TW408464B - Full chip electrostatic discharge protection architecture with electrostatic discharge common pathways - Google Patents
Full chip electrostatic discharge protection architecture with electrostatic discharge common pathways Download PDFInfo
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- TW408464B TW408464B TW87120017A TW87120017A TW408464B TW 408464 B TW408464 B TW 408464B TW 87120017 A TW87120017 A TW 87120017A TW 87120017 A TW87120017 A TW 87120017A TW 408464 B TW408464 B TW 408464B
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經濟部中央標隼扃負工消费合作社印裝 五、發明説明() 5-1發明領域: 本發明疋有關一種在積體電路之中的靜電放電保護電 路,特別有關於一種在積體電路之中的靜電放電共用通道 架構,作為全晶片的靜電放電保護裝置。 5-2發明背景: 在先進的超大型積體電路中,不同電路的電源線是被 分開來,以避免不同電路之間的雜訊耦合與接地反射 (ground bouncing)的問題。在現今的超大型積體電路中, 經常具有十支以上的電源腳位,以充分供應積體電路運作 所需的電能。然而,根據下列的參考資料,具有分 離電源接腳與分離電源線的積體電路,其介面電路 (interface circuit)對靜電放電損傷較為敏感,即使在電路的 輸出入墊的周圍,已設置靜電放電保護電路的情況之下, 依然會發生靜電放電損傷在介面電路上的問題。 [1] N. Maene, J. Vandenbroeck, and L. Bempt, "On chip electrostatic discharge protections for inputs, outputs,and supplies of CMOS circuits,’’ Proc. of EOS/ESD Symp., 1992, pp. 228-233.Printed by the Central Ministry of Economic Affairs and Consumers' Cooperatives. V. Description of the invention (5-1) Field of the invention: The present invention relates to an electrostatic discharge protection circuit in integrated circuits, and more particularly to an integrated circuit in integrated circuits. The ESD shared channel architecture in the device serves as a full-chip ESD protection device. 5-2 Background of the Invention: In advanced ultra large integrated circuits, the power lines of different circuits are separated to avoid problems of noise coupling and ground bouncing between different circuits. In today's very large integrated circuits, there are often more than ten power supply pins to fully supply the power required for the operation of the integrated circuits. However, according to the following reference materials, an integrated circuit with a separate power pin and a separate power line has an interface circuit that is sensitive to electrostatic discharge damage. Even around the input and output pads of the circuit, electrostatic discharge has been set up. In the case of a protective circuit, the problem of electrostatic discharge damage to the interface circuit still occurs. [1] N. Maene, J. Vandenbroeck, and L. Bempt, " On chip electrostatic discharge protections for inputs, outputs, and supplies of CMOS circuits, '' Proc. Of EOS / ESD Symp., 1992, pp. 228 -233.
[2] M.-D. Ker and T.-L. Yu, u ESD protection to overcome internal gate-oxide damage on digital-analog interface of mixed-mode CMOS IC5s,M Journal of Microelectronics and Reliability, vol.36, no. 11/12, 1996, pp.1727-1730. (請先閲讀背面之注念事項再fvr?本頁) Λ衣. 訂 本紙張尺度適用中國國家標车(CNS ) Λ4规格(210Χ:297公垃)[2] M.-D. Ker and T.-L. Yu, u ESD protection to overcome internal gate-oxide damage on digital-analog interface of mixed-mode CMOS IC5s, M Journal of Microelectronics and Reliability, vol.36, no. 11/12, 1996, pp.1727-1730. (Please read the notes on the back before fvr? This page) Λ clothing. The size of the paper is applicable to China National Standard Car (CNS) Λ4 specification (210 ×: 297) Public waste)
鯉濟部中央標準局貝工消費合作社印製 五、發明説明() [3] M.-D. Ker, C.-Y. Wu, T. Cheng, M. Wu, T.-L. Yu, and A. Wang,“Whole-chip ESD protection for CMOS VLSI/ULSI with multiple power pins,M Proc. of 1994 IEEE International Integrated Reliability Workshop, USA, 1994, pp.124-128.Printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Common Carriage, V. Invention Description () [3] M.-D. Ker, C.-Y. Wu, T. Cheng, M. Wu, T.-L. Yu, and A. Wang, "Whole-chip ESD protection for CMOS VLSI / ULSI with multiple power pins, M Proc. of 1994 IEEE International Integrated Reliability Workshop, USA, 1994, pp.124-128.
[4] M.-D. Ker, C.-Y. Wu, H.-H. Chang, and T.-S. Wu5 “Whole-chip ESD protection scheme for CMOS mixed-mode IC’s in deep-submicron CMOS technology,” Proc. of IEEE Custom Integrated Circuits Conference, USA, 1997, pp. 31-34. 靜電放電會發生在一個積體電路的任何兩個接腳之 間,靜電放電電流從輸入墊或輸出墊進入積體電路之中, 然後從另外一個輸入墊或輸出墊流出積體電路。因此,這 種接腳對接腳的靜電放電測試組合,已被列入靜電放電測 試標準[5]之中。在這種接腳對接腳的靜電放電測試組合之 下,對輸入接腳或輸出接腳施加一正或負的靜電放電電 壓,而另一個輸入接腳或輸出接腳被同時接地,但是所有 的Vdd與Vss接腳是被浮接的。在這種接腳對接腳靜電放 電的測試之下,通常會在内部電路之中造成不可預期的靜 電放電損傷。 [5] . EOS/ESD Standard for ESD Sensitivity Testing, EOS/ESD Association, Inc., NY., 1993. 為克服上述在内部電路之中所造成的不可預期的靜電 放電損傷’一些先前的設計已被提出’例如在參考資料 到[8]所報導,在積體電路的分離電源線之間,放入一組背 對背二極體串列。使用二極體元件、金氧半電晶體、雙極 接面電晶體或厚氧化矽的元件,連接於積體電路的分離電 源線之間,已被公開在數篇美國專利與論文之中,請參閱 {請先閲讀背面之注$項再填¾本頁) '裝. 訂 本紙張尺度適财11财料(CNS ) Α4·( 210X297公 ^〇8464αί _____^Β7__ 五、發明説明_ () 參考資料[9]-[16]。 [6] S. Dabral, R. Aslett, and T. Maloney, “Designing on-chip power supply coupling diodes for ESD protection and noise immunity,Proc. of EOS/ESD Symp., 1993, pp. 239-249.[4] M.-D. Ker, C.-Y. Wu, H.-H. Chang, and T.-S. Wu5 “Whole-chip ESD protection scheme for CMOS mixed-mode IC's in deep-submicron CMOS technology , "Proc. Of IEEE Custom Integrated Circuits Conference, USA, 1997, pp. 31-34. Electrostatic discharge occurs between any two pins of an integrated circuit, and the electrostatic discharge current enters the product from the input pad or output pad. It then flows out of the integrated circuit from another input pad or output pad. Therefore, this kind of pin-to-pin electrostatic discharge test combination has been included in the electrostatic discharge test standard [5]. Under this type of pin-to-pin electrostatic discharge test combination, a positive or negative electrostatic discharge voltage is applied to the input or output pin, and the other input or output pin is simultaneously grounded, but all The Vdd and Vss pins are floating. Under this kind of pin-to-pin electrostatic discharge test, it will usually cause unexpected electrostatic discharge damage in the internal circuit. [5]. EOS / ESD Standard for ESD Sensitivity Testing, EOS / ESD Association, Inc., NY., 1993. In order to overcome the above-mentioned unexpected damage caused by electrostatic discharge in the internal circuit, some previous designs have been Propose 'For example, as reported in References to [8], put a set of back-to-back diode strings between the discrete power lines of the integrated circuit. Devices that use diodes, metal-oxide semiconductors, bipolar junction transistors, or thick silicon oxide, connected between discrete power lines of integrated circuits, have been disclosed in several US patents and papers. Please refer to {Please read the note on the back before filling this page ¾ '' '. Binding. The paper size is suitable for the 11 financial materials (CNS) Α4 · (210X297 公 ^ 〇8464αί _____ ^ Β7__ V. Description of the invention_ () References [9]-[16]. [6] S. Dabral, R. Aslett, and T. Maloney, "Designing on-chip power supply coupling diodes for ESD protection and noise immunity, Proc. Of EOS / ESD Symp. , 1993, pp. 239-249.
[7] T. Maloney and S. Dabral, “Novel clamp circuits for IC power supply protection," Proc. of EOS/ESD Symp., 1995, pp. 1-12.[7] T. Maloney and S. Dabral, "Novel clamp circuits for IC power supply protection, " Proc. Of EOS / ESD Symp., 1995, pp. 1-12.
[8] H. Nguyen and J. Walker, “Electrostatic discharge protection system for mixed voltage application specific integrated circuit design,’’ US patent number 5,616,943, Apr., 1997.[8] H. Nguyen and J. Walker, “Electrostatic discharge protection system for mixed voltage application specific integrated circuit design,’ ’US patent number 5,616,943, Apr., 1997.
[9] J. Kuo, .“ESD protection scheme,” US patent number 5,196,981, Mar., 1993.[9] J. Kuo,. "ESD protection scheme," US patent number 5,196,981, Mar., 1993.
[10] J· Leach, “Method of forming an electrostatic discharge protection circuit,’’ US patent number 5,290,724, Mar,, 1994.[10] J. Leach, “Method of forming an electrostatic discharge protection circuit,’ ’US patent number 5,290,724, Mar ,, 1994.
[11] W. Miller, “Electrostatic discharge protection for CMOS integrated circuits,’’ US patent number 5,301,084, Apr., 1994.[11] W. Miller, “Electrostatic discharge protection for CMOS integrated circuits,’ ’US patent number 5,301,084, Apr., 1994.
[12] W. Reczek and H. Terletzki, ^Integrated semiconductor circuit with ESD protection,’’ US patent number 5,426,323, Jun., 1995. 經濟部中央標準局貝工消費合作社印聚[12] W. Reczek and H. Terletzki, ^ Integrated semiconductor circuit with ESD protection, ’’ US patent number 5,426,323, Jun., 1995. Printed by the Bayer Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs
{#先閱讀背面之注意事項再填寫本1IC{#Read the notes on the back before filling out this 1IC
[13] T. Maloney, “.Electrostatic discharge protection circuits using biased and terminated PNP transistor chains,,5 US patent number 5,530,612, Jun., 1996.[13] T. Maloney, ".Electrostatic discharge protection circuits using biased and terminated PNP transistor chains ,, 5 US patent number 5,530,612, Jun., 1996.
[14] S. Voldman, “Power sequence independent electrostatic discharge protection circuits,’’ US patent number 5f610,791, Mar., 1997.[14] S. Voldman, “Power sequence independent electrostatic discharge protection circuits,’ ’US patent number 5f610,791, Mar., 1997.
[15] S· Voldman» .“Voltage regulator bypass circuit,M US patent number 5,625,280, Apr., 1997. 本紙張尺度適用中國國家標率(CNS ) A4规格(210X297公楚) 五、發明説明( 4〇84β^ Α7 Β7 經濟部中央標準局負工消费合作社印製 [16] E. Worley, et al·,“Sub-micron chip ESD protection schemes which avoid avalanching junction,” Proc. of EOS/ESD Symp., 1995, pp. 13-20, 請參閱第一圖’顯示在習知技術中,靜電放電保護電 路的一種設計方式。一積體電路包含一電路I與一電路 Π ’皆為積體電路的内部電路(Internal Circuit),是需受到 靜電放電保護元件所保護。在電源線VDD1與電源線VSS1 之間,具有兩個二極體與兩個金氧半電晶體,兩個接觸墊 作為電路I的輪入墊1〇〇與輸出墊200。電源線 用以供應電路I工作所需的電源,而Vdd2與Vss2用以供應 電路π所需的電源。在第一圖的先前設計中,電源線 經由二極體串列600接往電源線Vdd2 ,電源線Vss卜經由二 極體串列500接往電源線Vss2。在二極體串列之中的二極 體數目,舆分離電源線之間的電麼位準或雜訊位準有關, 在分離電源線之間所加的二極體串列,是設計用來導通在 分離電源線之間的靜電放電電流,避免在靜電放電的情況 下,對積體電路的内部電路造成靜電放電損傷。但是,當 積體電路在正常工作情況之下’該二極體串列用以區隔在 分離電源線之pa!的電壓或雜I如果積體電路在—晶片上 具有很多個分離電源線,必須在每兩個相鄰的電源線之 間’加上背對背的二極體串列。如第二圖所示是在具有 四個内部電路的積體電路的分離電源線之間,使用背對背 二極體串列的典型例子。 請參閱第二圖’在圖中顯示出具有四組電源線的四 個 (請先閲請背面之注倉事頃再填寫本頁) ^ .裝1Τ------\ } — 5---;-- β m張尺度適财圃家縣( 6 經濟部中央標準局員工消费合作社印聚 408464 A7 _ B7 五、發明説明.(.) 電路,電路I是利用電源線VDD1與vssl供應電源,電路 Π是用電源線VDD2與VSS2供應電源,電路皿是用電源線 ν_與VSS3供應電源,電路IV是用電源線乂叩彳與VSS4供 應電源。背對背二極體串列500插入於電源線VDD1與VDD2 之間、在電源線VDD2與VDD3之間以及在電源線VDD3與VDD4 之間。背對背二極體串列500加入於電源線VSS1與VSS2之 間、在電源線VSS2與Vss3之間以及在電源線VSS3與VSS4 之間。當積體電路處於靜電放電的情況之下,這背對背二 極體串列提供分離電源線之間的靜電放電電流導通途徑。 舉一個在接腳對接腳的靜電放電的情況來說,如第二圖所 示,正靜電放電電壓加於電路I的輸入墊100,但是電路 IV的輸入墊100是相對接地。在這種接腳對接腳的靜電放 電之下,正靜電放電電壓或電流,會經過在電路I的輸入 墊100上的輸入靜電放電保護電路之中的二極體Dpi(或 Dnl) ’導入電源線VDD1 (或VSS1 )之中。此種在電源線 Vddi(或VSS1)上的靜電放電電壓/電流,經過在電源線VDD1 與VDD2 (或在電源線Vss]與VSS2之間)的二極體串列, 進入到電源線VDD2 (或VSS2)〇如第二圖所解釋的虛線所 示,靜電放電電壓或電流經過在積體電路的分離電源線之 間的二極體串列500,流到電源線VDD4 (或VSS4)。最後, 經過在輸入墊1〇〇上的輸入靜電放電保護電路的二極體 Dp4或Dn4,靜電放電電壓/電流從電路IV的接地輸入墊100 流出到地。在第二圖中,當靜電放電電流從電路IV的接地 輸入墊100流出之前,最少經過三個二極體串列。如果一 本紙張尺度適用中國國家標準(CNS ) Ad说格(210X29?公垃) (請先閲讀背面之注意事頃再填寫本頁) '裝. 訂 408464 經濟部中央標準局負工消赍合作社印製 A7 五、發明説明( ) — ' 積體電路具有許多個分離電源線,去供電給許多不同的電 路’在靜電放電電流路徑之中的二極體串列越多,將會導 致個越長的放電延遲,靜電放電電流便來不及從這些二 滅串列排放出積體電路之外,因此,靜電放電損傷,依 然會發生在該積體電路之中。所以如第一圖所示的靜電放 電保護設計,已不適用於具有多組電源線的超大型積體電 路之中。 5-3發明目的及概述: 本發明提出一種具有複數個靜電放電共用通道之全晶 片靜電放電防護架構,可以有效保護具有多組分離電源線 的積體電路,以解決積體電路因靜電放電而造成内部電路 或介面電路靜電放電損傷的問題。在本發明中,積體電路 之母一同電位之電源線皆經由一靜電放電雙向連接元件連 接到一靜電放電共用通道,每兩個具有高低電壓差的靜電 放電共用通道之間,有一靜電放電箝制電路相連接以排放 靜電放電電流。利用本發明所提出的全晶片靜電放電防護 架構,具有多組分離電源線的積體電路在靜電放電發生 時,可以經由靜電放電共用通道而提供有效的靜電放電排 放路徑,來排放靜電放電電流,因此靜電放電電流便不會 在積體電路内部到處亂竄而引起不可預期的損傷問題β當 積體電路在正常工作情形下,所加入之雙向連接元件與靜 電放電掛制電路皆保持在關閉狀態,因此不會造成分離的 本紙張尺度適用中國國家標準(CNS ) Λ4说格(210X297公垃) (請先閲讀背而之注f項再填寫本頁) -------.--7~广:裝------訂------ 經濟部中央標準局貝工消費合作社印製 A7 ____〜_!1—— ---- 五、發明説吸(.) 電源線之間的電源干擾問題。 5-4圖式簡單說明: 本發明的目的與優點,請參考下列的詳細說明,同時參 酌下列的圖式說明,其中: 第一圖係顯示利用習知技術所設計之靜電放電防護電路 的示意圖,在分離電源線之間用背對背二極體串列 相連接, 第二圖係顯示利用習知技術所設計之靜電放電防護電路 的示意圖’在多個分離電源線之間用多個背對背二 極體串列相連接,並顯示靜電放電電流的流通路 徑;, 第三圖係顯示本發明之靜電放電防護架構設計,具有兩 個靜電放電共用通道以排放靜電放電電流; 第四圖係顯示本發明在一晶片上具有複數個靜電放電共 用通道的電路示意圖,並具有複數個靜電放電雙向 連接元件,雙向連接元件連接於靜電放電共用通道 與各分離的電源線之間,在靜電放電共用通道之間 利用靜電放電箝制電路互相連接; 第五圖係顯示本發明在一積體電路中的應用示意圖,積 趙電路包括有5¥、3¥、2.5¥與〇乂電源線,並 利用四條靜電放電共用通道以達到全晶片靜電放電 防護的目的;, 第六A圖係顯示本發明之靜電放電雙向連接元件的示音 9 本ϋ尺度適用申國國家標準(~CNS ) A4规格(2丨0X297公£7 " ----— ----;--ΊΛ-kII (請先閲請背面之注土¥哏再填窍本頁) 訂 __4084^4 __ 五、發明説明() 圖,此元件是由兩個P型矽控整流器(PSCR)所 組成; 第六B圖係顯示本發明之一靜電放電雙向連接元件的剖 面示意圖,第一 P型矽控整流器與第二P型矽控整 流器被建造在P型基板之上; 第七A圖係顯示本發明之另一靜電放電雙向連接元件的 示意圖,是由第一 N型矽控整流器與第二N型矽 控整流器所組成; 第七B圖係顯示本發明之另一靜電放電雙向連接元件的 剖面示意圖,第一 N型矽控整流器與第二N型矽 控整流器被製造在P型基板之上; 經濟部中央標準局員工消費合作杜印製 {請先閱讀背面之注意事項再填寫本頁) 第八圖係顯示本發明之一靜電放電箝制電路的示意圖, 此靜電放電箝制電路係包含一靜電放電偵測電路、 數個N型金氧半電晶體控制的橫向矽控整流元件; 第九圖顯示本發明之另一靜電放電箝制電路的示意圖, 包含一靜電放電偵測電路與數個P型金氧半電晶體 控制的橫向矽控整流元件,其中P型金氧半電晶體 控的橫向矽控整流元件的閘極經由一反相器連往靜 電放電偵測電路;/ 第十圖顯示本發明之一靜電放電箝制電路的另一種實施 圖,包含一靜電放電偵測電路、數個N型金氧半電 晶體控制的橫向矽控整流元件與數個二極體,其中 N型金氧半電晶體控制的橫向矽控整流元件的閘極 連往靜電放電偵測電路;f 10 本紙張尺度適用中國國家標準(CNS ) A4規格(2丨OX 297公釐) 4〇8464 A7 -----------B7_ _ 五、發明説明_() ' 第十一圖顯示本發明之靜電放電箝制電路的另一種實施 示意圖’包含一靜電放電偵測電路、數個P型金氧 半電晶體控制的橫向矽控整流元件與數個二極體, 其中P型金氧半電晶體控制的橫向矽控整流器的閛 極經由一反相器連往靜電放電偵測電路; 第十二圖係顯示本發明之另一種應用示意圖,積體電路 具有多組電源線’但只利用一條靜電放電共用通 道’每一輸入/輸出墊片及電源線皆接有一靜電放電 雙向連接元件連接到靜電放電共用通道上,以達成 全晶片靜電放電防護的設計; 第十三圖係顯示本發明在第十二圖之中的靜電放電雙向 連接元件的示意圖,包含一二極體與數個N型5夕控 整流元件相並聯;, 第十四圖係顯示本發明在第十二圖之另一種靜電放電雙 南連接元件的示意圖,此元件包含數個二極體與數 個N型矽控整/流元件; 第十五圖係顯示本發明在第十二圖之靜電放電雙向連接 元件的示意圖,包含一個二極體與數個p型石夕控整 流器相並聯;以及, 第十六圖係顯示本發明在第十二圖之另.一種靜電放電雙 向連接元件的示意圖,此元件包含數個二極體與數 個P型矽控整流元件。/ 5_5發明詳細說明: 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公楚) (請先閱讀背面之注意事項再填寫本頁) 訂 經濟部中央樣率局貝工消#合作社印製 A7 B7 物464 五、發明説明() 本發明提出一具有複數個靜電放電共用通道的全晶片靜 電放電防護架構’以解決具有分離電源線之積體電路因靜 電放電而造成内部電路損傷的問題。由寬金屬線所形成的 多個靜電放電共用通道,被加入於一具有多個分離電源線 的積體電路之中。靜電放電雙向導通元件被用來連接於每 一分離電源線與靜電放電共用通道之間。當靜電放電出現 在一具有多個分離電源線的積體電路之中時,靜電放電電 流經由雙向連接元件被導引進入靜電放電共用通道之中, 利用本發明之靜電放電共用通道,可將靜電放電電流從積 體電路的内部電路之中導引出來,並經由所設計的靜電放 電籍制電路將靜電放電電流排放出積體電路之外。利用本 發明之具有靜電放電共用通道的全晶片靜電放電防護架 構’具有多個分離電源線的積體電路,可以有效地避免積 體電路之内部電路因靜電放電而損傷的問題,以達成全方 位的防護措施。 請參考第三圖’該積體電路具有k組電路與k組分離電 源線。電路I是利用電源線VDD1與〜⑻供應電源,電路π 是經由電源線VDI>2與vSS2供應電源,電路皿是經由vDD3與 Vsss供應電源,電路rv是經由乂即4與vSS4供應電源,電路 v是經由電源線¥仙5與vSS5供應電源,電路κ是經由電源 線Vddjc與Vss_k供應電源°電路I到K為該積體電路之内 部電路。每一内部電路經由輸入墊1〇〇接受外部傳入的電 路訊號’在輸入塾100有輸入級靜電放電防護電路,在第 本紙張尺度適用中國國家標準(CNS ) Α4说格(210Χ297&^ ) (請先閲讀背面之注意事項再填寫本更) 、裝[15] S. Voldman »." Voltage regulator bypass circuit, M US patent number 5,625,280, Apr., 1997. This paper size is applicable to China National Standard (CNS) A4 specification (210X297). 5. Description of the invention (4〇 84β ^ Α7 Β7 Printed by the Consumers ’Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs [16] E. Worley, et al.,“ Sub-micron chip ESD protection schemes which avoid avalanching junction, ”Proc. Of EOS / ESD Symp., 1995 , pp. 13-20, please refer to the first figure 'shows a design method of the electrostatic discharge protection circuit in the conventional technology. A integrated circuit includes a circuit I and a circuit Π' are both internal circuits of the integrated circuit (Internal Circuit) needs to be protected by electrostatic discharge protection elements. Between the power line VDD1 and the power line VSS1, there are two diodes and two metal-oxide semiconductors, and the two contact pads serve as the wheel of the circuit I. The input pad 100 and the output pad 200. The power cord is used to supply the power required for the circuit I to work, and Vdd2 and Vss2 are used to supply the power required by the circuit π. In the previous design of the first figure, the power cord was routed through two Polar Body Series 600 The power line Vdd2, and the power line Vss are connected to the power line Vss2 via the diode string 500. The number of diodes in the diode string separates the electrical level or noise level between the power lines. Quasi-related, the diode string added between the separated power lines is designed to conduct the electrostatic discharge current between the separated power lines to avoid causing the internal circuit of the integrated circuit in the case of electrostatic discharge Electrostatic discharge damage. However, when the integrated circuit is under normal working conditions, the diode string is used to separate the voltage or miscellaneous voltage on the separated power line pa! If the integrated circuit has many To separate power lines, a back-to-back diode string must be added between every two adjacent power lines. As shown in the second figure, it is between the separate power lines of the integrated circuit with four internal circuits A typical example of a back-to-back diode string is used. Please refer to the second picture 'showing four with four sets of power cords (please read the note on the back before filling out this page) ^. 1Τ ------ \} — 5 ---;-β m scales 6 Consumers' Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs, Printed Together 408464 A7 _ B7 V. Description of the invention. (.) Circuit, circuit I is to supply power using power lines VDD1 and vssl, and circuit Π is to supply power using power lines VDD2 and VSS2 The dish is powered by the power line ν_ and VSS3, and the circuit IV is powered by the power line 乂 叩 彳 and VSS4. The back-to-back diode series 500 is inserted between the power supply lines VDD1 and VDD2, between the power supply lines VDD2 and VDD3, and between the power supply lines VDD3 and VDD4. A back-to-back diode string 500 is added between the power supply lines VSS1 and VSS2, between the power supply lines VSS2 and Vss3, and between the power supply lines VSS3 and VSS4. When the integrated circuit is under an electrostatic discharge condition, this back-to-back diode series provides a way to separate the electrostatic discharge current conduction between the power lines. For example, as shown in the second figure, a positive electrostatic discharge voltage is applied to the input pad 100 of the circuit I, but the input pad 100 of the circuit IV is relatively grounded. Under the electrostatic discharge of this pin butt, the positive electrostatic discharge voltage or current will pass through the diode Dpi (or Dnl) in the input electrostatic discharge protection circuit on the input pad 100 of the circuit I to be introduced into the power supply. Line VDD1 (or VSS1). Such an electrostatic discharge voltage / current on the power supply line Vddi (or VSS1) passes through a diode string between the power supply lines VDD1 and VDD2 (or between the power supply lines Vss) and VSS2, and enters the power supply line VDD2 ( Or VSS2). As shown by the dotted line explained in the second figure, the electrostatic discharge voltage or current flows through the diode string 500 between the separate power supply lines of the integrated circuit and flows to the power supply line VDD4 (or VSS4). Finally, after the diode Dp4 or Dn4 of the electrostatic discharge protection circuit is input on the input pad 100, the electrostatic discharge voltage / current flows from the ground input pad 100 of the circuit IV to the ground. In the second figure, before the electrostatic discharge current flows out from the ground input pad 100 of the circuit IV, at least three diodes are passed in series. If a paper size applies the Chinese National Standard (CNS) Ad Grid (210X29? Public waste) (Please read the notes on the back before filling out this page) 'Pack. Order 408464 Central Standards Bureau, Ministry of Economic Affairs A7 is printed. 5. Description of the invention () — 'Integrated circuit has many separate power lines to supply power to many different circuits.' The more diode strings in the ESD current path, the more With a long discharge delay, it is too late for the electrostatic discharge current to be discharged out of the integrated circuit from these two extinguishing series. Therefore, electrostatic discharge damage will still occur in the integrated circuit. Therefore, the electrostatic discharge protection design shown in the first figure is no longer suitable for very large integrated circuits with multiple sets of power lines. 5-3 Purpose and summary of the invention: The present invention proposes a full-chip electrostatic discharge protection architecture with multiple electrostatic discharge common channels, which can effectively protect integrated circuits with multiple sets of separated power lines to solve the problem of integrated circuits due to electrostatic discharge. Causes electrostatic discharge damage to internal or interface circuits. In the present invention, the power line of the mother circuit of the integrated circuit is connected to an electrostatic discharge common channel through an electrostatic discharge bidirectional connection element. There is an electrostatic discharge clamp between every two electrostatic discharge common channels having high and low voltage differences. The circuits are connected to discharge static discharge current. By using the full-chip electrostatic discharge protection architecture proposed by the present invention, when an integrated circuit having multiple sets of separated power lines is used to generate an electrostatic discharge discharge path through an electrostatic discharge common channel when an electrostatic discharge occurs, an electrostatic discharge current can be discharged. Therefore, the electrostatic discharge current will not scatter around inside the integrated circuit and cause unpredictable damage. Β When the integrated circuit is under normal working conditions, the two-way connecting components and the electrostatic discharge hanging circuit are kept closed. Therefore, this paper size that does not cause separation applies to the Chinese National Standard (CNS) Λ4 grid (210X297). (Please read the note f in the back first and then fill out this page) -------.-- 7 ~ Guangzhou: Install ------ Order ------ Printed by the Shell Standard Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 ____ ~ _! 1 ---- ---- V. Inventive Suction (.) Power Problems with power interference between wires. 5-4 Schematic illustration: For the purpose and advantages of the present invention, please refer to the following detailed description, and also refer to the following schematic illustrations, where: The first diagram is a schematic diagram showing an electrostatic discharge protection circuit designed using conventional techniques The back-to-back diodes are connected in series between the separate power lines. The second diagram is a schematic diagram showing the electrostatic discharge protection circuit designed by the conventional technology. 'Use multiple back-to-back diodes between multiple separate power lines. The body is connected in series and shows the flow path of the electrostatic discharge current. The third figure shows the design of the electrostatic discharge protection structure of the present invention, which has two electrostatic discharge common channels to discharge the electrostatic discharge current. The fourth figure shows the present invention A circuit diagram of a plurality of electrostatic discharge common channels on a wafer, and a plurality of electrostatic discharge bidirectional connection elements, the two-way connection elements are connected between the electrostatic discharge common channels and the separated power lines, and between the electrostatic discharge common channels. Circuits are connected to each other by electrostatic discharge clamping; the fifth figure shows an integrated circuit of the present invention Schematic diagram of the application, JieZhao circuit includes 5 ¥, 3 ¥, 2.5 ¥ and 〇 乂 power cord, and uses four ESD common channels to achieve the purpose of full-chip ESD protection; Figure 6A shows the invention The indication of the electrostatic discharge bidirectional connection element 9 This standard is applicable to the national standard (~ CNS) A4 (2 丨 0X297) £ 7 " ----— ----; --ΊΛ-kII (please first Please read the note on the back ¥ 哏 and fill in this page) Order __4084 ^ 4 __ 5. Description of the invention () Figure, this component is composed of two P-type silicon controlled rectifiers (PSCR); The sixth B picture series A schematic cross-sectional view of an electrostatic discharge bidirectional connection element according to the present invention is shown. A first P-type silicon controlled rectifier and a second P-type silicon controlled rectifier are built on a P-type substrate; FIG. 7A shows another static electricity of the present invention. A schematic diagram of a discharge bidirectional connection element is composed of a first N-type silicon controlled rectifier and a second N-type silicon controlled rectifier. FIG. 7B is a schematic cross-sectional view showing another electrostatic discharge bidirectional connection element of the present invention. The first N Type silicon controlled rectifier and second N type silicon controlled rectifier are manufactured in P type On the substrate; printed by the consumer cooperation of the Central Bureau of Standards of the Ministry of Economic Affairs {Please read the precautions on the back before filling out this page) Figure 8 is a schematic diagram showing an electrostatic discharge clamping circuit of the present invention. This electrostatic discharge clamping circuit is It includes an electrostatic discharge detection circuit and several N-type metal-oxide-semiconductor-controlled lateral silicon-controlled rectifier elements. FIG. 9 shows a schematic diagram of another electrostatic discharge clamping circuit according to the present invention. A P-type metal-oxide-semiconductor-controlled lateral silicon-controlled rectifier element, wherein the gate of the P-type metal-oxide-semiconductor-controlled lateral silicon-controlled rectifier element is connected to an electrostatic discharge detection circuit through an inverter; / Tenth The figure shows another implementation of an electrostatic discharge clamping circuit according to the present invention, which includes an electrostatic discharge detection circuit, several N-type metal-oxide-semiconductor controlled lateral silicon-controlled rectifier elements, and several diodes, of which N-type The gate of the lateral silicon controlled rectifier controlled by the metal-oxide semiconductor transistor is connected to the electrostatic discharge detection circuit; f 10 This paper size is applicable to the Chinese National Standard (CNS) A4 specification (2 丨 OX 297) (Centi) 4〇8464 A7 ----------- B7_ _ V. Description of the invention _ () '' The eleventh figure shows another schematic diagram of the implementation of the electrostatic discharge clamping circuit of the present invention '' including an electrostatic discharge detection The test circuit, several P-type metal-oxide-semiconductor-controlled lateral silicon-controlled rectifiers and several diodes, among which the poles of the P-type metal-oxide-semiconductor-controlled lateral silicon-controlled rectifiers are connected to each other via an inverter. Electrostatic discharge detection circuit; The twelfth figure is a schematic diagram of another application of the present invention. The integrated circuit has multiple sets of power lines 'but only uses one electrostatic discharge shared channel'. Each input / output pad and power line are connected. An electrostatic discharge bidirectional connection element is connected to the electrostatic discharge common channel to achieve the design of full-chip electrostatic discharge protection. The thirteenth figure is a schematic diagram showing the electrostatic discharge two-way connection element in the twelfth figure of the present invention. The diode is connected in parallel with several N-type rectifier elements. Figure 14 is a schematic diagram showing another electrostatic discharge double south connection element of the present invention in Figure 12; the element includes several diodes. versus N-type silicon controlled rectifier / flow elements; FIG. 15 is a schematic diagram showing the electrostatic discharge bidirectional connection element of FIG. 12 of the present invention, including a diode in parallel with a plurality of p-type stone-controlled rectifiers; and The sixteenth figure is a schematic diagram showing another embodiment of the electrostatic discharge bidirectional connection element in the twelfth figure of the present invention. The element includes several diodes and several P-type silicon controlled rectifier elements. / 5_5 Detailed description of the invention: This paper size applies the Chinese National Standard (CNS) A4 specification (210X297). (Please read the notes on the back before filling this page.) Order by the Central Sample Rate Bureau of the Ministry of Economic Affairs. # 工 社 印A7 B7 464 V. Description of the invention () The present invention proposes a full-chip electrostatic discharge protection architecture with multiple electrostatic discharge common channels to solve the problem of damage to internal circuits caused by electrostatic discharge of integrated circuits with separate power lines. Multiple electrostatic discharge common channels formed by wide metal lines are added to a integrated circuit with multiple separate power lines. An electrostatic discharge bidirectional conduction element is used to connect between each separate power cord and the common path for electrostatic discharge. When an electrostatic discharge occurs in an integrated circuit having a plurality of separated power lines, the electrostatic discharge current is guided into the electrostatic discharge common channel through the two-way connection element. Using the electrostatic discharge common channel of the present invention, the electrostatic discharge The discharge current is guided from the internal circuit of the integrated circuit, and the electrostatic discharge current is discharged out of the integrated circuit through the designed electrostatic discharge registration circuit. By using the full-chip electrostatic discharge protection architecture of the present invention with a common channel for electrostatic discharge, the integrated circuit with multiple separated power lines can effectively avoid the problem of damage to the internal circuits of the integrated circuit due to electrostatic discharge, so as to achieve a full range Protective measures. Please refer to the third figure 'The integrated circuit has k sets of circuits and k sets of separated power lines. Circuit I supplies power using power lines VDD1 and ~ ⑻, circuit π supplies power through power lines VDI> 2 and vSS2, circuit board supplies power through vDD3 and Vsss, and circuit rv supplies power through 乂 4 and vSS4. The circuit v is the power supply through the power line ¥ 5 and vSS5, and the circuit κ is the power supply through the power lines Vddjc and Vss_k. The circuits I to K are the internal circuits of the integrated circuit. Each internal circuit accepts external incoming circuit signals via the input pad 100. There is an input-level electrostatic discharge protection circuit at the input 塾 100, and the Chinese National Standard (CNS) Α4 standard (210 × 297 & ^) is applied to the paper standard. (Please read the precautions on the back before filling in this change)
、1T 經濟部中央標準局貝工消費合作社印製 Λ 7 B7 -------—--------- 五、發明説明() 三圖中,該輸入級靜電放電電路是由—二極體Dpi與另一 二極體Dnl所組成,在輸入墊與内部電路之間有—電 阻R1(R2,…,或R_k)連接β母一内部電路經由輸出塾2〇〇 送出電路訊號’輸塾200是由一互補式金氧半輪出緩衝 級(CMOS output buffer)所推動,包括有一 pm〇S 與一 NM0S,輸出級的PM0S與NMOS也充當輸出級的靜電放 電防護電路。 經濟部中央標隼局員工消費合作社印裝 (請先閱讀背面之注含亊項再坑寫本頁} k组分離的電源線經由複數個靜電放電雙向連接元件A 而連接到第一靜電放電共用通道或第二靜電放電共用通 道,以提供靜電放電發生時的放電電流路徑。靜電放電雙 向連接元件A連接每一個積體電路的電源線Vdd與第一靜 電放電共用通道,靜電放電雙向連接元件A連接於電源線 Vss與第二靜電放電共用通道之間。在電路K之中,電源線 VDDJc經由靜電放電雙向連接元件A,連接到第一靜電放電 共用通道’同時電源線VSSJc經由靜電放電雙向連接元件A, 連接到第一靜電放電共用通道。在具有分離電源線之積體 電路中’所有内部電路的VDD電源線,經由靜電放電雙向 連接元件A ’連接到第一靜電放電共用通道,所有内部電 路的電源線Vss,經由靜電放電線雙向連接元件a連接到第 二靜電放電共用通道。不同於第一圖的先前設計,靜電放 電雙向連接元件A從分離電源線連接第一靜電放電共用通 道或第二靜電放電共用通道。第一靜電放電共用通道與第 二靜電放電共用通道是由具有高導電率的寬金屬線所組 成。在第一靜電放電共用通道與第二靜電放電共用通道之 ____13 兩尺度適用 --- 經濟部中央標準局貝工消費合作社印製 A7 -------Β7 五、發明説明_( ) 間’具有數個靜電放電箝制電路Β。在靜電放電發生時, 靜電放電箝制電路會在第一與第二靜電放電共用通道之間 形成一個通路’以排玫跨在其間的靜電放電電壓/電流;但 當積體電路在正常工作情形下,靜電放電箝制電路是在關 閉的狀態’以阻絕第一靜電放電共用通道與第二靜電放電 共用通道之間的通路’因而可以避免不同電壓準位之電源 線間的電壓干擾問題。 在第三圖中’因為第一靜電放電共用通道接往積體電路 的所有VDD電源線’當積體電路在正常操作的情況下,第 一靜電放電共用通道之上的電壓位準被充電到與積體電路 VDD的電壓位準一樣。第二靜電放電共兩通道接往積體電路 的Vss電源線,當積體電路在正常的操作情況之下,第二靜 電放電共用通道的電壓位準,被充電到積體電路Vss的電壓 位準。在第一靜電放電共用通道與第二靜電放電共用通道 之間的靜電放電箝制電路B,當積體電路在正常的操作狀 況之下,被設計保持在關閉狀態。因此,從第一靜電放電 共用通道到第二靜電放電共用通道之間沒有電流漏失。在 第三圖之中所設計的第一靜電放電共用通道、第二靜電放 電共用通道、靜電放電雙向連接元件A與靜電放電箝制電 路B,不會影響具有多個分離電源線之積體電路的正常操 作功能。 但是’當積體電路在靜電放電情況之下,第三圖所設計 的第一靜電放電共用通道、第二靜電放電共用通道、靜電 放電雙向連接元件與靜電放電箝制電路元件,可以提供一 本紙張尺度適用中國囤家標芈(CNS ) Λ4規格(210X297公釐) (讀先聞讀背而之注意事項再填寫本頁) '裝· 訂 經濟部中央標準局貝工消費合作社印製 ^08464 a? B7 五、發明説明() 種高導電的放電路徑,快速將靜電放電電流從具有數個分 離電源線的積體電路之中導出,因此,内部電路與介面電 路不會因靜電放電而意外地被破壞β舉例來說,如第三圖 所示,當一正的靜電放電電壓被加入於電路I的輸入塾1〇〇 之上’而電路Κ的輸入墊100是相對接地的,靜電放電電 流會經過電路I之輸入級靜電放電保護電路的二極體Dpl, 而被導入電源線VDD1之中,在電源線vDD1上的靜電放電電 流’經過靜電放電雙向連接元件A,而被導入第一靜電放 電共用通道之中,然後靜電放電電流經由在第一靜電放電 共用通道與第二靜電放電共用通道之間的靜電放電箝制電 路B’而放電到第二靜電放電共用通道。第二靜電放電共 用通道上的靜電放電電流,再經由靜電放電雙向連接元件 A,而被導入電路K的電源線yssk之中,最後,在電源線 Vss_k上的靜電放電電流,經由電路κ的輸入級靜電放電保 護電路之二極體Dn一k而放電到接地的輸入墊100。所以, 靜電放電電流是經由所設計的靜電放電雙向連接元件A, 第一靜電放電共用通道與第二靜電放電共用通道,以及靜 電放電箝制電路B形成的放電通路而排放掉,即使此積體 電路具有許多個分離電源線,也不會造成内部電路或介面 電路間有意外的靜電放電損傷的問題。因為靜電放電雙向 連接/0件A ’在分離電源線與靜電放電共用通道之間,提 供數個高導電的路徑’靜電放電電流可從積體電路的輸入 墊1〇〇或輸出墊200,被迅速導入到靜電放電共用通道,因 而靜電放電電流可遠離内部電路,也就不會在内部電路上 ___ 15 本紙張尺度適用中國國家標準(CNS〉Λ4規格(2丨0>^^^—----- (請先閱馈背面之注念亊項rl·^寫本玨) - - - —fl^i ^^^^1 ^^^^1 _ - _ .....m^i , ^f El _· 訂 4〇^4β4 ΑΊ J Β7 五、發明説明() 造成損傷。由寬金屬線所組成的靜電放電共用通道,可以 迅速排放在晶片上的靜電放電電流。為增強靜電放電電流 在積體電路中的排放速度,需要快速導通的靜電放電箝制 電路B,將靜電放電電流從第一靜電放電共用通道排放至 第二靜電放電共用通道,在下列的說明之中,將提出快速 導通的靜電放電箝制電路的各種設計。總結來說,所提出 具有靜電放電共用通道的全晶片靜電放電防護架構,可以 為具有多個分離電源線的積體電路,提供更有效且快速的 靜電放電路徑,因而可以避免靜電放電損傷發生在内部電 路中的問題" 經濟部中央標隼局!工消費合作社印製 (請先閱讀背面之注意事項再填寫本頁) 具有靜電放電共用通道的全晶片靜電放電防護架構,亦 可適用於具有混合電壓電源供應的積體電路上。如第四圖 所顯示的電路設計,此積體電路具有兩群組電路。一群組 電路具有低VDD電源供應(VddLI,VDDL2與"VdDL3)與低Vss電 源供應(VSSL1、VsSL2與VsSL3 ),另外一群組電路的電源線 為尚VDD電源線(V"ddh4、Vddhs、…與Vddh_1c),與奇Vss電 源線(VsSH4、VsSH5、…與VssH_k)。在化種複雜的電源情況之 下,三條靜電放電共用通道被用來作為全晶片靜電放電保 護設計。如第四圖所示,第一靜電放電共用通道經由靜電 放電雙向連接元件A,連接到低VDD電源線(VDDL1、VDDL2 與Vddu)。第三靜電放電共用通道經由靜電放電雙向連接 元件A,連接到1¾ VDD電源線(VDDH4、VddHS、…與VdDHJc)。 因為vss電源線都接地,第二靜電放電共用通道經由靜電放 電雙向連接元件A,接往兩群組電路的所有Vss電源線 本紙張尺度適用中國國家標隼(CNS ) A4規格(210X297公釐) 經濟部中央標準局貝工消費合作社印製 ^〇S464 A7 - B7 五、發明説明_ () (VsSLl、V SSL2、VSSL3 ' VSSH4 、VSSH5、…與VSSH_k)。為快速 排放在第一靜電放電共用通道、第二靜電放電共用通道與 第三靜電放電共用通道之間的靜電放電電流,三個快速導 通的靜電放電箝制電路B被放置在靜電放電共用通道之 間。靜電放電箝制電路B,當積體電路在正常操作情況之 下,被設計具有一高阻抗狀態以阻隔在靜電放電共用通道 之間的電流通路。但是,靜電放電箝制電路B,當積體電 路在靜電放電情形之下,可在靜電放電共用通道之間形成 一低阻抗的通路,以快速排放靜電放電電流。透過適當的 電路設計,可設計出這特殊的靜電放電箝制電路B,這將 在下列的說明之中敘述。利用第四圖所述的三俩靜電放電 共用通道所形成的全晶片靜電放電防護架構,依然可以有 效地保護具有混合電壓與分離電源線的積體電路。 為具有許多混合電壓電源供應的積體電路,所提出具有 靜電放電共用通道的全晶片靜電放電防護架構,可以被延 伸用來保護具有多種且複雜電源的積體電路。如第五圖所 示的實施例,顯示出具有三種VDD電源供應(2,5V、3V與5V) 的積體電路。在第五圖之中,2.5伏特VDD電源是供應電路 I與電路Π,但是電路ΠΙ與電路IV的電源供應是3伏特VDD 電源,電路V到電路K的電源供應是5伏特的VDD電源, 從電路I到電路K的Vss電源供應是0伏特。在上述的積 體電路之中,具有很複雜的電源供應,四條靜電放電共用 通道被用以來設計第五圖所示的全晶片靜電放電防護架 構。請參閱第五圖,第一靜電放電共用通道經由靜電放電 本紙張尺度適用中國國家標隼(CNS ) Α4規格(210Χ297公犛) (请先閲请背面之注念事項再填寫本頁) ,丨裝_ 訂 經濟部中央標準局貝工消費合作社印製 A7 B7 五、發明説明.() 雙向連接元件A,連接至電路I與電路Π的乂00_2.^電源線。 第四靜電放電共用通道經由雙向靜電放電雙向連接元件, 連接至電路皿與電路IV的VDD_3V電源線。第三靜電放電共 用通道經由靜電放電雙向連接元件,連接至電路V到電路 K的VDD_5V的電源線。因為在各電路間的Vss電源線都接 地,所以第二靜電放電共用通道經由靜電放電雙向連接元 件,連接至所有的VSs_ov電源線。在靜電放電共用通道之 間,五個靜電放電箝制電路B,用以連接第一靜電放電共 用通道、第二靜電放電共用通道、第三靜電放電共用通道 與第四靜電放電共用通道《經由上述的適當設計,依然可 以對具有許多混合電壓電源供應的積體電路,提出具有靜 電放電共用通道的全晶片靜電放電防護設計。 請參閱第六A圖與第七A圖,顯示靜電放電雙向連接 元件A的電路設計與元件結構,連接於VDD或Vss電源線 至靜電放電共用通道之間。請參考第六A圖,靜電放電雙 向連接元件A是利用兩個P型矽控整流元件(PSCR1與 PSCR2)導通,以提供一種在靜電放電共用通道與VDD (或 Vss)之間的雙向電流導通路徑。PSCR1的陽極接往PSCR2 的陰極與靜電放電共用通道,PSCR1的陰極接往PSCR2的 陽極,並接往VDD或Vss電源線,PSCR1與PSCR2的閘極 分別接往PSCR1與PSCR2元件的陰極。 請參閱第六A圖,當在靜電放電共用通道對VDD (或 Vss)電源線的電壓差,大於P通道金氧半電晶體的臨界電 壓,PSCR1被引發導通,提供一個在靜電放電共用通道與 本紙張尺度適用中國國家標準(CNS ) A4規格(210X297公尨) 赛· "-3 <請先閱讀背面之注意事項再坑寫本頁)1, 1T Printed by Shelley Consumer Cooperative, Central Standards Bureau of the Ministry of Economic Affairs Λ 7 B7 ------------------- V. Description of the invention () In the three figures, the input stage electrostatic discharge circuit is It consists of-diode Dpi and another diode Dnl. Between the input pad and the internal circuit there is-a resistor R1 (R2, ..., or R_k) connected to the β female-an internal circuit is sent out through the output 塾 200 The signal 'input 200 is driven by a complementary CMOS output buffer stage (CMOS output buffer), which includes a pMOS and an NMOS, and the PMOS and NMOS of the output stage also serve as the electrostatic discharge protection circuit of the output stage. Printed by the Employees ’Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs (please read the note on the back with the item before writing this page) k sets of separated power cords are connected to the first electrostatic discharge sharing via a plurality of electrostatic discharge bidirectional connection elements A Channel or the second electrostatic discharge shared channel to provide a discharge current path when an electrostatic discharge occurs. The electrostatic discharge bidirectional connection element A connects the power line Vdd of each integrated circuit with the first electrostatic discharge shared channel, and the electrostatic discharge bidirectional connection element A Connected between the power line Vss and the second electrostatic discharge common channel. In the circuit K, the power line VDDJc is connected to the first electrostatic discharge common channel via the electrostatic discharge bidirectional connection element A, and the power line VSSJc is bidirectionally connected via electrostatic discharge Element A is connected to the first electrostatic discharge common channel. In the integrated circuit having separate power lines, 'the VDD power lines of all internal circuits are connected to the first electrostatic discharge common channel via the electrostatic discharge bidirectional connection element A', all internal The power supply line Vss of the circuit is connected to the second electrostatic discharge via the electrostatic discharge line bidirectional connection element a Common channel. Unlike the previous design of the first figure, the electrostatic discharge bidirectional connection element A connects the first electrostatic discharge common channel or the second electrostatic discharge common channel from a separate power line. The first electrostatic discharge common channel and the second electrostatic discharge common channel It is composed of wide metal wires with high electrical conductivity. It is applicable to ____13 two scales of the first and second common channels for electrostatic discharge --- A7 printed by the Bayer Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs- ----- B7 V. Description of the invention _ () 'has several electrostatic discharge clamping circuits B. When an electrostatic discharge occurs, the electrostatic discharge clamping circuit will form a path between the first and second electrostatic discharge common channels. 'Electrostatic discharge voltage / current across the row; but when the integrated circuit is under normal operating conditions, the electrostatic discharge clamping circuit is closed' to prevent the first electrostatic discharge common channel and the second electrostatic discharge common channel The path between them can thus avoid the problem of voltage interference between power lines with different voltage levels. In the third figure, 'because the first static The discharge common channel is connected to all VDD power lines of the integrated circuit. 'When the integrated circuit is in normal operation, the voltage level above the first electrostatic discharge shared channel is charged to the same level as the integrated circuit VDD voltage level. The second electrostatic discharge has two channels connected to the Vss power line of the integrated circuit. When the integrated circuit is under normal operating conditions, the voltage level of the second electrostatic discharge shared channel is charged to the voltage of the integrated circuit Vss. Level. The electrostatic discharge clamping circuit B between the first electrostatic discharge common channel and the second electrostatic discharge common channel is designed to remain closed when the integrated circuit is under normal operating conditions. Therefore, from the first There is no current leakage from the electrostatic discharge common channel to the second electrostatic discharge common channel. The first electrostatic discharge common channel, the second electrostatic discharge common channel, the electrostatic discharge bidirectional connection element A and the electrostatic discharge clamp are designed in the third figure. Circuit B does not affect the normal operating function of the integrated circuit with multiple separate power lines. However, when the integrated circuit is under electrostatic discharge, the first electrostatic discharge common channel, the second electrostatic discharge common channel, the electrostatic discharge bidirectional connection element and the electrostatic discharge clamp circuit element designed in the third figure can provide a paper Standards are applicable to Chinese storehouse standard (CNS) Λ4 specification (210X297 mm) (read first and then read the back of the matter before filling out this page) 'Booking and order printed by the Shell Standard Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs ^ 08464 a B7 V. Description of the invention () A kind of highly conductive discharge path, which can quickly derive the electrostatic discharge current from the integrated circuit with several separated power lines, so the internal circuit and interface circuit will not be accidentally caused by electrostatic discharge. For example, as shown in the third figure, when a positive electrostatic discharge voltage is added to the input "100" of the circuit I and the input pad 100 of the circuit K is relatively grounded, the electrostatic discharge current is Will pass through the diode Dpl of the input stage electrostatic discharge protection circuit of circuit I, and will be introduced into the power line VDD1, and the electrostatic discharge current on the power line vDD1 will pass through the electrostatic discharge The element A is bidirectionally connected and is introduced into the first electrostatic discharge common channel, and then the electrostatic discharge current is discharged to the second via the electrostatic discharge clamping circuit B ′ between the first electrostatic discharge common channel and the second electrostatic discharge common channel. Common channel for electrostatic discharge. The electrostatic discharge current on the second electrostatic discharge common channel is introduced into the power line yssk of the circuit K through the electrostatic discharge bidirectional connection element A. Finally, the electrostatic discharge current on the power line Vss_k is input through the circuit κ The diode Dn-k of the first-level electrostatic discharge protection circuit is discharged to the grounded input pad 100. Therefore, the electrostatic discharge current is discharged through the designed electrostatic discharge bidirectional connection element A, the first electrostatic discharge common channel and the second electrostatic discharge common channel, and the discharge path formed by the electrostatic discharge clamping circuit B, even if the integrated circuit With many separate power cords, it does not cause accidental electrostatic discharge damage between internal circuits or interface circuits. Because the ESD bidirectional connection / 0 piece A 'provides several highly conductive paths between the separated power cord and the ESD common channel', the ESD current can be input from the integrated circuit's input pad 100 or output pad 200, Quickly introduced to the common channel of electrostatic discharge, so the electrostatic discharge current can be far away from the internal circuit, so it will not be on the internal circuit ___ 15 This paper size applies to Chinese national standards (CNS> Λ4 specifications (2 丨 0 > ^^^- ---- (Please read the note on the back of the feed item rl · ^ 写 本 先)----fl ^ i ^^^^ 1 ^^^^ 1 _-_ ..... m ^ i, ^ f El _ · Order 4〇 ^ 4β4 ΑΊ J Β7 V. Description of the invention () Causes damage. The common channel for electrostatic discharge composed of wide metal wires can quickly discharge the electrostatic discharge current on the wafer. To enhance the electrostatic discharge current The discharge speed in the integrated circuit requires a fast conducting electrostatic discharge clamping circuit B to discharge the electrostatic discharge current from the first electrostatic discharge common channel to the second electrostatic discharge common channel. In the following description, a fast conduction will be proposed Various designs of electrostatic discharge clamping circuits. In summary, the proposed full-chip electrostatic discharge protection architecture with a common channel for electrostatic discharge can provide a more efficient and fast electrostatic discharge path for integrated circuits with multiple separated power lines, thus preventing electrostatic discharge damage from occurring in the Problems in Internal Circuits " Central Standards Bureau of the Ministry of Economic Affairs! Printed by the Industrial and Consumer Cooperatives (please read the precautions on the back before filling out this page). Full-chip electrostatic discharge protection architecture with a common channel for electrostatic discharge can also be applied. On the integrated circuit of mixed voltage power supply. As shown in the circuit design of the fourth figure, this integrated circuit has two groups of circuits. One group of circuits has low VDD power supply (VddLI, VDDL2 and " VdDL3) and low Vss power supply (VSSL1, VsSL2 and VsSL3), the power lines of the other group of circuits are still VDD power lines (V " ddh4, Vddhs, ... and Vddh_1c), and odd Vss power lines (VsSH4, VsSH5, ... and VssH_k) In the case of complex power supplies, three common ESD channels are used as a full-chip ESD protection design. As shown in Figure 4 The first ESD common channel is connected to the low VDD power supply line (VDDL1, VDDL2, and Vddu) via the electrostatic discharge bidirectional connection element A. The third electrostatic discharge common channel is connected to the 1¾ VDD power supply line via the electrostatic discharge bidirectional connection element A ( VDDH4, VddHS, ... and VdDHJc). Because the vss power lines are all grounded, the second ESD common channel is connected to all Vss power lines of the two groups of circuits via the electrostatic discharge bidirectional connection element A. This paper is in accordance with Chinese national standards ( CNS) A4 specification (210X297 mm) Printed by the Shellfish Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs ^ 〇S464 A7-B7 V. Description of the invention _ () (VsSLl, V SSL2, VSSL3 'VSSH4, VSSH5, ... and VSSH_k). In order to quickly discharge the electrostatic discharge current between the first electrostatic discharge common channel, the second electrostatic discharge common channel, and the third electrostatic discharge common channel, three fast conducting electrostatic discharge clamping circuits B are placed between the electrostatic discharge common channels. . The electrostatic discharge clamping circuit B is designed to have a high-impedance state to block the current path between the electrostatic discharge common channels when the integrated circuit is under normal operating conditions. However, the electrostatic discharge clamping circuit B can form a low-impedance path between the electrostatic discharge common channels when the integrated circuit is in an electrostatic discharge situation, so as to quickly discharge the electrostatic discharge current. With proper circuit design, this special electrostatic discharge clamp circuit B can be designed, which will be described in the following description. The full-chip ESD protection architecture formed by the three ESD shared channels described in the fourth figure can still effectively protect integrated circuits with mixed voltages and separate power lines. For integrated circuits with many mixed voltage power supplies, the proposed full-chip ESD protection architecture with a common channel for electrostatic discharge can be extended to protect integrated circuits with multiple and complex power sources. The embodiment shown in the fifth figure shows an integrated circuit with three VDD power supplies (2, 5V, 3V, and 5V). In the fifth figure, the 2.5-volt VDD power supply is for circuit I and circuit Π, but the power supply for circuit II and circuit IV is 3 volt VDD power, and the power supply for circuit V to circuit K is 5 volt VDD power. The Vss power supply from Circuit I to Circuit K is 0 Volts. In the above integrated circuit, there is a very complicated power supply. Since the four ESD common channels are used, the full-chip ESD protection structure shown in the fifth figure is designed. Please refer to the fifth picture, the first common channel for electrostatic discharge via electrostatic discharge. The paper size applies to the Chinese National Standard (CNS) A4 specification (210 × 297 cm) (please read the notes on the back before filling this page), 丨Assembly _ printed by the Central Standards Bureau of the Ministry of Economic Affairs, printed by Aigong Consumer Cooperative A7 B7 5. Description of the invention. () A two-way connection element A is connected to the 电路 00_2. ^ Power line of the circuit I and the circuit Π. The fourth electrostatic discharge common channel is connected to the VDD_3V power line of the circuit board and the circuit IV through a two-way electrostatic discharge bidirectional connection element. The third electrostatic discharge common channel is connected to the VDD_5V power line of the circuit V to the circuit K through the electrostatic discharge bidirectional connection element. Because the Vss power lines between the circuits are grounded, the second ESD common channel is connected to all VSs_ov power lines via the ESD bidirectional connection element. Between the electrostatic discharge common channels, five electrostatic discharge clamping circuits B are used to connect the first electrostatic discharge common channel, the second electrostatic discharge common channel, the third electrostatic discharge common channel, and the fourth electrostatic discharge common channel. With proper design, a full-chip electrostatic discharge protection design with a common channel for electrostatic discharge can still be proposed for integrated circuits with many mixed voltage power supplies. Please refer to Figures 6A and 7A, which show the electrostatic discharge bidirectional connection. The circuit design and component structure of component A are connected between the VDD or Vss power supply line and the common channel for electrostatic discharge. Please refer to the sixth diagram A. The electrostatic discharge bidirectional connection element A is connected by two P-type silicon controlled rectifier elements (PSCR1 and PSCR2) to provide a bidirectional current conduction between the electrostatic discharge common channel and VDD (or Vss). path. The anode of PSCR1 is connected to the cathode of PSCR2 and the common channel for electrostatic discharge. The cathode of PSCR1 is connected to the anode of PSCR2 and connected to the VDD or Vss power line. The gates of PSCR1 and PSCR2 are connected to the cathodes of PSCR1 and PSCR2, respectively. Refer to Figure 6A. When the voltage difference between the ESD shared channel and the VDD (or Vss) power line is greater than the critical voltage of the P channel metal-oxide semiconductor transistor, PSCR1 is triggered to conduct, providing a common channel between the ESD shared channel and This paper size applies to Chinese National Standard (CNS) A4 specification (210X297 cm). &Quot; -3 < Please read the precautions on the back before writing this page)
經濟部中央標準局员工消费合作社印製 4〇^4β! 、 Α7 --- -------------Β7 一 五、發明説明( ) ' vDD (或vss)電源線之間的低阻抗路徑。另一方面,如果 從電源線VD“或VSS)到靜電放電共用通道的電壓差,大 於P型金氧半電晶體的臨界電壓,psCR2將被引發導通, 提供-個在靜電放電共用通道與K或Vss)電源線之間 的低阻抗路#:,將提供—個在靜電放電共用通道與V⑽(或 vss)電源線之間的雙向電流導通路徑,達到全晶片靜電放 電保護設計。請參閱第六B圖,顯示一個靜電放電雙向連 接元件A被製造在P型基板的剖面圖。 請參閱第七A圖’另一種靜電放電雙向連接元件a由 兩個N型梦控整流元件(N_type siiic〇n e〇ntr〇ued rectifier,NSCR)元件所組成(NSCR1與NSCR2) ’在靜電放 電共用通道與VDD (或Vss)電源線之間,提供一種雙向導 通路徑。NSCR1的陽極接往NSCR2的陰極,並接往Vss或 VDD電源線,NSCR1的陰極接往NSCR2的陽極並接往靜電 放電共用通道》NSCR1與NSCR2元件的閘極,分別接往 NSCR1與NSCR2元件的陽極。請參閲第七b圖,顯示靜 電放電雙向連接元件A的剖面圖,由NSCR1與NSCR2所 組成的靜電放電雙向連接元件,被製造在P型基板之上。 在第七A圖之中,如果從靜電放電共用通道到VDD (或 Vss)電源線的的電壓差,大於N通道金氧半電晶體的臨界 電壓,NSCR2將會被引發導通,提供一個在靜電放電共用 通道與VDD(或Vss)電源線之間的低阻抗路徑。另一方面, 從VDD(或Vss)電源線到靜電放電共用通道之間的電壓差, 大於N通道金氧半電晶體的臨界電壓,NSCR1將會被引發 19 (請先閱讀背面之注意事項再填寫本頁)Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs 4〇 ^ 4β !, Α7 --- ------------- B7 15. Description of Invention () 'vDD (or vss) power cord Between low impedance paths. On the other hand, if the voltage difference from the power line VD "or VSS) to the electrostatic discharge common channel is greater than the critical voltage of the P-type metal-oxide semiconductor transistor, psCR2 will be turned on, providing a Or Vss) low-impedance circuit # between power lines: will provide a two-way current conduction path between the electrostatic discharge common channel and the V⑽ (or vss) power line to achieve full-chip electrostatic discharge protection design. See page Fig. 6B shows a cross-sectional view of an electrostatic discharge bidirectional connection element A fabricated on a P-type substrate. See Fig. 7A 'Another electrostatic discharge bidirectional connection element a is composed of two N-type dream-control rectifier elements (N_type siiic. ne〇ntr〇ued rectifier (NSCR) components (NSCR1 and NSCR2) 'Provide a two-way conduction path between the electrostatic discharge common channel and the VDD (or Vss) power line. The anode of NSCR1 is connected to the cathode of NSCR2, and Connected to the Vss or VDD power line, the cathode of NSCR1 is connected to the anode of NSCR2 and connected to the common channel for electrostatic discharge. The gates of NSCR1 and NSCR2 components are connected to the anodes of NSCR1 and NSCR2 components. See also Figure 7b shows a cross-sectional view of the electrostatic discharge bidirectional connection element A. The electrostatic discharge bidirectional connection element composed of NSCR1 and NSCR2 is manufactured on the P-type substrate. In the seventh diagram A, if it is shared from electrostatic discharge The voltage difference between the channel and the VDD (or Vss) power line is greater than the critical voltage of the N-channel metal-oxide semiconductor transistor. NSCR2 will be triggered to conduct electricity, providing a path between the ESD shared channel and the VDD (or Vss) power line. Low impedance path. On the other hand, the voltage difference from the VDD (or Vss) power line to the ESD shared channel is greater than the critical voltage of the N-channel metal-oxide semiconductor transistor, NSCR1 will be triggered 19 (Please read first (Notes on the back then fill out this page)
、1T 氏張尺度適用中國國家楹輋(CNS)A4規格(210X297公殓) ^ 經濟部中央標率局貝工消費合作社印製 4〇8464 A7 B7 五、發明説明() 導通,提供一個在靜電放電共用通道與vDD (或vss)電源 線之間的低阻抗路徑。這提供一種在靜電放電共用通道與 vDD (或vss)電源線之間的雙向導通路徑,達到全晶片靜 電放電保護設計的目的。請參閱第七B圖,顯示在第七A 圖中的靜電放電雙向連接元件A的剖面圖。靜電放電雙向 連接元件A是由NSCR1與NSCR2所組成,而且被製造在 P型基板之上。 位於不同電壓位準的靜電放電共用通道之間的靜電放電 箝制電路B,被顯示於第八圖與第九圖之中。靜電放電箝 制電路B是當積體電路處於靜電放電壓力情況之下,提供 一個從高電壓靜電放電共用通道到低電壓靜電放電共用通 道的導電路徑。但是當積體電路在正常操作情況之下,靜 電放電箝制電路B必須保持關閉,以阻隔在高電壓靜電放 電共用通道與低電壓靜電放電共用通道的電流路徑。為達 到上述的需求,有關快速導通之靜電放電箝制電路B的實 際設計,被顯示在第八圖之中。請參閱第八圖,複數個N 通道金氧半電晶體控制之橫向矽控整流元件(NMOS-controlled lateral silicon controlled rectifier, NCLSCR),以串歹ij方式形成在高電壓靜電放電共用通道與 低電壓靜電放電共用通道之間。NCLSCR串列元件包含 NCLSCR1到NCLSCRn,這些NCLSCR元件全部串聯耦合 在一起,陽極接往高電壓靜電放電共用通道,陰極接往低 電壓靜電放電共用通道,一個靜電放電偵測電路B11控制 所有元件的閘極,並且接在高電壓靜電放電共用通道與低 本紙張尺度適用中國國家標準{ CNS ) A4规格(210X297公犮) (請先閲讀背面之注Φ事項再填寫本頁) 東. 、-° 經濟部中央標準局貝工消费合作社印製 4〇8464 at ___ B7 —--- 電壓靜電放電共用通道H靜電放電fa/電流跨過靜 電放電箝制電路B時,靜電放電偵測電路Bll會迅速產生 電壓位準,此電壓位準大於N通道金氧半電晶體的開啟 電壓,以打開串接的NCLSCR元件。但是,當積體電路處 於一般的正常操作情況之下,如第八圖所示的接點vGn, 該接點上的電壓位準保持在低電壓靜電故電共用通道的 °電 壓位準。因此,在NCLSCR串列的N通道金氧半電晶體是 保持關閉,所以串接的NCLSCR元件也是關閉的,以阻隔 在高電壓靜電放電共用通道與低電壓靜電放電共用通道之 間的電流通道。NCLSCR串接的元件數目 當積體電路處於-般正常操作情況之下時U在高電壓 靜電放電共用通道與低電壓靜電放電共用通道之間的電壓 差,是單—個NCLSCR元件的維持電麗,在一般 的互補式金氧半電晶體技術之中約為i伏特左右。舉例來 說’在第五圖之中,當積體電路處於正常操作的狀況之下, 第一靜電放電共用通道被充電到2.5伏特,第二靜電放電共 用通道在〇伏特。在第一靜電放電共用通道與第二靜電放 電共用通道之間的靜電放電箝制電路B,因此設計成在一 個NCLSCR串列中用三個NCLSCR元件,在積體電路處於 正常狀態之下時,以阻隔在第一靜電放電共用通道與第二 靜電放電共用通道之間的電流通道。當積體電路在正常工 作情形下,在靜電放電箝制電路B内的NCLSCR串列的總 維持電壓,大於VDD到Vss之間的電壓差,因此不會造成積 體電路的閉鎖(latch up)問題。 本紙張尺度適用中國國家檩準(CNS ) Μ規格(210X297公漦) (請先閲讀背面之注意事項再填寫本頁) 訂 r 經濟部中央標準局貝工消费合作社印製 408464 A7 B7___ 五、發明説明() 請參閱第九圖,顯示在高電壓靜電放電共用通道與低電 壓靜電放電共用通道之間的靜電放電箝制電路B的另一種 設計,係利用數個P通道金氧半電晶體控制之横向矽控整 流元件(PMOS-controlled lateral silicon controlled rectifier, PCLSCR)串接所組成,PCLSCR串列元件包含PCLSCR1到 PCLSCRn元件,所有的PCLSCR元件是串聯耦合在一起, TPCLSCR串列的陽極連接到高電壓靜電放電共用通道,陰 極連接到低電壓靜電放電共用通道,所有的PCLSCR元件 的閘極接往一個反相器B12的輸出端,反相器B12的輸入 端接往靜電放電偵測電路B11。靜電放電偵测電路B11從 高電壓靜電放電共用通道接往低電壓靜電放電共用通道。 請參閱第九圖,在靜電放電偵測電路B11與PCLSCR串列 之間,反相器B12用以轉換電壓位準,以正確地控制PCLSCR 串列的閘極電壓。當靜電放電電壓/電流發生在高電壓靜電 放電共用通道與低電壓靜電放電共用通道之間時,接點VQ_p 的電壓位準低於在PCLSCR串列的P通道金氧半電晶體的 開啟電壓,因此PCLSCR串列被開啟導通,在高電壓靜電 放電共用通道與低電壓靜電放電共用通道之間,形成一個 低阻抗通道,達到全晶片靜電放電保護目的。但是,當積 體電路處於正常運作狀態之下,PCLSCR串列保持在關閉 狀態,以阻隔高電壓靜電放電共用通道與低電壓靜電放電 共用通道之間的電流路徑。在低電壓靜電放電共用通道與 高電壓靜電放電共用通道之間的PCLSCR串列之中的 PCLSCR元件數目(η),其計算方式為n2(Vdiff/Vh<Jld)〇當 .(請先閱讀背面之注意事項再填寫表頁)1. The 1T scale is applicable to the Chinese National Cricket (CNS) A4 specification (210X297 cm) ^ Printed by the Shell Standard Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 48044 A7 B7 V. Description of the invention A low impedance path between the discharge common channel and the vDD (or vss) power line. This provides a two-way conduction path between the electrostatic discharge common channel and the vDD (or vss) power line, achieving the purpose of full-chip electrostatic discharge protection design. Referring to FIG. 7B, a cross-sectional view of the electrostatic discharge bidirectional connection element A shown in FIG. 7A is shown. The electrostatic discharge bidirectional connection element A is composed of NSCR1 and NSCR2, and is fabricated on a P-type substrate. The electrostatic discharge clamping circuit B between the electrostatic discharge common channels at different voltage levels is shown in the eighth and ninth figures. The electrostatic discharge clamping circuit B is to provide a conductive path from a high-voltage electrostatic discharge common channel to a low-voltage electrostatic discharge common channel when the integrated circuit is under an electrostatic discharge pressure. However, when the integrated circuit is under normal operating conditions, the electrostatic discharge clamping circuit B must be kept closed to block the current paths in the high-voltage electrostatic discharge common channel and the low-voltage electrostatic discharge common channel. In order to meet the above requirements, the actual design of the fast conducting electrostatic discharge clamping circuit B is shown in the eighth figure. Please refer to the eighth figure. A plurality of N-channel metal-oxide-semiconductor-controlled lateral silicon controlled rectifiers (NMOS-controlled lateral silicon controlled rectifiers, NCLSCR) are formed in a high voltage electrostatic discharge shared channel and low voltage in a series 歹 ij manner. Electrostatic discharge is shared between channels. NCLSCR serial elements include NCLSCR1 to NCLSCRn. These NCLSCR elements are all coupled in series. The anode is connected to the high-voltage electrostatic discharge common channel and the cathode is connected to the low-voltage electrostatic discharge common channel. An electrostatic discharge detection circuit B11 controls the gates of all components. Pole, and connected to the common channel of high-voltage electrostatic discharge and the low paper size are applicable to the Chinese National Standard {CNS) A4 specification (210X297 cm) (please read the note on the back before filling this page) East.,-° Economy Printed by Shelley Consumer Cooperative of the Ministry of Standards of the People's Republic of China 48044 at ___ B7 ----- Voltage Electrostatic Discharge Common Channel H Electrostatic Discharge fa / Current When Electrostatic Discharge Clamping Circuit B, Electrostatic Discharge Detection Circuit Bll will quickly generate voltage Level, this voltage level is greater than the turn-on voltage of the N-channel metal-oxide semiconductor transistor to turn on the NCLSCR elements connected in series. However, when the integrated circuit is under normal normal operating conditions, such as the contact vGn shown in the eighth figure, the voltage level on the contact is maintained at the voltage level of the low-voltage static electricity common channel. Therefore, the N-channel metal-oxide semiconductors in the NCLSCR series are kept closed, so the NCLSCR elements connected in series are also closed to block the current path between the high-voltage electrostatic discharge common channel and the low-voltage electrostatic discharge common channel. The number of components connected in series by NCLSCR. When the integrated circuit is under normal operating conditions, the voltage difference between the high-voltage electrostatic discharge common channel and the low-voltage electrostatic discharge common channel is the maintenance power of a single NCLSCR element. In general complementary metal-oxide-semiconductor technology, it is about i volts. For example, in the fifth figure, when the integrated circuit is under normal operating conditions, the first electrostatic discharge common channel is charged to 2.5 volts, and the second electrostatic discharge common channel is at 0 volts. The electrostatic discharge clamping circuit B between the first electrostatic discharge common channel and the second electrostatic discharge common channel is designed to use three NCLSCR elements in one NCLSCR series. When the integrated circuit is in a normal state, A current path is blocked between the first electrostatic discharge common channel and the second electrostatic discharge common channel. When the integrated circuit is under normal operating conditions, the total sustaining voltage of the NCLSCR series in the electrostatic discharge clamping circuit B is larger than the voltage difference between VDD and Vss, so it will not cause the latch-up problem of the integrated circuit . This paper size is applicable to China National Standards (CNS) M specifications (210X297 cm) (Please read the notes on the back before filling this page) Order r Printed by the Central Standards Bureau of the Ministry of Economic Affairs and printed by the Bayer Consumer Cooperative 408464 A7 B7___ V. Invention Explanation () Please refer to the ninth figure, which shows another design of the electrostatic discharge clamping circuit B between the high-voltage electrostatic discharge common channel and the low-voltage electrostatic discharge common channel, which is controlled by several P-channel metal-oxide semiconductors. PMOS-controlled lateral silicon controlled rectifier (PCLSCR) is connected in series. PCLSCR serial elements include PCLSCR1 to PCLSCRn elements. All PCLSCR elements are coupled in series. The anode of TPCLSCR series is connected to high voltage. The electrostatic discharge shared channel, the cathode is connected to the low voltage electrostatic discharge shared channel, the gates of all PCLSCR elements are connected to the output terminal of an inverter B12, and the input terminal of the inverter B12 is connected to the electrostatic discharge detection circuit B11. The electrostatic discharge detection circuit B11 is connected from the high-voltage electrostatic discharge common channel to the low-voltage electrostatic discharge common channel. Referring to the ninth figure, an inverter B12 is used to switch the voltage level between the electrostatic discharge detection circuit B11 and the PCLSCR series to correctly control the gate voltage of the PCLSCR series. When the electrostatic discharge voltage / current occurs between the high-voltage electrostatic discharge common channel and the low-voltage electrostatic discharge common channel, the voltage level of the contact VQ_p is lower than the turn-on voltage of the P-channel metal-oxide semiconductor transistor in the PCLSCR series. Therefore, the PCLSCR series is turned on and turned on to form a low-impedance channel between the high-voltage electrostatic discharge common channel and the low-voltage electrostatic discharge common channel to achieve the purpose of full-chip electrostatic discharge protection. However, when the integrated circuit is in a normal operating state, the PCLSCR series remains closed to block the current path between the high-voltage electrostatic discharge common channel and the low-voltage electrostatic discharge common channel. The number of PCLSCR elements (η) in the PCLSCR series between the low-voltage electrostatic discharge shared channel and the high-voltage electrostatic discharge shared channel is calculated as n2 (Vdiff / Vh < Jld). (Notes for filling in the form page)
本紙張尺度適用中國國家標準(<^»以4規格(210父297公潑) 經濟部中央標準局員工消f合作社印製 ^08464 A7 B7 五、發明説明() 積體電路處於一般正常運作狀態之下時,vdiff是為高電壓靜 電放電共用通道與低電壓靜電放電共用通道之間的電壓 差’ Vh〇ld是單一個PCLSCR元件的維持電壓,以一般的互 補式金氧半電晶體的技術而言,該VhC)ld電壓通常為1伏特 左右。對PCLSCR元件數目作適當的設計,不會在高電壓 靜電放電共用通道與低電壓靜電放電共用通道之間,發生 所謂的閉鎖(latch up)問題。 另一種快速導通之靜電放電箝制電路B的設計,顯示 在第十圖與第十一圖中。請參閱第十圖,二極體插入於 NCLSCR串列之中,以減少NCLSCR元件的數目,二極體 包含D1到Dn,這些二極體是與NCLSCR元件互相間隔串 接。該NCLSCR與二極體混合串列的閘極接往靜電放電偵 測電路B11,靜電放電偵測電路B11接在高電壓靜電放電 共用通道與低電壓靜電放電共用通道之間。二極體在順向 偏壓的情況之下,所消耗的電壓降約在0.7伏特,因此,跨 越在一個NCLSCR元件與一個二極體的電壓降,約為1.7 伏特。在靜電放電箝制電路B之中的NCLSCR元件與二極 體元件組合的數目(η),其計算方式是為ng(Vdiff/1.7V)。當 積體電路處於一般操作狀況之下時,Vdiff是從高電壓靜電放 電共用通道到低電壓靜電放電共用通道之間的電壓差《請 參閲第十一圖,這是一個第九圖的另一種設計方式,其中, 二極體插入於PCLSCR串列之中,以減少在靜電放電箝制 電路之中的PCLSCR元件數目。對靜電放電箝制電路B的 PCLSCR或NCLSCR元件與二極體的數目,作適當的設計, 23 本紙張尺度適用中國國家標隼(CNS ) A4規格(210X 297公釐) (請先閱讀背面之注意事項再填寫本頁) 产.裝------訂------κίτί. 經濟部中央標準局員工消贤合作社印製 408464 〜 Λ 7 Β7 五、發明説明() 不會在高電壓靜電放電共用通道與低電壓靜電放電共用通 道之間,發生所謂的閉鎖(latch up)的問題。 請參閱第十二圖,可以利用單一個靜電放電共用通道, 完成全晶片靜電放電保護設計,積體電路包含内電路I到 内電路K,每一個内電路各自具有一個輸入墊1〇〇與輪出 墊200,每一個内電路是由VDD電源線與Vss電源線所供應。 vDD電源線為vDD丨、VDD 2或VDD_K電源線,vss電源線為 VSS_1、VSS 2或Vss_k電源線。一寬金屬線圍繞整個晶片作為 單一靜電放電共用通道,提供靜電放電電流導電路徑,以 避免靜電放電電流在内部電流中到處流竄D在積體電路之 中,所有内電路的輸入墊100與輸出墊200,經由修正的靜 電放電雙向連接元件A1,連接到靜電放電共用通道^ VDD 與Vss分離電源線,經由修正的靜電放電雙向連接元件A1, 連接到靜電放電共用通道。利用這種設計,發生在積體電 路的輸入墊或輸出墊上的靜電放電電壓,經由修正的靜電 放電雙向連接元件A1,導入到靜電放電共用通道之中,靜 電放電電流因此在靜電放電共用通道之中流動。最後,靜 電放電電流,經由修正的靜電放電雙向連接元件A1,放電 到任何電路的相對接地之輸入或輸出墊。此修正的靜電放 電雙向連接元件A1是連接於相對接地的輸入或輸出墊與靜 電放電共用通道之間。在跨越具有分離電源線或電路的積 體電路的任何兩個的接觸塾之間,可以利用此種單一靜電 放電共用通道之全晶片靜電放電保護設計,以避免靜電放 電對内部電路的破壞《這種設計亦可運用於不具有分離電 本紙張尺度適用中國國家標準(CNS ) Λ4規格(210X 297公犮) (請先閱讀背面之:ix意事項再填寫本頁)This paper size applies to Chinese national standards (&^; 4 specifications (210 fathers, 297 male splashes), printed by employees of the Central Bureau of Standards, Ministry of Economic Affairs, and cooperatives ^ 08464 A7 B7 V. Description of the invention () Integrated circuit is in normal normal operation In the state, vdiff is the voltage difference between the high-voltage electrostatic discharge shared channel and the low-voltage electrostatic discharge shared channel. 'Vh〇ld is the sustain voltage of a single PCLSCR element. Technically, the VhC) ld voltage is usually around 1 volt. A proper design of the number of PCLSCR elements will not cause a so-called latch-up problem between the high-voltage electrostatic discharge common channel and the low-voltage electrostatic discharge common channel. Another design of the fast conducting electrostatic discharge clamping circuit B is shown in Figs. 10 and 11. Please refer to the tenth figure. Diodes are inserted in the NCLSCR series to reduce the number of NCLSCR elements. Diodes include D1 to Dn. These diodes are serially connected to the NCLSCR elements at intervals. The gate of the NCLSCR and diode mixed series is connected to the electrostatic discharge detection circuit B11, and the electrostatic discharge detection circuit B11 is connected between the high-voltage electrostatic discharge common channel and the low-voltage electrostatic discharge common channel. Under forward bias conditions, the consumed voltage drop is about 0.7 volts. Therefore, the voltage drop across an NCLSCR element and a diode is about 1.7 volts. The number (η) of the combination of the NCLSCR element and the diode element in the electrostatic discharge clamping circuit B is calculated as ng (Vdiff / 1.7V). When the integrated circuit is under normal operating conditions, Vdiff is the voltage difference from the high-voltage electrostatic discharge common channel to the low-voltage electrostatic discharge common channel. "See Figure 11, which is another A design method in which a diode is inserted in the PCLSCR series to reduce the number of PCLSCR elements in the electrostatic discharge clamping circuit. Make proper design for the number of PCLSCR or NCLSCR components and diodes of the electrostatic discharge clamping circuit B. 23 This paper size is applicable to China National Standard (CNS) A4 (210X 297 mm) (Please read the note on the back first) Please fill in this page for more details). Production ------ Order ------ κίτί. Printed by the Consumers ’Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 408464 ~ Λ 7 Β7 5. Description of Invention () A problem of so-called latch-up occurs between the common channel for voltage electrostatic discharge and the common channel for low voltage electrostatic discharge. Please refer to the twelfth figure. A single electrostatic discharge shared channel can be used to complete the full-chip electrostatic discharge protection design. The integrated circuit includes internal circuit I to internal circuit K, and each internal circuit has an input pad 100 and a wheel. Out of the pad 200, each internal circuit is supplied by a VDD power line and a Vss power line. The vDD power line is a vDD 丨, VDD 2 or VDD_K power line, and the vss power line is a VSS_1, VSS 2 or Vss_k power line. A wide metal wire surrounds the entire wafer as a single electrostatic discharge common channel, providing a conductive path for electrostatic discharge current to prevent the electrostatic discharge current from flowing around in the internal current. D is in the integrated circuit. The input pads 100 and output pads of all internal circuits 200. The modified electrostatic discharge bidirectional connection element A1 is connected to the electrostatic discharge common channel ^ VDD and Vss separate power lines, and the modified electrostatic discharge bidirectional connection element A1 is connected to the electrostatic discharge common channel. With this design, the electrostatic discharge voltage generated on the input pad or output pad of the integrated circuit is introduced into the electrostatic discharge common channel through the modified electrostatic discharge bidirectional connection element A1, so the electrostatic discharge current is in the electrostatic discharge common channel. Medium flow. Finally, the electrostatic discharge current, via the modified electrostatic discharge bidirectional connection element A1, is discharged to the relatively grounded input or output pad of any circuit. The modified electrostatic discharge bidirectional connection element A1 is connected between the input or output pads that are relatively grounded and the common channel for electrostatic discharge. Between the contacts that span any two of the integrated circuits with separate power lines or circuits, this single-chip ESD shared channel can be used for a full-chip ESD protection design to avoid electrostatic discharge damaging internal circuits. This design can also be applied to paper without separate electric paper. Applicable to China National Standard (CNS) Λ4 specification (210X 297 cm) (Please read the back: ix notices before filling out this page)
經濟部中央標準局員工消贽合作社印裝 4q^464 Λ 7 一 _ Β7 - _...... 五、發明説明() 源線或電路的積體電路之中。 為提供一種上述具有單一靜電放電共用通道的全晶片靜 電放電保護設計,修正的靜電放電雙向連接元件A1應該被 正確的設計。當積體電路在一般正常操作的情況之下,要 避免在輸入墊、輸出墊或電源接觸墊之間因經過靜電放電 共用通道所造成的電源損失。此修正的靜電放電雙向連接 元件A1的適當设計,如第十三圖、第十四圖、第十五圖與 第十六圖的設計所示。 請參閱第十二圖,修正的靜電放電雙向連接元件A1使 用二極體Dnla連接輸入墊1〇〇 '輸出墊2〇〇或v加與 電源線,到靜電放電共用通道。但是從靜電放電共用通道 到輸入墊1〇〇、輸出墊200或者是v⑽與Vss電源線,複數 個N型矽控整流(NSCR)元件,包含NscRla元件到NSCRln 元件’作為串聯連接組態。每一個NSCR元件的閘極分別 接往該NSCR元件的陽極。在修正的靜電放電雙向連接元 件A1之中,NSCR串列的元件數目m,其計算方式為 (vDD-vss)/vh()ld,以避免經過靜電玫電共用通道的電源損失。 Vh〇id為單一個NSCR元件的維持電壓,以一般互補式金氧 半電晶體技術而言,約為1伏特左右。 請參閱第十四圖,二極體(Dla,Dlb,...)被交互插入於 NSCR串列之中,以減少NSCR元件的使用數目。 請參閱第十五圖,Ϊ»型石夕控整流(p_type siHcon contr〇iiec| 挪他叫PSCR)元件,亦可使用於修正的靜電放電雙向連接 元件A1之卜複數個PSCR元件㈣連接在—起,二極體 25 本紙張尺度適用巾國國¥標率(CNS) A4規格(210><297公發^ ----- {請先閱讀背面之注意事項再填寫本頁) -s 夕- . J— n · 經濟部中央標準局員工消費合作社印裝 408464 a? B7 五、發明説明()Printed by the staff of the Central Standards Bureau of the Ministry of Economic Affairs on the cooperatives 4q ^ 464 Λ 7 a _ Β7-_...... 5. Description of the invention () In the integrated circuit of the source line or circuit. In order to provide the above-mentioned all-chip electrostatic discharge protection design with a single electrostatic discharge common channel, the modified electrostatic discharge bidirectional connection element A1 should be correctly designed. When the integrated circuit is under normal normal operation, avoid the power loss caused by the common channel through electrostatic discharge between the input pad, output pad or power contact pad. The proper design of this modified electrostatic discharge bidirectional connection element A1 is shown in the designs of Figs. 13, 14, 15, and 16. Please refer to the twelfth figure. The modified electrostatic discharge bidirectional connection element A1 uses a diode Dnla to connect the input pad 100 ′, the output pad 2000 or v, and the power cord to the common channel for electrostatic discharge. However, from the static discharge shared channel to the input pad 100, the output pad 200 or the V⑽ and Vss power lines, a plurality of N-type silicon controlled rectifier (NSCR) elements, including NscRla elements to NSCRln elements, are used as a series connection configuration. The gate of each NSCR element is connected to the anode of the NSCR element. In the modified electrostatic discharge bidirectional connection element A1, the number of components m of the NSCR series is calculated as (vDD-vss) / vh () ld to avoid the power loss through the common channel of electrostatic discharge. Vhoid is the sustaining voltage of a single NSCR element, and is about 1 volt in terms of general complementary metal-oxide-semiconductor technology. Please refer to the fourteenth figure, the diodes (Dla, Dlb, ...) are alternately inserted into the NSCR series to reduce the number of NSCR components. Please refer to the fifteenth figure. The Ϊ »type siHcon contr0iiec | PSCR type element can also be used in the modified electrostatic discharge bidirectional connection element A1. A plurality of PSCR elements ㈣ are connected to— From now on, the size of this paper is 25. The paper size is applicable to the national standard ¥ CNS (A4) specification (210 > < 297) ^ ----- {Please read the precautions on the back before filling this page) -s Xi-. J— n · Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs 408464 a? B7 V. Description of Invention ()
Dpla與PSCR串列並聯在一起。PSCR串列的陽極連接靜 電放電共用通道,並連接二極體Dpla的陰極^ PSCR串列 的陰極連接二極體Dpla的陽極,並連接到VDD、Vss、輸 入墊100或輸出墊200。 從靜電放電共用通道到輸入墊i〇〇、輸出墊200或VDD 與Vss電源線之間,.亦可利用PSCR元件與二極體的混合串 列組態,顯示在第十六圖之中。在跨越NSCR (或PSCR) 元件與二極體混合串列的總電壓降,在積體電路的一般正 常操作情況之下,要設計大於在vDD電源線與vss電源線之 間的電壓差,即可避免經過靜電放電共用通道的電源損耗。 本發明以較佳實施例說明如上,而熟悉此領域技藝者, 在不脫離本發明之精神範圍内,當可作些許更動潤飾,其 專利保護範圍更當視後附之申請專利範圍及其等同領域而 定。. 本紙張尺度適用中國國家標準{ CNS ) A4規格(2丨0X297公楚) (請先閱讀背面之注意事項再填寫本頁)Dpla and PSCR are connected in series. The anode of the PSCR series is connected to the common channel for electrostatic discharge, and is connected to the cathode of the diode Dpla ^ The cathode of the PSCR series is connected to the anode of the diode Dpla, and is connected to VDD, Vss, the input pad 100 or the output pad 200. From the static discharge shared channel to the input pad i00, the output pad 200, or between the VDD and Vss power lines, a mixed serial configuration of PSCR elements and diodes can also be used, as shown in Figure 16. The total voltage drop across the mixed series of NSCR (or PSCR) components and diodes is designed to be greater than the voltage difference between the vDD power line and the vss power line under the normal normal operating conditions of the integrated circuit, that is, It can avoid power loss through the common channel of electrostatic discharge. The present invention has been described above with reference to the preferred embodiments, and those skilled in the art can make some modifications without departing from the spirit of the present invention. The scope of patent protection should be regarded as the scope of the attached patent application and its equivalent. Field-specific. . This paper size applies the Chinese National Standard {CNS) A4 specification (2 丨 0X297). (Please read the precautions on the back before filling this page)
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CN104600687A (en) * | 2015-01-06 | 2015-05-06 | 武汉新芯集成电路制造有限公司 | Electrostatic protection circuit of three-dimensional integrated circuit |
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CN104600687A (en) * | 2015-01-06 | 2015-05-06 | 武汉新芯集成电路制造有限公司 | Electrostatic protection circuit of three-dimensional integrated circuit |
CN104600687B (en) * | 2015-01-06 | 2018-03-30 | 武汉新芯集成电路制造有限公司 | The electrostatic discharge protective circuit of three dimensional integrated circuits |
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