TW367408B - Method for calibration of a spectroscopic sensor - Google Patents

Method for calibration of a spectroscopic sensor

Info

Publication number
TW367408B
TW367408B TW087111059A TW87111059A TW367408B TW 367408 B TW367408 B TW 367408B TW 087111059 A TW087111059 A TW 087111059A TW 87111059 A TW87111059 A TW 87111059A TW 367408 B TW367408 B TW 367408B
Authority
TW
Taiwan
Prior art keywords
light
calibration
cell
gas stream
optical chamber
Prior art date
Application number
TW087111059A
Other languages
English (en)
Inventor
James J F Mcandrew
Ronald S Inman
Original Assignee
Air Liquide
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Air Liquide filed Critical Air Liquide
Application granted granted Critical
Publication of TW367408B publication Critical patent/TW367408B/zh

Links

Classifications

    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01N—INVESTIGATING OR ANALYSING MATERIALS BY DETERMINING THEIR CHEMICAL OR PHYSICAL PROPERTIES
    • G01N21/00—Investigating or analysing materials by the use of optical means, i.e. using sub-millimetre waves, infrared, visible or ultraviolet light
    • G01N21/17—Systems in which incident light is modified in accordance with the properties of the material investigated
    • G01N21/25—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands
    • G01N21/27—Colour; Spectral properties, i.e. comparison of effect of material on the light at two or more different wavelengths or wavelength bands using photo-electric detection ; circuits for computing concentration
    • G01N21/274—Calibration, base line adjustment, drift correction
    • G01N21/276—Calibration, base line adjustment, drift correction with alternation of sample and standard in optical path
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J3/42—Absorption spectrometry; Double beam spectrometry; Flicker spectrometry; Reflection spectrometry
    • G—PHYSICS
    • G01—MEASURING; TESTING
    • G01J—MEASUREMENT OF INTENSITY, VELOCITY, SPECTRAL CONTENT, POLARISATION, PHASE OR PULSE CHARACTERISTICS OF INFRARED, VISIBLE OR ULTRAVIOLET LIGHT; COLORIMETRY; RADIATION PYROMETRY
    • G01J3/00—Spectrometry; Spectrophotometry; Monochromators; Measuring colours
    • G01J3/28—Investigating the spectrum
    • G01J2003/2866—Markers; Calibrating of scan

Landscapes

  • Physics & Mathematics (AREA)
  • Spectroscopy & Molecular Physics (AREA)
  • General Physics & Mathematics (AREA)
  • Engineering & Computer Science (AREA)
  • Mathematical Physics (AREA)
  • Theoretical Computer Science (AREA)
  • Health & Medical Sciences (AREA)
  • Life Sciences & Earth Sciences (AREA)
  • Chemical & Material Sciences (AREA)
  • Analytical Chemistry (AREA)
  • Biochemistry (AREA)
  • General Health & Medical Sciences (AREA)
  • Immunology (AREA)
  • Pathology (AREA)
  • Investigating Or Analysing Materials By Optical Means (AREA)
  • Spectrometry And Color Measurement (AREA)
  • Optical Measuring Cells (AREA)
TW087111059A 1997-07-10 1998-07-08 Method for calibration of a spectroscopic sensor TW367408B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US08/890,926 US5835230A (en) 1997-07-10 1997-07-10 Method for calibration of a spectroscopic sensor

Publications (1)

Publication Number Publication Date
TW367408B true TW367408B (en) 1999-08-21

Family

ID=25397347

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087111059A TW367408B (en) 1997-07-10 1998-07-08 Method for calibration of a spectroscopic sensor

Country Status (7)

Country Link
US (1) US5835230A (zh)
EP (1) EP0995106A1 (zh)
JP (1) JP2001509596A (zh)
KR (1) KR20010021565A (zh)
AU (1) AU8474098A (zh)
TW (1) TW367408B (zh)
WO (1) WO1999002972A1 (zh)

Families Citing this family (17)

* Cited by examiner, † Cited by third party
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US5991696A (en) * 1997-07-11 1999-11-23 American Air Liquide Inc. Method for intelligent data acquisition in a measurement system
US7148488B2 (en) * 2002-06-13 2006-12-12 University Of Hawaii Apparatus for measuring radiation and method of use
KR101023224B1 (ko) 2004-12-23 2011-03-21 재단법인 포항산업과학연구원 고온 구조물의 분위기온도 측정장치
KR101072434B1 (ko) 2004-12-23 2011-10-11 재단법인 포항산업과학연구원 광신호 스위칭장치 및 이를 이용한 가열소재의 온도측정방법
EP1876439A4 (en) * 2005-04-28 2010-04-14 Toyota Motor Co Ltd EXHAUST GAS ANALYZER
KR101279911B1 (ko) * 2007-05-07 2013-06-28 베러티 인스트루먼트, 인코퍼레이티드 오류 검출 및 처리 모니터링을 위해 사용되는 방사 분석 광학 모니터링 시스템의 보정
US7813895B2 (en) * 2007-07-27 2010-10-12 Applied Materials, Inc. Methods for plasma matching between different chambers and plasma stability monitoring and control
US8613520B2 (en) * 2008-07-11 2013-12-24 Li-Cor, Inc. Process of forming a light beam path in a dielectric mirror
US7943915B2 (en) * 2008-10-10 2011-05-17 Ge Infrastructure Sensing, Inc. Method of calibrating a wavelength-modulation spectroscopy apparatus
US7957001B2 (en) * 2008-10-10 2011-06-07 Ge Infrastructure Sensing, Inc. Wavelength-modulation spectroscopy method and apparatus
BR112015019859A2 (pt) 2013-03-28 2017-07-18 Halliburton Energy Services Inc sistema de calibração de sensor de ferramenta, e, método de calibração de ferramenta
EP3158319B1 (en) * 2014-06-19 2022-10-05 Danfoss IXA A/S Probe for gas sensor having purge gas protection
KR102315185B1 (ko) * 2015-02-25 2021-10-20 삼성디스플레이 주식회사 증착률 측정장치 및 그 방법
CN105466872A (zh) * 2015-12-30 2016-04-06 聚光科技(杭州)股份有限公司 原位式气体分析仪的标定方法
US10663344B2 (en) 2017-04-26 2020-05-26 Viavi Solutions Inc. Calibration for an instrument (device, sensor)
US10837902B2 (en) * 2017-08-21 2020-11-17 Tokyo Electron Limited Optical sensor for phase determination
KR20210142304A (ko) 2020-05-18 2021-11-25 삼성전자주식회사 광학센서의 캘리브레이션 방법과, 광학센서 및 생체정보 추정 장치

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US3524066A (en) * 1966-08-22 1970-08-11 Monsanto Co Fluid measurement system having sample chamber with opposed reflecting members for causing multiple reflections
US4167665A (en) * 1977-10-31 1979-09-11 Dasibi Environmental Corporation Automatic calibration circuit for gas analyzers
FR2448134A1 (fr) * 1979-01-30 1980-08-29 Commissariat Energie Atomique Dispositif spectrophotometrique pour mesure a distance
US4322621A (en) * 1980-05-05 1982-03-30 Honeywell Inc. Folded path absorption cell gas sensor
GB2165640B (en) * 1984-10-13 1988-05-18 Stc Plc Gas or vapour concentration monitoring
US4888484A (en) * 1986-02-20 1989-12-19 Automatik Machinery Corporation Apparatus and method for spectrophotometric analysis of a material in a moving process stream
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US4937461A (en) * 1988-08-22 1990-06-26 Traina John E Transmissometer having solid state light source
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Also Published As

Publication number Publication date
JP2001509596A (ja) 2001-07-24
AU8474098A (en) 1999-02-08
WO1999002972A1 (en) 1999-01-21
US5835230A (en) 1998-11-10
EP0995106A1 (en) 2000-04-26
KR20010021565A (ko) 2001-03-15

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