5 A7 40372S_b7_ 五、發明説明（1 ) 一種真空複靥玻璃及其製法，尤指一種以光罩及蝕刻 方法使素淨的玻璃基板上形成多數物理性質相同的瀬塾製 造法0 真空複層玻璃是在2片玻璃間*夾著厚度〇·〇1〜O.lmiB 厚的襯塾（Pi liars)，並將遇邊形成密封且使密封室內部 抽成真空，可消除夾層内的氣應熱傳導·大大提高熱阻* 具有隔熱、隔音之優良效果。進行真空抽氣時*每1平方 公分的玻壤將承受1公斤Μ上的大氣胆力*而玻璘在未經 強化處理的情況下是極易碎裂的•所以必須在兩靥玻琪間 置入襯墊作為支撐*瑄樣•襯墊就必箱具有足夠的機械強 度及適窜的佈置*才不會增加成本、妨礙抽氣。 昔知關於親塾的製作方法有著列於國際專利合作組織 之申請案：PCT/AU90/00364、PCT/ AU93/00040 ·及美國 專利案US PATENT 4683154與US PATENT 4683154等技術 〇 其中PCT/AU90/00364所提之技術如圖1所示，観塾包含由 玻瑰、陶瓷、金屬等材料製成的玻璃平板（9) ·外圍先鍍 上一餍玻璃焊料（Solder* glass) (81) *或在襯塑本體上、 下放置玻璃焊料蓋片（Solder glass caps) *先將親塾排 放在一片玻璃板的預定位置上•然後再放上另一Μ玻璃· 加熱至玻璃焊料的熔點以上後*玻璃焊料熔化使觀墊本體 與玻璃平板黏結而成。而PCT/AU93/00040所提襯墊製作· 其觀塾是由鍊、戡、組、鎮、組、紋、銘與其合金等製成 。至於美國專利第4683154號中所提襯塾的製作方式為圖2 所示•將一定大小的圓形玻班球（8)擺滿整個平板*再Μ -2 - 本紙張尺度適用中國國家棣準（CNS ) 格（2丨0X297公釐） —11 - 1— ... ? 1^1 I - - - - - - I 11 - — ------ —^1 - I (請先閲讀背面之注意事項再填寫本頁) 經濟部f#率局負工消费含作3J4印策 403729 _B7 _ 五、發明説明（2 ) 雷射光束將特定位置的玻璃球画定在玻璃板上成為截塱， 並倒除其餘的玻璃球。而US PATENT 4683154所提親塾之 製作*亦是以黏性物質貼附顧墊。 5 (請先閲讀背面之注意事項再填寫本頁) 上述各種形成襯墊的方法•其共同的特色是「先製成 襯墊J ·然後再黏固或焊结「襯塾在玻璃平板J上。這種 做法不但費時費力•而且效果不彰，首先是要如何做才能 讓每一個被佈置的襯墊形狀、規格一致•其次堪必須考盧 顧墊材質的物理性質是不是能夠與玻璃结合•俾便與玻璃 平板黏固或焊结；再者遵要解決襯塾如何被安置到玻璃平 板的佈置點問題，以如何讓親墊固結在玻璃平板上的間題 ;解決了這些間題*适得考盧該顧塾製造法能不能在曲形 的玻璃基板上實施，以便能增加產業的應用範圍與價值。 針對昔用技術的問題•本案提供了一個良好的解決方 案*即本案具有以下的目的： --提供一種不需事先製作襯墊的玻璃襯塾製法。 二、 提供一種不需另外選擇襯塑材料的玻璃親墊製法。 三、 提供一種不霜黏结襯墊的玻戒截塾製法。 經濟部樣準工消費合作¾ 四、 提供一種可以在曲形玻璃、平面玻璃形成玻璃襯墊的 製法。 五、 提供一種在玻璃基板上直接成型襯墊的製法。 六、 提供一種真空複曆玻璃的新製法。 七、 提供一種物理性質完全一致的真空複層玻璃。 上述目的達成，係Μ光單對淨化之玻瑰基板定義多數 觀墊佈置點•並使該多數襯墊佈置點距基板邊緣一距離’ -3 - 本紙張尺度遑用中國國家標準（CNS ) A4規格（210X 297公釐） 40372S_^_ 异、發明説明（3 ) 再對基板賁施選擇性触刻Μ形成多數瀬墊•經蝕刻之基板 再與観墊上方之蓋板结合成密封内室，經抽氣後使內室圼 真空狀，而得一真空複層玻瑰。 5 (面之注意事項再填寫本頁) 詳细的說明*兹配合圖3Α、3Β、3C、3D、3Ε及圆4加 Μ蘭釋； 圖式簡單說明： 圆1像PCT/AU90/00364所示玻璃瀬塾製法圖例。 圖2係US PATENT 4683154所示玻璃観塾製法圖例。 圆3A係本案在玻璃基板上塗佈光阻層斷面圖； 圖3B係3A圖光胆層緊貼光罩底片之斷面圖，該光罩底 片有多數襯塾佈置點； 圖3C係3B圓移去底片後*在光阻脫落區域触刻之斷面 圖； 圖3D係3C圖触刻後在顯墊上被播蠆板的斷面圖； 豳3E像3D圖封邊且真空抽氣後之斷面圖。 圖4係本案真空複層玻璃之立艘局部剖開圖。 元件代號： (圖1〜圖2) 經濟部準局貝土消，費 9—玻瑰平板 12—封邊 3—內 8--玻璃球 81—玻璃焊料 (圈3〜圖4) 1--基板 11--襯塾 13—邊緣 2—蓋板 • 4—塗佈光阻曆41—光阻層脫落區 42—光阻靥覆蓋區 5—底片 一 4 一 本滅琅反走硪用中鸸_參樨_ ( CMS.) A4規择（210X297公犛） 1 5 經濟部工寥合作祭裝 4037 扒 A7 ___B7_'___ 五、發明説明（4 ) 如圖3A〜圖3E所示，並參考圖4，本衆真空複餍玻璃 之製法*其步驟包括： 篩遵並淨化玻瑰*使玻瑰經由篩選、脫脂、除麈、電 解、洙淨、乾燥等程序而去除裂化、成型不良、含氣之不 適格玻瑰*並使篩選之玻瑱潔淨成適合製作真空複層玻姨 之基板（1)或薏板（2)。 如圖3A所示*塗佈光阻靥，以浸塗、滾塗、旋轉塗佈 任一方式•將調好之光阻劑塗佈在玻班基板（1)之一表面 ，以形成光阻靥（4)。 光罩定義· Μ光罩技術在塗佈光阻層（5)之玻璃基板 (1)表面定義出多數距基板（1)邊緣（13)—距離之襯墊佈置 點，該襯墊佈置點之形狀、大小及縱深可賴由CAD/CAM或 其他方式在襯墊（11)預設位置處·形成光罩底片（5)的相 對點。 如圖3Β所示，將光罩底片（5)密置於玻璃基板（1)表面 ，以適當光源照射底片（5) *譬如是紫外線*使其曝光肜 成印在玻璃基板（1)上的多數顧墊佈置點完成製販。本步 驟一般係在光罩定義製程中宪成。 顯影，將完成製販之玻瑰基板（10)置於顯像液中•使 基板（1)預定蝕刻之光阻曆（4>脫落•形成光阻磨脫落區（ 41);而不須触刻之地方則以適當光源照射，例如是紫外 線，讓其形成如圖3C所示耐独之光阻層覆蓋區（42)。 然後，Μ適當蝕刻法，譬如是乾蝕刻之雛孑蝕刻法或 溼蝕刻•臀如是氫氟酸蝕刻對完成顯影之玻璃基板（1)實 -5 - --------裝-------1Τ--1 / - - (婧先聞讀背面之注意事項再填寫本頁) 本紙琅尺度逋用中國國家梯率（CNS ) Α4规格（210Χ297公釐） _ 1 5 經濟部-^<標準局員Μ.消费舍作5 A7 40372S_b7_ V. Description of the invention (1) A vacuum composite glass and its manufacturing method, especially a photomask and etching method to make most of the same physical properties on a plain glass substrate. Manufacturing method 0 Vacuum multilayer glass is Liners (Pi liars) with a thickness of 0.001 ~ 0.1 miB are sandwiched between two pieces of glass, and the edges are sealed, and the interior of the sealed chamber is evacuated to eliminate the heat transfer of gas in the interlayer. Greatly increase thermal resistance * With excellent effects of heat insulation and sound insulation. Vacuum extraction * Every 1 square centimeter of glassy soil will withstand atmospheric courage on 1 kg of M *, and glass crickets are extremely fragile without strengthening treatment. So it must be placed between two glass qi Inserting the cushion as a support * likely • the cushion must have sufficient mechanical strength and a suitable layout * so as not to increase costs and hinder air extraction. Previously known methods of making relatives have applications listed in the International Patent Cooperation Organization: PCT / AU90 / 00364, PCT / AU93 / 00040, and US patents US PATENT 4683154 and US PATENT 4683154. Among them, PCT / AU90 / The technology mentioned in 00364 is shown in Figure 1. It contains a glass plate (9) made of glass, ceramics, metal and other materials. · The outer surface is plated with a layer of glass solder (Solder * glass) (81) * or Place the glass solder caps (Solder glass caps) above and below the plastic-lined body. * Discharge the substrate first at a predetermined position on a glass plate. • Then place another glass. • Heat to a temperature above the melting point of the glass solder. * The glass solder is melted to bond the observation pad body and the glass plate. The production of the pads mentioned in PCT / AU93 / 00040 · The view is made of chain, 戡, group, town, group, pattern, inscription and its alloy. As for the production method of the lining as described in US Patent No. 4683154, as shown in Figure 2 • A round glass ball (8) of a certain size is placed on the entire flat plate * and then M -2-This paper size is applicable to Chinese national standards (CNS) grid (2 丨 0X297 mm) —11-1— ...? 1 ^ 1 I------I 11---------^ 1-I (Please read the back first Please note this page and fill in this page again.) The Ministry of Economic Affairs's f # rate bureau ’s consumption of work includes 3J4 printing policy 403729 _B7 _ V. Description of the invention (2) The laser beam draws the glass ball at a specific position on the glass plate as a cutoff, and Remove the remaining glass balls. And the production of the prostitutes mentioned in US PATENT 4683154 is also based on the sticky pads. 5 (Please read the precautions on the back before filling in this page) The above-mentioned various methods of forming a gasket • Its common feature is "make the gasket J first, then fix or weld it" and lining on the glass plate J This method is not only time-consuming and laborious, but also ineffective, first of all, how to make the shape and specifications of each of the arranged pads the same? Secondly, we must test whether the physical properties of the material of the Gu Gu pad can be combined with glass俾 It will be fixed or welded with the glass plate. Furthermore, we should solve the problem of how the lining is placed at the layout point of the glass plate, and how to let the pad be consolidated on the glass plate. These problems are solved * Can the Selukao Gulu manufacturing method be implemented on curved glass substrates in order to increase the scope and value of the industry's application? Aiming at the problems of past technology • This case provides a good solution * that this case has the following Purpose:-To provide a glass lining manufacturing method that does not require a gasket to be made in advance. 2. To provide a glass lining manufacturing method that does not require additional selection of plastic lining materials. 3. To provide a frost-free adhesion Manufacturing method of glass ring cutting of mat. Ministry of Economic Affairs, Prospective Industry, Consumer Cooperation ¾ 4. Provide a manufacturing method that can form glass gasket on curved glass and flat glass. 5. Provide a manufacturing method of directly molding gasket on glass substrate. 6. Provide a new manufacturing method of vacuum-recovering glass. 7. Provide a vacuum-reforming glass with completely identical physical properties. The above-mentioned purpose is achieved by defining the majority of the viewing pad layout points on the cleaned glass substrate with M light. Most of the pads are placed at a distance from the edge of the substrate. -3-This paper size uses the Chinese National Standard (CNS) A4 specification (210X 297 mm) 40372S _ ^ _ Different, description of the invention (3) Selectivity to the substrate The etched M forms most of the cymbals. The etched substrate is then combined with the cover plate above the cymbals to form a sealed inner chamber. After the air is pumped, the inner chamber is vacuum-shaped to obtain a vacuum multi-layer glass. 5 (面 的Please fill in this page again for detailed instructions) Detailed description * In conjunction with Figures 3A, 3B, 3C, 3D, 3E, and Circle 4 plus ML; The diagram is simply explained: Circle 1 is like glass shown in PCT / AU90 / 00364. Legend of the manufacturing method. Figure 2 is US PATE Illustration of the method of making glass by NT 4683154. Circle 3A is a cross-sectional view of a photoresist layer coated on a glass substrate in this case; Figure 3B is a cross-sectional view of a photo-bladder layer close to a photomask film in FIG. Most linings are arranged at points; Figure 3C is a cross-sectional view of the 3B circle after the negative film is removed * and is etched in the area where the photoresist is removed; Figure 3D is a cross-sectional view of the edge-sealed and vacuum-evacuated section of the case. Figure 4 is a partial cut-away view of the vacuum multi-layered glass of this case. Element code: (Figure 1 ~ Figure 2) 9—Glass Rose Flat 12—Edge Sealing 3—Inner 8—Glass Ball 81—Glass Solder (Circle 3 ~ Figure 4) 1—Substrate 11—lining 13—Edge 2—Cover • 4—Coated light Resistance calendar 41—photoresist layer peeling area 42—photoresist coverage area 5—negative film 4—a book for anti-passing and anti-passing applications _ ref _ (CMS.) A4 (210X297) 牦 1 5 Economy Cooperative sacrificial equipment for the Ministry of Industry and Commerce 4037 Grill A7 ___ B7 _'___ V. Description of the Invention (4) As shown in Figure 3A ~ 3E, and referring to Figure 4, the manufacturing method of this vacuum vacuum restoration glass * The steps include: sieve compliance and purification Glass Rose * Through screening, degreasing, degreasing, electrolysis, cleaning, drying and other procedures, glass roses are used to remove cracks, poor molding, and gas-containing discomfort * and make the screened glasses clean to a substrate suitable for making vacuum laminated glass. (1) or fascia (2). As shown in Figure 3A * Apply photoresist, either by dip coating, roll coating, or spin coating. • Apply the adjusted photoresist on one surface of the glass substrate (1) to form a photoresist.靥 (4). Mask definition · The M mask technology defines the majority of the pad arrangement points on the surface of the glass substrate (1) coated with the photoresist layer (5) from the edge (13) of the substrate (1). The shape, size, and depth can be determined by CAD / CAM or other methods at the relative positions of the photomask negative (5) at the preset position of the pad (11). As shown in FIG. 3B, the photomask negative (5) is closely placed on the surface of the glass substrate (1), and the negative (5) is irradiated with a suitable light source. For example, it is exposed to ultraviolet light and printed on the glass substrate (1). Most Gu Dian layout points complete the production and sales. This step is generally established during the mask definition process. Develop and place the finished glass substrate (10) in the developing solution. • Make the photoresist (4) of the substrate (1) scheduled to be etched off. • Form a photoresist wear-off area (41); Where appropriate, it is irradiated with a suitable light source, such as ultraviolet rays, so that it forms a covering area (42) of a photoresist layer as shown in Figure 3C. Then, an appropriate etching method, such as dry etching or wet etching, is used. Etching • If the buttocks are hydrofluoric acid, the glass substrate that has been developed (1) is -5--------- installation ----- 1T--1 /--(Jing Xianwenwen read the back Please pay attention to this page before filling in this page) This paper uses the Chinese National Slope (CNS) Α4 specification (210 × 297 mm) _ 1 5 Ministry of Economic Affairs-^ < Standard Bureau member M. Consumption
40372S A7 B7五、發明説明（5 ) 施選擇性独刻•讓光阻層脫落區<41)被触刻成光軍定義下 的深度與形狀，其中進行溼蝕刻時，可Μ用触刻機之噴触 進行。此步驟將如圖3C所示，在玻璃基板（1)上形成多數 襯塾（11)。 接著如圖3D所示*在襯墊（11)上結合蓋板（2) *並以 逋當的方法如圖3Ε所示•將玻璃基板（1)的邊緣（13)與蓋 板（2)的邊緣溶合或黏合密封成封邊（12) *且使基板（1) 與蓋板（2)之間形成内室（3)，對内室（3)抽真空即形成複 靥玻璃。 上述真空複層玻瑰製法•其脫脂處理，主要是去除玻 璃表緣的雜質及油脂，以免雜質如灰塵、污垢等影響蝕刻 及真空抽氣；而電解處理•主要是讓灰麋、雜質及油垢等 徹底分解而易於清除；至於篩選玻璃的主要目的，是在於 防止成型不良、含氣泡的玻琪在真空抽氣時的爆裂。而在 玻璃基板表面定義多數親塾佈置點其型態與區域可随著破 璃基板（1)的形狀變化•以便在曲形玻戒或其他形狀的玻 璃中仍可自由成型出截塾；顒於機塾佈置點形態•則可以 陣列方式形成，而排列成圓形、矩形、多邊形或其他形態 ，該多數椒塾佈置點在光罩定義及選擇性触刻下，可形成 直徑約在0.1mm^''^0.5〇1111間，高度約在0-01班1〇-'^0.211111»間的 襯墊（11)，各親塾彼此間的間距*較佳的方式是以光罩定 #ίΕ1ΟΐΒ0ΐ~ 100mm 間0 由於上述製作真空複層玻璃的方法•可Μ在玻璃基板 (1)的表面直接延伸出多數顧墊（11)，而形成一種如画4所 一 6 — (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家棣準（CNS ) A4規格（210X297公嫠） 1 5 經濟部^揉準f工消費合作装 A7 B7五、發明説明（6 ) 示之具有一玻璁基板<1) Μ及一玻壤蓋板（2)的真空複層玻 璃，且在該玻璃基板（1)與玻璃蓋板（2)維持一間隙並構成 密封之真空内室（3) ·藉由前述多數親墊（11)頂緣的對玻 璃蓋板（2)的支撐，可使真空複層玻璃彩成等高封艚或不 等高之起伏封體。該一襯墊的形成法*不需以外加方式舖 排襯墊*也不需要使用黏著劑或焊结劑固置襯墊到定點* 所以不會產生襯塾（11)與玻璃基板（1)的物理性差異，因 此可以簡化製程、縮短工時《並降低襯墊（11)與玻瑰基板 (1)及玻璃蓋板（2)之接觸應力；該観塾（11)在真空抽氣時 ，可更有效協肋玻瑰基板（1)與玻璃蓋板（2)抵抗大氣壓力 ;當真空複層玻班被形成時，其具有優良的隔熱及隔音效 果。而前述自玻璃基板一艘成型多數襯塾的方法*更可應 用在場效發射顯示器（Field Emission Display ,FED)賜 極板的製造中·M解決昔知場效發射顯示器陽極板需焊結 或黏固的麻煩與低良率，俾取得物理性質相同的場效發射 顯示器與襯墊。 綜上所述，本案之真空複層玻璃，不但可以應用於建 築物、隔音室、音響試聽室、隔熱室•而且其製造玻璃基 板與截塾的製法，更可供場效發射顯示器之賜極板製造及 其他產業之利用，為一優良真空複層玻璃製造技術，爰提 出以下專利申請，該專利範圍為本案主要範圍之敎述•非 用以限制本案對等效實施及簡易變化替代的主張•謹此轚 明。 -7 - 403729 ---------裝------#] - f (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度逍用中國躅家橾隼（CNS ) A4规格（210X297公釐）40372S A7 B7 V. Description of the invention (5) Selective selective engraving • Let the photoresist layer fall off area < 41) be touched to a depth and shape as defined by the Light Army, where wet etching can be used for touch etching The spray of the machine is performed. This step will form a majority of the liner (11) on the glass substrate (1) as shown in Fig. 3C. Next, as shown in FIG. 3D * Combine the cover plate (2) on the gasket (11) * and use a proper method as shown in Figure 3E. • Place the edge (13) of the glass substrate (1) and the cover plate (2). The edges are fused or sealed to form an edge seal (12) * and an inner chamber (3) is formed between the substrate (1) and the cover plate (2), and the inner chamber (3) is evacuated to form a compound glass. The above-mentioned vacuum cladding glass method • Its degreasing treatment mainly removes impurities and grease on the surface of the glass, so as to prevent impurities such as dust and dirt from affecting the etching and vacuum extraction; and electrolytic treatment • mainly allows gray moose, impurities and grease It is completely decomposed and easy to remove. As for the main purpose of screening glass, it is to prevent the poorly formed and bubble-containing Bokeh from bursting during vacuum extraction. On the surface of the glass substrate, most of the affinity points are defined. The shape and area of the glass substrate can be changed according to the shape of the broken glass substrate (1). • In order to still freely form cuts in curved glass or other shapes of glass; 颙Forming points on the machine • It can be formed in an array, and arranged in a circle, rectangle, polygon, or other form. Most of the peppering points can be formed with a mask definition and selective touch to form a diameter of about 0.1mm ^ '' ^ 0.5〇1111, the height is about 0-01 class 10-'^ 0.211111 »between the pads (11), the distance between the relatives * The better way is to use a photomask set # ίΕ1〇ΐΒ0ΐ ~ 100mm interval 0 Due to the above-mentioned method for making vacuum laminated glass, most of the mats (11) can be directly extended on the surface of the glass substrate (1), forming a picture 4: 6 — (Please read the note on the back first Please fill in this page again for this matter) This paper size is applicable to China National Standards (CNS) A4 specifications (210X297 gong) 1 5 Ministry of Economic Affairs ^ quasi-industrial consumer cooperation equipment A7 B7 V. The description of the invention (6) has a glass璁 Substrate < 1) M and a glassy lid (2) vacuum cladding glass And maintain a gap between the glass substrate (1) and the glass cover plate (2) and form a sealed vacuum inner chamber (3). The glass cover plate (2) is supported by the top edge of most of the pads (11). , Can make the vacuum multi-layer glass colored contour seals or undulating seals. This one-pad formation method * does not need to be laid out in an additional way * nor does it need to use adhesive or solder to fix the pad to a fixed point *, so no lining (11) and glass substrate (1) are produced. Physical differences, so it can simplify the process and shorten the man-hour "and reduce the contact stress between the gasket (11) and the glass substrate (1) and the glass cover (2); when the vacuum pump (11) is under vacuum, It can more effectively resist the ribbed glass substrate (1) and the glass cover plate (2) to resist atmospheric pressure; when the vacuum multi-layered glass shift is formed, it has excellent heat insulation and sound insulation effects. The aforementioned method of forming most liners from a glass substrate can be applied to the production of field emission display (FED) electrode plates. M solves the problem that the anode plates of field emission displays need to be welded or The trouble of cementing and the low yield rate make it possible to obtain field-emission displays and pads with the same physical properties. In summary, the vacuum multi-layered glass in this case can be used not only in buildings, sound insulation rooms, sound audition rooms, and heat insulation rooms. Moreover, its manufacturing method of glass substrates and cut-offs can also be used as a gift for field emission displays. The use of plate manufacturing and other industries is an excellent vacuum multi-layer glass manufacturing technology. The following patent applications are filed. The scope of this patent is the description of the main scope of the case. It is not intended to limit the replacement of equivalent implementation and simple changes in this case. Proposal • With this in mind. -7-403729 --------- Installation ------ #]-f (Please read the precautions on the back before filling this page) This paper size is free to use China National Furniture (CNS) A4 specifications (210X297 mm)