TW392061B - An optical mechanism for accurate control of light beam incident angle across a large angular region - Google Patents

Abstract

The present invention relates to a series of novel optical mechanisms essentially comprising different assembly of a series of reflective mirrors of prisms, parabolic lens and spherical lens, to achieve the objective of measuring a particular point on a test piece with variable incident angle. Furthermore, by doing the calculation on an assembly of the parabolic lens and the spherical lens, the test piece can be measured through a medium for those optical instruments which utilize this structure as the post-stage system. The invention can also combine or separate the incident light and the reflective light by adjusting the prism, the parabolic lens and the spherical lens thereby increasing the measurement accuracy by selecting appropriate post-stage system according to the optical path of various optical mechanisms. The invented mechanism can be applied on a measurement instrument such as an ellipsometer and an interferometer and have a large breakthrough on the on-line detection of a semiconductor and the flying height of a floppy disk.

Description

V. Description of the invention (1) Field of the invention This case is a reflection of several rows of test specimens, systems, or mirrors. The angle as a transflective and anti-excellent functionality is based on the characteristics of the light-transmitting surface of the main light-transmitting surface. It is the innovation of the near-zero sub-system when the surface is bundled with new properties. Point, * | > IjL · Inorganic degree, the profile is the optical-mechanical structure of the test piece, which can accurately control this innovative optical-mechanical structure. It is mainly suitable for spherical mirrors or another ingenious structure. The probe on the optical frame has quasi-throwing characteristics. This optical mechanism is still acceptable. The objective lens can be measured without throwing the incident and reverse. It can be used for a variety of structures and test pieces to modify the parabolic and quasi-spherical mirrors with the incident angle. It is different from the use of parabolic objective lens to enter the light beam and the light and detection are separated by a transmissive lens and a ball to make it different. BACKGROUND OF THE INVENTION Today's optical measurement instruments can measure a single polarizer (referred to as ellipsoid for short) under different conditions. ) As an example, the design of the optical machine is difficult, one of which is measured and then matched with the appropriate material model to know the number. However, the positive method of this method (Dispersion Formula) is strong; it is worth noting that precise control of light incidence The angle or change is strong or the phase changes, and then through the optical-mechanical system that requires a detection point when measuring specific position information, an ellipse is used to avoid the above measurement requirements. The multi-wavelength method is used to fix the incident angle. (Material model) to reduce the reliability of the color number model that does not fully depend on the material. 'In theory, it is better to change the angle of incidence. The principle of the system of changing the angle of incidence is based on a large angle of incidence. To obtain an amount of the reflection type optical signal obtained Backcalculation particular location,

5. Explanation of the invention (2) However, since the incident light needs to continuously change the incident angle, the solid-machine system needs a special design. Traditionally, the point of light can be divided into a swing arm one for the variable angle of incidence. There are several optical-mechanical architectures, such as lens focusing type 10 (refer to Figure 丨) and multi-lens focusing type 20 (refer to 2). These structures have the shortcomings of small change in incident angle, irreparable difference between planes, and too complicated mechanism. Therefore, it is extremely difficult to find optics that can accurately provide a wide range of incident angles and make the optical path compact and condensed among the numerous variable incident angle mechanism habits. Angle mechanism 'This custom mechanism uses two rotating motors to drive two rotating arms. The transmitting end of the system is set on one of the arms called the incident arm. The receiving end is set on the other arm called the reflecting arm. Measurement of the angle of incidence 'obtains the properties of the sample. However, due to the existence of the aforementioned two rotating arms, the optical head of such optical instruments has to be separated into two parts in terms of function and space, so it is bulky and it is not easy to greatly improve the accuracy of the optical-mechanical cooperation. This results in heavy equipment costs. Single lens focusing incident angle changing mechanism 10, as shown in the first figure, this custom mechanism is composed of a lens 11 and two fixed prism reflectors 12, 13 and two edges that can be moved up and down using a single-axis displacement platform. When the prismatic mirrors 14, 15 are moved above the prismatic mirrors 12, 13, the angle of incidence is about 4Γ, as shown in the first figure (A). When the mirrors 14, 15 move below the prismatic mirrors 12, 13, the 'incident angle is about

Page 6 5. Description of the invention (3) j y ′ is shown in the first figure (B). The single-lens focusing type incident angle changer can smoothly close and reduce the optical path. However, because the value of a single lens = Numerical aperture (na) is less than one, its incident angle cannot exceed 45. 'This will result in a range of incident angles that can be operated from only 0 degrees to about 45 degrees' and cannot provide a wide range of angles of incidence. In addition, the single lens has the problem of spherical aberration. The above-mentioned implementation method will lead to the phenomenon that the focus is not unique. The multi-lens focusing type incident angle changing mechanism 20 is modified from a single lens focusing type, as shown in the second figure. This custom mechanism consists of lenses 2 and 26, 27, two fixed prismatic mirrors 22, 23, and two prismatic mirrors 24, 25, which can be moved up and down using a single-axis displacement platform; After the incident and reflected beams turn a certain distance, they are still parallel to the direction of the original beam. As shown in the second figure (A), when the prism mirrors 24 and 25 are moved to the prism mirrors 22 and 23, the incident angle is about 2 °. As shown in the second figure (B), when the prism mirrors 24 and 25 move below the prism mirrors 22 and 23, the incident angle is about 88. . This multi-lens focusing-type incident angle changing mechanism 20 can also reduce and close the optical path 'and has a large incident angle, but this conventional mechanism is extremely difficult to implement. Whether it is design, assembly or calibration, it is a very difficult challenge. At the same time, as mentioned above, the general focusing lens often has the problem of spherical aberration. The above implementation method will cause the focus to be not unique. The above-mentioned several conventional variable-incidence-angle mechanism practices cannot measure fixed-point information through a transparent or translucent medium ’, so this case proposes a series of

Page 7 V. Description of the invention (4) The variable incident angle mechanism can greatly improve the space limitation of the optical path, minimizing the system, and avoiding the traditional optical-mechanical system cannot measure a single specific point through a transparent or semi-transparent medium The regrets. Compared with the above-mentioned several mechanisms for changing the incident angle, a series of new optical-mechanical structures designed in this case also have the characteristics of accurately controlling the function of incident and reflected beams, and can make the angle between the incident and reflected beams and the specimen from close to From zero to ninety degrees, this mechanism can be constructed, regardless of whether the medium is permeable or not, has a design structure that can form the basis of an optical mechanism that completes a single measurement point at multiple incident angles. The practical application of this architecture to various optical instruments will further increase the measurement range of these instruments. For example, the use of an ellipsometer with the innovative optical-mechanical architecture can make ellipsoidal discs measure the flying height of magnetic heads, Or make a half-value gradation or circle measurement through the viewfinder. Therefore, a series of institutional inventions in this case can help breakthrough progress in elliptical and optical inspection and many high-tech processes. The optical fiber architecture of the polyconium includes a series of components such as chirps, reflecting mirrors, Α ΐΑ and so on. "Different combination designs according to different needs" will separate the overview of the invention and separate the light ^ ^ The invention according to the path of the incident and reflected beams ; Divided into two types of structure, 1 angle changing mechanism and coincident light path incident angle changing machine are off-light path incident angle changing mechanism, such as parabolic mirror in the third figure

V. Description of the invention (5) The incident angle changing mechanism is composed of two parabolic mirrors 32 and 32 and a triangular prism mirror 33 that can be moved up and down by using a single-axis displacement platform. When the incident beam 301 passes through the triangular prism Behind the mirror 33 'will become a light beam 302 parallel to the main axis of the parabolic mirror. Using the characteristic of focusing the incident light 302 parallel to the main axis of the parabolic mirror to focus, it is convenient to move the position of the triangular prism mirror to achieve measurement at different incident angles With a single-point mechanism, the reflected light 304 passes through the parabolic mirror 32 and the triangular prism mirror 33 to form a reflected light beam 306 parallel to the original incident light 301. The two lights are parallel to each other but do not overlap. Since the light path of the incident light beam 301 and the light path of the reflected light beam 306 are separated from each other by triangular edges, this structure can easily detect the reflected light with a light detector or an optical microscope. Then, the relationship between the intensity and phase of the measurement beam is obtained, and the properties of the sample to be tested can be calculated according to other measurement structures. Therefore, the innovative split optical path type optical-mechanical architecture mentioned in this case can reduce the size of the optical path, and can have a great variation of the incident angle. In terms of lenses, the equivalent value of this split optical path type optical-mechanical architecture The aperture can be much larger than one, and very limited; otherwise, the architecture proposed in this case will have no aberrations in geometric optics. Another type of incident angle changing mechanism mentioned in this case is coincidence. The i-page structure is as shown in the parabolic spherical mirror-type incident angle point of the fourth figure, and the parabolic mirror-type incident angle changing mechanism is used as the starting angle. The measuring points are coincident, and the first shot of the five-beam first beam is used to reflect the I beam. This parabola

5. Explanation of the invention (6) Spherical mirror-type incident angle changing mechanism (as shown in the fourth figure) is composed of a parabolic mirror, a concave spherical mirror, and a pentagonal prism that can be moved up and down using a single-axis displacement platform. The reflecting mirror 43 is composed of a non-polarizing beam splitter 46. After the incident light beam 401 is reflected by the pentagon 43 and the holding mirror 41, a light beam 40 3 is incident on the fixed point 4 4 of the sample, and the generated reflected light beam 40 is incident on the concave spherical mirror 4 2 ′ after reflection. The light beam 414 is returned along the original optical path, and then reflected by the parabolic mirror 4 and the pentagonal prism mirror 43. After forming the light beam 411 ′, the incident light beam 401 and the reflected light beam 411 pass through a non-polarizing beam splitter 45. Separation, and then using a photodetector or an optical microscope to reflect the relationship between the intensity and phase of the beam 4 1 1 to calculate the surface properties of the sample to be tested. The pentagonal effect of this architecture is to make the light beam exiting the prism perpendicular to the incident & to further ensure that the incident light enters the parabolic angle changing mechanism in parallel, further avoiding the parabolic mirror type incident angle changing mechanism mentioned in this case. The middle triangle is subject to non-parallel optical axes of light caused by inaccuracies in assembly and calibration. Separately, the separate light path type incident angle changing mechanism and coincident light path type incident angle changing mechanism in this case are mainly used in the direct detection of the sample. For the transparent or semi-transparent observation medium that changes the angle of incidence and penetrates the sample ( (Such as plastic, glass filling), to complete the purpose of detecting specific points on the sample, this case ^ one step to develop two types of penetrable observation and separation optical path type incident angle changing mechanism and penetrating observation coincident optical path type incident angle changing mechanism Observation angle changing mechanism 'design using quasi-parabolic mirrors and quasi-concave spherical mirrors

Page 10 V. Description of the invention (7) Combination to complete penetrating and transparent (or half-to-definite detection point detection. In the fifth figure, S cannot be gathered to the point due to the effect of refraction, resulting in the effect of up and down translation. The measurement error is the root of this case—the transparence of the quasi-parabolic mirror-type optical structure with no correction is used for human shooting. The quasi-parabolic surface of the aberration correction uses the focusing function of a lens to raise the spherical image of the spherical lens. Differences and observations are compensated, so by properly selecting and designing a single fixed detection point, as shown in Figure 6, the shortcomings of the optical design created by the observation medium 61 can be complemented by clever calculations of each other and it is not easy to achieve the above ideals. In order to achieve the requirement of changing the angle of incidence, the design of the spherical mirror is used to achieve the purpose of transmission observation. \ Ming test medium) 55 of the sample 54 is incident on the same angle of the incident light beam 501, 502 the original measurement point 5 i, so that the detection Focusing on points 52 and 53 and generating measurement points, a further use of aberrations is proposed to solve the above-mentioned measurement problems that are to be transparent or changed. The original idea of the mirror-type optical architecture was to provide the ability to change the angle of incidence; the detection point shift due to the mass formed a mutual lens, which can be obtained when measuring. The spherical point caused by the lens shifts the detection point, so that the two items are offset. However, the actual lens is set to adopt the method of reflecting mirrors to converge, and the purpose of quasi-parabolic mirrors and quasi-concave media is to detect the single parabolic mirror with multiple angles. The purpose of the quasi-parabolic mirror is to approximate the function of a parabolic mirror and compensate the observation medium. Causes the detection point to shift. The quasi-polishing mirror is a non-analytical surface, and cannot be completely expressed in mathematical formula. It must be obtained numerically. The seventh figure shows how to design this correctable phase difference numerically.

V. Description of the invention (8) ~ Quasi-parabolic mirror. The algorithm is summarized as follows: Assume that the (× 1 yl) point 'detection light has been reflected by a quasi-parabolic mirror at this point, and its incident angle at the detection point is fl; Since the refractive index of the observation medium 72 is known, Extending rays at other angles of incidence can be easily drawn. For example, in the seventh figure, the direction of rays at the angle of incidence (fl + Df / 2) is 702, and the direction of rays at the angle of incidence (fi + Df) is 701. The direction is known; in addition, the aforementioned ray is also the path after the horizontal incident light is reflected by the quasi-parabolic mirror 71, so it is perpendicular to the line segment of the horizontal incident light 70 4 and the angle bisector of the (fl + Df / 2) ray 705. The direction of the composite surface is the direction of this surface. Finally, this surface extends to the point (x2, y2) 'which intersects (f 1 + D f) rays, which is a point below the surface. The position of the first point can be determined arbitrarily, depending on the size of the instrument and the range of incident angle. The purpose of a quasi-concave spherical mirror is to approximate the effect of a concave spherical mirror, and to compensate for the shift of the detection point caused by the observation medium. The quasi-concave spherical mirror is a non-analytical surface, that is, it cannot be completely expressed in mathematical formulas, and it must be calculated numerically. The eighth figure shows how to design this numerically correctable aberration quasi-parabolic lens design. The algorithm is summarized as follows: assuming that the point (X1, y 1) has been solved, the detection light 8 0 6 passes through the observation medium 8 2, and the reflected light beam after entering the quasi-concave spherical mirror 81 is 80 3, and the reflected light beam 8 0 3 will return along the original incident direction and coincide with the incident detection beam 806. The incident angle of the detection beam 8 0 6 at the detection point is f 1; since the refractive index of the observation medium 8 2 is known, extended rays of other incident angles can be easily drawn, and the incident angle is equal to (fl + Df / 2 Ray direction 82 and (Π + Df) ray direction 81 are already

Page 12 V. Description of the invention (9) Knowing two is to find the invariance of the optical path, that is, the optical path control after the incident beam is reflected by the quasi-parabolic mirror 81 must coincide with the optical path of the incident beam, so the point (χ1, yl) The extended quasi-concave spherical curve segment should be perpendicular to the ray 802, and the direction of the curved surface is determined accordingly. Finally, it is extended to the point (x2, y2) that intersects the ray 80. The position of the first point up to this point can be arbitrarily determined. Depending on the size of the instrument and the range of incident angles. The ninth figure shows a quasi-parabolic lens penetrating incident angle changing mechanism, which is a penetrating observation separated light path type incident angle changing mechanism of the two penetrating observation incident angle changing mechanisms developed in the foregoing case. The design is It is proposed based on the principle of the quasi-parabolic mirror of the present case, and the triangular prism mirror 93 is used to separate the optical path of the incident beam from the optical path of the reflected beam. This quasi-parabolic mirror can penetrate the incident angle changing mechanism (as shown in Figure 9). (Shown), is composed of two quasi-parabolic mirrors 92 and 92 and a triangular prism mirror 93 that can be moved up and down using a single-axis displacement platform. After the incident beam 901 passes through the triangular prism mirror 93 and the quasi-parabolic mirror 91, due to the characteristics of the quasi-parabolic mirror, the incident beam 903 still enters a specific single detection point 9 4 ′ on the sample 95 after passing through the observation medium 96. The light beam 9 0 4 reflected by the sample is reflected by the quasi-parabolic mirror 92 and also keeps parallel to the main axis of the holding mirror, so that the reflected light beam 906 is parallel to the incident light beam 901, so light can be easily obtained with a light detector or an optical microscope. The relationship between strength and phase is used to calculate the surface properties of the sample to be tested. Figure 10 shows the quasi-parabolic spherical lens penetrating incident angle changing mechanism.

Page 13 V. Description of the invention (10) It is the penetrating observation coincidence optical path type incident angle changing mechanism of the two penetrating observation incident angle changing mechanisms developed in the foregoing case, and its design is based on the foregoing criteria of the above case. The principle of the design of parabolic mirrors and quasi-concave spherical mirrors is proposed 'and the pentagonal prism mirror 103 is used to make the optical path of the incident beam coincide with the optical path of the reflected beam. This quasi-parabolic spherical lens penetrable incident angle changing mechanism (as shown in the tenth figure) is composed of a quasi-parabolic mirror 101, a quasi-concave spherical mirror 102, and a pentagonal prism reflection that can be moved up and down by using a single-axis displacement platform. Mirror 10 3 and a non-polarizing beam splitter 10 7 are formed. After the incident beam 1 0 0 1 passes through the triangular prism mirror 1 0 3 and the quasi-parabolic mirror 1 0 1, due to the characteristics of the quasi-parabolic mirror, the incident beam 1 〇03 is incident on the detection point 104 on the sample 105 after passing through the medium 106. Due to the characteristics of the quasi-concave spherical mirror ', the reflected light beam 004 reflected by the sample will return along the original optical path. Therefore, an additional non-polarizing beam splitter 107 will separate the incident light beam 1001 and the reflected light beam 1011 which are coincident with each other. The separated reflected beam 1011 can obtain the relationship between the light intensity and the phase by a photodetector or an optical microscope, and calculate the surface properties of the sample to be tested. Preferred embodiments Many high-tech products today need to be processed under specific conditions (such as vacuum, high temperature, etc.). In order to maintain these specific conditions, the general practice is to seal the product test piece together with the processing equipment in an isolation room. The test must be performed, the test strip must be removed, or the testing instrument must be sealed in the isolation room. However, both of these have their difficulties: the removal of the test strip will change the isolation room.

Page 14 5. The specific conditions in the description of the invention (11) slow down the speed of making the product; and sealing the testing instrument in the isolation room may cause damage to the testing instrument due to changes in temperature or pressure. The actual operation is also inconvenient. A set of innovative optical-mechanical architecture inventions composed of a quasi-parabolic mirror and a quasi-spherical mirror proposed in this case can make the incident light beam for detection penetrate the sealed window of the isolation room at different angles and focus on a fixed point in the window. This feature allows the instrument to be set up in a normal environment, and has the characteristics and advantages of externally measuring the condition of the test piece in the isolation room. Taking the semiconductor manufacturing process as an example, in general, the thickness of the coating film needs to be measured during the manufacturing process to maintain a high yield rate. The ellipsometer is by far the most accurate instrument for measuring film thickness, complex refractive index, and resolution. However, At present, there is an observation window above each slot of the semiconductor manufacturing assembly machine to separate the inside and the outside. It is extremely difficult to implement an ellipsometry that can change the angle of incidence. Therefore, the combination of the ellipsometer and the quasi-ellipsoidal mirror proposed in this case and The quasi-spherical mirror system can smoothly measure the thickness of the wafer coating inside the machine from the outside through the viewing window. A major breakthrough for online inspection. The preferred implementation example of this case uses an EllipSometer as a measuring device and introduces the new invention of an optical mechanism that can change the angle of incidence through an observation medium mentioned in this case, which is the aberration combined with the mechanism invented in this case. Calibrating the quasi-parabolic mirror type mini ellipsometer will solve the problem of on-line (I η-S itu) detection in the semiconductor manufacturing process.

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Claims (1)

6. Scope of patent application 1. An optical path coincidence type beam with a variable angle of incidence over a large angle range can be used to enclose an incident light. The optical path coincidence type can be incident at any angle of incidence on one of the measurement samples: The incident angle optical mechanism includes at least the following part: a reflection chirp. The position of the reflection prism can be changed by moving the incident beam. The direction can be rotated 90 degrees to form a deflected beam. A concave parabolic cylindrical mirror Straight to the incident light beam and the vertical system is formed by -parabolic 'follow-vertical': it can be used to guide the light beam reflected by the reflecting prism, shoot on a measurement range of a sample to be tested and reflect to generate a to be measured Light beam; the surface profile of the concave cylindrical mirror is formed by a circular arc, following a direction perpendicular to the incident beam and perpendicular to the deflected beam, and moved in parallel by any thickness, which can be used to change the direction of the beam to be measured, The first beam to be measured is made incident on the reflection beam and is overlapped with the incident beam to form a coincident beam; a light separating mechanism is used for passing the beam to be measured from the coincident beam From it. 2. A reflecting prism as described in the first item of the patent application scope, the reflecting prism Page 16 6. Scope of patent application The mirror can be a reflective mirror. 3. According to one of the reflectors described in the first item of the patent application scope, the reflecting prism may be a pentagonal prism reflector. 4. The light separation mechanism as described in the first item of the patent application scope. The light separation mechanism may be a polarizing beam splitter. 5. The light separation mechanism as described in the first item of the patent application scope. The light separation mechanism may be a non-polarizing beam splitter. 6. —A kind of medium penetrating optical path coincidence variable incident angle optical mechanism can penetrate an incident light beam within a large angle range and penetrate a specific thickness at any incident angle: the medium reaches the single measurement range of the sample The transmissive light path coincidence variable incident angle optical mechanism includes at least the following parts: A reflection 稜鏡 'rotates the direction of the incident beam by moving up and down to change the position of the reflecting prism, which can form a deflected beam at 90 degrees A quasi-concave parabolic cylindrical mirror, which is formed by a perpendicular to the incident beam and a vertical arbitrary thickness formed to make the deflection light in the measurement range of the sample, and guide the surface profile reflected by the reflective prism by A quasi-parabola, in parallel with the direction of the deflected beam, a parallel moving beam penetrates the observation medium, and incident reflection generates a beam to be measured, which is used to make the beam incident on a sample to be tested Page 17 6. At the fixed point of the scope of the patent application, a beam of light to be measured is reflected; a quasi-arc from the perimeter is followed by the direction of the vertical beam, so that the light beam to be measured enters the reflection. And the incident light beam is overlapped to form a coincident light beam; an outgoing light separation mechanism is used to separate the test beam from the coincident light beam; an observation medium described in the sixth item of the scope of the patent application, and the observation quality may be Semi-transparent medium. The observation medium may be a transparent medium as described in "An observation medium described in item 6 of the scope of patent application". As one of the reflections described in item 6 of the scope of the patent application, the reflection edge & J is a reflection mirror. ^ 〇. As one of the reflecting prisms described in the sixth item of the patent application scope, the reflecting edge is a pentagonal prism mirror. Page 18 6. Scope of patent application 11. According to one of the light separation mechanisms described in item 6 of the scope of patent application, the light separation mechanism may be a polarizing beam splitter. 12. As one of the light separation mechanisms described in the sixth item of the patent application scope, the light separation mechanism may be a non-polarizing beam splitter. 13. —A kind of optical path separated variable incident angle optical mechanism 'can measure an incident light beam in a large angle range at any incident angle to a measurement range of one of the samples' The optical path separated variable incident angle optical mechanism includes at least The following parts: a reflection 稜鏡 'by changing the position of the reflection prism by moving up and down, the direction of travel of the incident beam can be rotated 90 degrees to form a deflected beam; a first concave parabolic cylindrical mirror, its surface profile It is formed by a parabola, following a direction perpendicular to the incident light beam and parallel to the direction of the deflected light beam. It can be formed by parallel movement of any thickness. It can be used to guide the light beam reflected by the reflecting prism, and make it incident on one of the samples to be tested. A second concave parabolic cylindrical mirror whose surface profile is formed by a parabola in parallel with a direction perpendicular to the incident beam and perpendicular to the deflected beam is moved in parallel by any thickness. The formed 'can be used to change the direction of progress of the beam to be measured' causes the beam to be measured to be reflected by the reflecting prism and parallel to the incident Page 19 6. Scope of patent application The light beam enters the light detector. Anti-thickness of thick roads can be fixed, special, and through a lens penetrating machine: prismatic penetrating and splitting the angle of light, the angle of the part of the angle, the first range of the intent of the range included in the description of the test package can be By quantity. Type, one-to-three-mirror out-of-inner structure, ten-radiation sub-prototype, the first counter-fan test, enclosing the luminosity, the light range, the angle of penetration, the angle of the angle, and the angle of the angle. Beam measurement can be like a light observation type 4. mirror 5. shot away from 1 edge 1 degree into a reflecting prism, the position of the reflection beam can be changed by moving up and down, the traveling direction of the incident beam can be rotated 9 0 Degree, forming a deflected beam; a first quasi-concave parabolic cylinder lens whose surface profile is formed by a quasi-parabola, followed by a parallel movement of any thickness perpendicular to the incident beam and perpendicular to the direction of the deflected beam, so that The deflected light beam penetrates the observation medium, and is incident on the measurement range of the sample, and is reflected to generate a light beam to be measured, which can be used to guide the light beam reflected by the reflecting prism, so as to be incident on a sample to be tested. A measurement range and reflection produces a beam to be measured; a second quasi-concave parabolic cylindrical mirror whose surface profile is formed by a quasi-parabola, following a silkworm straight to the incident beam and parallel to the direction of the deflected beam Formed by moving an arbitrary thickness To allow the deflected light beam to penetrate the observation medium, and enter the measurement range of the sample, and reflect to generate a beam to be measured. Page 20 6. The scope of the patent application can be used to change the direction of the beam to be measured. After the light beam to be measured is reflected by the reflection chirp, the incident light beam parallel to the light beam enters the light measuring device, item 5 of the description. The ten qualities are introduced by Fan Touli, semi-specific. Please apply for the application. • 1 6 Check the quality of the observation. The quality of the surface is limited to Fan Mingli. Please refer to Shen Keru quality as a guide. Refer to 7 1 to observe the quality of the observation. 18. As one of the reflecting prisms described in the fifteenth scope of the patent application, the reflection can be a triangle. Prism reflector. 19. An optical path coincidence variable incident angle optical mechanism 'can take an incident light beam over a large angle range according to a single measurement point of any incident sample'. The optical path coincidence variable incident angle optical mechanism includes at least the following parts: A reflection 稜鏡 'can change the position of the reflection 稜鏡 by moving it up and down. The direction of travel of the incident beam can be rotated by 90 degrees to form a deflected beam. A concave object lens has a surface profile formed by a parabola. It is formed by passing through the measuring point and perpendicular to the incident beam and parallel to the axis of rotation of the deflected beam. The angle is formed at any angle, and can be used to guide the reflected ft beam to reflect the incident beam. Test sample-fixed point, and reflected to produce a test beam; Page 21 6. Scope of patent application-concave spherical mirror, the surface profile is composed of _ with the measuring point, the spherical surface of the concave ~ can be used to change the direction of the beam to be measured, so that the beam to be measured enters The reflection chirp is overlapped with the incident light beam to form a coincident light beam; a light separation mechanism is used to keep the measured light beam out of the coincident light beam. W * + Yiyi reflective prism, the reflection 20. As described in the nineteenth of the scope of the application for patent, 稜鏡 can be a reflective mirror. 21. As one of the reflecting prisms described in item 19 of the scope of the patent application, the reflecting prism may be a pentagonal prism reflecting mirror. 22. The & light separation mechanism ' as described in item 19 of the scope of the patent application, The light separation mechanism may be a / polarizing beam splitter. + -One of the light separation mechanism 'the light 2 3. The separation mechanism according to item 19 of the scope of the patent application may be a non-polarizing beam splitter. The required incidence angle optical mechanism 'can pass 24. — a kind of medium that penetrates the optical path coincidentally, the variable angle of incidence penetrates a specific thick incident beam within a large angle range, and according to the point ^, the medium penetrates the observation medium of the optical path degree Single Responsibility for a Sample 7 6. The patent application Fanyuan coincidence variable incident angle optical mechanism includes at least the following parts: a reflection chirp, which can be rotated by 90 degrees in the direction of the incident beam by changing the position of the reflection chirp by moving up and down A deflected light beam; a quasi-concave parabolic mirror whose surface profile is formed by a quasi-parabolic rotation to make the deflected light beam penetrate the observation medium and enter the measurement point of the sample, and reflect to generate a Measuring beam; a quasi-spherical mirror for changing the direction of the beam to be measured, so that the beam to be measured enters the reflective prism and is coincident with the incident beam to form a coincident beam; a light separating mechanism for reciprocating the beam The measuring beam is separated from the coincident beam. 25. As one of the observation media described in item 24 of the scope of patent application, the observation medium may be a semi-transparent medium. 26. As one of the observation media described in item 24 of the scope of the patent application, the observation medium may be a transparent medium. 27. According to one of the twenty-fourth aspect of the scope of the patent application, the reflection chirp may be a reflecting mirror. Page 23 6. Scope of patent application 28. As one of the reflection chirps described in item 24 of the scope of patent application, the reflection prism may be a pentagonal prism mirror. 29. According to one of the light separation mechanisms described in the twenty-fourth item of the patent application scope, the light separation mechanism may be a polarizing beam splitter. X 30. According to one of the twenty-fourth light separation mechanism of the patent application scope, the light separation mechanism may be a non-polarizing beam splitter. 31. A kind of optical path separated variable incident angle optical mechanism, which can make an incident light beam within a large angle range according to a single measurement point of any incident sample. The optical path separated variable incident angle optical mechanism includes at least the following parts : A reflecting beam, which can be rotated by 90 degrees to form a deflected beam by moving the position of the reflecting beam up and down by moving up and down; a first concave parabolic mirror whose surface profile is defined by a The parabola is formed by an arbitrary angle that passes through the measurement point, is perpendicular to the incident beam and is parallel to the axis of rotation of the deflected beam. It can be used to guide the beam reflected by the reflection chirp and make it incident on a target. A test sample is fixed at a fixed point and reflected to generate a beam to be measured; a second concave parabolic mirror whose surface profile is passed by a parabola and a 6. Scope of patent application The measurement point is perpendicular to the direction of the axis of rotation of the incident beam and is parallel to the axis of rotation of the deflected beam. It is formed by rotating at any angle. It can be used to change the direction of the beam to be measured and make the beam to be measured. After reflecting through the reflection chirp, 'parallel the incident light beam' enters the light detector; 32. According to one of the reflection prisms described in the third patent application of the patent scope, the reflection chirp may be a corner prism Reflector; 33. — A medium f light-transmitting path separated variable incident angle optical mechanism that can penetrate an incident light beam over a wide range of angles through a specific thickness of the observation medium at any angle of incidence to a single specimen At the measuring point, the medium penetrates the optical path and the variable variable angle of incidence optical mechanism includes at least the following parts: a reflecting prism, which can change the position of the reflecting beam by moving up and down, and can rotate the direction of the incident beam by 90 degrees To form a deflected beam; a first quasi-concave parabolic mirror whose surface profile is constituted by a quasi-parabolic rotation to 'allow the deflected beam to penetrate the observation medium and be incident on the sample by the amount Measuring point, and reflecting to generate a beam to be measured; a second quasi-concave parabolic spherical mirror's surface profile is composed of a quasi-parabola rotation for changing the direction of the beam to be measured, so that the beam to be measured passes the reflection edge After the mirror reflection, the incident light beam is parallel to the light detector. Page 25 6. Scope of patent application 34. As one of the observation media described in item 33 of the scope of patent application, the observation medium may be semi-transparent. 35. As one of the observation media described in item 33 of the scope of the patent application, the observation medium may be a transparent medium. 36. As one of the reflection chirps described in item 33 of the scope of the patent application, the reflection chirps may be a triangular prism mirror. Page 26 The scheme is simple. The case is different from the first. The second is the third. The fourth is the same. The fifth is the sixth intent. The seventh is the eighth. The ninth is in the tenth agency. Fig. (A) (B) are schematic circles showing the angle of parabolic spheres. Figure: It shows the aberration correction plan: It shows the aberration correction plan: (A) (B) shows the schematic diagram of the different angles of incidence of the parabola. Figure: (A) (B) shows the parabolic spheres at different incidence Schematic illustration of the corner. The mirror-type incident angle changing mechanism is illustrated in the figure by the following icons and figures: (A) (B) are schematic circles showing the incident angle. Figure: (A) (B) is a schematic diagram showing the angle of incidence. Figure: (A) (B) is a schematic diagram showing the angle. In detail, a single lens focusing type multi-lens focusing parabolic mirror type incident is obtained for a deeper understanding: the incident angle changing mechanism is different from the incident angle changing mechanism when the angle changing mechanism is different, it means that the detection point will change with the incident angle Schematic representation of changes. Figure · It shows the design of a parabolic mirror that compensates the spherical aberration and the aberration of the observation medium. Design of concave spherical mirror. Mirror-type penetrable medium incident angle changer Mirror-type penetrable medium incident angle change page diagrams The important elements included in the illustration of the present invention are described below: Prism reflectors 12, 13, 14, 15, 22, 23, 24, 25, 33, 93 Lens Π, 2 Bu 26, 27 Sample 35, 45, 62, 95, 105 Observation point 34, 44, 73, 82, 94, 104 Observation medium 6 Bu 72, 83, 96, 106 Parabolic mirror 3, 32, 41 Spherical mirror 4 2 Pentaprism 43, 103 Beamsplitter 46, 107 Quasi-parabolic mirror 7, 91, 92 Quasi-spherical mirror 8 1