TW400593B - Hanger of the raw material polycrystalline rod - Google Patents

Abstract

The purpose of the present invention is to obtain a hanger of a raw material polycrystalline rod which can be surely and easily hung in a furnace simply by applying simple working on the raw material polycrystalline rod in the case where the raw material polycrystalline rod is melted by a recharge method or additional charge method. A hanger 1 is formed by mounting a rod la at the center of a rectangular flat plate made of molybdenum or graphite coated with SiC perpendicularly to this flat plate and is provided with notched parts 1b at two points of the flat plate. The front ends of respective arms 1c are provided with projecting parts ld to prevent slip. The raw material polycrystalline rod is hung perpendicularly by detaining grooves formed at the peak of the raw material polycrystalline rod with these notched parts 1b. The hanger 1 is balanced by the rod 1a in the furnace and even if the hunger 1 inclines, the dislodgment of the raw material polycrystalline rod 2 is prevented by the projecting parts 1d. The raw material polycrystalline rod is merely necessitated to be subjected to simple grooving. The grooving time, the working cost and the time for mounting the hanger are reduced.

Description

Printed by the Consumer Cooperative of the Central Bureau of Standards of the Ministry of Economics The present invention relates to a spreader for raw material polycrystalline rods. At present, high-purity single crystal materials are used for semiconductor reading substrates. The single crystal is a CZOCHRALSKI &amp; (hereinafter referred to as the CZ method) which pulls up cylindrical single crystals from the raw material melt of a kind of money. The cz method fills raw materials with polycrystalline materials, and heats and melts the raw materials by a heater around the outer periphery of the crucible. At the same time, the seed crystals immersed in the molten solution in the seed crystal fixture'-side seed crystal inflammation tools and The material rotates in the same direction or in the opposite direction ... while pulling the seed crystal fixture upward, the single crystal grows. In recent years, the diameters of semiconductor round circles have become larger and larger. Large-diameter wafers with a diameter of more than 6 pairs have been widely used. The diameter of single crystals has gradually become more mainstream with 6 or more pairs. As a result, the single crystal manufacturing equipment has also grown in size, and the throughput per batch has gradually increased. However, with the increase in the size of the single crystal manufacturing equipment, the time required for the growth of the single crystal becomes longer. At the same time, after the grown single crystal is taken out of the furnace, the time spent by the heater and the heater is cooled to a level that can be selected. All are longer than those who are familiar with it. All of these reasons cause the production efficiency of single crystal to decrease. In order to solve the decrease in production efficiency of single crystal, there is a re-feeding method. This method is a method in which after the single crystal is pulled out from the melt, the raw material polycrystal is fed again to be melted, and the growth process of the single crystal is repeated several times. ^ ^ The re-feeding method can omit several batches of cooling components in the furnace and the furnace: sweep time. At the same time, usually a single stone must be used for each single crystal pulling &lt; 10,000 yuan village changed to several single Only one quartz crystal is used for crystallization. Therefore, the cost can be reduced. In addition, in order to pull the large diameter and longer <single, after using the most vigorously filled materials to show off, pull the single crystal ^, chase 4 papers ^ (Please read the precautions on the back before Fill out this page) I; _IT ----

· I--i II — I --- Ⅴ. Description of the invention (, = Filling raw materials are polycrystallized in the melt to increase the amount of melt. In the raw material supply, when using a rod-shaped raw material polycrystal (the raw material polycrystalline rod is referred to as τ), as shown in FIG. 8, a ring groove and a groove 2c are formed on the outer periphery of the top of the polycrystalline rod 2 and The cable 3 made of buckle and other materials passes through the cutting groove 2c to form a ring and is looped on the ring / 冓 2b. 'The raw material polycrystalline rod is hung on the arm h of the hanger 4 provided in the furnace. By making the hanger 4 Slowly descend, so that one or several raw materials are crystallized. 2 The main heater is surrounded by the outer periphery of the snail pile, or the brake heater and the main heater are melted above the snail and supplied to the crucible. Melting liquid ... However, the above-mentioned method of hanging the raw material polycrystalline rod has the following problems. Since the raw material polycrystalline rod must be grooved in several places, the production cost is increased. ⑺In order to hang the raw material polycrystalline rod , Must be buttoned, so that the single knot increases the manufacturing cost. Stalk &lt; total cable (3) the rope is looped on the raw material knot It takes time for the wolf to stick. (4) When the rope is sleeved on the polycrystalline rod of the raw material, the polycrystalline material will be contaminated. -II =: = 二 = ㈣ 在 ㈣ When the raw polycrystalline rod is turned, only the Polycrystalline material === (210X297mm)

---------------- tcMH-- 广 ---, 耵 -------- J___ (Please read the notes on the back before filling this page) • HI A 7 B7 V. Description of the invention () 3 Processing "It can hang the raw material polycrystalline rods reliably and easily in the furnace. In order to achieve the above object, the spreader of the raw material polycrystalline rod according to the present invention is used in a semiconductor single crystal manufacturing device of the CZ method, which can slowly lower the raw material polycrystalline rod hanging in the furnace into a crucible and It is melted for raw material supply. It is provided with a plurality of grooves on a flat plate, and the grooves or protrusions formed on the top of the raw material polycrystalline rod are engaged with the grooves, so that the raw material polycrystalline rod is hung vertically. A convex portion protruding upward is provided on both sides of the front end. Alternatively, the top surfaces of both sides of the notch portion engaged with the grooves or protrusions formed on the top of the raw material polycrystalline rod may be formed into a circular solitary shape that bulges upward. Printed by the Central Standards Bureau of the Ministry of Economic Affairs and Consumer Cooperatives (please read the precautions on the back before filling out this page). According to the above structure, the grooves are formed on the flat-shaped spreader, and the raw materials are polycrystalline. Grooves or protrusions are formed on the top, so the grooves or protrusions of the raw material polycrystalline rods can be respectively engaged with the grooves of the spreader, so that the raw material polycrystalline rods are hung vertically. Therefore, it is not necessary to hang the raw material polycrystalline rod by a rope, as is known to those skilled in the art. In the refeeding method or the additional feeding method, the raw material polycrystalline rod can be reliably and easily suspended in the furnace when the raw material is melted. In addition, since the front end of the cutout portion of the spreader is provided with a convex portion protruding upward, even if the spreader is tilted, the raw material polycrystalline rod does not slip off the spreader. In addition, when the top surfaces of both sides of the slotted portion of the spreader are in the shape of a circular arc that bulges upward, the surface is in line contact with the bottom surface of the groove or protrusion provided on the top of the raw material polycrystalline rod. When the spreader is tilted slightly, the raw polycrystalline rod can also maintain a vertical state. Hereinafter, embodiments of the spreader of the raw material polycrystalline rod according to the present invention will be described with reference to the drawings. Figure 1 shows the hanging paper according to the first embodiment of the present invention. The paper size is applicable to the Chinese National Standard (CNS) A4 (210X297 mm).

A three-dimensional view of the printed materials of the Consumer Cooperatives of the Central Commission of the Ministry of Economic Affairs. This spreader can hang two raw polycrystalline rods. The hoisting system is made of 4 metallic material 4 and graphite material covered with Sic. The center of the rectangular flat plate is equipped with a rotating body u extending at a right angle to the flat plate. At the same time, two of the above flat plates are provided with grooves lb to make the flat plate approximately 11 shape. In addition, the front end of each arm ic is provided with a convex portion ld having a slip preventing effect. The spreader ^ is suspended in the furnace by the rod body la. Figure 2 is a perspective view of the top of the raw polycrystalline rod. Fig. 2 (a) shows a state where flat grooves 2a are provided on both sides of the axis of the raw material polycrystalline rod 2 and are parallel to each other. Fig. 2 (b) shows a state where an annular groove 2b is provided along the outer periphery of the raw material polycrystalline rod. If the width between the flat grooves 2a shown in Fig. 2 (a) and the diameter of the annular groove 2b shown in Fig. 2 (b) is smaller than the width between the arms "of the spreader 所示 shown in Fig. Χ If it is, it can be hung regardless of the diameter of the raw material polycrystalline rod 2. _ Figure 3 shows the state of hanging the raw material polycrystalline rod 2 on the sling: The state of the raw material polycrystalline rod 2 is maintained. In the vertical state, even if the spreader 1 is tilted for some reason, it is still possible to prevent the raw material polycrystalline rod from slipping by the convex portion ld. Figure 4 shows that the raw material polycrystalline rod is hung in the second embodiment according to the present invention. The state of the spreader. The spreader i is the two sides of the spreader shown in the working drawing, that is, the top surface of the arm lc is expanded into an arc shape, and the other parts are the same as those shown in Figure 1. The bottom surface of the groove ^ (or 2a) formed on the top of the raw material polycrystalline rod will be in line contact with the top surface of the arm lc. When the spreader is tilted, the line contact portion will move along with it, making the raw material more knotted. : The axis of rod 2 is always maintained in a vertical state. Also, because the front end of the arm lc is convex) A4ST21〇X ^ 7iF) '(Please read the precautions on the back before filling (This page)

A7 B7 Printed by the Central Bureau of Standards, Ministry of Economic Affairs, Industrial and Consumer Cooperation. V. Invention Description () '5 Ids, so it can prevent the raw material polycrystalline rods from falling off the spreader i. In addition, the spreader 丄 may be mounted on the lower end of the rod body la in a freely swinging manner. Fig. 5 is a top view of a spreader according to a third embodiment of the present invention. As shown in FIG. 5, the notch portion lb of the spreader i is pushed and pushed, and even if there is an error in the size of the groove portion of the raw material polycrystalline rod, it can fully cope with it. Fig. 6 is a top view of a spreader according to a fourth embodiment of the present invention. As shown in the figure, the convex part is replaced by a fastener le which can be opened and closed freely at the front end of the arm 1c. After hanging the raw material polycrystalline rod, as long as the fasteners are locked, the raw material polycrystalline rod can be completely prevented from falling off the spreader. Fig. 7 is a top view of a spreader according to a fifth embodiment of the present invention. Figure 7 (a) shows a circular flat plate and Figure 7 (b) shows a square flat plate. Both of them are provided with a slot extending lb extending in the direction of the radiation for hanging the raw polycrystalline rod. These spreaders can hang up to 4 raw polycrystalline rods. The above-mentioned spreader can also be provided with a slide stopper, or a fastener can be used as shown in FIG. 6. The shape of the convex portion ld shown in Figs. 1, 5, and 7 is only an example, and is not limited to the above-mentioned shape. Further, instead of the groove 2a or 2b shown in Fig. 2, a protrusion protruding in a direction perpendicular to the axis may be provided on the top of the raw polycrystalline rod. As described above, according to the present invention, a plurality of grooves are provided on the plate-shaped spreader, and at the same time, the grooves or protrusions formed on the top of the raw material polycrystalline rod are caught in the grooves, so that the raw materials can be made. The polycrystalline rod is hung in a straight shape and has the following effects. ⑴It is only necessary to form a simple groove or protrusion on the raw material polycrystalline rod. ........- ill-I!-......- I (Please read the precautions on the back before reading (Fill in this page), 1TI I --- .---!-1-. H. 4 Xiao. 1 ^ 1 In 1 I HI · 6 6 polycrystalline rods, so the description of the invention (can make processing time and processing The cost is reduced. (2) It is not necessary to hang the ropes of metal inspection to reduce the cost of single crystal manufacturing. ⑺The raw material polycrystalline rod is mounted on the spreader for a short cycle time of each operation 'and it will not pollute the raw materials. ^ == Prevent the original _ "The original Kexi ,,,, and" Sun stick; Γ caused the fall of people, can ensure a simple illustration of the safety pattern: Figure 1 is a perspective view of the lack of the-Huizi point spreader according to the present invention # 2 The second figure of the raw material polycrystalline rod of the example is a perspective view of the top of the raw material polycrystalline rod, and the figure 2 shows that the axis of the raw material polycrystalline rod is not in the state of __ parallel grooves are installed, FIG. 2 (b) It shows the state where a groove is installed along the outer periphery of the raw material polycrystalline rod. Fig. 3 is a side view showing a state in which the raw material polycrystalline rod is hung on the hanger of the second figure. A second embodiment of the invention is a side view of a state where a raw material polycrystalline rod is hung on a sling. FIG. 5 is a top view of the sling according to a third embodiment of the present invention. FIG. 6 is a view according to the first of the present invention. The top view of the spreader of the fourth embodiment. Figure 7 is a top view of the spreader according to the fifth embodiment of the present invention. Figure 7 (a) is a circular plate and Figure 7 (b) is a square. The condition of the plate. Fig. 8 is a perspective view showing a shape obtained by processing the top of the raw polycrystalline rod to hang the raw polycrystalline rod in the past. Fig. 9 illustrates a method of suspending the raw polycrystalline rod by a conventional technique. This paper size applies Chinese National Standard (CNS) Α4 specification (210X297 mm) (Please read the precautions on the back before filling out this page) ---.-- 一 --.--- I ..-- J --- Order ----- iwmK-- Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention () 7 Illustrative diagrams. Symbol descriptions 1, 4 ... Hangers 2 ... Raw material polycrystalline rods lb ... grooves 2a, 2b ... groove

Id ... convex part '---.-------- install — ^ --- ^ --- order ------ (Please read the precautions on the back before filling this page) Ministry of Economy The paper size printed by the Central Bureau of Standards Consumer Cooperatives applies the Chinese National Standard (CNS) A4 specification (210X297 mm)

Claims (1)

Liuyuan 々 巳 β. Please use the ABCD body single and two crystal rod spreader, which is used in the French semi-flat guide. Ming manufacturing device, used to suspend the furnace <1000 guides slow down ::; one by one to give raw materials, its = crystal rod slow stick core ί = :: description ::: = 原 _ 晶 rod vertical hanging. In order to make the raw material polycrystalline 2. If the raw material β of the scope of the patent application is applied, the front side of the notch portion on the middle side of the groove is provided with a convex portion protruding upward: noon &lt; With 3 of the raw materials of the scope of the patent application In the multi-junction, it is used to form a groove that bulges upward with the top surface of the two sides of the raw material polycrystalline rod. (Please read the caution on the back before filling this page). Lost in "Qing Qilang" &quot; Merger Consumption &quot; 阼: ϋ 中 鞮. ^ Paper size applies Chinese National Standard (CNS) A4 (210 X 297 mm) 11