 凼 本 档 本 (['NS) See the grid connection) (Please read first Note on the back, please fill out this page again) Ding · 1,-* Printed by the Consumers' Cooperatives of the Central Government Bureau of the Ministry of Economic Affairs 4 ^ 9390 A7 ___B7_ ___ 5. Description of the invention (). Various embodiments. In addition, the processing object of the filter of the present invention is not limited to only air. Of course, the processing of an inert gas such as nitrogen or argon can also generate an inert gas suitable for the manufacture of semiconductors and LCDs. For example, it is expected to use a silicon wafer with a diameter of 300mm to manufacture 256MbitDRAM or 1GbitDRAM since 1999. In such a semiconductor manufacturing apparatus, after the wafer is introduced into a room in the apparatus and the reaction process is started, an inert gas nitrogen or argon gas is supplied from the inert gas supply apparatus to fill the room. This inert gas system has extremely high purity specifications. The inert gas itself will not cause surface contamination of the wafer. However, in order to open and close the supply of the inert gas, a valve is provided between the inert gas supply device and the room, and a gaseous organic substance that causes contamination of the wafer surface due to the constituent material of the valve. By providing the filter of the present invention in the gas flow path between the valve and the room, the gas-passing filter itself does not generate gaseous organic pollutants, and removes various gaseous organic pollutants generated by the valve, which helps prevent wafers Surface pollution and improve quality. [Industrial applicability] If the present invention is used to prevent the organic matter contamination on the surface of the substrate processed by the clean device, the gaseous organic matter contained in the environment that causes the surface contamination of the substrate will be adsorbed and removed by molecules such as DBP Both gaseous organic impurities with a diameter of less than 8 angstroms and gaseous organic impurities with a molecular diameter of more than 8 angstroms, such as BHT or siloxane, A. Can produce suitable for semiconductor or LCD manufacturing Clean air of gas organic matter. 74 Paper size (W. Min.) ((.NS) Λ4 ^ 格 ί 2] 〇 > 297 gong) (Please read the precautions before reading the West, then fill out the tribute) Order 419390 A7 B7 Central Standards of the Ministry of Economic Affairs Printed by the Bureau of Consumer Cooperatives 5. Description of the invention () B. In the manufacture of semiconductors or LCDs, by using clean air as the environment for the clean devices exposed on the surface of the wafer, organic matter on the surface of the substrate can be prevented from being contaminated. Also, by appropriately selecting and combining zeolites as adsorbents for adsorbing and removing gaseous organic impurities with a molecular diameter of less than 8 angstroms, and as adsorbents for adsorbing and removing gaseous organic impurities with a molecular diameter of more than δ angstrom Inorganic substances, A. Filters that do not contain combustible materials can be provided. The cleaning device using the filter is superior to the cleaning device using a conventional activated carbon adsorbent filter. Β. It is possible to provide a filter composed only of a material that does not generate gaseous organic matter which causes the surface of the substrate to be polluted. Compared with a cleaning device composed of a filter using a conventional activated carbon adsorbent, a cleaning device composed of the filter can be used. Prevent organic contamination on the substrate surface more completely. Compared with the conventional activated carbon adsorbent filters, filters that are more difficult to adsorb moisture in the air and gas and organic impurities and have a longer duration of adsorption performance have been provided. The clean device and use habits of the filter are used. Compared with the cleaning device composed of the known activated carbon adsorbent filter, the humidity control in the cleaning device can be more easily performed, and the gas and organic impurities contained in the environment can be adsorbed and removed for a longer period of time. 'Furthermore, if a filter having a synthetic zeolite is used, it is extremely safe against disasters compared with a conventional chemical filter containing activated carbon specified in the fire protection law. In addition, the filter has a structure in which synthetic zeolite is fixed to a honeycomb structure, thereby reducing the ventilation resistance of the treated air. Also, Ί5 _ This paper is attached to the standard 饨 州 屮 闽 屮 家家 来 ((NS) 规格 4 specifications (2i〇 / .2P 公 筇) (谙 Xiange read the precautions on the back before filling in this one hundred-Q. Order 9 4 \ δ39〇 ^ 4 \ δ39〇 ^ Printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs Ⅴ. Description of the invention () An air conditioning and humidity control device is installed on the upstream side of the filter, and the relative humidity of the synthetic zeolite is 20%. The above is not easy to absorb moisture, and the humidity control is easy. [Simplified description of the drawing] Fig. 1 is a diagram illustrating the structure of a cleaning device according to Embodiment 1 of the present invention, which is schematically shown. Fig. 2 is an outline of a filter example of the present invention. Exploded and exploded view. Figure 3 is an enlarged view of a model of an adsorption layer formed by stacking a corrugated sheet and a thin sheet. Figure 4 is an enlarged view of a mode of an adsorption layer formed by a stack of a chevron sheet and a thin sheet. Figure 5 The schematic diagram of the structure of another cleaning device according to the first embodiment of the present invention is shown in outline. Fig. 6 is a schematic exploded assembly view of the filter of the second embodiment of the present invention. Fig. 7 shows an adsorption layer formed on the surface. Figure 8 is an enlarged cross-sectional view of the model of the filter. Figure 9 is an enlarged cross-sectional view of the mode of the filter. Figure 9 is an enlarged view of the mode part of the adsorption layer section of the present invention. + Figure 10 is a schematic exploded assembly view of another filter of the second embodiment of the present invention. Figure η It means the weight ratio of silicon dioxide and alumina (Si02 / Al203) and the moisture absorption amount per 100g of zeolite (25 ° c, phase 76). This paper is standard / Π 中 阀 ΒίϋSoap (c—_NS) Λ4 specification (21 〇 > ^ 97 公 没) (#Read the precautions on the back before filling this page) 'n--419390

50%). Figure 12 shows the adsorption isotherm of hydrophobic zeolite and activated carbon at 25 t: water. Fig. 13 is a schematic exploded view of a filter according to another embodiment of the present invention. Fig. 14 is a schematic enlarged sectional view of a filter in which a first adsorption layer and a second adsorption layer are formed on a surface. Fig. 15 is an enlarged partial schematic view of a cross section of a composite adsorption layer composed of a first adsorption layer and a second adsorption layer. Fig. 16 is an explanatory diagram schematically showing the structure of a cleaning device according to a second embodiment of the present invention. Figure II is a perspective view of a filter according to Embodiment 3 of the present invention, and (a) and (b) respectively show an exploded view and an assembly view. Fig. 18 is a schematic exploded assembly view of the first and second filter sections. FIG. 19 is an exploded view of another filter of Embodiment 3. FIG. FIG. 20 is an explanatory diagram of a filter according to another embodiment. Fig. 21 is an enlarged view of a part of a filter pattern in which corrugated sheets and thin sheets are stacked. Employees of the Central Bureau of Standards of the Ministry of Economic Affairs of the People's Republic of China f. (Please read the precautions on the back before filling out this page) Order Figure 22 is a partially enlarged view of a filter pattern formed by stacking of mountain-shaped sheets and thin plates. Fig. 23 shows a filter '(a) of (b) a cross section A-A and (b) of a (a) cross section B-B of another embodiment of the present invention in which the housing is filled with small balls. Figure 24 shows 77 paper rulers exposed to the air treated with chemical filters and suitable for boring; (AS) Appears to be (21 () / 297 Gong) The Ministry of Economic Affairs, the Ministry of Economic Affairs, the Ministry of Economic Affairs, the Ministry of Economic Affairs, the Ministry of Economic Affairs and the Consumers Cooperative Yin Nu repeatedly t939 05. Description of the invention () The graph of the contact angle of the wafer surface changes with time. Fig. 25 is a graph showing the relationship between the contact angle and the amount of carbon deposited according to the present invention. Fig. 26 is a graph showing a change in contact angle of a silicon wafer with an oxide film that has just been cleaned and exposed to various environments for 3 days. Figure 27 isotherm plot of the adsorption of synthetic zeolite and activated carbon by water. Fig. 28 is a graph comparing the adsorption performance of the micro-organisms which are the cause of the surface contamination of various adsorbents. Fig. 29 is a graph showing changes in relative humidity of each of a cleaning device having an adsorption layer using a hydrophobic zeolite and a cleaning device having a conventional chemical filter. FIG. 30 is a diagram illustrating the disadvantages of humidity control in the conventional technology. FIG. 31 is a graph showing the results of the experiment shown in FIG. 30. Fig. 32 is a graph showing the variation in the contact angle of the surface of a wafer exposed to the processing air using a chemical filter. Fig. 33 is an enlarged view of a pattern of the first adsorption layer and the second adsorption layer of A of the present invention. FIG. 34 is an enlarged view of a conventional adsorption layer. FIG. 35 is a schematic enlarged view of an adsorption layer of the present invention B. FIG. Fig. 36 is an enlarged view of a pattern of the first adsorption layer and the second adsorption layer of the invention C. Fig. 37 is an enlarged view of a pattern of the first adsorption layer and the second adsorption layer of Comparative Example D. Figs. Figure 38 shows the pattern of the first adsorption layer and the second adsorption layer of Comparative Example E (Please read the precautions on the back before filling this page)

'1T This paper is in the standard of Shizhou, and the standard of the home is (n \, S) Λ4 ^ grid (2 丨 0 · 〆297) 漤 Two ___ Two ___ Printed by the Industrial Standards and Consumer Cooperatives of the Ministry of Economic Affairs Description of the invention () Large picture. Fig. 39 is a graph showing the change in contact angle of a silicon wafer with an oxide film just cleaned when exposed to various environments for 3 days. Figure 40 isotherm plot of the adsorption of hydrophilic zeolite and activated carbon by water. Fig. 41 is an explanatory view of an embodiment in which the filter of the present invention is installed in a ceiling of a warehouse provided in a clean room. Fig. 42 is a diagram showing the effect of the filter of the present invention. Fig. 43 is an explanatory view of another embodiment in which the filter of the present invention is installed in a clean room air suction port of a maintenance room provided in a clean room. [Explanation of symbols] 1 Clean device 2 Processing space 3 Ceiling part 4 Under floor part 5 Return air passage 10 Fan unit η Adsorption layer 12 Particle filter 13 Clean fan unit (Please read the precautions on the back before filling this page)

This paper is suitable for Zhongzhou Minjia Standard (CNS) Λ4 specification (2! 0V297)

Claims (1)

Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 4 19390_g88 VI. Application for a patent garden 1. A clean device with a mechanism that circulates the air that has been adjusted for humidity. Its characteristics are as follows: An air-permeable filter having a zeolite; and a particle removing filter for removing particulate impurities is disposed downstream of the filter. 2. The cleaning device according to item 1 of the patent application scope, wherein the filter fixes the hydrophobic zeolite to the surface of the honeycomb structure. 3. The cleansing device according to item 2 of the scope of patent application, wherein the honeycomb structure is dried and fixed by immersing the honeycomb structure in a suspension liquid in which the zeolite powder is dispersed. 4. The cleansing device according to item 2 of the patent application, wherein the fixing uses an adhesive. 5. For the cleansing device of the scope of application i, 2, 3 or 4, the effective pore diameter of the hydrophobic zeolite is 7 angstroms or more. 6. A filter, characterized in that an inorganic substance having the property of adsorbing gaseous organic impurities and having an effective pore diameter larger than the effective pore diameter of the zeolite is used as an adhesive, and a zeolite used to remove gaseous organic impurities in the environment is fixed to The surface of the support. 7. A kind of filter 'characterized by the use of inorganic substances as adhesives'. Zeolites used to remove gaseous organic impurities in the environment are fixed on the surface of the support to form a first adsorption layer. An inorganic substance having an effective pore diameter larger than the effective pore diameter of the zeolite is fixed on the surface of the first adsorption layer to form a second adsorption layer. 8. A filter, characterized in that it has the property of adsorbing gaseous organic impurities and has an effective pore diameter greater than that of the zeolite. Inorganic 80 ______ in a paper size rule (⑽) 44 specifications ( 2i0X297 Male D (Please read the precautions on the back before filling this page) ABCD 419390 6. Scope of patent application The adhesive acts as an adhesive, so that the pellets made of zeolite used to remove gaseous organic impurities in the environment are fixed on the surface of the support. 9. A filter, characterized in that an inorganic substance is used as a binder 'to granulate zeolite used to remove gaseous organic impurities in the environment into pellets' so that the surroundings of the pellets are coated with organic impurities which adsorb gaseous impurities The spheres formed of inorganic substances with an effective pore diameter larger than the effective pore diameter of the zeolite are fixed on the surface of the support. 10. If the filter is one of the items 6, 7, 8 or 9 in the scope of patent application, wherein the wipe is a honeycomb structure. 11. A filter, characterized in that an inorganic substance having a property of adsorbing gaseous organic impurities and having an effective pore diameter larger than the effective pore diameter of the zeolite is used as a binder, and a zeolite used for removing gaseous organic impurities in the environment is granulated and The completed ball is filled into the shell. 12. A filter characterized by using inorganic substances as a binder, granulating zeolite used to remove gaseous organic impurities in the environment into pellets, and coating the pellets with adsorbed organic impurities around the pellets The spheres are formed by filling small particles of inorganic matter with an effective pore size larger than that of the zeolite. .13. The filter according to one of claims 6, 7, 8, 9, 11 or 12, in which the effective pore diameter of the zeolite is 7 angstroms or more and has the property of adsorbing organic impurities in the gas 2. The inorganic pores with an effective pore diameter greater than the effective pore diameter of the zeolite are distributed in the range of 15 to 300 angstroms, and the total volume of the pores per unit weight of the inorganic substance is more than 0.2 cc / g, or the organic impurities having adsorbed gas Nature and effective pore diameter 81 (Please read the precautions on the back before filling this page) Order Q Printed by the Consumer Cooperatives of the Central Bureau of the Ministry of Economic Affairs of the People ’s Republic of China and Tongzhou China & Standard (CNS) 8 4 Specification (ZiOxW ? Mm) Central Standards Bureau, Ministry of Economic Affairs, Co-operation and Consumption Cooperation, Du Printing 419390 II D8 6. The specific surface area of the pores of inorganic substances with a patent scope larger than the effective pore diameter of the zeolite is 100m2 / g or more. 14. The filter according to one of the items 6, 7, 8, 9, 11 or 12 in the scope of patent application, wherein the filter has the property of adsorbing the gaseous organic impurities and the effective pore diameter is larger than the effective pore diameter of the zeolite. The main component of the inorganic substance is one of a porous clay mineral, diatomaceous earth, shovel, alumina, a mixture of silica and alumina, aluminum silicate, activated alumina, porous glass, or a mixture thereof. 15. For example, in the cleansing device No. 14 of the scope of patent application, the porous 1 $ clay mineral is a ribbon-like structure of hydrous magnesium silicate clay mineral, activated white clay, acidic white clay, activated bentonite, aluminum silicate metal. One of the complexes of salt crystals and silica particles, or a mixture thereof. 16. The filter according to any one of claims 6, 7, 8 '9, 11, or 12 in the scope of patent application, wherein the inorganic substance includes an inorganic fixing auxiliary agent. 17. The cleansing device of item 16 of the patent application, wherein the inorganic fixing aid comprises at least one of silicate soda, silica, or alumina. 18. A method for manufacturing a filter, wherein, by immersing a support, a powder of zeolite used to remove gaseous organic impurities in the environment and having a property of adsorbing gaseous organic impurities and having an effective pore diameter greater than the effective fineness of the zeolite The suspension of the powder of inorganic powder dispersed as an adhesive is dried and dried to form an adsorption layer on the surface of the support. A method of manufacturing a filter, in which the support is immersed in 82 (please read the precautions on the back before filling this page) 1 < order 'This paper size is applicable to China Wide Standard (CNS) Λ4 specification (2〗 0κ29 ·? 6. Scope of patent application Sr made by the Ministry of Economic Affairs of the Central Consumer Bureau of the Consumer Consumption Cooperative Sr. Orders to disperse suspensions of powders of zeolite used to remove gaseous organic impurities in the environment and powders of inorganic substances as binders. A first adsorption layer is formed on the surface of the support. After re-immersion, the suspension having the property of adsorbing gaseous organic impurities and having an effective pore diameter larger than the effective pore diameter of the zeolite is dispersed and dispersed in the suspension, and then dried in the first adsorption A second adsorption layer is formed on the surface of the layer. 20. —A clean device, with respect to a clean device having a mechanism for circulating humidity-adjusted air, in which one of the items in the scope of patent application 6, 7, 8, 9, 11 or 12 is set in the air circulation path An item filter and a particle removal filter disposed on the downstream side of the filter to remove particulate impurities. 21. A filter, wherein 5 is arranged adjacent to the upstream side or the downstream side of a first filtering unit having a gas permeability of a synthetic zeolite, and has the property of adsorbing organic impurities of a gas and having an effective pore diameter larger than that of the synthetic zeolite. Air permeability of the inorganic sorbent with effective pore diameter. 2nd filter. 22. For example, the filter of the scope of patent application No. 21, wherein the structure of the first filtering part is to fix the synthetic zeolite on the surface of the support, and the structure of the second filtering part is to fix the inorganic adsorbent to The surface of the support. 23. The filter of claim 22, wherein the structure of the first filtering part is that the synthetic zeolite is fixed on the surface of the support by immersing the support in the suspension for dispersing the synthetic zeolite to dry. In the second pass structure, the inorganic adsorbent is fixed to the surface of the support by immersing the support in a suspension in which the inorganic adsorbent is dispersed and drying. 24. If you apply for the filter of item 22 of the patent scope, of which the first (please read the precautions on the back before filling out this page) -Q- 、 IT-. 83 ABCD Print System 419390 6. The scope of the patent application The structure of the filter unit is fixed to the support using small balls formed of powder of synthetic zeolite, and the structure of the second filter unit is fixed to the support using small balls formed of the powder of the inorganic adsorbent. Thing. 25. The filter according to item 22 of the scope of patent application, wherein a support having air permeability is divided into two regions using a boundary interface that intersects with the ventilation direction of the support as a boundary, and synthetic zeolite is used in one region. Or the small balls formed by the synthetic zeolite powder are fixed on the surface of the support to form the first filtering part. In another area, the small balls formed by the inorganic adsorbent or the powder of the inorganic adsorbent are fixed on the surface of the support. To form a second filtering section. 26. For example, if the filter of item 23 or 24 of the scope of patent application is 'wherein', the beads formed with synthetic zeolite or synthetic zeolite powder are fixed on the surface of the support, and / or inorganic adsorption is used together! Or, when the pellets formed by the powder of the inorganic adsorbent are fixed on the surface of the support, a fixing aid composed of at least one of talc, kaolin mineral, bentonite, silicate soda, silicon dioxide, or alumina is used. 27. If the filter of one of the items 21, 22, 23, 24 or 25 of the scope of the patent application is applied, wherein the inorganic adsorbent of the second filtering part is made of celestial earth, dioxide, At least one of a mixture of oxidized chopped and oxidized brocade, aluminum silicate, activated alumina, porous glass, ribbon-shaped hydrous magnesium silicate clay mineral, activated white clay, Sf white clay, and activated bentonite. 28. For the filter according to one of the items 21, 22, 23, 24, or 25 of the scope of patent application, wherein the synthetic zeolite has a diameter of 7 angstroms or more and a diameter of 7 angstroms or more, and the inorganic material in the second filtering part is inorganic. The adsorbent is distributed in 84, ___ scale scale, applicable to China National Standard (CNS) A4 specification (2IO〆297 mm) '(Please read the precautions on the back before filling this page) β4 Γ9'3 * 9Ό 6. The total volume of pores per unit weight in the range of 15 ~ 300 Angstroms for patent application is 0.2cc / g or more, or the specific surface area of pores of the inorganic adsorbent is 100m2 / g or more. 29. The filter according to any one of the scope of patent application No. 21, 22, 23, 24 or 25, wherein the support is a honeycomb structure. 30. For example, the filter according to item 21 of the scope of patent application, wherein the pellets of the synthetic zeolite are filled in a casing to form the first filtering part, and the pellets of the inorganic adsorbent are filled in another casing. To form the second filtering unit. (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs This paper applies the Chinese National Standard (CNS) A4 specification (210X297 mm)