TW374201B - Heat treatment method for a silicon wafer and a silicon wafer heat-treated by the method - Google Patents
Heat treatment method for a silicon wafer and a silicon wafer heat-treated by the methodInfo
- Publication number
- TW374201B TW374201B TW087104469A TW87104469A TW374201B TW 374201 B TW374201 B TW 374201B TW 087104469 A TW087104469 A TW 087104469A TW 87104469 A TW87104469 A TW 87104469A TW 374201 B TW374201 B TW 374201B
- Authority
- TW
- Taiwan
- Prior art keywords
- silicon wafer
- heat
- heat treatment
- treatment method
- treated
- Prior art date
Links
- XUIMIQQOPSSXEZ-UHFFFAOYSA-N Silicon Chemical compound [Si] XUIMIQQOPSSXEZ-UHFFFAOYSA-N 0.000 title abstract 7
- 229910052710 silicon Inorganic materials 0.000 title abstract 7
- 239000010703 silicon Substances 0.000 title abstract 7
- 238000010438 heat treatment Methods 0.000 title abstract 4
- 238000000034 method Methods 0.000 title abstract 4
- 238000001816 cooling Methods 0.000 abstract 1
- 238000002844 melting Methods 0.000 abstract 1
- 230000008018 melting Effects 0.000 abstract 1
- 230000003647 oxidation Effects 0.000 abstract 1
- 238000007254 oxidation reaction Methods 0.000 abstract 1
Classifications
-
- H—ELECTRICITY
- H01—ELECTRIC ELEMENTS
- H01L—SEMICONDUCTOR DEVICES NOT COVERED BY CLASS H10
- H01L21/00—Processes or apparatus adapted for the manufacture or treatment of semiconductor or solid state devices or of parts thereof
- H01L21/02—Manufacture or treatment of semiconductor devices or of parts thereof
- H01L21/04—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer
- H01L21/18—Manufacture or treatment of semiconductor devices or of parts thereof the devices having potential barriers, e.g. a PN junction, depletion layer or carrier concentration layer the devices having semiconductor bodies comprising elements of Group IV of the Periodic Table or AIIIBV compounds with or without impurities, e.g. doping materials
- H01L21/30—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26
- H01L21/322—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections
- H01L21/3221—Treatment of semiconductor bodies using processes or apparatus not provided for in groups H01L21/20 - H01L21/26 to modify their internal properties, e.g. to produce internal imperfections of silicon bodies, e.g. for gettering
- H01L21/3225—Thermally inducing defects using oxygen present in the silicon body for intrinsic gettering
-
- Y—GENERAL TAGGING OF NEW TECHNOLOGICAL DEVELOPMENTS; GENERAL TAGGING OF CROSS-SECTIONAL TECHNOLOGIES SPANNING OVER SEVERAL SECTIONS OF THE IPC; TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10—TECHNICAL SUBJECTS COVERED BY FORMER USPC
- Y10S—TECHNICAL SUBJECTS COVERED BY FORMER USPC CROSS-REFERENCE ART COLLECTIONS [XRACs] AND DIGESTS
- Y10S438/00—Semiconductor device manufacturing: process
- Y10S438/905—Cleaning of reaction chamber
Landscapes
- Engineering & Computer Science (AREA)
- Physics & Mathematics (AREA)
- Condensed Matter Physics & Semiconductors (AREA)
- General Physics & Mathematics (AREA)
- Manufacturing & Machinery (AREA)
- Computer Hardware Design (AREA)
- Microelectronics & Electronic Packaging (AREA)
- Power Engineering (AREA)
- Crystals, And After-Treatments Of Crystals (AREA)
Applications Claiming Priority (1)
| Application Number | Priority Date | Filing Date | Title |
|---|---|---|---|
| JP9295297 | 1997-03-27 |
Publications (1)
| Publication Number | Publication Date |
|---|---|
| TW374201B true TW374201B (en) | 1999-11-11 |
Family
ID=14068806
Family Applications (1)
| Application Number | Title | Priority Date | Filing Date |
|---|---|---|---|
| TW087104469A TW374201B (en) | 1997-03-27 | 1998-03-25 | Heat treatment method for a silicon wafer and a silicon wafer heat-treated by the method |
Country Status (3)
| Country | Link |
|---|---|
| US (1) | US6403502B1 (zh) |
| EP (1) | EP0867928A3 (zh) |
| TW (1) | TW374201B (zh) |
Families Citing this family (8)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| JP3407629B2 (ja) | 1997-12-17 | 2003-05-19 | 信越半導体株式会社 | シリコン単結晶ウエーハの熱処理方法ならびにシリコン単結晶ウエーハ |
| JPH11307472A (ja) | 1998-04-23 | 1999-11-05 | Shin Etsu Handotai Co Ltd | 水素イオン剥離法によってｓｏｉウエーハを製造する方法およびこの方法で製造されたｓｏｉウエーハ |
| EP1125008B1 (en) * | 1998-10-14 | 2003-06-18 | MEMC Electronic Materials, Inc. | Thermally annealed, low defect density single crystal silicon |
| JP3719021B2 (ja) * | 1998-12-04 | 2005-11-24 | 信越半導体株式会社 | シリコンウエーハの製造方法およびシリコンウエーハ |
| WO2001028000A1 (fr) * | 1999-10-14 | 2001-04-19 | Shin-Etsu Handotai Co., Ltd. | Procede de fabrication d'une tranche de soi, et tranche de soi |
| KR20010066153A (ko) * | 1999-12-31 | 2001-07-11 | 황인길 | 급속 열처리 방법 |
| KR100874724B1 (ko) * | 2001-07-17 | 2008-12-19 | 신에쯔 한도타이 가부시키가이샤 | 접합 웨이퍼의 제조방법 |
| US7112509B2 (en) * | 2003-05-09 | 2006-09-26 | Ibis Technology Corporation | Method of producing a high resistivity SIMOX silicon substrate |
Family Cites Families (4)
| Publication number | Priority date | Publication date | Assignee | Title |
|---|---|---|---|---|
| US5360769A (en) | 1992-12-17 | 1994-11-01 | Micron Semiconductor, Inc. | Method for fabricating hybrid oxides for thinner gate devices |
| US5506178A (en) * | 1992-12-25 | 1996-04-09 | Sony Corporation | Process for forming gate silicon oxide film for MOS transistors |
| JP3410828B2 (ja) * | 1993-10-15 | 2003-05-26 | コマツ電子金属株式会社 | シリコンウェーハの製造方法 |
| JP3346249B2 (ja) | 1997-10-30 | 2002-11-18 | 信越半導体株式会社 | シリコンウエーハの熱処理方法及びシリコンウエーハ |
-
1998
- 1998-03-24 US US09/046,996 patent/US6403502B1/en not_active Expired - Lifetime
- 1998-03-25 TW TW087104469A patent/TW374201B/zh not_active IP Right Cessation
- 1998-03-25 EP EP98302245A patent/EP0867928A3/en not_active Ceased
Also Published As
| Publication number | Publication date |
|---|---|
| EP0867928A2 (en) | 1998-09-30 |
| EP0867928A3 (en) | 1999-11-03 |
| US6403502B1 (en) | 2002-06-11 |
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Legal Events
| Date | Code | Title | Description |
|---|---|---|---|
| MM4A | Annulment or lapse of patent due to non-payment of fees |