TW414728B - Device for flushing nozzle - Google Patents

Abstract

The present invention relates to a device for flushing nozzle in which the nozzle is wrapped to be flushed by isopropanol. After cleaning with isopronanol, a flushing device is used to spray nitrogen gas (N2) for cleaning. The nozzle is connected to the bottom of a substantially vertical pipe. The device for flushing nozzle comprises a spray pipeline wrapping the pipe in a substantially coaxial way while maintaining a constant clearance with the pipe, in which the spray pipeline has a near end substantially closer to the nozzle, and a far end substantially away from the nozzle. Furthermore, the device further comprises a spray head connected to the near end of the spray pipeline, in which the spray head covers the pipe in a substantially coaxial way while maintaining a constant clearance with the pipe. The device further comprises a fluid supply assembly for providing a flushing fluid to the spray pipeline and the spray head.

Description

414728 V. Description of the invention (1) 5-1 FIELD OF THE INVENTION The present invention relates to a flushing device ', and particularly to a flushing device for flushing a semiconductor process device. 5-2 Background of the Invention Spin-On-Glass (SOG) is an important process for flattening semiconductors. The method is to coat the wafer with a chemical liquid such as OCD. This chemical liquid is easy to crystallize, so it often condenses on the nozzle (caused by contact with air). Once crystallized into particles ('particles'), the product will be scrapped if left unattended. Therefore, various factories have various methods to suppress this problem. The method used in the DNS (SCREEN) plant is to use a pot (POT) 100 as shown in the first figure. ^ The schematic diagrams of the first figure are shown in the second and third figures, respectively. Please refer to the first circle, the second figure, and the third figure. The purpose of this jar 100 is to provide a jet flushing mechanism with a jet line 106 equipped on a spin-on glass (sog) jet. Next to 104, the organic solvent of isopropyl alcohol can be regularly sprayed to clean the s0 (J nozzle 102). In principle, it seems that this problem can be solved, but long-term operation proves that it is not very effective Depressed particle production [resulting in particle error (

Page 4 414728 V. Description of the invention (2) ----

No Good; NG), often a lingering nightmare for this spin-on glass machine, has topped the list for many years. Therefore, Jobe proposes a solution here. 5-3 Object and Summary of the Invention One of the objects of the present invention is to provide a flushing device for suppressing the particle problem mentioned in the background of the invention. According to the device, its. This device is used for flushing at substantially the same distance, which is substantially away from nozzle). This device is more coaxial, and is used to cover the spray nozzle at least or the spray nozzle is connected to the spray nozzle shaft. There is a first-class injection line to improve the far end of the equipment-type covering line of the nozzle system. Background of the invention The present invention provides a flushing nozzle connected to a nozzle having a nozzle, substantially the proximal end of the device and a nozzle assembly (the nozzle pipe described in the nozzle tip but It also has the bottom line (jetpipe) of a previously vertical nozzle between which fluid is flushed, the proximal end of the nozzle between the tubes, and a jet nozzle (jet jet nozzle). Essentially at a certain interval distance. Supply assembly) Washing fluid. This kind of flushing technical problem ° 5-4 ring type simple explanation:

414728 V. Description of the invention (3) In order to make the above and other objects of the present invention more obvious and easy, only the preferred embodiments are enumerated below. The figure attached here is 'the first figure shows a conventional flushing tank, the figure shows the cross section of the flushing tank-the first figure shows the cross section of the flushing tank; the second figure shows the other two of the first flushing tank' Figure 4 shows a schematic diagram of another conventional flushing device; Figure 5 shows a schematic diagram of a fourth flushing # borrow two = ^ intent; Figure 6 shows a schematic diagram of a flushing ^ borrowing of the fourth figure The liquid column cannot be washed, so the schematic diagram of the cross section is shown in the seventh figure, and the seventh figure shows the particles on the red line. View; Washing equipment * Intentions; A better example, a new style of the eighth Qing Dynasty Figure B shows the eighth a Pavilion; the eighth figure C edge shows the impact of the eighth Figure A; schematic diagram; J is a section Schematic _ Figures 9A and 9B: Figures' are used to explain why the problem of section 2 of the flushing equipment can be obtained, and the tenth B of St. , Φρ / The drawing shows the cross-sectional schematic diagram of the flushing equipment of the eighth A ++ 丄; ^ explain why the second cause is caused by ^ washing :; the problem of the scratch + & Get

kJJafU | ft || «j · l (tB M klCMLili · r ^ lM UUkjl--HHuPi HiMiKMVMkHitku» · _____ 414728 5. Invention Description (4) To explain why the problem caused by the third cause can be solved; twelfth Figures and Thirteenth A through Thirteenth C are used to explain how the flushing fluid can be naturally accelerated; and Figures 14A and 14B show two flushings according to a preferred embodiment of the present invention. Schematic diagram of the equipment. Marking description of main parts: 100 tanks 102, 402, 802 SOG nozzles 104 SOG injectors 106 injection lines 406 '80 6 injection lines 408, 804 SOG nozzles 410 SOG injectors 410a receiving surface 410b is far away Non-receiving surface 412, 840 Flushing liquid column 80 6a Proximal end 806b Distal end 808 Jet nozzle 810 SOG injector 820 Jet assembly 830 Fluid supply assembly 832a First valve

414728 V. Description of the invention (5) 832b Preferred embodiment of the second valve 5-4 We discovered the cause of the previous technical problem, and such a discovery should be part of the subject matter of the present invention, and should be It is the part that should be taken seriously when considering the patentability of the present invention. Moreover, there is no teaching or suggestion in the prior art to use the new type of flushing equipment invented by us. Please refer to the fourth figure, we will carefully confirm the first cause of the previous technical problems. Isopropyl alcohol rinse solution for cleaning particles near the spin-on glass nozzle (SOG nozzle) 402, or other types of rinse solution, through a spray pipe equipped near the SOG pipe 408 (Jet pipe) 406 to provide. These rinsing liquids are sprayed from the side of the SOG nozzle 408 to the SOG nozzle 408 to wash particles located near the SOG jet 410, including the SOG nozzle 402. However, 'because the SOG injector 4 0 is not 100% located in the same place every time', if there is an error, it will become the fifth picture. 'Isopropyl alcohol cannot be sprayed' or a small amount is not enough to flush the particles. . In the following case, when the pressure of the pressure was unstable, the sprayed flushing liquid could not be wrapped to clean the SOG nozzle 402, resulting in poor cleaning. The particles were not removed, as shown in the sixth figure. This is the second cause of previous technical problems.

414728 V. Description of the invention (6)-The seventh figure shows a schematic diagram of the cleaning of particles near the conventional SOG injector 41 0. From the above view, the S0G injector 41 has two surfaces, one of which is the liquid receiving surface (the surface directly sprayed by the liquid column \ 41), and the other is the surface farther from the liquid column 4丨 0b. It is learned from long-term spray cleaning experience that the liquid receiving surface 410a is relatively clean 'and the other side 4i〇b is not. Therefore,' I need to design a new type of flushing equipment that can eliminate the above two conditions at the same time. Figures 8A and 8 ^ show the new invention object. Please refer to Figures 8A and 8b. This flushing device for flushing the approximately vertical sprayer 81 ° includes at least a spray assembly ( jet assembly) 820 and a fluid supply assembly 830, wherein the fluid supply assembly 830 is used to provide a flushing fluid (Γ 丨 ns ng fuiuid) to the above-mentioned jet assembly 8 2 0. The above-mentioned spray assembly 820 substantially covers the jet 810 in a coaxial manner, but there is a certain distance from the ejector 810. Here, the flushing fluid provided by the fluid supply assembly 830 is an example. For example, it can be isopropyl alcohol (IpA), argon, or both. Yes, I can first clean the ejector 810 by supplying isopropanol from this fluid supply assembly 830, and then purge this ejector 810 with nitrogen provided by the fluid supply assembly 830 to remove the outer surface of the ejector 810. The particles are shown in the eighth C. Please refer to the eighth circle A and the eighth b. The cutting area of the above-mentioned spray assembly 820 near the bottom of the ejector 810 is substantially smaller than that of the spray assembly 820.

414728 V. Description of the invention (7) The cross-sectional area at the bottom of the injector 8 10 is used to speed up the flushing liquid. The above-mentioned ejector 810 may be a spin-on-glass (SOG) ejector 810, which is used to provide a semiconductor wafer with a spin-on glass material such as a 0CD chemical liquid. The SOG injector 810 has a SOG nozzle 804 and a SOG nozzle 802 connected to the bottom of the SOG nozzle 804. Because of being exposed to the air, 'the above-mentioned chemical liquid such as OCD easily crystallizes and condenses on the outer surface of the SOG ejector 810', especially on the outer surface of the SOG nozzle 802. Still referring to FIGS. 8A and 8B, the above-mentioned injection assembly 820 may partially cover the SOG injector 810, or it may fully cover the SOG injector 810, depending on the needs of the user, and does not depend on It will deviate from the spirit of the present invention. The above-mentioned injection assembly 820 further includes at least one injection line 806, wherein the injection line 806 has a proximal end 80 6a substantially closer to the SOG nozzle 80 2, and a distal end 806 b substantially further away from the SOG nozzle 802. In addition, if the above-mentioned injection assembly 820 does not completely cover the SOG nozzle 802, the above-mentioned injection assembly 820 may include at least one injection nozzle 808 connected to the proximal end 806a of the injection line 806. The above-mentioned injection line 806 covers the SOG nozzle 804 substantially coaxially, but there is a certain distance from the SOG nozzle 804. The above-mentioned spray nozzle 808 also covers the SOG nozzle 804 substantially coaxially, but there is a certain distance from the SOG nozzle 804. The above-mentioned spray nozzle 808 is preferably arranged in the direction of the SOG nozzle 802, but do not cover the SOG nozzle 802, so as to completely flush the outer surface of the SOG nozzle 802.

Page 10 414728 V. Description of the invention (8) Even the above-mentioned injection assembly 820 is preferably connected to the SOG injector 810. For example, the distal end 806b of the injection line 806 is fixed to the SOG injector 810. Refer to Figures 9A and 9B. The flushing fluid will pass through the spray assembly connected to the SOG injector. The ninth circle a shows that the sog injector 810 is disposed at the correct position ', and the ninth b circle shows that the sog injector 810 is disposed at an incorrect position. However, even if the positioning is not correct, its injection assembly 820 series and SOG injector 810 series are on the same component, so poor positioning will not be a problem. Therefore, this design provides a solution to the prior art problems caused by the first cause. The design of the injection assembly of the present invention also provides a solution to the previous technical problems caused by the second cause "please refer to Figures 10A and + B, where Figure 10A shows that the hydraulic pressure of the flushing fluid is high, and Figure 10B shows that the flushing flow has a lower hydraulic pressure. Since the above-mentioned injection assembly 820 covers the SOG injector 8 in a coaxial manner, even if the above-mentioned flushing fluid is hydraulically unstable, it can be guaranteed that a fluid will flow through the soG nozzle 802 ^. In addition, 'because the spray assembly 820 of the present invention is packaged or mouthwashed by the SOG sprayer 810, the parties around the SOG sprayer 810 are cleaned with liquid evenly. The dirty f = 'on the other side is shown in the tenth figure. Therefore, the above-mentioned injection assembly 82G can also be solved due to the third cause. In addition to improving the original defect, the present invention has other features. Give

Page 11 414728 V. Description of the invention (9) For example, the flushing fluid flowing through the jet assembly 820 will naturally accelerate, as shown in Figure 13C. We know that when the flow rate is constant, if the area of the outlet becomes smaller, the cross-sectional flow rate will increase (think of a watering pipe, when the hand covers half of the water outlet, the flow rate will be doubled). Β This invention also uses this physical rule. As shown in Figures 12, 13A and 13B, Figures 13A and 13B are based on Figures 1 3A-1 3A and 1 3B-1, respectively. The sectional schematic diagram β shown by the 3B section line shows that the cross-sectional area of the injection assembly 820 near the bottom of the SOG injector 810 is smaller than the cross-sectional area of the injection assembly 820 near the bottom of the SOG injector 810. Please go back to Figures 8A and 8B. 'The SOG injector 810 is preferably about vertical' so as to flush the SOG injector 810 with gravity. ^ However, in addition to gravity, I can use other fluid supply assemblies 830 power to flush the SOG injector 810. Such a fluid supply assembly 830 may further include at least a first valve 832a and a second valve 832b connected in parallel, wherein the first valve 832a is controlled to provide the injection assembly 82〇 The use of isopropanol 'and the first valve 8 3 2 b is controlled' to provide the injection assembly 8 2 0 nitrogen. "When flushing is required ', the second valve 832b can be closed but the first valve 832a is opened And isopropanol was provided to flush the SOG injector 81. After the SOG ejector 81o is cleaned with isopropanol, the first shutter ⑽ may be closed and the second shutter 832b may be opened to provide a nitrogen spray to clean the SOG ejector 81o for cleaning.

Page 12 414728

V. Explanation of the invention (10) It is particularly noted that the SOG sprayer 810 of the present invention can be applied to any other object, and the impulse is not limited to one, which is beyond the spirit of the present invention, as described in the The spray assembly 8 2 0 is not limited to washing and there are particles that crystallize or collect on it. In addition, the number of injection assemblies 820 such as two or more designs can not be separated from Figure 14A and Figure 14b. -Although the present invention has been disclosed as above with preferred embodiments, it is not intended to limit the present invention. Anyone skilled in the art can make equivalent changes or modifications without departing from the spirit and scope of the present invention. Therefore, the protection scope of the present invention shall be determined by the scope of the attached patent application.

Page 13

Claims (1)

414728 Sixth, the scope of application for patent 1: Equipment for intermediate washing nozzles, where the nozzles are connected to the bottom of the vertical spraying officer. The equipment for flushing the nozzles at least includes: Coated in a coaxial manner. The nozzle, wherein the jet is guilty near a proximal end of the nozzle, and the distal end far from the nozzle f: a jet nozzle connected to the proximal end of the jet line, wherein the jet nozzle is coaxial Covering the nozzle; and a fluid supply assembly for supplying a flushing fluid to the spray line and the spray nozzle. 2. The device for flushing a nozzle as described in item 1 of the scope of the patent application, wherein the distal end of the spray line is connected to the nozzle. 3 _ The equipment for flushing nozzles as described in the first item of the patent application, wherein the nozzle and the nozzle can provide a spin-on glass material to the wafer. 4, The device for flushing nozzles according to item 1 of the scope of patent application, wherein the flushing flow system is selected from one of the groups consisting of isopropyl alcohol, nitrogen, and combinations thereof. 5. — A device for flushing a spin coating glass (sog) sprayer approximately vertical, comprising at least: — a spray assembly 'coaxially covers the spin coating glass sprayer, but with the There is a certain distance between the spin-on glass sprayers 414728 6. The scope of patent application; and the fluid supply assembly for providing a flushing fluid to the spray assembly 6. The equipment for flushing the approximately vertical spin-on glass sprayer as described in item 5 of the scope of patent application, The spray assembly includes at least a spray line and a spray head connected to the bottom of the spray line. 7: As described in item 5 of the scope of the patent application, the equipment used to flush the approximately vertical spin-on glass ejector is φ 辞 & & 乂 乂 肀 肀. The Haihong coated glass sprayer contains at least '^ 疋 coated glass nozzle and a spin coating Wuyou chain shouting, gold @ 金: a glass nozzle is connected to the spin coating type Boli range for the purpose described in item 5 A flushing approximately vertical spin-coating mr device in which the flushing flow system is selected from the group consisting of isopropanol, nitrogen, and combinations thereof _ c contains at least: the object, but with a flushing fluid 9. One use Equipment for washing an approximately vertical object, a spray assembly, substantially covering the object with a coaxial square ^ at a certain separation distance; and a fluid supply assembly to raise the spray assembly 10. If applied For flushing as described in item 9 of the patent-approximately vertical Page 15 414728 6. Equipment for applying for a patent-provided firmware, wherein the cross-sectional area of the jet assembly near the bottom of the object is smaller than the cross-sectional area of the jet assembly far from the bottom of the object. 11. An apparatus for processing an approximately vertical object as described in claim 9 of the scope of the patent application, wherein the object is a spin-on-glass (SOG) sprayer that can provide spin-on-glass material to a wafer. 12. The device for washing an approximately vertical object as described in item 11 of the scope of the patent application, wherein the spin-on glass sprayer includes at least a spin-on glass nozzle and a spin-on glass nozzle connected to the Spin-coated glass nozzle. 13. The equipment for flushing an approximately vertical object as described in item 9 of the scope of the patent application, wherein the flushing flow system is selected from the group consisting of isopropyl alcohol, nitrogen and a combination of them— ^ ' Page 16