TW405330B - Ceramic multilayer printed circuit boards with embedded passive components - Google Patents

Abstract

Passive components such as capacitors, resistors and RF filters can be made by screen printing suitable inks onto green tapes, completed with conductive layers below and above the component ink layers. The resultant green tape stack is then fired to form embedded components. By laminating the green tape stacks onto metal support board substrates, shrinkage in the x and y dimensions are limited and the components can maintain close tolerances. When many green tape layers are to be stacked, improved shrinkage is obtained when green tapes having a moderate amount of oxide fillers, e.g., less than about 15% by weight of the green tape composition, are interleaved with green tapes having higher amounts, e.g., above 25% by weight, of oxide fillers.

Description

Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 405330 A7 '·' ________B7 V. Description of the Invention (1) ~ This invention relates to a multilayer ceramic supported by a printed circuit board, which has a low shrinkage in the two-dimensional system during firing. More specifically, this invention relates to a metal-supported multilayer ceramic printed circuit board with co-fired passive components. BACKGROUND OF THE INVENTION Ceramic compositions of imprinted glass are known. When mixed with amorphous glass, they form a green germ band composition that can be adhered to a layer such as a copper / nickel coating or electroplated khava sheet. The metal core supports the substrate. Kovar is an Fe / C0 / Ni alloy that can be obtained by Carpenter Technology; One of these alloys contains 53.8% by weight of iron, 29% by weight of nickel ', 7% by weight of cobalt, and 0% by weight (manganese. These alloys exhibit expansion coefficients at specific temperatures. It has a sharp change. It can be obtained by 1 mil thick copper plating and 1 mil thick nickel plating on both sides of the Kovar core. It has 5.8ppm / ° C (room temperature to 300 °). C) Coefficient of Thermal Expansion (TCE) and Coefficient of Thermal Conduction (z or thickness direction) of 2.1.8 Watts / m ° K. In order to use these Kovar boards as supporting substrates for printed circuit boards, it is necessary to Heat treated in the air with a nickel oxide coating and subsequently glazed with a bonded glass, which is 匚 & 0-80 1203-2] 10-8203 glass. It is used to make bonding with organic adhesives and solvents. The printable ink of glass can be used to print the bonded glass screen onto the support substrate. The bonded glass is generally 'coated on the support substrate with a thickness of 40-70 microns. Subsequently, the temperature is lowered at 700-800 ° C' Bake the bonded glass with heat. Dry and densify. In order to improve the adhesion of the bonded glass to the Kovar support, about 6% by weight of copper powder can be used. Added to bonded glass. These Kovar support substrates prepared as above are used herein, and when they are co-laminated to a low firing temperature green embryo tape composition, they prevent ceramic capital paper during firing. The dimensions are applicable to the Chinese National Standard (CNS) Λ4 specification (210X 297 mm). ≪ ^ order-red •--(Please read the back & precautions before filling out this page) · · '* 05330 a?- -B7 V. Description of the invention (2): The layer shrinks in X and y dimensions. As mentioned above, it is bonded to the metal core support plate with glass on it. Amorphous glass is made by mixing. A suitable crystallized glass can be, for example, 20-55% by weight 2Zn〇; 20-28% by weight of Mg〇, 10-35% by weight of ^ 203; and 1 〇〇〇〇 ％。 SiO2. These broken glass systems have tce matching Kovar, which also has low dielectric loss characteristics; however, it has the ability to show glass densification during firing: = crystallization temperature. Therefore, these glasses can be made of lead-based amorphous glass "W". Suitable such amorphous glass contains 30-80% by weight of pb 〇; 15-50% by weight. 〇2; up to 10% by weight of 8203; up to 15% by weight / °; B2O3; and up to 10% by weight of ZnO. However, when crystallized When the glass is mixed with lead-based amorphous glass, its Tce is reduced and the dielectric loss characteristics are improved. The lateral shrinkage 4 and the ignition are still higher than the better. Add a small amount such as quartz, alumina, magnesite Iso-oxide fillers can reduce the lateral shrinkage during firing, so the improved ceramics of these fillers have better dielectric properties, low shrinkage and τ CE matching Kovar during firing. -, Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs, the "useful raw germ band composition is formed by mixing suitable glass-breaking powders, which contains roughly Crystallized glass, amorphous glass, and oxide fillers are generally organic solvents containing resins, solvents, knife powders, and the like, and the resulting mud is formed into thin strips, which are known as raw embryonic strips. A conductive ink may be screen-printed on the green tape to form a conductive pattern. -5- This paper size applies to Chinese National Standard (CNS) A4 (210X297 mm) Printed by the Consumer Cooperatives of the Central Bureau of Standardization of the Ministry of Economic Affairs 405330 Five 'Invention Description (3) Several raw germs can be aligned under pressure And stacks and layers. The through holes in the green germ band are stamped and filled with conductive ink, such as a mixture of conductive metal powder, organic medium and glass, which is generally the same glass used to make the green germ band. Conductive circuit technology is provided between the circuit patterns on the strip layer. This is followed by aligning the laminated green embryonic tape stack with the supporting substrate coated with bonded glass, and co-laminating it under pressure. Since the shrinkage mainly occurs in the dimension of thickness (Z) during firing, the circuit system is not disturbed and can maintain close to two tolerances. These ceramics are compatible with low-melting-temperature conductive inks such as silver-based inks, which are used to form circuits that are electrically connected on different layers and to form 'combinations.' Therefore, 'ceramic circuit boards as described herein above have low dielectric loss characteristics and are useful when used with microwave / digital packages. Until now, when a multilayer ceramic circuit board contains passive components such as resistors or capacitors, it uses solder or epoxy-type adhesives to embed discrete components on top of the fired board to adhere the components to the multilayer ceramic. Adding these components increases the number of steps required to manufacture these circuit boards, i.e. the components must be aligned and adhered to a ceramic multilayer board and connected to a power source. In addition, in order to adjust many discrete devices, the multilayer board must be large. Therefore, the cost of manufacturing the boards is high. The ability to screen-print passive components onto specific multilayer green embryo tapes and low-temperature co-fired ceramic circuit boards has its advantages. It can increase its packing density, reduce package size and cost, and reduce required processing steps. . The number of steps. Utilizing the recently developed low firing temperature glass and metal support plates that reduce X and y dimension shrinkage, it has become feasible to screen print these components to precise tolerances and high precision displacement. In addition, 'reliability can be changed because fewer interconnects are required. -6- This paper's standard applies to the Chinese National Standard (CNS) Λ4 specification (2 丨 0X297 mm) -------- Park Clothing — '(. Please read the notes on the back before filling out this page)

-1T Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs. Λ Α7-.. ___1 40533 /) Β7 V. Description of the Invention (4) Good. However, when aligning a plurality of green tapes and winding elements therebetween, it is difficult to maintain a reduced shrinkage during firing and prevent the green tapes from being stacked and delaminated from the support substrate. SUMMARY OF THE INVENTION We have discovered that components such as capacitors, resistors and radio frequency components can be embedded in a support substrate to fit a stack of green embryonic tapes made of glass, which prevent shrinkage in the X and y dimensions. Suitable capacitor or resistor inks and conductive layers can be printed on the green tape, embedded in other green tape, pressed and fired at a relatively low temperature 'that is, 85 0-9 Below 〇c, it is not delaminated by the support and has no shrinkage in X and y dimensions to manufacture a printed circuit board with close tolerances and embedded components therein. Capacitor inks can be made of barium titanate 'titanium oxide and lead magnesium niobate dielectrics. When combined with suitable glass, they are sintered at low temperatures. This electrical valleyr ink can be screen-printed onto a ceramic green tape and connected to the silver conductor layer using through holes in the green tape that are filled with conductive ink.俟 After the passive component mother ink and other circuits are printed on the green tape, the multiple green tapes are aligned, laminated together and co-fired in the air at a temperature of about 850_900 £ 5 (:). The capacitor is Can be manufactured in a wide range of dielectric constants. Bypass capacitors can also be manufactured using ground plane metal as the bottom capacitor's board. Capacitors are placed in one or more layers on top of the stack. It can use screen printing to print capacitor dielectric ink above and below to terminate the capacitor with conductive layer. Thick film resistor ink can be based on ruthenium oxide (RuO2) and suitable glass ------- -^ ------ 丁 r, (Please read the precautions on the back before filling this page) · This paper is suitable for gjgj home fresh (CNS) A4 specifications (21 (} > < 297) ) A7 V. Description of the invention (5) Manufacturing, which is sintered at low temperature with a suitable organic medium. The resistor ink screen is printed on a green germ band aligned and stacked on a support, and it is Fired to produce a wide range of resistors and thermal resistance (TCR) resistors .In order to adjust tcR 値, a small amount of barium osmate can be added. The resistor is connected to the power supply by screen printing on the top of the green tape layer stack. After printing the resistor and other circuits, multiple layers of green tape are made. Aligned and laminated together, applied to a metal support substrate via a bonded glass, and co-fired in air at a temperature of about 780-900 ° C to form a printed circuit board with a stable and reliable embedded resistor therein / When stacking many layers of raw embryonic belts to make a fired stack that is about 2 mm thick or higher, we found that delamination and shrinkage problems would still occur. Therefore, I also found that the use of Filler mixed low-dielectric-loss glass when the green germ belt layers are staggered 'from the same glass but currently contains a higher amount of oxide filler green germ belt layer, which can stack more layers of green germ belt, the stack Pressing does not shrink in the X and y directions during firing, and it is not delaminated by the metal support substrate. Such thick multilayer metal support circuit board stacks are particularly useful when RF components are embedded in the stack. Figure Brief description-Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs --------. Installation---(锖 Please read the precautions on the back before filling this page} Figure 1 is a low dielectric constant ink The dielectric constant and the capacitor size chart. Figure 2 is a cross-sectional view of one of the embedded capacitors of the invention. Figure 3 is the dielectric constant versus capacitor size chart of the capacitor of the invention. Figure 4 shows the capacitance temperature constant versus capacitor size for the capacitor of this invention. Figure 5 shows the dielectric constant vs. capacitor size for the capacitor of this invention. The Chinese paper standard (CNS> 405330 A7 B7) (Figure

Resistor surface + product pair resistance and TCR Figure 7 shows the resistor of the second size resistor

Printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs and the TCR of the Ministry of Economic Affairs. Figure 8 is a cross-sectional view of the invention's multilayer shout circuit board with embedded silver layer. FIG. 9 is a cross-sectional view of a multi-layer ceramic circuit board having a radio frequency wave filter buried in a layer for this invention. Detailed description of the invention First, the formulation of different capacitor inks, the formation method of the very capacitors with different dielectric numbers and TCC and the test results will be discussed. I have found a low dielectric constant, which is about 1 to about 50 capacitor inks based on sodium cinnamate and titanium oxide powder. These powders are around 1100_1300. It is sintered at high temperature, so it must be modified by combining with low melting glass. Therefore, the barium titanate / glass or titanium oxide / glass composition will be sufficiently low at about 85.0-9900 ° C. It is then sintered to adjust the dielectric constant and minimize the capacitor temperature constant (TCC). Barium titanate is commercially available from Degussa under the trademark AD302L (hereinafter referred to as d), and the mixture of barium titanate and barium tin oxide is available from Ferro & Company under YLr.2000 (hereinafter referred to as F) Acquisition of trademarks. The properties of these powders are disclosed in Table I below, where κ is the dielectric constant, the dielectric loss ^ Tan§ and the temperature is. c means. The particle size is given in micron (μη〇 average particle size. This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) — m »1 -I —1 person k 1-1--I-. -· \ Έ (Please read the _ Cautions on the back before filling in this page) _ 405330

V. Description of the invention (7) Composition K Tan5 4 TCC.% F 12000 0.022 -80 * D 3200 < 0.02 -9 ** Table I * Room temperature to 1 2 5. C * * 8 5 ° C A7 B7 1200 1140 1.0 0.6 A suitable oxide, # 4162_01 is available from Mallincrodt Baker. Before preparing the capacitor ink composition, barium titanate or titanium oxide powder is mixed with different low firing temperature glasses. Suitable glass compositions are given in Table II below in weight percent. (Please read the precautions on the back before filling this page) Printed Form II by the Shell Standard Consumer Cooperative of the Central Bureau of Standards, Ministry of Economic Affairs II Oxide glass 2 Glass 3 Glass 4 * Break glass 5 Glass 6 AI2O3 6.00 10.10 1.0 1.82 BaO < 2.0 B2 〇3 39.00 19.60 > 5.0 5.0 8.18 B12O3 23.0 CaO '5.0-4 CdO 36.0 MgO 24.5 PbO 50.00 > 70.0 25.0 68.82 Si〇2 39.90 24.50 < 2.0 5.0 2.23 Ti02 9.09 ZnO 50.00 29.40 > 12.0 5.0 9.09 -10- This paper size is applicable to the size of the Chinese family car M size Gx 297 male Chu 405330 A7 B7 V. Description of the invention (

Zr02 particle size, 11-13 5-7 10-12 microns * Sem Com Company, Toledo, Eh. Screen glass and glass mixture, and traditional dispersant, resin and solvent are mixed into the cloth, and screen printed on the green belt. The ink composition is summarized in Table 111 below, where the glass composition is shown in Table π. , 5.0 5.0 2.73 4.0 ί Please read the meaning on the back ^ before filling in this page)

• II II. I-I ·-Equipment-Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs III BaTi03 Weight% Glass # Weight% Dispersion Weight Solvent Chapter Type Weight%% F 62.29 1 7.14 1.43 4.07 23.07 F 66.09. 1 8.25 1.52 4.84 19.38 F 64.89 2 9.8 1.49 Η / 6 19.05 D 65.62 1 " 13.52 1.57 4.83 14.48 D: 59.99 1 3.08 1.44 4.45 21.04 D 62.27 2 12.15 1.54 4.41 * 17.83 D 60.86 2 15.34 1.52 4.46 / 17,82 D 60.10 3 14.84 1.50 4.71 18.85 D 57.05 2 15.35 1.54 4.46 17.84 S r Z r 0 3 3.76 D 59.15 2 15.38 1.54 (47 17.89 SrTi03 1.57 This paper size applies to the Chinese National Standard (CNS) Λ4 specification (210X297gt) Order-' 405330 A7 B7 ----------------, 5. Description of the invention (9) D 58.88 2 15.33 1.53 • 4.48 17.85 S rZ r 0 3 1.94 D 62.25 2 14.04 1.56 4.43 17.73 D 63.61 2 12.79 1.53 4.41 17.66 This capacitor ink can be screen-printed on a green germ band that is co-fired to a metal, especially a Kovar support substrate. The main crystallized glass used is: The mixture is manufactured: 29.4% zn 0, 24.5% tMgO, 19.6% iB203, 24.5% tSi〇2 & 20% ^ C 0 3 04, all of which are weight%. Typical raw germ band composition These are given in Table IV below.

Table IV --------- Seed clothing! I-(Please read the precautions on the back before filling this page) Additive function glass Main crystallized glass P121 glass Secondary crystallized glass Magnesite 2 powder ceramic filler ochreite 3 powder. Ceramic filler Hypermer PS24 dispersant Butvar B985 Adhesive Santicizer 1606 Plasticizer Acetyl ethyl ketone Capacitor Anhydrous ethanol Solvent Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs,% by weight Raw embryo belt: [Amount,% by weight 4 Braces 2 57.34 57.29 6.98 7.03 7.27 4.42 1.09 * 3.44 0.58 0.58 2.04 2.04 1.36 1.36 11.67 11.67 11.67 11.67 -12- This paper size is applicable to China Standards (CNS) A4 specification (2! Οχ 297 mm) 405330 5. Description of the invention (10 1 broken glass Composition (% by weight) 10.0% Al2〇3 > 42 〇% pb〇3 8.0% S i 〇 2 '1 0.0% Zn η 〇 2 3-5 micron medium particle size 32-3 micron medium particle size 41CI Registered trademarks of American companies 5 Registered trademarks of Monsanto Corporation 6 Registered trademarks of Monsanto Corporation Capacitor ink screen printing to the above] ： 土 上 1 > 27, 2 54 and 5 n millimeter ruler :: Zhengwandian Germ bands on the device pattern. Manufacture three four-layer germ bands so that the Dianguyi ink layer is separated from the top of the stack. Co-laminated to Kovar substrate under M2. Silk negative base powder or silver flake-based conductor ink is embedded to make co-fired capacitors. Suitable conductor ink compositions are disclosed in Table V.

Form V Binding (please read the precautions on the back before filling this page)--Printing by the Ministry of Economic Affairs of the Central Ministry of Economic Affairs, Male Workers, Ink 1 ink 2 ink 3 ink 4 silver powder 1 83.78 20.11 silver-palladium powder 1 84.93 Silver flakes 1 80.97 * 60.30 Glass 3 0.65 〆 Dispersant 1.22 1.32 0.53 · 1.21 Resin 2 0.88 0.86 0.46 0.46 Resin ^ 1.85 1.84 Resin 4 0.80 0.79 -13- This paper size applies to China National Standard (CNS) A4 specifications ( 210X 297) 405330 A7 B7 V. Description of the invention (11 texanol solvent 3.22 3.25 terpineol solvent 6.81 6.73 6.48 butyl hydrazone (ethylene glycol) 2.54 2.12 9.71 1 Available from S. Plainfield, New Jersey gus sa 6.44 9.66 obtained

Aqualon's ethyl cellulose resin N300 ethyl cellulose resin N 1 4 Elvacite 2045 is a laminated stack obtained by firing at 8 50 ° C. Capacitance and Dielectric Loss (tanS) at 10 Hz. The dielectric constant of each capacitor is based on the following formula: The capacitance (C) is measured in Faraday, the capacitor area (A) is expressed in square centimeters and the thickness (t) is expressed in centimeters, Ct K =- II I mn I 11 mn-I nnm n--T-, T c Please read the notes on the back before filling out this page} · The stamp of the consumer consumer cooperative of the Central Standards Bureau of the Ministry of Economic Affairs Αε〇 where ε〇 is a constant = 0.0 8 8 5 Pico Faraday / cm. These capacitor test inks are suitable for operation at high frequencies (1 shigahertz). The measurement of the capacitor size and its properties is given in Table VIt below, where the thickness is ^ fired ^ The container and capacitor are generated in picofarad / micron 2 = 'K is given as the dielectric constant by the tan 50,000 formula, and the Tcc system From room temperature to iwc, it is given as Ppm / ° c. In the table ¥ 1, unless stated otherwise, glass is given in volume%. -14 405330 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (12) 1 1 Table VI 1 1 Capacitor composition size, millimeter thickness, micrometer Faraday Tan5 K TCC 1 / mm 2 1 1 F + 13.4% 1.27 32 23.0 0.010 83 -115 Please 1 I Glass 1 5.08 32 18.9 0.011 68 515 Read 1 F + 15% 1.27 32 22.1 0.007 80 582 Back 1 | Glass 1 5.08 10.6 0.012 74.5 689 Note-1 »| F + 15% 1.27 30 10.5 0.007 36 878 Meaning 1 glass 2 5.07 9.3 0.008 31.4: item re. 1 D + 25% 1.27 '32 16.1 0.002 59 fill in 1 glass 1 5.08 14.9 0.002 56: D + 26% 1.27 on this page 32 13.5 0.003 48.5 -1136 1 Glass 1 5.08 10.7 0.001 38.4 37 1 I D + 20% 1.27 33 30.4 0.007 114 -264 1 | Glass 2. D + 25% 1.27 32 15.3 0.002 55 -560 Order I Glass 2 5.08 12.7 0.004 46 -342-1 —1 D + 30% 1.27 30 13.3 0.002 45 -918 1 Glass 3 5.08 9.8 0.002 33 34 1 1 D + 25% 1.27 29 40.5 0.009 131 61 1 | Glass 2+ 6.6% by weight SrZr03 5.08 38.6 0.008 125 360 1 1 D + 25% 1.27 34 14.8 0.003 57 (-75 6 1 Glass 2+ 5.08 10.9 " 0.003 42 193 1 I 2.7% by weight I SrZr03-1 D + 25% 1.27 31 20.7 0.005 72.3 -119 Μ | Glass 2+ 3.3% by weight 5.08 15.7 0.005 55 579 1 1 IS r Z r 0 3 -15 1 1 1 1 1 1 This paper size is applicable to Chinese National Standard (CNS) A4 specification (210X 297 mm) A7 B7 405330 5. Description of the invention (13) ~~ Screen printing is made of barium titanate Other low dielectric constant capacitor oil blacks to form capacitors of different sizes, terminated at 1670 Baska / British pair 2 and terminated with a layer of silver ink, which was placed at 1 740 Baska / Inch 2 Co-laminated to Kovar 'and fired at 8 65 ° C. Several screen printings were performed to make the minimum thickness of the fired capacitor. Its composition, dimensions, and firing characteristics are summarized in Table VII below, where glass is imparted in a volume% manner. Table VII Straight | Piano „Combination 亘 inch, millimeter thickness, micron slightly Faraday r also — 25% glass 2 Meal printing / mm 1.27 15.7 2.54 13.0 5.08 12.6 1.27 22.7 2.54 20.0 5.08 20.5 1.27 19.7 2.54 16.2 5.08 15.2 1.27 25.0 2.54 22.4 5:08 22.1 1.27 14.8 2.54 12.9 5.08 12.6 IR is measured as 1.4 X 1 〇12 ohms 39 25% glass 2+ 32 3.3% by weight SrZr03 23% glass 2 * 32 21 % Glass 2 35 30% glass 2 35 71 56 55 84 71 74 71 58 55 99 89 90 59 51 50 1 §δ 0.004 0.004 0.004 0.007 0.006 0.006 0.003 0.003 0.003 0.004 0.004 0.004 0.002 0.003 0.004 TC £ -127 201 348 70 313 453 -118 185 296 -69 242 365 271 360 411 Drinking into the valley device and TCC: their capacitance and dielectric constant per unit area are obviously size dependent. Generally speaking, the dielectric constant increases with the size of the capacitor It is reduced, as shown in Figure 1, where TCC shows the corrected capacitance. The smaller the capacitor, the higher its capacitance, which may be caused by the edge capacitance effect and the interaction between the capacitor and the surrounding ceramic layer. 16- Paper The scale is applicable to the Chinese Standard (CNS) Λ4 specification (2IOX297 male t __ ^ 〇53j〇 5. Description of the invention (~~~ —, Second, the Han Chong asked the dielectric constant of the embedded co-fired capacitor (κ = 15〇 〇) is a more difficult problem. Due to the high sintering temperature of the capacitor dielectric material, the low firing temperature currently used in the green belts results in porous dielectrics; the mixed system of acetic acid lock and low firing temperature glass Dilute the dielectric constant; the surrounding low dielectric constant glass ceramic materials diffuse into the capacitor, which causes further dilution effects; and the diffusion of metallic silver into the capacitor also dilutes the dielectric constant. Therefore, the obtained barium titanate is used as The benchmark embedded capacitors are limited to KK, which does not exceed 700, which are also shown in Tables VIII and 1}. (Table 111) is a summary of the capacitor characteristics of embedded BaTi03-based capacitor inks using a silver powder conductor layer. The green tape and capacitor layer are laminated at 280 Baska / inch 2 and fired at 85.0 °. The glass is given in volume%. (Please read the notes on the back before filling in this page} Binding

Table VIII Composition thickness, micron size, millimeter pico method K Tan5 TCC / mm 2 7.5% by volume 29 1.27 123.4 404 0.005 Wave 4 * 2.54 120.22 394 0.007 5.08 107.5 352 Same _ 29 1.27 221.3 725 0.008 259 2.54 193.6. .. 634 0 * 007 313 5.08 187.9 615 O.OO7 / 305 The consumer cooperation of the Central Bureau of Standards, Ministry of Economic Affairs, Du printed capacitors above are manufactured with capacitor dielectric ink coated on and under the conductor pads as Bund layer. -17- This paper size is in accordance with Chinese National Standard (CNS) A4 specification (210X 297 public broadcasting) 405330 A7 B7 V. Description of the invention (15 7.5 vol% glass 4 ** 29 7.5 vol% 26 PbTi〇3 / Bi203 8.8 vol% 32 Glass 5 ** 1.27 2.54 5.08 1.27 5.08 1.27 5.08 167.4 151.3 154.1 150.0 131.2 158.7 160.0 549 496 505 441 385 574 586 0.008 0.008 0.008 0.014 0.013 0.01 0.010 335 423 433 Use silver powder as conductor * Use silver-period powder as conductor Capacitors up to 625 550 are summarized in Table IX +, which uses laminated green tape at 1670 Baska / and at 8 65. (: fired for manufacturing .: The silver conductor used is a silver sheet .Break glass is given in volume%. Composition. 7.5% glass thickness, micron size, table meters 27.4 8.8% glass 5 * 27.2 Printing and production of the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 7.5% PbTi03 / Bi203 25.6 1.27 2.54 5.08 1.27 2.54 5.08 1.27 2.54 5.08 Table IX Pico Faraday / 15 ~ 215.9 197.9 214.5 223.2 220.2 222.4 198.7 486.5 183.6

K 668 612 664 686 677 600 575 540 531 lanS 0.007 0.007 0.007 0.010 0.010 0.010 0.010 0.010 0.009 TCC 1047 56 -173 166 39 -130 * IR is 4.7xlOIQ ohm * * IR is 5. 1 X 1 〇10 ohm or more capacitor combination The system has been modified to promote sintering at low temperatures, and it has the lowest dielectric constant annihilation ψ, the compound ancient, the reduction of the number of coins / Wei Xi is less than 10% by volume. cdO or PbTi〇3 劁 谇 + ba a 8 3 1 (low-melting oxide 18- this paper size Shizhou Chinese National Standard Xin (CNS) Λ4 grid (2) 0X 297 mm) —II: IH--I -----: .1-Shi ^ II---I--1 —II ϋ— X * 0¾.-, Va I.-(Please read the _ Cautions on the back of the page before filling in this page)- Xiang 330 A7 B7 V. Description of the invention (16) or glass additive, which is a material that can be dissolved in the BaTi03 barium titanite lattice structure. These represent firing compositions with a maximum dielectric constant of about 700. When low TCC is required, that is, between room temperature and 25 ° C or between room temperature and 8 5. The temperature range between C is less than 60 ppm / .C 'barium titanate-based capacitors The formula also contains real-quality TCC improver SrZr03. Table X shows no two suitable capacitor ink compositions, which are given in volume%. Table X Composition ink printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 1 Ink 2 BaTi03 4 7.7 37.5 SrZr03 15.9 30.6 Glass 2 12.4 1 .5 Glass 4 6.8 Hypermer PS 2 1.5 1.5 E1 vacite / Solvent 22.5 22.1 Silver-based ink with 8 3 丨. 7 8% silver powder, 0.6 5% glass 5 ° / 〇 mixture of ethyl cellulose in texanol solvent 3% EIvacite resin in the tincture alcohol tincture 7 61% 'glass 3 filler Hype magic PS2 and 2.54% butyl wu (glycol) drop agent' Screen printing bottom electrode as individual layer, screen printing three dielectric layers, and a brush top electrode. Laminated germ band stack 4 under j 670 Baska / British leaf 2 and U00 Baska / Inch 2 under lamination to Covar substrate, and the overall system at 865oc ^ Paper scale Gu towel Guanjiapi -19- II--m Hi I--1--'* 民 I!- 1 1--IIT * Inferior,-°-. (Please read the note on the back 1 before filling out this page) 405330 ； 17 ·-5 2. Description of the invention (1) It is fired. The dielectric constants (K) & TCC at two temperatures are given in Table XI below.

Table XI TCC Economy. Shao Central Bureau of Standards printed the dielectric dimensions of consumer cooperatives, Mil room temperature to 85 ° C room temperature to -25 ° C κ 1 200 -47.8 -430.4 77.8 100 12.0 -44 1.6 84.5 50 13.8 -3 5 6.7 97.0 2 200 • -3 3 5.3 -73 .5 '' 75.6 100-3 8 8.2 -28.6 77.6, 50 -440.0 18.3 88.6 The capacitor ink with low TC C and low dielectric constant can also use oxidation Titanium (T102) is manufactured as a dielectric. Dielectric ink uses 4 2. 丨% of τ i 0 2 powder, 2 9 · 6% glass, 1.4% of 11) ^ 61'11161? 82 dispersant and 20% E1 vaci te resin in the paste 26.9% of a mixture of alcohol solvents is manufactured. The dielectric ink applied to the green tape has at least one layer—the layer is below the top of the stack 'and the termination layer is applied thereunder using a conductive ink, and the stack is laminated and fired as described above. T C C and dielectric constant K are given in the following table XII. Table XII 4 TCC; 〆 size, millimeter room temperature to 8 5 ° c room temperature to -25 ° c K 1.27 68.6 32.4 25.7 2.54 14.6 55.4 18.5 5.08 3.0 69.8 15.7 ___ -20- As far as the paper size is applicable, China National Standards CNS ) A4% # (210X 2974M) (Please read the precautions on the back before filling out this page)., 11 405330 V. Description of the invention (18 A7 B7 In order for the embedded co-fired capacitors to be found, we must use the wrong one. · Magnesium J has a higher dielectric constant (κ > 1000) and PMN is a suitable high dielectric constant | acid-based (PMN) composition. Delete it from the following table, where% is: heavy quantity meter container Yau Ming ^ Wang Xia Table 7JT 〇 Printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs

Table XIII PMn% Additives 5.33 1.65 75.02 Glass 4 Resin seam BaTi03 1.35 3.33 13.32 76.88 Glass 4 3.97 1.61 BaTi03 1.01 3.31 13.32 74.16 PbTi03 6.01 1.65 PbO 1.60 3.28 13.11 MgO 0.20 74.93 Glass 5 5.49 1.65 BaTi02 1.35 3.32 13.27 7403 5.12 1.72 1.65 3.32 13.27 74.70 Glass 6 PbTi03 5.48 1.74 1.64 3.29 13.15 Seed coats-.-(Please read the precautions on the back before filling this page)

J .. H-I- 1 I Using the above H ㈣ salt-based capacitor ink and the "co-firing" on the oxidized support substrate, the silver powder conductor oil storm system can produce more than 2000 値. However, when it was embedded in the germ belt pressure on the Kovar supporting substrate, and was pressed, due to the dilution effect discussed above, κ 値 was greatly reduced to about W0. In order to obtain a capacitor with high dielectric constant on Kolt, a barrier layer can be used to block the diffusion of ceramic into the capacitor during co-firing. The barrier layer may be a more effective metallic silver composition, or a different dielectric material. When using very low melting glass compared with glass used in the raw germ zone layer--21-This paper size _ home standard (CNS) AT ^ T2H) X297 male f) ·-1 · .IIII -I · 405330 A1 ___ ._B7 V. Description of the invention (19): I found that B aT i 03 based capacitor ink can be used as the barrier material. The barrier glass is densified and crystallized at a temperature lower than that required for effective softening of the green glass. Therefore, the barrier glass breaks the glass to prevent the glass from diffusing into the capacitor. In these cases, the barrier layer is printed as a pad larger than the capacitor, both under the bottom conductor pad and above the top conductor pad, as shown in FIG. 2. In FIG. 2, the three-layer capacitors 2 having two top and bottom conductor layers 14 and 15 are sandwiched between the two top and bottom double-layer barrier layers, respectively. ‘Sequence makes the embedded capacitor layers en to the top and bottom embryo layers 18 and 19, respectively. '' Using the capacitor oil containing glass 6 and 7 07% BaTi〇3 as described above, the barrier layer was printed as a 19 x 19 mm lining, which was placed approximately at 74.16% PMN. 5.08x5.08mm capacitor center made by PMN ink. Use silver powder to make conductive ink. Different layers are used to determine how many layers of capric acid barrier are needed to obtain high dielectric constant capacitors on Kovar supporting multilayer circuit boards. The control group of the barrier layer is also tested. The test results are given in the following Table XIV 'where the number of prints refers to the number of screen prints used per layer. (Please read the precautions on the back before you read this page before filling in this page). Packing. — Order the XIV function printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs #Printing rule dielectric dielectric removal method; ii Tan5 TCC TRxlO Thickness, slightly collected Ground / mm 2 ohm barrier layer 3 24 conductor 1 capacitor 3 55 181.3 1132 0.017 control group 1 58 5.1 34 barrier layer 3 24-48 conductor 2 10 capacitor 3 36 751.6 3058 0.038 -19.6 control group 2 35 208.0 823 0.022 -9.5- 22- In this paper standard system _ Jia Pi ([milk] 44 specifications (21 (^ 297 公 楚 _) — five 405330 A7 invention description (barrier layer capacitor control group 3 barrier layer capacitor control group 4 2 2 2 10 11 46 53 32 11 36 31 91.6 128.2 493 689 0.009 0.022 -17.5 -8.5 8.3 6.4 360.0 219.0 1463 766 0.033 0.024 -21.5 -4.2 2.3 3.8 ^ Therefore, when a barrier layer with a minimum thickness appears, its dielectric constant is much larger than It is high when there is no barrier layer or a thin barrier layer is used. However, its embedded capacitor with a high dielectric ^ number can be printed with double metallization layer and printed with double barrier layer = Cheng. Good base * electric layer The barrier layer on one side, the number of times of p brushing is increased to-times, and a dielectric constant (Km) higher than 3 000 can be obtained. However, although the high dielectric constant capacitor can be manufactured through the above procedure, it requires several additional: Brushing step, and the thickness of the barrier layer must be about 16-20 microns in order to take effect. In addition, due to the thickness of several barrier layers, the conductive layer, capacitor layer, and terminal germ band layer are torn and must be carefully prevented from occurring. In addition, The ^ screen printing step (as high as n as described above) is an increase in processing cost. Therefore, users must find a more effective barrier layer to improve the embedding in the conductive oil, which requires fewer printing steps and has no The second thickness of the top layer is torn. I also found that using a mixture of silver flakes and silver powder as the conductive layer results in a very effective layer, which is better than using silver flakes or silver powder alone. Dielectric constant capacitor. The silver sheet alone forms a very effective barrier layer (K = 3 600), but it causes the above raw embryonic band layer to be torn during lamination or firing. Therefore, 75% by weight of silver Tablets and silver powder mixture in the amount of%, although it is not as a barrier as a separate material L -23- ^ & scales apply the Chinese National Standard (CNS) A4 specifications (Gongchu) (Please read first-precautions on the back (Fill in this page again)

_ 4〇533〇 a7 s' ---------- B7 legislation, description of the invention (21): --- 1-Z, 15-percent dielectric constant capacitor. However, the capacitor is outgassed during the firing period d '. If the metallic silver seals the capacitor too tightly, the gas formed by adding J (containing p b 0) material cannot escape. Therefore, although the sheet is & the capacitor with a dielectric constant of 南, it is formed during firing. The structure becomes too dense 'leading to tearing of the upper raw germ zone. Therefore, the mixture of silver and silver flakes, although it is 坆 ^ t 撝 from the perspective of dielectric constant, does not tear the terminal embryonic lamellae layer or make these structures have two outgassing or initiation. Bubble problem. A plurality of embedded mN-based capacitors are fabricated on a Kovar substrate using silver powder, silver flakes, and a conductive layer of mixed silver powder and silver flakes. Laminated at 1670 Baska / British and at 86.5. Baking is performed under C. The test results are summarized in Table XV below. (Please read the precautions on the back of the barn before filling out this page) _ Binding. Printed by the Central Bureau of Standards of the Ministry of Economic Affairs and Consumer Cooperatives Printed Forms XV Silver Powder Type Printing # / Thickness A ± Pico Faraday / K Tan5 IC 2 / 10-11 microns 31 1.27 14.6 51 0.001 -2.0 2.54 27.7 97 0.010 5.08 112.6 394 0.018 -6.9 powder 2/13 microns 35 1.27 60.9 246 0.009 11.4 2.54 230 908 0.021 -16.5 5.08 482.5 1581 * 0.045 -27.6 flakes 2 / 10 micron 29 1.27 " 447 716 0.027 -21.7 2.54 716., '2346 0.037 -27.6 5.08 1066 3 imprint 1 0.040 -30.1 flake 1/5 micron 21 1.27 383 928 0.018 -30.8 2.54 841 1967 0.027 -38.1 5.08 1050 2498 0.026 -41.9 Mixed 1/6 micron 29 1.27 228 748 0.023 -30.8 2.54 477 1564 0.033 -39.8 5.08 706 2313 0.045 -44.7 -24- This paper size applies to China National Standard (CNS) A4 specification (21〇X 297 mm ) A7 405330 V. Description of the invention (22 Kun Kun 2 bottom / 6_5 29 1 top / 3.2 micron 1.27 624 2043 0.025 -42.7 2.54 931 3052 0.037 -49.1 5.08 1005 3295 0.048 -51.8 The insulation resistance (111) of the first capacitor of 5.08 mm size is 38 \ 10 (1) ohms. The insulation resistance (IR) of the second capacitor of 5.08 mm size using a silver sheet is 6.00 ohms. The IR of the first capacitor using mixed silver and the same size is 1.0 × 100 ohms. The above embedded and capacitors manufactured by using a mixture of silver flakes and silver powder as a conductor layer require fewer printing steps and There is no bubbling or outgassing problem during firing. There is no tearing of the upper raw germ zone. The dielectric constant of ΐτ ΜΝ capacitor shows a large size dependence; that is, the dielectric constant increases with the size of the capacitor. And T (: c also increases (becomes more negative) as the capacitor size increases. It is believed that it is the result of the dilution of the valleyr dielectric by ceramic materials with a low dielectric constant around it. Large capacitors have smaller dilution effects than smaller capacitors. This is shown in Table XVI below, and the dielectric constant and Tcc versus capacitor size diagrams are shown schematically in Figures 3 and 4, respectively. In the table χν *, the capacitor is based on P MN with mixed silver powder_silver flake ink. Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs Form XVI. Pico Faraday MM 2 1.27 10% Glass 4 22.4 + BaTi03

Tan5 TCC ° / 〇 IRxlQ | 205 518 0.015 2.54 496 1259 0.018 5.08 728 1844 0.019 -45.5 -55.6 -59.7 1.9 25-

405330 ^ V. Description of the invention (23 7.5% glass 4 31 + BaTi〇3 10% glass 5 24 + BaTi〇3 10% glass 6 30 + BaTi03 10% broken glass 6 25 + PbTi〇3 1.27 2.54 5.08 1.27 2.54 5.08 1.27 2.54 5.08 1.27 2.54 5.08 7116 334 607 173 508 821 227 253 372 68 216 329 400 0.011 1154 0.017 2098 0.022 456 0.007 1367 0.008 2209 0.009 484 0.014 870 0.016 1279 0.018 196 0.011 620 0.016 944 0.019 -38.4 -50.3 -57.3 -37.6- 47.3 -52.9 -24.2 -33.6 -38.4 -18.1 -24.8 -27.1 1.5 Intermediate range manufactured by the Consumer Standards Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs and printed with the same mixed silver flake / powder conductive layer (κ = 500-700) Barium titanate-based embedded capacitors, which are also laminated at 1670 Baska / inch 2 and fired at 865 ° C, have no size dependence. Figure 5 shows the use of the dielectric constant of a mixed silver conductor for capacitors. A dimensional drawing showing the difference in size dependence of barium titanate-based capacitors and PMN-based capacitors. Therefore, for the application of the intermediate dielectric constant 値, 鈇 酸 # 贝基 炎 入 电 谷 器 can better coordinate and ρ Μ N based capacitors have lower TCC compared. The embedded capacitor of the present invention is one or two thin ribbon layers embedded below the top of the stack, which has been subjected to the BT reliability test (85 ° C / 85% RH / 50VDC) for more than 1,000 hours, and No degradation of capacitance, dielectric loss or insulation resistance (IR) of the capacitors. The above-mentioned inventions have embedded co-fired capacitors; ceramic circuit boards are useful in different applications such as cellular telephones. Different resistors The formula of the ink, the method of forming the embedded resistor and the test results will be discussed below. -26- This paper size is applicable to the Chinese National Standard (CNS) A4 specification (2 丨 0 × 297 mm) (please read the note on the back of the information first) Please fill in this page again) Install '1T 405330 b7---5. Description of the invention (24) (Please read the precautions on the back before filling out this page) It has 300 ohm / square to 100 ohm / square resistor and Its TCR < + 200ppm / (5c resistor ink in the temperature range from room to 125 ° C) can also be manufactured according to this invention. Specific cell phone applications have a target characteristic of 1 ohm / square And temperature range from room temperature to 125 Within less than or equal to 200ppm / TCR ° C of. The resistor ink is made of Ru02 powder with a fine particle size and high surface area, which is summarized in Table χ v. Table XVII ′ Specifications Particle size, micron 0.15-0.45 Surface area (m 2 / g) 15-25 Purity-wt% 1111 73-76

Ru02 is mixed with one or more glasses to reduce the firing temperature of the conductor powder. The glasses 1 and 3 disclosed above are suitable. TCR improvers such as BaTi03 can be added. Economy, Ministry of Standards, Ministry of Standards and Staff, Consumer Cooperative Co., Ltd. and above. The glass is mixed with Ru〇2 powder, optional modifier, and appropriate organic media to form a screen printing composition that can be fired at low temperature. It is similar to the firing temperature at which the green embryonic belts to be applied are stacked. Ink powder for electric appliances generally contains 17.33 to 24.8% by weight of ruler 102, 74.3-8 to 1 ^ 7% by weight of glass 1 and 0.99 to 1-10% by weight of barium titanate. In comparison, the preferred composition contains 19.8 to 23.14% by weight of 1102, 75.87 to 79.21% by weight of glass 1 and 0.99 to 1.1% by weight. /. BaTi〇2. The resistor ink is screen-printed on the raw germ belt, and its utilization is from -27-sheet scale to 1-country national standard vehicle (CNS) Λ4 specification (210X297 mm) ~~ 'Consumption Cooperative of Staff, Central Bureau of Standards, Ministry of Economic Affairs, 405330 A7 ___._ B7 V. Description of the invention (25) ~ 0.508x0.508 to 2.032x4.064 mm. Various patterns (1/2 square and square) are incorporated into the stack of laminated green embryonic belts. The germinal band composition applicable herein includes the following components, which are summarized in Table χνΐΙΙ *. The intermediate dimensions of glass and filler are given in microns. Table XVIII Material Function Composition 1 Composition 2 Glass 2 Crystal Dragon Glass 57.34 57.29 P 1 2 Glass * Amorphous Glass Break 6.98 7.03 Magnesium Silicate Ceramic Filler 7.27 4.42 Ocherite Ceramic Filler 1.09 3.44 HypermerPS? 1 Dispersant 0.58 0.58 Butvar B982 Binder 2.04 2.04 Santicizer 1603 Plasticizer 1.36 1.3 6 Methyl ethyl ketone solvent 11.67 11.67 Anhydrous ethanol solvent 11.67 11.67 1) I CI registered trademark of the US company 2) Monsanto registered trademark j) Μ ο ns an t 〇 The company's registered trademark% Impairment is terminated with a silver conductor ink and its screen printing is also required. Among them, a suitable silver ink composition is 83 78% by weight of silver powder, 0.65% by weight of glass 3, 122% by weight of dispersant, 0% by weight of ethyl fiber resin, and 0.8% of Elvacite. 2045 resin (available from • 28-

(Please read the precautions on the back of the page before filling in this page.) Installation, βτ A7 B7 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs ^ 405330 V. Description of the invention (obtained by 26 Monsanto), and 3 32% by weight Group ⑽, 6 ... wt% of terpineol and 2.54 wt% of butyl hydrazone (ethylene glycol) mixed solvent. The raw green tapes are stacked and laminated on one another and placed on a Kovar support substrate and Co-fired in the air at 850 900 C. Print the resistor and place a layer below the top surface of the ceramic material stack. After co-firing, the silver ginger bar or gold conductor ink is subsequently printed to print the resistor. Connected to the outside and post-fired in air at 700-750 ° C. The following table XIX is a summary of the Ru〇2_ glass composition and its sexual properties of fired resistors. In Table XIX The composition is given in% by weight, and T c R is measured from steroid to temperature to 125. The short-term overload test (STOL) is also performed.

Table XIX Composition 15% Ru02 85% glass 3 R (仟 ohm / square) 99.9 TCR.ppm / ° C -80 STOL 22.5% Ru02 75.5% glass 3 2.0% BaTiO3 5:08 -111 200 volts / 5 seconds / 0.06% AR 22.8% Ru02. 76.2% glass 3 4.00 " 28 i 2.0% BaTi03 24.75% Ru02 74.26% glass 3 0.99% BaTi03 0.86 209 40 volts per 5 seconds / 4.5% AR 21.5% Ru02 77.6% glass 1 0.9% BaTi03 1.01 -20 -29- This paper size applies to China National Standard (CNS) A4 specification (210 × 297 mm) 5. Description of the invention (

21.6% Ru02 77.9% glass 1 0.5% BaTi03 18% Ru02 82% glass 1 10% RuO2 90% glass 1 24.8% Ru02 74.3% glass 1 0.99% BaTi03 18.9% Ru02 80.6% glass 1 0.5% BaTi03 0.46 0.52 22.9 0.54 0.94 153 262 44 25 117 150 volts / 5 seconds Printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs. Therefore, the use of glass 3 can effectively form high chirp resistors in excess of 2 shohms / square. The Glass 1 composition was selected to further develop a ohmic square resistor. ° The above resistor composition is mixed with an organic vehicle to form an ink composition, which uses a dispersant (1.44% by weight) 'ethyl fiber resin N 3 〇〇 (〇.% By weight), Elvacite resin 〇45 ( 39% by weight) and 2518% of a mixed solvent of pinol and butyl hydrazone (ethylene glycol). The resistor ink was adjusted to 38 vol% solids. In order to maximize the circuit density, it is better to print a small-sized resistor such as 0.50 × 8 × 1 ×× 6 to 〖× 2.032mm pattern to obtain a resistance of 5! 〇 Liang. Manufacture of resistive resistor oil inks with different solid ratios to adjust the resistance and TCR 値 while still keeping the volume% at 38% and the dispersant concentration at 2% by weight of the total powder weight under. Useful powder compositions of resistor inks are summarized in Table X X below. 10 Approx. 16 devices (please read the notes on the back of t before filling out this page) -30- This paper size is applicable to China National Standard (CNS) A4 specification (210X 297g t) 5 405330 A7 B7, invention description (Ru 〇2 Glass 1 BaTiO, 28 Table XX Preferred composition. Weight. 〇17.33-24.8 74.3-81.7 0.99-1.10 19.8-23.14 75.87-79.21 0.99-1.1 The suitable resistor ink composition made from the above powder mixture is shown It is shown in the following table XXI. · Materials printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economy Ru02 Glass 1 BaTi03 Hypermer PS2 15% Elvacite 2045 / Terpineol 7.5% Ethyl Cellulose N300 in Butylpyrene (ethylene glycol) / The pinolol conductor sintering aid TCR control dispersant adhesive / solvent 25.1 2 25.84 25.3 8 μΦ ink composition, weight% -1 ~~ __2_1 16.70 14.42 14.93 54.73 57.59 56.15 0.7 1 0.72 1 -43 1.44 1.4 5 1.31 1.32 1.30 After the resistor screen is printed on a layer of 4-5 layers of laminated green tape as described above, it is 850-900. (: The bottom is co-fired on Kovar, coated with silver · palladium or Top surface conductor ink made of gold and post-fired at 75GD (: In Zhi-31, this paper size applies the Chinese Standard for Storehouse (CNS) Λ4 specification (210X297 Gongchu-II ^^^ 1 nn n ^ i nn I -1----taxi-I--II · nn a 0, ml-.-. *---： .. (Please read the notes on the back before filling out this page) A7 B7 Demolition 5330 V. Description of the invention (Stream or low frequency (10 Hz) bet 丨 Wu + Sands) The resistance of TIL I, and TcR is measured by a resistance meter measured at room temperature and 1 2 5 ° C. Go to the hole! Table ΧΠ.

Table XXII Printed ink size of employees 'cooperatives in the Central Standards Bureau of the Ministry of Economic Affairs, millimeter thickness and micro area (square) TCR, co-firing 劁 R (shohm) ppm / ° C 2 0.51 X 1.02 18.3 0.496 0.438 91 1.02x2.03' 18.7 0.496 0.501 10 1.52x3.05 14.3 0.496 0.563 -18 3 0.51 X 1.02 18.0 0.506 0.434 58 1.02x2.03 16.0 0.502 0.504 1 1.52x2.03 14.5 0.505 0.543 • 46 2 0.51 X 1.02 19.2 0.461 0.412 62 1.02x2.03 19.3 0.487 0.503 -59 1.52x3.05 13.1 0.490 0.617 -64 Ink size, mm-TCR. Post-stage firing R (仟 ohm) ppm. ° CR (rough word Fanyou! 2 0.51 X 1.02 0.472 -85 0.952 1.02x2. 03 0.536 9, 1.080 '1.52 X 3.05 0.598 -34 1.206 3 0.51 X 1.02 0.471 75 0.931 1.02x2.03 0.542 -9 1.080 1.52x3.05 0.582 -34 1.154 n ^ in ^ i-m ^ i In * t.- -n ^ i nn I I OJ--. 1 '1 〔--(Please read the precautions on the back before filling this page) 32- This paper is a Chinese standard (CNS) A4 size (2丨 0 '乂 297 Gongchu) 405330 A7 · ·' B7 Invention description (3 (5) 2 0.51 X 1.02 0.442 58 • 0.959 1.02x2.03 0.540 -54 1.109 1.52 X 3.05 0.660 -82 1.347 Obviously, after firing at 750 ° C in the later stage, the resistance 値 increases on average by 7_3%. In addition, the resistor 値 increases with the size of the resistor And the increase. This increase in resistance as the size increases is due to the dilution of the resistor · due to the silver-terminated conductor layer during co-firing, which reduces the thinner resistance for smaller size resistors.: Other resistors from the resistor ink compositions 1 and 2 are given in the following tables XXIII and XXIV, respectively. TCR is measured at room temperature and 125 ° C. (Please read the precautions on the back before filling out this page) Assembly ---- .ir size, millimeter area, millimeter; printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs (1) Square resistor 0.51 X 0.52 1.02x1.02 1.52x1.52 (2) 1/2 resistor 0.51 X 1.02 1.02x2.03 1.52x3.05 2.03x4,06 0.258 1.032 2.323 0.516 1.065 4.645 8.258 meter XXIII resistor green cover firing

Post firing TCR ppm / 0C 721 922 976 459 498 511 534 778 1003 1064 496 541 .557 582 -43.4 -94.6 -111 -55 -92 -108 -118 The printing thickness is 18 6 micro-33- This paper size is applicable to the Chinese Gardener's Standard (CNS) Λ4 specification (210X 297mm) A7 B7 405330 V. Description of the invention (31 size, millimeter area, Tailai 2 Table XXIV resistance ( Ohm) Backfired TCR (micron) (1) Square resistor: 0.51x0.51 0.258 1.02x 1.02 1.032 1.52 X 1.52 2.323 (1/2) Square resistor: 0.51 x 1.02 0.516 1.02x2.03 2.065 1.52 X 3.05 4.645 2.03 X 4.06 8.258 DDm / ° C Burner in the rear section 957 1022 -2 1086 1172 -55 1109 1200 -74 525 563 -9 15.3 547 591 -53 15.2 562 608 -66 13.8 566 612 -70 Central Ministry of Light Industry The resistor data of the printed ink resistor composition printed by the staff of the prospective bureau is shown in Figures 6 and 7, which are the square resistor and (1/2) resistor, "resistance versus resistor area chart." The above resistors are also tested for reliability. The test i is 8 5. The c / 8 5% rh is 100 000 hours. Test 2 consists of more than 2000 cycles between _ 5 5 and 丨 2 5. c. ^ Test 3 is to apply 15.5 watts / cm 2 to the resistor at 70 ° C 1 0 0 0 Hours. The resistor passed these tests. The resistor ink 1 was used in a design board "made in a receiving board operating at 1 Gigahertz" to make a 1.016x2.032 mm branch 510 ohm embedded resistor. Burned in the back section After manufacturing, it can obtain 5 10 ohms ± 10%: resistance 値, which provides dry ink thickness can be maintained between 18 and 25 microns. The ceramic printed circuit board of the invention can also be used to incorporate or embed such as RF filtering Other components of the device. In these examples, the thickness is made after firing. -------- -II Clothing --1 ---, 1τ-·-· (Please read the precautions on the back first (Fill in this page again) -34- This paper size is applicable to China Garden House Standard (CNS) Λ4 specification (210X 297mm) —— 405330 V. Description of the invention (32) Over 2¾m thick stack. However, a large number of raw germ band layers after firing prevent accurate control of shrinkage in the X and y dimensions, and in addition, multilayer stacking systems tend to delaminate from the metal support substrate when firing. Therefore, it is necessary to develop a method capable of controlling shrinkage and preventing delamination from a metal supporting substrate on a plurality of thicknesses of the green embryonic belt. I have found that using the original technology of low dielectric loss glass and a small amount of oxide filler made of green embryo layer and the same glass but with a larger amount of oxide filler green embryo staggered layer, its more layers The raw germ bands can be stacked, laminated and fired, but are shrunk in the X y dimension and have no delamination from the metal support. Such thick multi-layer metal-supported circuit board stacks are particularly useful when the RF element is embedded in a stack. Its useful prior art glass used to make one type of green belt is made from zinc-magnesium-borosilicate crystallized glass as described above. The above glass 3 is a suitable crystallized glass, in which 20% by weight of tC0304 colorant is added. The glass was mixed with an amorphous lead-based glass-breaker in a 9.6% by weight lead-zinc-aluminosilicate system. One of the example glasses contains 42.0% by weight of 〇10.0% by weight, 8203, 388% by weight, 81-2, and 100% by weight. It is printed by the Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs. Packing I, (Please read the precautions on the back before filling this page} These B daily chemical-amorphous glass mixture knives and such as oxidized, stem bluestone 'quartz, wollastonite' magnesite and zinc silicate The reduced oxide filling and material combination is used to control the shrinkage and further modify the TCE. When the second oxide% material is added, all the better dielectric properties can be achieved. The shrinkage characteristics and the TCE matched by Kovar For example, L5-2% by weight of ochreite and 9 510.00% by weight silicate with a small amount of oxide fillers can be manufactured for this application. _ _ 35 _ Zhongguan CNS of this standard) Λ4 specification (2 〇x297 公 楚)-405330 " 7 __________ Df V. Description of the invention (33) ~ good ceramics. Therefore, these glasses have a large amount of glass and a small amount of oxide filler (< 15%). These glasses have excellent dielectric properties at microwave frequencies such as gigahertz These ceramics are hereinafter referred to as “type glass ceramics”. The first type of glass ceramic is made of the same zinc_magnesium_borosilicate glass, but it contains more than about 25% by weight of oxides. The amount of material increase. These glasses have a lower shrinkage than! Glass ceramics, and they are referred to as type 2 two glass ceramics later.-The following table XXV is disclosed in the manufacture of the second type of raw germ zone layer Examples of useful ceramic compositions. Ceramic composition 1 Table XXV 1 1 4 Crystallized glass 50.0 50.0 57.94 66.85 Amorphous glass 6.1 6.1 7.04 8.15 Magnesium silicate 30.0 2 1.95 30.44 2 1.70 Tsuenite 13.9 2 1.95 4.57 3.30 Volume% glass 50.9 49.1 6 1.9 72.4 Volume% filler 49.1 5 0.9 ,. 38.1 .27.6 Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs These ceramics therefore contain, for example, about 25-50% by weight of the main filler. Shisheng The germ bands are manufactured by using known methods to mix type 1 and type 2 glass ceramics with resins and plasticized dispersants and solvents, and to make them. The typical glass-ceramic composition used here is Has about 1 -1 2.5 microns -36- The paper size is suitable for cutting '_ 家 1 ^ 7CNS) M size (21GX 297 km) · Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economy ^ 405330 ί;--" " ·· " ---- V. Description of the invention (34) Crystallized glass particle size, amorphous glass particle size of about 6.5-8 microns, rare acid ballast with a particle size of about 3-5 microns, and about 2_3 Stem bluestone with micron particle size. The following Table XXVI discloses suitable ceramic germ tape formulations in weight percent.

Table XXVI Composition functions Type 1 type 2 glass / ceramic green glass / ceramic green belt main glass 57.34 t 31.2-36.4 &quot; secondary glass 6.98 3.8-4.4 magnesite powder filler 7.27 13.7-16.0 Tsuenite powder filler 1.09 13.7-16.0 Hypermer® PS2 dispersant 0.58 0.56-0.79 Butvar® B98 adhesive 2.04 2.13-2.87 Santicizer® 160 plasticizer 1.36 1.42-1.91 methyl ethyl ketone solvent 11.67 11.58-16.06 anhydrous ethanol solvent 11.67 11.58-16.06 make the obtained The mud was cast to form a 'green germ band' of about 5-20 mm thick and the green germ band was dried. 〆 The two types of raw embryos that make the knife use less and the main amount of oxide filler are mistaken. Silver or other metal patterns are screen-printed onto the green germ bands to form a * pattern. Because type 2 (high filler content) glass ceramics competes] Type glass ceramics become more porous during firing. The better circuit pattern is printed on the two type 1 ________ -37- tiiiiiTmuw 21 〇χ i ^ T)-Binding-·--. '(Please read the precautions on the back before filling out this page) Central Laboratories of the Ministry of Economic Affairs, Consumer Cooperatives, Printing Purple 405330 μ ---------- B7 V. Description of the invention (35)-Between the raw embryo bands to form a sealing ceramic. For this purpose, different conductor patterns are provided on the raw green belt. The co-fired conductive metal-based thick film conductor ink based on the glass composition of the invention can be manufactured with: δ silver private metal powder. It is mixed with a small amount of the above-disclosed glass: and known dispersants, resins, and solvents to form a screen-printable conductive ink. The top conductor ink can be made in a similar manner using silver-palladium powder, or gold powder. It is also possible to connect the circuit patterns on the layers of different green belts by using silver powder via filler ink in a known method. Subsequently, the green tape was appropriately laminated at about 1.14 kg / mm2 at about 93% for 4 minutes, and was laminated with the prepared—prepared &lt; metal support substrate under a pressure of about 13-14 kg / mm2. Pressure. After lamination and co-lamination, the multi-layer stack of Kovar substrates was fired in a belt furnace at a belt speed of <4 inches / minute to &lt; peak temperature. During firing, the organic material evaporates, and the low-melt glazed glass softens, which causes the multilayer ceramic stack to adhere to the metal core. The metal nucleus helps to limit the upper germ bands in the χ and y directions,%. Therefore, most of the shrinkage occurs in the z-direction of the vertical metal support. The presence of staggered type 2 glass ceramics with low shrinkage is also used to limit the shrinkage of multilayer stacks in the x and y directions. After firing, a conductive ink can be applied to the top of the fired multi-cutter stack to form a bonding pad, a sensor, a microstrip interconnect, and the like by a known method. This invention will be further illustrated using the following examples, but it is not intended that the invention be limited to the details described herein. In this example,% is expressed by weight. -38- This paper size is applicable to China National Twin (CNS) A4 specification (210X297mm) --- ^ ----- Packing ------: Order——4------ _ ( Please read the notes on the back before filling this page) A7 A7 Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs --- 405330 __B7 V. Description of the Invention (36)-Example 1 makes a layer of clever embryos, of which The three-layer system has a staggered coating of silver-based ink (C, D) and a 7-layer type 2 germ band (B), as shown in Fig. 1. The green compact strips were then stacked and placed on a Kovar support substrate, and co-laminated. Burn the stack. The shrinkage in the z-direction is 17.0%, but it is only 0.96% in the 乂 direction and 0.6 1% in the 乂 direction. The total stack after firing is 250 mm thick. Example 2 The 11 layers of type 1 germ bands are interlaced with the type 2 raw germ bands, and the three layers have a genus plane, as shown in FIG. 8. Figure 8 shows that the type i germ band is A, the type 2 germ band is B, C indicates that the RF filter is embedded, and D shows the silver pattern. The germ bands are staggered and stacked, laminated, and co-laminated to Kovar support and fired. The fired stack is 2.40 mm thick. The shrinkage in the z-direction was 17.0%, the x-direction was 064%, and the y-direction was 0.60%. Example 3 11 layers of type 1 germ bands and 7 layers of type 2 germ bands were staggered and stacked, laminated and fired. The resulting stack was 2.20 mm thick. The shrinkage in the Z direction was 17%, 0.83% in the X. direction and 0.98% in the y direction. \ &quot; Example 4 The 14-layer type 1 (A) raw embryo belt has an embedded filter (c) on one of the layers and a ground plane (D) on 2 of them, as shown in Figure 9, and 8 layers Type 2 germ belt (B) is staggered and stacked, laminated and fired to form a thickness of 252 mm -39- This paper size is applicable to China National Standard Extract (CNS) A4 specification (210X297 mm) ____1 · 'Packed' Order —, m-, *-f Jing first read 'I'm on the back and then fill out this page.) Staff Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs, Yinfan A7 --__ 405330__b7__ V. Description of the invention (37) Stacked. The shrinkage is about 17% in the z-direction, 0.35% in the x-direction and 0.85% in the y-direction. The resulting individual multilayer tape has physical properties. The results are given in Table XXVII below. Table XXVII Properties Type 1 Band * Interleaved with Type 2 Band * * TCE (25-300 ° C) 6.3ppm / ° C * 7.7 ppm / 0C ** Dielectric Constant 6.8 @ 1Gigahertz5.4 @ 12K Dielectric loss of megahertz (tan5) 0.001@1 gigahertz 0.0018@12 gigahertz volume resistivity (Π-cm) 1 · 5χ1014 surface resistivity (Π-cm) &gt; 1.0χ1012 chemical resistance 3.6 meters through embedded conductor resistance Ohm / Square Channel Conductor Resistance * 0.72m Ohm / Channel Separate Ceramic Example 5 on Kovar, Various properties of Type 1 and Type 2 green embryo belt stacks fired at 865 ° C and measured. The results obtained are summarized in Table XXVIII below. -40- This paper size applies to Chinese National Standard (CNS) Α4 specification (210X 297 mm) (Please read the precautions on the back before filling this page)

-1T A7 --405330 --- V. Description of the invention (38)

Table XXVIII Stack @ sample firing density 8. Tan5 Frequency 5 layers Type 1 3.14 g / ml 6.41 0.0023 15.6 GHz 5 layers Type 2 2.01 g / ml 3.64 0.0017 17.9 GHz 23 layers, Example 4 5.39 0.0018 11.6 GHz 20 Staggered layers 5.24 0.0019 12.2 GHz Therefore, staggered layers of raw embryonic belts can be stacked to produce} thick fired metal supported multilayer circuit boards that shrink only in one dimension. '' Although the present invention is described in terms of specific embodiments, its glass composition, oxide filler amount, metal support, number of green tape layers, capacitor type and capacitor ink, resistor and resistor ink, and conductor and conductor ink Such changes will be clear to those familiar with this inventor and an attempt is made to include them herein. The invention is limited only by the scope of the accompanying patent application. (Please read the precautions on the back before filling out this page) Employees of the Central Bureau of Standards, Ministry of Economic Affairs, printed by cooperatives This paper is sized for China National Standard (CNS) A4 (210X 297 mm)

Claims (1)

D8 Patent scope approval ^ / σ.Η 感 敏 lj £. | 2.9 No. 3 patent application as in | ^ | · Profit scope revision (October 88) Control-a type of supporting ceramic circuit board, of which With embedded elements, including a) a stack of laminated green tapes on a Kovar support; b) a screen printing element printed on a green tape layer with an ink containing dielectric and low melting temperature glass C) a conductor layer under the screen printing element; and d) a raw embryonic belt layer overlying the screen printing element. 2 · —A supporting ceramic circuit board having embedded components including: a) a laminated green belt on a Kovar support; b) selected from the group consisting of barium titanate, titanium oxide, and lead-magnesium-niobium Embedded screen-printed capacitors made from the dielectrics of acid salts; c) a silver conductor layer printed under and on the capacitors; and d) a green germ tape layer overlaid "3. According to item 2 of the scope of the patent application The ceramic circuit board is supported, wherein the capacitor is sandwiched between silver barrier layers, and the barrier layers are composed of silver powder and silver flakes. 4. The supporting ceramic circuit board according to item 2 of the scope of patent application, wherein the dielectric is lead-magnesium-niobate, and the capacitor is sandwiched between silver titanate or barium titanate barrier layers, the capacitor Has a high dielectric constant of more than 700. 5. A green embryo belt stack, which is at least 2 mm thick after being fired, and includes: forming a mixture of crystallized and amorphous glass and at least 5 wt% to 5 wt% oxide filler; Type I raw germ zone layer, and mixture containing crystalline and amorphous glass and weight percent higher than Type I oxide filler ------------ I ------ iT ------ ^ (please read the back of the childbirth first; please fill in this page before the notice) ~: Printed by the Employees' Cooperatives of the Central Procurement Bureau of the Ministry of Economic Affairs Printed by the Consumers 'Cooperative of the Shiyang Central Bureau of the Ministry of Economic Affairs 405330 g _ D8 Six' Patent Application Scope * The layer of the second type raw embryo belt is staggered onto the metal supporting substrate. 6. The raw embryonic belt stack according to item 5 of the patent application scope, wherein the amorphous glass is made of PbO, Al203 and Si02. 7. Stacking of raw embryonic belts according to item 5 of the Chinese Patent Application, wherein the oxide filler is selected from the group consisting of oxide oxide, cordierite quartz, white stone spar, magnesite and broken zinc ore. 8. The stack of raw green belts according to item 5 of the scope of patent application, wherein the metal supporting substrate is a copper-nickel covered or electroplated Kovar bearing. 9. The green belt stack according to item 5 of the patent application, wherein the conductive layer is screen-printed between one or more first type green belt layers. 10. The raw embryonic belt stack according to item 9 of the application, wherein the conductive layer is a silver-based layer. 11. The raw embryonic belt stack according to item 9 of the scope of the patent application, wherein the conductive layer is screen printed onto the top surface of the stack. 1 2 · — A stack of burned green germ strips is made by stacking green germ strips according to item 5 of the patent application. 1 3. According to the raw embryo band stack of item 5 of the patent application scope, wherein the radio frequency components are embedded in the raw embryo band stack. 14. A multilayer ceramic green belt structure comprising a plurality of low firing temperature green belts that will not shrink in the X and y dimensions during firing, and has a circuit pattern embedded on a metal supporting substrate, Capacitors screen-printed on one or more layers of green germ tape below the top of the stack, and conductor layers screen-printed on and below capacitors ❶ 15. Multi-layer ceramic green tape structure according to item 14 of the scope of patent application , Its -2-Shicai Xianjia County (CNS) (2 丨 _7 race) ------ τ --- install -------- order ------ line (please read first Please fill in this page on the back of the matter) ..... ο 00 S 5 ο 4 ABCD Printed by the Bayer Consumer Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs 6. In the scope of the patent application, the capacitor is barium titanate, titanium oxide or Manufactured from lead-magnesium-niobate. 16. The multilayer ceramic green tape structure according to item 14 of the scope of the patent application, wherein the conductor layer is silver "17. The multilayer ceramic green tape structure according to the scope of the patent application, item 14, wherein the capacitor is sandwiched between Between two layers of barium titanate having a thickness sufficient to prevent the green tape from diffusing into the capacitor during firing. 18. —A method for forming embedded components in a multilayer ceramic circuit board on a metal supporting substrate, comprising: a) component-based mother inks, low-firing temperature glass, and organic media; Printing the bottom conductor layer; c) screen printing the element mother ink screen on the bottom conductor layer; d) covering the screen element mother ink layer with one or two green embryo tapes; e) screen printing the top conductor layer; f) align and laminate the layers together, and g) fire the laminated layers. 19. A method for forming an embedded capacitor in a multilayer ceramic material circuit board on a metal supporting substrate, comprising a) selected from the group consisting of: acid, osmium oxide, and strontium sulphate, low-burn gas hlL degree glass, and The dielectric mixture of the organic medium liquid forms the capacitor oil, b) screen printing the bottom conductor layer; 〇 capacitor screen printing on the bottom conductor layer; d) screen printing the top conductor layer; -3- This paper size applies Chinese National Standard (〇 阳) 8 4 specifications (210 \ 297 mm) ---- „--------------------------- Order the line (please read the back first Please fill out this page on the matter of interest) A8 B $ C8 D8 405330 Scope of patent application e) Cover the capacitor with one or more green tape; f) Align and laminate the layers together, and g) fire These laminated layers. Kind of cereal grain inks, which contain a dielectric material selected from the group consisting of acetic acid pin, oxidized pin and boat-magnesium-niobate, low firing temperature glass, and organic medium. A resistor ink composition including low sintering containing ruthenium oxide in a range of 85 ° C. to sufficiently reduce the firing temperature of the mixture Degree glass and organic medium. 2 2 · The resistor ink composition according to item 2 丨 of the patent application scope, which additionally contains a TCR improver of barium titanate. 2 3 ·-A ceramic multilayer printed circuit board comprising Ruthenium oxide screen-printed resistor layers, and embedded resistors of low firing temperature glass covered with one or two green germs, which are printed on a green germ tape stack laminated to a metal support plate and On the conductor layer under the resistor layer. 2 4 · A ceramic multilayer printed circuit board according to item 22 of the patent application scope, wherein the metal support plate is Kovar. 25. A method for manufacturing an embedded resistor, which It includes: a) forming a resistor ink, which contains ruthenium oxide mixed with a sufficient amount of low firing temperature glass, so the mixture has a firing temperature between about 850 to 900 ° C. and an organic medium Liquid; b) printing the screen of ink on a green tape stack to deposit a resistor thereon; c) covering the resistor layer with one or two green tape layers; and d) terminating the first conductor layer below Resistor, -4- (Please read the notice on the back first (Fill in this page again) • Printed on the paper printed by the Central Government Bureau of the Ministry of Economic Affairs, the Consumer Cooperatives, the paper size is applicable to the Chinese National Standard (CNS) A4 (210 X 297 mm) ABCD 4Q5330 VI. Patent scope e) layer Pressing the obtained green embryonic tape stack; f) firing the stack to a temperature of about 850-900 ° C, g) covering the top surface of the firing stack with a second conductive layer, and h) firing the back stage Multi-layer firing. (Please read the precautions on the back before filling out this page) Printed by the Central Government Bureau of the Ministry of Economic Affairs, Consumer Cooperatives -5- This paper is in Chinese National Standard (CNS) A4 format (210X297 mm)