TW374243B - Method for manufacturing a liquid phase titanium dioxide film - Google Patents

Method for manufacturing a liquid phase titanium dioxide film

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Publication number
TW374243B
TW374243B TW087107784A TW87107784A TW374243B TW 374243 B TW374243 B TW 374243B TW 087107784 A TW087107784 A TW 087107784A TW 87107784 A TW87107784 A TW 87107784A TW 374243 B TW374243 B TW 374243B
Authority
TW
Taiwan
Prior art keywords
titanium dioxide
liquid phase
dioxide film
manufacturing
phase titanium
Prior art date
Application number
TW087107784A
Other languages
Chinese (zh)
Inventor
Ming-Kwei Lee
Bo-Xun Lei
Original Assignee
Winbond Electronics Corp
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Winbond Electronics Corp filed Critical Winbond Electronics Corp
Priority to TW087107784A priority Critical patent/TW374243B/en
Application granted granted Critical
Publication of TW374243B publication Critical patent/TW374243B/en

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Abstract

The present invention provides a deposition method that can be performed at low temperature for manufacturing a liquid phase titanium dioxide film to avoid problems derived from high temperature. The method includes using liquid phase hexafluorotitanic acid and boric acid solution reaction to grow titanium dioxide, wherein the concentration of boric acid can control the growth rate and refractivity of the titanium dioxide and the reaction is endothermic so that the growth rate can be increased by heating. The dielectric constant of the liquid phase titanium dioxide film of the present invention can be up to about 4.69 and the refractivity can be up to about 1.84. When it is used in a simple structured capacitor process, the method can provide pretty large amount of charges and the process can be compatible with a current IC process.
TW087107784A 1998-05-20 1998-05-20 Method for manufacturing a liquid phase titanium dioxide film TW374243B (en)

Priority Applications (1)

Application Number Priority Date Filing Date Title
TW087107784A TW374243B (en) 1998-05-20 1998-05-20 Method for manufacturing a liquid phase titanium dioxide film

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
TW087107784A TW374243B (en) 1998-05-20 1998-05-20 Method for manufacturing a liquid phase titanium dioxide film

Publications (1)

Publication Number Publication Date
TW374243B true TW374243B (en) 1999-11-11

Family

ID=57941827

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087107784A TW374243B (en) 1998-05-20 1998-05-20 Method for manufacturing a liquid phase titanium dioxide film

Country Status (1)

Country Link
TW (1) TW374243B (en)

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100423840C (en) * 2006-01-28 2008-10-08 逢甲大学 Preparation method of anatase rutile titania photocatalyst

Cited By (1)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
CN100423840C (en) * 2006-01-28 2008-10-08 逢甲大学 Preparation method of anatase rutile titania photocatalyst

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Legal Events

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MM4A Annulment or lapse of patent due to non-payment of fees