TW362287B - Vialess integrated inductive elements for electro magnetic applications - Google Patents

Vialess integrated inductive elements for electro magnetic applications

Info

Publication number
TW362287B
TW362287B TW087101261A TW87101261A TW362287B TW 362287 B TW362287 B TW 362287B TW 087101261 A TW087101261 A TW 087101261A TW 87101261 A TW87101261 A TW 87101261A TW 362287 B TW362287 B TW 362287B
Authority
TW
Taiwan
Prior art keywords
vialess
inductive elements
electro magnetic
magnetic applications
integrated inductive
Prior art date
Application number
TW087101261A
Other languages
Chinese (zh)
Inventor
A Bruno Frazier
Original Assignee
Univ Utah Res Found
Priority date (The priority date is an assumption and is not a legal conclusion. Google has not performed a legal analysis and makes no representation as to the accuracy of the date listed.)
Filing date
Publication date
Application filed by Univ Utah Res Found filed Critical Univ Utah Res Found
Application granted granted Critical
Publication of TW362287B publication Critical patent/TW362287B/en

Links

Classifications

    • H—ELECTRICITY
    • H10—SEMICONDUCTOR DEVICES; ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N—ELECTRIC SOLID-STATE DEVICES NOT OTHERWISE PROVIDED FOR
    • H10N50/00—Galvanomagnetic devices
    • H10N50/80—Constructional details
    • H—ELECTRICITY
    • H01—ELECTRIC ELEMENTS
    • H01F—MAGNETS; INDUCTANCES; TRANSFORMERS; SELECTION OF MATERIALS FOR THEIR MAGNETIC PROPERTIES
    • H01F17/00—Fixed inductances of the signal type 
    • H01F17/0006—Printed inductances
    • H01F17/0033—Printed inductances with the coil helically wound around a magnetic core

Landscapes

  • Engineering & Computer Science (AREA)
  • Power Engineering (AREA)
  • Microelectronics & Electronic Packaging (AREA)
  • Coils Or Transformers For Communication (AREA)
  • Semiconductor Integrated Circuits (AREA)
  • Manufacturing Cores, Coils, And Magnets (AREA)
  • Burglar Alarm Systems (AREA)

Abstract

An inductor suitable for integration in VLSI circuits and devices is fabricated by means of a post foundry procedure involving the deposition and patterning of layers of conductor material, isolation material, core material, isolation material and conductor material to produce conductive coils wrapped around a magnetic core without the need for vias. The fabrication steps utilize a combination of microelectronic and micromachining technologies.
TW087101261A 1997-02-03 1998-02-03 Vialess integrated inductive elements for electro magnetic applications TW362287B (en)

Applications Claiming Priority (1)

Application Number Priority Date Filing Date Title
US79433897A 1997-02-03 1997-02-03

Publications (1)

Publication Number Publication Date
TW362287B true TW362287B (en) 1999-06-21

Family

ID=25162366

Family Applications (1)

Application Number Title Priority Date Filing Date
TW087101261A TW362287B (en) 1997-02-03 1998-02-03 Vialess integrated inductive elements for electro magnetic applications

Country Status (7)

Country Link
EP (1) EP1000442A4 (en)
JP (1) JP2002513511A (en)
KR (1) KR20000070732A (en)
AU (1) AU6052498A (en)
CA (1) CA2279297A1 (en)
TW (1) TW362287B (en)
WO (1) WO1998034287A1 (en)

Families Citing this family (3)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
WO2007072375A2 (en) * 2005-12-22 2007-06-28 Koninklijke Philips Electronics N.V. Method for manufacturing a microelectronic device, wherein at least one electrically conductive winding is arranged around a ferrite core element
CN108426380A (en) * 2018-03-13 2018-08-21 桑夏太阳能股份有限公司 A kind of solar energy photovoltaic photo-thermal compound heat collector
WO2019220862A1 (en) * 2018-05-18 2019-11-21 株式会社村田製作所 Inductor and method for producing same

Family Cites Families (9)

* Cited by examiner, † Cited by third party
Publication number Priority date Publication date Assignee Title
US3614554A (en) * 1968-10-24 1971-10-19 Texas Instruments Inc Miniaturized thin film inductors for use in integrated circuits
US3881244A (en) * 1972-06-02 1975-05-06 Texas Instruments Inc Method of making a solid state inductor
US3858138A (en) * 1973-03-05 1974-12-31 Rca Corp Tuneable thin film inductor
US4082916A (en) * 1976-12-16 1978-04-04 Westinghouse Electric Corporation Encapsulated electrical inductive apparatus
US4600911A (en) * 1984-03-20 1986-07-15 Pauwels-Trafo Belgium N.V. Elliptically shaped magnetic core
US4848684A (en) * 1986-11-22 1989-07-18 Kitamura Kiden Co., Ltd. Wound core having circular and elliptic outer surface portions
US5070317A (en) * 1989-01-17 1991-12-03 Bhagat Jayant K Miniature inductor for integrated circuits and devices
JPH05166623A (en) * 1991-12-12 1993-07-02 Matsushita Electric Ind Co Ltd Small fixed coil
US5279988A (en) * 1992-03-31 1994-01-18 Irfan Saadat Process for making microcomponents integrated circuits

Also Published As

Publication number Publication date
KR20000070732A (en) 2000-11-25
CA2279297A1 (en) 1998-08-06
EP1000442A1 (en) 2000-05-17
AU6052498A (en) 1998-08-25
JP2002513511A (en) 2002-05-08
EP1000442A4 (en) 2000-05-17
WO1998034287A1 (en) 1998-08-06

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