TW382796B - Gold wire for bonding - Google Patents
Gold wire for bonding Download PDFInfo
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- TW382796B TW382796B TW084109033A TW84109033A TW382796B TW 382796 B TW382796 B TW 382796B TW 084109033 A TW084109033 A TW 084109033A TW 84109033 A TW84109033 A TW 84109033A TW 382796 B TW382796 B TW 382796B
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- PCHJSUWPFVWCPO-UHFFFAOYSA-N gold Chemical compound [Au] PCHJSUWPFVWCPO-UHFFFAOYSA-N 0.000 title claims abstract description 23
- 239000010931 gold Substances 0.000 claims abstract description 12
- BASFCYQUMIYNBI-UHFFFAOYSA-N platinum Chemical compound [Pt] BASFCYQUMIYNBI-UHFFFAOYSA-N 0.000 claims description 35
- 239000011777 magnesium Substances 0.000 claims description 23
- 229910052709 silver Inorganic materials 0.000 claims description 23
- 229910052697 platinum Inorganic materials 0.000 claims description 22
- 229910052749 magnesium Inorganic materials 0.000 claims description 15
- 239000011575 calcium Substances 0.000 claims description 10
- 229910052737 gold Inorganic materials 0.000 claims description 10
- ZSLUVFAKFWKJRC-IGMARMGPSA-N 232Th Chemical compound [232Th] ZSLUVFAKFWKJRC-IGMARMGPSA-N 0.000 claims description 9
- 229910052779 Neodymium Inorganic materials 0.000 claims description 9
- 229910052776 Thorium Inorganic materials 0.000 claims description 9
- 229910052746 lanthanum Inorganic materials 0.000 claims description 8
- 229910052727 yttrium Inorganic materials 0.000 claims description 8
- 229910052791 calcium Inorganic materials 0.000 claims description 6
- 229910052732 germanium Inorganic materials 0.000 claims description 6
- BQCADISMDOOEFD-UHFFFAOYSA-N Silver Chemical compound [Ag] BQCADISMDOOEFD-UHFFFAOYSA-N 0.000 claims description 5
- 239000004332 silver Substances 0.000 claims description 5
- FZLIPJUXYLNCLC-UHFFFAOYSA-N lanthanum atom Chemical compound [La] FZLIPJUXYLNCLC-UHFFFAOYSA-N 0.000 claims description 3
- QEFYFXOXNSNQGX-UHFFFAOYSA-N neodymium atom Chemical compound [Nd] QEFYFXOXNSNQGX-UHFFFAOYSA-N 0.000 claims description 3
- VWQVUPCCIRVNHF-UHFFFAOYSA-N yttrium atom Chemical compound [Y] VWQVUPCCIRVNHF-UHFFFAOYSA-N 0.000 claims description 3
- OYPRJOBELJOOCE-UHFFFAOYSA-N Calcium Chemical compound [Ca] OYPRJOBELJOOCE-UHFFFAOYSA-N 0.000 claims description 2
- FYYHWMGAXLPEAU-UHFFFAOYSA-N Magnesium Chemical compound [Mg] FYYHWMGAXLPEAU-UHFFFAOYSA-N 0.000 claims description 2
- GNPVGFCGXDBREM-UHFFFAOYSA-N germanium atom Chemical compound [Ge] GNPVGFCGXDBREM-UHFFFAOYSA-N 0.000 claims description 2
- 229910052762 osmium Inorganic materials 0.000 claims description 2
- SYQBFIAQOQZEGI-UHFFFAOYSA-N osmium atom Chemical compound [Os] SYQBFIAQOQZEGI-UHFFFAOYSA-N 0.000 claims description 2
- 238000005034 decoration Methods 0.000 claims 1
- 238000001228 spectrum Methods 0.000 claims 1
- 230000015572 biosynthetic process Effects 0.000 abstract description 5
- 239000012535 impurity Substances 0.000 abstract description 2
- 239000000203 mixture Substances 0.000 description 27
- 230000000694 effects Effects 0.000 description 18
- 229910052693 Europium Inorganic materials 0.000 description 12
- 230000002079 cooperative effect Effects 0.000 description 12
- 229910052790 beryllium Inorganic materials 0.000 description 9
- 239000010944 silver (metal) Substances 0.000 description 9
- 230000000052 comparative effect Effects 0.000 description 8
- 238000005259 measurement Methods 0.000 description 8
- 239000004065 semiconductor Substances 0.000 description 8
- 229910052684 Cerium Inorganic materials 0.000 description 7
- 229910052777 Praseodymium Inorganic materials 0.000 description 7
- 238000005382 thermal cycling Methods 0.000 description 7
- 229910052691 Erbium Inorganic materials 0.000 description 6
- 229910052688 Gadolinium Inorganic materials 0.000 description 6
- 229910052745 lead Inorganic materials 0.000 description 6
- FGRBYDKOBBBPOI-UHFFFAOYSA-N 10,10-dioxo-2-[4-(N-phenylanilino)phenyl]thioxanthen-9-one Chemical compound O=C1c2ccccc2S(=O)(=O)c2ccc(cc12)-c1ccc(cc1)N(c1ccccc1)c1ccccc1 FGRBYDKOBBBPOI-UHFFFAOYSA-N 0.000 description 4
- 238000005336 cracking Methods 0.000 description 3
- 239000013078 crystal Substances 0.000 description 3
- 230000007547 defect Effects 0.000 description 3
- 238000005516 engineering process Methods 0.000 description 3
- 239000000463 material Substances 0.000 description 3
- 238000000034 method Methods 0.000 description 3
- 229910001020 Au alloy Inorganic materials 0.000 description 2
- 238000005452 bending Methods 0.000 description 2
- 239000003353 gold alloy Substances 0.000 description 2
- 238000005304 joining Methods 0.000 description 2
- 229910052753 mercury Inorganic materials 0.000 description 2
- PUDIUYLPXJFUGB-UHFFFAOYSA-N praseodymium atom Chemical compound [Pr] PUDIUYLPXJFUGB-UHFFFAOYSA-N 0.000 description 2
- 239000002994 raw material Substances 0.000 description 2
- 235000015170 shellfish Nutrition 0.000 description 2
- 235000002991 Coptis groenlandica Nutrition 0.000 description 1
- 244000247747 Coptis groenlandica Species 0.000 description 1
- 229910052772 Samarium Inorganic materials 0.000 description 1
- 241000234314 Zingiber Species 0.000 description 1
- 235000006886 Zingiber officinale Nutrition 0.000 description 1
- 239000000956 alloy Substances 0.000 description 1
- 229910045601 alloy Inorganic materials 0.000 description 1
- -1 bait (Er) Chemical compound 0.000 description 1
- 238000005097 cold rolling Methods 0.000 description 1
- 230000002950 deficient Effects 0.000 description 1
- OGPBJKLSAFTDLK-UHFFFAOYSA-N europium atom Chemical compound [Eu] OGPBJKLSAFTDLK-UHFFFAOYSA-N 0.000 description 1
- 230000005284 excitation Effects 0.000 description 1
- 235000008397 ginger Nutrition 0.000 description 1
- 238000010438 heat treatment Methods 0.000 description 1
- 229910052738 indium Inorganic materials 0.000 description 1
- 239000004615 ingredient Substances 0.000 description 1
- WABPQHHGFIMREM-UHFFFAOYSA-N lead(0) Chemical compound [Pb] WABPQHHGFIMREM-UHFFFAOYSA-N 0.000 description 1
- 238000000691 measurement method Methods 0.000 description 1
- 238000002844 melting Methods 0.000 description 1
- 230000008018 melting Effects 0.000 description 1
- 238000003825 pressing Methods 0.000 description 1
- 230000001737 promoting effect Effects 0.000 description 1
- 239000011347 resin Substances 0.000 description 1
- 229920005989 resin Polymers 0.000 description 1
- 229910052702 rhenium Inorganic materials 0.000 description 1
- WUAPFZMCVAUBPE-UHFFFAOYSA-N rhenium atom Chemical compound [Re] WUAPFZMCVAUBPE-UHFFFAOYSA-N 0.000 description 1
- 238000005070 sampling Methods 0.000 description 1
- 239000000758 substrate Substances 0.000 description 1
- ANRHNWWPFJCPAZ-UHFFFAOYSA-M thionine Chemical compound [Cl-].C1=CC(N)=CC2=[S+]C3=CC(N)=CC=C3N=C21 ANRHNWWPFJCPAZ-UHFFFAOYSA-M 0.000 description 1
- 229910052718 tin Inorganic materials 0.000 description 1
- 238000005491 wire drawing Methods 0.000 description 1
Classifications
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L24/00—Arrangements for connecting or disconnecting semiconductor or solid-state bodies; Methods or apparatus related thereto
- H01L24/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L24/42—Wire connectors; Manufacturing methods related thereto
- H01L24/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L24/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/50—Assembly of semiconductor devices using processes or apparatus not provided for in a single one of the subgroups H01L21/06 - H01L21/326, e.g. sealing of a cap to a base of a container
- H01L21/60—Attaching or detaching leads or other conductive members, to be used for carrying current to or from the device in operation
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/01—Means for bonding being attached to, or being formed on, the surface to be connected, e.g. chip-to-package, die-attach, "first-level" interconnects; Manufacturing methods related thereto
- H01L2224/42—Wire connectors; Manufacturing methods related thereto
- H01L2224/44—Structure, shape, material or disposition of the wire connectors prior to the connecting process
- H01L2224/45—Structure, shape, material or disposition of the wire connectors prior to the connecting process of an individual wire connector
- H01L2224/45001—Core members of the connector
- H01L2224/45099—Material
- H01L2224/451—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof
- H01L2224/45138—Material with a principal constituent of the material being a metal or a metalloid, e.g. boron (B), silicon (Si), germanium (Ge), arsenic (As), antimony (Sb), tellurium (Te) and polonium (Po), and alloys thereof the principal constituent melting at a temperature of greater than or equal to 950°C and less than 1550°C
- H01L2224/45144—Gold (Au) as principal constituent
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2224/00—Indexing scheme for arrangements for connecting or disconnecting semiconductor or solid-state bodies and methods related thereto as covered by H01L24/00
- H01L2224/80—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected
- H01L2224/85—Methods for connecting semiconductor or other solid state bodies using means for bonding being attached to, or being formed on, the surface to be connected using a wire connector
- H01L2224/852—Applying energy for connecting
- H01L2224/85201—Compression bonding
- H01L2224/85205—Ultrasonic bonding
- H01L2224/85207—Thermosonic bonding
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/0001—Technical content checked by a classifier
- H01L2924/00014—Technical content checked by a classifier the subject-matter covered by the group, the symbol of which is combined with the symbol of this group, being disclosed without further technical details
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01012—Magnesium [Mg]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01047—Silver [Ag]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01063—Europium [Eu]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01078—Platinum [Pt]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/01—Chemical elements
- H01L2924/01079—Gold [Au]
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- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L2924/00—Indexing scheme for arrangements or methods for connecting or disconnecting semiconductor or solid-state bodies as covered by H01L24/00
- H01L2924/10—Details of semiconductor or other solid state devices to be connected
- H01L2924/11—Device type
- H01L2924/14—Integrated circuits
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- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
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Abstract
Description
經濟部中央標準局貝工消費合作社印製 A 7 B7_五、發明説明（1 ) 本發明偽關於連接I c晶粒之電極與外部引出線之連接 用金線，尤關於組立半導體装置時，可顯著的降低因超音 波输出之增加而損傷連接線之頸部之程度之1C晶粒連接用 金線。 連接1C晶粘上之電掻舆外部引出線之習用技術主要係 採用使用金線之超音波併用熱壓連接法。最近，随着對半 導醱裝置之高速化，及高功能化之要求，電極與外部引出 線之數量增加，因此，從轚柱至外部引出線為止之配線距 離亦加長。此外，為了半導體装置之小型化及薄型化，必 須將電極與外部引出線間之配線距離極端的縮短。 因此，必須使用許多引出線而可縮小配線長度。為達 成此目的，在使用連接裝置形成迴路之過程中，進行在形 成迴路及使球頸部朝向相反方向過度的鼙曲而變形後形成 迴路之所諝逆行變形，藉此使迴路高度及迴路形狀安定冬 然而，進行上述逆行變形形成之迴路若在半導體裝置 之動作階段暴露於因半導體之發熱而發生之熱循環環境時 ，發生球頸部斷線等間題。 為了防止在半導體動作中發生斷線，需要一種使球頸 部過度的彎曲及變形而形成迴路時，於其後之苛酷之熱循 環試驗中不會發生斷線之金線。 習用技術中，為了改善金球正上方之頸部因振動而斷 裂之問題而含有一定董之Eu, Ca, Ge，Be等之技術開 平 5-9624 號）。 然而，上述技術中，卽使將連接線在球頸部過度的_ (請先閲讀背面之注意事項再填寫本頁)Printed by the Central Standards Bureau of the Ministry of Economic Affairs, Shellfish Consumer Cooperative, A 7 B7_V. Description of the invention (1) The present invention relates to the gold wire for connecting the electrode of the I c die with the external lead wire, especially when the semiconductor device is assembled, Gold wire for 1C grain connection, which can significantly reduce the degree of damage to the neck of the connection line due to the increase in ultrasonic output. The conventional technology for connecting the external lead wires on the 1C crystal stick is mainly using a supersonic wave using gold wires and a thermocompression connection method. Recently, with the requirements for high-speed semiconductor devices and high-functionality, the number of electrodes and external lead wires has increased. Therefore, the wiring distance from the pillar to the external lead wires has also increased. In addition, in order to reduce the size and thickness of a semiconductor device, the wiring distance between an electrode and an external lead must be extremely shortened. Therefore, many lead wires must be used to reduce the wiring length. In order to achieve this, in the process of forming a circuit using a connection device, the circuit is retrogradely deformed after the circuit is formed and the ball neck is excessively warped and deformed in the opposite direction, thereby forming the circuit height and the shape of the circuit. Anding Dong However, if the circuit formed by the above-mentioned retrograde deformation is exposed to a thermal cycle environment due to the heat generated by the semiconductor during the operation stage of the semiconductor device, problems such as disconnection of the ball neck portion occur. In order to prevent disconnection during semiconductor operation, a gold wire that does not cause disconnection in the severe thermal cycle test that is required when the ball neck is excessively bent and deformed to form a circuit is required. In the conventional technology, in order to improve the problem of the neck fracture directly above the golden ball due to vibration, a technique such as Eu, Ca, Ge, Be, etc. is included in Technical Publication No. 5-9624). However, in the above technology, the connection line is excessively _ (Please read the precautions on the back before filling this page)
、tT 本紙張尺度適用中國國家標準（CNS ) Λ4規格（210X297公釐） 經濟部中央標隼局貝工消費合作社印製 A7 _ B7____ 五、發明説明（2 ) 曲及變形而形成回路後，將之暴露於苛酷之熱循環中時， 亦不能成為球頸部之斷線少之金線。 本發明之目的為提供一種可解決上述問題，卽使在進 行增大超音波輸出之超音波併用熱壓連接，而且將球頸部 過度的戀曲及變形而形成迴路之所謂逆行變形而形成迴路 後，暴露於苛酷之熱循環環境中，亦不會發生斷線之1C晶 粒連接用金線。 本發明之發明人經過研究結果發現，在99.999重量％ 以上之高鈍度金中含有一定量之白金（Pt),銀（Ag), IJI (Hg),銪（Eu),即可藉著各元素之相乘效果達成上述目的β 本發明之第1發明之特激為，在99.999重量3：以上 之高純度金中含有白金（Pt): 0 . 0 0 0 1〜0 . 0 0 5重量％，銀 (Ag): 0.0001 〜0.005 重量：S，鎂（Hg): 0.0005〜0.005重 置 ％,及銪（Eu): 0.00005〜0.005 重量 ％。 第2發明之特激為，在第1發明中，又含有坡（Be): 0 . 0 0 0 0 2 〜0 . 0 0 1 重量 ％ ,鈣（C a ) : 0 · 0 0 0 0 5 〜0 . 0 0 4 重量 S； ，鍺（G e ) : 0 . 0 0 0 5〜0 . 0 1重量3；中之至少一種。 第3,第4發明為，在第1或第2發明中，又含有鑭 (La),釔（Ό,鉛（Pb),餌（Er),釓（Gd),鈽（Ce)，镨（Pr) ，钕（Nd),釤（Su)中之至少一種大約0.0001〜〇.〇2重量 %〇 如上所述，本發明係含有由一定量之Pt, Ag. Hg及 Eu所構成之第1群，由一定量之Be, Ca, Ge中之至少一 種所構成之第 2 群，由 La, Y, Pb, Er, Gd, Ce, Pr, Nd, 本纸張尺度適用中國國家揉準（CNS ) A4規格（210X297公釐） I _-訂 (請先閲讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印裝 A7 B7 五、發明説明（3 ), TT This paper size applies the Chinese National Standard (CNS) Λ4 specification (210X297 mm) Printed by A7 _ B7____, Cooper Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs V. Description of the invention (2) After bending and deformation to form a circuit, When exposed to harsh thermal cycles, it cannot become a gold wire with few broken lines in the ball neck. The purpose of the present invention is to provide a so-called retrograde deformation which can solve the above-mentioned problems, so as to increase the ultrasonic output and connect them by heat pressing, and also form a circuit by excessively bending and deforming the ball neck to form a circuit. After exposure to the harsh thermal cycling environment, the gold wire for 1C die connection will not break. The inventor of the present invention has found through research that a certain amount of platinum (Pt), silver (Ag), IJI (Hg), and thorium (Eu) are contained in the high-passivity gold of 99.999% by weight or more. The multiplicative effect of the elements achieves the above-mentioned goal. [Beta] In the first invention of the present invention, it is particularly desirable that the high purity gold above 99.999 includes platinum (Pt): 0. 0 0 0 1 ~ 0. 0 0 5 weight %, Silver (Ag): 0.0001 to 0.005 weight: S, magnesium (Hg): 0.0005 to 0.005 reset%, and europium (Eu): 0.00005 to 0.005 weight%. The special excitation of the second invention is that, in the first invention, it further includes slope (Be): 0. 0 0 0 0 2 to 0. 0 0 1% by weight, and calcium (C a): 0 · 0 0 0 0 5 ~ 0. 0 0 4 weight S;, germanium (G e): 0. 0 0 0 5 ~ 0. 0 1 weight 3; at least one of. The third and fourth inventions include the lanthanum (La), yttrium (rhenium, lead (Pb), bait (Er), thorium (Gd), thorium (Ce), thorium (L)) in the first or second invention. At least one of Pr), neodymium (Nd), praseodymium (Su) is about 0.0001 to 0.02% by weight. As described above, the present invention contains the first one composed of a certain amount of Pt, Ag. Hg, and Eu. Group, the second group consisting of at least one of Be, Ca, Ge, and La, Y, Pb, Er, Gd, Ce, Pr, Nd. ) A4 specification (210X297mm) I _-order (please read the notes on the back before filling this page) Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 V. Description of the invention (3)
Sin中至少一種之一定量所構成之第3群之成份之組成。 以下說明本發明之詳細結構及其作用。 本發明所使用之出發原料儒含有純度為99.999重量％ 以上之金，其餘為不可避免之不純物所構成之金線。出發_ 原料中含有形成上述結構之Pt, Ag, Mg, Eu,故可製成可 利用各金羼元素間之相乘作用進行增大超音波输出之超音 波併用熱壓連接，在形成迴路時實施逆行變形之連接用金 線之頸部可靠性髙，疲勞恃性優，被暴露於熱循環環境下 時之斷裂待性優異之金合金線。 以下説明限定上述金合金線之成份組成之理由。 第1群；PtAt least one of Sin quantifies the composition of the components of the third group. The detailed structure and function of the present invention will be described below. The starting raw material used in the present invention contains gold with a purity of 99.999% by weight or more, and the rest are gold threads composed of unavoidable impurities. Departure _ The raw materials contain Pt, Ag, Mg, Eu forming the above structure, so it can be made into an ultrasonic wave that can increase the ultrasonic output by multiplying the effects of the various elements of gold, and connected by thermocompression. When forming a circuit, A gold alloy wire that is retrogradely deformed and has excellent necking reliability and excellent fatigue resistance when exposed to a thermal cycling environment. The reason for limiting the component composition of the above-mentioned gold alloy wire will be described below. Group 1; Pt
Pt與Ag, Mg, Eu共存時，可産生提高球頸部之可靠 性之優異效果。 p t含有量成為0 . 0 0 0 1重量X以上時，與〇 . 〇 0 0 1重 置2以下時tb較，球頸部之可靠性提高，起過〇. 0 05重量 %時，則不能進行良好之球頸。因此，將Pt含有量設定 為 0 . 0 0 0 1 〜0 . 0 0 5 重量 ％。 與雖然含有上逑一定量之Pt,但未含有Ag, Mg, Eu中 之任一種時比較，當與Ag, Mg, Eu共存時，球頸部之可 靠性提高，故Pt必須與Ag, Mg, Eu共存。 更佳之組成為至少含有一定量之Be, Ca, Ge中之一 種。這種組成可更提高球頸部之可靠性。 第1群；AgWhen Pt coexists with Ag, Mg, Eu, it can produce an excellent effect of improving the reliability of the ball neck. When the pt content is 0.000 or more when weight X is greater than tb when 0.02 is reset to 2 or less, the reliability of the ball neck is improved. When it exceeds 0.0005% by weight, it cannot be used. Perform a good ball neck. Therefore, the content of Pt is set to 0.0001 to 0.05% by weight. Compared with Pt, which contains a certain amount of Pt, but does not contain any of Ag, Mg, Eu, when coexisting with Ag, Mg, Eu, the reliability of the ball neck is improved, so Pt must be with Ag, Mg , Eu coexist. A more preferable composition contains at least a certain amount of Be, Ca, Ge. This composition can further improve the reliability of the ball neck. Group 1; Ag
Ag與Pt, Mg, Eu共存時，可産生提高球頸部之可靠 本紙張尺度適用中國國家揉準（CNS ) A4規格（2丨Ο X 29"7公釐） (請先閲讀背面之注意事項再填寫本頁) 經濟部中央標準局貝工消費合作社印装 A7 B7 五、發明説明（4 ) 性之優異效果。When Ag and Pt, Mg, Eu coexist, it can increase the reliability of the ball neck. This paper size is applicable to China National Standard (CNS) A4 (2 丨 〇 X 29 " 7 mm) (Please read the precautions on the back first (Fill in this page again) Printed by the Central Standards Bureau of the Ministry of Economic Affairs, Shellfish Consumer Cooperatives, printed A7 B7 V. Description of Invention (4) Excellent effect of nature.
Ag含有量成為0.0001重量3：以上時，與O.QQQl重 量％以下時比較，球頸部之可靠性提高，超過0.005重董 3：時，則不形進行良好之球形成。因此，將A g含有量設定 為 0 . 0 0 0 1 〜0 . 0 0 5 重量！ί。 與雖然含有上述一定量之Ag,但未含有Pt, Hg, Eu中 之任一種時比較，當與Pt, Mg, Eu共存時，可提高球頸 部之可靠性，故Ag必須與Pt , Mg, Eu共存。 更佳之組成傜至少含有一定量之Be, Ca, Ge中之至 少一種。這種組成可産生更提高球頸部之可靠性之優異效 果。 第1群；MgWhen the Ag content is 0.0001% by weight or more, the reliability of the ball neck is improved compared to when the weight percentage of O.QQQ1 is less than or equal to 0.00% by weight. When it exceeds 0.005% by weight, good ball formation is not achieved. Therefore, set the A g content to 0. 0 0 0 1 to 0. 0 0 5 weight! ί. Compared with Pt, Hg, Eu, although it contains some of the above-mentioned Ag, it can improve the reliability of the ball neck when coexisting with Pt, Mg, Eu, so Ag must be with Pt, Mg , Eu coexist. A more preferable composition contains at least one of Be, Ca, and Ge in a certain amount. This composition can produce an excellent effect of further improving the reliability of the ball neck. Group 1; Mg
Mg與Pt, Ag, Eu共存時，可産生提高球頸部之可靠 性之優異效果。When Mg coexists with Pt, Ag, Eu, it can produce excellent effects to improve the reliability of the ball neck.
Hg含有量為0.0005重量3；以上時，與0.0005重量X 以下時比較，球頸部之可靠性提高。Mg含有量超過0.005 重量S：時，刖不能進行良好之球形成，而且在連接時，晶 粒電極發生破裂。因此，將Mg含有量設定為Q.0005〜 0 . 0 05 重量：Ϊ。 與雖然含有上逑一定量之Mg,但未含有Pt, Ag, Eu中 之任一種時比較，當與Pt, Ag, Eu共存時，可提高球頸 部之可靠性，故Mg必須與Pt, Ag, Eu共存π 更佳之組成係至少含有一定量之Be, Ca, Ge中之一 種。這種組成可更提高球頸部之可靠性。 本紙張尺度適用中國國家標準（CNS ) Α4規格（210X297公釐） I.------«--—赛------、tT------ (請先聞讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 A7 B7____五、發明説明（5 ) 第1群；Eu Eu與Pt, Ag, Mg共存時，可産生提高球頸部之可靠 性之優異效果。 Eu含有量為0.00005重量3；以上時，與0.00005重 量X以下時比較，球頸部之可靠性提高。超過0.0001重 量％時，可靠性更提高。Eu含有量超過0.QQ5重董％時， 於連接時晶粒電極發生破裂。因此將Eu含有量設定為 0 . 0 0 0 0 5 〜0 . 0 05 重量％。 與雖然含有一定量之Eu,但未含有Pt, Ag, Mg中之任 —種時比較，當與Pt, Ag, Hg共存時，可提高球頸部之 可靠性，故Eu必須與Pt, Ag, Mg共存。 更佳之E u含有量之範圍為Q . 0 0 0 1〜Q . Q 0 5重量3：。在 此範圍内，提高球頸部之可靠性可産生優異之效果。 更佳之組成為至少含有一定量之Be, Ca, Ge中之一 種。這種組成可産生提高球頸部之可靠性之優異效果。 第 2 群；Be, Ca, Ge 因為Be含有量為0. DO 00 2〜0.001重量X, Ca含有量為 0 , 0 0 0 0 5〜0 . 0 0 4重量％ , G e含有量為0 . 0 0 0 5〜0 . 0 1重量 %中至少一種成份在Pt, Ag, Mg與Eu共存時可産生提高 球頸部之可靠性之優異效果，故常被採用。 Be含有量0.00002重量S：以下，刖Ca含有量〇.〇 0 0 0 5 重量％以，Ge含有量0.0Q05重量％以下時，則不能産生 如上述之更優異之效果。 Be含有量超過0.001重量2時，即不能進行良好之球 叫 裝 訂 ？'^ (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家揉準（CNS ) A4規格（210X297公釐） A7 B7 經濟部中央樣準局員工消費合作社印製 五、發明説明（6) 形成。 ， C a含有童超過0 · 004重量％時，即不能進行良好之球 形成。 Ge含有量超過〇.重量％時，在連接時容易發生電 極破裂。 因此將Be含有童設定為0.00002〜0.001重量％, ca含 有量設定為0.00005〜0.004重量％, Ge含有量設定為0.0005 〜0 . 0 1重量％。 第3 群；La, Y， Pb, Er, Gd, Ce, Pr, Nd, Sm 在第1群之成份中含有0.0001〜0.02重量S：之第3群 之成份，亦即 La, Y, Pb, Er, Gd, Ce, Pr, Nd, Sn 中之 至少一種成份時，其球頸部之可靠性較只含有第1群之組 成之可靠性比較，具有相同效果。 此時，雖然含有第3群之成份，但未含有第1群成份 之Pt, Ag, Mg，Eu中之任一種時，不能提高球頸部之可 靠性D 在第1群之成份及第2群之成份中含有0.0QQ1〜0.02 重量3；之第3群之成份，亦即La, Y, Pb, Er, Gd, Ce, Pr ,Nd，Sm中之至少一種成份時，其球頸部之可靠性舆同 時含有第1群之成份及第2群之成份之組成之可靠性比較 ，具有同等或更佳之效果。 此時，雖然含有第2群及第3群之成份，但未含有第 1群之成份之Pt, Ag，Mg, Eu中之任一種時，不能提高球 頸部之可靠性 ^ 裝 訂 旅 (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) Α4規格（210Χ297公釐} 經濟部中央標準局員工消費合作社印製 A7 B7五、發明説明（7 ) 以下説明表1〜表16中之實施例及比較例。 啻瓶例1 將含有99.999重置％之金與各元素之母合金在真空 熔解爐中熔解後鑲造成如表中所示之組成，反覆進行使用 溝狀辊及拉線機之冷軋加工及熱處理，製成最後線徑30« m ，延伸率4¾之細線。將該細線做為連接線，利用高速自 動連接機在1C晶粒電極上進行超音波熱壓連接。將超音波 輸出設定為〇.5w進行球接合後，將毛細管移動至與迴路 形成相反之方向，將其逆行角度設定為與垂直方向成為50 度角度，使球頸部苛酷的彎曲及變形，然後形成正常之迴 迴路。 首先，使用細線進行球形成及振動試驗，然後在1C晶 粒電極上進行連接後，進行接合時之電極破裂，及熱循環 試驗。表2中表示测定结果。 實施例2〜150/比較列1〜22 除了設定為表示所示組成以外，其他與實施例1相同 的形成為細線而進行試驗表2，表4,表6，表8, 11,表 14,表16中表示其結果。 測定方法如下。 球形狀 利用設在高速自動連接機中之電火炬製作金球，並以 掃描型電子顯微鏡觀察金球之大小，真球度，及表面形狀。 金球之大小為線徑之2.5倍，亦即以75U m中為基準 ，真球度，表面狀態係以比較抽樣對比測定。若測定1 0個 -1 0- 一 装 訂 - ^ (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 經濟部中央標準局員工消費合作社印製 A7 B7五、發明説明（8 ) 之結果全部良好時，卽表示為「良好」，只要有1個不良 時即表示為「不良J 。 接合時之電極破裂 利用高速自動連接機進行1 0 0値連接測試，若無電極 破裂之不良發生時，卽表示為「良好」，只有一値破裂不 良發生時，卽表示為「不良J。 形成迴路後，以環氣樹脂封閉，進行-1〇υΧ30分鐘 及1 5 (TC X 3 0分鐘之熱循環測試2 0 Q 0次。測試1 0 0値試 料，並利用導通測試確認是否有斷線。以破斷率表示樹線 之値數。 振動試驗 除了使用經過鍍銀之引出線框1取代1C晶粒電極做為 基板材料之外，其他與實施例1相同的進行連接，做為振 動試驗之材料。 使用第1圖所示之振動試驗機2,以夾具4保持前端 連接於引出線框1之線3.依照如下之條件進行以軸5為 中心朝向左右兩側振擺之振動試驗，測定發生破斷以前之 振動次數。 間距（LI): 15〇wn 兩側振幅（L 2 ) : 2 6 ju m 振動頻率：4 Ο Η z ( 1秒鐘4 0次） 反覆進行3次相同試驗而表示所得之平均值。 -11- ----------裝------II------ 一 I (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適庵^國國家標準（CNS ) Α4規格（210Χ297公釐） 五、發明説明（9 ) A7 B7 經濟部中央標準局員工消費合作社印製 組 成 (重量ppm) 實施例 Pt Ag Mg Eu Be Ca Ge Au 1 1 10 20 10 一 一 一 餘部 2 10 rr 99 — 一 一 ” 3 50 ” 99 *9 — 一 — ” 4 10 1 ” ” 一 — 一 >» 5 50 ” 99 一 一 一 »» 6 »1 10 5 一 一 一 ” 7 ” 99 50 — 一 ” 8 9 99 tf ” >9 20 >9 0.5 一 一 — » η 10 99 ” 9f 50 — 一 一 ” 11 1 10 20 10 5 一 一 >9 12 10 ” *♦ »> 一 — ” 13 50 ” 99 ” 一 一 ** 14 10 1 if 一 — »9 15 >* 50 ft 9t ” — — 99 16 10 5 Μ 一 一 17 >9 50 » — — ” 18 19 ” ” ” 20 ” 0.5 9t ” — — >9 f9 20 tt 50 — 一 t9 21 ” » 99 10 0.2 — 一 ” 22 ” 99 t9 ft 10 — 一 23 1 10 20 9* — 10 一 *9 24 10 99 ” 一 ” 一 25 50 » ” » — 9t — tt 26 10 1 ft 一 ” 一 27 99 50 ” 99 — ” 一 tt 28 ” 10 5 ft 一 ” — ” 29 » » 50 ” — — ” 30 ft ” 20 0.5 — 一 99 -12- I J"-訂 (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 五、發明説明（10 ) A7 B7 經濟部中央標準局員工消费合作社印製 表 2 測定 結果 實施例 球形狀 接合時之 電極破裂 連接頸姜 熱循環試驗 破斷率U) 迅可靠性 振動試驗 (X 1〇3次數） 1 良好 良好 1 12.1 2 η ” ” 12.3 3 ” *9 12.4 4 ” 99 >9 12.1 5 >9 r* 12.3 6 >* ” 12.4 7 ” 12.6 8 >9 ” ” 11.2 9 ” ” 12.3 10 »» >9 12*2 11 ” ” 0 13.0以上 12 ft 13 >9 >f tt 14 ” ” 15 ” η >9 ” 16 rt >9 17 ” ” >* 18 η ” 1 11.2 19 >» 0 13.Q以上 20 >9 » 99 21 99 ” 99 η 22 ，， » » 23 ” ” ” it 24 ” ” »9 ” 25 ” »> 9* 26 tt 99 99 ，， 27 >» ” 9t ” 28 >9 ” 99 29 >* ” ft ” 30 ” η 1 11.2 -13- ----------Ί------1T-------Λ i f (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（2I0X297公釐） 經濟部中央標隼局員工消費合作社印製 B7 五、發明説明（11 ) 表3 組 成 (重量ppm) 實施例 Pt Ag Mg Eu Be Ca Ge Au 31 10 10 20 1 一 10 — 餘部 32 >$ ” tt 50 一 一 >* 33 ” 9* ” 10 一 0.5 一 »9 34 τ> η η — 40 一 ” 35 1 ，， ” 一 一 40 9> 36 10 9> ” 一 一 t* 37 50 r> 99 — 一 7t 38 10 1 99 >t — 一 99 39 ” 50 n — 一 » » 40 ” 10 5 ” — 一 » >» 41 ·> ” 50 » 一 一 ” 42 43 >* » η 20 w 0.5 : — *9 ” tt 44 ” 9t ” 50 一 — ” 99 45 ” rt *9 10 — 一 5 ” 46 f* ” ** >9 一 一 100 99 47 1 *> rf 99 5 10 一 ” 48 10 99 n >y » >9 一 ” 49 50 ” it ” ” — >» 50 10 1 ” ” >» *9 一 ” 51 9* 50 n tt tt 一 ” 52 ” 10 5 it ft — ” 53 ” 50 ” ” η — ” 54 55 ” ft ff 20 ” 0.5 η w ” 一 ” ” 56 *9 Μ ” 50 » 一 »9 57 r* )« η 10 0.2 一 ” 58 99 » ” 10 99 一 ” 59 ” » »9 5 0.5 一 ft 60 ” 99 ” 40 — ” -14- (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（2I0X297公釐） 五、發明説明（U ) A7 B7 經濟部中央標準局員工消費合作社印製 表 4 測定 結果 實施例 球形狀 接合時之 電極破裂 連接頸1 熱循環試驗 破斷率（％) 迅可靠性 振動試驗 (X 103次數） 31 良好 良好 0 13.0以上 32 tf 33 »> ” 99 » 34 99 tf rt 35 » 99 99 9* 36 η ” » η 37 ” >9 9t it 38 ” ” 39 ” 99 40 ” ” 9* 41 >» ” >* 42 ” >* 1 11.2 43 0 13.0以上 44 η ” ” ” 45 ” ” 46 ft ” 47 ” » ** 48 ” ” 49 99 50 η ” >9 51 >» ” 52 ” 53 »> » 54 1 11.2 55 ” ” 0 13.0以上 56 »» ” ” 57 ” ” 58 ” ” >» 59 99 99 60 tf ” » -15- ----------^------1T------.Λ. I . * (請先閾讀背面之注意事項再填寫本頁) 本紙乐尺度適用中國國家標準（CNS ) A4規格（210X297公釐） A7 B7 五、發明説明（13 ) 表5 經濟部中央標準局員工消費合作社印製 組 成 (重量PPH) 實施例 Pt Ag Mg Eu Be Ca Ge Au 61 1 10 20 10 5 一 40 餘部 62 10 ” » 9f 一 ” >9 63 50 ” ” 99 ff 一 >9 ” 64 10 1 ” 99 » 一 ” 99 65 >9 50 ” ” ” — ” 99 66 ” 10 5 ” 一 99 99 67 ” 50 ” » — U η 68 69 »9 99 » 99 20 ft 0 . 5 99 η — 9* 99 99 99 70 ft *9 99 50 »» — ” >9 71 >9 η 91 10 0.2 一 ” η 72 ” ” >» » 10 一 » » 73 ” ” ” 99 5 — 5 99 74 ” >» ft η — 100 99 75 1 η 99 tf 一 10 40 ” 76 10 ” >9 ” 一 >» 77 50 *9 >9 一 ft >9 78 10 1 »» ” — 99 ” >9 79 ” 50 99 一 η 99 ，* 80 ” 10 5 »9 —— >9 » >» 81 » ” 50 9> 一 >* tt »» 82 83 »» ” ” 20 ” 0.5 ” »· ” W if Μ 84 99 >* ” 50 — ” »9 ” 85 91 99 »» 10 一 0.5 一 »9 86 ” 99 一 40 _ ” 87 ” ” 一 — 5 99 88 >* Μ ” ” — — 100 $9 89 1 t* >9 5 10 40 ” 90 10 ” » >9 » -16- 裝 訂 Γ··^(請先閣讀背面之注意事項再填寫本頁) 本紙張尺度適；^國1^家標準（[呢）八4規格（210'乂297公釐） 五、發明説明（13 ) A7 B7 經濟部中央標準局員工消費合作社印製 表 6 測定 結 果 實施例 球形狀 接合時之 電極破裂 連接頸？ 熱循環試驗_ 破斷率（％) 银可靠性 振動試驗 (X 1 〇3次數） 61 良好 良好 0 13.Q以上 62 ” 99 ” 63 99 ” ft 99 64 η 99 *9 ” 65 ” 19 99 ” 66 i9 99 ” 67 ” 99 ” ” 68 tt tt 1 11.2 69 *9 ft 0 13 . 0以上 70 yt t9 (t 71 ” 9T %9 99 72 ft tt tf ” 73 99 99 99 tt 74 99 99 f9 75 ” » »9 76 >9 >» ” *9 77 ” ” 9t 99 78 99 ” » >» 79 >9 ” 80 ” ” » 81 t? » ” 82 99 9f 1 11.2 83 t* ” ” 13.0以上 84 99 tt >» 85 ft ff » >* 86 t* ” 99 87 ” ff η >* 88 ” 99 it 89 9f 99 f* ” 90 » tt ” tt -17- I- I I I II I I I .!! I ;.!訂 I .. I I :-1 I I (請先閲讀背面之注意事項再填寫本頁) 本紙張尺度適#缉國家標準（CNS ) A4規格（210X297公釐） 五、發明説明（Μ ) A7 B7 表 7 組 成 (重 量 ppm) 實施例 Pt Ag Mg Eli Be Ca Ge Au 91 50 10 20 10 5 10 40 餘部 92 10 1 ” ” ” ” 93 99 50 99 tf ” 99 94 10 5 ft ” ” 95 η 50 ft ” » tt 96 97 ，， 9» 20 r> 0.5 ” μ ” ” 9* ” ” 98 99 r* if 50 肯》 9» tf ” 99 99 tt 10 0.2 99 *f 100 ” ” *9 10 ” 9t 101 ” 9* 9t 99 5 0.5 η 102 ” ff ft » 40 tt 99 103 99 >9 99 99 ” 5 99 104 >9 9t ** ” »> ” 100 » (請先閱讀背面之注意事項再填寫本頁) -裝· 、-'β 經濟部中央標準局員工消費合作社印裝 表 8 實施例 潮 定 結 果 球形狀 接合時之 電極破裂 連接頚部可靠性 熱循環試驗 破斷率U) 振動試驗 (X 103次數） 91 良好 良好 0 13.0以上 92 99 9* η >* 93 >9 99 ” ” 94 99 ，， » ” 95 ” T9 19 99 96 9* ft 1 11.2 97 ” f9 0 13.Q以上 98 ” >» ” >9 99 99 y> ” »9 100 *9 rt 99 *9 101 ” V» ” ” 102 ” r* ” 99 103 >» ” 104 *9 tt it >» -18- 本纸張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 五、發明説明（is ) 表9 A7 B7 經濟部中央標準局員工消費合作杜印製 組 成 (重董ppa) 實施例 Pt Ag Mg Eu Be Ca Ge La 105 1 10 20 10 — —— 一 20 106 10 ” r* 9* — — — ” 107 50 ” » *9 — — — ” 108 10 1 t9 9* — 一 — 99 109 tt 50 99 ，， — — — » 110 tt 10 5 一 一 — it 111 ” ” 50 — — — η 112 113 ” ” H » 20 99 0.5 — 一 一 ** 114 ” Μ ft 50 一 — 一 ，， 115 ” >y ” 10 一 一 — 1 116 ” 99 t9 tr — — 一 200 117 ” η 99 99 — — — 一 118 tt tf it ” 一 — — — 119 >9 » >9 » !- 一 — — 120 99 tt 99 *9 — —— — — 121 9f ” ” ” — — — 一 122 ft f9 ” — — 一 — 123 » ” ” ” — — 一 124 >9 ” ” Μ —— 一 一 一 125 it 99 一 — 一 20 126 ” ” tf ” — — 一 127 128 99 ft ” tt »r ” it 0.2 _____ 一 ” if 129 ” Jt ” 10 — 一 79 130 ” 5* ” — 0.5 — ” 131 >» ” 99 >9 — 20 — ” 132 » rt ” ” — 40 — 133 ” t* 99 ” — — 5 ” 134 >9 ft ” ” —— — 100 tf -19- "―裝 訂 ~ ♦ ί ί (請先聞讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） B7 五、發明説明（16 ) 表10 組 成 （重量ΡΡΠ) 實施例 Υ Pb Er Gd Ce Pr Nd Sm AuThe Hg content is 0.0005 weight 3; when it is more than 0.0005 weight X or less, the reliability of the ball neck is improved. When the Mg content exceeds 0.005 and the weight S :, osmium cannot form good spheres, and the crystal electrode is broken during connection. Therefore, the Mg content is set to Q.0005 to 0.05. Weight: Ϊ. Compared with Pg, Ag, and Eu, although it contains a certain amount of Mg, it can improve the reliability of the ball neck when coexisting with Pt, Ag, Eu. Therefore, Mg must be compatible with Pt, Ag, Eu coexist π. A better composition is at least one of Be, Ca, and Ge. This composition can further improve the reliability of the ball neck. This paper size applies to Chinese National Standard (CNS) Α4 specification (210X297 mm) I .------ «------ Sai ------, tT ------ (Please read the back first Please pay attention to this page, please fill in this page) Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7____ V. Description of Invention (5) Group 1; When Eu Eu and Pt, Ag, Mg coexist, it can increase the ball neck Excellent effect of reliability. The Eu content is 0.00005 weight 3; when it is more than 0.00005 weight X, the reliability of the ball neck is improved. When it exceeds 0.0001% by weight, the reliability is further improved. When the content of Eu exceeds 0.05 wt%, the grain electrode is cracked during the connection. Therefore, the Eu content is set to 0.005% to 0.05% by weight. Compared with Pt, Ag, and Mg, although it contains a certain amount of Eu, it does not contain any of Pt, Ag, and Mg. When coexisting with Pt, Ag, and Hg, the reliability of the ball neck can be improved. Therefore, Eu must be combined with Pt, Ag. , Mg coexist. A more preferable range of the content of Eu is Q. 0 0 0 1 to Q. Q 0 5 weight 3 :. Within this range, improving the reliability of the ball neck can produce excellent effects. A more preferable composition contains at least a certain amount of Be, Ca, Ge. This composition can produce an excellent effect of improving the reliability of the ball neck. Group 2; Be, Ca, Ge Because the content of Be is 0. DO 00 2 ~ 0.001 weight X, the content of Ca is 0, 0 0 0 0 5 ~ 0. 0 0 4% by weight, and the content of Ge is 0 0 0 0 5 to 0. 0 1% by weight of at least one component, when coexisting with Pt, Ag, Mg and Eu, can produce an excellent effect of improving the reliability of the ball neck, so it is often used. Be content 0.00002 wt. S: Below, 以下 Ca content 0.0005 wt.% Or less, and Ge content 0.00.005 wt.% Or less, no more excellent effect as described above can be produced. When the content of Be exceeds 0.001 by weight 2, the good ball cannot be bound. '^ (Please read the notes on the back before filling this page) This paper size is applicable to China National Standards (CNS) A4 specifications (210X297 mm) A7 B7 Printed by the Central Consumer Standards Bureau of the Ministry of Economic Affairs Consumer Cooperatives (6) Formation. When C a contains more than 0.004% by weight, good ball formation cannot be performed. When the Ge content exceeds 0.1% by weight, electrode breakage easily occurs during connection. Therefore, the content of Be is set to 0.00002 to 0.001% by weight, the content of ca is set to 0.00005 to 0.004% by weight, and the content of Ge is set to 0.0005 to 0.01% by weight. Group 3; La, Y, Pb, Er, Gd, Ce, Pr, Nd, and Sm contain 0.0001 to 0.02 weight S in the component of Group 1: the component of Group 3, namely La, Y, Pb, In the case of at least one of Er, Gd, Ce, Pr, Nd, and Sn, the reliability of the ball neck is the same as that of the composition containing only the first group. At this time, although it contains the third group of components, but does not contain any of the first group of components Pt, Ag, Mg, and Eu, the reliability of the ball neck cannot be improved. D The first group of components and the second group of components The composition of the group contains 0.0QQ1 ~ 0.02 weight 3; the composition of the third group, that is, at least one of La, Y, Pb, Er, Gd, Ce, Pr, Nd, Sm, the ball neck The reliability comparison of the composition containing the components of the first group and the components of the second group has the same or better effect. At this time, although the components of the second group and the third group are contained, but the Pt, Ag, Mg, Eu of the first group is not contained, the reliability of the ball neck cannot be improved. (Please read the notes on the back before filling this page) This paper size is applicable to Chinese National Standard (CNS) Α4 specification (210 × 297 mm) A7 B7 printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 5. Description of the invention (7) The following description table Examples and comparative examples in Table 1 to Table 16. Bottle Example 1 A master alloy containing 99.999% reset gold and each element was melted in a vacuum melting furnace to form a composition as shown in the table and used repeatedly. Cold rolling and heat treatment of grooved rollers and wire drawing machines to make thin wires with a final wire diameter of 30 «m and an elongation of 4¾. This thin wire is used as a connecting wire, and a high-speed automatic connecting machine is used to perform ultra-thin on 1C grain electrodes. Sonic thermocompression connection. After setting the ultrasonic output to 0.5w for ball joining, move the capillary to the opposite direction to the circuit, and set its retrograde angle to be 50 degrees from the vertical, making the ball neck harsh. Bend and change Then, a normal return circuit is formed. First, use a thin wire to perform a ball formation and vibration test, and then connect to a 1C die electrode, and then perform electrode cracking and thermal cycle tests during bonding. Table 2 shows the measurement results. Implementation Examples 2 to 150 / Comparative columns 1 to 22 Tests were performed in the same thin line as in Example 1 except that the composition shown was shown. Table 2, Table 4, Table 6, Table 8, 11, Table 14, Table The results are shown in 16. The measurement method is as follows. The shape of the ball was made using an electric torch installed in a high-speed automatic connection machine, and the size, trueness, and surface shape of the gold ball were observed with a scanning electron microscope. The size is 2.5 times the wire diameter, which is based on 75U m. The true sphericity and surface condition are determined by comparative sampling. If you measure 10 pieces-1 0-one binding-^ (Please read the back Note: Please fill in this page again.) This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm). Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 5. When the results of the invention description (8) are all good, 卽It is indicated as "good", and if there is one defect, it is indicated as "defective J. Electrode rupture during joining. Use a high-speed automatic connection machine to perform a 100 値 connection test. If no electrode rupture occurs, 卽 means" "Good", when only one rupture failure occurred, 卽 was expressed as "bad J. After the circuit was formed, it was closed with a ring gas resin, and subjected to a thermal cycle test of -10 ° × 30 minutes and 15 minutes (TC X 30 minutes) 2 0 Q 0 times. Test the 100 sample, and use the continuity test to confirm that there is no disconnection. The breakage rate is used to indicate the number of tree lines. In addition to the silver test, the lead frame 1 is used instead of the 1C grain electrode for the vibration test. Except for the substrate material, other materials were connected in the same manner as in Example 1 and used as the material for the vibration test. Use the vibration tester 2 shown in Figure 1 with the clamp 4 holding the front end connected to the wire of the lead frame 1 3. Perform a vibration test with the shaft 5 as the center toward the left and right sides according to the following conditions, and measure the occurrence of damage Number of vibrations before breaking. Pitch (LI): 15〇wn Amplitude (L 2) on both sides: 2 6 ju m Vibration frequency: 4 Η Η z (40 times per second) Repeat the same test three times to show the average value. -11- ---------- Loading ------ II ------ I (Please read the notes on the back before filling this page) This paper is suitable for the country Standard (CNS) A4 specification (210 × 297 mm) 5. Description of the invention (9) A7 B7 Printed composition (weight ppm) of the staff consumer cooperative of the Central Standards Bureau of the Ministry of Economic Affairs Example Pt Ag Mg Eu Be Ca Ge Au 1 1 10 20 10 One One One One 2 10 rr 99 — One One ”3 50” 99 * 9 — One — ”4 10 1” ”One — One >» 5 50 ”99 One One One» »6» 1 10 5 One One One ”7” 99 50 — one ”8 9 99 tf” > 9 20 > 9 0.5 one one — »η 10 99” 9f 50 — one one ”11 1 10 20 10 5 one one > 9 12 10” * ♦ »> one—” 13 50 ”99” one one ** 14 10 1 if one— »9 15 > * 50 ft 9t” — — 99 16 10 5 Μ one one 17 > 9 50 »— —” 18 19 ”” ”20” 0.5 9t ”— — > 9 f9 20 tt 50 — one t9 21” »99 10 0.2 — one” 22 ”99 t9 ft 10 — one 23 1 10 20 9 * — 10 one * 9 24 10 99 ” One ”one 25 50» ”» — 9t — tt 26 10 1 ft one ”one 27 99 50” 99 — ”one tt 28” 10 5 ft one ”—” 29 »» 50 ”— —” 30 ft ”20 0.5 — One 99 -12- I J " -Order (please read the precautions on the back before filling this page) This paper size applies the Chinese National Standard (CNS) A4 specification (210X297 mm) 5. Description of the invention (10) A7 B7 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs. Table 2 Measurement results. Examples of electrode cracks when connected in the shape of a ball. Neck ginger thermal cycle test. Break rate U) Rapid reliability vibration test (X 103 times) 1 Good Good 1 12.1 2 η ”” 12.3 3 ”* 9 12.4 4” 99 > 9 12.1 5 > 9 r * 12.3 6 > * ”12.4 7” 12.6 8 > 9 ”” 11.2 9 ”” 12.3 10 »» > 9 12 * 2 11 ”” 0 13.0 or more 12 ft 13 > 9 > f tt 14 ”” 15 ”η > 9” 16 rt > 9 17 ”” > * 18 η ”1 11.2 19 >» 0 13.Q or more 20 > 9 »99 21 99” 99 η 22 ， »» 23 ” ”” It 24 ”” »9” 25 ”» > 9 * 26 tt 99 99 ， 27 > »” 9t ”28 > 9” 99 29 > * ”ft” 30 ”η 1 11.2 -13- ---------- Ί ------ 1T ------- Λ if (Please read the precautions on the back before filling this page) This paper size applies to Chinese National Standard (CNS) A4 Specification (2I0X297mm) Printed by the Consumers' Cooperative of the Central Bureau of Standards, Ministry of Economics, B7. V. Description of Invention (11) Table 3 Composition (weight ppm) Example Pt Ag Mg Eu Be Ca Ge Au 31 10 10 20 1 1 10 — Remainder 32 > $ ”tt 50 one one> * 33” 9 * ”10 one 0.5 one» 9 34 τ > η η — 40 one ”35 1 ，” one one 40 9 > 36 10 9 > ”one One t * 37 50 r > 99 — one 7t 38 10 1 99 > t — one 99 39 ”50 n — one» »40” 10 5 ”— one» > »41 · >" 50 »one one" 42 43 > * »η 20 w 0.5: — * 9” tt 44 ”9t” 50 one — ”99 45” rt * 9 10 — one 5 ”46 f *” ** > 9 one one 100 99 47 1 * > rf 99 5 10 one "48 1 0 99 n > y »> 9 a” 49 50 ”it” ”— >» 50 10 1 ”” > »* 9 a” 51 9 * 50 n tt tt a ”52” 10 5 it ft — ”53” 50 ”” η — ”54 55” ft ff 20 ”0.5 η w” one ”” 56 * 9 M ”50» one »9 57 r *)« η 10 0.2 one ”58 99» ”10 99 one ”59” »» 9 5 0.5 one ft 60 ”99” 40 — ”-14- (Please read the notes on the back before filling out this page) This paper size applies to China National Standard (CNS) A4 (2I0X297 mm) V. Description of the invention (U) A7 B7 Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs Table 4 Measurement results Example Example of electrode breakage when the ball is joined 1 Neck of thermal cycle test (%) Rapid reliability vibration test ( X 103 times) 31 Good Good 0 13.0 or more 32 tf 33 »&”; ”99» 34 99 tf rt 35 »99 99 9 * 36 η” »η 37” > 9 9t it 38 ”” 39 ”99 40” ” 9 * 41 > »” > * 42 '' > * 1 11.2 43 0 13.0 or more 44 η ”” ”45” ”46 ft” 47 ”» ** 48 ”” 49 99 50 η ”> 9 51 >» ”52” 53 »>» 54 1 11.2 55 ”” 0 13.0 or more 56 »» ”” 57 ”” 58 ”” > »59 99 99 60 tf” »-15- ---------- ^ ------ 1T ------. Λ. I. * (Please Please read the cautions on the back of the page before filling in this page.) This paper scale is applicable to Chinese National Standards (CNS) A4 specifications (210X297 mm) A7 B7 V. Description of invention (13) Table 5 Composition (weight PPH) Example Pt Ag Mg Eu Be Ca Ge Au 61 1 10 20 10 5-40 remainder 62 10 ”» 9f -1 > 9 63 50 ”” 99 ff -1> 9 ”64 10 1” 99 »One" 99 65 > 9 50 ”” — ”99 66” 10 5 ”one 99 99 67” 50 ”» — U η 68 69 »9 99» 99 20 ft 0. 5 99 η — 9 * 99 99 99 70 ft * 9 99 50 »» — ”> 9 71 > 9 η 91 10 0.2 one” η 72 ”” > »» 10 one »» 73 ”” ”99 5 — 5 99 74” > » ft η — 1 00 99 75 1 η 99 tf one 10 40 ”76 10” > 9 ”one >» 77 50 * 9 > 9 one ft > 9 78 10 1 »» ”— 99” > 9 79 ”50 99 One η 99, * 80 ”10 5» 9 —— > 9 »>» 81 »” 50 9 > one > * tt »» 82 83 »» ”20” 0.5 ”» · ”W if Μ 84 99 > * ”50 —” »9” 85 91 99 »» 10 a 0.5 a »9 86” 99 a 40 _ ”87” ”a — 5 99 88 > * Μ” ”— — 100 $ 9 89 1 t * > 9 5 10 40 ”90 10” »> 9» -16- Binding Γ ·· ^ (Please read the precautions on the back before filling this page) The paper size is suitable; [Which] 8 4 specifications (210 '乂 297 mm) V. Description of the invention (13) A7 B7 Printed by the Consumer Cooperatives of the Central Standards Bureau, Ministry of Economic Affairs Table 6 Measurement results Example The electrode breaks the connection neck when the ball shape is joined? Thermal cycling test_ Breaking rate (%) Silver reliability vibration test (X 1 〇3 times) 61 Good Good 0 13.Q or more 62 ”99” 63 99 ”ft 99 64 η 99 * 9” 65 ”19 99” 66 i9 99 ”67” 99 ”” 68 tt tt 1 11.2 69 * 9 ft 0 13.0 or more 70 yt t9 (t 71 ”9T% 9 99 72 ft tt tf” 73 99 99 99 tt 74 99 99 f9 75 ” »» 9 76 > 9 > »” * 9 77 ”” 9t 99 78 99 ”» > »79 > 9” 80 ”” »81 t?» ”82 99 9f 1 11.2 83 t *” ”13.0 Above 84 99 tt > »85 ft ff» > * 86 t * ”99 87” ff η > * 88 ”99 it 89 9f 99 f *” 90 »tt” tt -17- I- III II III. !! I;.! Order I .. II: -1 II (Please read the notes on the back before filling out this page) This paper is suitable for National Standards (CNS) A4 specifications (210X297 mm) 5. Description of the invention (Μ) A7 B7 Table 7 Composition (weight ppm) Example Pt Ag Mg Eli Be Ca Ge Au 91 50 10 20 10 5 10 40 The rest 92 10 1 ”” ”93 99 50 99 tf” 99 94 10 5 ft ”95 η 50 ft” »tt 96 97 ， 9» 20 r > 0.5 ”μ” ”9 *” ”98 99 r * if 50 ken” 9 »tf” 99 99 tt 10 0.2 99 * f 100 ”” * 9 10 ”9t 101” 9 * 9t 99 5 0.5 η 102 ”ff ft» 40 tt 99 103 99 > 9 99 99 ”5 99 104 > 9 9t **” »>” 100 »(Please read the back first Please note this page, please fill in this page)-·· -'β Printed by the Employees ’Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs. ) Vibration test (X 103 times) 91 Good Good 0 13.0 or more 92 99 9 * η > * 93 > 9 99 ”” 94 99 ， »” 95 ”T9 19 99 96 9 * ft 1 11.2 97” f9 0 13.Q and above 98 ”>» ”> 9 99 99 y >” »9 100 * 9 rt 99 * 9 101” V »” ”102” r * ”99 103 >» ”104 * 9 tt it > »-18- This paper size applies to Chinese National Standard (CNS) A4 (210X297 mm) V. Description of Invention (is) Table 9 A7 B7 Central Ministry of Economic Affairs Proposal for the consumption cooperation of employees of the quasi-bureau (duplicated ppa) Example Pt Ag Mg Eu Be Ca Ge La 105 1 10 20 10 — —— One 20 106 10 ”r * 9 * — — —” 107 50 ”» * 9 — — — ”108 10 1 t9 9 * — one — 99 109 tt 50 99, — — —» 110 tt 10 5 one one — it 111 ”” 50 — — — η 112 113 ”” H »20 99 0.5 — One one ** 114 ”Μ ft 50 one — one, 115” > y ”10 one one — 1 116” 99 t9 tr — — one 200 117 ”η 99 99 — — — one 118 tt tf it” one — — — 119 > 9 »> 9»!-One — — 120 99 tt 99 * 9 — — — — 121 9f ”” ”— — — 122 ft f9” — — — 123 »” ”” — — One 124 > 9 ”” M — One one one 125 it 99 One — one 20 126 ”” tf ”— — One 127 128 99 ft” tt »r” it 0.2 _____ one ”if 129” Jt ”10 — A 79 130 ”5 *” — 0.5 — ”131 >» ”99 > 9 — 20 —” 132 »rt” ” 40 — 133 ”t * 99” — — 5 ”134 > 9 ft” ”—— — 100 tf -19- " ―Binding ~ ♦ ί (Please read the precautions on the back before filling out this page) Paper size applies Chinese National Standard (CNS) A4 specification (210X297 mm) B7 V. Description of invention (16) Table 10 Composition (weight PP) Example Υ Pb Er Gd Ce Pr Nd Sm Au
ο ο ο ο ο IX 1!*TX ,丄 IX 11111 11111 請 先 閣 讀 背 Φ 之 注 意 事 項 再 填 寫 本 頁 ΤΑ 1A 1* 1x 1X 11111 2 2 2 2 2 11111ο ο ο ο ο IX 1! * TX, 丄 IX 11111 11111 Please read the notes of Φ first and then fill out this page. ΤΑ 1A 1 * 1x 1X 11111 2 2 2 2 2 11111
2 2 2 2 2 It IX 1x 1x IX ο 2 經濟部中央標準局員工消費合作社印製 3 3 3 3 3 11111 本紙張尺度適用衾國國商標準（CNS ) A4規格（210 X 297公釐） 五、發明説明（η ) A7 B7 經濟部中央標準局員工消費合作社印製 表 11 測定 結 果 實施例 球形狀 接合時之 電極破裂 連接頸1 熱循環試驗 破斷率U) 迅可靠性 振動試驗 (X 103次數） 105 良好 良好 1 12.3 106 ” 9* 12 . 1 107 ” >* » 12.4 108 tt ft 12.0 109 ” ” ” 12.2 110 ft »9 ” 12.3 111 99 ft >» 12.6 112 » » 11.2 113 »* 99 ” 12.3 114 ” 99 η 12 . 2 115 ” >9 12.1 116 »» »9 12.5 117 ” 12.0 118 ” ” 12.6 119 12.0 120 ” 99 12.3 121 ” ” 12.0 122 Jt *9 ” 12.4 123 ” ” ” 12.5 124 99 ” »» 12.3 125 99 ” 12.1 126 ” if ” 12.0 127 0 13.0以上 128 η 9t 99 ” 129 »9 ” ” tf 130 »9 tt >9 ” 131 ” »9 ft 132 ” 99 ” » 133 ” t* >9 99 134 ” ” » ” -21- I I""訂 〉Λί ί (請先閱讀背面之注意事項再填寫本頁) 本紙張尺度適用中國國家標準（CNS ) Α4規格（210 X 297公釐） B7 五、發明説明（U )表12 實施例 組 成 (重量ppm) Pt Ag Mg Hu Be Ca Ge La 135 10 10 20 10 5 20 — 20 13S ” 9t η ft — 40 137 9* » >9 >9 — 20 9f ” 138 >9 ” 5 » ” ” 139 ” ” it ” >» 9t — 1 140 ” η ” >» ” »» 一 200 141 99 ” 99 一 一 142 t9 ” ” t9 一 — 143 >» » ” ，， >9 — 一 144 ” r> » — 一 145 >9 ” 99 99 ，， >9 — — 146 ” 99 ” t* ” — 一 147 ” 9* ” ” ” 9* — — 148 »9 ” *， » 9J — — 149 ” ft 99 ” — 20 150 ” »» ，， >9 ” — ” 表13 組 成 （重量ppm)實施例 Y Pb Er Gd Ce Pr Nd Sn Au (請先閲讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 3 3 3 3 3 ΙΑ ΙΑ lx 1X Ι ο 1 2 3 4 4 4 4 4 42 2 2 2 2 It IX 1x 1x IX ο 2 Printed by the Consumer Cooperatives of the Central Bureau of Standards of the Ministry of Economic Affairs 3 3 3 3 3 11111 This paper size applies the Lao National Business Standard (CNS) A4 specification (210 X 297 mm) 5 Description of the invention (η) A7 B7 Printed by the Consumers' Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs Table 11 Measurement results Example Electrode rupture at the time of ball shape connection Neck 1 Thermal cycle test break rate U) Rapid reliability vibration test (X 103 Times) 105 Good Good 1 12.3 106 ”9 * 12. 1 107” > * »12.4 108 tt ft 12.0 109” ”” 12.2 110 ft »9” 12.3 111 99 ft > »12.6 112» »11.2 113» * 99 ”12.3 114” 99 η 12. 2 115 ”> 9 12.1 116» »» 9 12.5 117 ”12.0 118” ”12.6 119 12.0 120” 99 12.3 121 ”” 12.0 122 Jt * 9 ”12.4 123” ”” 12.5 124 99 ”» »12.3 125 99” 12.1 126 ”if” 12.0 127 0 13.0 or more 128 η 9t 99 ”129» 9 ”” tf 130 »9 tt > 9” 131 ”» 9 ft 132 ”99” »133” t * > 9 99 134 ”» ”-21- I I " " Order> Λί ί (Please read the notes on the back before filling out this page) This paper size applies to Chinese National Standards (CNS) Α4 specifications (210 X 297 mm) B7 V. Description of the invention (U) Table 12 Example composition (ppm by weight) Pt Ag Mg Hu Be Ca Ge La 135 10 10 20 10 5 20 — 20 13S ”9t η ft — 40 137 9 *» > 9 > 9-20 9f ”138 > 9” 5 »” 139 ”” it ”>» 9t — 1 140 ”η” > »” »» -200 141 99 ”99 one-142 t9” ”t9 one- 143 > »» ”, ≫ 9 — a 144” r > »— a 145 > 9” 99 99 ”, > 9 — — 146” 99 ”t *” — a 147 ”9 *” ”” 9 * — — 148 »9” *, »9J — — 149” ft 99 ”— 20 150” »» ,, > 9 ”—” Table 13 Composition (ppm by weight) Example Y Pb Er Gd Ce Pr Nd Sn Au (Please (Please read the notes on the back before filling out this page) Printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs 3 3 3 3 3 ΙΑ ΙΑ lx 1X Ι ο 1 2 3 4 4 4 4 4 4
4 4 4 4 4 •X IX 1χ IX ο 2 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 五、發明説明（19 ) A7 B7 表 14 實施例 測定 結果 球形狀 接合時之 電極破裂 連接頸部可靠性 熱循環試驗 破斷率（¾) 振動試驗 (X 103次數） 135 良好 良好 0 13.0以上 136 Y> tt 99 137 99 ” ” η 138 1* ” ” tt 139 Pt >9 99 ” 140 >9 ff >9 141 ” ” 142 ” ft ，， tt 143 t9 *9 ” ” 144 ” ” »9 145 99 ” 146 ” η ” 147 ” » >7 148 Μ 149 » ” 150 99 99 ” -23- I------1T------旅< ~ , (請先閎讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） 五、發明説明（2〇 ) 表154 4 4 4 4 • X IX 1χ IX ο 2 This paper size is applicable to Chinese National Standard (CNS) A4 (210X297 mm) V. Description of the invention (19) A7 B7 Table 14 Example Measurement Results Rupture connection neck reliability Thermal cycling test Break rate (¾) Vibration test (X 103 times) 135 Good Good 0 13.0 or more 136 Y > tt 99 137 99 ”” η 138 1 * ”tt 139 Pt > 9 99 ”140 > 9 ff > 9 141” 142 ”ft ， tt 143 t9 * 9” 144 ”” »9 145 99” 146 ”η” 147 ”» > 7 148 Μ 149 »” 150 99 99 ”-23- I ------ 1T ------ Travel < ~, (Please read the precautions on the back before filling out this page) The paper size printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs Applicable Chinese National Standard (CNS) A4 specification (210X297 mm) V. Description of invention (20) Table 15
比較例 組 成（重量ΡΡΠ) Pt Ag Mg Eu Be Ca 6e Ce Y Au 1 —— 际 2 — 10 20 10 — 一 一 — 一 η 3 一 ，* ** 5 一 一 一 —— η 4 — »1 ” » ” 一 一 20 — ” 5 10 一 9* — 一 — 一 — 6 »9 10 _ Μ 一 一 一 _ _ 9* 7 ” 99 一 5 — — — — »9 8 ** ” — ” 一 10 一 — 一 9 ft 一 ft 一 一 40 — 一 >» 10 η — >» 5 — — 20 — ” 11 ” 一 ” 10 一 ” 一 ” 12 ” 9* 20 一 一 — — 一 一 ft 13 >» ” 99 一 5 — .一 一 一 99 14 >9 99 — — 10 一 — 一 tf 15 *> ” 一 一 一 40 一 — it 16 η » 一 5 _ _ 20 _ ，， 17 « ” » — η 10 一 99 — 18 » ” — ” 一 — 少》 20 >» 19 100 »» ” 10 99 一 — >9 — tf 20 10 100 ” ” ，， — 一 ” — 21 ** 10 100 ” 一 _ ” 一 ” 22 ” »9 20 100 >9 一 ” 一 —：--------^------1T------^ i '(請先閲讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 -24- 本紙張尺度適用中國國家標準（CNS ) A4规格（210X297公釐） A7 B7 五、發明説明（21 ) 表16 測 定 結 果 比較例 球形狀 接合時之 連接頸部可靠性 電極破裂 熱循環試驗 振動試驗 破斷率（％) (X 1〇3次數） 1 良好 良好 15 6.4 2 ” η 9 8.8 3 ” 7 9.3 4 *9 ，， 7 9 . 6 5 ” ” 8 9*0 6 ” 6 10.6 7 ff 5 10.5 8 » >9 5 10.5 9 9* ” 5 10.4 10 99 5 10.3 11 >* 5 10.0 12 >9 *1 7 9.8 13 t9 6 10 . 2 14 tf 6 10 . 5 15 »9 V» 6 10.3 16 » η 6 10 . 6 17 ” 6 10 . 1 18 99 6 10.4 19 不良 ” 2 11.5 20 ” ” 2 11.5 21 )9 不良 2 11.6 22 良好 η 2 11.3 (請先閲讀背面之注意事項再填寫本頁) 經濟部中央標準局舅工消費合作社印製 -25- 本紙張尺度適用中國國家標準（CNS ) A4規格（210X297公釐） Α7 Β7 五、發明説明（22 ) 由以上測定結果可知，含有由一定量之P t , A g , M g , Eu所構成之第1群之成份之菁施例1〜1〇之球形狀良好 ，連接時不會發生電極破裂等不良，而且熱循環試驗後之 破斷率為U,振動試驗時，發生破斷以前之振動次數為 11,000次以上，在提高球頸部之可靠性上産生優異之效 果。 其中，EU含有童為0.0001重量3；以上之實施例中， 振動試驗時，發生破斷以前之振動次數為12,000次以上 ，故由於球頸部之可靠性提高而産生優異效果。 除了第1群之成份以外，又含有由一定量之Be, Ca, Ce中至少1種所構成之第2群成份之實施例11〜104之球 形狀良好，連接時不會發生電極破裂等不良，而且熱循環 試驗後之破斷率為12以下，在振動試驗時，發生破斷以 前之振動次數為11，GQ0次以上，其效果非常佳。 其中，Eu含有量為0.0001重量S：以上之實施例之熱 循環試驗後之破斷率為0¾，振動試驗時，發生破斷以前之 振動次數為13,000次以上，可更提高球頚部之可靠性。 除了第1群之成份以外，又含有由一定量之La, 經濟部中央標準局員工消費合作社印製 (請先閲讀背面之注意事項再填寫本頁)Comparative Example Composition (weight PP) Pt Ag Mg Eu Be Ca 6e Ce Y Au 1 —— Inter 2 — 10 20 10 — One One — One η 3 One, * ** 5 One One One — η 4 — »1” »” One One 20 — ”5 10 One 9 * — One — One — 6» 9 10 _ Μ One One One _ _ 9 * 7 ”99 One 5 — — — —» 9 8 ** ”—” One 10 One — One 9 ft one ft one one 40 — one > »10 η — >» 5 — — 20 — “11” one ”10 one” one ”12” 9 * 20 one one — — one ft 13 > »” 99 one 5 —. One one one 99 14 > 9 99 — — 10 one — one tf 15 * > ”one one one 40 one — it 16 η» one 5 _ _ 20 _, 17 «” » — Η 10 One 99 — 18 »” — ”One — Less》 20 >» 19 100 »» ”10 99 One — > 9 — tf 20 10 100” ”,, — One” — 21 ** 10 100 ” One_ ”one” 22 ”» 9 20 100 > 9 one ”one—: -------- ^ ------ 1T ------ ^ i '(Please read the back one first (Please fill in this page again) Printed by the Employees' Cooperative of the Central Bureau of Standards of the Ministry of Economic Affairs-24- This paper size applies to the Chinese National Standard (CNS) A4 (210X297 mm) A7 B7 V. Description of the invention (21) Table 16 Comparison of measurement results Connection neck reliability electrode rupture thermal cycle test Vibration test break rate (%) (X 103 times) 1 Good Good 15 6.4 2 ”η 9 8.8 3” 7 9.3 4 * 9, 7 9. 6 5 ” ”8 9 * 0 6” 6 10.6 7 ff 5 10.5 8 »> 9 5 10.5 9 9 *” 5 10.4 10 99 5 10.3 11 > * 5 10.0 12 > 9 * 1 7 9.8 13 t9 6 10. 2 14 tf 6 10. 5 15 »9 V» 6 10.3 16 »η 6 10. 6 17” 6 10. 1 18 99 6 10.4 19 Poor ”2 11.5 20” ”2 11.5 21) 9 Poor 2 11.6 22 Good η 2 11.3 (Please read the precautions on the back before filling this page) Printed by the Central Standards Bureau of the Ministry of Economic Affairs, Masonry Consumer Cooperatives -25- This paper size applies to the Chinese National Standard (CNS) A4 (210X297 mm) Α7 Β7 V. Invention Explanation (22) From the above measurement results, it is known that The cyanine of the first group consisting of P t, A g, M g, and Eu. The spheres of Examples 1 to 10 are good in shape, no defects such as electrode cracking will occur during connection, and they will break after thermal cycle test. The rate is U. In the vibration test, the number of vibrations before breakage is 11,000 or more, which has an excellent effect on improving the reliability of the ball neck. Among them, EU contains 0.0001 weight 3 for children. In the above examples, the number of vibrations before breaking occurred during the vibration test was 12,000 or more. Therefore, the reliability of the ball neck was improved to produce an excellent effect. In addition to the components of the first group, Examples 11 to 104 containing the second group of components composed of at least one of Be, Ca, and Ce in a certain amount of spherical shape are good, and no defects such as electrode cracking will occur during connection. Moreover, the breaking rate after the thermal cycle test is 12 or less. In the vibration test, the number of vibrations before the break occurs is 11 and the GQ is 0 or more. The effect is very good. Among them, the Eu content is 0.0001 weight S: The breaking rate after the thermal cycle test of the above examples is 0¾. In the vibration test, the number of vibrations before the breakage is 13,000 or more, which can further improve the reliability of the ball crotch . In addition to the first group of ingredients, it also contains a certain amount of La, printed by the Consumer Cooperatives of the Central Standards Bureau of the Ministry of Economic Affairs (please read the precautions on the back before filling this page)
Pb, Er, Gd, Ce, Pr, Nd, Sm中至少一種所構成之第3 群之成份之實施例105〜126,與只含有第1群之實施例1 〜10比較産生相等效果。 除了第1群之成份及第2群之成份以外，又含有由一 定量 La, Y, Pb, Er, Gd, Ce, Pr, Nd, Sm 中至少一種所 構成之第3群之成份之冒施例127〜150,與同時含第1群 -2 6 - 本紙張X度適用中國國家標準（CNS ) A4規格（210X297公釐） 經濟部中央榡準局員工消f合作衽印製 bG α7 __ Β7_ 五、發明説明（23 ) 成份及第2群成份之實施例11〜104 tb較，可産生同等或 更佳之效果。 本發明中，不含第1群，第2群，第3群之成份之任 一種之比較例之熱循環試驗後之破斷率為152 ,振動試驗 時，發生破裂以前之次數為6,400次。 不含第1群中之任一種成份之比較例2〜18之熱循璟 試驗後之破斷率為5〜9¾，振動試驗時，發生破裂以前之 次數為8,000次以上，10,000次以下，較比較例1為佳 ，但較本發明差。 雖然含有第1群之全部成份，但其中之任一種之含有 量在本發明之範圍以外之比較例19〜22之熱循環試驗後 之破斷率為2¾，振動試驗時，發生破裂以前之次數為11,〇〇〇 以上，與本發明接近，但其球形狀，晶粒電極破裂較本發 明差。 如上所述，本發明之1C晶粒連接線用金線之組成為在 一定量之99.999重量3：以上之高純度金中含有Pt, Ag，Examples 105 to 126 of the third group consisting of at least one of Pb, Er, Gd, Ce, Pr, Nd, and Sm produced equivalent effects compared to Examples 1 to 10 containing only the first group. In addition to the components of Group 1 and Group 2, it also contains the composition of Group 3 consisting of at least one of La, Y, Pb, Er, Gd, Ce, Pr, Nd, and Sm. For example, 127 ~ 150, together with group 1-2 6-This paper is X-degree compatible with Chinese National Standard (CNS) A4 (210X297 mm). It is printed in cooperation with employees of the Central Bureau of Standards of the Ministry of Economic Affairs and printed bG α7 __ Β7_ V. Description of the invention (23) Compared with Examples 11 ~ 104 tb of the component and the second group component, it can produce the same or better effect. In the present invention, the comparative example excluding any of the components of the first group, the second group, and the third group has a breakage rate of 152 after the thermal cycle test, and 6,400 times before the breakage occurred in the vibration test. In Comparative Examples 2 to 18, which did not contain any of the components in the first group, the breakage rate after thermal cycling test was 5 to 9¾. In the vibration test, the number of times before rupture occurred was 8,000 times or more and 10,000 times or less. Comparative Example 1 is better, but worse than the present invention. Although all the components of the first group are contained, the breaking rate after the thermal cycle test of Comparative Examples 19 to 22 outside the scope of the present invention is 2¾, and the number of times before rupture occurred during the vibration test It is 11,000 or more, which is close to the present invention, but its spherical shape and fracture of the crystal electrode are worse than the present invention. As mentioned above, the composition of the gold wire for the 1C grain connection wire of the present invention is such that Pt, Ag are contained in a certain amount of high-purity gold of 99.999:
Mg,及Eu,故在增大超音波輸出而進行超音波併用熱壓連 接，而且施加逆行變形而形成之迴路頸部之疲勞特性佳， 而且可提高暴露於熱循環環境中時之破斷性能。 因此，在使用許多引出線而進行較短配線之半導體裝 置之組立時，其可簏性高，對於促進半導體之高速化，高 功能化，小型化，薄型化極有效。 若將組成設定為在99.999重量2以上之高純度金中 含有一定量之Pt, Ag, Mg及Eu,又含有一定量之Be，Ca， -27- 本紙張尺度適用中國國家標準（CNS } A4说格（210X297公釐） I^tT------—.^ 一 . ^ (請先聞讀背面之注意事項再填寫本頁) 經濟部中央標準局員工消費合作社印製 A7 B7 五、發明説明（24)Mg, and Eu, so that the ultrasonic output is increased and the ultrasonic wave is connected by heat pressure, and the fatigue characteristics of the circuit neck formed by applying retrograde deformation are good, and it can improve the breaking performance when exposed to the thermal cycling environment. . Therefore, when assembling a semiconductor device with a short wiring using many lead wires, it has high reliability, which is extremely effective for promoting high-speed, high-functionality, miniaturization, and thinning of a semiconductor. If the composition is set to contain a certain amount of Pt, Ag, Mg and Eu in high-purity gold with a weight of 99.999 or more, and a certain amount of Be, Ca, -27- This paper size applies the Chinese national standard (CNS} A4 Grid (210X297mm) I ^ tT ------------. I. ^ (Please read the notes on the back before filling out this page) Printed by the Consumers Cooperative of the Central Standards Bureau of the Ministry of Economic Affairs A7 B7 5. Invention Description (24)
Ge中之至少1種時，在增大超音波輸出而進行超音波併甩 熱壓連接，而且實施逆行變形而形成之®路之頸部中，可' 提高被勞特性，及暴露於熱循環境中時之破斷性能’可更 提高上述效果。 圖式之簡單說明 第1圖為振動試驗之槪要圖。 -28- 本紙張尺度適用中國國家橾準（匸阳）八4^格（2丨0父297公釐） I -- ---------------U-------Λ (請先閲讀背面之注意事項再填寫本頁)In the case of at least one of Ge, in the neck of the ® road formed by increasing the ultrasonic output and performing ultrasonic and thermocompression connection, and performing retrograde deformation, it can improve the labor characteristics and exposure to thermal cycling. The breaking performance in the environment can further improve the above effects. Brief Description of the Drawings Figure 1 is a summary of the vibration test. -28- This paper size applies to China National Standard (Liyang) 8 4 ^ grid (2 丨 0 father 297 mm) I---------------- U --- ---- Λ (Please read the notes on the back before filling in this page)
Claims (1)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP11852195 | 1995-05-17 |
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| Publication Number | Publication Date |
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| TW382796B true TW382796B (en) | 2000-02-21 |
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| Application Number | Title | Priority Date | Filing Date |
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| TW084109033A TW382796B (en) | 1995-05-17 | 1995-08-30 | Gold wire for bonding |
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| KR (1) | KR100232115B1 (en) |
| TW (1) | TW382796B (en) |
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| KR101637626B1 (en) | 2012-03-21 | 2016-07-08 | 방봉진 | Sound reflection board using corrugated cardboard |
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1995
- 1995-08-30 TW TW084109033A patent/TW382796B/en active
- 1995-09-14 KR KR1019950030054A patent/KR100232115B1/en not_active IP Right Cessation
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| KR960043059A (en) | 1996-12-21 |
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