403830 A7 ________B7__ 五、發明説明（1 ) <創作背景> 一般而言，真圓度測量是將待測物放置於真圓度測量 儀的平台上，但待測物的圓心線與真圓度測量儀的中心線 並不一定完全重疊，故一開始待測物先以精確度較低，但 測量範圍較大的探頭進行測量，並由真圓度測量儀內部之 程式計算獲得待測物之偏心量，再以手動或自動進行偏心 補正後，再以精確度較高，但測量範圍較小的探頭進行測 量。對於精度要求較高的測量，此種偏心量可能只有數拾 微米。以目前的機構並不能達到這種要求。另外，一般的 真圓度測量儀只能對平面上的偏心誤差做補正，並無法作 角度上之調整。 這種待測工件圓心線與真圓度測量儀的中心線並不完 全重疊的現象，造成： (1) 執行測量時之設定費時。一般此種偏心補正 皆採取手動方式進行。 (2) 侷限於偏心之故，不能使用精確度較高之探 頭，因其量測行程通常較短。 經濟部中央樣準局員工消費合作社印製 (請先閲讀背面之注意事項再填寫本頁) 對於精密量測圓形工件，微米級之驅動使之對正圓心 之要求更爲殷切，因此爲了補正微米級之偏心位移及角 度，有必要發展此一機構。 於是架構在真圓度測量儀上之偏心補正機構，設計上 其層數或高度越小越好。發明人於硏發期間克服層數及高 度的困難，將X軸及y軸的偏心距離誤差與角度誤差之補 正機構設計在同一平面上，克服各補正之間的干涉現象， 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 經濟部中央標準局員工消費合作社印製 403830 at Β7 五、發明説明（2) 爲一具有實用功效及商業價値之微米級真圓度測量儀之偏 心補正機構。 <創作槪說> 本補正機構係架構在真圓度測量儀之平台上，再透過 A/ D卡與P C連結，分析出X、Y軸的偏心位移及傾角 誤差後，再透過D/A卡將補償之値送入微動器中，而利 用微動器的精密移動，帶動本項發明之機構進行補償。 —、X、Y軸的偏心距離補正部份： X軸、Υ軸的偏心距離補正以二組微動器配合鳩尾槽 組件，並於鳩尾槽組件及放置待測物之補正圓盤之間加一 鋼珠，借由鋼珠使得鳩尾槽組件得以於帶動補正圓盤。 二、X、Υ軸的傾角誤差補正部分： X軸、Υ軸的傾角誤差補正部份，於梯型塊的斜面上 銑一圓槽以配合鋼珠補正X軸、Υ軸的傾角誤差部份外， 更由梯型塊上的圓槽藉由鋼珠帶動補正盤旋轉。 爲一具有實用功效及商業價値之微米級真圓度測量儀 之偏心補正機構。經由上述之機構，所獲得之優良功效歸 結如下： 1、 X、Υ軸的偏心距離及傾角誤差的補償皆在同一平 面上，使得高度及層數降至最低。 2、 X軸、Υ軸的傾角誤差之補正可達到± 〇 . 2。。 3、 利用微動器補正，精度可達到微米。 本紙張尺度適用中國國家橾準（CNS ) Α4規格（210X297公釐） (請先閲讀背面之注意事項再填寫本頁)403830 A7 ________B7__ 5. Description of the invention (1) < Creative background > Generally speaking, the roundness measurement is to place the test object on the platform of the roundness measuring instrument, but the center line of the test object and the true circle The centerlines of the degree measuring instrument do not necessarily completely overlap, so the object to be measured is first measured with a probe with a lower accuracy but a larger measuring range, and calculated by a program inside the roundness measuring instrument. After the eccentricity is adjusted manually or automatically, the amount of eccentricity is measured by a probe with higher accuracy but a smaller measurement range. For measurements that require high accuracy, this amount of eccentricity may be only a few microns. This requirement cannot be met by current institutions. In addition, the general roundness measuring instrument can only correct the eccentricity error on the plane, and cannot adjust the angle. This phenomenon that the center line of the workpiece to be measured does not completely overlap with the center line of the roundness measuring instrument causes: (1) The setting for the measurement is time-consuming. Generally, this eccentricity correction is performed manually. (2) Due to eccentricity, a probe with higher accuracy cannot be used, because its measurement stroke is usually shorter. Printed by the Consumer Cooperative of the Central Bureau of Procurement, Ministry of Economic Affairs (please read the precautions on the back before filling out this page) For precision measurement of circular workpieces, the micron-level drive makes the requirements for the center of the circle more enthusiastic. Micron-level eccentric displacement and angle, it is necessary to develop this mechanism. Therefore, the eccentricity correction mechanism based on the roundness measuring instrument is designed to have as few layers or heights as possible. The inventor overcomes the difficulty of the number of layers and height during the burst, and designed the correction mechanism of the eccentric distance error and angle error of the X-axis and y-axis on the same plane to overcome the interference phenomenon between the corrections. This paper scale is applicable to China National Standard (CNS) A4 (210X297 mm) Printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs 403830 at Β7 V. Description of the Invention (2) It is an eccentricity of a micron-level true circularity measuring instrument with practical functions and commercial value. Correction agency. < Creation of creation > This correction mechanism is structured on the platform of a true roundness measuring instrument, and then connected to a PC via an A / D card to analyze the eccentric displacement and inclination error of the X and Y axes, and then pass the D / The A card sends the compensation to the micro-actuator, and the precise movement of the micro-actuator drives the mechanism of this invention to perform compensation. —, The eccentric distance correction part of X, Y axis: The eccentric distance correction of X axis and Y axis is adjusted by two sets of micro-motors to cooperate with the dovetail groove component, and one is added between the dovetail groove component and the correction disc on which the object to be measured is placed. Steel balls, through which the dovetail groove assembly can drive the correction disc. Second, X, Y axis tilt angle error correction part: X axis, Y axis tilt angle error correction part, milling a circular groove on the inclined surface of the ladder block to match the steel ball to correct the X axis, Y axis tilt angle error part, The round groove on the ladder block drives the correction disc to rotate by steel balls. It is an eccentricity correction mechanism for a practical micrometer-sized roundness measuring instrument with practical efficiency and high price. Through the above mechanism, the excellent effects obtained are summarized as follows: 1. The eccentric distance of the X and Y axes and the compensation of the inclination error are all on the same plane, so that the height and the number of layers are minimized. 2. The correction of the inclination error of the X axis and the Y axis can reach ± 0.2. . 3. Using micro-actuator compensation, the accuracy can reach micron. This paper size applies to China National Standard (CNS) Α4 size (210X297 mm) (Please read the precautions on the back before filling this page)
403830 ；] 五、發明説明（3 ) 本發明之目的及功能，請參閱下列圖式，作更進一步 之說’期使貴審查委員有較詳盡之了解，惟以下所述者， 僅爲解釋本發明之較佳實例，並非企圖據以對本創作做任 何形式上之限制，有關本發明之任何修飾或改變，皆仍應 包含在發明保護範圍內》 爲使本發明之構造揭露其技術內容，說明本發明之特 徵，敬請貴委員參照下列圖式與各具體實施內容，進一 步詳細說明如下： <圖式簡單說明> 第一圖 本創作之補正圓盤示意圖 第二圖 本創作之平面示意圖 第三圖 作品內部動作示意圖 第四圖 本創作之立體組合圖 <圖號說明> 經濟部中央榡準局員工消費合作杜印製 (請先閲讀背面之注意事項再填寫本頁) 配合（第四圖）介紹作品組成之零件名稱補正圓盤 1，底板2，L型固定座31、32，鋼珠41、42、 43，鳩尾座51、52，微動器61、62、63、6 4 ’梯型塊71 ' 72，壓縮彈簧81、82，圓形銷9 1、92、93、94,鳩尾槽10,固定螺絲111、 112，雙頭螺絲 121、122、123、124、1 25、126，圓孔131、132'133、134、 1 3 5、1 3 6 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐〉 f 經濟部中央標準局負工消費合作社印裝 403830 at ______B7____ 五、發明説明（+ ) <創作詳細說明> 本發明是與補正工具有關，是一種可以精確移動（解 析度爲0 · 1 μπι )，而使待測物移動到真圓度測量儀的 .平台之正中心。 請參閱圖（四）微動器6 1及6 2下方之L型座3 1 及32分別用銷9 1 ' 92、93、94固定在底盤2上 的圓孔131、132、133、134，然後微動器的 控制線可以從圓孔1 3 5、1 3 6拉出，再將微動器6 1、 62分別用螺絲1 1 1、1 12固定在L型座31、32 上，兩支微動器6 1、6 2之推動端（較瘦長部分）接於 鳩尾座5 1、5 2,鳩尾槽1 0上放置一顆鋼珠圓球4 1， 鳩尾槽1 0另相鄰兩面再以雙向螺紋7固定微動器6 3及 微動器6 4，微動器6 3及微動器6 4之推動端部份分接 兩個帶有45°圓槽的梯形塊71、72，兩個帶有45 °圓槽的梯形塊7 1、7 2再分別放置綱珠4 2、4 3， L型座3 1、32上加裝彈簧8 1、82，最後加上一補 正圓盤1。 上述之內部構造中僅以兩支微動器61和微動器6 2，就可補正平面上X、Υ軸的偏心距離誤差，其餘微動 器6 3和微動器6 4便可補正X軸、Υ軸的傾角誤差，而 當微動器61縮短或伸長時，因爲鳩尾槽組件之滑動而不 omo,403830;] V. Description of the invention (3) For the purpose and function of the present invention, please refer to the following drawings to further explain the issue of 'the review committee ’s detailed understanding, but the ones described below are only for explaining this. The preferred examples of the invention are not intended to limit the creation in any form. Any modification or change related to the invention should still be included in the scope of protection of the invention. To explain the technical content of the invention, Please refer to the following drawings and specific implementation contents for further details of the features of the present invention: < Simplified illustration of the drawings > Schematic diagram of the correction disc of the first picture and the plan of the second picture The third picture of the internal movement of the work. The fourth picture The three-dimensional combination of the picture < Description of the drawing number > Printed by the consumer cooperation of the Central Government Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling this page). (Picture 4) Introduction of the name of the components of the work. Correction disc 1, base plate 2, L-shaped mounts 31, 32, steel balls 41, 42, 43, dovetails 51, 52, micro-actuators 61, 62, 63, 6 4 'Ladder 71' 72, compression springs 81, 82, round pins 9 1, 92, 93, 94, dovetail groove 10, fixing screws 111, 112, studs 121, 122 , 123, 124, 1 25, 126, round holes 131, 132'133, 134, 1 3 5, 1 3 6 This paper size applies to China National Standard (CNS) A4 specifications (210X297 mm> f Central Bureau of Standards, Ministry of Economy Printed by the consumer labor cooperative 403830 at ______B7____ 5. Explanation of the invention (+) < Detailed description of the creation > The present invention is related to the correction tool, which can be accurately moved (the resolution is 0 · 1 μπι), so that it is to be tested The object moves to the center of the platform of the roundness measuring instrument. Please refer to the figure (IV). The L-shaped seats 3 1 and 32 below the micro-actuators 6 1 and 6 2 are fixed to the pins 9 1 '92, 93, and 94, respectively. The circular holes 131, 132, 133, and 134 on the chassis 2 can then be pulled out from the circular holes 1 3 5, 1 3 6 and the screws 6 1 and 62 are screwed 1 1 1 and 1 respectively. 12 is fixed on the L-shaped seat 31, 32, and the pushing ends (thinner parts) of the two micro-actuators 6 1, 6 2 are connected to the dovetail seat 5 1, 5, 2 and a steel is placed on the dovetail groove 10 The ball 4 1 and the dovetail slot 1 0 and the two adjacent sides are fixed with the two-way thread 7 to the micro-actuator 6 3 and the micro-actuator 6 4. The pushing ends of the micro-actuator 6 3 and the micro-actuator 6 4 are divided into two with 45 ° Slotted trapezoidal blocks 71 and 72, two trapezoidal blocks with 45 ° slotted slots 7 1 and 7 2 Then place the bead 4 2, 4 3, L-shaped seat 3 1, 32 with spring 8 1 , 82, and finally add a correction disc 1. In the above internal structure, only two micro-actuators 61 and micro-actuators 62 can correct the eccentric distance error of the X and Y axes on the plane, and the other micro-actuators 6 3 and 6 can correct the X-axis and the Y-axis. Tilt angle error, and when the micro-actuator 61 is shortened or extended, it is not omo because of the sliding of the dovetail groove assembly,
本紙張尺度逍用中國國家標準（CNS ) A4規格（210X 297公釐）I (請先閲讀背面之注意事項再填寫本頁) 訂 403830 五、發明説明（5* ) B7 A7 會牽動到另一微動器6 2，使其免受剪力，進而達到補正 X、Y軸偏心之效果。 (請先閲讀背面之注意事項再填寫本頁) 另外微動器6 3及微動器6 4因推動兩個帶有4 5° 圓槽的梯形塊71、72，間接使鋼珠42、43上升或 下降，而達到X軸、Y軸的傾角誤差之補正。 經濟部智慧財產局員工消費合作社印製 〇686〇^ 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐）The paper size is in accordance with the Chinese National Standard (CNS) A4 specification (210X 297 mm) I (Please read the precautions on the back before filling this page) Order 403830 V. Invention Description (5 *) B7 A7 will affect another The micro-actuator 62 prevents it from being sheared, thereby achieving the effect of correcting the eccentricity of the X and Y axes. (Please read the precautions on the back before filling in this page) In addition, the micro-actuator 6 3 and the micro-actuator 6 4 push the two trapezoidal blocks 71 and 72 with 4 5 ° round grooves to indirectly raise or lower the steel balls 42 and 43 To achieve the correction of the inclination error of the X-axis and Y-axis. Printed by the Consumer Cooperative of the Intellectual Property Bureau of the Ministry of Economic Affairs 〇686〇 ^ This paper size applies to China National Standard (CNS) A4 (210X297 mm)